CN106443936A - Five-freedom-degree final motion adjusting mechanism for optical element - Google Patents
Five-freedom-degree final motion adjusting mechanism for optical element Download PDFInfo
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- CN106443936A CN106443936A CN201610880399.6A CN201610880399A CN106443936A CN 106443936 A CN106443936 A CN 106443936A CN 201610880399 A CN201610880399 A CN 201610880399A CN 106443936 A CN106443936 A CN 106443936A
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- optical element
- picture frame
- adjustment mechanism
- fine motion
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
- G02B7/023—Mountings, adjusting means, or light-tight connections, for optical elements for lenses permitting adjustment
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/003—Alignment of optical elements
- G02B7/005—Motorised alignment
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
- G02B7/022—Mountings, adjusting means, or light-tight connections, for optical elements for lenses lens and mount having complementary engagement means, e.g. screw/thread
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- Optics & Photonics (AREA)
- Mounting And Adjusting Of Optical Elements (AREA)
Abstract
The invention discloses a five-freedom-degree final motion adjusting mechanism for an optical element, belongs to the technical field of precise adjustment and aims at solving the problems that in the prior art, machining precision is hard to guarantee, the large adjusting space is occupied, and the adjustable freedom degree is small. The five-freedom-degree final motion adjusting mechanism for the optical element comprises an optimal element, a press frame, a mirror frame, a mirror base, an oblique final motion adjusting mechanism and a radial final motion adjusting mechanism. The optical element is fixed to the mirror frame through the press frame. The mirror base is arranged on the outer side of the mirror frame. The oblique final motion adjusting mechanism is arranged at the connecting position of the optical element and the mirror frame and conducts oblique adjustment on the optical element. The radial final motion adjusting mechanism is arranged at the connecting position of the mirror frame and the mirror base and conducts radial adjustment on the whole mirror frame. According to the five-freedom-degree final motion adjusting mechanism, structural pieces are respectively machined, the machining precision is guaranteed, radial adjustment and oblique adjustment in the adjusting process are achieved at the outer wall of the mirror base, the large adjusting space is prevented from being occupied, and multiple adjustable freedom degrees are achieved.
Description
Technical field
The invention belongs to fine setting technical field, and in particular to a kind of five degree of freedom fine motion adjustment machine of optical element
Structure.
Background technology
In optic-mechanical design, the design of mechanical structure portion will ensure that the mutual alignment between optical element is accurate, existing
Under the conditions of having process technology or under conditions of cost is limited, mechanical-optical setup cannot meet required precision by processing, this
When be accomplished by being adjusted optical element using governor motion, be allowed to meet design accuracy requirement, reach optical system most
Best performance.In the design of high accuracy interferometer optical mechanical system, the spatial positioning accuracy of optical element has high demands, therefore to being used for optics
Element is fixed the frame for movement precision for supporting and proposes challenge, is limited by existing machinery process equipment, processing technique, processing cost
System, frame for movement is difficult to reach high machining accuracy, and this is accomplished by being adjusted optical element using adjusting means, to meet
The performance requirement of high accuracy interferometer optics system.
At present, optical element jog adjustment device is confined to machinery adjustment formula, piezoelectricity adjustment type, pressure adjustment type and magnetic hysteresis
Telescopic, especially in the majority with machinery adjustment formula and piezoelectricity adjustment type.Using piezoelectric type adjusting apparatus, need to be equipped with complicated control
System, increased the complexity of cost and optical mechanical system so that whole optical mechanical system structure is excessively heavy.Publication No.
The United States Patent (USP) of US6930842, discloses a kind of jog adjustment device of employing piezoelectric type adjustment, is applied to Japanese Nikon public affairs
The adjustment lithographic objective of department, whole adjustment system structure complexity, apply many flexibility hinge bodies, it is difficult to ensure machining accuracy,
Although its adjustment mechanism is installed being distributed along microscope base tangent line, larger adjustment space is still needed.
For high accuracy interferometer main machine structure, optical element dimension is relatively small, should make in optical structure design
Its：Compact structure, succinct, lightweight, environmental Kuznets Curves are easily carried out, and high accuracy interferometer main machine structure optical element is installed
Encapsulation will be typically fixed after adjustment, it is to avoid repeatedly adjustment dismounting, affect the repeated positioning precision of optical element.Piezoelectric type is adjusted
Device, general appearance size is larger, is placed in picture frame or microscope base and cannot take out, and causes whole interferometer main machine structure size excessively
Huge, main machine structure becomes complicated, is unfavorable for the environmental Kuznets Curves in later stage.Mechanical type adjusting apparatus, the control system for not having complexity,
Can be according to the picture frame for providing or the space of microscope base, the size of design of mechanical adjusting apparatus, free design of mechanical
The form of adjustment structure, simple for structure, it is convenient to realize.The United States Patent (USP) of Publication No. US659409 discloses one kind for adjusting
The mechanical type adjusting apparatus of lithographic objective, mechanical type adjusting apparatus in the adjusting apparatus, mostly using flexible hinge body, structure letter
Clean, low cost, easily realize.But this invention is only limitted to adjust displacement and inclination of the lithographic objective along optical axis direction, it is impossible to edge
The radiai adjustment of optical element, scalable degree of freedom is less.
