CN106886228B - A kind of 3 Shaft angle micro-adjusting mechanisms - Google Patents
A kind of 3 Shaft angle micro-adjusting mechanisms Download PDFInfo
- Publication number
- CN106886228B CN106886228B CN201710299318.8A CN201710299318A CN106886228B CN 106886228 B CN106886228 B CN 106886228B CN 201710299318 A CN201710299318 A CN 201710299318A CN 106886228 B CN106886228 B CN 106886228B
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- China
- Prior art keywords
- adjusting rod
- back clearance
- clearance adjusting
- bearing
- worm
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D3/00—Control of position or direction
- G05D3/12—Control of position or direction using feedback
Abstract
The present invention provides a kind of 3 Shaft angle micro-adjusting mechanisms, belongs to corner micro-adjusting mechanism.Transition fine tuning mould worm component in the block is installed, worm component is connect with transition fine tuning module, and fine tuning module in end is equipped in transition fine adjustment stage on rack module.Advantage is structure novel, it solves uniaxial or two axis traditional corner micro-adjusting mechanisms and can not achieve the drawbacks of being adjusted around 3 Shaft angle posture informations, effectively reduce the inaccuracy of trim process caused by the axial moving that reversely back clearance is brought during Worm Wheel System;The rigidity of structure for increasing end fine tuning module, solves the adjustment inaccuracy that reversed back clearance is brought in screw pair motion process, effectively avoids the possibility that the original posture for exerting a force and bringing since locking process is secondary in conventional angle micro-adjusting mechanism is destroyed.The mechanism self-locking performance is good, and Adjustment precision is high, and method of adjustment is easily achieved.
Description
Technical field
The present invention relates to a kind of corner micro-adjusting mechanisms, refer in particular to a kind of 3 Shaft angle micro-adjusting mechanisms.
Background technology
The posture information of Rigid Body In Space includes the corner information around 3 axis, to be realized in Rigid Body In Space posture information
The high-acruracy survey of any component don't fail to ensure obliquity sensor etc. for measuring Rigid Body In Space appearance at the beginning of measurement
There is consistent posture relationship between the measuring instrument of state information, with rigid body to be measured.However, complete measuring instrument relative to
After the coarse adjustment of the installation site of rigid body to be measured, to only rely upon the experience of worker, make measuring instrument and rigid body to be measured
Between posture relationship having the same be very difficult.Therefore, the installation carrier using corner micro-adjusting mechanism as measuring instrument,
It is further to solve the problems, such as this optimal path by means of the corner fine adjustment function of corner micro-adjusting mechanism.
Traditional corner micro-adjusting mechanism mainly has three big drawbacks:First, most of corner micro-adjusting mechanisms, are mostly directed to
Uniaxial or two axis corners fine tunings, therefore traditional single shaft or two Shaft angle micro-adjusting mechanisms tend not to realize around 3 axis
The adjustment of corner posture information.Second, most of corner micro-adjusting mechanism, all inevasible to have the problem of backlass,
One side backlass can bring the uncertainty of trim process, on the other hand then reduce the rigidity of structure, destroy and adjusted
The stability of journey.Third, most of traditional corner micro-adjusting mechanisms are in the trim process for realizing corner, it is often necessary to pine in advance
Secondly open locking device could carry out the adjustment around each Shaft angle, finally locked again after the fine tuning for realizing corner.
However can not ignore, since locking process is a process to exert a force again, which very likely makes micro-adjusting mechanism again
It is secondary to shift, and then its original posture is caused to be destroyed.
Invention content
The present invention provides a kind of 3 Shaft angle micro-adjusting mechanisms, to solve above-mentioned three big disadvantage existing for traditional corner micro-adjusting mechanism
End.
The technical solution adopted by the present invention is that:Include for installing rack module on the table, the rack module
On excessively fine tuning module is installed, four structures that fine tuning module in end is equipped on the transition micromodule are identical and symmetrical
Arrangement without back clearance adjusting rod one, without back clearance adjusting rod two, without back clearance adjusting rod three, without back clearance adjusting rod four, the no back clearance
Adjusting rod one, without back clearance adjusting rod two, without back clearance adjusting rod three, it is micro- without back clearance adjusting rod four and end fine tuning mould end in the block
To be bolted between leveling platform, there are one calibrated bolcks for installation in the end fine adjustment stage.
