CN106772732A - A kind of diffraction grating - Google Patents
A kind of diffraction grating Download PDFInfo
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- CN106772732A CN106772732A CN201611184566.XA CN201611184566A CN106772732A CN 106772732 A CN106772732 A CN 106772732A CN 201611184566 A CN201611184566 A CN 201611184566A CN 106772732 A CN106772732 A CN 106772732A
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- circular hole
- diffraction grating
- printing opacity
- thin film
- cage
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1838—Diffraction gratings for use with ultraviolet radiation or X-rays
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
Abstract
The invention provides a kind of diffraction grating, the diffraction grating includes：Impermeable optical thin film and the N number of printing opacity circular hole being opened on the impermeable optical thin film；N is the positive integer more than 100；Wherein, N number of printing opacity circular hole is distributed on the impermeable optical thin film with default probability density, in accurate tiltedly cage；And there is default ratio between the size of the printing opacity circular hole and the accurate tiltedly cycle of cage；In this way, N number of printing opacity circular hole, and loophole are distributed on light transmission film 1 being distributed in accurate tiltedly cage with certain probability density, therefore, it is possible to completely inhibit 2,3,4 order diffractions, resolution ratio is improved, and then ensure precision of analysis, improve and take the photograph spectrum precision；Also, the grating can realize self-supporting, therefore can eliminate the loss that backing tape is come；Further, since the optical grating construction is made up of circular hole, and the distance between adjacent circular holes are larger, so easy to process.
Description
Technical field
The invention belongs to optical technical field, more particularly to a kind of diffraction grating.
Background technology
It is well known that almost all of material even air can absorb 10 nanometers to 121 nanometers of extreme UV
Light, abbreviation extreme ultraviolet, therefore in this wave band, it is impossible to Beam Control is carried out using general lens optical system, but is adopted
The Beam Control of extreme ultraviolet is realized with diffraction grating and speculum.
At present, extreme ultraviolet beam splitting system mainly carries out light splitting using diffraction grating.Traditional binary raster spreads out comprising multistage
Penetrate, light splitting under normal circumstances only needs to 1 order diffraction, but in the case of wide spectrum, Advanced Diffraction and 1 order diffraction are produced and overlapped,
Analysis result is upset, the error for being not easy to eliminate is brought, spectrum precision is taken the photograph in restriction, reduces the performance of optical system.Although sine shakes
Amplitude grating only has 0 grade and +/- 1 order diffraction, with preferable diffraction efficiency, but utilizes known materials and existing processing work
Skill, the sinusoidal grating for making extreme ultraviolet waveband is hardly possible.At present it has been reported that x-ray single diffraction order grating, mainly adopt
Single diffraction order is obtained with complicated raster shape.Although the grating of complicated shape can suppress Advanced Diffraction, its structure is difficult
It is to make therefore and unrealistic.
The content of the invention
For the problem that prior art is present, a kind of diffraction grating is the embodiment of the invention provides, for solving existing skill
In art, when extreme UV beam splitting system carries out light splitting, Advanced Diffraction and 1 order diffraction produce overlapping, bring error, cause point
Analysis result is inaccurate, takes the photograph the technical problem of spectrum precision reduction.
The present invention provides a kind of diffraction grating, and the diffraction grating includes：Impermeable optical thin film and it is opened in described light tight
N number of printing opacity circular hole on film；N is the positive integer more than 100, wherein,
N number of printing opacity circular hole is distributed on the impermeable optical thin film with default probability density, in accurate tiltedly cage；And
There is default ratio between the size of the printing opacity circular hole and the accurate tiltedly cycle of cage.
In such scheme, the accurate tiltedly cage cycle along the x-axis direction is 2Pξ, the accurate tiltedly cage is along the y-axis direction
Cycle be Pη；And Pη≥Pξ/2。
In such scheme, the 2Pξ>=λ, the λ are the wavelength of incident light.
In such scheme, the Pη≥λ/2。
In such scheme, the r=0.203Pξ；Wherein, the r is the radius of circular hole.
In such scheme, the probability density that the printing opacity circular hole is distributed on the impermeable optical thin film is according to probability density letter
Number ρ (s)=1/ (2a) determines；Wherein, the s is the printing opacity circular hole centrally along the ξ directions deviation accurate tiltedly cage
Distance, a is the maximum of the distance.
In such scheme, described | s |≤a.
In such scheme, the a=Pξ/4。
In such scheme, the material of the impermeable optical thin film is specifically included：Gold, silver, aluminium, chromium, silicon, silicon nitride or carbonization
Silicon.
In such scheme, the thickness of the impermeable optical thin film is 50~5000nm.
