CN106893982A - A kind of coldplate and evaporation coating device - Google Patents
A kind of coldplate and evaporation coating device Download PDFInfo
- Publication number
- CN106893982A CN106893982A CN201710201664.8A CN201710201664A CN106893982A CN 106893982 A CN106893982 A CN 106893982A CN 201710201664 A CN201710201664 A CN 201710201664A CN 106893982 A CN106893982 A CN 106893982A
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- Prior art keywords
- plate body
- coldplate
- cooling lines
- temperature
- coating device
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/541—Heating or cooling of the substrates
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses a kind of coldplate and evaporation coating device.Coldplate includes：Plate body；Multiple cooling lines in parallel, are arranged in plate body, for carrying out subregion cooling to plate body at intervals；And the multiple flow valves connected one to one with cooling line, the flow for corresponding the coolant in the multiple cooling lines of regulation.The coldplate that the present invention is provided, the cooling line of multiple parallel connections is provided with plate body at intervals, multiple cooling lines connect one to one with multiple flow valves, multiple cooling lines in parallel are used to carry out subregion cooling to plate body, multiple flow valves are used to correspond the flow of the coolant in the multiple cooling lines of regulation, to cause the temperature in each region on plate body consistent, it is ensured that the deformation unification of mask plate different zones when evaporation coating device is applied to, the vapor deposition accuracy of glass substrate can be higher.
Description
Technical field
Present document relates to but be not limited to lcd technology, espespecially a kind of coldplate and a kind of evaporation coating device.
Background technology
By the development of nearly 30 years, (English full name was Organic Light Emitting to organic electroluminescence device
Device, referred to as OLED) used as illumination of future generation and Display Technique, wide with colour gamut, response is fast, high-contrast etc. a little,
It is widely used in illumination and display.Current OLED mainly uses vacuum evaporatation (abbreviation vacuum
Vapour deposition method) preparation of organic luminous layer is carried out, vacuum evaporatation is to evaporation material in vacuum evaporation room by vapor deposition source
Material is heated, and the atom of deposition material or molecule gasification effusion is formed steam stream, incides substrate to be deposited (i.e.：Glass
Substrate) surface, the method that condensation forms solid film.Vacuum vapour deposition has been widely used for the manufacturing process of display device,
The negative electrode of such as OLED display panel, anode and the luminous material layer between negative electrode and anode.
Existing evaporation coating device is arranged in vacuum evaporation room, and the lower section of evaporation coating device sets evaporation source, evaporation coating device bag
The roof of connecting pole, mounting bracket and coldplate, connecting pole connection mounting bracket and vacuum evaporation room is included, coldplate is arranged on mounting bracket
On, substrate and mask plate be fixed on the lower face of coldplate in evaporation and be supported by the lower end of mounting bracket it is spacing, it is cold
But many bar magnets are installed (i.e. on the upper face of plate：Magnetic part), for adsorbing mask plate, while making mask plate pressed glass base
In on coldplate, mask plate, glass substrate and coldplate are layered in the surface of deposition source unit to plate from bottom to top.When to glass
When substrate is deposited with, due to evaporation source continuous heating, the deposition material of high-temperature gasification is constantly deposited on substrate and mask plate,
Can raise the temperature of substrate and mask plate, high temperature can make the mask plate that metal material is made deform, so as to cause evaporation
Pattern out deforms.The OLED product neededs for making PPI high (pixel-intensive) at present use high accuracy mask plate, and high
, up within 1 micron, the control requirement to temperature change is very high, and temperature raises 1-2 degrees Celsius and all can for the high precision of precision mask plate
Because deformation makes evaporation pattern out undesirable, so being needed on high accuracy mask plate plus coldplate, interior logical cooling
Liquid is reducing the change of mask plate temperature.
Existing evaporation coating device, is provided with one whole coolant duct in coldplate, reduced by the coolant duct
Cooling plate temperature, the temperature of glass substrate and mask plate on the cooling plate so that related reduction is fitted.But outside due to mask plate
Circle be the stainless steel frame of 10~50 millimeters thicks (i.e.：Mounting bracket), it is 20~50 microns of Invar alloys of thickness inside mask plate
(i.e.：Invar alloy), Invar alloy surfaces have an opening not of uniform size, therefore different zones temperature on whole mask plate when being heated
Degree is different, and different zones can still have temperature difference on mask plate after being lowered the temperature using existing coldplate, causes mask plate different
Regional deformation is different, influences vapor deposition accuracy.
The content of the invention
At least one of in order to solve the above-mentioned technical problem, there is provided herein a kind of coldplate, each region on its plate body
Temperature it is consistent, unified with the deformation for ensuring the mask plate different zones during evaporation, the vapor deposition accuracy of glass substrate can be more
It is high.