The structure of rack module of the present invention is:Including the holder being installed on workbench, it is equipped on the holder
Bearing block one, bearing block two and one have the boss of annular groove, and there are one support shaft bearing bore on holder.
The structure of transition of the present invention fine tuning module is:Including the worm screw group being installed in bearing block one, bearing block two
Part, the worm component engage connection with the Worm-gear assembly in the bearing hole of holder, and the Worm-gear assembly and transition are micro-
It is connected with flat key between leveling platform.
The structure of worm component of the present invention is:Including worm screw, it is mounted on the double-row angular contact bal bearing at worm screw both ends
One, double-row angular contact bal bearing two and handwheel, the double-row angular contact bal bearing one, double-row angular contact bal bearing two using back to
The installation form of the back of the body.
The structure of Worm-gear assembly of the present invention is:Including worm gear, worm wheel shaft and the depth for being installed on worm wheel shaft bottom end
Ditch ball bearing, the deep groove ball bearing are installed in the support shaft bearing bore of holder.
The structure of transition fine adjustment stage of the present invention is:Including four bearing holes being arranged symmetrically one, bearing hole two, axis
Bearing bore three, bearing hole four and two elastic conjunctions are in straight pin one, straight pin two in transition fine adjustment stage, the straight pin
One, straight pin two is moved along the annular groove of boss respectively.
The structure of end of the present invention fine tuning module is:It is identical including four structures and corresponding mounted on transition respectively
Four in four bearing holes one, bearing hole two, bearing hole three, bearing hole four in fine adjustment stage are without back clearance adjusting rod one, nothing
Back clearance adjusting rod two, without back clearance adjusting rod three, without back clearance adjusting rod four, the no back clearance adjusting rod one, without back clearance adjusting rod two,
No back clearance adjusting rod three is attached between the fine adjustment stage of end with bolt respectively without back clearance adjusting rod four.
No back clearance adjusting rod one of the present invention, without back clearance adjusting rod two, without back clearance adjusting rod three, without back clearance adjusting rod four
Concrete structure and mounting means it is completely the same, by taking the concrete structure of no back clearance adjusting rod one as an example, including anti-backlash mechanism and bullet
Two parts of property bindiny mechanism:
The anti-backlash mechanism, including one have externally threaded active adjusting screw rod, the active adjusting screw rod respectively with
Front nut, flange nut form screw pair, and there are one the bullets for being in compressive state for setting between the front nut, flange nut
Spring, the outside cylinder of the front nut are equipped with portion with external threads, and gasket is socketed in outside front nut, contact on one side with spring, separately
It is contacted on one side with adjusting nut, which is threadedly coupled with the male thread portion of front nut, and locking nut is located at adjustment spiral shell
Female outside is simultaneously threadedly coupled with the male thread portion of front nut;
The flexible connection mechanism includes the flexible connector leading portion being bolted between flange nut and elasticity
Connector back segment, between the flexible connector leading portion and flexible connector back segment, there are one have elasticity and be in pressure for setting
The tensioner part of contracting state;
No back clearance adjusting rod one is mounted on by self-aligning bearing in the bearing hole one of transition fine adjustment stage, no back clearance adjusting rod
Flexible connector back segment be bolted with end fine adjustment stage.
Calibrated bolck of the present invention, at least face one, face two have high type face precision, and between the face one, face two
With high verticality.
It is an advantage of the invention that structure novel, finely tunes module by comprehensive transition and module is finely tuned in end, realize 3 shaft rotations
The fine tuning at angle solves uniaxial or two axis traditional corner micro-adjusting mechanisms and can not achieve the disadvantage adjusted around 3 Shaft angle posture informations
End;By designing bearing and its mounting means used in worm component, it is rigid to increase the radial and axial support angle of worm component
Property, and then the non-deformability of bigger is obtained, effectively reduce the axial direction that reversely back clearance is brought during Worm Wheel System
The inaccuracy of trim process caused by moving;It is identical by four structures in the fine adjustment block of end, and be arranged symmetrically without the back of the body
The mounting arrangement of gap adjusting rod increases the rigidity of structure of end fine tuning module;Pass through the anti-backlash mechanism of no back clearance adjusting rod
Design, solve the adjustment inaccuracy that reversed back clearance is brought in screw pair motion process;By selection with self-locking performance
Worm and gear and without back clearance adjusting rod, eliminates the use of locking device in traditional corner micro-adjusting mechanism, effectively avoids biography
The possibility that the original posture brought that exerted a force in system angle fine-adjustment mechanism since locking process is secondary is destroyed.The mechanism self-locking performance
Good, Adjustment precision is high, and method of adjustment is easily achieved.With dual axis inclinometer etc., other are used to measure the appearance of Rigid Body In Space
When the measuring device of state information measures the posture information of Rigid Body In Space, preferably installation of the present invention as measuring device
Carrier, to realize fine tuning of the measuring instrument relative to the initial attitude of rigid body to be measured, and then make measuring device with it is to be measured just
Posture relationship having the same between body.
