CN106851954B - A kind of method of atmospheric dielectric barrier discharge cold-plasma jet to metal surface properties modification - Google Patents
A kind of method of atmospheric dielectric barrier discharge cold-plasma jet to metal surface properties modification Download PDFInfo
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- CN106851954B CN106851954B CN201710079485.1A CN201710079485A CN106851954B CN 106851954 B CN106851954 B CN 106851954B CN 201710079485 A CN201710079485 A CN 201710079485A CN 106851954 B CN106851954 B CN 106851954B
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
- C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F4/00—Processes for removing metallic material from surfaces, not provided for in group C23F1/00 or C23F3/00
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Abstract
The present invention provides a kind of atmospheric dielectric barrier discharge cold-plasma jets to the method for metal surface properties modification, belongs to technical field of material surface treatment.This method passes through dielectric barrier discharge under atmospheric pressure, generates a large amount of active particle and metal material surface interaction, the physical and chemical reactions such as oxidation, etching, crosslinking occurs, to metal surface modification.Wherein, cold-plasma jet is generated by the cold plasma fluid generator that discharge type is dielectric barrier discharge.When discharge voltage is lower, cold-plasma jet can be modified to the quick lyophily of metal material surface, and does not change surface texture；When discharge voltage is higher, jet stream can be modified simultaneously quick, change surface microstructure, so that lyophily modified effect be made to keep for a long time.This method treatment effeciency is high, and is not necessarily to vacuum equipment, at low cost, and easy to operate flexible, no pollution to the environment is a kind of novel green surface modifying method.
Description
Technical field
Cold-plasma jet is generated to metal material surface using atmospheric dielectric barrier discharge the present invention relates to a kind of
The method of processing, belongs to technical field of material surface treatment.
Background technique
With manufacturing fast development, the application field of metal material is more and more wider, and different application fields is to material
Surface property have corresponding different require.Wetability is one of key property of metal material, right according to different application
The wetability Reasonable Regulation And Control of metal material surface has more important meaning.Currently, mainly having to the method for material surface modifying wet
Chemical method, ultraviolet irradiation method, Low Temperature Plasma Treating method, laser treatment, photoetching etc..Wherein, low-temperature plasma modified
With higher modification efficiency, and it is smaller to material surface damage, there is preferable researching value and application prospect.Publication No.
The patent of invention of CN1526753A, CN1900408A, CN202318981U are each provided with using plasma to material carry out table
The modified device and method in face.But these device or method are all made of low pressure plasma, and the vacuum of complex and expensive is needed to set
It is standby, and the size of processed material is limited by vacuum chamber, causes treatment effeciency lower, higher cost.In recent years, using being not necessarily to
Vacuum, atmospheric pressure plasma at low cost have obtained the attention of vast researcher, such as patent to material surface modifying
CN102259364A, CN202907329U, CN102905455A, CN103194001A etc..But these device and method are needles
It is modified to the surface of the nonmetallic materials such as macromolecule, fail to provide the method for modifying of a kind of pair of metal material.Publication No.
The patent of invention of CN103789716A proposes a kind of side that atmospheric bare electrode cold plasma jet is modified to metal material
Method can produce plasma using the bare electrode electric discharge between pin electrode and injector electrode and form jet stream, to metal material table
Face is modified.But this method can not change surface texture when to material surface modifying, lead to the profit of modified material surface
Moist be fast quick-recovery due to the reaction such as De contamination and dissociation in a short time.In addition, this method is provided only to super-hydrophobic
The method of modifying of material and hydrophobic material, is not able to achieve the modification to superoleophobic material, and hardly possible preparation can be used for organic liquid drop control
The devices such as micro-fluidic chip.The gas that this method uses also has certain limitation, only uses nitrogen, oxygen and air
Isoreactivity gas can not generate plasma jet as working gas, using non-active gas (such as helium, argon gas) etc., lead
It causes jet stream process range wider, is not easy to accurately handle material regional area.
Summary of the invention
The present invention provides a kind of pair of metal materials to carry out the modified method in surface, can mention in the short time under atmospheric pressure
The surface property of highly metallic material improves the hydrophily and lipophilicity of material surface.
