CN106868455A - Evaporation crucible and evaporation coating device - Google Patents
Evaporation crucible and evaporation coating device Download PDFInfo
- Publication number
- CN106868455A CN106868455A CN201710161640.4A CN201710161640A CN106868455A CN 106868455 A CN106868455 A CN 106868455A CN 201710161640 A CN201710161640 A CN 201710161640A CN 106868455 A CN106868455 A CN 106868455A
- Authority
- CN
- China
- Prior art keywords
- crucible
- capping
- evaporation
- baffle plate
- cover
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
Abstract
The invention provides one kind evaporation crucible, including crucible body and crucible cover, the crucible body is used to hold evaporation material, the crucible cover is in the crucible body, and with the crucible body separately, multiple baffle plates for separately setting being provided with the crucible cover, the crucible cover is fixed in described baffle plate one end, the other end extends towards the crucible body, and the baffle plate and the crucible cover are used to carrying the evaporation material by thermal evaporation in the evaporation crucible.Present invention also offers a kind of evaporation coating device.The deposition materials that the evaporation crucible and evaporation coating device that the present invention is provided can be reduced on crucible cover come off and prevent deposition materials from blocking evaporation source.
Description
Technical field
The present invention relates to OLED display technology fields, and in particular to a kind of steaming in a kind of OLED display device preparation technology
Plating crucible and evaporation coating device.
Background technology
OLED (Organic Light Emitting Display, organic elctroluminescent device) has ultra-thin, sound
Response is high, contrast is high, the low advantage of power consumption, is advanced by leaps and bounds in display field industrialization speed in recent years.
During the evaporation of OLED material, under vacuum conditions, OLED material is positioned over the crucible for being stamped crucible cover
In, with resistance wire mode of heating heating crucible so that the OLED material in crucible be heated after by it is solid state transformed for molten state and then
Evaporation.After the evaporation rate of OLED material reaches requirement and stabilization, crucible cover is opened, OLED material is just with the evaporation speed of stabilization
Rate is deposited with.Wherein, the OLED material in crucible can assemble before evaporation rate stabilization in crucible interior surface.On crucible cover
OLED material accumulation to after certain thickness, due to Action of Gravity Field, crucible cover can be departed from and fallen into crucible.Existing crucible cover
It is smooth circular arc capping, the OLED material being deposited on crucible cover is departed from large-sized flake structure and falls into crucible mostly
In, large scale deposition materials easily cover evaporation source so that OLED material cannot evaporate, and evaporation process cannot proceed, this
In the case of kind, can only begin to speak to clear up and re-start evaporation process, badly influence production, experiment progress and device performance.
Therefore, how to reduce in evaporation material falls back to the crucible deposited on crucible cover, prevent from blocking evaporation source, be ability
One of technical problem of field technique personnel's urgent need to resolve.
The content of the invention
Problem for more than, it is an object of the invention to provide one kind evaporation crucible and evaporation coating device, is reduced on crucible cover
In evaporation material falls back to the crucible of deposition, prevent from blocking evaporation source.
In order to solve problem present in background technology, the invention provides one kind evaporation crucible, including crucible body and
Crucible cover, the crucible body is used to hold evaporation material, the crucible cover in the crucible body, and with the crucible
Body separately, is provided with multiple baffle plates for separately setting in the crucible cover, the crucible cover is fixed in described baffle plate one end,
The other end extends towards the crucible body, and the baffle plate and the crucible cover receive thermal evaporation for carrying described evaporation in crucible
The evaporation material.
Wherein, the crucible cover includes capping, the capping towards the crucible body, the baffle plate include installation portion with
Supporting part, the installation portion is detachably secured to the capping, and in order to dismantle the baffle plate, the supporting part is described in
Crucible body direction extends, for depositing the evaporation material.
Wherein, the capping is circular arc, including central area and the neighboring area around the central area, Duo Gesuo
Baffle plate is stated located at the neighboring area, and located at the opposite sides of the central area.
Wherein, the baffle plate is fallen into the crucible body in the projection of vertical direction.
Wherein, multiple baffle plates along the capping diametrically setting, and the supporting part is towards the crucible
The bearing of trend of body intersects with the axial direction of the capping；Along the central area to the neighboring area of the capping
Direction, the supporting part gradually increases towards the bearing of trend of the crucible body with the angle value of capping axial direction.