Content of the invention
It is an object of the invention to a kind of five degree of freedom fine motion adjustment mechanism of optical element is proposed, solve prior art and deposit
Be difficult to ensure that machining accuracy, take the few problem of larger adjustment space and scalable degree of freedom.
For achieving the above object, a kind of five degree of freedom fine motion adjustment mechanism of optical element of the present invention includes optics unit
Part, press box, picture frame, microscope base, inclination fine motion adjustment mechanism and radial fretting adjustment mechanism；
The optical element is fixed on picture frame by press box, is provided with microscope base on the outside of the picture frame, the optical element
One group of inclination fine motion adjustment mechanism is respectively arranged with the picture frame junction, tilt adjustments, the mirror is carried out to optical element
Frame and the microscope base junction are respectively arranged with one group of radial fretting adjustment mechanism, integrally carry out radial direction adjustment to picture frame；
Uniform three flanges of the optical element excircle；
The press box is the loop configuration of uniform three boss of excircle；Three boss lower surfaces of the press box respectively and
Three flange upper surface contacts of optical element；
The picture frame is loop configuration, three positioning runners of medial wall circumference uniform distribution, each positioning runner of picture frame medial wall
Lower end is machined with supporting construction A respectively；Three lower locating slots of picture frame lower surface circumference uniform distribution, each lower locating slot is located at phase
Between adjacent two positioning runners；Three flange lower surfaces of the optical element are contacted with the supporting construction A upper surface respectively,
Boss and flange are coordinated with corresponding positioning runner；
Three supporting constructions B of microscope base medial wall circumference uniform distribution, each supporting construction B respectively with picture frame lower surface one
Individual lower locating slot coordinates.
The optical element and the picture frame junction are respectively arranged with one group of inclination fine motion adjustment mechanism and are specially：Described
Axial screwed hole A is provided with each boss of press box, and each the supporting construction A upper surface on the picture frame is provided with axial direction
Unthreaded hole；Medial wall radially has square groove, and picture frame side wall has the screwed hole B of radial direction with the square groove correspondence position；
Described inclination fine motion adjustment mechanism include housing screw A, compression spring A, ball A, micrometer adjusting screw A, tilt micro-adjusting voussoir,
Ball B and baffle plate；The housing screw A and the screwed hole A are threaded, and the screwed hole A lower end and the ball A connect
Touch, the lug upper surface contact of the ball A lower end and the optical element, set between the ball A and the housing screw A
It is equipped with a compression spring A；The baffle plate is fixed by screws on the supporting construction A medial wall, and the tilt micro-adjusting voussoir sets
Put in square groove, large scale one end is located at outside, is provided with a compression spring A between the tilt micro-adjusting voussoir and the baffle plate,
Screwed hole B on the micrometer adjusting screw A and the picture frame is threaded, the micrometer adjusting screw A end and the tilt micro-adjusting wedge
Block end contact, the ball B is located on the unthreaded hole in supporting construction A, and lower end and the tilt micro-adjusting voussoir are contacted, on
The flange lower surface of end and the optical element is contacted.
Microscope base side wall has notch with screwed hole B opposite position on the picture frame.
The picture frame and the microscope base junction are respectively arranged with one group of radial fretting adjustment mechanism and are specially：The picture frame
Side wall and the low groove correspondence position are provided with screwed hole C, on the inside of the microscope base of each the supporting construction B upper end on the microscope base
T-shaped chute is had on wall, and each described supporting construction B upper surface has location hole away from sidewall locations, has in supporting construction B
The square hole of radial direction, the perforate of square hole upper end, outside is through microscope base outer wall and ft connection；
Housing screw B, shell fragment, flexible hinge, micrometer adjusting screw B, radially micro- is included per the described radial fretting adjustment mechanism of group
Adjust voussoir, stage clip B, ball C and block；The housing screw B and the screwed hole C are threaded, end and the press box side
Wall is contacted, and the ball C is arranged in the location hole in each supporting construction B, the low groove end contact of upper end and press box, institute
State radially fine setting voussoir to be arranged in square hole, large scale one end is located at outside, between the radial direction fine setting voussoir and square hole inwall
Be provided with a stage clip B, the block is fixed by screws in microscope base lateral wall square hole correspondence position, the micrometer adjusting screw B and
The block screw thread coordinates, and end and radial direction fine setting voussoir are contacted, and are led to for flexible hinge one end of the rhombus of radiai adjustment
Cross screw to be fixed in the vertical slots of T-shaped chute, the other end and the picture frame are contacted, lower end and radially fine setting voussoir upper surface connect
Touch；Shell fragment one end with vertical direction flexibility is fixed in the level trough of the T-shaped chute, the other end and the picture frame upper end
Face contacts.
The flexible hinge includes fixed plate, flexibility slit A, radial direction arc contact point and vertical arc contact point；Described solid
Fixed board is fixed by screws in the vertical slots of the T-shaped chute, and described in four groups, flexible slit A constitutes diamond structure, the footpath
Contact to the lateral wall of arc contact point and the picture frame, the vertical arc contact point and the radial direction finely tune voussoir upper surface
Contact.