In order to reach this paper purposes, the invention provides a kind of coldplate, including：Plate body；Multiple cooling lines in parallel,
It is arranged at intervals in the plate body, for carrying out subregion cooling to the plate body；And corresponded with the cooling line
Multiple flow valves of connection, the flow for corresponding the coolant in the multiple cooling lines of regulation.
Alternatively, multiple flow valves are respectively positioned in the plate body and correspond and are arranged on multiple cooling tubes
Lu Shang.
Alternatively, the coldplate also includes：Feed liquor be responsible for, be arranged in the plate body, and the feed liquor supervisor one
End is connected with one end of multiple cooling lines, the other end is used for external connection.
Alternatively, the coldplate also includes：Go out liquid supervisor, be arranged in the plate body, and it is described go out liquid supervisor one
End is connected with the other end of multiple cooling lines, the other end is used for external connection.
Alternatively, multiple cooling lines, feed liquor supervisor and it is described go out liquid supervisor be shaping in the body
Passage, and be provided with the plate body feed liquor supervisor's external connection the first connection mouth and it is described go out liquid supervisor it is external
Second connection mouth of connection.
Alternatively, multiple cooling lines are distributed in the plate body and are covered with the plate body, and multiple coolings
Pipeline is in the plate body by row's multiple row arrangement or multiple rows of multiple row arrangement.
Alternatively, the coldplate also includes：Multiple temperature sensors, are arranged on the plate body and corresponding to multiple
The cooling line arrangement, the temperature for detecting each area formed on the plate body.
Alternatively, at least uniform two temperature sensors in the plate body Shang Ge areas.
It is present invention also offers a kind of evaporation coating device including cold described in mounting bracket, magnetic part and any of the above-described embodiment
But plate, the coldplate is arranged on the mounting bracket, and the magnetic part is arranged on the plate body, is deposited with for magnetic suck and used
Mask plate.
Alternatively, the evaporation coating device also includes：Control unit, at the same with multiple temperature sensors and multiple streams
Amount valve electrical connection, control each for the temperature in each area of the plate body detected according to multiple temperature sensors described in
The aperture of flow valve.
Compared with prior art, the cooling of multiple parallel connections is provided with the coldplate that the present invention is provided, plate body at intervals
Pipeline, multiple cooling lines connect one to one with multiple flow valves, and multiple cooling lines in parallel are used to divide plate body
Area cools down, and multiple flow valves are used to correspond the flow of the coolant in the multiple cooling lines of regulation, to cause plate body
The temperature in upper each region is consistent, it is ensured that the deformation unification of mask plate different zones, glass substrate when evaporation coating device is applied to
Vapor deposition accuracy can be higher.
The further feature and advantage of this paper will illustrate in the following description, also, partly become from specification
It is clear that or by implementing to understand herein.The purpose of this paper and other advantages can be by specification, claims
And specifically noted structure is realized and obtained in accompanying drawing.
Brief description of the drawings
Accompanying drawing is used for providing further understanding this paper technical schemes, and constitutes a part for specification, with this Shen
Embodiment please is used to explain the technical scheme of this paper together, does not constitute the limitation to this paper technical schemes.
Fig. 1 is the structural representation of the evaporation coating device described in one embodiment of the invention；
Fig. 2 is the cross section structure diagram of the coldplate one embodiment in Fig. 1；
The cross section structure diagram of coldplate another embodiment in Fig. 3 and Fig. 1.
Wherein, the corresponding relation in Fig. 1 to Fig. 3 between reference and component names is：
1 plate body, 2 cooling lines, 3 flow valves, 4 feed liquors supervisor, 5 go out liquid supervisor, 6 coldplates, 7 mounting brackets, 8 magnetic parts, 9
Glass substrate, 10 mask plates, 11 vacuum evaporation rooms, 12 connecting poles, 13 evaporation sources.
Specific embodiment
For the purpose, technical scheme and advantage for making this paper become more apparent, below in conjunction with accompanying drawing to the reality of this paper
Example is applied to be described in detail.It should be noted that in the case where not conflicting, the spy in embodiment and embodiment in the application
Levying mutually to be combined.
Many details being elaborated in the following description in order to fully understand herein, but, can also adopt herein
Mode described here is different from other to implement, therefore, the protection domain of this paper does not receive following public specific implementation
The limitation of example.
The coldplate and evaporation coating device of some embodiments herein are described below in conjunction with the accompanying drawings.
