CN106868455B - Crucible and evaporation coating device is deposited - Google Patents

Abstract

The present invention provides a kind of vapor deposition crucibles, including crucible body and crucible cover, the crucible body is for holding evaporation material, the crucible cover is set in the crucible body, and separately with the crucible body, multiple baffles being separately arranged are equipped in the crucible cover, the crucible cover is fixed in described baffle one end, the other end extends towards the crucible body, and the baffle and the crucible cover are used to carry the evaporation material in the vapor deposition crucible by thermal evaporation.The present invention also provides a kind of evaporation coating devices.Vapor deposition crucible and evaporation coating device provided by the invention can reduce the deposition materials on crucible cover and fall off and prevent deposition materials from blocking evaporation source.

Description

Crucible and evaporation coating device is deposited

Technical field

The present invention relates to OLED field of display technology, and in particular to a kind of one of OLED display device preparation process steams Plate crucible and evaporation coating device.

Background technique

OLED (Organic Light Emitting Display, organic elctroluminescent device) has ultra-thin, sound Response is high, contrast is high, the advantages such as low in energy consumption, advances by leaps and bounds in recent years in display field industrialization speed.

During the vapor deposition of OLED material, under vacuum conditions, OLED material is placed in the crucible for being stamped crucible cover In, with resistance wire heating method heating crucible so that after OLED material in crucible is heated by solid state transformed for molten state in turn Evaporation.After the evaporation rate of OLED material reaches requirement and stablizes, crucible cover is opened, OLED material is just with stable evaporation speed Rate is deposited.Wherein, the OLED material in crucible can assemble before evaporation rate is stablized in crucible interior surface.On crucible cover OLED material accumulation to after certain thickness, due to gravity, crucible cover can be detached from and fallen into crucible.Existing crucible cover For smooth circular arc capping, the OLED material being deposited on crucible cover is detached from large-sized flake structure mostly and falls into crucible In, large scale deposition materials easily cover evaporation source, so that OLED material can not evaporate, evaporation process can not continue, this In the case of kind, it can only begin to speak to clear up and re-start vapor deposition process, seriously affect production, experiment progress and device performance.

Therefore, the evaporation material falls back deposited on crucible cover how is reduced into crucible, is prevented blocking evaporation source, is ability One of the technical issues of field technique personnel's urgent need to resolve.

Summary of the invention

For above problem, the object of the present invention is to provide a kind of vapor deposition crucible and evaporation coating devices, reduce on crucible cover The evaporation material falls back of deposition prevents blocking evaporation source into crucible.

In order to solve the problems, such as background technique, the present invention provides a kind of vapor deposition crucible, including crucible body and Crucible cover, for holding evaporation material, the crucible cover is set in the crucible body crucible body, and with the crucible Ontology separately, is equipped with multiple baffles being separately arranged in the crucible cover, the crucible cover is fixed in described baffle one end, The other end extends towards the crucible body, and the baffle and the crucible cover are for carrying in the vapor deposition crucible by thermal evaporation The evaporation material.

Wherein, the crucible cover includes capping, the capping towards the crucible body, the baffle include mounting portion with Supporting part, the mounting portion are detachably secured to the capping, and in order to dismantle the baffle, the supporting part is described in Crucible body direction extends, for depositing the evaporation material.

Wherein, the capping is arc-shaped, including central area and around the neighboring area of the central area, Duo Gesuo Baffle is stated set on the neighboring area, and is set to the opposite sides of the central area.

Wherein, the baffle is fallen into the crucible body in the projection of vertical direction.

Wherein, multiple baffles are along the diametrically setting of the capping, and the supporting part is towards the crucible The extending direction of ontology intersects with the axial direction of the capping；Along the central area to the neighboring area of the capping Direction, the supporting part are gradually increased towards the extending direction of the crucible body and the angle value of the capping axial direction.

Wherein, along the direction of the central area of the capping to the neighboring area, the described of the baffle is held The development length of load portion towards the crucible body gradually increases.

Wherein, the baffle is arc panel, and the supporting part of the baffle is along the circumferentially extending of the capping, the gear The baffle of plate and radially adjoining and the capping being located between the two form channel, and the channel is along the capping Circumferentially extending.

Wherein, the supporting part of the baffle radially extending along the capping, the baffle and the adjacent baffle And the capping being located between the two forms channel, the channel is radially extended along the capping.

The present invention also provides a kind of evaporation coating devices, including vapor deposition crucible described in any of the above-described embodiment.

