CN108330450A - A kind of vapor deposition crucible and its outlet chip architecture - Google Patents
A kind of vapor deposition crucible and its outlet chip architecture Download PDFInfo
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- CN108330450A CN108330450A CN201810327657.7A CN201810327657A CN108330450A CN 108330450 A CN108330450 A CN 108330450A CN 201810327657 A CN201810327657 A CN 201810327657A CN 108330450 A CN108330450 A CN 108330450A
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- outlet
- piece
- crucible
- outlet piece
- vapor deposition
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses a kind of outlet chip architectures for crucible to be deposited, including：First outlet piece, first outlet piece is annular in shape, the outer ledge of its cyclic structure is the outboard end that can be fastened on the first outlet piece on the crucible internal walls of vapor deposition crucible, and the inside edge of cyclic structure is inner end, and the first outlet on piece is equipped with several first ventholes；Second outlet piece, the second outlet piece are rotatably attached to the first outlet on piece and the inner end of the first outlet piece can be compressed to compression, and the second outlet on piece is equipped with several second ventholes, wherein：External force acts on the inner end Unscrew that the second outlet on piece makes the second outlet piece relative to the first outlet piece.The invention also discloses a kind of vapor deposition crucibles.The vapor deposition crucible and its outlet chip architecture for implementing the present invention, can effectively prevent mouth of pot to be blocked by evaporation material, improve the outlet situation of outlet piece；Structure is simplified, easy to repair and maintenance.
Description
Technical field
The present invention relates to panel vapor deposition processing procedure field more particularly to a kind of vapor deposition crucible and its outlet chip architectures.
Background technology
OLED has self-luminous, frivolous, and contrast is high, it is easy to accomplish is most promising at present the features such as flexibility
Display technology.Vacuum evaporation is the current main stream approach for preparing OLED device, and material is generally seated in the resistance to of metal or ceramics
In the vapor deposition crucible of high temperature, i.e., form a film organic material heating and gasifying and on substrate in vacuum chamber.
The existing outlet piece for crucible to be deposited is typically designed to the metal disk with venthole, the outlet of the structure
Piece is：Since relative distance of the mouth of pot of crucible apart from heating device is deposited farther out, mouth of pot
Neighbouring temperature wants low compared to the temperature of the crucible wall near heating device.In this way, the evaporation material pole of heating sublimation has
It may gradually be deposited near mouth of pot, eventually block mouth of pot, cause crucible that can not be continuing with.
Invention content
Technical problem to be solved by the present invention lies in, a kind of vapor deposition crucible and its outlet chip architecture are provided, it can be effective
It prevents mouth of pot from being blocked by evaporation material, improves the outlet situation of outlet piece；Structure is simplified, easy to repair and maintenance.
In order to solve the above technical problem, the present invention provides a kind of outlet chip architectures for crucible to be deposited, including：The
One outlet piece, the first outlet piece is annular in shape, and the outer ledge of cyclic structure is that can the first outlet piece be fastened on vapor deposition earthenware
The inside edge of outboard end on the crucible internal walls of crucible, cyclic structure is inner end, and the first outlet on piece is equipped with several first
Venthole；Second outlet piece, the second outlet piece are rotatably attached to the first outlet on piece and can will be in the first outlet pieces
Side compresses compression, and the second outlet on piece is equipped with several second ventholes, wherein：External force, which acts on the second outlet on piece, makes second
Inner end Unscrew of the outlet piece relative to the first outlet piece.
Wherein, the first outlet piece is disc-shaped in annular shape, the second outlet piece, and the second outlet piece is rotatable to be docked at the
On the inner end of one outlet piece.
Wherein, hinged by hinge between the second outlet piece and the first outlet piece.
Wherein, hinge is the shaft equipped with resetting spring, and the elastic force of resetting spring makes the second outlet piece and the first outlet piece
Inner end slitless connection；When the buildup of material that mouth of pot nearby deposits is to constant weight, the elastic force of resetting spring will be overcome to make
Inner end Unscrew of the second outlet piece relative to the first outlet piece.
Wherein, the first outlet piece is set as curved-surface structure, and certain angle is equipped between the plane where the second outlet piece
Degree.
Wherein, the first outlet piece and the second outlet piece are made of metal material respectively.
In order to solve the above technical problems, the invention also discloses a kind of vapor deposition crucibles, including：Crucible body, crucible body
With mouth of pot；What is be arranged outside crucible body is located at the heating dress of evaporation material inside crucible body to heating sublimation
It sets；And the outlet piece being arranged in crucible body, the above-mentioned outlet chip architecture for crucible to be deposited of outlet piece.
Wherein, heating devices heat is located at the evaporation material inside crucible body, and the evaporation material after distillation goes out through first
It is sprayed by mouth of pot after first venthole of gas on piece and the second venthole of the second outlet on piece.
Wherein, the outboard end of the first outlet piece is fastened on the crucible internal walls near mouth of pot.
Implement vapor deposition crucible provided by the present invention and its outlet chip architecture, has the advantages that：Second outlet piece
It is rotatably attached to the first outlet on piece and the inner end of the first outlet piece can be compressed to compression, the second outlet on piece is equipped with
Several second ventholes, wherein：External force acts on the inside that the second outlet on piece makes the second outlet piece relative to the first outlet piece
Hold Unscrew.When the buildup of material that mouth of pot nearby deposits is to constant weight, the elastic force of resetting spring will be overcome to make second
Inner end Unscrew of the outlet piece relative to the first outlet piece, the material of mouth of pot can fall go back to the bottom of crucible body, can
It effectively prevent mouth of pot to be blocked by evaporation material, improves the outlet situation of outlet piece；Structure is simplified, easy to repair and maintenance.
Description of the drawings
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technology description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this
Some embodiments of invention for those of ordinary skill in the art without creative efforts, can be with
Obtain other attached drawings according to these attached drawings.
Fig. 1 is that the mouth of pot of vapor deposition crucible of the embodiment of the present invention nearby deposits the structural schematic diagram of evaporation material.
Fig. 2 is the structure that the evaporation material that the embodiment of the present invention is deposited near the mouth of pot of crucible falls go back to crucible body bottom
Schematic diagram.
Specific implementation mode
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation describes, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, those of ordinary skill in the art are obtained every other without creative efforts
Embodiment shall fall within the protection scope of the present invention.
As shown in Figure 1, for the embodiment one of present invention vapor deposition crucible.
Vapor deposition crucible in the present embodiment includes：Crucible body 1, crucible body 1 have mouth of pot 11；It is arranged in crucible sheet
The heating device 2 that 1 inside evaporation material 12 of crucible body is located to heating sublimation outside body 1；And it is arranged in crucible sheet
Outlet piece 3 in body 1.
In the present embodiment, crucible body 1 is made of metal material or ceramic material, cylindrical.The setting of mouth of pot 11 exists
The side open end of crucible body 1, evaporation material 12 are housed in the bottom of crucible body 1, and heating device 2 is circumferentially positioned at crucible
The outside of ontology 1 can heat crucible body 1.Wherein：Heating device 2 heats the steaming being located inside crucible body 1
Material 12 is plated, the evaporation material 12 after distillation is sprayed through mouth of pot 11, and the air-flow after ejection can form a film on substrate, to complete
At vacuum evaporation process.
Further, outlet piece 3 is fastened on the crucible internal walls T near mouth of pot 11.Outlet piece 3 in the present embodiment wraps
It includes：First outlet piece 31 and the second outlet piece 32.
First outlet piece 31 is annular in shape, and the outer ledge of cyclic structure is that can the first outlet piece 31 be fastened on vapor deposition
The inside edge of outboard end 31a on the crucible internal walls T of crucible, cyclic structure are inner end 31b, are set on the first outlet piece 31
There are several first ventholes 311.
Second outlet piece 32 is rotatably attached on the first outlet piece 31 and can be by the inner end of the first outlet piece 31
Compression is compressed, the second outlet piece 32 is disc-shaped, the 32 rotatable inner end for being docked at the first outlet piece 31 of the second outlet piece
On 31b.Second outlet piece 32 is equipped with several second ventholes 321, and the first outlet piece 31 and the second outlet piece 32 are respectively by gold
Belong to material to be made.Wherein：The outboard end 31a of first outlet piece 31 is fastened on the crucible internal walls T near mouth of pot 11, outer masterpiece
With making inner end 31b Unscrew of the second outlet piece 32 relative to the first outlet piece 31 on the second outlet piece 32.
When it is implemented, the evaporation material 12 after distillation goes out through the first venthole 311 and second on the first outlet piece 31
It is sprayed by mouth of pot 11 after the second venthole 321 on gas piece 32, the air-flow after ejection forms a film on substrate.
Further, hinged by hinge 33 between the second outlet piece 32 and the first outlet piece 31.Wherein, hinge 33 is to set
There are the shaft of resetting spring, the elastic force of resetting spring to keep the inner end 31b of the second outlet piece 32 and the first outlet piece 31 seamless right
It connects, in other embodiment, needs the second outlet piece 32 that can cover the inner end 31b of the first outlet piece 31.Such as
This will overcome the elastic force of resetting spring to make the second outlet piece when the buildup of material that mouth of pot 11 nearby deposits is to constant weight
The 32 inner end Unscrew relative to the first outlet piece 31.
Preferably, the first outlet piece 31 is set as curved-surface structure, and one is equipped between the plane where the second outlet piece 32
Fixed angle.It so, it is possible to reduce deposition of the evaporation material near mouth of pot 11.
Implement vapor deposition crucible provided by the present invention and its outlet chip architecture in the specific implementation, the spring rotary shaft of hinge 33
Elastic force by the second outlet piece 32 and the first outlet piece 31 lid be combined；Several first ventholes 311 of first outlet piece 31
Several second ventholes 321 with the second outlet piece 32 are to outlet；When the elastic force of the spring rotary shaft of selection is suitable, evaporation material
When mouth of pot 11 accumulates to a certain extent, the gravity of deposition materials can make the second outlet piece 32 relative to the first outlet
The inner end 31b Unscrews of piece 31, the bottom of crucible body 1, outlet will be fallen back by being deposited on the evaporation material of mouth of pot 11
Second outlet piece 32 of piece merges to cover with the first outlet piece 31 again under the effect of spring force and close, which can effectively change
Kind deposition materials block the situation of venthole.
Implement vapor deposition crucible provided by the present invention and its outlet chip architecture, has the advantages that：Second outlet piece
It is rotatably attached to the first outlet on piece and the inner end of the first outlet piece can be compressed to compression, the second outlet on piece is equipped with
Several second ventholes, wherein：External force acts on the inside that the second outlet on piece makes the second outlet piece relative to the first outlet piece
Hold Unscrew.When the buildup of material that mouth of pot nearby deposits is to constant weight, the elastic force of resetting spring will be overcome to make second
Inner end Unscrew of the outlet piece relative to the first outlet piece, the material of mouth of pot can fall go back to the bottom of crucible body, can
It effectively prevent mouth of pot to be blocked by evaporation material, improves the outlet situation of outlet piece；Structure is simplified, easy to repair and maintenance.
Claims (9)
1. a kind of outlet chip architecture for crucible to be deposited, which is characterized in that including：
First outlet piece, the first outlet piece is annular in shape, and the outer ledge of cyclic structure is can be tight by the first outlet piece
Gu the inside edge of the outboard end on the crucible internal walls of vapor deposition crucible, cyclic structure is inner end, the first outlet piece
It is equipped with several first ventholes；
Second outlet piece, the second outlet piece are rotatably attached to the first outlet on piece and can go out described first
The inner end of gas piece compresses compression, and the second outlet on piece is equipped with several second ventholes, wherein：
External force acts on the inside that the second outlet on piece makes the second outlet piece relative to the first outlet piece
Hold Unscrew.
2. the outlet chip architecture as described in claim 1 for crucible to be deposited, which is characterized in that the first outlet piece is in circle
Ring-type, the second outlet piece are disc-shaped, and the second outlet piece is rotatable to be docked at the described of the first outlet piece
On inner end.
3. the outlet chip architecture as claimed in claim 2 for crucible to be deposited, which is characterized in that the second outlet piece and institute
It states hinged by hinge between the first outlet piece.
4. the outlet chip architecture as claimed in claim 3 for crucible to be deposited, which is characterized in that the hinge is equipped with reset
The elastic force of the shaft of spring, resetting spring keeps the inner end of the second outlet piece and the first outlet piece seamless right
It connects；
When the buildup of material that mouth of pot nearby deposits is to constant weight, the elastic force of resetting spring will be overcome to make the second outlet piece
The inner end Unscrew relative to the first outlet piece.
5. the outlet chip architecture as claimed in claim 2 for crucible to be deposited, which is characterized in that the first outlet piece is set as
Certain angle is equipped between plane where curved-surface structure, with the second outlet piece.
6. the outlet chip architecture as described in claim 1 for crucible to be deposited, which is characterized in that the first outlet piece and institute
The second outlet piece is stated to be made of metal material respectively.
7. a kind of vapor deposition crucible, which is characterized in that including：
Crucible body, the crucible body have mouth of pot；
What is be arranged outside the crucible body is located at the heating dress of evaporation material inside the crucible body to heating sublimation
It sets；And
The outlet piece being arranged in the crucible body, the outlet piece are claim 1-6 any one of them for being deposited
The outlet chip architecture of crucible.
8. vapor deposition crucible as claimed in claim 7, which is characterized in that the heating devices heat is located in the crucible body
The evaporation material in portion, first venthole and second outlet of the evaporation material through the first outlet on piece after distillation
It is sprayed by the mouth of pot after second venthole of on piece.
9. vapor deposition crucible as claimed in claim 8, which is characterized in that the outboard end of the first outlet piece is fastened on institute
It states on the crucible internal walls near mouth of pot.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810327657.7A CN108330450B (en) | 2018-04-12 | 2018-04-12 | Evaporation crucible and air outlet sheet structure thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810327657.7A CN108330450B (en) | 2018-04-12 | 2018-04-12 | Evaporation crucible and air outlet sheet structure thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108330450A true CN108330450A (en) | 2018-07-27 |
| CN108330450B CN108330450B (en) | 2020-01-10 |
Family
ID=62933170
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810327657.7A Active CN108330450B (en) | 2018-04-12 | 2018-04-12 | Evaporation crucible and air outlet sheet structure thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108330450B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113445006A (en) * | 2020-04-09 | 2021-09-28 | 重庆康佳光电技术研究院有限公司 | Evaporation lining pot |
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| US20100139564A1 (en) * | 2008-12-10 | 2010-06-10 | Samsung Mobile Co., Ltd. | Evaporation source |
| CN205774774U (en) * | 2016-06-22 | 2016-12-07 | 合肥鑫晟光电科技有限公司 | A kind of evaporation coating device |
| CN106868455A (en) * | 2017-03-17 | 2017-06-20 | 武汉华星光电技术有限公司 | Evaporation crucible and evaporation coating device |
| CN206570396U (en) * | 2017-04-01 | 2017-10-20 | 京东方科技集团股份有限公司 | A kind of crucible |
| CN107287561A (en) * | 2017-05-22 | 2017-10-24 | 茆胜 | Prevent the crucible blocked |
| CN107604317A (en) * | 2017-09-21 | 2018-01-19 | 武汉华星光电半导体显示技术有限公司 | One kind evaporation crucible and evaporation coating device |
| CN107815648A (en) * | 2017-09-26 | 2018-03-20 | 上海升翕光电科技有限公司 | A kind of linear evaporation source device and evaporated device |
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2018
- 2018-04-12 CN CN201810327657.7A patent/CN108330450B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20100139564A1 (en) * | 2008-12-10 | 2010-06-10 | Samsung Mobile Co., Ltd. | Evaporation source |
| CN205774774U (en) * | 2016-06-22 | 2016-12-07 | 合肥鑫晟光电科技有限公司 | A kind of evaporation coating device |
| CN106868455A (en) * | 2017-03-17 | 2017-06-20 | 武汉华星光电技术有限公司 | Evaporation crucible and evaporation coating device |
| CN206570396U (en) * | 2017-04-01 | 2017-10-20 | 京东方科技集团股份有限公司 | A kind of crucible |
| CN107287561A (en) * | 2017-05-22 | 2017-10-24 | 茆胜 | Prevent the crucible blocked |
| CN107604317A (en) * | 2017-09-21 | 2018-01-19 | 武汉华星光电半导体显示技术有限公司 | One kind evaporation crucible and evaporation coating device |
| CN107815648A (en) * | 2017-09-26 | 2018-03-20 | 上海升翕光电科技有限公司 | A kind of linear evaporation source device and evaporated device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113445006A (en) * | 2020-04-09 | 2021-09-28 | 重庆康佳光电技术研究院有限公司 | Evaporation lining pot |
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| Publication number | Publication date |
|---|---|
| CN108330450B (en) | 2020-01-10 |
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