The invention provides a kind of diffraction grating, the diffraction grating includes：Impermeable optical thin film and it is opened in described impermeable
N number of printing opacity circular hole on optical thin film；N is the positive integer more than 100；Wherein, N number of printing opacity circular hole is close with default probability
Spend, be distributed on the impermeable optical thin film in accurate tiltedly cage；And the size of the printing opacity circular hole and the accurate tiltedly cage
There is default ratio between cycle；In this way, N number of printing opacity circular hole is distributed on light transmission film, and loophole is close with certain probability
Degree, therefore, it is possible to completely inhibit 2,3,4 order diffractions, improves resolution ratio, and then ensure analysis result in accurate tiltedly cage distribution
Accuracy, improves and takes the photograph spectrum precision；Also, the grating can realize self-supporting, therefore can eliminate the loss that backing tape is come；Separately
Outward, because the optical grating construction is made up of circular hole, and the distance between adjacent circular holes are larger, so easy to process.
Brief description of the drawings
Fig. 1 is the partial structural diagram of the single diffraction order grating that the embodiment of the present invention one is provided；
Fig. 2 is the far field construction performance plot of the transmission grating that the embodiment of the present invention two is provided；
Fig. 3 is the diffraction characteristic figure in the transmission grating x directions that the embodiment of the present invention two is provided；
Fig. 4 is the diffraction characteristic figure in the transmission grating of the offer of the embodiment of the present invention two x directions expressed in logarithmic.
Specific embodiment
When extreme UV beam splitting system carries out light splitting, in order to suppress Advanced Diffraction, reduce error, spectrum essence is taken the photograph in raising
Degree, the invention provides a kind of diffraction grating, the diffraction grating includes：Impermeable optical thin film and it is opened in the impermeable optical thin film
On N number of printing opacity circular hole；N is the positive integer more than 100；Wherein, N number of printing opacity circular hole is with default probability density, in standard
Oblique cage is distributed on the impermeable optical thin film；And between the size of the printing opacity circular hole and the accurate tiltedly cycle of cage
With default ratio.
Technical scheme is described in further detail below by drawings and the specific embodiments.
Embodiment one
The present embodiment provides a kind of diffraction grating, as shown in figure 1, the diffraction grating includes：Impermeable optical thin film 1 and open up
N number of printing opacity circular hole 2 on the impermeable optical thin film；N is the positive integer more than 100；Wherein, N number of printing opacity circular hole 2 is with pre-
If probability density, be distributed on the impermeable optical thin film in accurate tiltedly cage；And the size of the printing opacity circular hole 2 and the standard
There is default ratio between the cycle of oblique cage；Wherein, the oblique cage is specifically included：Square lattice, rectangular grid,
Triangular lattice, intentionally rectangular grid and common oblique cage.In the present embodiment, accurate tiltedly cage is defined triangular lattice.
Specifically, when N number of printing opacity circular hole 2 is distributed in quasi- triangular lattice, the quasi- triangular lattice cycle along the x-axis direction
It is 2Pξ, i.e. the symmetrical centre of adjacent circular holes is specially 2P the distance between along the x-axis directionξ；The quasi- triangular lattice is along the y-axis direction
Cycle be Pη, i.e., P is specially between the symmetrical centre of adjacent circular holes the distance between along the y-axis directionη.And Pη≥Pξ/2。
The N values can be from hundreds of to tens of thousands of, typically by the size and cycle 2P of impermeable optical thin filmξ、PηSize it is true
It is fixed, with 10 μ m, 10 μm of impermeable optical thin films and Pξ=200nm, PηFor=200nm, the N values are 2500.
Further, in order to be polluted with harmonic carcellation, resolution, the radius r and P of the circular hole are improvedxBetween ratio
Example relation can determine according to formula (1)：
R=0.203Pξ (1)
Wherein, in the present embodiment, quasi- triangular lattice cycle 2P along the x-axis directionξIt is 400nm, week along the y-axis direction
Phase PηIt is 200nm, therefore, the radius r of circular hole is 40.6nm.
Wherein, the quasi- triangular lattice cycle along the x-axis direction is 2PξThe relation and wavelength X of incident light between can be with
Determined by formula (2)：
2Pξ≥λ (2)
The quasi- triangular lattice cycle along the y-axis direction is PηThe relation and wavelength X of incident light between can be by formula
(3) determine：
Pη≥λ/2 (3)
And the probability density that the circular hole is distributed on impermeable optical thin film can determine according to formula (4)：
ρ (s)=1/ (2a) (4)
Wherein, in formula (4), the s is the printing opacity circular hole centrally along the ξ directions deviation accurate tiltedly cage
Distance, a is the maximum of the distance.
Further, the span of the s can be determined by formula (5)：
|s|≤a (5)
The a values can be determined by formula (6)；
A=Pξ/4 (6)
So, determined that the position of circular hole distribution and the size of circular hole and the ratio between the quasi- triangular lattice cycle are closed
System.