The shell fragment includes that a side wall of location-plate and locating detent, described locating detent one end and the location-plate is fixed,
Other end lower surface is circular arc compression point, has flexible slit between side wall that location-plate is fixed with locating detent and location-plate entirety
B, the location-plate is fixed by screws in the level trough of the T-shaped chute, and the circular arc of the locating detent compresses point and picture frame
Upper surface contacts.
The picture frame upper surface and the low groove correspondence position are provided with upper groove, the circular arc compression point of the locating detent
With the upper groove contact.
The slotted eye of multiple circumference uniform distributions is additionally provided with the outer of the microscope base upper end, when multiple microscope bases are coaxially disposed, multiple
Multigroup slotted eye that microscope base is located on same axis is connected by a retaining mechanism respectively.
The retaining mechanism is screw-rod structure, and screw-rod structure is placed through the slotted eye on same axis, and two ends pass through nut
Fixing.
Beneficial effects of the present invention are：A kind of five degree of freedom fine motion adjustment mechanism optical element of the optical element of the present invention
Fine motion adjustment mechanism is three groups of 120 ° of circle distribution for inclining and radially adjusting.Optical element is reserved on circumference in processing
Three uniform flanges, for the tilt adjustments of optical element, three flanges of optical element are supported on mirror by three balls
On frame boss, in minor thread hole of the balls ride on picture frame boss, three balls can guarantee that optical element, for supported at three point, does not have
There is Planar Mechanisms phenomenon.By micrometer screw is adjusted, the tilt micro-adjusting voussoir being placed in picture frame flange is promoted, tilt micro-adjusting voussoir is slided
Promote ball to move up and down in circular groove when dynamic, by reasonably three uniform inclination fine motion adjustment mechanisms being adjusted, realize light
Rotation of the element around X-axis or Y-axis is learned, so as to reach the tilt adjustments of optical element；And it is same to incline fine motion adjustment mechanism at three
During step fine motion, it is possible to achieve optical element is along the translation of Z axis.The lower end of picture frame is evenly distributed with three low grooves, and picture frame is laid
On the microscope base with supporting construction, between picture frame and microscope base, there are three balls, three balls can guarantee that picture frame for supported at three point,
Without Planar Mechanisms phenomenon, microscope base inner wall even distribution lays three flexible hinge bodies, and it is cylindrical that one end face of flexible hinge abuts against picture frame
On post jamb, the radial direction in microscope base supporting construction is placed in by adjustment voussoir is finely tuned, radially fine setting voussoir is along the footpath of optical element
To slip, flexible hinge up and down motion is promoted, flexible hinge is that diamond structure, the up and down motion of flexible hinge translates into the radial direction of picture frame
Motion, optical element and picture frame are now relatively fixed, and so as to adjust the radial motion of optical element, reasonably adjust three radial directions
Fine motion adjustment mechanism, optical element can be just translated along X-axis and Y-axis.
The present invention realizes the footpath of the lens element of low-cost and high-precision using voussoir and the structural groupings such as ball and flexible hinge
To and tilt adjustments, prevented using stage clip adjustment mechanism produce hysterisis error；And micrometer adjusting screw hole is all in microscope base outside cylinder
On face, easy to adjust after installation, also allow for realizing multiple lens group combining adjustment.Structural member in the present invention adds respectively
Work, is easily guaranteed that machining accuracy, and during adjustment, radially adjustment and tilt adjustments are all realized at microscope base outer wall, it is to avoid taken relatively
Big adjustment space, scalable degree of freedom is many.
