CN106906479B - The surface treatment method of air-float guide rail - Google Patents
The surface treatment method of air-float guide rail Download PDFInfo
- Publication number
- CN106906479B CN106906479B CN201510980775.4A CN201510980775A CN106906479B CN 106906479 B CN106906479 B CN 106906479B CN 201510980775 A CN201510980775 A CN 201510980775A CN 106906479 B CN106906479 B CN 106906479B
- Authority
- CN
- China
- Prior art keywords
- guide rail
- air
- float guide
- reaction cavity
- surface treatment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
- C23G5/00—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Cleaning In General (AREA)
Abstract
The surface treatment method of air-float guide rail of the invention, including air-float guide rail is placed in plasm reaction cavity；Pressure in the plasm reaction cavity is adjusted to the first value；Oxygen and argon gas are passed through to the plasm reaction cavity；The anode rf frequency for controlling the plasm reaction cavity is 50~100KHz, and cathode rf frequency is 20~30MHz, to realize first time glow discharge.The organic residue on energy high-efficiency washing air-float guide rail surface of the present invention reduces frictional force, to guarantee surface smooth pieces to improve job stability and precision and prolong the service life.
Description
Technical field
The present invention relates to air-float guide rail field more particularly to a kind of surface treatment methods of air-float guide rail.
Background technique
Air-float guide rail is based on gas dynamic and static pressure effect and realizes without friction and vibrationless smooth movement, with kinematic accuracy
The features such as height, cleanliness without any pollution.Because of its Panel-corrected Model, higher guiding essence can be obtained with the relatively low accuracy of manufacture
Degree, usually and servo-drive, sensor form closed-loop system, realize high precision displacement positioning.Therefore, air-float guide rail is being surveyed at present
It is used widely in measuring appratus, precision machinery such as numerically-controlled machine tool.And the precision of air-float guide rail and its cleannes are closely bound up,
In order to guarantee precision, periodic cleaning seems particularly significant.
The method for cleaning surface of traditional air-float guide rail is that pond is added in cleaning solution, using ultrasonic activation come purgative gas
Floating guide rail, this method can effectively improve the cleannes of air-float guide rail.However, once purged air-float guide rail surface can have cleaning solution
It remains (often organic substance residues), these organic substance residues can bring the vibration of high-speed bearing, noise, abnormal sound, to reduce
Job stability reduces the mechanical precision such as numerical control device, shortens the working life.
So needing a kind of improved processing method to overcome above-mentioned defect.
Summary of the invention
The purpose of the present invention is to provide a kind of surface treatment methods of air-float guide rail, can high-efficiency washing air-float guide rail table
The organic residue in face reduces frictional force, to guarantee surface smooth pieces to improve job stability and precision and extend
Service life.
To achieve the above object, the surface treatment method of air-float guide rail of the invention, comprising:
Air-float guide rail is placed in plasm reaction cavity；
Pressure in the plasm reaction cavity is adjusted to the first value；
Oxygen and argon gas are passed through to the plasm reaction cavity；
Control the plasm reaction cavity anode rf frequency be 50~100KHz, cathode rf frequency be 20~
30MHz, to realize first time glow discharge.
Compared with prior art, air-float guide rail surface treatment method of the invention, by plasm reaction cavity
Anodic-cathodic applies high-frequency and high-voltage, so that glow discharge occur, argon plasma, the oxygen plasma of generation bombard air-float guide rail
Surface, so that the organic dirt on air-float guide rail surface be made to fall off, aoxidize, decompose, and then guarantee surface smooth pieces, reduction rubs
Power is wiped, to improve job stability and precision and prolong the service life.
Preferably, the time for controlling the first time glow discharge is 600~700 seconds.
Preferably, first value is 400~500pa.
Preferably, the flow of the oxygen is 50~100sccm.
Preferably, the flow of the argon gas is 400~500sccm.
As a preferred embodiment, further includes second of glow discharge, specifically includes:
The pressure in the plasm reaction cavity is adjusted to second value, the second value is greater than first value；
Oxygen and argon gas are passed through to the plasm reaction cavity, and the flow of the oxygen and the argon gas is respectively less than described
Flow when first time glow discharge；
Control the plasm reaction cavity anode rf frequency be 10~15MHz, cathode rf frequency be 2~
5GHz。
Preferably, the flow of oxygen described in second of the glow discharge is 40~60sccm, the flow of the argon gas
For 300~350sccm.
