CN106768263A - MEMS vector hydrophone with bicylindrical sensitization structure - Google Patents
MEMS vector hydrophone with bicylindrical sensitization structure Download PDFInfo
- Publication number
- CN106768263A CN106768263A CN201710205324.2A CN201710205324A CN106768263A CN 106768263 A CN106768263 A CN 106768263A CN 201710205324 A CN201710205324 A CN 201710205324A CN 106768263 A CN106768263 A CN 106768263A
- Authority
- CN
- China
- Prior art keywords
- bicylindrical
- sensing unit
- vector hydrophone
- polyurethane overcoat
- sensitization
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 206010070834 Sensitisation Diseases 0.000 title claims abstract description 22
- 230000008313 sensitization Effects 0.000 title claims abstract description 22
- 229920002635 polyurethane Polymers 0.000 claims abstract description 22
- 239000004814 polyurethane Substances 0.000 claims abstract description 22
- 238000013461 design Methods 0.000 claims abstract description 13
- 239000004020 conductor Substances 0.000 claims abstract description 10
- 229910052751 metal Inorganic materials 0.000 claims abstract description 10
- 239000002184 metal Substances 0.000 claims abstract description 10
- 239000004359 castor oil Substances 0.000 claims abstract description 9
- 235000019438 castor oil Nutrition 0.000 claims abstract description 9
- ZEMPKEQAKRGZGQ-XOQCFJPHSA-N glycerol triricinoleate Natural products CCCCCC[C@@H](O)CC=CCCCCCCCC(=O)OC[C@@H](COC(=O)CCCCCCCC=CC[C@@H](O)CCCCCC)OC(=O)CCCCCCCC=CC[C@H](O)CCCCCC ZEMPKEQAKRGZGQ-XOQCFJPHSA-N 0.000 claims abstract description 9
- 239000003921 oil Substances 0.000 claims abstract description 7
- 238000007789 sealing Methods 0.000 claims abstract description 7
- 238000007872 degassing Methods 0.000 claims abstract description 6
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 30
- 229910052697 platinum Inorganic materials 0.000 claims description 15
- 238000005259 measurement Methods 0.000 claims description 10
- 238000005516 engineering process Methods 0.000 claims description 7
- 238000012545 processing Methods 0.000 claims description 3
- 230000035945 sensitivity Effects 0.000 abstract description 19
- 230000003321 amplification Effects 0.000 abstract description 11
- 238000003199 nucleic acid amplification method Methods 0.000 abstract description 11
- 238000000034 method Methods 0.000 abstract description 9
- 238000004806 packaging method and process Methods 0.000 abstract description 4
- 238000012360 testing method Methods 0.000 description 14
- 239000002245 particle Substances 0.000 description 13
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 13
- 238000001514 detection method Methods 0.000 description 6
- 238000011160 research Methods 0.000 description 5
- 239000013535 sea water Substances 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 210000004081 cilia Anatomy 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 210000002768 hair cell Anatomy 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000011664 nicotinic acid Substances 0.000 description 2
- 229920003023 plastic Polymers 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 241000251468 Actinopterygii Species 0.000 description 1
- 241000208340 Araliaceae Species 0.000 description 1
- 235000005035 Panax pseudoginseng ssp. pseudoginseng Nutrition 0.000 description 1
- 235000003140 Panax quinquefolius Nutrition 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 210000004027 cell Anatomy 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000000994 depressogenic effect Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 235000008434 ginseng Nutrition 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000008447 perception Effects 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 230000002463 transducing effect Effects 0.000 description 1
- 230000010415 tropism Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H3/00—Measuring characteristics of vibrations by using a detector in a fluid
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
- G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
- G01H11/08—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means using piezoelectric devices
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
- Y02A90/00—Technologies having an indirect contribution to adaptation to climate change
- Y02A90/30—Assessment of water resources
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Transducers For Ultrasonic Waves (AREA)
- Measurement Of Velocity Or Position Using Acoustic Or Ultrasonic Waves (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
Abstract
The invention discloses a kind of MEMS vector hydrophone with bicylindrical sensitization structure.The present invention is sandwiched between sealing ring in metal shielding and polyurethane overcoat, place preamplifier in metal shielding the inside, sensing unit is set in polyurethane overcoat, put and be marked in outside according to the angle of setting in sensing unit direction vector position, sensing unit is attached on the inwall of bicylindrical sensitization structure, it is electrically connected with preamplifier by shielded conductor, shielded conductor passes through wire connection hole, wire connection hole side is oil outlet, bicylindrical sensitization structure is arranged on the base of polyurethane overcoat, full of degassing castor oil in the middle of polyurethane overcoat and bicylindrical sensitization structure.The present invention improves the sensitivity of vector hydrophone with double-cylinder structure, and for submerged applications environment, the structure and technique of sensing unit and pre-amplification circuit integrative packaging are proposed, and designs the mirror image electric bridge pre-amplification circuit structure of tandem, improve signal to noise ratio.