A kind of method of atmospheric dielectric barrier discharge cold-plasma jet to metal surface properties modification, this method institute
Device is dielectric barrier discharge jet flow generating apparatus, including working gas source 1, gas pressure reducer 2, gas
Mass flow controller 3, cold plasma fluid generator 4, the high-field electrode 5 being wrapped on cold plasma fluid generator
With low temperature plasma high voltage power supply 6；
The material of cold plasma fluid generator 4 is tubular dielectric medium, is cased with high-field electrode 5 thereon；High-field electrode 5
It is connected with the high-voltage output end of low temperature plasma high voltage power supply 6, the low-voltage output and ground of low temperature plasma high voltage power supply 6
It is connected；Working gas is passed through cold plasma by gas pressure reducer 2 and gas mass flow controller 3 by working gas source 1
Fluidic generator 4；Cold plasma fluid generator 4 is fixed on bracket, metal material 8 to be processed is lain in a horizontal plane in
The underface of the jet exit of cold plasma fluid generator 4；Open gas pressure reducer 2, adjustment gas mass flow control
Device 3 enters working gas in cold plasma fluid generator 4 with suitable flow；High voltage power supply 6 is opened, is gradually increased
Output voltage, until the outlet of cold plasma fluid generator 4 generates stable dielectric barrier discharge jet stream
7；The distance between cold-plasma jet generating device 4 and metal material 8 are adjusted, dielectric barrier discharge is penetrated
Stream 7 and metal material 8 come into full contact with, and form the modified jet stream processing region 9 in surface.
Gas is mixed for one or more of helium, argon gas, nitrogen, air, oxygen in the working gas source 1
It closes；
The distance between the outlet of cold plasma fluid generator 4 and metal material 8 to be processed are adjusted to 2mm-
30mm；
The high voltage power supply 6 is the pulse power, output frequency 100Hz-10kHz；It or is low-frequency ac power, output
Frequency is 10kHz-100kHz；It or is radio-frequency power supply, output frequency 1MHz-5GHz；Output voltage is gradually increased to 1kV-
30kV realizes the quick modified of metal material surface and does not change surface texture when the output voltage of high voltage power supply 6 is lower；
When the output voltage of high voltage power supply 6 is higher, to metal material surface, quickly modification changes simultaneously surface texture, to make institute
Lyophily is obtained to keep for a long time.
The tubular dielectric medium is quartz glass, ceramics (aluminium oxide or zirconium oxide), PTFE (polytetrafluoroethylene (PTFE)), PI
(polyimides) and aluminium oxide ceramics, PMMA (polymethyl methacrylate), PC (polycarbonate), PEEK (polyether-ether-ketone), TPU
(thermoplastic polyurethane elastomer rubber), POM (polyformaldehyde), PET (polyethylene terephthalate), FEP (ethylene fluoride third
Alkene copolymer), PFA (perfluoro propyl perfluoroalkyl vinyl ether and teflon-copolymers), ETFE (ethylene-tetrafluoroethylene copolymerization
Object) or PVDF (Kynoar).
Metal material surface is hit by active particles various in cold-plasma jet, to interrupt material surface molecules
Between chemical bond, generate macromolecular radical, make material surface have reactivity.Cold-plasma jet is by discharge type
It is generated for the cold plasma fluid generator of dielectric barrier discharge, the jet stream generated by Reasonable Regulation And Control discharge voltage, electrode
Material surface can be quickly modified without injured surface structure, or material surface is quickly modified while generating ablation, caused micro-
It sees structure to change, and realizes that the lyophily that can be kept for a long time is modified.The working gas for generating cold-plasma jet is optional
Select the gaseous mixture of several gases in the non-active gas such as helium, argon gas or nitrogen, oxygen isoreactivity gas and above-mentioned gas.
Cold-plasma jet end is contacted with processed metal material surface, and jet stream acts perpendicularly to metal to be treated material table
Face.
After working gas is passed through cold plasma fluid generator and applies certain voltage, the chamber of tubular dielectric medium
The interior jet stream that can generate elongate stabilization, with the raising of voltage, jet stream is progressively longer and acts on metal to be treated material surface.
Beneficial effects of the present invention:
1., can be by dielectric barrier discharge, under atmospheric pressure by parameters such as Reasonable Regulation And Control discharge voltage, gas flows
Obtain that temperature is lower and the higher cold-plasma jet of active particle concentration.When voltage is lower, only material quickly can be changed
Property without change surface texture；When voltage is higher, it can be modified while surface texture is destroyed by corrasion, obtain to grow
The lyophilic surface that Kubo is held；According to different application needs, discharge voltage can be reasonably selected, surface is quickly modified, obtained
It can fast quick-recovery or the lyophily that keeps for a long time.
It is superoleophobic-super oleophylic patterned surface, organic drop 2. this method can realize the quick modification on superoleophobic surface
The preparation of control device, Microfluid based Lab on a chip etc. provide technical foundation.