Preferably, the time of control second of the glow discharge is 600~700 seconds.
Specific embodiment
It is described further, but is not so limited below with reference to surface treatment method of the embodiment to air-float guide rail of the present invention
The present invention.
The surface treatment method of air-float guide rail of the invention is in air-float guide rail through over cleaning (such as ultrasonic activation cleaning)
After carry out, the organic substance residues on surface can be effectively removed and improve job stability.
The purpose of a preferred embodiment of the present invention includes glow discharge process twice, first time glow discharge process is clear
Except organic matter remained on surface, the purpose of second of glow discharge process is to reduce the roughness on air-float guide rail surface to improve work
Stability.
Specifically, first time glow discharge the following steps are included:
Air-float guide rail is placed in plasm reaction cavity；
The pressure in plasm reaction cavity is adjusted to the first value；
Oxygen and argon gas are passed through to plasm reaction cavity；
The anode rf frequency for controlling plasm reaction cavity is 50~100KHz, and cathode rf frequency is 20~30MHz.
Specifically, it by the pressure in connection vacuum pump adjusting plasm reaction cavity to 400~500pa, such as takes seriously
Reciprocal of duty cycle is passed through argon gas and oxygen in 450pa, and wherein the flow of oxygen is 50~100sccm, and the flow of argon gas is 400~
500sccm.Then the anode rf frequency for controlling plasm reaction cavity is 50~100KHz, such as 80KHz is preferred, and cathode is penetrated
Frequent rate is 20~30MHz, such as 27.12MHz is preferred.Being kept for the radio-frequency glow time is 600~700 seconds.Pass through first as a result,
The air-float guide rail of secondary radio-frequency glow discharge treatment, the organic matter on surface can be oxidized, decompose to fall off.
Second of glow discharge the following steps are included:
The pressure in plasm reaction cavity is adjusted to second value, the second value is greater than first value；
Oxygen and argon gas are passed through to plasm reaction cavity, and the flow of the oxygen and the argon gas is respectively less than described first
Flow when secondary glow discharge；
Control the plasm reaction cavity anode rf frequency be 10~15MHz, cathode rf frequency be 2~
5GHz。
Specifically, the vacuum degree of reaction chamber is adjusted in 800pa, and reduces the flow of oxygen and argon gas, wherein the stream of oxygen
Amount is 40~60sccm, and the flow of argon gas is 300~350sccm.In the present embodiment, anode rf frequency is 13.56MHz,
Anode rf frequency is 2.45GHz.Being kept for the radio-frequency glow time is 600~700 seconds.The surface of air-float guide rail by penetrating for the second time
After frequency glow discharge process, become more smooth pieces, frictional force is reduced, to improve job stability.
To sum up, air-float guide rail surface treatment method of the invention, by being applied to the anodic-cathodic in plasm reaction cavity
Add high-frequency and high-voltage, so that glow discharge occur, argon plasma, the oxygen plasma of generation bombard the surface of air-float guide rail, from
And so that the organic dirt on air-float guide rail surface fallen off, aoxidize, decomposed, and then guarantee surface smooth pieces, frictional force is reduced, to mention
High operational stability and precision simultaneously prolong the service life.
Above disclosed is only presently preferred embodiments of the present invention, cannot limit the right of the present invention with this certainly
Range, therefore according to equivalent variations made by scope of the present invention patent, it is still within the scope of the present invention.
Claims (7)
1. a kind of surface treatment method of air-float guide rail, comprising:
Air-float guide rail is placed in plasm reaction cavity；
Pressure in the plasm reaction cavity is adjusted to the first value；
Oxygen and argon gas are passed through to the plasm reaction cavity；
The anode rf frequency for controlling the plasm reaction cavity is 50~100KHz, and cathode rf frequency is 20~30MHz,
To realize first time glow discharge；It is characterized in that, further including second of glow discharge, specifically include:
The pressure in the plasm reaction cavity is adjusted to second value, the second value is greater than first value；
Oxygen and argon gas are passed through to the plasm reaction cavity, and the flow of the oxygen and the argon gas is respectively less than described first
Flow when secondary glow discharge；
The anode rf frequency for controlling the plasm reaction cavity is 10~15MHz, and cathode rf frequency is 2~5GHz.
