CN115728891A - Alignment device capable of being precisely adjusted and use method thereof - Google Patents

Alignment device capable of being precisely adjusted and use method thereof Download PDF

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Publication number
CN115728891A
CN115728891A CN202211477640.2A CN202211477640A CN115728891A CN 115728891 A CN115728891 A CN 115728891A CN 202211477640 A CN202211477640 A CN 202211477640A CN 115728891 A CN115728891 A CN 115728891A
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CN
China
Prior art keywords
adjusting plate
aligned
assembly
reference object
posture
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Pending
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CN202211477640.2A
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Chinese (zh)
Inventor
闫永清
盛立志
强鹏飞
许泽方
周晓红
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XiAn Institute of Optics and Precision Mechanics of CAS
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XiAn Institute of Optics and Precision Mechanics of CAS
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Application filed by XiAn Institute of Optics and Precision Mechanics of CAS filed Critical XiAn Institute of Optics and Precision Mechanics of CAS
Priority to CN202211477640.2A priority Critical patent/CN115728891A/en
Publication of CN115728891A publication Critical patent/CN115728891A/en
Pending legal-status Critical Current

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Abstract

The invention relates to an alignment device used in the field of optical precision machinery, in particular to an alignment device capable of being precisely adjusted and a use method thereof. The composite structure aligning device solves the technical problems that the existing composite structure aligning device with multi-dimensional adjustment cannot perform central light passing and multi-dimensional precise adjustment, and is weak in bearing and small in carrying capacity. The alignment device comprises a support component, a carrying component and a fine adjustment component; the supporting component comprises a plurality of guide shafts and a plurality of top columns; the carrying assembly comprises a posture adjusting plate, a position adjusting plate, an object to be aligned supporting piece and a reference object supporting piece; the posture adjusting plate is sleeved on the plurality of guide shafts; the object to be aligned support is arranged on the position adjusting plate; the fine adjustment assembly comprises a plurality of position adjustment differential heads and a plurality of posture adjustment differential heads; a plurality of attitude control differential heads are arranged on the attitude control plate and used for reducing attitude deviation, and a plurality of position control differential heads are arranged on the side wall of the position control plate and used for reducing position deviation.

Description

Alignment device capable of being precisely adjusted and use method thereof
Technical Field
The invention relates to an alignment device used in the field of optical precision machinery, in particular to an alignment device capable of being precisely adjusted and a use method thereof.
Background
At present, in the optics field, but alignment apparatus that multidimension was adjusted is mostly compound structure, if realize five dimension and adjust and need come the concatenation combination through three one-dimensional displacement platform and two one-dimensional sloping platforms, this kind of compound structure can't carry out heavy-calibre and lead to light, and its bearing capacity is relatively poor and can bear the weight of the volume less. For some special purposes, such as in the adjustment and alignment application of an X-ray focusing lens, a collimator and a focusing lens group of the X-ray focusing lens are both of a multilayer nested structure, the corresponding layers of the two optical elements need to be precisely aligned in position and posture, and real-time optical monitoring needs to be carried out in the alignment process, so that the center of an alignment device needs to be light-transmitting so as to carry out real-time monitoring on each layer by using a telecentric optical imaging system and the like, and the existing spliced composite structure cannot carry out large-caliber light-transmitting and multi-dimensional precise adjustment; in addition, the mass and volume of the collimator and the focusing lens group are large, the bearing capacity and the bearable volume of the existing splicing type composite structure are poor, so that the use requirement cannot be met, and the cost is generally high.
Disclosure of Invention
The invention aims to solve the technical problems that the existing optical alignment device capable of being adjusted in multiple dimensions is mostly of a composite structure, large-caliber light transmission cannot be carried out, multiple-dimensional precise adjustment cannot be realized, the bearing capacity is poor, and the bearing volume is small, and provides the alignment device capable of being adjusted in precise manner and a using method thereof. The alignment device capable of being adjusted precisely meets the alignment application requirement that the center needs to be light-transmitting or needs to be internally observed through structural design.
The technical solution of the invention is as follows:
a fine-adjustable alignment device is characterized in that: comprises a supporting component, a carrying component and a fine adjustment component;
the carrying assembly comprises a posture adjusting plate, a position adjusting plate coaxially arranged in the middle of the upper end face of the posture adjusting plate, an object to be aligned supporting piece arranged on the position adjusting plate and a reference object supporting piece positioned above the posture adjusting plate; the center of the reference object supporting piece is provided with a through hole matched with the reference object and used for placing the reference object;
the centers of the posture adjusting plate and the position adjusting plate are respectively provided with a light through hole corresponding to the light through hole of the reference object;
the center of the support piece of the object to be aligned is axially provided with a central light through hole, the outer side of the central light through hole is circumferentially provided with a plurality of axial light through holes, the support piece of the object to be aligned is used for placing the object to be aligned, and the plurality of axial light through holes are positioned on the inner side of the object to be aligned;
the supporting component comprises a plurality of guide shafts and a top column arranged at the lower end of each guide shaft; the top ends of the guide shafts are fixedly arranged on the bottom surface of the reference object supporting piece, and the guide shafts are uniformly arranged along the circumferential direction;
the guide shaft is connected with the support pillar through threads;
the attitude adjusting plates are sleeved on the guide shafts, the lower end faces of the attitude adjusting plates are in contact with the upper end faces of the jacking columns, the attitude adjusting plates are connected with the guide shafts in a sliding mode, the jacking columns move upwards relative to the guide shafts by rotating the jacking columns, and the attitude adjusting plates are pushed to move upwards;
the fine adjustment assembly comprises a plurality of position adjustment differential heads and a plurality of posture adjustment differential heads;
the plurality of posture adjusting differential heads are uniformly arranged on the lower end surface of the posture adjusting plate along the circumferential direction, and the action ends of the posture adjusting differential heads penetrate through the posture adjusting plate to be in contact with the bottom of the position adjusting plate;
the position adjusting differential heads are uniformly arranged on the side wall of the position adjusting plate along the circumferential direction, and the action ends of the position adjusting differential heads penetrate through the side wall of the position adjusting plate to be contacted with the outer wall of the object supporting piece to be aligned;
furthermore, the lower extreme of guiding axle is provided with the external screw thread, the upper end of fore-set is provided with the screw hole with external screw thread looks adaptation, and the lower extreme of guiding axle stretches into the screw hole of fore-set.
Furthermore, the inner side wall of the position adjusting plate is provided with an annular step structure; the object to be aligned support is arranged on the step structure.
Further, the linear bearing with the clamping handle is further included; the linear bearings with the clamping handles are respectively sleeved on the guide shafts, and the lower end surfaces of the linear bearings with the clamping handles are contacted with the upper end surfaces of the ejection columns; the posture adjusting plate is sleeved and fixed on a plurality of linear bearings with clamping handles.
Further, the number of the guide shafts is two; the number of the position adjusting differential heads is three; the number of the posture adjusting differential heads is three.
Further, the object support to be aligned is hub-shaped; the top column is made of copper.
Furthermore, the position adjusting plate is of an annular structure, three planes are uniformly arranged on the outer side surface of the position adjusting plate along the circumferential direction, and the three position adjusting differential heads are respectively arranged on the three planes.
The use method of the alignment device capable of being precisely adjusted is characterized by comprising the following steps of:
1) Placing a fiducial on a fiducial support;
2) Mounting an assembly to be aligned on a support of the assembly to be aligned;
3) Simultaneously rotating the jacking column to drive the attitude adjusting plate to place the to-be-aligned assembly object and the reference object at the primary design position, and fixing the attitude adjusting plate;
4) The position deviation of the reference object and the assembly to be aligned is reduced by adjusting the position adjusting differential head;
5) Reducing the attitude deviation of the reference object and the assembly object to be aligned by adjusting the attitude adjusting differential head;
6) Judging whether the postures and the positions of the reference object and the assembly to be aligned meet the requirements or not, and if so, finishing the alignment of the reference object and the assembly to be aligned; if not, returning to the step 4) until the postures and positions of the reference object and the assembly to be aligned meet the requirements, and finishing the alignment of the reference object and the assembly to be aligned.
Compared with the prior art, the invention has the following beneficial effects:
(1) The aligning device capable of being precisely adjusted is provided with the light through hole for light through, large stroke coarse adjustment can be realized through the threaded matching of the top column and the guide shaft, the precise adjustment of the position and the posture can be realized through the arrangement of the position adjusting differential head and the posture adjusting differential head, the problems of light through in the middle and precise adjustment between a reference object and an assembly object to be aligned are solved, and the support piece of the object to be aligned is supported through the posture adjusting plate and the position adjusting plate, so that the bearing quality and the bearing volume are greatly improved.
(2) According to the alignment device capable of being precisely adjusted, the posture adjusting plate is arranged on the guide shaft through the linear bearing with the clamping handle, the linear bearing with the clamping handle is high in matching precision with the guide shaft and can smoothly slide up and down, and after the linear bearing with the clamping handle reaches a proper position, the linear bearing with the clamping handle can be locked up and down through the screw, so that relative sliding is prevented, and the positioning stability is ensured.
(3) According to the alignment device capable of being precisely adjusted, the number of the guide shafts is two, so that the weight of the device can be reduced as much as possible, and meanwhile, the device is convenient to mount and test and operate; the number of the position adjusting differential heads and the number of the posture adjusting differential heads are three, and the fine adjustment in all directions can be ensured under the condition that the number is as small as possible.
(4) According to the alignment device capable of being precisely adjusted, the support piece of the object to be aligned is in a hub shape, so that the alignment device has a certain bearing capacity and can ensure smooth light transmission; the position adjusting differential head is arranged as a plane, so that the adjusting accuracy is ensured.
(5) The use method of the alignment device capable of being precisely adjusted, disclosed by the invention, has the advantages that the coarse-step large-stroke adjustment is firstly carried out, then the fine adjustment of the position and the posture is carried out, the operation is simple, the efficiency is high, and the alignment precision is high.
Drawings
FIG. 1 is a schematic assembly view of an embodiment of a fine adjustable alignment apparatus of the present invention (with a reference object and an assembly object to be aligned mounted thereon);
FIG. 2 is a schematic structural diagram of an embodiment of a precisely adjustable alignment apparatus of the present invention;
FIG. 3 is a schematic cross-sectional view of one embodiment of a precisely adjustable alignment apparatus of the present invention;
FIG. 4 is a schematic view of a structure of a reference object;
fig. 5 is a schematic structural view of an assembly to be aligned.
Reference numerals are as follows:
1-top column, 2-attitude adjusting plate, 3-linear bearing with clamping handle, 4-position adjusting plate, 5-guide shaft, 6-reference object support, 7-reference object, 8-assembly to be aligned, 9-support to be aligned, 10-position adjusting differential head, and 11-attitude adjusting differential head.
Detailed Description
The invention is explained in detail below with reference to the figures and the specific embodiments.
The structures of the action object reference object 7 and the to-be-aligned assembly object 8 in the present embodiment are shown in fig. 4 and 5, respectively, and are merely used to exemplify the present invention.
As shown in fig. 1-3, the present invention relates to a fine adjustable alignment apparatus, which comprises a support assembly, a carrier assembly and a fine adjustment assembly.
The carrier assembly comprises a posture adjusting plate 2, a position adjusting plate 4 coaxially arranged in the middle of the upper end face of the posture adjusting plate 2, an object support 9 to be aligned arranged on the position adjusting plate 4 and a reference object support 6 positioned above the posture adjusting plate 2. The center of the reference object support 6 is provided with a through hole matched with the reference object 7 for installing the reference object 7. As shown in fig. 1, the reference object support 6 is a circular stage with a central through hole, the diameter of the through hole is matched with the outer diameter of the reference object 7, the upper end of the reference object 7 is installed at the position of the through hole, and when the reference object support 6 is used, the reference object support is fixed through external equipment, so that the position of the reference object 7 is ensured to be unchanged. The centers of the posture adjusting plate 2 and the position adjusting plate 4 are respectively provided with a light through hole corresponding to a light through port of the reference object 7. The posture adjusting plate 2 is a flat plate structure with two narrow ends and a fat middle part, and other structures can be adopted in other embodiments as long as the middle size is ensured to be enough for installing the assembly 8 to be aligned; the two narrow ends of the posture adjusting plate 2 are respectively provided with a mounting hole, and the posture adjusting plate 2 is fixedly sleeved on the two linear bearings 3 with the clamping handles through the two mounting holes. The linear bearing 3 with the clamping handle and the guide shaft 5 are high in matching precision, when the height of the posture adjusting plate 2 is adjusted, the ejection column 1 is driven to move up and down relative to the guide shaft 5 by rotating the ejection column 1, the linear bearing 3 with the clamping handle is driven to move up and down along the guide shaft 5, and then the height position of the posture adjusting plate 2 is adjusted. The inside wall of position control board 4 is provided with annular stair structure, treats that alignment thing support piece 9 is wheel hub form circular slab, treats that alignment thing support piece 9 center is provided with the light hole that leads to of center along the axial, and the light hole outside is led to in the center is provided with a plurality of axial and leads to the light hole along circumference, treats that alignment thing support piece 9 installs on stair structure. During alignment, the to-be-aligned assembly 8 is placed on the upper surface of the to-be-aligned assembly supporting piece 9, the to-be-aligned assembly supporting piece 9 has a bearing and supporting effect on the to-be-aligned assembly 8, and the plurality of axial light through holes are located in the inner side of the to-be-aligned assembly 8, so that light below the attitude adjusting plate 2 can smoothly enter the to-be-aligned assembly 8 from the to-be-aligned assembly supporting piece 9 and can be emitted from the light through hole of the reference object 7. The posture adjusting plate 2 fixed on the linear bearing 3 with the clamping handle is driven by the rotary top column 1, then the position adjusting plate 4 is driven, the object to be aligned supporting piece 9 is waited, the object to be aligned 8 is waited to be aligned, the linear bearing 3 with the clamping handle and the guide shaft 5 are high in matching precision, the straightness and the relative parallelism of the two guide shafts 5 are high, and the precision of the position is guaranteed.
The support assembly comprises two guide shafts 5 and a top post 1 arranged at the lower end of each guide shaft 5, and two linear bearings 3 with clamping handles. The top ends of the two guide shafts 5 are fixedly arranged on the bottom surface of the reference object supporting piece 6, the two guide shafts 5 are uniformly arranged along the circumferential direction, and the straightness and the relative parallelism of the two guide shafts 5 are high. The lower extreme of guiding axle 5 is provided with the external screw thread, and the upper end of fore-set 1 is provided with the screw hole with external screw thread looks adaptation, and 5 lower extremes of guiding axle stretch into the screw hole of fore-set 1, connect through screw-thread fit. By rotating the top column 1, the adjustable posture adjusting plate 2 moves up and down, and adjustment of a large stroke of the object to be aligned 8 is achieved, wherein the top column 1 is made of copper materials. Two linear bearings 3 with clamping handles are respectively sleeved on two guide shafts 5, and the lower end face of each linear bearing 3 with clamping handles is contacted with the upper end face of the top column 1.
The fine adjustment assembly includes three position adjustment differentiation heads 10 and three attitude adjustment differentiation heads 11. Three posture adjustment differential heads 11 are uniformly arranged on the posture adjustment plate 2 along the circumferential direction, the action end of the posture adjustment differential head 11 penetrates through the posture adjustment plate 2 to be contacted with the bottom of the position adjustment plate 4, the posture adjustment differential head 11 arranged on the posture adjustment plate 2 is adjusted to be capable of carrying out precise relative posture adjustment on the alignment assembly 8 and the reference object 7, the angular deviation and other posture deviations existing between the adjustment heads are reduced, and the adjustment heads can be locked up and down through screws to prevent relative sliding. The position adjusting plate 4 is of an annular structure, three planes are uniformly arranged on the outer side surface of the position adjusting plate 4 along the circumferential direction, and the three position adjusting differential heads 10 are respectively arranged on the three planes. The three position adjusting differential heads 10 are uniformly arranged on the side wall of the position adjusting plate 4 along the circumferential direction, and the action ends of the position adjusting differential heads 10 penetrate through the side wall of the position adjusting plate 4 to be contacted with the outer wall of the object supporting piece 9 to be aligned; the position adjusting differential head 10 arranged on the position adjusting plate 4 can be adjusted to precisely adjust the relative position of the assembly 8 to be aligned and the reference object 7, so that the position deviation is reduced, and accurate alignment is ensured.
The alignment device capable of being adjusted precisely has large stroke adjustment capacity and strong bearing capacity, simultaneously meets the alignment adjustment of large-volume optical pieces, and can realize the precise adjustment of the relative positions of an assembly to be aligned and a reference object by adjusting the position adjustment differential head 10 and the posture adjustment differential head 11.
Meanwhile, the invention also provides a use method of the alignment device capable of being precisely adjusted, which comprises the following steps:
1) Placing a fiducial 7 on the fiducial support 6;
2) Mounting the assembly to be aligned 8 on the support to be aligned 9;
3) The two support posts 1 are rotated simultaneously, the attitude adjusting plate 2 is driven to place an assembly 8 to be aligned at a preliminary proper position, and the attitude adjusting plate 2 is fixed through the linear bearing 3 with the clamping handle;
4) The position deviation of the assembly 8 to be aligned and the reference object 7 is reduced by adjusting the position adjusting differential head 10;
5) Reducing the attitude deviation of the assembly 8 to be aligned and the reference object 7 by adjusting the attitude adjusting differential head 11;
6) Judging whether the postures and the positions of the reference object 7 and the assembly object 8 to be aligned meet the requirements, if so, finishing the alignment of the reference object 7 and the assembly object 8 to be aligned; if not, returning to the step 4) until the postures and positions of the reference object 7 and the assembly 8 to be aligned meet the requirements, and finishing the alignment of the reference object 7 and the assembly 8 to be aligned.