Here, the material of the impermeable optical thin film is specifically included：Crome metal；The thickness of the impermeable optical thin film is 100nm.
After when paracycle, array of circular apertures extreme ultraviolet single diffraction order preparing grating is good, in actual applications, can be according to husband
The theory of thinkling sound's standing grain fraunhofer-diffraction is derived, and draws relative diffraction I (p, q) of transmission grating, can specifically be obtained by formula (7)
Go out：
Wherein, in formula (6), the I0It is the intensity of diffraction pattern center, the I0=1；The k is wave vector, institute
State k=2 π/λ；P=ξ/the z, the q=η/z, (ξ, η) represents the position on diffraction screen, z be grating to diffraction screen away from
From；The NξIt is the number of circular hole on x directions；The NηIt is the number of circular hole on y directions.
The transmission grating that the present embodiment is provided, is distributed N number of printing opacity circular hole, and circular hole with certain probability on impermeable optical thin film
Density is distributed in quasi- triangular lattice, therefore only 0 grade and +/- 1 order diffraction, in the absence of Advanced Diffraction, can harmonic carcellation pollution,
Resolution ratio is improved, and then ensures precision of analysis, improve and take the photograph spectrum precision；Also, the grating can realize self-supporting,
Therefore the loss that backing tape is come can be eliminated；Further, since printing opacity and light tight two kinds of regions are only existed on the optical grating construction, this
The structure for planting binaryzation is easy to process.
Embodiment two
Corresponding to embodiment one, the present embodiment also provides a kind of diffraction grating, as shown in figure 1, the diffraction grating includes：
Impermeable optical thin film 1 and N number of printing opacity circular hole 2；Wherein, N number of printing opacity circular hole 2 is with default probability density, in accurate tiltedly cage
It is distributed on the impermeable optical thin film；And have between the size of the printing opacity circular hole 2 and the accurate tiltedly cycle of cage pre-
If ratio；Wherein, the oblique cage is specifically included：Square lattice, rectangular grid, triangular lattice, intentionally rectangular grid and
Common oblique cage.In the present embodiment, accurate tiltedly cage is defined triangular lattice.
Specifically, when N number of printing opacity circular hole 2 is distributed in quasi- triangular lattice, the quasi- triangular lattice cycle along the x-axis direction
It is 2Pξ, i.e. the symmetrical centre of adjacent circular holes is specially 2P the distance between along the x-axis directionξ；The quasi- triangular lattice is along the y-axis direction
Cycle be Pη, i.e., P is specially between the symmetrical centre of adjacent circular holes the distance between along the y-axis directionη.And Pη≥Pξ/2。
The N values can be from hundreds of to tens of thousands of, typically by the size and cycle 2P of impermeable optical thin filmξ、PηSize it is true
It is fixed, with 25 μ m, 20 μm of impermeable optical thin films and Pξ=250nm, PηFor=200nm, the N values are 10000.
Further, in order to be polluted with harmonic carcellation, resolution, the radius r and P of the circular hole are improvedxBetween ratio
Example relation can determine according to formula (1)：
R=0.203Pξ (1)
Wherein, in the present embodiment, quasi- triangular lattice cycle 2P along the x-axis directionξIt is 500nm, week along the y-axis direction
Phase PηIt is 200nm, therefore, the radius r of circular hole is 101.2nm.
Wherein, the quasi- triangular lattice cycle along the x-axis direction is 2PξThe relation and wavelength X of incident light between can be with
Determined by formula (2)：
2Pξ≥λ (2)
The quasi- triangular lattice cycle along the y-axis direction is PηThe relation and wavelength X of incident light between can be by formula
(3) determine：
Pη≥λ/2 (3)
And the probability density that the circular hole is distributed on impermeable optical thin film can determine according to formula (4)：
ρ (s)=1/ (2a) (4)
Wherein, in formula (4), the s is the printing opacity circular hole centrally along the ξ directions deviation accurate tiltedly cage
Distance, a is the maximum of the distance.
Further, the span of the s can be determined by formula (5)：
|s|≤a (5)
The a values can be determined by formula (6)；
A=Pξ/4 (6)
So, determined that the position of circular hole distribution and the size of circular hole and the ratio between the quasi- triangular lattice cycle are closed
System.
Here, the material of the impermeable optical thin film is specifically included：Crome metal；The thickness of the impermeable optical thin film is 100nm.
After when paracycle, array of circular apertures extreme ultraviolet single diffraction order preparing grating is good, in actual applications, can be according to husband
The theory of thinkling sound's standing grain fraunhofer-diffraction is derived, and draws relative diffraction I (p, q) of transmission grating, can specifically be obtained by formula (7)
Go out：
Wherein, in formula (6), the I0It is the intensity of diffraction pattern center, the I0=1；The k is wave vector, institute
State k=2 π/λ；P=ξ/the z, the q=η/z, (ξ, η) represents the position on diffraction screen, z be grating to diffraction screen away from
From；The NξIt is the number of circular hole on x directions；The NηIt is the number of circular hole on y directions.