Wherein, along the capping the central area to the neighboring area direction, the described of the baffle plate hold
Load portion gradually increases towards the development length of the crucible body.
Wherein, the baffle plate be arc, and the baffle plate supporting part along the capping circumferentially extending, the gear
The baffle plate of plate and radially adjoining and the capping being located between the two form raceway groove, and the raceway groove is along the capping
Circumferentially extending.
Wherein, the supporting part of the baffle plate radially extending along the capping, the baffle plate and the adjacent baffle plate
And the capping being located between the two forms raceway groove, the raceway groove is radially extended along the capping.
Present invention also offers a kind of evaporation coating device, including the evaporation crucible described in any of the above-described implementation method.
A kind of evaporation crucible and evaporation coating device that the application implementation method is provided, set many by the capping of crucible cover
Individual baffle plate, the baffle plate and the capping are provided commonly for carrying the evaporation material by thermal evaporation, so on the one hand can increase evaporation
Material mitigates the deposition materials weight in unit area, so as to reduce the deposition materials on capping in the depositional area on capping
In falling to crucible body；On the other hand, whole capping (big depositional plane) can be divided into multiple small depositions by multiple baffle plates
Face, blocking size is assembled to reduce deposition materials, so that it is small size to fall to the deposition materials in crucible body
Block, so as to avoid deposition materials from covering evaporation source, influences evaporation process.
Brief description of the drawings
Technical scheme in order to illustrate more clearly the embodiments of the present invention, below will be attached to what is used needed for embodiment
Figure is briefly described, it should be apparent that, drawings in the following description are only some embodiments of the present invention, for this area
For those of ordinary skill, on the premise of not paying creative work, other accompanying drawings can also be obtained according to these accompanying drawings.
Fig. 1 is the sectional view of the evaporation crucible that the present invention is provided.
Fig. 2 is the partial enlarged drawing of the crucible cover that Fig. 1 is provided.
Fig. 3-1 is the crucible cover structural representation that the first embodiment of the invention is provided.
Fig. 3-2 is the crucible cover structural representation that second embodiment of the invention is provided.
Fig. 3-3 is the crucible cover structural representation that the third embodiment of the invention is provided.
Fig. 3-4 is the crucible cover structural representation that the 4th kind of embodiment of the present invention is provided.
Fig. 4-1 is the sectional view of the evaporation crucible that the 5th kind of embodiment of the present invention is provided.
Fig. 4-2 is the structural representation of the crucible cover that Fig. 4-1 is provided.
Fig. 4-3 is sectional views of the Fig. 4-2 along a directions.
Fig. 5-1 is the sectional view of the evaporation crucible that the 6th kind of embodiment of the present invention is provided.
Fig. 5-2 is the structural representation of the crucible cover that Fig. 5-1 is provided.
Fig. 5-3 is sectional views of the Fig. 5-2 along b directions.
Fig. 6-1 is the evaporation crucible structure schematic diagram that the 7th kind of embodiment of the present invention is provided.
Fig. 6-2 is the structural representation of the crucible cover that Fig. 6-1 is provided.
Specific embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme of the embodiment of the present invention is carried out clear, complete
Ground description.
A kind of evaporation crucible provided in an embodiment of the present invention, is positioned in evaporation coating device, (is steamed for holding material to be evaporated
Rise) material to be evaporated is heated and is plated on substrate in order to evaporation coating device.The material to be evaporated can be metal, partly lead
Body, insulator, heterogeneity than alloy, compound and organic polymer etc., the substrate can be metal, semiconductor, absolutely
Edge body, plastics etc..
It is a kind of sectional view for being deposited with crucible provided in an embodiment of the present invention also referring to Fig. 1 and Fig. 2, including crucible
Body 2 and crucible cover 1, the crucible body 2 are used to hold evaporation material 3, and the crucible cover 1 is located in the crucible body 2,
And with the crucible body 2 separately.The crucible cover 1 and the crucible body 2 separately 3~5mm.The crucible cover 1 is wrapped
Include the capping 11 being oppositely arranged with the crucible body 2.Multiple baffle plates 12 for separately setting, institute are provided with the crucible cover 1
State the one end of baffle plate 12 to be fixed on the capping 11 of the crucible cover 1, the other end extends towards the crucible body 2, the baffle plate
12 and the crucible cover 1 be used for carry it is described evaporation crucible in by thermal evaporation the evaporation material 3.Specifically, material is evaporated
Material 3 is evaporated and diffuses up after being heated, and crucible cover 1 is run into during diffusion and solid-state is combined into the inner surface of crucible cover 1, this
Embodiment sets baffle plate 12 in the crucible cover 1 so that the evaporation material 3 can be deposited on the interior of the surface of baffle plate 12 and crucible cover 1
Surface, so as to increased the depositional area of evaporation material 3.