3. the working gas that this method generates jet stream can change compared with active gases for non-active gas such as helium, argon gas
Property region more concentrate, it is easier to realize that accurate, controllable surface is modified.
4. this method is without complicated vacuum equipment, easy to operate, modification efficiency is higher, and cost is relatively low, the jet stream of generation
It not can cause environmental pollution.
Detailed description of the invention
Fig. 1 is schematic device of the atmospheric dielectric barrier discharge cold-plasma jet to metal surface properties modification.
Fig. 2 is to connect with oil the atmospheric dielectric barrier discharge cold-plasma jet modified superoleophobic aluminum flake surface processing time
Relational graph between feeler.
Fig. 3 is the surface microscopic topographic of untreated superoleophobic aluminium flake.
Fig. 4 is the superoleophobic aluminium flake after gained dielectric barrier discharge jet stream processing under 20kV output voltage
Surface microscopic topographic.
Fig. 5 is the superoleophobic aluminium flake after gained dielectric barrier discharge jet stream processing under 30kV output voltage
Surface microscopic topographic.
Fig. 6 is the superoleophobic aluminium flake after gained dielectric barrier discharge jet stream processing under 30kV output voltage
Contact angle with standing time variation diagram.
Fig. 7 (a) is the contact angle of atmospheric dielectric barrier discharge cold-plasma jet super-hydrophobic aluminum flake surface before modified
Photo.
Fig. 7 (b) is the contact angle of the modified super-hydrophobic aluminum flake surface of atmospheric dielectric barrier discharge cold-plasma jet
Photo.
Fig. 8 (a) be atmospheric dielectric barrier discharge cold-plasma jet before modified hydrophobic aluminum flake surface contact angle shine
Piece.
Fig. 8 (b) is that the contact angle of the modified hydrophobic aluminum flake surface of atmospheric dielectric barrier discharge cold-plasma jet shines
Piece.
In figure: 1 working gas source；2 gas pressure reducers；3 gas mass flow controllers；4 cold-plasma jets occur
Device；5 high-field electrodes；6 low temperature plasma high voltage power supplies；7 dielectric barrier discharge jet streams；8 metal materials；9 penetrate
Stream process region.
Specific embodiment
The present invention is described in further detail with reference to the accompanying drawings and examples.
The present invention relates to a kind of surface modifying method of metal material under atmospheric pressure, the equipment using the method be it is cold it is equal from
Daughter jet flow generating apparatus.
Dielectric barrier discharge jet flow generating apparatus includes working gas source 1, gas pressure reducer 2, gas matter
Measure flow controller 3, cold plasma fluid generator 4, the electrode 5 being wrapped on cold plasma fluid generator, low temperature
Plasma high voltage power supply 6.
Before carrying out metal surface properties modification, be separately connected these equipment according to attached drawing: cold-plasma jet occurs
High-field electrode 5 on device 4 is connected with the high-voltage output end of low temperature plasma high voltage power supply 6, the low-voltage output of high voltage power supply 6
It is connected to the ground；Working gas by working gas source 1 by gas pressure reducer 2 and gas mass flow controller 3 be passed through it is cold etc. from
Daughter fluidic generator 4；Cold plasma fluid generator 4 is fixed on bracket, 8 level of metal material to be processed is put
It sets in the underface of jet exit.Gas pressure reducer 2 is opened, gas mass flow controller 3 is adjusted, makes working gas with suitable
Flow enter in cold plasma fluid generator 4；High voltage power supply 6 is opened, output voltage is gradually increased, until cold plasma
The outlet of body fluidic generator 4 generates stable dielectric barrier discharge jet stream 7；Adjust cold-plasma jet hair
The distance between generating apparatus 4 and metal material 8 connect dielectric barrier discharge jet stream 7 and metal material 8 sufficiently
Touching forms surface modification treatment range 9.
Embodiment 1
Surface is carried out to superoleophobic aluminium flake using atmospheric dielectric barrier discharge cold-plasma jet to be modified, it can be significant
Improve its surface energy and wetability, realizes the superoleophobic conversion to super oleophylic.When voltage is lower, its surface knot will not be changed
Structure.
