KR101766982B1 - Capacitive Torque Sensor Capable of Decoupling from External Interference - Google Patents

Capacitive Torque Sensor Capable of Decoupling from External Interference Download PDF

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KR101766982B1
KR101766982B1 KR1020150190598A KR20150190598A KR101766982B1 KR 101766982 B1 KR101766982 B1 KR 101766982B1 KR 1020150190598 A KR1020150190598 A KR 1020150190598A KR 20150190598 A KR20150190598 A KR 20150190598A KR 101766982 B1 KR101766982 B1 KR 101766982B1
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South Korea
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electrode
plate
axis
protruding bar
bar
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KR1020150190598A
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Korean (ko)
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KR20170080903A (en
Inventor
최혁렬
김의겸
김용범
석동엽
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성균관대학교산학협력단
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L3/00—Measuring torque, work, mechanical power, or mechanical efficiency, in general
    • G01L3/02—Rotary-transmission dynamometers
    • G01L3/04—Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft
    • G01L3/10—Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft involving electric or magnetic means for indicating
    • G01L3/106—Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft involving electric or magnetic means for indicating involving electrostatic means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)

Abstract

The present invention relates to a capacitive torque sensor for measuring a torque generated in a Z-axis direction passing through a first member and a second member in a joint region between a first member and a second member, And the electrostatic capacity between the protruding bar of the plate and the electrode of the base plate connected to the second member is detected to measure the Z-axis direction torque.

Description

[0001] The present invention relates to a capacitive torque sensor capable of decoupling external interference,

The present invention relates to a capacitive torque sensor. More particularly, the present invention relates to a digital type sensor capable of decoupling external interference.

Torque sensors are an essential component used in the joints of robots. In particular, the torque sensor improves the reliability and accuracy of robots in multi - jointed joints, enabling various tasks that could not be accomplished by conventional position control alone.

However, most torque sensors so far use a strain gauge based on the principle of resistance change and must go through a process of bonding the strain gauge and require a complicated structure and algorithm to eliminate interference from axes other than the reference axis. .

Therefore, the conventional torque sensor as described above is not commonly used in the robot field, despite the necessity of a complicated manufacturing process and a high cost.

In addition, an additional signal amplifier is required outside, which is inconvenient to use.

Korean Patent No. 10-1293984 "Strain gauge-type force-torque sensor and its manufacturing method"

An object of the present invention is to provide a capacitive torque sensor.

Another object of the present invention is to provide a capacitive torque sensor of simple structure.

It is still another object of the present invention to provide a capacitive torque sensor capable of removing external interference applied to an axis other than the reference axis and measuring only the torque with respect to the center axis.

These and other objects of the present invention can be achieved by a capacitive torque sensor according to the present invention.

A capacitive torque sensor according to an embodiment of the present invention is a torque sensor for measuring a torque generated in a Z-axis direction passing through a first member and a second member in a joint region between a first member and a second member, A sensor, comprising: a base plate; and a deformation plate assembled to the top of the base plate, wherein the deformation plate has a center plate connected to the first member and a center having the same center as the center plate, Wherein the center plate includes a first protruding bar and a second protruding bar protruding toward the base plate from a first position and a second position on the X axis that are symmetrical with respect to the Z axis The base plate is connected to the ring plate and the second member, and the first projecting bar A first groove and a second groove into which the first projecting bar and the second projecting bar are respectively inserted and a first electrode and a second electrode respectively located on one side of the first groove and the second groove, And a detection plate for detecting a capacitance generated between the first protrusion and the second electrode and a capacitance generated between the second protrusion and the second electrode, wherein the center plate and the ring plate connect the center plate and the ring plate in the Y- Wherein when the first member is rotated relative to the second member about the Z-axis, the center plate connected to the first member is rotated, and the ring plate is rotated Wherein the member has a shape in which both end portions connected to the center plate and the ring plate are thinned toward the central portion The.

The area of the first protruding bar may be wider than the area of the first electrode and the area of the second protruding bar may be wider than the area of the second electrode in the facing direction.

The first projecting bar and the second projecting bar may have a symmetrical shape with respect to the Z axis.