A kind of evaporation crucible that the application implementation method is provided, including crucible body 2 and crucible cover 1, the crucible cover 1 exist
Evaporate before the evaporation rate stabilization of material 3 in the crucible body 2 and with the crucible body 2 separately, to deposit steaming
Hair material 3, after evaporation rate stabilization, crucible cover 3 is removed from the crucible body 2, and the evaporation material 3 will be deposited with needed for
On the substrate of evaporation.The application on the capping 11 of crucible cover 1 by setting multiple baffle plates 12, the baffle plate 12 and the capping
11 are provided commonly for carrying the evaporation material 3 by thermal evaporation, on the one hand can increase evaporation material 3 in the depositional area on capping 11,
Mitigate the deposition materials weight in unit area, so that during the deposition materials reduced on capping 11 fall to crucible body 2；It is another
Big depositional plane (whole capping) is divided into multiple small depositional planes by aspect, baffle plate 12, assembles blocking to reduce deposition materials
Size, so that it is the block of small size to fall to deposition materials in crucible body 2, so as to avoid deposition materials from covering
Evaporation source 3, influences evaporation process.
Further, the capping 11 can be plane or cambered surface, it is preferable that in order to increase the evaporation source 3 described
Depositional area on capping 11, the capping 11 can be arcwall face.The baffle plate 12 can be strip, arc, waveform etc.
Shape, is not limited in this application.Can be arranged on capping 11 with adjacent, parallel between the baffle plate 12, also can random row
Be listed on capping 11, can with the center of capping 11 be symmetrical centre around being arranged on capping 11, in the present embodiment for
Arrangement mode between baffle plate 12 is not limited.The material of the crucible cover 1 can be ceramics or metal or alloy etc..Institute
The material for stating baffle plate 12 can be identical with the material of the crucible cover 1.
Further, Fig. 1 is referred to, the baffle plate 12 is fallen into the crucible body 2 in the projection of vertical direction so that
When the crucible cover 1 is covered with the crucible body 2, baffle plate 12 is located at the receiving space that crucible cover 1 is formed with crucible body 2
It is interior.
Fig. 2 is referred to, the baffle plate 12 includes installation portion 121 and supporting part 122, and the installation portion 121 is removably solid
Due to the capping 11, it is specifically as follows and dismountable connected mode such as is spirally connected or snaps connection, in order to from crucible cover 1
The baffle plate 12 is dismantled, with cleaning crucible lid 1 and baffle plate 12.The supporting part 122 extends towards the direction of the crucible body 2,
For depositing the evaporation material 3.
In a kind of implementation method, Fig. 2 is referred to, the capping 11 is circular arc, including central area 111 and around described
The neighboring area 112 of central area, multiple baffle plates 12 are located at the neighboring area 112, and located at the central area 111
Opposite sides.
Further, Fig. 2 is referred to, along the central area 111 to the neighboring area 112 of the capping 11
Direction (i.e. the sensing of A in Fig. 2), the supporting part 122 of the baffle plate 12 towards the crucible body 2 development length gradually
Increase.(the i.e. sensing of A in Fig. 2 i.e. from the direction of the central area 111 of the neighboring area 112 to the capping 11
It is reverse), the supporting part 122 of the baffle plate 12 is gradually reduced towards the development length of the crucible body 2.So along
The baffle arrangement for being axially formed layering of the capping 11, the baffle plate area on upper strata is small, and the baffle plate area of lower floor is big.Work as gaseous state
Evaporation material closer to crucible capping, can more be concentrated to the axle center of capping, the direction of the supporting part 122 of the baffle plate 12
The development length of the crucible body 2 is gradually reduced, and on the one hand can reduce the evaporation material 3 that 12 pairs, baffle plate spreads from the bottom to top
Hinder, be easy to more to evaporate material 3 and be deposited on cover center region 111 and on the baffle plate 12 in cover center region 111；
On the other hand, the baffle plate area on upper strata is small, the big baffle arrangement of the baffle plate area of lower floor so that the evaporation material reflected by capping
Can from top to bottom fall on the bottom baffle arrangement of larger area, can so increase the depositional area of evaporation material, while preventing
The evaporation material reflected by capping hinders lower floor to evaporate the evaporation process of material.