Description of the drawings
Fig. 1 is the structural schematic diagram of the present invention;
Fig. 2 is the structural schematic diagram of rack module of the present invention;
Fig. 3 is the explosive view of excessively fine tuning module of the invention;
Fig. 4 is the explosive view of the invention without back clearance adjusting rod;
Fig. 5 is the partial enlarged view of the invention without back clearance adjusting rod.
Specific implementation mode
Include excessively fine tuning module being installed for the rack module 2 on workbench 1 on the rack module 2
3, be equipped on the transition micromodule 3 end fine tuning module 4 four structures it is identical and be arranged symmetrically without back clearance adjusting rod
One 401, without back clearance adjusting rod 2 402, without back clearance adjusting rod 3 403, without back clearance adjusting rod 4 404, the no back clearance adjusting rod
One 401, without back clearance adjusting rod 2 402, without back clearance adjusting rod 3 403, without in back clearance adjusting rod 4 404 and end fine tuning module 4
End fine adjustment stage 405 between to be bolted, installation is described there are one calibrated bolck 406 in the end fine adjustment stage 405
The measuring device of the spatial attitude information for measuring workbench 1 such as dual axis inclinometer can be installed on calibrated bolck 406;
The structure of rack module 2 of the present invention is:Including the holder 201 being installed on workbench 1;The holder 201
On the boss 204 of bearing block 1, bearing block 2 203 and one with annular groove 20401 is installed, and in holder 201
It is upper that there are one support shaft bearing bore 205;
The structure of transition of the present invention fine tuning module 3 is:Including being installed in bearing block 1, bearing block 2 203
Worm component 301, the worm component 301 engage connection with the Worm-gear assembly 302 in the bearing hole 205 of holder 201,
It is connected with flat key between the Worm-gear assembly 302 and transition fine adjustment stage 303;
The structure of worm component 301 of the present invention is:Including worm screw 30101, it is mounted on the biserial at 30101 both ends of worm screw
Angular contact ball bearing 1, double-row angular contact bal bearing 2 30103 and handwheel 30104, the double-row angular contact bal bearing one
30102, double-row angular contact bal bearing 2 30103 uses back-to-back installation form, radial and axial to increase worm component
Support angle rigidity, obtains the non-deformability of bigger, weakens the axial direction brought due to reversed back clearance when worm screw rotates backward
Inaccuracy is adjusted caused by moving;
The structure of Worm-gear assembly 302 of the present invention is:Including worm gear 30201, worm wheel shaft 30202 and it is installed on worm gear
The deep groove ball bearing 30203 of 30202 bottom end of shaft, the deep groove ball bearing 30203 are installed on the support shaft bearing bore 205 of holder 1
It is interior;
The structure of transition fine adjustment stage 303 of the present invention is:Including four bearing holes being arranged symmetrically 1, axis
Bearing bore 2 30302, bearing hole 3 30303, bearing hole 4 30304 and two elastic conjunctions are in the circle in transition fine adjustment stage 303
Pin 1, straight pin 2 30306, the straight pin 1, straight pin 2 30306 are respectively along the annular of boss 204
Groove 20401 moves, and to increase movement rigidity of the transition fine adjustment stage 303 in trim process, improves the stabilization of trim process
Property;
The structure of end of the present invention fine tuning module 4 is:It is identical including four structures and corresponding mounted on transition respectively
In four bearing holes 1, bearing hole 2 30302, bearing hole 3 30303, bearing hole 4 30304 in fine adjustment stage 303
Four without back clearance adjusting rod 1, without back clearance adjusting rod 2 402, without back clearance adjusting rod 3 403, without back clearance adjusting rod four
404, the no back clearance adjusting rod 1, without back clearance adjusting rod 2 402, without back clearance adjusting rod 3 403, without back clearance adjusting rod four
404 are attached between end fine adjustment stage 405 with bolt respectively;
No back clearance adjusting rod 1 of the present invention, without back clearance adjusting rod 2 402, without back clearance adjusting rod 3 403, without the back of the body
The concrete structure and mounting means of gap adjusting rod 4 404 are completely the same, by taking the concrete structure of no back clearance adjusting rod 1 as an example,
