CN112936203A

CN112936203A - Motion platform

Info

Publication number: CN112936203A
Application number: CN202110150651.9A
Authority: CN
Inventors: 肖宜; 周志伟; 赖林松; 杨群; 尹建刚; 高云峰
Original assignee: Han s Laser Technology Industry Group Co Ltd
Current assignee: Shenzhen Hans Semiconductor Equipment Technology Co Ltd
Priority date: 2021-02-03
Filing date: 2021-02-03
Publication date: 2021-06-11

Abstract

The embodiment of the invention discloses a motion platform which comprises an object carrying piece, a plurality of leveling mechanisms connected with the object carrying piece and a mounting piece used for mounting the leveling mechanisms and arranged opposite to the object carrying piece. The leveling mechanism comprises a fixing piece, a sliding piece, a screw rod, a first adjusting piece and an elastic element. The mounting is fixed to be located on the installed part, the slider is slidably located on the mounting, and the slider is connected with the year thing piece, and the screw rod is fixed to be set up on the installed part, first regulating part cover locate the periphery of screw rod and with screw rod threaded connection, elastic element's both ends respectively with first regulating part and slider butt. By adopting the movement platform, the leveling of the object-carrying object is realized through the combination of the fixing piece, the sliding piece, the screw rod, the first adjusting piece and the elastic element in the leveling mechanisms, so that the levelness of the object-carrying object is ensured.

Description

Motion platform

Technical Field

The invention relates to the technical field of mechanical equipment, in particular to a motion platform.

Background

The motion platform refers to a platform which is used for carrying objects in mechanical equipment and can move along an X axis, a Y axis or a Z axis.

In the prior art, a motion platform in mechanical equipment, particularly in ultra-precision machining and detection equipment, lacks a device capable of finely adjusting the levelness of the platform, and the machining or detection precision of the motion platform can be influenced by adopting the equipment.

Disclosure of Invention

Based on this, it is necessary to provide a platform capable of adjusting the levelness thereof.

A motion platform comprises an object carrying piece, a plurality of leveling mechanisms connected with the object carrying piece and a mounting piece used for mounting the leveling mechanisms and arranged opposite to the object carrying piece;

the leveling mechanism comprises a fixing piece fixedly arranged on the mounting piece, a sliding piece which is slidably arranged on the fixing piece and is connected with the object carrying piece, a screw fixedly arranged on the mounting piece, a first adjusting piece sleeved on the periphery of the screw and in threaded connection with the screw, and an elastic element of which two ends are respectively abutted against the first adjusting piece and the sliding piece;

when the first adjusting piece is screwed, the first adjusting piece moves back and forth along the axial direction of the screw rod, so that the elastic element drives the sliding piece to move away from or close to the first adjusting piece along the axial direction of the screw rod, and the sliding piece moves to level the carrier piece.

By adopting the movement platform provided by the embodiment of the invention, the screw rod is fixedly arranged on the mounting part, the first adjusting part is sleeved and in threaded connection with the screw rod, and the first adjusting part can be rotatably and movably arranged on the screw rod. When the first adjusting piece is screwed, the first adjusting piece moves along the axial direction of the screw rod and stretches or compresses the elastic element, the elastic element drives the sliding piece connected with the elastic element to move away from or close to the first adjusting piece along the axial direction of the screw rod after receiving stretching acting force or compression acting force, and the sliding piece moves to enable the object carrying piece to generate displacement. And repeatedly adjusting the first adjusting pieces for multiple times to finish the leveling of the object carrying piece. By adopting the movement platform, the leveling of the object-carrying object is realized through the combination of the fixing piece, the sliding piece, the screw rod, the first adjusting piece and the elastic element in the leveling mechanisms, so that the levelness of the object-carrying object is ensured.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.

Wherein:

fig. 1 is a schematic perspective view of a motion platform according to an embodiment.

Fig. 2 is an exploded schematic view of the motion platform as provided in fig. 1.

Fig. 3 is a schematic structural diagram of a leveling mechanism in the motion platform as provided in fig. 2.

Fig. 4 is a partial perspective view of the leveling mechanism provided in fig. 3.

Fig. 5 is a schematic view illustrating an assembly of the adsorption mechanism and the object carrier in the motion platform as provided in fig. 2.

Reference numerals:

110-object carrier, 112-through hole, 114-groove, 120-mounting member, 130-housing plate, 140-supporting member, 150-locking member;

200-leveling mechanism, 210-fixing piece, 220-sliding piece, 230-screw rod, 240-first adjusting piece, 242-first tooth, 250-elastic element, 260-second adjusting piece, 262-second tooth, 270-universal joint, 280-transition piece, 290-locking component and 292-pipeline;

300-suction mechanism, 310-power element, 320-connector, 330-suction cup assembly;

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

It should be noted that all the directional indicators (such as up, down, left, right, front, and rear … …) in the embodiment of the present invention are only used to explain the relative position relationship between the components, the movement situation, etc. in a specific posture (as shown in the drawing), and if the specific posture is changed, the directional indicator is changed accordingly.