Further, Fig. 2 is referred to, along the radial direction A of the capping 11, multiple baffle plates 12 are oppositely arranged,
And the supporting part 122 intersects towards the bearing of trend B of the crucible body 2 and the axial C of the capping 11.Along the lid
(i.e. the sensing of A in Fig. 2), the supporting part 122 on the central area 111 in face 11 to the direction of the neighboring area 112
Gradually increase with the angle value of the axial direction of the capping 11 towards the bearing of trend of the crucible body 2.Specifically, along the finger of A
To direction, the supporting part 122 is respectively B, B1, B2, B3 towards the bearing of trend of the crucible body 2, wherein B, B1, B2,
B3 gradually increases with the angle of the axial direction of the capping 11 C.Because such design may be such that the projection of baffle plate axially C
Area is larger, can carry more gaseous state evaporation materials for flowing from the bottom to top or from top to bottom.
In the first implementation method, Fig. 3-1 is referred to, the baffle plate 12 can be elongated plates, in capping 11
The opposite sides in heart district domain 111.
In second implementation method, also referring to Fig. 2 and Fig. 3-2, the baffle plate 12 can be arc, and the gear
The supporting part 122 of plate 12 extends along the circumferential D of the capping 11, the baffle plate 12 and folder of the baffle plate 12 and radially adjoining
Raceway groove 123 is formed located at the capping 11 between the two, the raceway groove 123 extends along the circumferential D of the capping 11.This reality
Mode is applied for the first implementation method, the curved baffle 12 can match with the radian of the capping, so
More baffle arrangements can be set on the capping.
In 11 1 circumferences of capping, can separately be set with multiple baffle plates 12, however it is not limited to above-mentioned embodiment party
In formula in one circumference of capping, two baffle plates 12 are oppositely arranged.
Fig. 3-1 to Fig. 3-4 is referred to, along the circumferential D of the capping, the baffle plate 12 can be continuous or interruption knot
Structure, the structure of continuous baffle plate 12 as shown in Fig. 3-1 and Fig. 3-2, baffle arrangement such as Fig. 3-3 and Fig. 3-4 institutes of the interruption
Show.
In the third implementation method, the baffle plate 12 shown in Fig. 3-3 is annular slab.
In 4th kind of implementation method, the baffle plate 12 shown in Fig. 3-4 is back-shaped plate.Continuous baffle arrangement compared to
The baffle arrangement of interruption, structure is more simple, and installation and removal are more convenient.
In 5th kind of implementation method, also referring to Fig. 4-1, Fig. 4-2 and Fig. 4-3, install multiple on the capping 11
Baffle plate 12, the supporting part 122 of the baffle plate 12 extends along the radial direction A of the capping 11.The section of the baffle plate 12 can be
Rectangle or waveform or V-arrangement or U-shaped are trapezoidal etc..Multiple baffle plates 12 are disposed adjacent, and the baffle plate 12 can be with interval
It is disposed adjacent, can be disposed adjacent without compartment of terrain.The gear 12 and the adjacent baffle plate 12 and it is located in institute between the two
State capping 11 and form raceway groove 123, the raceway groove 123 extends along the radial direction A of the capping 11.It is described in a kind of implementation method
Baffle plate 12 includes intersecting first grade of face 124 and second gear face 125, the of first grade of face of the baffle plate and the adjacent screen
Two grades of faces form raceway groove 123.Multiple baffle plates 12 can be connected or be not attached to, in the case where being not connected with, described the
One grade of face, the second gear face of the adjacent screen and part capping between the two form raceway groove 123.First grade of face 124 and
Two grades of faces 125 both increase the depositional area of capping and whole capping have been divided into multiple small depositional planes, to reduce deposition
Material assembles blocking size so that it is the block of small size to fall to the deposition materials in crucible body, so as to avoid deposition
Material covers evaporation source.