The surface of the first protrusion and the first electrode facing each other is parallel to the Z axis direction and the surface of the second protrusion and the second electrode facing each other is parallel to the Z axis direction .

When the center plate is rotated by the rotational force about the X-axis, the angle between the first protrusion and the first electrode may be the same as the angle between the second protrusion and the second electrode.

The first electrode and the second electrode may be located on one side of a clockwise direction of the first groove and the second groove with respect to the Z axis or on one side of a counterclockwise direction.

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The center plate and the ring plate may be connected to two connecting members positioned on the Y axis which are symmetrical to the Z axis.

The center plate and the ring plate are connected by at least two pairs of connecting members symmetrical to the Z axis, and at least two connecting members located respectively at one side and the other side of the Z axis are disposed at positions symmetrical to the Y axis .

And a cover plate assembled on the deformed plate and covering a space between the center plate and the ring plate.

The present invention has the effect of providing a capacitive torque sensor configured to be capable of excluding external interference with a simple structure and measuring only the torque in the reference axis.

1 is a perspective view and an exploded perspective view showing a torque sensor according to an embodiment of the present invention.
2 is a view showing a torque sensor according to an embodiment of the present invention installed in a joint region.
3 is a perspective view showing a center plate and a detection plate of a torque sensor according to an embodiment of the present invention.
FIG. 4 is a plan view showing a center plate and a detection plate of a torque sensor according to an embodiment of the present invention, in which (a) is a state in which the rotor is not rotated about the Z axis, (b) ) Is a view showing a state of being rotated clockwise.
5 is a cross-sectional view taken along line SS 'of FIG.
FIG. 6 is a plan view showing a center plate and a detection plate of a torque sensor according to an embodiment of the present invention, in which (a) is a state in which no external force is applied, (b) (c) is a view showing a state in which a force acts in the negative direction of the x-axis.
7 is a plan view showing a deformation plate of a torque sensor according to an embodiment of the present invention.
8 is a plan view showing another modified plate of the torque sensor according to an embodiment of the present invention.
9 is a view showing a case where a torque is generated around a X-axis in a torque sensor according to an embodiment of the present invention.
FIG. 10 is a view showing a positional change of the electrodes facing each other when the moment acts.
FIG. 11 is a graph showing a relationship between a change in capacitance between a center plate and a first electrode when a rotational force about the X-axis is generated in a torque sensor according to an embodiment of the present invention, (b) And Fig.

Hereinafter, a capacitive torque sensor according to the present invention will be described in detail with reference to the accompanying drawings.

In the following description, only parts necessary for understanding a capacitive torque sensor according to an embodiment of the present invention will be described, and descriptions of other parts may be omitted so as not to disturb the gist of the present invention.

In addition, terms and words used in the following description and claims should not be construed to be limited to ordinary or dictionary meanings, but are to be construed in a manner consistent with the technical idea of the present invention As well as the concept.

Throughout the specification, when a part is referred to as being "connected" to another part, it includes not only "directly connected" but also "indirectly connected" .

Also, throughout the specification, when an element is referred to as "including" an element, it means that the element may include other elements as well, without departing from the other elements unless specifically stated otherwise.

The terms "center", "vertical", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal" The direction or positional relationship indicated by "outside", "x axis", "y axis", "z axis", etc. is based on the direction or positional relationship indicated by the accompanying drawings, And is not intended to suggest or imply that the apparatus or components pointed out are necessarily constructed or operated in a specific orientation or orientation, and therefore should not be construed as a limitation on the present invention. In addition, the terms "first "," second "are merely descriptive and should not be construed to imply or imply relative importance.

1 is a perspective view and an exploded perspective view of a torque sensor according to an embodiment of the present invention. As shown in FIG. 1, the torque sensor 100 according to an embodiment of the present invention includes a deformation plate 10, a base plate 20, and a cover plate 30.

The deformation plate 10 is a plate which is deformed by the torque with respect to the reference axis. The base plate 20 is a plate for detecting a torque by detecting a capacitance value which changes in accordance with deformation of the deformation plate 10, The plate 30 is a plate that covers the sensor value by other electrodes or the like approaching from outside.

As shown in FIG. 2, the torque sensor according to an embodiment of the present invention is integrally assembled and installed in a joint region where the first member 200 and the second member 300 of the robot meet, It is possible to detect the torque when the first member and the second member rotate relative to each other with reference to a reference axis (hereinafter Z-axis) passing through the second member.

1 to 3, the deformation plate 10 includes a center plate 11 connected to the first member 200. [

A first protruding bar 12 and a second protruding bar 13 protruding toward the base plate 20 are formed in the center plate 11. The first protruding bar 12 and the second protruding bar 13 are formed opposite to each other with respect to the Z axis, and are formed in a symmetrical shape at symmetrical positions as shown in FIGS. 1 and 3 More preferable.

The base plate 20 has a first groove 22 and a second groove 23 into which the first protruding bar 12 and the second protruding bar 13 are inserted, And a detection plate 21 including a first electrode 24 and a second electrode 25.

1, when the deformation plate 10 is assembled on the base plate 20, the first protrusion bar 12 of the deformation plate 10 is inserted into the first groove 22 of the base plate 20 A capacitance is generated between the first protruding bar 12 and the first electrode 24 when power is applied to the first electrode 24 located at one side of the first groove.

The second protruding bar 13 of the deformation plate 10 is inserted into the second groove 23 of the base plate 20 and when the second electrode 25 located at one side of the second groove is powered, A capacitance is generated between the protruding bar 13 and the second electrode 25.

To this end, it is preferable that the first protruding bar 12 and the second protruding bar 13 or the entire deformation plate 10 are grounded, and thus the deformation plate 20 may be referred to as a ground plate.

Power is supplied to the first electrode 24 and the second electrode 25 so that the first electrostatic capacity C1 generated between the first protruding bar 12 and the first electrode 24, The detection plate 21 may be formed of, for example, a printed circuit board (PCB) in order to detect the second capacitance C2 generated between the first electrode 13 and the second electrode 25.

Referring to FIGS. 1 and 2, a plurality of fastening holes are formed in the center plate 11 and can be coupled to the first member 200 by a fastening member such as a bolt, and the first member rotates about the Z axis The center plate 11 can also rotate together.

The detection plate 21 is integrally coupled to the lower plate 26 of the base plate 20 coupled to the second member 300 and moves integrally with the second member.

Therefore, when the first member 200 is rotated about the Z axis in the state where the second member 300 is fixed, the first protruding bar 12 and the second protruding bar 13 connected to the first member are connected to the first electrode 200, The capacitance between the first electrode 24 and the second electrode 25 changes as the distance between the first electrode 24 and the second electrode 25 changes, and the torque sensor 100 according to the embodiment of the present invention, It is possible to detect the Z-axis direction torque generated between the members.

This will be described in more detail with reference to FIGS. 4 and 5. FIG.

4 is a plan view of the torque sensor 100 according to an embodiment of the present invention. In order to more easily explain the torque detection method of the torque sensor according to the embodiment of the present invention, only the center plate 11 and the detection plate 21 are shown in FIG. 4 in the torque sensor according to the embodiment of the present invention.

4 (a) shows a state in which the first member 200 and the second member 300 are not rotated around the Z-axis, in which the first projecting bar 12 and the first electrode 24 are spaced apart from each other by a distance d 10 , and the second projecting bar 13 and the second electrode 25 are spaced apart from each other by a distance d 20 .

At this time, when the first member 200 rotates counterclockwise about the Z axis with respect to the second member 300, as shown in FIG. 4 (b), the center plate 11 is also rotated with respect to the detection plate 21 The distance d 11 between the first projecting bar 12 and the first electrode 24 and the distance d 21 between the second projecting bar 13 and the second electrode 25 (D 11 <d 10 , d 21 <d 20 ).

5, even if the center plate 11 relatively rotates about the Z-axis with respect to the detection plate 21, the area A (the overlapping area between the first protruding bar 12 and the first electrode 24) 1 ) does not change. The area A 2 in which the second protruding bar 13 and the second electrode 25 overlap is not changed.

Therefore, according to the following electrostatic capacity formula, the overlapping area A of the protruding bar and the electrode is the same as in the case of FIG. 4 (a) in the case of FIG. 4 (b) The value becomes larger. Accordingly, the torque sensor 100 according to an embodiment of the present invention can detect that a counterclockwise torque has occurred (a torque value can also be obtained).

Figure 112015129184926-pat00001

Where C is the capacitance value, ε is the permittivity of the dielectric, A is the area where the protruding bar and electrode overlap, d is the distance between the protruding bar and the electrode

Similarly, when the first member 200 rotates clockwise about the Z axis with respect to the second member 300, as shown in FIG. 4 (c), the center plate 11 is also located on the detection plate 21 The distance d 12 between the first protruding bar 12 and the first electrode 24 and the distance d 22 between the second protruding bar 13 and the second electrode 25 (D 12 > d 10 , d 22 > d 20 ) before rotation.

At this time, even if the distance between the first protrusion and the first electrode and the distance between the second protrusion and the second electrode are different from each other, the area (A 1 ) where the first protrusion and the first electrode are overlapped and the area the receding distance between the second electrode is overlapped area (a 2) is projected than in the case of not not vary the capacitance Fig. 4 (c) FIG. 4 (a) in the case of when following the formula described electrode decreases the capacitance value Loses. Accordingly, the torque sensor 100 according to an embodiment of the present invention can detect that a torque in a clockwise direction has occurred (a torque value can also be obtained).

4, since the first electrode and the second electrode are located on one side of the first protruding bar and the second protruding bar in the counterclockwise direction, the torque sensor 100 according to the embodiment of the present invention can prevent the center plate 11 The first protruding bar 12 and the second protruding bar 13 are formed between the first protruding bar 12 and the first electrode 24 in accordance with the rotation of the first protruding bar 12 and the second protruding bar 13, And the two electrostatic capacitors C2 are simultaneously increased or decreased.

However, the first electrode and the second electrode are not always limited to one side in the same direction. For example, the first electrode may be located on one side of the first protrusion bar in the clockwise direction, Counterclockwise torque is generated when the first electrostatic capacity is decreased and the second electrostatic capacity is increased. When the first electrostatic capacity is increased and the second electrostatic capacity is decreased, the clockwise torque is increased It can be determined that it has occurred and the torque value can be calculated.

It has been described that the torque sensor 100 according to the embodiment of the present invention can detect the torque with respect to the Z axis as the reference axis. The torque sensor 100 according to an embodiment of the present invention detects the torque about the Z axis which is the reference axis by the force in the Z axis direction corresponding to the noise and the force and the moment generated in the X axis and Y axis The first capacitance and the second capacitance are not changed so that the external interference is decoupled and only the desired torque value is obtained.

Hereinafter, how the torque sensor 100 according to an embodiment of the present invention can decouple external interference will be described in detail.

1. Z-axis direction force Decoupling

The first member 200 and the second member 300 move together in the Z-axis direction when the Z-axis direction force is applied, so that the distance d 1 between the first protruding bar 12 and the first electrode 24 The distance d 2 between the second protruding bar 13 and the second electrode 25 does not change and the area A 1 in which the first protrusion and the first electrode are overlapped and the area in which the second protruding bar and the second electrode overlap And the area (A 2 ) that is formed by the above-mentioned method does not change.

The first capacitance C1 generated between the first protruding bar 12 and the first electrode 24 and the second capacitance generated between the second protruding bar 13 and the second electrode 25 C2 do not change. This means that the detection value of the torque sensor 100 according to the embodiment of the present invention does not change even if a force in the Z-axis direction is applied, which means that external interference due to the Z-axis direction force can be decoupled.

2. X-axis direction force Decoupling

Referring to Fig. 6, decoupling in the case where a force in the X-axis direction is applied will be described. Here, the X-axis direction is perpendicular to the Z-axis and connects the first and second protruding bars 12 and 13 with each other.

6A shows a state in which no force is applied in the X axis direction. The first projecting bar 12 and the first electrode 24 are overlapped by an area A 10 , and the second projecting bar 13 The second electrode 25 is overlapped by an area A 20 .

At this time, when the first member 200 is moved in a positive X-axis direction (right direction in the drawing) with respect to the second member 300, the center plate 11 is also detected as shown in FIG. 6 (b) And moves in the X-axis positive direction relative to the plate 21. [ 6, when the size of the protruding bar is larger than the size of the corresponding electrode, the overlapping area A 11 between the first protruding bar 12 and the first electrode 24 and the overlapping area between the first protruding bar 12 and the first protruding bar 12, The overlapping area A 21 of the one electrode 24 does not change (A 10 = A 11 , A 20 = A 21 ).

In addition, the distance between, because in the X axis direction of the first protruding bar 12 and the distance between the first electrode (24), (d 1) and the second protruding bar 13 and the second electrode (25) (d 2 ).

Therefore, even if a force is applied in the positive direction of the X axis as shown in FIG. 6 (b), the first capacitance C1 generated between the first protruding bar 12 and the first electrode 24, The second capacitance C2 generated between the bar 13 and the second electrode 25 does not change.

6 (c), when the negative directional force of the X-axis is applied, the overlapping area A 12 between the first protruding bar 12 and the first electrode 24 and the overlapping area between the first protruding bar 12 and the first protruding bar 12, and the distance between the first overlap area of the electrodes 24 (a 22) is not changed (a 10 = a 12, a 20 = a 22), the first protruding bar 12 and the first electrode 24 ( d 1 between the first projecting bar 13 and the second projecting bar 13 and the distance d 2 between the second projecting bar 13 and the second electrode 25 do not change. Therefore, even if a force is applied in the negative direction of the X-axis as shown in FIG. 6 (c), the first electrostatic capacity C1 generated between the first protruding bar 12 and the first electrode 24, The second capacitance C2 generated between the bar 13 and the second electrode 25 does not change.

The second protruding bar 13 and the second electrode 25 generated between the first protruding bar 12 and the first electrode 24 even if a force in the X axis direction acts, The second capacitance C2 generated between the first and second capacitors C2 and C3 does not change means that the detection value of the torque sensor 100 according to the embodiment of the present invention does not change and the external resistance due to the X- .

Although the area of the protruding bars 12 and 13 is larger than the area of the electrodes 24 and 25 in FIG. 6, even if the protruding bar moves in the X-axis direction, the overlapping area is not changed. However, The overlapping area between the first protrusion and the first electrode is reduced by A, the overlapping area between the second protrusion and the second electrode is increased by A, and the overlapping area between the second protrusion and the second electrode is increased by the negative direction of the X- The overlapping area between the first projecting portion and the first electrode is increased by B and the overlapping area between the second projecting portion and the second electrode is increased by B so that the first electrostatic capacity C1 and the second electrostatic capacity C2) may not be changed so that the external interference due to the force in the X-axis direction may be decoupled.

3. Y-axis direction force Decoupling

7 shows a top view of a deformation plate 10 according to an embodiment of the invention. 7, the deformation plate 10 according to an embodiment of the present invention includes a ring plate 14 having the same center as the center plate 11 and having a different diameter.

The ring plate 14 is connected to the center plate 11 by the connecting members 15 and 16 while it is also engaged with the base plate 20 by the fastening hole and the fastening member as shown in Fig.

The connecting members 15 and 16 should therefore allow the center plate 11 to rotate relative to the ring plate 14 which moves integrally with the base plate 20 about the Z axis.

More specifically, as the first member 200 rotates about the Z axis relative to the second member 300, the projecting bars 12,13 can move relative to the electrodes 24,25 .

To this end, the connecting members 15 and 16 preferably connect the center plate 11 and the ring plate 14 at positions that are most distant from the first and second protruding bars 12 and 13.

Therefore, the deformation plate 10 according to the embodiment of the present invention shown in FIG. 7 is formed by the first connecting member 15 and the second connecting member 16 located on the Y axis orthogonal to the X axis and the Z axis The center plate 11 and the ring plate 14 are connected.