2. the surface treatment method of air-float guide rail as described in claim 1, it is characterised in that: control the first time aura and put
The time of electricity is 600~700 seconds.
3. the surface treatment method of air-float guide rail as described in claim 1, it is characterised in that: first value be 400~
500Pa。
4. the surface treatment method of air-float guide rail as described in claim 1, it is characterised in that: in the first time glow discharge
The flow of the oxygen is 50~100sccm.
5. the surface treatment method of air-float guide rail as described in claim 1, it is characterised in that: in the first time glow discharge
The flow of the argon gas is 400~500sccm.
6. the surface treatment method of air-float guide rail as described in claim 1, it is characterised in that: in second of the glow discharge
The flow of the oxygen is 40~60sccm, and the flow of the argon gas is 300~350sccm.
7. the surface treatment method of air-float guide rail as described in claim 1, it is characterised in that: control second of aura is put
The time of electricity is 600~700 seconds.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510980775.4A CN106906479B (en) | 2015-12-22 | 2015-12-22 | The surface treatment method of air-float guide rail |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510980775.4A CN106906479B (en) | 2015-12-22 | 2015-12-22 | The surface treatment method of air-float guide rail |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106906479A CN106906479A (en) | 2017-06-30 |
| CN106906479B true CN106906479B (en) | 2019-10-29 |
Family
ID=59200138
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510980775.4A Active CN106906479B (en) | 2015-12-22 | 2015-12-22 | The surface treatment method of air-float guide rail |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106906479B (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104971926A (en) * | 2014-04-02 | 2015-10-14 | 苏州科技学院 | Cleaning method of high-speed bearing part |
| CN105002462A (en) * | 2015-06-26 | 2015-10-28 | 金华万得福日用品股份有限公司 | Rose gold tableware coating method |
-
2015
- 2015-12-22 CN CN201510980775.4A patent/CN106906479B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104971926A (en) * | 2014-04-02 | 2015-10-14 | 苏州科技学院 | Cleaning method of high-speed bearing part |
| CN105002462A (en) * | 2015-06-26 | 2015-10-28 | 金华万得福日用品股份有限公司 | Rose gold tableware coating method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106906479A (en) | 2017-06-30 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| WO2008087843A1 (en) | Plasma processing apparatus, plasma processing method and storage medium | |
| CN104971926A (en) | Cleaning method of high-speed bearing part | |
| CN103915330A (en) | Substrate etching method | |
| TW200703471A (en) | Plasma doping method and plasma processing equipment | |
| CN207587690U (en) | Non-thermal soft plasma cleans system | |
| CN106906479B (en) | The surface treatment method of air-float guide rail | |
| JPWO2007063987A1 (en) | Processing and cleaning method and apparatus using ultrapure water plasma bubbles | |
| TW200710972A (en) | Method and process for reactive gas cleaning of tool parts | |
| CN105034180A (en) | Micro-arc discharging micro-fine cutting device and method for SiC single crystal wafer | |
| CN101413106B (en) | Surface modification method for GCr15 plunger matching parts by injecting nitrogen and carbon plasma ions | |
| CN114405935A (en) | Environment-friendly metal surface rust and dirt removing cleaning method | |
| MX2010004854A (en) | Method for manufacturing a treated surface and vacuum plasma sources. | |
| CN206799789U (en) | A kind of line Pipe surface derusting device | |
| CN108080356B (en) | Polishing treatment method of air spindle | |
| CN103871865B (en) | A kind of method of cleaning plasma reaction chamber sidewall | |
| TW200731397A (en) | Etching processing method | |
| JP6381984B2 (en) | Membrane removal method and membrane removal apparatus | |
| DE502005006162D1 (en) | Method for operating a vacuum plasma process plant | |
| Ali et al. | Investigation of taper angle in dry micro wire EDM | |
| JP2012174922A (en) | Cleaning gas and remote plasma cleaning method using the same | |
| KR101295786B1 (en) | Fabrication method of micro tool electrodes using wear ratio | |
| Limcharoen et al. | A polymer-rich re-deposition technique for non-volatile etching by-products in reactive ion etching systems | |
| JP2015149209A (en) | roller type plasma device | |
| KR101738524B1 (en) | Remote Plasma Cleaning Method and Cleaning Apparatus | |
| CN204736347U (en) | SiC single -chip differential of arc fine cutting equipment that discharges |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |