CN106868562B - A kind of quantity-produced device of electrochemical deposition thin-film solar cells - Google Patents

A kind of quantity-produced device of electrochemical deposition thin-film solar cells Download PDF

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CN106868562B
CN106868562B CN201611035299.XA CN201611035299A CN106868562B CN 106868562 B CN106868562 B CN 106868562B CN 201611035299 A CN201611035299 A CN 201611035299A CN 106868562 B CN106868562 B CN 106868562B
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electrode
electrical contact
needle electrode
electric deposition
deposition device
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CN106868562A (en
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张征宇
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Solar Energy Investment Ltd
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Solar Energy Investment Ltd
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    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D7/00Electroplating characterised by the article coated
    • C25D7/12Semiconductors
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C25D17/001Apparatus specially adapted for electrolytic coating of wafers, e.g. semiconductors or solar cells
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C25D17/005Contacting devices

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  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Development (AREA)
  • Photovoltaic Devices (AREA)
  • Electroplating Methods And Accessories (AREA)

Abstract

The present invention provides a kind of quantity-produced device of electrochemical deposition thin-film solar cells, device includes transmitting device, electric deposition device and Electical connector, be fixed in electric deposition device needle electrode and needle electrode to electrode, it needle electrode and is not in contact with each other between electrode, the bottom surface of electric deposition device is conductive material, electrode is contacted with the bottom surface of electric deposition device, Electical connector is fixed on transmitting device, Electical connector includes needle electrode electrical contact area and is in electrical contact area to electrode, needle electrode is in electrical contact area and electrode electrical contact area is in electrical contact respectively with the bottom surface of needle electrode and electric deposition device, needle electrode, which is in electrical contact area and electrode is in electrical contact between area, to insulate, and needle electrode is in electrical contact area and electrode is in electrical contact between area and is connected with voltage source.Electric deposition device with transmitting device is combined, voltage source is provided for electric deposition device using Electical connector, electric deposition device is made to complete electro-deposition in the movement with transmitting device, realizes continuous production.

Description

A kind of quantity-produced device of electrochemical deposition thin-film solar cells
Technical field
The present invention relates to area of solar cell, and in particular to a kind of continuous life of electrochemical deposition thin-film solar cells The device of production.
Background technology
Solar cell is also known as " solar chip " or photocell, is direct by photoelectric effect or photochemical effect Luminous energy is converted to the device of electric energy.Wherein, based on the thin-film solar cells of photoelectric effect work.
Generally, thin-film solar cells is met to sunlight and is placed upward, includes successively from the bottom up:Lower encapsulated layer, certain bottom Layer, back electrode layer, back contact, absorbed layer, Window layer, upper contact layer and upper encapsulated layer etc..Chinese patent CN101807622A A kind of method for preparing cadmium telluride diaphragm solar battery component is disclosed, is included the following steps:
First, in transparent conductive film glass(TCO)Upper deposition CdS films obtain " glass/TCO/CdS ";
Then, CdTe thin film is deposited on " glass/TCO/CdS " and obtains " glass/TCO/CdS/CdTe ";
Then, the heat treatment under chloride containing cadmium atmosphere is carried out to " glass/TCO/CdS/CdTe ";
Then, " TCO/CdS/CdTe " is fallen in " glass/TCO/CdS/CdTe " after being heat-treated using laser grooving and scribing, delineation Carrying out chemical attack afterwards makes cadmium telluride surface richness tellurium;
Then, it delineates on " glass/TCO/CdS/CdTe " and fills in low temperature on the indentation of " TCO/CdS/CdTe " Solidification glue;
Then, back contact is deposited, then carries out back contact heat treatment;
Then it is delineated near TCO/CdS/CdTe indentations using laser and falls CdS/CdTe/ back contacts;
Then, then deposited metal back electrode layer crosses out TCO/CdS/CdTe indentations and CdS/CdTe/ using laser incising CdS/CdTe/ back contacts/metal back electrode near back contact indentation.
In the above-mentioned method for preparing solar cell module, the step of depositing CdTe is physical dry, such as near space liter China, sputtering, vacuum evaporation etc..Physical dry is usually required that be carried out in the environment of vacuum and/or high temperature, and the requirement to equipment is very Height, and it is serious to the waste of material of cadmium element and tellurium element.Slave device is put into for angle and environmental protection angle, above-mentioned system The method manufacture cost of standby CdTe thin film solar cell module is very high.
In order to solve the above-mentioned technical problem, american documentation literature US2011/0290641Al discloses a kind of fast electrochemical The device and method that sedimentation produces solar cell, american documentation literature US2012/0043215A1 disclose another electricity The device and method that chemical deposition produces solar cell.These electrochemical deposition methods, as solvent, are not required to usually using water Vacuum and/or hot environment are wanted, the solution containing cadmium element and tellurium element can recycle, and greatly reduce electrochemical deposition Method prepares the manufacture cost of CdTe thin film solar cell module.
But the method that electrochemical deposition described in above-mentioned patent prepares CdTe thin film belongs to batch production, can not be applied to Large-scale continuous production.However other steps of production CdTe thin film solar cell module belong to continuous production, result in Electrochemical deposition prepares the method for CdTe thin film and other steps are not easy to match.
Invention content
In view of the deficiencies of the prior art, the present invention provides a kind of quantity-produceds of electrochemical deposition thin-film solar cells Device.
The present invention is achieved through the following technical solutions:A kind of the continuous of electrochemical deposition thin-film solar cells is provided The device of production, described device include transmitting device, electric deposition device and Electical connector, are fixed in the electric deposition device Needle electrode and needle electrode to electrode, the needle electrode and it is described be not in contact with each other between electrode, the electro-deposition dress The bottom surface put is conductive material, and described that electrode is contacted with the bottom surface of the electric deposition device, the Electical connector is fixed on On the transmitting device, the Electical connector includes needle electrode electrical contact area and area is in electrical contact to electrode, the aciculiform electricity Pole electrical contact area and to electrode electrical contact area respectively with the bottom surface of the needle electrode and electric deposition device be in electrical contact, the aciculiform Electrode be in electrical contact area and to electrode be in electrical contact area between insulate, and the needle electrode electrical contact area and to electrode electrical contact area it Between be connected with voltage source.
In device provided by the invention, electrode is contacted with the bottom surface of electric deposition device, the bottom surface of electric deposition device is leads Electric material makes, and the bottom surface of electric deposition device contacts electrode electrical contact area with Electical connector, the aciculiform of Electical connector Electrode electrical contact area contacted with the needle electrode in electric deposition device, when needle electrode be in electrical contact area and to electrode be in electrical contact area it Between when connecting operating voltage, the needle electrode electrical contact area of Electical connector forms electricity with the needle electrode in electric deposition device and connects It touches, the bottom surface that area and electric deposition device are in electrical contact to electrode forms electrical contact, since the bottom surface of electric deposition device is conductive material, The bottom surface of electric deposition device contacts again with to electrode, therefore, electrode is in electrical contact with being formed to electrode contact zone, such aciculiform electricity Pole can form electronic loop between electrode and electrodeposit liquid, it would be desirable to which the substrate of deposition film is positioned on needle electrode It can carry out electro-deposition.Needle electrode is in electrical contact area and insulate to prevent short circuit between electrode electrical contact area.
In device provided by the invention, the front end of needle electrode can be bent into Z-type, make the top of needle electrode have bullet The elastic force of spring, as shown in fig. 11, the spring force being thusly-formed can make the top of needle electrode and need deposition film Contact between substrate is good.
Preferably, the transmitting device includes two conveyors being placed in parallel, and the Electical connector is fixed on two Between conveyor, and the top surface of the Electical connector and the top surface of the conveyor are located in same level.
When Electical connector is fixed between two conveyors, the width of electric deposition device is more than between two conveyors Distance, so that electric deposition device can be moved with conveyor, Electical connector is stationary, the centre position of electric deposition device Slipped over from Electical connector, needle electrode electrical contact area and to electrode electrical contact area respectively with needle electrode and electric deposition device Bottom surface formed and slide electrical contact, the transmission speed of two conveyors is identical, and electric deposition device is from one end of Electical connector The time for moving to the other end is equal to the time that thin film is deposited in electric deposition device.
Preferably, the bottom surface of the electric deposition device is fixed at intervals "T"-shaped insulation board, and the insulation board includes transverse slat And riser, the transverse slat are located at the top of the bottom surface of electric deposition device, the riser runs through the bottom surface of electric deposition device, described perpendicular The bottom of plate is equipped with groove, and the needle electrode is stretched out through the transverse slat and the riser and in the groove, the needle Shape electrode is in electrical contact area and described be in electrical contact to electrode between area is in electrical contact area and the groove equipped with gap, the needle electrode Interior needle electrode contact, it is described that electrode electrical contact area is contacted with the bottom surface of the electric deposition device.
"T"-shaped insulation board, the bottom setting of the riser of "T"-shaped insulation board are fixed at the bottom surface interval of electric deposition device Interior groove is concaved towards, correspondingly, the needle electrode of Electical connector, which is in electrical contact area and electrode is in electrical contact between area, sets gap, It is matched at the top of the bottom of electric deposition device and Electical connector, the arm at groove both ends just sticks into needle electrode electrical contact area And electrode is in electrical contact in the gap between area, reach needle electrode electrical contact area and the effect to insulate between area is in electrical contact to electrode While fruit, electric deposition device is formed and is limited, avoids electric deposition device sideslip on Electical connector.
Preferably, the side of the electric deposition device is equipped with electrodeposit liquid entrance and electrodeposit liquid exports.Electrodeposit liquid Entrance and electrodeposit liquid outlet are respectively communicated with the liquid source of electrodeposit liquid, transmission pump can be set to control electro-deposition on connecting pipeline The flow direction of liquid and flow velocity etc..Substance delivery rate can be improved using the electric depositing solution of flowing so as to improve electro-deposition speed Rate.
Preferably, " O " type for preventing electrodeposit liquid from flowing out is fixed at the top of the lateral wall of the electric deposition device Circle.The material of "O"-ring can use any elastic rubber, such as say Buna-N, Viton, Silicone, EPDM etc..
Reference electrode can be set in the electric deposition device of the present invention, monitored for current potential, reference electrode, which can be selected, appoints Where the material that current potential is stablized in electrodeposit liquid, such as say Cd, Ag/AgCl, SHE(Standard hydrogen electrode), SCE(Saturation calomel electricity Pole)Deng.
Technical solution provided in an embodiment of the present invention can include following advantageous effect:
The present invention provides a kind of quantity-produced device of electrochemical deposition thin-film solar cells, and described device includes passing Defeated device, electric deposition device and Electical connector, be fixed in the electric deposition device needle electrode and needle electrode to electricity Pole, the needle electrode and it is described be not in contact with each other between electrode, the bottom surface of the electric deposition device is conductive material, described right Electrode is contacted with the bottom surface of the electric deposition device, and the Electical connector is fixed on the transmitting device, the electrical contact Device includes needle electrode electrical contact area and area is in electrical contact to electrode, and the needle electrode is in electrical contact area and is in electrical contact area to electrode It is in electrical contact respectively with the bottom surface of the needle electrode and electric deposition device, the needle electrode is in electrical contact area and electrode is in electrical contact It insulate between area, and the needle electrode is in electrical contact area and electrode is in electrical contact between area and is connected with voltage source.The present invention provides Device in, electric deposition device with transmitting device is combined, voltage source is provided for electric deposition device using Electical connector, makes Electric deposition device completes the process of electrodeposited film in the movement with transmitting device, realizes continuous production.
Description of the drawings
Illustrate the embodiment of the present invention or technical solution of the prior art in order to clearer, to embodiment or will show below There is attached drawing needed in technology description to be briefly described, it is clear that, to those skilled in the art, not Under the premise of making the creative labor, other attached drawings are can also be obtained according to these attached drawings.
Fig. 1 is the quantity-produced device of the first electrochemical deposition thin-film solar cells provided in an embodiment of the present invention Structure diagram.
Fig. 2 is the quantity-produced device of the first electrochemical deposition thin-film solar cells provided in an embodiment of the present invention Electric deposition device structure diagram.
Fig. 3 is the quantity-produced device of the first electrochemical deposition thin-film solar cells provided in an embodiment of the present invention Electical connector structure diagram.
Fig. 4 is a kind of quantity-produced device of electrochemical deposition thin-film solar cells provided in an embodiment of the present invention The overlooking the structure diagram of Electical connector.
Fig. 5 is the quantity-produced device of second of electrochemical deposition thin-film solar cells provided in an embodiment of the present invention Structure diagram.
Fig. 6 is the quantity-produced device of second of electrochemical deposition thin-film solar cells provided in an embodiment of the present invention Electric deposition device structure diagram.
Fig. 7 is the partial enlarged view of I in Fig. 6.
Fig. 8 is the quantity-produced device of second of electrochemical deposition thin-film solar cells provided in an embodiment of the present invention Electical connector structure diagram.
Fig. 9 is the quantity-produced device of second of electrochemical deposition thin-film solar cells provided in an embodiment of the present invention Electical connector and electric deposition device cooperation schematic diagram.
Figure 10 is that the quantity-produced of second of electrochemical deposition thin-film solar cells provided in an embodiment of the present invention fills The Electical connector and the schematic top plan view of transmitting device put.
Figure 11 is a kind of quantity-produced device of electrochemical deposition thin-film solar cells provided in an embodiment of the present invention Needle electrode structure diagram.
Shown in figure:Transmitting device 10, conveyor 11, electric deposition device 20, needle electrode 21, to electrode 22, insulation board 23rd, transverse slat 231, riser 232, groove 233, electrodeposit liquid entrance 24, electrodeposit liquid outlet 25, the bottom surface 26 of electric deposition device, Electical connector 30, is in electrical contact area 32, gap 33, substrate 40 at needle electrode electrical contact area 31 to electrode.
Specific embodiment
In order to which those skilled in the art is made to more fully understand the technical solution in the present invention, below in conjunction with of the invention real The attached drawing in example is applied, the technical solution in the embodiment of the present invention is clearly and completely described, it is clear that described implementation Example is only part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, art technology Personnel's all other embodiments obtained without making creative work should all belong to the protection model of the present invention It encloses.
Referring to Fig. 1, it show a kind of continuous life of electrochemical deposition thin-film solar cells provided in an embodiment of the present invention The device of production.
As shown in Figure 1, the device includes transmitting device 10, electric deposition device 20 and Electical connector 30, the electricity Be fixed in precipitation equipment 20 needle electrode 21 and needle electrode to electrode 22, the needle electrode 21 and described to electrode 22 Between be not in contact with each other, the bottom surface 26 of the electric deposition device is conductive material, described to electrode 22 and the electric deposition device 20 Bottom surface 26 contact, the Electical connector 30 is fixed on the transmitting device 10, the Electical connector 30 include aciculiform Electrode is in electrical contact area 11 and area 12 is in electrical contact to electrode, and the needle electrode is in electrical contact area 11 and electrode electrical contact area 12 is distinguished It is in electrical contact with the bottom surface 26 of the needle electrode 21 and electric deposition device, the needle electrode is in electrical contact area 11 and electrode electricity is connect It insulate between tactile area 12, and the needle electrode is in electrical contact area 11 and electrode is in electrical contact between area 12 and is connected with voltage source.
In the present embodiment, transmitting device 10 is conveyor, and Electical connector 30 is fixed on transmitting device 10, and is in electrical contact Device 30 has extension in the whole length of conveyor, as shown in Figure 1 and Figure 4, the structure of electric deposition device as shown in Fig. 2, Needle electrode 21 is set perpendicular to the bottom surface of electric deposition device 26, and electrode 22 is fixed on bottom surface 26, but to electrode 22 and needle It is not in contact with each other between shape electrode 21, T-shape insulation board 23 is fixed on the bottom surface 26 of electric deposition device, the insulation board 23 includes Transverse slat 231 and riser 232, the transverse slat 231 are located at the top of the bottom surface 26 of electric deposition device, and the riser 232 is heavy through electricity The bottom surface 26 of product device, the needle electrode 21 run through the transverse slat 231 and the riser 232;As shown in figure 3, electrical contact dress Put 30 needle electrode electrical contact area 31 and between electrode electrical contact area 32 equipped with gap 33, the needle electrode electrical contact area 31 contact with stretching out the needle electrode 21 of insulation board 23, described to electrode electrical contact area 12 and the bottom surface 26 of the electric deposition device Contact.Since the bottom surface 26 of electric deposition device makes for conductive material, when needle electrode is in electrical contact area 31 and electrode is in electrical contact When operating voltage is connected between area 32, needle electrode electrical contact area 31 and the needle electrode in electric deposition device of Electical connector 21 form electrical contact, and the bottom surface 26 in electrode electrical contact area 32 and electric deposition device is formed and is in electrical contact, due to electric deposition device Bottom surface 26 is conductive material, and the bottom surface 26 of electric deposition device contacts with to electrode 22, therefore, electrode 22 is contacted with to electrode again Area 32 forms electrical contact, and such needle electrode 21 can form electronic loop between electrode 22 and electrodeposit liquid, it would be desirable to heavy The substrate of product film, which is positioned on needle electrode, can carry out electro-deposition.
In the present embodiment, electrodeposit liquid entrance 24 is respectively arranged on opposite two side of the electric deposition device 20 25 are exported with electrodeposit liquid, electrodeposit liquid outlet 24 and entrance 25 are respectively communicated with the liquid source of electrodeposit liquid, the liquid source of electrodeposit liquid With being provided with transmission pump on the connecting line of electrodeposit liquid outlet 24 and entrance 25, for electrodeposit liquid to be pumped into electric deposition device In.In use, the substrate 40 for needing deposition film to be positioned over to the top of needle electrode 21 first, then by electrodeposit liquid entrance 24 Electrodeposit liquid is connected with outlet 25, then electric deposition device 20 is put to Electical connector 30, makes needle electrode 21 and aciculiform Electrode electrical contact area 31 contacts, and the bottom surface 26 of electric deposition device contacts, and connect in needle electrode electricity with to electrode electrical contact area 32 It touches area 31 and electrode is in electrical contact between area 32 and be passed through operating voltage, make needle electrode 21, between electrode 22 and electrodeposit liquid Electronic loop is formed, thus deposition film on the substrate 40, since Electical connector 30 is fixed in conveyor, Electical connector 30 move with the movement of conveyor, so as to which electric deposition device 20 be driven to be moved with conveyor, in the transmission process of conveyor In electric deposition device 20 can be placed on the Electical connector 30 constantly in conveyor, so as to constantly be deposited on substrate Film reaches quantity-produced effect.
In the present embodiment, for depositing CdTe on " glass/TCO/CdS ", " glass/TCO/CdS " is put into electricity The top of needle electrode 21 in precipitation equipment, pin electrode 21 are contacted with " glass/TCO/CdS ", and electric deposition device 20 is put After Electical connector 30, cathode current, the main electrification occurred on " glass/TCO/CdS " cathode are added on pin electrode 21 Learning reaction is:
Cd2+ + HTeO2+ + 3H+ + 6e- à CdTe + 2H2O;
It is to the electrochemical reaction occurred on electrode anode:
2H2O à O2 + 4H+ + 4e-
Thus in " glass/TCO/CdS " electro-deposition CdTe, formed " glass/TCO/CdS/CdTe ".
During production, the transmission speed of conveyor is set, electric deposition device 20 is made to move to the other end from one end of conveyer belt Time be equal to " glass/TCO/CdS " on deposit target thickness CdTe thin film time, target thickness can be total by electro-deposition Electricity(Coulomb)To control.When electric deposition device is transferred to the final position of conveyor, electric deposition device is removed, takes out life " glass/TCO/CdS/CdTe " of output, dries up after washing remaining electrolyte, can be put into subsequent annealing step.Conveyor passes Electric deposition device 20 can be continuously placed upwards during defeated, to reach continuous production.
In another embodiment of the present invention, as shown in Figure 10, the transmitting device 10 is placed in parallel including two Conveyor 11, the Electical connector 30 are fixed between two conveyors 11, and Electical connector 30 does not connect mutually with conveyor 11 It touching, and Electical connector 30 is static, the width of the electric deposition device 20 is more than the distance between two conveyors 11, with Electric deposition device 20 is enable to be moved with the movement of conveyor 11;The length of the Electical connector 30 is less than conveyor 11 length, as shown in Fig. 5 and Figure 10;The top surface of the Electical connector 30 and the top surface of the conveyor 11 are located at same water In plane.The structure of the electric deposition device 20 as shown in fig. 6, the bottom surface 26 of electric deposition device be fixed at intervals it is "T"-shaped exhausted Listrium 23, the structure of the insulation board 23 is as shown in fig. 7, comprises transverse slat 231 and riser 232, the transverse slat 231 are located at electro-deposition The top of the bottom surface 26 of device, the riser 232 run through the bottom surface 26 of electric deposition device, and the bottom of the riser 232 is equipped with recessed Slot 233, the needle electrode 21 are stretched out through the transverse slat 231 and the riser 232 and at the groove 233;Such as Fig. 8 institutes Show, gap 33 is equipped between the needle electrode electrical contact area 31 and the area 32 to electrode electrical contact;It is as shown in figure 9, described Needle electrode electrical contact area 31 contacted with the needle electrode 21 in the groove 233, it is described to electrode electrical contact area 12 with it is described The bottom surface 26 of electric deposition device contacts, and the two side of the groove 233 is sticked into respectively in the gap 33, makes the needle electrode Position-limiting action is played to electric deposition device 20 while insulation between electrical contact area 31 and the area 32 to electrode electrical contact, is avoided The sideslip in conveyor 11 of electric deposition device 20.
In the present embodiment, electrodeposit liquid entrance 24 is again provided on the side of electric deposition device 20 and electrocasting/electrodeposition liquid enters Mouth 25, the time that the electric deposition device 20 moves to the other end from one end of Electical connector 30 are equal in electric deposition device 20 Substrate 40 on deposition target thickness film time, the application method of the present embodiment is identical with above-described embodiment.
In other embodiments of the invention, the transmitting device 10 could be provided as a conveyor, the electrical contact The needle electrode electrical contact area 31 of device 30 and the both sides that the conveyor can be individually fixed in electrode electrical contact area 32, phase Answer, needle electrode 21 in electric deposition device 20 and a brush can be respectively communicated with to electrode 22, two brushes respectively with Needle electrode is in electrical contact area 31 and slides electrical contact to electrode electrical contact area 32, and needle electrode 21, right is made in the case of energization Electrode 22 and electrodeposit liquid forming circuit so that electric deposition device 20 can carry out electro-deposition while being moved in conveyor, Reach quantity-produced purpose.