Description of the drawings
Fig. 1 for a kind of optical element of the present invention five degree of freedom fine motion adjustment mechanism optical element adjust five oneself
By degree schematic diagram；
Fig. 2 is a kind of five degree of freedom fine motion adjustment mechanism schematic diagram of optical element of the present invention；
Fig. 3 is installed for press box, picture frame and microscope base in a kind of five degree of freedom fine motion adjustment mechanism of optical element of the present invention
Explosive view；
Fig. 4 is optical element structure schematic diagram in a kind of five degree of freedom fine motion adjustment mechanism of optical element of the present invention；
Fig. 5 is press frame structure schematic diagram in a kind of five degree of freedom fine motion adjustment mechanism of optical element of the present invention；
Fig. 6 is frame structure schematic diagram in a kind of five degree of freedom fine motion adjustment mechanism of optical element of the present invention；
Fig. 7 is mirror-seat structure schematic diagram in a kind of five degree of freedom fine motion adjustment mechanism of optical element of the present invention；
Fig. 8 is a kind of five degree of freedom fine motion adjustment mechanism structure sectional view of optical element of the present invention；
Fig. 9 illustrates for inclining fine motion adjustment mechanism in a kind of five degree of freedom fine motion adjustment mechanism of optical element of the present invention
Figure；
Figure 10 shows for radial fretting adjustment mechanism in a kind of five degree of freedom fine motion adjustment mechanism of optical element of the present invention
It is intended to；
Figure 11 is flexible hinge structural representation in a kind of five degree of freedom fine motion adjustment mechanism of optical element of the present invention；
Figure 12 is elastic piece structure schematic diagram in a kind of five degree of freedom fine motion adjustment mechanism of optical element of the present invention；
Figure 13 radially finely tunes wedge structure in the five degree of freedom fine motion adjustment mechanism for a kind of optical element of the present invention and shows
It is intended to；
Figure 14 is stop block structure schematic diagram in a kind of five degree of freedom fine motion adjustment mechanism of optical element of the present invention；
Figure 15 is a kind of coaxially connected structural representation of five degree of freedom fine motion adjustment mechanism of optical element of multiple present invention
Figure；
Wherein：1st, optical element, 101, flange, 2, press box, 201, boss, 202, screwed hole A, 3, picture frame, 301, positioning
Chute, 302, supporting construction A, 303, unthreaded hole, 304, square groove, 305, screwed hole B, 306, upper groove, 307, low groove, 308, spiral shell
Pit C, 4, microscope base, 401, supporting construction B, 402, location hole, 403, square hole, 404, T-shaped chute, 405, notch, 406, slotted eye,
5th, fine motion adjustment mechanism inclined, 501, housing screw A, 502, compression spring A, 503, ball A, 504, ball B, 505, micrometer adjusting screw A,
506th, tilt micro-adjusting voussoir, 507, baffle plate, 6, radial fretting adjustment mechanism, 601, housing screw B, 602, shell fragment, 6021, positioning
Plate, 6022, locating detent, 6023, circular arc compression point, 6024, flexibility slit B, 603, flexible hinge, 6031, fixed plate, 6032, soft
Property slit A, 6033, radial direction arc contact point, 6034, vertical arc contact point, 604, micrometer adjusting screw B, 605, block, 606, footpath
To fine setting voussoir, 607, stage clip B, 608, ball C, 7, retaining mechanism.
Specific embodiment
Below in conjunction with the accompanying drawings embodiments of the present invention are described further.
Referring to accompanying drawing 1, a kind of five degree of freedom fine motion adjustment mechanism of optical element 1 of the present invention can realize optical element
1, along X-axis, Y-axis, the adjustment of displacement of Z axis and around X-axis, the tilt adjustments of Y-axis, is particularly well-suited to high accuracy interferometer main optical path system
The fine setting positioning of each optical element 1 in system.Carry out optical element 1 to incline and the radially adjustment of the fine motion adjustment mechanism of adjustment
Screw all in the outer cylinder surface of microscope base 4, thus can the micro-positioning regulators Mechanism Combination of several groups of optical elements 1 together,
Each optical element 1 is individually adjusted.
Referring to accompanying drawing 2- accompanying drawing 7, a kind of five degree of freedom fine motion adjustment mechanism of optical element 1 of the present invention includes optics unit
Part 1, press box 2, picture frame 3, microscope base 4, inclination fine motion adjustment mechanism 5 and radial fretting adjustment mechanism 6；
The optical element 1 is fixed on picture frame 3 by press box 2, and 3 outside of the picture frame is provided with microscope base 4, the optics
Element 1 and 3 lap-joint of the picture frame are respectively arranged with one group of inclination fine motion adjustment mechanism 5, enter line tilt tune to optical element 1
Whole, the picture frame 3 and 4 junction of the microscope base are respectively arranged with one group of radial fretting adjustment mechanism 6, overall to picture frame 3 carry out
Radially adjust；
Uniform three flanges 101 of 1 excircle of the optical element；
The press box 2 is the loop configuration of uniform three boss 201 of excircle；Three 201 lower ends of boss of the press box 2
Face three 101 upper surface of flange contacts respectively with optical element 1；
The picture frame 3 is loop configuration, three positioning runners 301 of medial wall circumference uniform distribution, each positioning of 3 medial wall of picture frame
301 lower end of chute is machined with supporting construction A302 respectively；The picture frame 3 lower surface circumference uniform distribution, three lower locating slots, under each
Locating slot is Wei Yu two neighboring positioning runner 301 between；Three 101 lower surfaces of flange of the optical element 1 respectively with described
Supporting construction A302 upper surface contacts, and boss 201 and flange 101 are coordinated with corresponding positioning runner 301；
The microscope base 4 medial wall circumference uniform distribution, three supporting constructions B401, each supporting construction B401 respectively with picture frame 3 under
One lower locating slot of end face coordinates.
Referring to accompanying drawing 8 and accompanying drawing 9, the optical element 1 and 3 lap-joint of the picture frame are respectively arranged with one group of inclination fine motion
Adjustment mechanism 5 is specially：Axial screwed hole A202 is provided with each boss 201 of the press box 2, on the picture frame 3
Each supporting construction A302 upper surface is provided with axial unthreaded hole 303, corresponding with screwed hole A202；Medial wall radially has
Square groove 304,3 side wall of the picture frame has the screwed hole B305 of radial direction with 304 correspondence position of the square groove；
Inclination fine motion adjustment mechanism 5 bag housing screw A501, compression spring A 502, ball A503, the micrometer adjusting screw A505, incline
Voussoir 506, ball B504 and baffle plate 507 are tiltedly finely tuned；The housing screw A501 and the screwed hole A202 are threaded, described
Screwed hole A202 lower end and ball A503 contact, 101 upper table of flange of the ball A503 lower end and the optical element 1
Face contacts, and is provided with a compression spring A 502 between the ball A503 and the housing screw A501；The baffle plate 507 passes through spiral shell
Nail is fixed on the supporting construction A302 medial wall, and the tilt micro-adjusting voussoir 506 is arranged in square groove 304, large scale one
End is provided with a compression spring A 502, the fine setting spiral shell positioned at outside between the tilt micro-adjusting voussoir 506 and the baffle plate 507
Screwed hole B305 on nail A505 and the picture frame 3 is threaded, the micrometer adjusting screw A505 end and the tilt micro-adjusting wedge
506 end contact of block, the ball B504 is located on the unthreaded hole 303 in supporting construction A302, and lower end and the inclination are micro-
Voussoir 506 is adjusted to contact, 101 lower surface of the flange contact of upper end and the optical element 1.When adjustment lens are rotated around X-axis or Y-axis
When, precession micrometer adjusting screw makes which promote tilt micro-adjusting voussoir 506 to slide along lens radial direction, and now compression spring A 502 is compressed, right
The thrust that tilt micro-adjusting voussoir 506 is produced can effectively prevent the idle running and bounce that micrometer adjusting screw A505 produced due to thread pitch,
Tilt micro-adjusting voussoir 506 is radially slided and promotes ball B504 to be moved in the unthreaded hole 303 of picture frame 3 upwards, and ball B504 promotes light
The flange 101 for learning element 1 is moved upwards, so that there is small skew in optical element 1, uniform by reasonably adjustment three
Fine motion adjustment mechanism 5 is inclined, lens can be just rotated around X-axis or Y-axis, the lens tilt required precision required for reaching.Light
While the flange 101 of element 1 is moved upwards, ball A503 is promoted to move upwards, ball A503 motion upwards makes correspondence
Compression spring A 502 generate pressure to ball A503, ball A503 and ball B504 has thrust all the time to optical element 1,
Ensure that the position after the adjustment of optical element 1 is stable.The micrometer adjusting screw A505 for inclining fine motion adjustment mechanism 5 when three circumference uniform distributions
When synchronous precession or back-out, then optical element 1 can be made along Z axis upper and lower translation, reach distance between two neighboring lens group
The requirement of precision.
4 side wall of the microscope base has notch 405 with screwed hole B305 opposite position on the picture frame 3.Slot milling,
It is used for adjusting adjusting screw A on picture frame 3.
Referring to accompanying drawing 10, accompanying drawing 13 and accompanying drawing 14, the picture frame 3 and 4 lap-joint of the microscope base are respectively arranged with one group of footpath
It is specially to fine motion adjustment mechanism 6：3 side wall of the picture frame and 307 correspondence position of the low groove are provided with screwed hole C308, institute
State on 4 medial wall of microscope base of each the supporting construction B401 upper end on microscope base 4 and T-shaped chute 404 is had, each described supporting construction
B401 upper surface has location hole 402 away from sidewall locations, has the square hole 403 of radial direction, on square hole 403 in supporting construction B401
End perforate, outside is through 4 outer wall of microscope base and ft connection；
Housing screw B601, shell fragment 602, flexible hinge 603, fine setting spiral shell is included per the described radial fretting adjustment mechanism 6 of group
Nail B604, radially fine setting voussoir 606, stage clip B607, ball C608 and block 605；The housing screw B601 and the screw thread
Hole C308 is threaded, end and 2 sidewall contact of the press box, and the ball C608 is arranged in each supporting construction B401
In location hole 402,307 end contact of low groove of upper end and press box 2, the radial direction fine setting voussoir 606 is arranged on square hole 403
In, large scale one end is located at outside, is provided with a stage clip B607 between the radial direction fine setting voussoir 606 and 403 inwall of square hole,
The block 605 is fixed by screws in 4 lateral wall square hole of microscope base, 403 correspondence position, the micrometer adjusting screw B604 and the gear
605 screw thread of block coordinates, and end and radial direction fine setting voussoir 606 are contacted, for 603 one end of flexible hinge of the rhombus of radiai adjustment
It is fixed by screws in the vertical slots of T-shaped chute 404, the other end and the picture frame 3 are contacted, lower end and radially fine setting voussoir
606 upper surfaces contact；602 one end of shell fragment with vertical direction flexibility is fixed in the level trough of the T-shaped chute 404, separately
One end and the contact of 3 upper surface of the picture frame.Carry out optical element 1 radial direction adjustment when, precession micrometer adjusting screw B604 is promoted radially
Fine setting voussoir 606 is radially slided along lens, and when stage clip B607 ensures adjustment, micrometer adjusting screw B604 does not have idle running and jumping phenomena, footpath
Radially slide to fine setting voussoir 606, promote the vertical arc contact point 6034 of flexible hinge 603 to move upwards, flexible hinge 603 is produced
Deformation is moved up, and the radial direction arc contact point 6033 of flexible hinge 603 just promotes 3 outer wall of picture frame to move radially along optical element 1；
Ball C608 is placed in the location hole 402 of microscope base 4, and ball C608 supports the lower surface of picture frame 3, it is ensured that picture frame 3 is propped up for 3 points
Support and can radially slide along lens, 3 upper surface of picture frame is compressed by shell fragment 602, housing screw B601 is installed in the screw hole of picture frame 3
On C, and housing screw B601 withstands press box 2, and lens, press box 2, picture frame 3 are just relatively fixed, just the moving radially of such picture frame 3
Become moving radially for lens.Optics unit can just be made by three radial fretting adjustment mechanisms 6 of rational adjustment circumference uniform distribution
Part 1 is moved along X-axis, Y-axis, reaches the position accuracy demand required for lens.