Including two parts of anti-backlash mechanism and flexible connection mechanism:
The anti-backlash mechanism, including one have externally threaded active adjusting screw rod 40101, the active adjusting screw rod
40101 form screw pair, the front nut 40102, flange nut 40107 with front nut 40102, flange nut 40107 respectively
Between setting there are one the spring 40106 for being in compressive state, the outside cylinder of the front nut 40102 is equipped with the outer spiral shell in part
Line, gasket 40103 is socketed in outside front nut 40102, contact on one side with spring 40106, another side and adjusting nut 40104 connect
It touches, which is threadedly coupled with the male thread portion of front nut 40102, and locking nut 40105 is located at adjusting nut
Outside is simultaneously threadedly coupled with the male thread portion of front nut 40102;
It, can be square by adjusting the position of gasket 40103 corresponding with 40102 external screw thread of front nut and adjusting nut 40104
Just the precompression of adjustment spring 40106, and with locking nut 40105 it lock locking;Due to the spring 40106
Presence so that the lower flank of front nut 40102 is contacted with the upper flank of active adjusting screw rod 40101, flange nut
40107 upper flank is contacted with the lower flank of active adjusting screw rod 40101, and then effectively avoids conventional helical pair
Reversed back clearance problem, increases the accuracy of no back clearance adjusting rod 401 during the adjustment;
The flexible connection mechanism includes the flexible connector leading portion being bolted between flange nut 40107
40108 and flexible connector back segment 40110, between the flexible connector leading portion 40108 and flexible connector back segment 40110,
There is elasticity and the tensioner part 40109 in compressive state there are one being arranged;Due to the presence of the tensioner part 40109, allow
Small size drift angle is generated between flexible connector leading portion 40108 and flexible connector back segment 40110;
No back clearance adjusting rod 1 is mounted on the bearing hole one of transition fine adjustment stage 303 by self-aligning bearing 40100
In 30301, flexible connector back segment 40110 and the end fine adjustment stage 405 of no back clearance adjusting rod 401 are bolted;By
In the trim process in end fine adjustment stage 405, the small size deflection of end fine adjustment stage 405 can lead to no back clearance adjusting rod
401 form small angle with the axis of bearing hole 30301, therefore use self-aligning bearing 40100 and flexible connector to adapt to the folder
Angle, and then ensure bearing, the normal operation without back clearance adjusting rod;
Calibrated bolck 406 of the present invention, at least face 1, face 2 40602 have high type face precision, and described
There is high verticality between face 1, face 2 40602.
The operation principle of the present invention:
For ease of description, structure is fixed on the referential O-XYZ of workbench 1 respectively, and it is fixed on the reference of calibrated bolck 406
It is O '-UVW.Using the 3 Shaft angle micro-adjusting mechanism, the fine tuning of end fine adjustment stage 405 is realized, finally so that referential O '-UVW
It being capable of posture relationship having the same with referential O-XYZ.
Before the posture to end fine adjustment stage 405 is finely adjusted, the 3 Shaft angle micro-adjusting mechanism need to be completed in workbench
On thick installment work, and end fine adjustment stage 3 is required to be not more than 5 relative to workbench corner deviation about the z axis。, around X, Y-axis
Posture angular displacement be not more than 3。。
As detect the 3 Shaft angle micro-adjusting mechanism roughly installation whether satisfactory foundation, with amesdial gauge outfit contact
The face 1 of calibrated bolck 406, and along Y-direction move distance △ sa,y, record amesdial gauge outfit is △ in increment in X direction
xa,y;The face 2 40602 of calibrated bolck 406 is contacted with amesdial gauge outfit, move distance is △ s in X directionb,x, amesdial gauge outfit exists
Increment along Z-direction is △ zb,x;With amesdial gauge outfit contact calibrated bolck face 2 40602, along Y-direction move distance △ sb,y, thousand
Point table gauge outfit is △ z in the increment along Z-directionb,y;According to rigid body pose transformation relation, can be obtained measuring coordinate system O '-UVW with
Attitude error between operating reference system O-XYZ is △ α, △ β, △ γ.