Description
Technical field
It is more particularly to a kind of that there is bicylindrical enhanced sensitivity knot the invention mainly relates to new hot wire type's MEMS vector hydrophone
The MEMS vector hydrophone of structure.
Background technology
It is well known that sound wave is the known fluctuation that can be uniquely propagated in water medium and long distance, therefore in Ocean Surveying neck
Domain-dependent basis is various acoustic sensors under water, i.e. hydrophone.In sea warfare, sonar is individual (various naval warfare
Warship, ship) face, all of underwater battlefield is scouted will be with sonar as media, and what is lacked can not.Underwater acoustic transducer is used as sonar system
One of important component of system, is an important research direction of marine acoustics, and the research of new underwater acoustic transducer is naval's sonar skill
One key content of art development, its research work has its own strategic significance.
A complete sound field is described, the acoustic pressure of scalar is not only needed, in addition it is also necessary to the particle vibration velocity of vector, while measurement
Scalar information and Vector Message are that acoustic pressure and particle velocity could obtain complete sound field information.The vector water for being used at present is listened
Device is typically made using piezoelectric ceramics, using two pressure hydrophones, obtains particle indirectly by calculating acoustic pressure gradient
Vibration velocity, because its principle is the multiple spot acoustic pressure scalar on the small yardstick in direct measurement space, then by the parallel connected in reverse phase of circuit or
Connect to obtain the finite-difference approximation of acoustic pressure gradient, it is not particle plane vibration speed measurement truly.Due to surveying under water
Amount frequency is relatively low, and common vector hydrophone volume is larger, is not easy to form array, and because the phase of two hydrophones is consistent
Property it is whard to control, limit its application.
In Underwater Detection field, for based on far field objects detection and stealthy submarine detection, low frequency detection, noise high
Than the development trend that detection is always sonar system, and for based on array detection, high-performance, miniaturization are always engineering
Using the target pursued.MEMS technology is the multi-crossed disciplines research frontier grown up in microelectric technique basis,
One of great sciemtifec and technical sphere attracted attention as the world.Vector hydrophone based on MEMS technology, volume is very small, it is easy to small
Type, Cheng Zhen is also more convenient.
At present, it is same to shake ball-type vector hydrophone due to build ratio using being more widely the same ball-type vector hydrophone that shakes
It is larger, make vector array carry out using when must drift about in the water surface, it is difficult to control, and install ball-type array element when, it is necessary to
Multiple supports are fixed, and technics comparing is complicated；Also Northcentral University based on bionic MEMS piezoresistive vector hydrophone,
It is the principle of side line machinery Sensor cell (sound hair cell) the perception water sport for imitating fish, proposes a kind of artificial hair cell vector
The structure design of hydrophone, when sound wave acts on central cilium (firm plastic cartridge is made), firm plastics through package casing
, with the medium particle residing for it with shaking, so as to the acoustical signal that will be experienced passes to piezoresistance sensitivity unit, producing beam should for cylinder
Power changes, and the resistance value of implantation piezo-resistance thereon just changes, and is examined by plain conductor and corresponding circuit signal
Survey unit, you can detect with the vector for realizing underwater signal.Hot wire type's MEMS vector hydrophone and bionic MEMS pressure drags
Formula vector hydrophone principle is different, and bionical cilium is difficult to make.