In addition, the descriptions related to "first", "second", etc. in the present invention are for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the feature. In addition, technical solutions between various embodiments may be combined with each other, but must be realized by a person skilled in the art, and when the technical solutions are contradictory or cannot be realized, such a combination should not be considered to exist, and is not within the protection scope of the present invention.

Referring to fig. 1-4, an embodiment of the present invention provides a motion platform, which includes an object-carrying member 110, a plurality of leveling mechanisms 200 connected to the object-carrying member 110, and a mounting member 120 disposed opposite to the object-carrying member 110 for mounting the leveling mechanisms 200. The leveling mechanism 200 includes a fixed member 210, a sliding member 220, a screw 230, a first adjusting member 240, and an elastic member 250. The fixing member 210 is fixedly disposed on the mounting member 120, the sliding member 220 is slidably disposed on the fixing member 210, the sliding member 220 is connected to the object-carrying member 110, the screw 230 is fixedly disposed on the mounting member 120, the first adjusting member 240 is sleeved on the outer periphery of the screw 230 and is in threaded connection with the screw 230, and two ends of the elastic element 250 are respectively abutted to the first adjusting member 240 and the sliding member 220.

Specifically, the screw 230 is fixedly disposed on the mounting member 120, the first adjusting member 240 is sleeved on and threadedly connected to the screw 230, and the first adjusting member 240 is rotatably and movably disposed on the screw 230. When the first adjusting member 240 is screwed, the first adjusting member 240 moves along the axial direction of the screw 230 and stretches or compresses the elastic element 250, after receiving the stretching force or the compression force, drives the sliding member 220 connected with the elastic element to move away from or close to the first adjusting member 240 along the axial direction of the screw 230, and the sliding member 220 moves to displace the carrier member 110. The adjustment of the first adjusting members 240 is repeated a plurality of times to complete the leveling of the carrier member 110.

With the above-mentioned motion platform, the leveling of the carrier member 110 is achieved through the combination of the fixing member 210, the sliding member 220, the screw 230, the first adjusting member 240 and the elastic member 250 in the leveling mechanism 200, so as to ensure the levelness of the carrier member 110.

Preferably, the elastic element 250 is a spring, and the elastic element 250 is sleeved on the outer circumference of the screw 230.

Optionally, the elastic element 250 is a spring or a plurality of springs, wherein the plurality of springs are annularly disposed on the outer circumference of the screw 230.

It is understood that the fixing member 210 may be a guide rail and the sliding member 220 may be a slider, and preferably, the guide rail has a length of 50mm to 70 mm. Of course, the fixed member 210 and the sliding member 220 may be other members capable of sliding relative to each other.

Further, the number of the fixing parts 210 is two, and the two fixing parts 210 are respectively disposed on two sides of the sliding part 220 to ensure the stability of the movement of the sliding part 220.

For better adjustment, a plurality of leveling mechanisms 200 are disposed around the center of the carrier member 110. In the present embodiment, the number of the adjustment mechanisms is 3.

In this embodiment, the outer circumference of the first adjusting member 240 is provided with a plurality of first teeth 242 uniformly arranged around the center thereof. With this structure, it is convenient for a user to screw the first adjusting member 240. In addition, the use of a plurality of first teeth 242 facilitates the user to determine the angle of screwing according to the number of first teeth 242 during screwing, thereby better adjusting carrier member 110.

In this embodiment, the leveling mechanism 200 further includes a second adjusting member 260, the second adjusting member 260 is sleeved on the outer circumference of the screw 230 and is in threaded connection with the screw 230, and the second adjusting member 260 is disposed at an end of the first adjusting member 240 away from the elastic element 250. The second regulating member 260 mainly functions to prevent the first regulating member 240 from being loosened.

In addition, the second adjusting member 260 is provided at the outer circumference thereof with a plurality of second teeth 262 corresponding to the number of the first teeth 242 and arranged around the center of the second adjusting member 260. Similarly, second tooth 262 corresponds to first tooth 242 for easy adjustment by the user.

The above-described structure will be explained below using specific embodiments.

In the present embodiment, the screw 230 is a fine-toothed screw 230 with a lead of 0.5mm, and the number of the first teeth 242 and the second teeth 262 is 8, that is, the angle between the adjacent first teeth 242 or the adjacent second teeth 262 is 45 °. When the first adjusting member 240 rotates one first tooth 242, the carrier member 110 is raised or lowered by a height of 0.0625 mm.

It should be noted that, under normal conditions, the carrier member 110 compresses the elastic element 250, and the structure is in a state of force balance. After the elastic member 250 is stretched or compressed a certain distance, the connection between the carrier member 110 and the sliding member 220 is also moved the same distance in order to maintain the force balance again.

Further, the leveling mechanism 200 further includes a universal joint 270, and both ends of the universal joint 270 are respectively connected to the sliding member 220 and the carrier member 110. By adopting the structure, the acting force on the carrier piece 110 in the non-screw 230 axial direction can be effectively eliminated.