In 6th kind of implementation method, also referring to Fig. 5-1 and Fig. 5-2, the capping 11 can be provided with multiple grooves 13, i.e.,
Groove 13 is recessed on the capping 11, and the section of the groove 13 can be V-arrangement, U-shaped, trapezoidal etc..The groove 13 is adjacent
Set, and radially extending along the capping 11.The groove 13 can be disposed adjacent with interval, can be without compartment of terrain phase
Neighbour is set.The capping 11 is radially the direction extended to arcwall face edge centered on arcwall face center.Specifically, capping
11 radial direction can set a groove 13, it is also possible to which ground, multiple channel abreasts are arranged at one radially.This reality
Apply in example, of capping 11 radially sets a groove 13, in order to clear the deposition materials on crucible cover 2.The ditch
Groove 13 can increase depositional area of the evaporation source 3 on crucible cover 1, and then reduce deposit thickness, mitigate crucible in unit area
Deposition weight on lid 1, so that can efficiently reduce deposition materials departs from the probability that crucible cover 1 drops in crucible body 2.This
Outward, multiple grooves 13 will be originally used for a capping for entirety 11 and be divided into multiple regions, will a big depositional plane be divided into
Multiple small depositional planes, evaporation material is deposited on smaller depositional plane and then assembles blocking with reduced size, and then prevents deposition materials
Come off in large scale form, and cover in evaporation source 3, hinder evaporation process.
Understandably, in the present embodiment for shape, distribution, quantity, the manufacturing process etc. of groove 13 without limiting, only need
Meet and groove 13 is set on capping 11, increase depositional area and large-sized depositional plane is divided into the depositional plane of small size
It is required that.
In 7th kind of implementation method, also referring to Fig. 6-1 and Fig. 6-2, the groove 13 can be arcwall face.The ditch
Without crack between groove 13 and the capping 11, capping 11, and simple structure are cleaned after being easy to evaporation, be easy to manufacture.
Present invention also provides a kind of evaporation coating device, including the evaporation crucible described in any of the above-described kind of implementation method.
A kind of evaporation crucible and evaporation coating device that the application implementation method is provided, set by the capping 11 of crucible cover 1
Put multiple baffle plates 12, on the one hand, the setting of baffle plate and upper strata area can increase evaporation material 3 less than the structure design of lower floor's area
Depositional area on capping 11, mitigates the deposition materials weight in unit area, so as to reduce the deposition materials on capping 11
Fall in crucible body 2, while can reduce the deposition material reflected by capping hinders lower floor's evaporation process, improve evaporation speed
Rate；On the other hand, big depositional plane is divided into multiple small depositional planes by baffle plate 12, and blocking chi is assembled to reduce deposition materials
It is very little, so that it is the block of small size to fall to the deposition materials in crucible body 2, so as to avoid deposition materials from covering evaporation
Source 3, influences evaporation process.Additionally, baffle plate 12 is detachably connected with capping 11, it is easy to later stage cleaning crucible lid 1, reduces crucible cover
Remaining evaporation material, increases the service life of crucible cover 1 on 1, cost-effective.
In sum, although the present invention it is disclosed above with preferred embodiment, but the preferred embodiment and be not used to limitation
The present invention, one of ordinary skill in the field without departing from the spirit and scope of the present invention, can make various changes and profit
Adorn, therefore protection scope of the present invention is defined by the scope that claim is defined.
The above is the preferred embodiment of the present invention, it is noted that for those skilled in the art
For, under the premise without departing from the principles of the invention, some improvements and modifications can also be made, these improvements and modifications are also considered as
Protection scope of the present invention.
Claims (9)
1. a kind of to be deposited with crucible, it is characterised in that including crucible body and crucible cover, the crucible body is used to hold evaporation material
Material, the crucible cover with the crucible body separately, is provided with multiple phases in the crucible body in the crucible cover
The crucible cover is fixed in spaced baffle plate, described baffle plate one end, and the other end extends towards the crucible body, the gear
Plate and the crucible cover are used to carrying the evaporation material by thermal evaporation in the evaporation crucible.
2. one kind according to claim 1 is deposited with crucible, it is characterised in that the crucible cover includes capping, the capping
Towards the crucible body, the baffle plate includes installation portion and supporting part, and the installation portion is detachably secured to the capping,
In order to dismantle the baffle plate, the supporting part extends towards the crucible body direction, for depositing the evaporation material.