Certainly, above description is also not limited to the example above, the technical characteristic of the invention without description can by or It is realized using the prior art, details are not described herein;Above example and attached drawing are merely to illustrate technical scheme of the present invention It is limitation of the present invention, the present invention is described in detail with reference to preferred embodiment, the ordinary skill people of this field Member is it should be appreciated that variation, remodeling, the addition that those skilled in the art are made in the essential scope of the present invention Or replace the claims that without departure from spirit of the invention, should also belong to the present invention.

Claims (4)

1. a kind of quantity-produced device of electrochemical deposition thin-film solar cells, which is characterized in that described device includes passing Defeated device(10), electric deposition device(20)And Electical connector(30), the electric deposition device(20)Inside it is fixed with needle electrode (21)With needle electrode to electrode(22), the needle electrode(21)With described to electrode(22)Between be not in contact with each other, it is described The bottom surface of electric deposition device(26)It is described to electrode for conductive material(22)With the electric deposition device(20)Bottom surface(26)It connects It touches, the Electical connector(30)It is fixed on the transmitting device(10)On, the Electical connector(30)Including needle electrode It is in electrical contact area(31)Area is in electrical contact with to electrode(32), the needle electrode electrical contact area(31)Area is in electrical contact with to electrode(32) Respectively with the needle electrode(21)With the bottom surface of electric deposition device(26)Electrical contact, the needle electrode are in electrical contact area(31)With Area is in electrical contact to electrode(32)Between insulate, and the needle electrode electrical contact area(31)Area is in electrical contact with to electrode(32)Between It is connected with voltage source.
2. the quantity-produced device of electrochemical deposition thin-film solar cells according to claim 1, which is characterized in that The transmitting device(10)The conveyor being placed in parallel including two(11), the Electical connector(30)It is fixed on two transmission Band(11)Between, and the Electical connector(30)Top surface and the conveyor(11)Top surface be located in same level.
3. the quantity-produced device of electrochemical deposition thin-film solar cells according to claim 1 or 2, feature exist In the electric deposition device(20)Bottom surface be fixed at intervals "T"-shaped insulation board(23), the insulation board(23)Including transverse slat (231)And riser(232), the transverse slat(231)Positioned at the bottom surface of electric deposition device(26)Top, the riser(232)It passes through Wear the bottom surface of electric deposition device(26), the riser(232)Bottom be equipped with groove(233), the needle electrode(21)Run through The transverse slat(231)With the riser(232)And in the groove(233)Place is stretched out, and the needle electrode is in electrical contact area(31) Area is in electrical contact to electrode with described(32)Between be equipped with gap(33), the needle electrode electrical contact area(31)With the groove (233)Interior needle electrode(21)Contact, it is described that area is in electrical contact to electrode(32)With the bottom surface of the electric deposition device(26)It connects It touches.
4. the quantity-produced device of electrochemical deposition thin-film solar cells according to claim 3, which is characterized in that The electric deposition device(20)Side be equipped with electrodeposit liquid entrance(24)It is exported with electrodeposit liquid(25).
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CN104603334A (en) * 2012-04-25 2015-05-06 埃托特克德国有限公司 Method and apparatus for electrolytically depositing deposition metal on workpiece
CN104091854A (en) * 2013-04-01 2014-10-08 北京恒基伟业投资发展有限公司 Thin film solar cell production method and electrodeposition device thereof
CN104979182A (en) * 2014-04-09 2015-10-14 赛米控电子股份有限公司 Methods and apparatus for depositing metal layer on semiconductor device
CN105206703A (en) * 2014-05-26 2015-12-30 北京恒基伟业投资发展有限公司 Production method of film solar cell and electro-deposition device thereof
CN206188902U (en) * 2016-11-23 2017-05-24 瑞尔太阳能投资有限公司 Electrochemical deposition thin -film solar cell's continuous production's device

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