The coldplate 6 that the present invention is provided, as shown in Figures 2 and 3, including：Plate body 1；Multiple cooling lines 2 in parallel, phase
It is spaced apart and arranged in the plate body 1, for carrying out subregion cooling to the plate body 1, (be divided into for plate body 1 by multiple cooling lines 2
Multiple regions)；And the multiple flow valves 3 connected one to one with the cooling line 2, for corresponding the multiple institutes of regulation
State the flow of the coolant in cooling line 2.
The cooling line 2 of multiple parallel connections, multiple cooling are provided with the coldplate 6 that the present invention is provided, plate body 1 at intervals
Pipeline 2 connects one to one with multiple flow valves 3, and multiple cooling lines 2 in parallel are used to carry out plate body 1 subregion cooling, many
The individual flow valve 3 is used to correspond the flow of the coolant in the multiple cooling lines 2 of regulation, to cause the Shang Ge areas of plate body 1
The temperature in domain is consistent, it is ensured that the deformation unification of the different zones of mask plate 10, the steaming of glass substrate 9 when evaporation coating device is applied to
Plating precision can be higher.
Wherein, flow valve 3 can manually be controlled or the mode of Electronic control adjusts flow (i.e.：Aperture), can be real
The purpose of existing the application.And, when evaporation coating device is applied to, flow valve 3 can be located at the interior of vacuum evaporation room 11 to coldplate 6
Portion, can be also arranged in plate body 1 by being extended down to the outside of vacuum evaporation room 11 outside pipeline, can also be, be capable of achieving the application
Purpose, its objective will not be repeated here without departing from design philosophy of the invention, all should belong in the protection domain of the application.
Preferably, multiple flow valves 3 are respectively positioned in the plate body 1 and correspond and are arranged on multiple coolings
On pipeline 2.
Further, the coldplate 6 also includes：Feed liquor supervisor 4, is arranged in the plate body 1, and the feed liquor is responsible for
4 one end is connected with one end of multiple cooling lines 2, the other end is used for external connection.
Feed liquor supervisor 4 is located at one end of plate body 1, and the coolant in feed liquor supervisor 4 is entered into and carried out in multiple cooling lines 2
Shunting.
Yet further, the coldplate 6 also includes：Go out liquid supervisor 5, be arranged in the plate body 1, and it is described go out liquid master
One end of pipe 5 is connected with the other end of multiple cooling lines 2, the other end is used for external connection.
Go out the other end that liquid supervisor 5 is located at body, the coolant in multiple cooling lines 2 is entered into out to be entered in liquid supervisor 5
Row interflow.
Wherein, feed liquor supervisor 4 can also be the multiple being arranged in parallel, and it can also be the multiple being arranged in parallel to go out liquid supervisor 5,
Also the purpose of the application can be realized, its objective will not be repeated here without departing from design philosophy of the invention, all should belong to the application
Protection domain in.
Preferably, multiple cooling lines 2, feed liquor supervisor 4 and it is described go out liquid supervisor 5 be in the body into
The passage of type.And be provided with the plate body 1 feed liquor be responsible for 4 external connections the first connection mouth and it is described go out liquid supervisor
Second connection mouth of 5 external connections, to be convenient to the pipeline that external connection conveys coolant.
Wherein, multiple cooling lines 2 are distributed in the plate body 1 and are covered with the plate body 1, with preferably to plate
The temperature in the Shang Ge areas of body 1 is controlled so that the temperature in the Shang Ge areas of plate body 1 is consistent, also just can preferably to being fixed on plate
Mask plate 10 on body 1 is cooled down, so that it is guaranteed that the temperature in each region is consistent on mask plate 10, it is ensured that the steaming of glass substrate 9
Plating precision is higher.
Multiple cooling lines 2 are in the plate body 1 by row's multiple row arrangement (as shown in Figure 2) or multiple rows of multiple row arrangement
(as shown in Figure 3), is capable of achieving the purpose of the application, and its objective will not be repeated here without departing from design philosophy of the invention,
Should belong in the protection domain of the application.
Preferably, the cooling line 2 in any row be parallel to each other, spacing it is equal.
Furthermore, the coldplate 6 also includes：Multiple temperature sensor (not shown)s, be arranged on the plate body 1,
And arranged corresponding to multiple cooling lines 2, the temperature for detecting each area formed on the plate body 1.
The temperature in the Shang Ge areas of multiple temperature sensor senses plate bodys 1, the flow of each flow valve 3 of comprehensive adjustment is carried out with this,
So that the temperature of each position is identical on plate body 1.
Can also be that infrared temperature sensor is set in vacuum evaporation room 11, by infrared temperature sensor to plate body 1
The temperature in upper each region is controlled, then coordinates flow valve 3 to adjust the flow of the coolant in cooling line 2, can also realize this
The purpose of application.