Referring to accompanying drawing 11, the flexible hinge 603 includes fixed plate 6031, flexibility slit A6032, radial direction arc contact point
6033 and vertical arc contact point 6034；The fixed plate 6031 is fixed by screws in the vertical slots of the T-shaped chute 404
Interior, described in four groups, flexible slit A6032 constitutes diamond structure, when vertical 6034 vertical up-or-down movement of arc contact point, can make
Radial direction arc contact point 603330 produces the motion of level, the lateral wall of the radial direction arc contact point 6033 and the picture frame 3
Contact, the vertical arc contact point 6034 and radial direction fine setting 606 upper surface of voussoir contact.
Referring to accompanying drawing 12, the shell fragment 602 includes location-plate 6021 and locating detent 6022,6022 one end of the locating detent and
One side wall of the location-plate 6021 is fixed, and other end lower surface is circular arc compression point 6023, location-plate 6021 and locating detent
Flexible slit B6024 is had between the side walls of 6022 fixations and 6021 entirety of location-plate, the location-plate 6021 is solid by screw
It is scheduled in the level trough of the T-shaped chute 404, the circular arc compression point 6023 of the locating detent 6022 and 3 upper surface of picture frame contact.
3 upper surface of the picture frame and 307 correspondence position of the low groove are provided with upper groove 306, the locating detent 6022
Circular arc compression point 6023 and the upper groove 306 contact.
The slotted eye 406 of multiple circumference uniform distributions is additionally provided with 4 upper end outer of the microscope base, when multiple microscope bases 4 are coaxially disposed,
Multigroup slotted eye 406 that multiple microscope bases 4 are located on same axis is connected by a retaining mechanism 7 respectively.
During installation, the inclination fine motion adjustment mechanism 5 of picture frame 3 is first installed, then optical element 1 in picture frame 3,
Again press box 2 in picture frame 3, with the locked press box 2 of housing screw A501；Picture frame 3 is sitting in and installs ball C608 and radial direction
In the microscope base 4 of fine motion adjustment mechanism 6, with shell fragment 602, picture frame 3 is fixed.
Referring to accompanying drawing 15, the retaining mechanism 7 is that screw-rod structure, screw-rod structure is placed through the slotted eye on same axis
406, two ends are fixed by nut.
Claims (9)
1. the five degree of freedom fine motion adjustment mechanism of a kind of optical element, including optical element (1), press box (2), picture frame (3) and mirror
Seat (4), it is characterised in that also include to incline fine motion adjustment mechanism (5) and radial fretting adjustment mechanism (6)；
Described optical element (1) is fixed on picture frame (3) by press box (2), is provided with microscope base (4), institute on the outside of picture frame (3)
State optical element (1) and the picture frame (3) junction is respectively arranged with one group of inclination fine motion adjustment mechanism (5), to optical element
(1) tilt adjustments are carried out, and picture frame (3) and the microscope base (4) junction are respectively arranged with one group of radial fretting adjustment mechanism
(6), integrally radial direction adjustment is carried out to picture frame (3)；
Uniform three flanges (101) of optical element (1) excircle；
Described press box (2) are the loop configuration of uniform three boss (201) of excircle；Three boss (201) of press box (2)
Lower surface three flange (101) upper surface contacts respectively with optical element (1)；
Described picture frame (3) are loop configuration, three positioning runners (301) of medial wall circumference uniform distribution, and each is fixed for picture frame (3) medial wall
Position chute (301) lower end is machined with supporting construction A (302) respectively；Position under picture frame (3) lower surface circumference uniform distribution three
Groove, each lower locating slot is Wei Yu two neighboring positioning runner (301) between；Under three flanges (101) of optical element (1)
End face is contacted with supporting construction A (302) upper surface respectively, boss (201) and flange (101) and corresponding positioning runner
(301) coordinate；
Microscope base (4) medial wall three supporting constructions B (401) of circumference uniform distribution, each supporting construction B (401) is respectively and picture frame
(3) one of lower surface lower locating slot coordinates.