Someone is applied in air hot wire type MEMS vector sensors, and has delivered patent and describe sensing element and add
Work technique.But depressed in unison, the particle vibration velocity caused in water is much smaller than in atmosphere, under the identical structural parameters of remolding sensitivity
Sonic transducer in air is much smaller, and the density of water is again bigger than air more, therefore has more particle propagations in unit volume
Heat, thus under water using when, need to study in underwater environment relative in air, how its sensitivity changes, and how to carry
The sensitivity of sensor high and signal to noise ratio become the key of design.
The content of the invention
It is above-mentioned to solve it is an object of the invention to provide a kind of MEMS vector hydrophone with bicylindrical sensitization structure
The problem proposed in background.
To achieve the above object, the present invention provides following technical scheme：
The present invention includes polyurethane overcoat, metal shielding, and sealing is sandwiched between in metal shielding and polyurethane overcoat
Place and sensing unit, sensing unit direction vector position are set in preamplifier, polyurethane overcoat in circle, metal shielding the inside
Angle according to setting is put and is marked in outside, and sensing unit is attached on the inwall of bicylindrical sensitization structure, by screen
Cover wire to be electrically connected with preamplifier, shielded conductor passes through wire connection hole, wire connection hole side is oil outlet,
Bicylindrical sensitization structure is arranged on the base of polyurethane overcoat, full of degassing in the middle of polyurethane overcoat and bicylindrical sensitization structure
Castor oil.
Furtherly, using two platinum filaments be arrangeding in parallel, the temperature difference on two platinum filaments is used for described sensing unit
The measurement of vibration velocity, two platinum filaments are etched by MEMS processing technologys and completed.
Furtherly, described preamplifier is formed according to the characteristics design of image current source circuit, is realized to two
While individual platinum filament loading same current, detect that the resistance of two platinum filaments is poor.
Compared with background technology, the invention has the advantages that：
The present invention improves the sensitivity of vector hydrophone with double-cylinder structure, and for submerged applications environment, proposes
The structure and technique of sensing unit and pre-amplification circuit integrative packaging, and put before designing the mirror image electric bridge of tandem
Big circuit structure, improves signal to noise ratio.
Brief description of the drawings
Fig. 1 is X-direction schematic diagram of the invention：
Fig. 2 is Y direction schematic diagram of the invention；
Fig. 3 is the result figure of Fluent softwares tentatively emulation；
Fig. 4 is pre-amplification circuit structure chart；
Fig. 5 is stationary field comparison method test chart；
Fig. 6 is that frequency is the directivity pattern under 100HZ；
Fig. 7 is that frequency is the directivity pattern under 200HZ；
Fig. 8 is that frequency is the directivity pattern under 1000HZ；
Fig. 9 is sensitivity test figure.
In figure：1st, preamplifier, 2, sealing ring, 3, bicylindrical sensitization structure, 4, base, 5, polyurethane overcoat, 6, gold
Category shielding case, 7, oil outlet, 8, wire connection hole, 9, platinum filament sensing element, 10, degassing castor oil.
Specific embodiment
The present invention is further illustrated below in conjunction with the accompanying drawings.