A kind of vapor deposition crucible and evaporation coating device that the application embodiment provides are more by being arranged on the capping of crucible cover A baffle, the baffle and the capping are provided commonly for carrying the evaporation material by thermal evaporation, on the one hand can increase evaporation in this way Material mitigates the deposition materials weight in unit area, to reduce the deposition materials on capping in the depositional area on capping It falls in crucible body；On the other hand, entire capping (big depositional plane) can be divided into multiple small depositions by multiple baffles Assemble blocking size to reduce deposition materials in face, so that the deposition materials fallen in crucible body are small size Block influences evaporation process so that deposition materials be avoided to cover evaporation source.

Detailed description of the invention

In order to illustrate the technical solution of the embodiments of the present invention more clearly, below will be to needed in the embodiment attached Figure is briefly described, it should be apparent that, drawings in the following description are only some embodiments of the invention, for this field For those of ordinary skill, without creative efforts, it is also possible to obtain other drawings based on these drawings.

Fig. 1 is the sectional view of vapor deposition crucible provided by the invention.

Fig. 2 is the partial enlarged view for the crucible cover that Fig. 1 is provided.

Fig. 3-1 is the crucible cover structural schematic diagram that the first embodiment of the invention provides.

Fig. 3-2 is the crucible cover structural schematic diagram that second of embodiment of the invention provides.

Fig. 3-3 is the crucible cover structural schematic diagram that the third embodiment of the invention provides.

Fig. 3-4 is the crucible cover structural schematic diagram that the 4th kind of embodiment of the invention provides.

Fig. 4-1 is the sectional view for the vapor deposition crucible that the 5th kind of embodiment of the present invention provides.

Fig. 4-2 is the structural schematic diagram for the crucible cover that Fig. 4-1 is provided.

Fig. 4-3 is sectional view of the Fig. 4-2 along the direction a.

Fig. 5-1 is the sectional view for the vapor deposition crucible that the 6th kind of embodiment of the present invention provides.

Fig. 5-2 is the structural schematic diagram for the crucible cover that Fig. 5-1 is provided.

Fig. 5-3 is sectional view of the Fig. 5-2 along the direction b.

Fig. 6-1 is the vapor deposition long crucible structure schematic diagram that the 7th kind of embodiment of the invention provides.

Fig. 6-2 is the structural schematic diagram for the crucible cover that Fig. 6-1 is provided.

Specific embodiment

Following will be combined with the drawings in the embodiments of the present invention, carries out to the technical solution of the embodiment of the present invention clear, complete Ground description.

A kind of vapor deposition crucible provided in an embodiment of the present invention, is placed in evaporation coating device, (steams for holding material to be evaporated Rise) in order to which evaporation coating device heats material to be evaporated and is plated on substrate.The material to be evaporated can be metal, partly lead Body, insulator, alloy, compound and the organic polymer of heterogeneity ratio etc., the substrate can for metal, semiconductor, absolutely Edge body, plastics etc..

Also referring to Fig. 1 and Fig. 2, for a kind of sectional view that crucible is deposited provided in an embodiment of the present invention, including crucible Ontology 2 and crucible cover 1, the crucible body 2 are set in the crucible body 2 for holding evaporation material 3, the crucible cover 1, And separately with the crucible body 2.The crucible cover 1 and the crucible body 2 separately 3~5mm.The crucible cover 1 wraps Include the capping 11 being oppositely arranged with the crucible body 2.Multiple baffles 12 being separately arranged, institute are equipped in the crucible cover 1 It states 12 one end of baffle to be fixed on the capping 11 of the crucible cover 1, the other end extends towards the crucible body 2, the baffle 12 and the crucible cover 1 be used for carry it is described vapor deposition crucible in by thermal evaporation the evaporation material 3.Specifically, evaporation material It is evaporated after material 3 is heated and diffuses up, crucible cover 1 is encountered during diffusion and be combined into solid-state in 1 inner surface of crucible cover, this Baffle 12 is arranged in embodiment in crucible cover 1, so that the evaporation material 3 can be deposited on the interior of 12 surface of baffle and crucible cover 1 Surface, to increase the depositional area of evaporation material 3.

A kind of vapor deposition crucible that the application embodiment provides, including crucible body 2 and crucible cover 1, the crucible cover 1 exist The evaporation rate of evaporation material 3 is set in the crucible body 2 and with the crucible body 2 separately before stablizing, and is steamed with depositing Material 3 is sent out, after evaporation rate is stablized, removes crucible cover 3 from the crucible body 2, the evaporation material 3 arrives vapor deposition required On the substrate of vapor deposition.The application on the capping 11 of crucible cover 1 by being arranged multiple baffles 12, the baffle 12 and the capping 11 are provided commonly for carrying the evaporation material 3 by thermal evaporation, on the one hand can increase evaporation material 3 in the depositional area on capping 11, Mitigate the deposition materials weight in unit area, so that the deposition materials reduced on capping 11 are fallen in crucible body 2；It is another Big depositional plane (entire capping) is divided into multiple small depositional planes by aspect, baffle 12, blocking to reduce deposition materials assembly Size, so that the block that deposition materials in crucible body 2 are small size is fallen to, so that deposition materials be avoided to cover Evaporation source 3, influences evaporation process.

Further, the capping 11 can be a plane or an arc surface, it is preferable that in order to increase the evaporation source 3 described Depositional area on capping 11, the capping 11 can be arcwall face.The baffle 12 can be strip, arc, waveform etc. Shape, in this application with no restrictions.It can be arranged between the baffle 12 with adjacent, parallel on capping 11, it can also random row Be listed on capping 11, can be symmetrical centre using the center of capping 11 around being arranged on capping 11, in the present embodiment for Arrangement mode between baffle 12 is without limitation.The material of the crucible cover 1 can be ceramics or metal or alloy etc..Institute The material for stating baffle 12 can be identical as the material of the crucible cover 1.

Further, referring to Fig. 1, the baffle 12 is fallen into the crucible body 2 in the projection of vertical direction, so that When the crucible cover 1 is closed with the crucible body 2 lid, baffle 12 is located at the accommodating space of crucible cover 1 and the formation of crucible body 2 It is interior.

Referring to Fig. 2, the baffle 12 includes mounting portion 121 and supporting part 122, the mounting portion 121 is removably solid Due to the capping 11, it is specifically as follows and dismountable connection type such as is spirally connected or snaps connection, in order to from crucible cover 1 The baffle 12 is dismantled, with cleaning crucible lid 1 and baffle 12.The supporting part 122 extends towards 2 direction of crucible body, For depositing the evaporation material 3.

In a kind of embodiment, referring to Fig. 2, the capping 11 is arc-shaped, including central area 111 and around described The neighboring area 112 of central area, multiple baffles 12 are set to the neighboring area 112, and are set to the central area 111 Opposite sides.

Further, referring to Fig. 2, along the capping 11 the central area 111 to the neighboring area 112 Direction (i.e. the direction of A in Fig. 2), the supporting part 122 of the baffle 12 towards the crucible body 2 development length gradually Increase.I.e. from the neighboring area 112 to (the i.e. direction of A in Fig. 2 on the direction of the central area 111 of the capping 11 It is reversed), the development length of the supporting part 122 towards the crucible body 2 of the baffle 12 is gradually reduced.In this way along The baffle arrangement for being axially formed layering of the capping 11, the baffle area on upper layer is small, and the baffle area of lower layer is big.Work as gaseous state Evaporation material closer to crucible capping, can more be concentrated to the axis center of capping, 122 direction of the supporting part of the baffle 12 The development length of the crucible body 2 is gradually reduced, and on the one hand can reduce baffle 12 to the evaporation material 3 spread from the bottom to top It hinders, is deposited on cover center region 111 and on the baffle 12 in cover center region 111 convenient for more evaporating material 3； On the other hand, the baffle area on upper layer is small, the big baffle arrangement of the baffle area of lower layer, so that the evaporation material reflected by capping It can from top to bottom fall on the bottom baffle arrangement of larger area, the depositional area of evaporation material can be increased in this way, prevented simultaneously The vapor deposition process of lower layer's evaporation material is hindered by the evaporation material that capping reflects.

Further, referring to Fig. 2, along the capping 11 radial direction A, multiple baffles 12 are oppositely arranged, And the extending direction B of the supporting part 122 towards the crucible body 2 intersects with the axial C of the capping 11.Along the lid (i.e. the direction of A in Fig. 2), the supporting part 122 on the central area 111 in face 11 to the direction of the neighboring area 112 It is gradually increased towards the extending direction of the crucible body 2 with the axial angle value of the capping 11.Specifically, along the finger of A To direction, the extending direction of the supporting part 122 towards the crucible body 2 is respectively B, B1, B2, B3, wherein B, B1, B2, The angle of B3 and the 11 axial direction C of capping are gradually increased.This is because such design may make the projection of baffle axially C Area is larger, can carry the gaseous state evaporation material more flowed from the bottom to top or from top to bottom.