Claims (8)

1. A finely adjustable alignment device, characterized by: comprises a supporting component, a carrying component and a fine adjustment component;
the carrier assembly comprises a posture adjusting plate (2), a position adjusting plate (4) coaxially arranged in the middle of the upper end face of the posture adjusting plate (2), an object support member (9) to be aligned arranged on the position adjusting plate (4) and a reference object support member (6) positioned above the posture adjusting plate (2); the center of the reference object supporting piece (6) is provided with a through hole matched with the reference object (7) and used for placing the reference object (7);
the centers of the posture adjusting plate (2) and the position adjusting plate (4) are respectively provided with a light through hole corresponding to a light through hole of the reference object (7);
a central light through hole is axially formed in the center of the object to be aligned support piece (9), a plurality of axial light through holes are circumferentially formed in the outer side of the central light through hole, the object to be aligned support piece (9) is used for placing an assembly (8) to be aligned, and the plurality of axial light through holes are located on the inner side of the assembly (8) to be aligned;
the supporting assembly comprises a plurality of guide shafts (5) and a top column (1) arranged at the lower end of each guide shaft (5); the top ends of the guide shafts (5) are fixedly arranged on the bottom surface of the reference object supporting piece (6), and the guide shafts (5) are uniformly arranged along the circumferential direction;
the guide shaft (5) is connected with the support pillar (1) through threads;
the posture adjusting plate (2) is sleeved on the guide shafts (5), the lower end face of the posture adjusting plate is in contact with the upper end face of the ejection column (1), the posture adjusting plate (2) is in sliding connection with the guide shafts (5), the ejection column (1) moves up and down relative to the guide shafts (5) by rotating the ejection column (1), and the posture adjusting plate (2) is driven to move up and down;
the fine adjustment assembly comprises a plurality of position adjustment differential heads (10) and a plurality of posture adjustment differential heads (11);
the plurality of posture adjusting differential heads (11) are uniformly arranged on the lower end surface of the posture adjusting plate (2) along the circumferential direction, and the action ends of the posture adjusting differential heads (11) penetrate through the posture adjusting plate (2) to be contacted with the bottom of the position adjusting plate (4);
a plurality of position control divides head (10) evenly to set up on position control board (4) lateral wall along circumference, and position control divides head (10) effect end to pass position control board (4) lateral wall and treats alignment thing support piece (9) outer wall contact.
2. A finely adjustable alignment device as claimed in claim 1, wherein:
the lower extreme of guiding axle (5) is provided with the external screw thread, the upper end of fore-set (1) is provided with the screw hole with external screw thread looks adaptation, and the lower extreme of guiding axle (5) stretches into the screw hole of fore-set (1).
3. A fine adjustable alignment device as claimed in claim 1 or 2, wherein:
the inner side wall of the position adjusting plate (4) is provided with an annular step structure;
the object support (9) to be aligned is arranged on the step structure.
4. A finely adjustable alignment device as claimed in claim 3, wherein:
the device also comprises a plurality of linear bearings (3) with clamping handles;
the linear bearings (3) with the clamping handles are respectively sleeved on the guide shafts (5), and the lower end surfaces of the linear bearings (3) with the clamping handles are contacted with the upper end surfaces of the ejection columns (1);
the posture adjusting plate (2) is sleeved and fixed on a plurality of linear bearings (3) with clamping handles.
5. A finely adjustable alignment device as claimed in claim 4, wherein:
the number of the guide shafts (5) is two;
the number of the position adjusting differential heads (10) is three;
the number of the posture adjusting differential heads (11) is three.
6. A fine adjustable alignment device as claimed in claim 5, wherein:
the object to be aligned support (9) is in a hub shape;
the top column (1) is made of copper.
7. A finely adjustable alignment device as claimed in claim 6, wherein:
the position adjusting plate (4) is of an annular structure, three planes are uniformly arranged on the outer side surface of the position adjusting plate along the circumferential direction, and the three position adjusting differential heads (10) are respectively arranged on the three planes.
8. A method of using a finely adjustable alignment device as claimed in any of claims 1 to 7, comprising the steps of:
1) Placing a reference (7) on a reference support (6);
2) Mounting the assembly to be aligned (8) on the support (9) of the alignment object;
3) Simultaneously rotating the jacking column (1) to drive the attitude adjusting plate (2) to place the object (8) to be aligned at the primary design position, and fixing the attitude adjusting plate (2);
4) Reducing the position deviation of the assembly (8) to be aligned and the reference object (7) by adjusting the position adjusting differential head (10);
5) Reducing the attitude deviation of the assembly (8) to be aligned and the reference object (7) by adjusting the attitude adjustment differential head (11);
6) Judging whether the postures and the positions of the reference object (7) and the assembly to be aligned (8) meet the requirements, if so, finishing the alignment of the reference object (7) and the assembly to be aligned (8); if not, returning to the step 4) until the postures and positions of the reference object (7) and the assembly (8) to be aligned meet the requirements, and finishing the alignment of the reference object (7) and the assembly (8) to be aligned.
CN202211477640.2A 2022-11-23 2022-11-23 Alignment device capable of being precisely adjusted and use method thereof Pending CN115728891A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202211477640.2A CN115728891A (en) 2022-11-23 2022-11-23 Alignment device capable of being precisely adjusted and use method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202211477640.2A CN115728891A (en) 2022-11-23 2022-11-23 Alignment device capable of being precisely adjusted and use method thereof

Publications (1)

Publication Number Publication Date
CN115728891A true CN115728891A (en) 2023-03-03

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Application Number Title Priority Date Filing Date
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116626839A (en) * 2023-05-30 2023-08-22 浙江荷湖科技有限公司 High-precision multi-axis adjusting device for micro lens array

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116626839A (en) * 2023-05-30 2023-08-22 浙江荷湖科技有限公司 High-precision multi-axis adjusting device for micro lens array
CN116626839B (en) * 2023-05-30 2024-03-29 浙江荷湖科技有限公司 High-precision multi-axis adjusting device for micro lens array

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