3. a kind of evaporation crucible according to claim 2, it is characterised in that the capping is circular arc, including center
Domain and the neighboring area around the central area, multiple baffle plates are located at the neighboring area, and located at the center
The opposite sides in domain.
4. one kind according to claim 3 is deposited with crucible, it is characterised in that the baffle plate falls into the projection of vertical direction
In the crucible body.
5. a kind of evaporation crucible according to claim 4, it is characterised in that multiple baffle plates along the capping footpath
To being oppositely arranged, and the supporting part intersects towards the bearing of trend of the crucible body with the axial direction of the capping；Along institute
State the central area of capping to the direction of the neighboring area, bearing of trend of the supporting part towards the crucible body
Angle value with capping axial direction gradually increases.
6. one kind according to claim 5 is deposited with crucible, it is characterised in that along central area to the periphery of the capping
The direction in region, the supporting part of the baffle plate gradually increases towards the development length of the crucible body.
7. a kind of evaporation crucible according to claim 6, it is characterised in that the baffle plate is arc, and the baffle plate
Supporting part along the circumferentially extending of the capping, the baffle plate and the radially adjacent baffle plate and be located between the two
The capping formed raceway groove, the raceway groove along the capping circumferentially extending.
8. one kind according to claim 4 is deposited with crucible, it is characterised in that the supporting part of the baffle plate is along the capping
Radially extend, the baffle plate and the adjacent baffle plate and the capping being located between the two form raceway groove, the ditch
Road is radially extended along the capping.
9. a kind of evaporation coating device, it is characterised in that including the evaporation crucible described in claim any one of 1-8.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710161640.4A CN106868455B (en) | 2017-03-17 | 2017-03-17 | Crucible and evaporation coating device is deposited |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710161640.4A CN106868455B (en) | 2017-03-17 | 2017-03-17 | Crucible and evaporation coating device is deposited |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106868455A true CN106868455A (en) | 2017-06-20 |
| CN106868455B CN106868455B (en) | 2019-04-23 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710161640.4A Active CN106868455B (en) | 2017-03-17 | 2017-03-17 | Crucible and evaporation coating device is deposited |
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| Country | Link |
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| CN (1) | CN106868455B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108330450A (en) * | 2018-04-12 | 2018-07-27 | 深圳市华星光电半导体显示技术有限公司 | A kind of vapor deposition crucible and its outlet chip architecture |
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| JPS5959881A (en) * | 1982-09-29 | 1984-04-05 | Hitachi Ltd | Shutter for forming thin film |
| CN102175077A (en) * | 2005-01-25 | 2011-09-07 | 东邦钛株式会社 | Apparatus for melting metal by electron beams and process for producing high-melting metal ingot using this apparatus |
| CN103205717A (en) * | 2012-01-13 | 2013-07-17 | 鸿富锦精密工业（深圳）有限公司 | Cover body |
| CN103834921A (en) * | 2014-02-28 | 2014-06-04 | 上海和辉光电有限公司 | Evaporation source check plate structure |
| CN105200374A (en) * | 2015-10-31 | 2015-12-30 | 东莞市华星镀膜科技有限公司 | Optical evaporation coating equipment capable of preventing secondary sputtering pollution |
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2017
- 2017-03-17 CN CN201710161640.4A patent/CN106868455B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5959881A (en) * | 1982-09-29 | 1984-04-05 | Hitachi Ltd | Shutter for forming thin film |
| CN102175077A (en) * | 2005-01-25 | 2011-09-07 | 东邦钛株式会社 | Apparatus for melting metal by electron beams and process for producing high-melting metal ingot using this apparatus |
| CN103205717A (en) * | 2012-01-13 | 2013-07-17 | 鸿富锦精密工业（深圳）有限公司 | Cover body |
| CN103834921A (en) * | 2014-02-28 | 2014-06-04 | 上海和辉光电有限公司 | Evaporation source check plate structure |
| CN105200374A (en) * | 2015-10-31 | 2015-12-30 | 东莞市华星镀膜科技有限公司 | Optical evaporation coating equipment capable of preventing secondary sputtering pollution |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108330450A (en) * | 2018-04-12 | 2018-07-27 | 深圳市华星光电半导体显示技术有限公司 | A kind of vapor deposition crucible and its outlet chip architecture |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106868455B (en) | 2019-04-23 |
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