In the first embodiment, Fig. 3-1 is please referred to, the baffle 12 can be elongated plates, in capping 11 The opposite sides in heart district domain 111.

In second of embodiment, referring to Figure 2 together with Fig. 3-2, the baffle 12 can be arc panel, and the gear The supporting part 122 of plate 12 extends along the circumferential D of the capping 11, the baffle 12 and folder of the baffle 12 and radially adjoining Channel 123 is formed set on the capping 11 between the two, the channel 123 extends along the circumferential D of the capping 11.This reality Mode is applied for the first embodiment, the curved baffle 12 can match with the radian of the capping, in this way More baffle arrangements can be set on the capping.

In 11 1 circumferential directions of capping, can separately it be arranged with multiple baffles 12, however it is not limited to above-mentioned embodiment party In formula in one circumferential direction of capping, two baffles 12 are oppositely arranged.

Fig. 3-1 to Fig. 3-4 is please referred to, along the circumferential D of the capping, the baffle 12 can be continuous or interruption knot Structure, continuous 12 structure of baffle is as shown in Fig. 3-1 and Fig. 3-2, described intermittent baffle arrangement such as Fig. 3-3 and Fig. 3-4 institute Show.

In the third embodiment, the baffle 12 shown in Fig. 3-3 is annular slab.

In 4th kind of embodiment, the baffle 12 shown in Fig. 3-4 is back-shaped plate.Continuous baffle arrangement compared to Intermittent baffle arrangement, structure is more simple, and installation and removal are more convenient.

In 5th kind of embodiment ,-1, Fig. 4-2 and Fig. 4-3, are installed multiple on the capping 11 referring to Figure 4 together The supporting part 122 of baffle 12, the baffle 12 extends along the radial A of the capping 11.The section of the baffle 12 can be Rectangle or waveform or V-arrangement or U-shaped are trapezoidal etc..Multiple baffles 12 are disposed adjacent, and the baffle 12 can be with interval It is disposed adjacent, can be disposed adjacent without compartment of terrain.The gear 12 and the adjacent baffle 12 and it is located in institute between the two It states capping 11 and forms channel 123, the channel 123 extends along the radial A of the capping 11.It is described in a kind of embodiment Baffle 12 includes the first grade of face 124 and second gear face 125 of intersection, and the of first grade of face of the baffle and the adjacent screen Two grades of faces form channel 123.Multiple baffles 12 can be connected or be not attached to, in the case where being not connected with, described One grade of face, the second gear face of the adjacent screen and part capping between the two form channel 123.First grade of face 124 and Two grades of faces 125 both increase the depositional area of capping and entire capping have been divided into multiple small depositional planes, to reduce deposition Material assembles blocking size, so that the deposition materials fallen in crucible body are the block of small size, to avoid depositing Material covers evaporation source.

In 6th kind of embodiment, also referring to Fig. 5-1 and Fig. 5-2, the capping 11 can be equipped with multiple grooves 13, i.e., Groove 13 is recessed on the capping 11, and the section of the groove 13 can be V-arrangement, U-shaped, trapezoidal etc..The groove 13 is adjacent Setting, and radially extending along the capping 11.The groove 13 can be disposed adjacent with interval, can be without compartment of terrain phase Neighbour's setting.The radial direction of the capping 11 is the direction extended centered on arcwall face center to arcwall face edge.Specifically, capping A groove 13 can be set in 11 radial direction, can also, multiple channel abreasts are set to one radially.This reality It applies in example, a groove 13 is radially arranged in one of capping 11, in order to clear the deposition materials on crucible cover 2.The ditch Slot 13 can increase depositional area of the evaporation source 3 on crucible cover 1, and then reduce deposition thickness, mitigate crucible in unit area Deposition weight on lid 1 is detached from the probability that crucible cover 1 is fallen in crucible body 2 so as to efficiently reduce deposition materials.This Outside, the capping 11 for being originally used for an entirety is divided into multiple regions by multiple grooves 13, i.e., is divided into a big depositional plane Multiple small depositional planes, it is then blocking with smaller size assembly that evaporation material is deposited on smaller depositional plane, and then prevents deposition materials It is fallen off in the form of large scale, and covers in evaporation source 3, hinder evaporation process.