Alternatively, at least uniform two temperature sensors in the Shang Ge areas of the plate body 1, more accurately to detect
The temperature of each position on plate body 1.
The evaporation coating device that the present invention is provided, as shown in figure 1, including mounting bracket 7, magnetic part 8 and any of the above-described embodiment institute
The coldplate 6 stated, the coldplate 6 is arranged on the mounting bracket 7, and the magnetic part 8 is arranged on the plate body 1, is used for
The mask plate 10 of magnetic suck evaporation.
The evaporation coating device that the present invention is provided, possesses all advantages of the coldplate 6 of any of the above-described embodiment, no longer goes to live in the household of one's in-laws on getting married herein
State.
Wherein, mounting groove is provided with plate body 1, magnetic part 8 is arranged in the mounting groove, the company of being provided with mounting bracket 7
Connect post 12.
Preferably, the evaporation coating device also includes：Control unit (not shown), at the same with multiple temperature sensors with
And multiple flow valves 3 are electrically connected, the temperature in each area of the plate body 1 for being detected according to multiple temperature sensors
To control the aperture of each flow valve 3, automation regulation is realized, better ensure that the temperature in the Shang Ge areas of plate body 1 is consistent.
Label 13 is evaporation source in Fig. 1.
In sum, the cooling line of multiple parallel connections is provided with the coldplate that the present invention is provided, plate body at intervals, it is many
Individual cooling line connects one to one with multiple flow valves, and multiple cooling lines in parallel are used to carry out subregion cooling to plate body,
Multiple flow valves are used to correspond the flow of the coolant in the multiple cooling lines of regulation, to cause each region on plate body
Temperature it is consistent, it is ensured that when evaporation coating device is applied to mask plate different zones deformation unification, glass substrate evaporation essence
Du Kegenggao.
In description herein, term " installation ", " connected ", " connection ", " fixation " etc. all should be interpreted broadly, for example,
" connection " can be fixedly connected, or be detachably connected, or be integrally connected；Can be joined directly together, it is also possible to logical
Intermediary is crossed to be indirectly connected to.For the ordinary skill in the art, above-mentioned term can as the case may be understood
Concrete meaning herein.
In the description of this specification, the description of term " one embodiment ", " some embodiments ", " specific embodiment " etc.
Mean that the specific features, structure, material or the feature that are described with reference to the embodiment or example are contained at least one implementation of this paper
In example or example.In this manual, the schematic representation to above-mentioned term is not necessarily referring to identical embodiment or example.
And, the specific features of description, structure, material or feature can be in one or more any embodiments or example with suitable
Mode combine.
Although implementation method disclosed herein is as above, described content is only the implementation for readily appreciating and using herein
Mode, is not limited to herein.Technical staff in any this paper arts, do not depart from spirit disclosed herein and
On the premise of scope, can implement form and details on carry out any modification with change, but this paper patent protection model
Enclose, must be still defined by the scope of which is defined in the appended claims.
Claims (10)
1. a kind of coldplate, it is characterised in that including：
Plate body；With
Multiple cooling lines in parallel, are arranged in the plate body, for carrying out subregion cooling to the plate body at intervals；With
The multiple flow valves connected one to one with the cooling line, for corresponding in the multiple cooling lines of regulation
Coolant flow.
2. coldplate according to claim 1, it is characterised in that multiple flow valves be respectively positioned in the plate body and
Correspond and be arranged on multiple cooling lines.
3. coldplate according to claim 2, it is characterised in that also include：
Feed liquor is responsible for, and is arranged in the plate body, and one end and multiple cooling lines of feed liquor supervisor one end phase
Connection, the other end are used for external connection.
4. coldplate according to claim 3, it is characterised in that also include：
Go out liquid supervisor, be arranged in the plate body, and it is described go out liquid supervisor one end and multiple cooling lines the other end
It is connected, the other end is used for external connection.
5. coldplate according to claim 4, it is characterised in that multiple cooling lines, feed liquor supervisor and institute
State out liquid supervisor and be the passage of shaping in the body, and the of the feed liquor supervisor external connection is provided with the plate body
One connection mouth and it is described go out liquid supervisor external connection second connection mouth.
6. coldplate according to any one of claim 1 to 5, it is characterised in that multiple cooling lines are distributed on
The plate body is interior and is covered with the plate body, and multiple cooling lines are arranged or multiple rows of in the plate body by row's multiple row
Multiple row is arranged.
7. coldplate according to any one of claim 1 to 5, it is characterised in that also include：
Multiple temperature sensors, are arranged on the plate body and are arranged corresponding to multiple cooling lines, described for detecting
The temperature in each area formed on plate body.