It should be added that the gimbal 270 may be a rigid gimbal 270 or a flexible gimbal 270.

In this embodiment, the universal joint 270 is a spherical bearing.

Further, a transition piece 280 is fixedly connected to a side of the universal joint 270 away from the sliding member 220, and the transition piece 280 is connected to the carrier member 110.

Further, the carrier member 110 is provided with a groove 114 adapted to the transition piece 280, and the transition piece 280 is embedded in the groove 114.

In this embodiment, the leveling mechanism 200 further includes a locking assembly 290, the locking assembly 290 is disposed on the fixed member 210 or the sliding member 220, and the locking assembly 290 is used for locking the fixed member 210 and the sliding member 220. After the first adjusting member 240 or the second adjusting member 260 is used to level the carrier member 110, in order to ensure the stability of the levelness of the carrier member 110, the locking assembly 290 is used to limit the fixed member 210 and the sliding member 220, so as to prevent the sliding member 220 from sliding.

In one embodiment, the locking assembly 290 includes an air or hydraulic cylinder having an output rod and a pressure block coupled to the output rod. The air cylinder or the hydraulic cylinder drives the pressing block to move towards the fixed part 210 or the sliding part 220 and applies a certain pressure, thereby increasing the relative friction force between the sliding part 220 and the fixed part 210.

Referring to fig. 2 or fig. 5, in the present embodiment, the motion platform further includes an adsorption mechanism 300, and the adsorption mechanism 300 is used for adsorbing the product on the object 110. After the product is placed on the carrier 110, the adsorption mechanism 300 adsorbs the product to prevent the product from vibrating to affect subsequent processing or detection.

Specifically, the suction mechanism 300 includes a power element 310 fixed on the carrier member 110 and having a piston rod, a connecting member 320 fixedly connected to the piston rod, and a plurality of suction cup assemblies 330 fixed on the connecting member 320 and used for sucking the product.

After the product is placed on the object carrier 110, the power device 310 drives the suction cup assembly 330 to move toward the product, so that the suction cup assembly 330 sucks the product. It is understood that the structure is applicable to, but not limited to, plate-like articles such as glass, sheet metal, and the like.

Further, the object loading member 110 is provided with a plurality of through holes 112 corresponding to the number of the sucker assemblies 330, and the sucker assemblies 330 are inserted into the through holes 112. By adopting the structure, the structure compactness of the motion platform can be improved.

In addition, it is necessary to supplement that the carrier member 110 and the mounting member 120 are spaced apart, and the supporting members 140 for supporting and the outer cover plate 130 are alternately disposed at the outer circumference of the space. A line 292 for supplying pneumatic or hydraulic pressure to the locking assembly 290 is provided on one of the support members 140.

Further, in order to facilitate the transportation of the moving platform, a locking member 150 is provided on the supporting member 140, and the locking member 150 is used for locking the supporting member 140 and the carrying member 110. With this structure, the loss of the motion platform due to the vibration of the object carrying member 110 during transportation can be avoided.

The above disclosure is only for the purpose of illustrating the preferred embodiments of the present invention, and it is therefore to be understood that the invention is not limited by the scope of the appended claims.

Claims

1. A motion platform is characterized by comprising an object carrying piece, a plurality of leveling mechanisms connected with the object carrying piece and a mounting piece used for mounting the leveling mechanisms and arranged opposite to the object carrying piece;

2. The motion platform of claim 1, wherein a plurality of the leveling mechanisms are disposed about a center of the carrier member.

3. The motion platform of claim 1, wherein the outer periphery of the first adjustment member is provided with a plurality of first teeth uniformly disposed about a center thereof.

4. The motion platform of claim 3, wherein the leveling mechanism further comprises a second adjusting member, the second adjusting member is sleeved on the outer periphery of the screw rod and is in threaded connection with the screw rod, and the second adjusting member is arranged at one end of the first adjusting member far away from the elastic element.

5. The motion platform of claim 4, wherein the second adjustment member has a periphery with a plurality of second teeth corresponding to the number of the first teeth and disposed around a center of the second adjustment member.

6. The motion platform according to any one of claims 1 to 5, wherein the leveling mechanism further comprises a universal joint, and two ends of the universal joint are respectively connected with the sliding member and the object carrying member.

7. The motion platform of any one of claims 1 to 5, wherein the leveling mechanism further comprises a locking assembly, the locking assembly is disposed on the fixed member or the sliding member, and the locking assembly is configured to lock the fixed member and the sliding member.

8. The motion platform according to any one of claims 1 to 5, further comprising a suction mechanism for sucking the product on the carrier.

9. The motion platform of claim 8, wherein the suction mechanism comprises a power element fixed to the object carrier and having a piston rod, a connector fixedly connected to the piston rod, and a plurality of suction cup assemblies fixed to the connector and adapted to suck the product.

10. The motion platform of claim 9, wherein the object carrier has a plurality of through holes corresponding to the number of the sucker assemblies, and the sucker assemblies are inserted into the through holes.