Since the torque sensor 100 according to the embodiment of the present invention is a sensor for measuring the minute Z axis torque between the first member 200 and the second member 300, The free movement of the ring plate 14 connected to the first member 200 within the measurement range can be sufficiently ensured even if the center plate 11 and the ring plate 14 are connected by the connecting member 16.

7, a force applied to the ring plate 14 is transmitted to the center plate 11 when an external force acts on the positive direction of the Y-axis and the negative direction of the Y-axis, as shown in FIG. It is possible to provide a buffering force in the opposite direction to the external force.

To this end, it is preferable that the first connecting member 15 and the second connecting member 16 are formed at symmetrical positions with respect to the Z axis. In particular, as shown in FIG. 7, the thickness of the connecting members 15, It is possible to have a shape thinned from both ends connected to the plate 11 and the ring plate 14 toward the central portion to provide a more appropriate buffering force.

As shown in FIG. 8, at least two pairs of connecting members 15-1, 15-2, 16-1, and 16-2 are positioned at symmetrical positions with respect to the Y axis so as to form the same angle as the Y axis The external force in the Y-axis direction can be buffered more appropriately.

The torque sensor 100 according to an embodiment of the present invention is configured such that the first protruding bar 12 and the second protruding bar 13 are in contact with each other even when a force in the Y- The values of the first capacitance C1 and the second capacitance C2 do not change.

Even if the external force in the Y axis direction is not canceled by the buffering force and the ring plate is moved, the overlap area of the protruding bar and the electrode does not change, and the distance between the first protruding bar 12 and the first electrode 24 The distance between the second protruding bar 13 and the second electrode 25 is reduced by D so that the sum of the first capacitance and the second capacitance is not changed. It does not affect the detection value of the torque sensor according to the embodiment.

Therefore, it can be seen that the torque sensor 100 according to an embodiment of the present invention can decouple external interference due to the force in the Y-axis direction.

4. X-axis moment Decoupling

The X-axis direction moment is a force that causes the first member 200 to rotate about the X-axis relative to the second member 300. [

Whereby the center plate 11 connected to the first member as shown in Fig. 9 can be rotated or inclined about the X-axis.

9 (a), the distance between the first protruding bar 12 and the first electrode 24 is tilted away from the first protruding bar 12, 2 The distance between the protruding bar 13 and the second electrode 25 becomes tilted.

Referring to FIG. 10, the electrostatic capacitance between two electrodes which are not parallel to each other can be calculated as follows.

Figure 112015129184926-pat00002

9, the first capacitance C1 between the first protruding bar 12 and the first electrode 24 decreases as the angle? Increases, as shown in FIG. 11 , And the second capacitance C2 between the second protruding bar 13 and the second electrode 25 increases with decreasing angle?.

As a result of the experiment, it was found that when a moment of 100 Nm or more was applied in the same direction as shown in FIG. 9 and the change was 150 μm, the first electrostatic capacity was reduced to 0.005029 at a capacitance C = -0.0057 before applying a moment, The dose increased to 0.006419.

Accordingly, when the first capacitance and the second capacitance are combined, it is confirmed that the change in the capacitance caused by the moment in the X-axis direction is negligible. Thus, the torque sensor 100 according to the embodiment of the present invention can detect the X- It can be seen that external interference due to the direction moment can be decoupled.

5. Y-axis moment Decoupling

The distance d1 between the first protruding bar 12 and the first electrode 24 and the distance d2 between the second protruding bar 13 and the second electrode 25 are different depending on the moment in the Y- The distance d2 does not change.

3, the side surfaces of the first and second protruding bars 12 and 13 are wider than the side surfaces of the first and second electrodes 24 and 25 facing each other, and a Y-axis moment acts on the Y- even if the center rotated in the overlapping area between the first protruding bar 12 and the overlapping area between the first electrode (24) (a 1) and the second protruding bar 13 and the second electrode (25) (a 2 ) Does not change.

Therefore, even if a moment in the Y-axis direction acts, the distance and area between the protruding bar and the electrode do not change, so that there is no change in the capacitance. This is because the detection value of the torque sensor 100 according to the embodiment of the present invention is the Y- It can be decoupled without changing.