The present invention is that the measurement of vibration velocity is carried out by the temperature difference on two heated filaments.Design pre-amplification circuit, according to
The characteristic of image current source circuit, realizes while to two heated filament loading same currents, detecting that the resistance of two heated filaments is poor.In order to
The sensitivity of vector hydrophone and the accuracy of measurement result are improved, proposition improves vector water using bicylindrical sensitization structure and listens
The sensitivity of device.Sensing unit and pre-amplification circuit integrative packaging are finally carried out, it is close with acoustic impedance coefficient and seawater
Polyurethane material as sensing unit package casing, with the castor oil best with seawater acoustic impedance parameter and thermal diffusion coefficient
As embedding oil product, and carry out degassing process.
The suitable pre-amplification circuit form of selection design, on the one hand meets the temperature difference information conversion signal of heated filament,
On the other hand the self noise of circuit is controlled, the requirement of high s/n ratio is met.
Sensing unit direction vector position is put and be marked in shell according to the angle of agreement, sensing unit passes through
Sticker is electrically connected by shielded conductor on the inwall of bicylindrical sensitization structure with preamplifier, preamplifier
Place in the shield shell with top, reduce the interference of external radiated noise.
As depicted in figs. 1 and 2：The present invention includes a polyurethane overcoat 5, metal shielding 6 is connected above, in metal screen
Cover shell and be sandwiched between sealing ring 2 with polyurethane overcoat, preamplifier 1 is placed in metal shielding the inside, and platinum filament sensing element 9 is sweared
Amount direction position is put and is marked in shell according to the angle of agreement, and sensing unit is attached to the interior of bicylindrical sensitization structure 3
On wall, it is electrically connected with preamplifier by shielded conductor, shielded conductor passes through wire connection hole 8, wire connection hole
Side is oil outlet 7, and oil outlet is that, in order to ensure that removal of bubbles when hydrophone installation is carried out in castor oil, bicylindrical increases
The base 4 put outside the upper polyurethane of sensing structure connection, full of degassing castor oil in the middle of polyurethane overcoat and bicylindrical sensitization structure
10。
During measurement, after sound wave is through polyurethane sealing casing and degassed castor oil, bicylindrical enhanced sensitivity is applied to
In structure and sensing element, bicylindrical once increased structure and can increase through the acoustic wave flow rate in the middle of bicylindrical.Platinum filament is heated to one
Fixed temperature, the now space temperature field distribution where two platinum filaments is in stable state, and particle vibration can be caused when sound wave effect,
Make the temperature reduction being close on first heated filament of sound source, medium is obtained a part of heat by heat transfer, on second heated filament
Temperature can also reduce, but compared to first temperature reduction lack.Temperature change on heated filament causes that the impedance of heated filament occurs
Change, particle vibration velocity information can be obtained by two impedance differences of heated filament.Because the acoustic wave flow rate for flowing through sensing element increases
Greatly, so the sensitivity of vector hydrophone can be improved.
It is below specific embodiment of the invention：
1) structure design of vector hydrophone and making
Step 1) sensing unit key parameter design studies scheme
Under same sound pressure, in the particle vibration velocity about air caused in water 1/3000, the identical structure ginseng of remolding sensitivity
Sonic transducer in several lower air is much smaller, but because the density of water is again bigger than air more, therefore have in unit volume more
Particle propagation heat, therefore under water apply when, it is necessary to improve sensitivity and the signal to noise ratio of sensor.
A kind of MEMS vector hydrophone with bicylindrical sensitization structure, measuring principle is similar to airspeedometer and heat type flow quantity
Meter, transducing part is made up of two parallel platinum wires, and two silk threads are etched by MEMS processing technologys and completed, and two ends are fixed on silicon chip
On electrode.
In order to improve sensitivity, a kind of sensing unit sensitization structure of double-cylinder structure is designed, its general principle is in sound
Ripple incident direction, increase sensing unit nearby Particle Vibration Velocity, with Fluent softwares tentatively emulation result as shown in figure 3,
As the ratio between spacing R/d=3 between cylindrical radius and cylinder, preferable sensitivity gain can be obtained, can substantially obtain 3 times
The gain of (10dB).