2. a kind of five degree of freedom fine motion adjustment mechanism of optical element according to claim 1, it is characterised in that the light
Learn element (1) and the picture frame (3) junction is respectively arranged with one group of inclination fine motion adjustment mechanism (5) and is specially：The press box
(2) axial screwed hole A (202), each supporting construction A on picture frame (3) are provided with each boss (201)
(302) upper surface is provided with axial unthreaded hole (303)；Medial wall radially has a square groove (304), picture frame (3) side wall with
Square groove (304) correspondence position has the screwed hole B (305) of radial direction；
Inclination fine motion adjustment mechanism (5) includes housing screw A (501), compression spring A (502), ball A (503), micrometer adjusting screw A
(505), tilt micro-adjusting voussoir (506), ball B (504) and baffle plate (507)；Housing screw A (501) and the screwed hole A
(202) threaded, screwed hole A (202) lower end and the ball A (503) contact, ball A (503) lower end and institute
Flange (101) upper surface of optical element (1) is stated, is arranged between ball A (503) and the housing screw A (501)
There is a compression spring A (502)；Baffle plate (507) are fixed by screws on supporting construction A (302) medial wall, described are inclined
Tiltedly fine setting voussoir (506) is arranged in square groove (304), and large scale one end is located at outside, tilt micro-adjusting voussoir (506) and institute
State and between baffle plate (507), be provided with a compression spring A (502), the screwed hole on micrometer adjusting screw A (505) and the picture frame (3)
B (305) is threaded, micrometer adjusting screw A (505) end and the tilt micro-adjusting voussoir (506) end contact, the ball
B (504) is located on the unthreaded hole (303) on supporting construction A (302), and lower end and the tilt micro-adjusting voussoir (506) are contacted,
Flange (101) the lower surface contact of upper end and the optical element (1).
3. a kind of five degree of freedom fine motion adjustment mechanism of optical element according to claim 2, it is characterised in that the mirror
Seat (4) side wall has notch (405) with screwed hole B (305) opposite position on the picture frame (3).
4. a kind of five degree of freedom fine motion adjustment mechanism of optical element according to claim 1, it is characterised in that the mirror
Frame (3) and the microscope base (4) junction are respectively arranged with one group of radial fretting adjustment mechanism (6) and are specially：Picture frame (3) side
Wall and the low groove (307) correspondence position are provided with screwed hole C (308), each supporting construction B on microscope base (4)
(401) on microscope base (4) medial wall of upper end, T-shaped chute (404) is had, each supporting construction B (401) upper surface is away from side
Wall position has location hole (402), the interior square hole (403) for having radial direction of supporting construction B (401), square hole (403) upper end perforate,
Outside is through microscope base (4) outer wall and ft connection；
Housing screw B (601), shell fragment (602), flexible hinge (603), micro- is included per the described radial fretting adjustment mechanism (6) of group
Adjust screw B (604), radially fine setting voussoir (606), stage clip B (607), ball C (608) and block (605)；The housing screw B
(601) and the screwed hole C (308) is threaded, end and the press box (2) sidewall contact, described ball C (608) are arranged
In location hole (402) in each supporting construction B (401), low groove (307) end contact of upper end and press box (2), described
Radially fine setting voussoir (606) is arranged in square hole (403), and large scale one end is located at outside, radial direction fine setting voussoir (606) and
A stage clip B (607) is provided between square hole (403) inwall, and block (605) are fixed by screws on the outside of microscope base (4)
Wall square hole (403) correspondence position, the cooperation of micrometer adjusting screw B (604) and the block (605) screw thread, end and the radial direction
Fine setting voussoir (606) contact, flexible hinge (603) one end for the rhombus of radiai adjustment is fixed by screws in T-shaped chute
(404) in vertical slots, the other end and the picture frame (3) are contacted, lower end and the radially contact of fine setting voussoir (606) upper surface；Tool
Shell fragment (602) one end for having vertical direction flexibility is fixed in the level trough of T-shaped chute (404), the other end and the mirror
Frame (3) upper surface contacts.
5. the five degree of freedom fine motion adjustment mechanism of a kind of optical element according to claim 4, it is characterised in that described soft
Property hinge (603) include fixed plate (6031), flexibility slit A (6032), radial direction arc contact point (6033) and vertical arc contact
Point (6034)；Fixed plate (6031) are fixed by screws in the vertical slots of T-shaped chute (404), soft described in four groups
Property slit A (6032) constitute diamond structure, the lateral wall of the radial direction arc contact point (6033) and the picture frame (3) contacts,
The vertical arc contact point (6034) and radial direction fine setting voussoir (606) upper surface contact.
6. a kind of five degree of freedom fine motion adjustment mechanism of optical element according to claim 4, it is characterised in that the bullet
Piece (602) includes location-plate (6021) and locating detent (6022), described locating detent (6022) one end and the location-plate (6021)
A side wall fix, other end lower surface is circular arc compression point (6023), and location-plate (6021) and locating detent (6022) are fixing
Side wall and location-plate (6021) entirety between have flexible slit B (6024), location-plate (6021) are fixed by screw
In the level trough of T-shaped chute (404), the circular arc of locating detent (6022) compresses point (6023) and picture frame (3) upper end
Face contacts.