In practical application, using wavelength for the extreme ultraviolet of 13.5nm is irradiated to the diffraction grating in the present embodiment
When, referring to Fig. 2, it can be seen that the far field construction characteristic of the grating, from the graph, it is apparent that having obvious 0 in ξ directions
Level and+1/-1 order diffractions, relative to the multiorder diffractive of common grating, the diffraction grating can suppress effectively suppress 2 grades and more than
Advanced Diffraction.
In the present embodiment, referring to Fig. 3, the relative 0 grade diffraction efficiency of 1 grade of the grating is 25%, the diffraction with sinusoidal grating
Characteristic is identical；Referring to Fig. 4, the diffraction grating only exists 0 grade and+1/-1 order diffractions.
Array of circular apertures extreme ultraviolet single diffraction order grating paracycle that the present embodiment is provided, is distributed N number of on impermeable optical thin film
Light circular hole, and circular hole with certain probability density in quasi- triangular lattice be distributed, therefore, it is possible to completely inhibit 2,3,4 order diffractions, carry
High-resolution, and then ensure precision of analysis, improve and take the photograph spectrum precision；Also, the grating can realize self-supporting, because
This can eliminate the loss that backing tape is come；Further, since the optical grating construction is made up of circular hole, and the distance between adjacent circular holes compared with
Greatly, so easy to process.
The above, only presently preferred embodiments of the present invention is not intended to limit the scope of the present invention, it is all
Any modification, equivalent and improvement for being made within the spirit and principles in the present invention etc., should be included in protection of the invention
Within the scope of.
Claims (10)
1. a kind of diffraction grating, it is characterised in that the diffraction grating includes：Impermeable optical thin film and it is opened in described light tight thin
N number of printing opacity circular hole on film；N is the positive integer more than 100, wherein,
N number of printing opacity circular hole is distributed on the impermeable optical thin film with default probability density, in accurate tiltedly cage；And it is described
There is default ratio between the size of printing opacity circular hole and the accurate tiltedly cycle of cage.
2. diffraction grating as claimed in claim 1, it is characterised in that the accurate tiltedly cage cycle along the x-axis direction is 2Pξ,
The accurate tiltedly cage cycle along the y-axis direction is Pη；And Pη≥Pξ/2。
3. diffraction grating as claimed in claim 2, it is characterised in that the 2Pξ>=λ, the λ are the wavelength of incident light.
4. diffraction grating as claimed in claim 3, it is characterised in that the Pη≥λ/2。
5. diffraction grating as claimed in claim 2, it is characterised in that the r=0.203Pξ；Wherein, the r is the half of circular hole
Footpath.
6. diffraction grating as claimed in claim 2, it is characterised in that the printing opacity circular hole is distributed on the impermeable optical thin film
Probability density according to probability density function ρ (s)=1/ (2a) determine；Wherein, the s is the printing opacity circular hole centrally along ξ
The distance of the accurate tiltedly cage is deviateed in direction, and a is the maximum of the distance.
7. diffraction grating as claimed in claim 6, it is characterised in that described | s |≤a.
8. diffraction grating as claimed in claim 6, it is characterised in that the a=Pξ/4。
9. diffraction grating as claimed in claim 6, it is characterised in that the material of the impermeable optical thin film is specifically included：Gold,
Silver, aluminium, chromium, silicon, silicon nitride or carborundum.
10. diffraction grating as claimed in claim 1, it is characterised in that the thickness of the impermeable optical thin film is 50~5000nm.
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Cited By (3)
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| CN108761608A (en) * | 2018-06-04 | 2018-11-06 | 中国工程物理研究院激光聚变研究中心 | A kind of Advanced Diffraction inhibition grating of big process tolerance |
| CN108761607A (en) * | 2018-06-01 | 2018-11-06 | 中国工程物理研究院激光聚变研究中心 | A kind of Advanced Diffraction inhibition grating of quasi- random structure |
| CN110873969A (en) * | 2019-11-26 | 2020-03-10 | 中国航空制造技术研究院 | Spatial light modulator and control method of laser energy attenuation |
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| CN108761607A (en) * | 2018-06-01 | 2018-11-06 | 中国工程物理研究院激光聚变研究中心 | A kind of Advanced Diffraction inhibition grating of quasi- random structure |
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| CN110873969A (en) * | 2019-11-26 | 2020-03-10 | 中国航空制造技术研究院 | Spatial light modulator and control method of laser energy attenuation |
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