Wherein:
△ α are angular errors of referential the O '-UVW around the X-axis of referential O-XYZ;
△ β are angular errors of referential the O '-UVW around the Y-axis of referential O-XYZ;
△ γ are angular errors of referential the O '-UVW around the Z axis of referential O-XYZ.
After completing the thick installation of the micro-adjusting mechanism, the method for trimming of the 3 Shaft angle micro-adjusting mechanism is:By rotating hand
Wheel 30104, the rotation of the handwheel 30104 make worm component 301 drive the rotation for the Worm-gear assembly 302 being engaged with;It is described
Worm-gear assembly 302 drives the rotation of transition fine adjustment stage 303 by the flat key between transition fine adjustment stage 303;The transition
The rotation of fine adjustment stage 303, drives the rotation of end fine adjustment stage 405, and then realizes end fine adjustment stage corner about the z axis
Fine tuning.By the way that no back clearance adjusting rod 1 is raised and lowered, without back clearance adjusting rod 2 402, and reduce or increase and adjusted without back clearance
Bar 3 403, the height without back clearance adjusting rod 4 404 realize fine tuning of the end fine adjustment stage around the corner of X-axis.By increase or
It reduces without back clearance adjusting rod 1, without back clearance adjusting rod 3 403, and reduces or increase without back clearance adjusting rod 2 402, without back clearance
The height of adjusting rod 4 404 realizes fine tuning of the end fine adjustment stage around Y-axis corner.
The present invention has carried out detailed explanation by above-mentioned preferred embodiment, however, by studying carefully above,
To the variation of the embodiment to those of ordinary skill in the art be obvious, applicant intention etc. all these
Variation should all be fallen within the scope and spirit of the invention.
Claims (8)
1. a kind of 3 Shaft angle micro-adjusting mechanisms, it is characterised in that:Include for installing rack module on the table, the branch
Transition fine tuning module is installed on frame module, four structure phases of end fine tuning module are installed in the transition fine tuning module
With and be arranged symmetrically without back clearance adjusting rod one, without back clearance adjusting rod two, without back clearance adjusting rod three, without back clearance adjusting rod four, institute
It states no back clearance adjusting rod one, finely tuned in module without back clearance adjusting rod two, without back clearance adjusting rod three, without back clearance adjusting rod four and end
End fine adjustment stage between to be bolted, installation is there are one calibrated bolck in the end fine adjustment stage;
The structure of the rack module is:Including the holder being installed on workbench, bearing block one, axis are installed on the holder
Bearing two and a boss with annular groove, and there are one support shaft bearing bore on holder.
2. a kind of 3 Shaft angle micro-adjusting mechanism according to claim 1, it is characterised in that:The knot of the transition fine tuning module
Structure is:Including the worm component being installed in bearing block one, bearing block two, the worm component and the bearing hole for being mounted on holder
In Worm-gear assembly engagement connection, connected with flat key between the Worm-gear assembly and transition fine adjustment stage.
3. a kind of 3 Shaft angle micro-adjusting mechanism according to claim 2, it is characterised in that:The structure of the worm component is:
Including worm screw, it is mounted on double-row angular contact bal bearing one, double-row angular contact bal bearing two and the handwheel at worm screw both ends, the biserial
Angular contact ball bearing one, double-row angular contact bal bearing two use back-to-back installation form.
4. a kind of 3 Shaft angle micro-adjusting mechanism according to claim 2, it is characterised in that:The structure of the Worm-gear assembly is:
Including worm gear, worm wheel shaft and the deep groove ball bearing for being installed on worm wheel shaft bottom end, the deep groove ball bearing is installed on holder
In support shaft bearing bore.
5. a kind of 3 Shaft angle micro-adjusting mechanism according to claim 2, it is characterised in that:The knot of the transition fine adjustment stage
Structure is:Including four bearing holes being arranged symmetrically one, bearing hole two, bearing hole three, bearing hole four and two elastic conjunctions in mistake
Straight pin one, the straight pin two in fine adjustment stage are crossed, the straight pin one, straight pin two are transported along the annular groove of boss respectively
It is dynamic.