7. a kind of five degree of freedom fine motion adjustment mechanism of optical element according to claim 6, it is characterised in that the mirror
Frame (3) upper surface and the low groove (307) correspondence position are provided with upper groove (306), the circular arc of locating detent (6022)
Compression point (6023) and the upper groove (306) contact.
8. the five degree of freedom fine motion adjustment mechanism of a kind of optical element according to one claim of any of the above, its feature
It is, be additionally provided with the slotted eye (406) of multiple circumference uniform distributions at microscope base (4) upper end outer, multiple microscope base (4) are coaxially disposed
When, multigroup slotted eye (406) that multiple microscope base (4) are located on same axis is connected by a retaining mechanism (7) respectively.
9. a kind of five degree of freedom fine motion adjustment mechanism of optical element according to claim 8, it is characterised in that the lock
Tight mechanism (7) is that screw-rod structure, screw-rod structure is placed through the slotted eye on same axis (406), and two ends are fixed by nut.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610880399.6A CN106443936A (en) | 2016-10-09 | 2016-10-09 | Five-freedom-degree final motion adjusting mechanism for optical element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610880399.6A CN106443936A (en) | 2016-10-09 | 2016-10-09 | Five-freedom-degree final motion adjusting mechanism for optical element |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106443936A true CN106443936A (en) | 2017-02-22 |
Family
ID=58171883
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610880399.6A Pending CN106443936A (en) | 2016-10-09 | 2016-10-09 | Five-freedom-degree final motion adjusting mechanism for optical element |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106443936A (en) |
Cited By (8)
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| CN107015336A (en) * | 2017-05-23 | 2017-08-04 | 中国工程物理研究院激光聚变研究中心 | A kind of Multifunctional grip system of big radius-thickness ratio optical element |
| CN108594394A (en) * | 2018-05-07 | 2018-09-28 | 东莞市联洲知识产权运营管理有限公司 | A kind of locking device on precision optical instrument |
| WO2019200981A1 (en) * | 2018-04-20 | 2019-10-24 | 深圳光峰科技股份有限公司 | Fixing device, light source system, and optical system |
| CN110471152A (en) * | 2018-05-09 | 2019-11-19 | 深圳光峰科技股份有限公司 | Optical elements immobilizing structure and Lens assembly and illumination testing apparatus |
| CN110908058A (en) * | 2019-10-31 | 2020-03-24 | 中国航空工业集团公司洛阳电光设备研究所 | Multi freedom optical axis timing device |
| CN111736289A (en) * | 2019-03-25 | 2020-10-02 | 信泰光学(深圳)有限公司 | Optical module |
| CN112068277A (en) * | 2020-08-31 | 2020-12-11 | 中国科学院长春光学精密机械与物理研究所 | Multistage flexible supporting structure of large-caliber optical lens |
| CN112246561A (en) * | 2020-09-27 | 2021-01-22 | 长春师范大学 | Radial adjusting and fastening device for machining of ultra-precise optical grazing incidence reflector |
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| US20040008429A1 (en) * | 2002-07-02 | 2004-01-15 | Watson Douglas C. | Kinematic optical mounting assembly with flexures |
| US20110051110A1 (en) * | 2005-06-20 | 2011-03-03 | Carl Zeiss Smt Ag | Lens comprising a plurality of optical element disposed in a housing |
| CN102375200A (en) * | 2010-08-18 | 2012-03-14 | 上海微电子装备有限公司 | Radial adjusting device of adjustable optical element |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107015336A (en) * | 2017-05-23 | 2017-08-04 | 中国工程物理研究院激光聚变研究中心 | A kind of Multifunctional grip system of big radius-thickness ratio optical element |
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| WO2019200981A1 (en) * | 2018-04-20 | 2019-10-24 | 深圳光峰科技股份有限公司 | Fixing device, light source system, and optical system |
| CN108594394A (en) * | 2018-05-07 | 2018-09-28 | 东莞市联洲知识产权运营管理有限公司 | A kind of locking device on precision optical instrument |
| CN108594394B (en) * | 2018-05-07 | 2020-09-18 | 江西合力盛科技有限公司 | Locking device on precision optical instrument |
| CN110471152A (en) * | 2018-05-09 | 2019-11-19 | 深圳光峰科技股份有限公司 | Optical elements immobilizing structure and Lens assembly and illumination testing apparatus |
| CN111736289A (en) * | 2019-03-25 | 2020-10-02 | 信泰光学(深圳)有限公司 | Optical module |
| CN110908058A (en) * | 2019-10-31 | 2020-03-24 | 中国航空工业集团公司洛阳电光设备研究所 | Multi freedom optical axis timing device |
| CN112068277A (en) * | 2020-08-31 | 2020-12-11 | 中国科学院长春光学精密机械与物理研究所 | Multistage flexible supporting structure of large-caliber optical lens |
| CN112246561A (en) * | 2020-09-27 | 2021-01-22 | 长春师范大学 | Radial adjusting and fastening device for machining of ultra-precise optical grazing incidence reflector |
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Application publication date: 20170222 |