Although the torque sensor according to the present invention has been described in detail with reference to the accompanying drawings, it is to be understood that the present invention is not limited to the embodiment and various changes and modifications may be made without departing from the spirit and scope of the invention as defined in the appended claims. Changes and modifications may be made without departing from the scope of the present invention.

10: deformation plate 11: center plate
12: first protruding bar 13: second protruding bar
14: ring plate 15: first connecting member
16: second connecting member 20: base plate
21: detection plate 22: first groove
23: second groove 24: first electrode
25: second electrode 26: lower plate
30: Cover plate 100: Torque sensor
200: first member 300: second member

Claims (12)

A capacitive torque sensor (100) for measuring a torque generated in a Z-axis direction passing through a first member and a second member in a joint region of a first member (200) and a second member (300)
A base plate (20) and a deformation plate (10) assembled on top of the base plate,
Wherein the deformation plate (10) comprises a center plate (11) connected to the first member and a ring plate (14) having the same center as the center plate but larger in diameter than the center plate, (11) comprises a first protruding bar (12) and a second protruding bar (13) protruding from the first position and the second position on the X axis which are symmetrical with respect to the Z axis toward the base plate,
The base plate 20 is connected to the ring plate 14 and the second member 300 and includes a first groove 22 in which the first protrusion bar 12 and the second protrusion bar 13 are inserted And a second groove (23), a first electrode (24) and a second electrode (25) located on one side of the first groove and the second groove, respectively, and the first protrusion and the first electrode And a detection plate (21) for detecting a capacitance generated between the second protrusion and the second electrode and a capacitance generated between the second protrusion and the second electrode,
The center plate 11 and the ring plate 14 are connected by a connecting member connecting the center plate and the ring plate in the Y-axis direction, and the first member 200 rotates about the Z- The central plate 11 connected to the first member rotates relative to the two members 300 so that the ring plate 14 does not rotate, Wherein a thickness of both end portions connected to each other is made thinner toward the central portion.
The method according to claim 1,
The area of the first projecting bar 12 is larger than the area of the first electrode 24 and the area of the second projecting bar 13 is larger than the area of the second electrode 25 And wherein the capacitance sensor is a capacitor.
The method according to claim 1,
Wherein the first protruding bar (12) and the second protruding bar (13) have a symmetrical shape with respect to the Z axis.
The method according to claim 1,
The first protruding bar 12 and the first electrode 24 are parallel to each other in the Z-axis direction and the second protruding bar 13 and the second electrode 25 ) Are parallel to each other in the Z-axis direction.
The method according to claim 1,
When the center plate 11 is rotated by the rotational force about the X axis, the angle formed between the first protruding bar 12 and the first electrode 24 is smaller than the angle formed between the second protruding bar 13 and the second protruding bar 13, Is equal to the angle formed by the electrode (25).
The method according to claim 1,
The first electrode 24 and the second electrode 25 are located on one side of the first groove 22 and the second groove 23 in the clockwise direction or on one side in the counterclockwise direction about the Z axis Of the torque sensor.
delete delete delete The method according to claim 1,
Wherein the center plate (11) and the ring plate (14) are connected by two connecting members (15, 16) located on the Y axis which are symmetrical to the Z axis.
The method according to claim 1,
The center plate 11 and the ring plate 14 are connected to at least two pairs of the connecting members 15-1, 15-2, 16-1, and 16-2 symmetrical to the Z axis, and the Z Wherein at least two connecting members located respectively on one side and the other side of the shaft are disposed at positions symmetrical to the Y axis.
The method according to claim 1,
Further comprising a cover plate (30) assembled on the deformation plate (10) and covering a space between the center plate (11) and the ring plate (14).
KR1020150190598A 2015-12-31 2015-12-31 Capacitive Torque Sensor Capable of Decoupling from External Interference KR101766982B1 (en)

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KR101985270B1 (en) * 2017-03-22 2019-06-03 성균관대학교 산학협력단 Capacitive Torque Sensor Without Limit in Flexure Hinge
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KR101477120B1 (en) 2014-04-14 2014-12-30 성균관대학교산학협력단 Capacitive 6-axial force/torque sensor
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