6. a kind of 3 Shaft angle micro-adjusting mechanism according to claim 1, it is characterised in that:The knot of the end fine tuning module
Structure is:It is identical including four structures, and respectively corresponding four bearing holes one being mounted in transition fine adjustment stage, bearing hole two,
Four in bearing hole three, bearing hole four without back clearance adjusting rod one, without back clearance adjusting rod two, without back clearance adjusting rod three, without back clearance
Adjusting rod four, the no back clearance adjusting rod one are distinguished without back clearance adjusting rod two, without back clearance adjusting rod three, without back clearance adjusting rod four
It is attached with bolt between the fine adjustment stage of end.
7. a kind of 3 Shaft angle micro-adjusting mechanism according to claim 6, it is characterised in that:The no back clearance adjusting rod one, nothing
It is back clearance adjusting rod two, completely the same without back clearance adjusting rod three, the concrete structure without back clearance adjusting rod four and mounting means, with no back of the body
For the concrete structure of gap adjusting rod one, including two parts of anti-backlash mechanism and flexible connection mechanism:
The anti-backlash mechanism, including one have externally threaded active adjusting screw rod, the active adjusting screw rod respectively with preceding spiral shell
Female, flange nut forms screw pair, and there are one the spring for being in compressive state, institutes for setting between the front nut, flange nut
The outside cylinder for stating front nut is equipped with portion with external threads, gasket is socketed in outside front nut, contact on one side with spring, another side and
Adjusting nut contacts, which is threadedly coupled with the male thread portion of front nut, and locking nut is located on the outside of adjusting nut
And it is threadedly coupled with the male thread portion of front nut;
The flexible connection mechanism includes the flexible connector leading portion being bolted between flange nut and elastic connection
Part back segment, between the flexible connector leading portion and flexible connector back segment, there are one have elasticity and be in compression shape for setting
The tensioner part of state;
No back clearance adjusting rod one is mounted on by self-aligning bearing in the bearing hole one of transition fine adjustment stage, the bullet of no back clearance adjusting rod
Property connector back segment is bolted with end fine adjustment stage.
8. a kind of 3 Shaft angle micro-adjusting mechanism according to claim 1, it is characterised in that:The calibrated bolck at least face one,
Face two has high type face precision, and has high verticality between the face one, face two.
Priority Applications (1)
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CN201710299318.8A CN106886228B (en) | 2017-04-29 | 2017-04-29 | A kind of 3 Shaft angle micro-adjusting mechanisms |
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CN201710299318.8A CN106886228B (en) | 2017-04-29 | 2017-04-29 | A kind of 3 Shaft angle micro-adjusting mechanisms |
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CN106886228A CN106886228A (en) | 2017-06-23 |
CN106886228B true CN106886228B (en) | 2018-08-28 |
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CN112894342A (en) * | 2021-01-13 | 2021-06-04 | 东莞理工学院 | Micro-corner adjusting device used in micro-assembly of intelligent machine parts |
CN112936203A (en) * | 2021-02-03 | 2021-06-11 | 大族激光科技产业集团股份有限公司 | Motion platform |
CN114234001B (en) * | 2021-11-10 | 2024-04-09 | 北京航天计量测试技术研究所 | Two-dimensional precision gap eliminating adjusting mechanism of photoelectric auto-collimator |
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KR100426071B1 (en) * | 2001-11-20 | 2004-04-06 | 광주과학기술원 | backlash-less linear screw device |
JP2008204411A (en) * | 2007-02-23 | 2008-09-04 | Tokimec Inc | Angle adjustment device for surface to be adjusted |
CN201304583Y (en) * | 2008-12-05 | 2009-09-09 | 上海交通大学 | Reverse gap elimination and micro-adjusting mechanism of rotary worktable precision transmission system |
CN101673118B (en) * | 2009-09-24 | 2011-05-25 | 同济大学 | Combined type transmission variable-angle micrometric displacement regulation device |
CN102200181B (en) * | 2011-03-16 | 2014-02-12 | 哈尔滨工业大学 | Z-axis transmission structure |
CN102568615B (en) * | 2011-12-13 | 2013-05-22 | 华中科技大学 | Small precise leveling device |
CN104297883B (en) * | 2014-09-24 | 2016-07-27 | 中国科学院长春光学精密机械与物理研究所 | Four-degree-of-freedom trimming rack |
CN106441394B (en) * | 2016-11-04 | 2019-01-11 | 中国航空工业集团公司北京航空精密机械研究所 | A kind of multiple degrees of freedom adjustment module |
CN207037479U (en) * | 2017-04-29 | 2018-02-23 | 吉林大学 | A kind of 3 Shaft angle micro-adjusting mechanisms |
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