8. evaporation coating device according to claim 7, it is characterised in that at least uniform two institutes in the plate body Shang Ge areas
State temperature sensor.
9. a kind of evaporation coating device, it is characterised in that including mounting bracket, magnetic part and as any one of claim 1 to 8
Coldplate, the coldplate is arranged on the mounting bracket, and the magnetic part is arranged on the plate body, is deposited with for magnetic suck
Mask plate.
10. evaporation coating device according to claim 9, it is characterised in that also include：
Control unit, while electrically connected with multiple temperature sensors and multiple flow valves, for according to multiple temperature
The temperature in each area of the plate body that sensor is detected is spent to control the aperture of each flow valve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710201664.8A CN106893982A (en) | 2017-03-30 | 2017-03-30 | A kind of coldplate and evaporation coating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710201664.8A CN106893982A (en) | 2017-03-30 | 2017-03-30 | A kind of coldplate and evaporation coating device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106893982A true CN106893982A (en) | 2017-06-27 |
Family
ID=59193385
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710201664.8A Pending CN106893982A (en) | 2017-03-30 | 2017-03-30 | A kind of coldplate and evaporation coating device |
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| Country | Link |
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| CN (1) | CN106893982A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109023239A (en) * | 2018-09-05 | 2018-12-18 | 京东方科技集团股份有限公司 | Coldplate, coating apparatus |
| CN109735801A (en) * | 2019-01-31 | 2019-05-10 | 深圳市华星光电半导体显示技术有限公司 | Metal mask device |
| CN109868452A (en) * | 2019-03-19 | 2019-06-11 | 武汉华星光电半导体显示技术有限公司 | Coldplate and vacuum deposition apparatus |
| CN109913819A (en) * | 2019-03-29 | 2019-06-21 | 武汉华星光电半导体显示技术有限公司 | Coldplate, evaporation coating device and display panel |
| CN109945588A (en) * | 2019-03-18 | 2019-06-28 | 常州市乐萌压力容器有限公司 | A kind of coolant circulation system and control method applied on coating machine |
| WO2019127675A1 (en) * | 2017-12-29 | 2019-07-04 | 武汉华星光电半导体显示技术有限公司 | Cooling system and evaporator |
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| JP2007254827A (en) * | 2006-03-23 | 2007-10-04 | Fujitsu Ltd | Sputtering system and sputtering method |
| CN102197156A (en) * | 2008-11-12 | 2011-09-21 | 朗姆研究公司 | Improved substrate temperature control by using liquid controlled multizone substrate support |
| CN104846346A (en) * | 2015-05-20 | 2015-08-19 | 中国科学院宁波材料技术与工程研究所 | Control method and control device for temperature of substrate as well as film deposition equipment |
| CN105734494A (en) * | 2016-04-12 | 2016-07-06 | 京东方科技集团股份有限公司 | Vapor deposition support plate and vapor deposition device |
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| US20010047935A1 (en) * | 1998-08-28 | 2001-12-06 | Masatoshi Enomoto | Backing plate for sputtering |
| JP2007254827A (en) * | 2006-03-23 | 2007-10-04 | Fujitsu Ltd | Sputtering system and sputtering method |
| CN102197156A (en) * | 2008-11-12 | 2011-09-21 | 朗姆研究公司 | Improved substrate temperature control by using liquid controlled multizone substrate support |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019127675A1 (en) * | 2017-12-29 | 2019-07-04 | 武汉华星光电半导体显示技术有限公司 | Cooling system and evaporator |
| CN109023239A (en) * | 2018-09-05 | 2018-12-18 | 京东方科技集团股份有限公司 | Coldplate, coating apparatus |
| CN109735801A (en) * | 2019-01-31 | 2019-05-10 | 深圳市华星光电半导体显示技术有限公司 | Metal mask device |
| CN109945588A (en) * | 2019-03-18 | 2019-06-28 | 常州市乐萌压力容器有限公司 | A kind of coolant circulation system and control method applied on coating machine |
| CN109868452A (en) * | 2019-03-19 | 2019-06-11 | 武汉华星光电半导体显示技术有限公司 | Coldplate and vacuum deposition apparatus |
| CN109868452B (en) * | 2019-03-19 | 2021-01-01 | 武汉华星光电半导体显示技术有限公司 | Cooling plate and vacuum evaporation device |
| CN109913819A (en) * | 2019-03-29 | 2019-06-21 | 武汉华星光电半导体显示技术有限公司 | Coldplate, evaporation coating device and display panel |
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Application publication date: 20170627 |