Cold plasma fluid generator 4 is wrapped on 4 using the quartz glass tube to insulate, high-field electrode 5.High voltage power supply
6 use AC power source of sine wave, 30~100kHz of output frequency, 0~30kV of output voltage；The high-voltage output end of high voltage power supply 6
It is connected with the high-field electrode 5 on cold plasma fluid generator 4, low-voltage output ground connection.Gas is height in working gas source 1
Pure helium.After connecting equipment, by the outlet of cold plasma fluid generator 4, (oily contact angle is 155 ° with metal to be treated material 8
Aluminium base super hydrophobic surface) the distance between be adjusted to 20mm.Open air supply processing equipment 2, adjustment gas mass flow control
Device 3, makes helium gas flow reach 3SLM；High voltage power supply 6 is opened, adjustment output frequency is 56kHz, is gradually increased output voltage extremely
20kV has uniform dielectric barrier discharge jet stream 7 to generate and acts on superoleophobic 8 surface of aluminium, at this time to its table
Face is modified.Fig. 2 show superoleophobic aluminium surface oil contact angle processed with the change of atmosphere cold plasma processing time
Change relationship, testing oil droplet used in contact angle is hexadecane.As can be seen that with the increase of processing time, the oily contact angle on surface
It declines to a great extent, after handling 15s, for oily contact angle less than 10 °, the superoleophobic surface of aluminium is modified as super oil-wetted surface.Fig. 3 is place
Superoleophobic aluminum flake surface microscopic appearance before reason, Fig. 4 are through gained dielectric barrier discharge under 20kV output voltage
Jet stream treated superoleophobic aluminum flake surface microscopic appearance, it can be seen that after treatment, the microstructure on superoleophobic surface is not sent out
Raw significant change.
Embodiment 2
Surface is carried out to superoleophobic aluminium flake using atmospheric dielectric barrier discharge cold-plasma jet to be modified, and is realized super thin
Oil arrives the conversion of super oleophylic.When voltage is higher, its surface texture can be changed, realize that permanent lyophily is modified.
Cold plasma fluid generator 4 is managed using the PTFE (polytetrafluoroethylene (PTFE)) of insulation, using described in specific embodiment 1
High voltage power supply, fluidic generator is identical as specific embodiment 1 as the connection type of high voltage power supply.Air supply processing equipment 2 is opened,
Gas mass flow controller 3 is adjusted, helium gas flow is made to reach 3SLM；High voltage power supply 6 is opened, adjustment output frequency is 56kHz,
Output voltage is gradually increased to 30kV, dielectric barrier discharge jet stream 7 acts on superoleophobic 8 surface of aluminium flake at this time,
Its surface is modified.Modification efficiency is close with specific embodiment 1 at this time, but can change aluminum flake surface pattern simultaneously.Fig. 5 is
It is right through treated the superoleophobic aluminum flake surface microscopic appearance of gained dielectric barrier discharge cold plasma jet under 30kV output voltage
Than Fig. 3 and Fig. 5 it is found that significant change has occurred in the microstructure on superoleophobic surface after high voltage processing.The variation of structure
Modified effect is set to keep for a long time, as shown in fig. 6, aluminium flake is still in lipophilic state after placing 30 days.
Embodiment 3
Surface is carried out to super-hydrophobic aluminium flake using atmospheric dielectric barrier discharge cold-plasma jet to be modified, it can be in short-term
It is interior to significantly improve its surface energy and wetability, it realizes super-hydrophobic to super hydrophilic rapid conversion.
Cold plasma fluid generator 4 is using the alumina ceramic tube to insulate, high voltage power supply and its and fluidic generator
Connection type it is identical with specific embodiment 1, operating procedure and method are also identical.As shown in fig. 7, Super-hydrophobic aluminium table before handling
The water contact angle in face is about 157 °, and after 1s processing, contact angle becomes 20 °, is in hydrophily.After handling 3s, contact angle
It is 0 °.It can be seen that the method for modifying can realize the quick modification of super-hydrophobic aluminium flake.
Embodiment 4
Surface is carried out to hydrophobic aluminium flake using atmospheric dielectric barrier discharge cold-plasma jet to be modified, it can be with the short time
Its surface energy and wetability are inside significantly improved, is realized hydrophobic to super hydrophilic conversion.
Cold plasma fluid generator 4 is managed using the PVDF (Kynoar) of insulation, high voltage power supply and its and jet stream
The connection type of generator is identical with specific embodiment 1, and operating procedure and method are also identical.As shown in figure 8, hydrophobic before processing
The contact angle of aluminium surface is about 115 °, and after 1s processing, contact angle becomes 24 °, is in hydrophily.After handling 3s, contact
Angle is 0 °.Therefore, which can realize the quick modification of hydrophobic aluminium flake.
Claims (2)
1. a kind of atmospheric dielectric barrier discharge cold-plasma jet is to the method for metal surface properties modification, used in this method
Device be dielectric barrier discharge jet flow generating apparatus, including working gas source (1), gas pressure reducer (2), gas
It weight flow controller (3), height cold plasma fluid generator (4), be wrapped on cold plasma fluid generator
Piezoelectricity pole (5) and low temperature plasma high voltage power supply (6)；It is characterized in that,
The material of cold plasma fluid generator (4) is tubular dielectric medium, is cased with high-field electrode (5) thereon；High-field electrode
(5) it is connected with the high-voltage output end of low temperature plasma high voltage power supply (6), the low pressure of low temperature plasma high voltage power supply (6) is defeated
Outlet is connected to the ground；Working gas passes through gas pressure reducer (2) and gas mass flow controller (3) by working gas source (1)
It is passed through cold plasma fluid generator (4)；Cold plasma fluid generator (4) is fixed on bracket, it will be to be processed
Metal material (8) lies in a horizontal plane in the underface of the jet exit of cold plasma fluid generator (4)；Open gas pressure reducer
(2), gas mass flow controller (3) are adjusted, working gas is made to enter cold plasma fluid generator with suitable flow
(4) in；It opens high voltage power supply (6), output voltage is gradually increased, until the outlet of cold plasma fluid generator (4) generates
Stable dielectric barrier discharge jet stream (7)；Adjust cold-plasma jet generating device (4) and metal material
The distance between (8), dielectric barrier discharge jet stream (7) and metal material (8) are come into full contact with, surface is formed and changes
Property jet stream processing region (9)；
Gas is mixed for one or more of helium, argon gas, nitrogen, air, oxygen in the working gas source (1)
It closes；
The distance between cold plasma fluid generator (4) outlet and metal material to be processed (8) are adjusted to 2mm-
30mm；
The metal material (8) is superoleophobic aluminium flake；
The high voltage power supply (6) is the pulse power, output frequency 100Hz-10kHz；It or is low-frequency ac power, output frequency
Rate is 10kHz-100kHz；It or is radio-frequency power supply, output frequency 1MHz-5GHz；Output voltage is gradually increased to 1kV-30kV,
When the output voltage of high voltage power supply (6) is 20kV, realizes the quick modified of metal material surface and do not change surface texture；When
When the output voltage of high voltage power supply (6) is 30kV, to metal material surface, quickly modification changes simultaneously surface texture, to make
Gained lyophily is kept for a long time.
2. the method according to claim 1, wherein the tubular dielectric medium be quartz glass, ceramics,
PTFE, PI, PMMA, PC, PEEK, TPU, POM, PET, FEP, PFA, ETFE or PVDF.
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| CN107511314A (en) * | 2017-08-10 | 2017-12-26 | 合肥市田源精铸有限公司 | A kind of processing method of high strength cold rolled steel plate |
| CN109049659A (en) * | 2018-06-28 | 2018-12-21 | 苏州大学 | The method of plasma processing of tubular medical inner surface |
| CN110493946A (en) * | 2019-09-23 | 2019-11-22 | 大连理工大学 | A kind of device that large area jet stream discharge plasma resin sorbent surface is modified |
| CN110983219A (en) * | 2019-12-23 | 2020-04-10 | 河海大学常州校区 | Preparation method of dendritic noble metal surface material |
| CN111921007A (en) * | 2020-07-23 | 2020-11-13 | 北京大学第三医院（北京大学第三临床医学院） | Surface modified zirconia material with long-acting antibacterial effect and preparation method and application thereof |
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| CN102946685B (en) * | 2012-10-15 | 2016-01-20 | 中国科学院西安光学精密机械研究所 | Atmospheric pressure induced air dielectric barrier discharge low-temperature plasma generating means |
| US20160220670A1 (en) * | 2013-12-04 | 2016-08-04 | EP Technologies LLC | Boosting the efficacy of dna-based vaccines with non-thermal dbd plasma |
| CN103789716B (en) * | 2014-01-19 | 2015-10-28 | 大连理工大学 | A kind of atmosphere cold plasma jet is to the method for metal surface properties modification |
| CN204231738U (en) * | 2014-10-27 | 2015-03-25 | 核工业西南物理研究院 | Atmospheric low-temperature plasma glycerol polymerization continuous-flow type powder body material reforming apparatus |
| CN105670024B (en) * | 2016-01-28 | 2018-09-04 | 大连理工大学 | A method of surface modification is carried out to pipe inside and outside wall using atmospheric pressure plasma |
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