Understandably, the shape of groove 13, distribution, quantity, manufacturing process etc. are not limited in the present embodiment, is only needed Meet and groove 13 is set on capping 11, increase depositional area and large-sized depositional plane is divided into the depositional plane of small size It is required that.

In 7th kind of embodiment ,-1 and Fig. 6-2, the groove 13 can be arcwall face referring to Figure 6 together.The ditch Without crack between slot 13 and the capping 11, convenient for cleaning capping 11 after vapor deposition, and structure is simple, convenient for manufacture.

Present invention also provides a kind of evaporation coating devices, including vapor deposition crucible described in any of the above-described kind of embodiment.

A kind of vapor deposition crucible and evaporation coating device that the application embodiment provides, by being set on the capping 11 of crucible cover 1 Set multiple baffles 12, on the one hand, the structure design of the setting of baffle and upper layer area less than lower layer's area can increase evaporation material 3 Depositional area on capping 11 mitigates the deposition materials weight in unit area, to reduce the deposition materials on capping 11 It falls in crucible body 2, while the evaporation material reflected by capping can be reduced and hinder lower layer's vapor deposition process, improve vapor deposition speed Rate；On the other hand, big depositional plane is divided into multiple small depositional planes by baffle 12, assembles blocking ruler to reduce deposition materials It is very little, so that the deposition materials fallen in crucible body 2 are the block of small size, so that deposition materials be avoided to cover evaporation Source 3, influences evaporation process.In addition, baffle 12 is detachably connected with capping 11, it is convenient for later period cleaning crucible lid 1, reduces crucible cover Remaining evaporation material, increases the service life of crucible cover 1, save the cost on 1.

Although the preferred embodiment is not to limit in conclusion the present invention has been disclosed as a preferred embodiment The present invention, those of ordinary skill in the art can make various changes and profit without departing from the spirit and scope of the present invention Decorations, therefore protection scope of the present invention subjects to the scope of the claims.

The above is a preferred embodiment of the present invention, it is noted that for those skilled in the art For, various improvements and modifications may be made without departing from the principle of the present invention, these improvements and modifications are also considered as Protection scope of the present invention.

Claims (8)

1. a kind of vapor deposition crucible, which is characterized in that including crucible body and crucible cover, the crucible body is for holding evaporation material Material, the crucible cover are set in the crucible body, and separately with the crucible body, the crucible cover has described in The capping of the capping of crucible body, the crucible cover is equipped with multiple baffles being separately arranged, and one end of the baffle is fixed In the crucible cover, the other end extends towards the crucible body, and the baffle and the crucible cover are for carrying the vapor deposition By the evaporation material of thermal evaporation, in the direction of the central area from the capping to neighboring area, the baffle in crucible The development length of the other end towards the crucible body gradually increase.

2. a kind of vapor deposition crucible according to claim 1, which is characterized in that the baffle includes mounting portion and supporting part, The mounting portion is detachably secured to the capping, and in order to dismantle the baffle, the supporting part is towards the crucible sheet Body direction extends, for depositing the evaporation material.

3. a kind of vapor deposition crucible according to claim 2, which is characterized in that the capping is arc-shaped, including center Domain and around the neighboring area of the central area, multiple baffles are set to the neighboring area, and are set to the center The opposite sides in domain.

4. a kind of vapor deposition crucible according to claim 3, which is characterized in that the baffle is fallen into the projection of vertical direction In the crucible body.

5. a kind of vapor deposition crucible according to claim 4, which is characterized in that multiple baffles along the capping diameter To being oppositely arranged, and the supporting part intersects towards the extending direction of the crucible body and the axial direction of the capping；Along institute State the central area of capping to the direction of the neighboring area, extending direction of the supporting part towards the crucible body It is gradually increased with the angle value of the capping axial direction.

6. a kind of vapor deposition crucible according to claim 5, which is characterized in that the baffle is arc panel, and the baffle Supporting part along the circumferentially extending of the capping, the baffle and the radially adjacent baffle and be located between the two The capping formed channel, the channel along the capping circumferentially extending.

7. a kind of vapor deposition crucible according to claim 4, which is characterized in that the supporting part of the baffle is along the capping Radially extend, the baffle and the adjacent baffle and the capping being located between the two form channel, the ditch Road is radially extended along the capping.

8. a kind of evaporation coating device, which is characterized in that including the described in any item vapor deposition crucibles of claim 1-7.