Step 2) Pre-amplifier Circuit Design research approach.
After sensing unit design is completed, it is desirable to have particle vibration velocity information is converted to electricity by special pre-amplification circuit
Signal, its purpose has at 2 points：One is that heated filament is heated into uniform temperature, and two is that the temperature difference of heated filament is converted into voltage signal,
Therefore the selection suitable pre-amplification circuit form of design is needed, is on the one hand met the temperature difference information conversion signal of heated filament,
On the other hand the self noise of circuit is controlled, the requirement of high s/n ratio is met.Generally using Wheatstone bridge plus outside subtraction
Circuit can realize the measurement of resistance difference, but due to the precision problem of resistance on bridge arm, it is difficult to ensure that flowing through the electric current on two heated filaments
It is one straightforward, and then introduce DC maladjustment error, extra subtraction circuit is also readily incorporated noise in addition.
The present invention designs pre-amplification circuit according to the characteristic of image current source circuit, realizes to two heated filament loading phases
While with electric current, detect that the resistance of two heated filaments is poor.Principle is implemented as shown in figure 4, R1 and R2 is sensor in electric bridge
Two heated filaments, R3 and R4 is the effect of control electric current.Image current electric bridge is realized based on Widlar current mirrors principle, passed through
Single supply power realize to resistance difference change measurement.Electric bridge is realized by two PNP transistors, two collector resistances
's.Because electric bridge is while realizing that signal is changed, it is necessary to be heated to heated filament, by electric current heating heated filament, electric current can not
It is excessive, therefore two resistance of emitter stage series connection play a part of current limliting.Assuming that when static, R=R1=R2, Δ R1=- Δ R2,
The two ends electric current of electric bridge is I, and electric bridge output AC voltage signal is：
Step 3) sensing unit and pre-amplification circuit integrative packaging structure and technical study scheme.
Need to consider when sensing unit and change-over circuit integrated encapsulation technique is carried out sealing, pressure-resistant, acoustic impedance match,
The requirement such as technique, shock resistance is realized, selects acoustic impedance coefficient with the close polyurethane material of seawater as sensing unit first
Package casing, selection is oily as embedding with seawater acoustic impedance parameter and the best castor oil of thermal diffusion coefficient in the shell
Product, and needs are de-gassed treatment.Sensing unit direction vector position is put and marked in shell according to the angle of agreement
Note, sensing unit is attached on the inwall of bicylindrical sensitization structure, is electrically connected with preamplifier by shielded conductor, preceding
Put amplifier to be positioned in the shield shell on top, reduce the interference of external radiated noise, by the voltage letter after circuit conversion
Number by three-core shielding cable with the external world be connected, completion power and signal transfer functions.
2) vector hydrophone performance evaluation
Step 1) directive property test.
According to national vector hydrophone calibrating standard, the directive property test of vector hydrophone is carried out.Test is in 715 national defence one
Level measuring station test, tests according to stationary field comparison method, as shown in figure 5, test frequency scope is 20Hz~2kHz, is given below
Frequency is the directivity pattern under 100HZ, 200HZ, 1000HZ, is such as schemed, 6, shown in Fig. 7, Fig. 8, directive property is in ' 8 ' words, and expression refers to
Tropism is good.
Step 2) sensitivity test.
According to national vector hydrophone calibrating standard, the sensitivity test of vector hydrophone is carried out.Test is in 715 national defence one
Level measuring station test, tests, such as Fig. 5 according to stationary field comparison method, and test frequency scope is 20Hz~2kHz, as shown in figure 9, clever
Acuity curve is substantially steady, and bandwidth is larger, and sensitivity is good.
Claims (3)
1. there is the MEMS vector hydrophone of bicylindrical sensitization structure, including polyurethane overcoat, metal shielding, in metallic shield
Shell is sandwiched between sealing ring with polyurethane overcoat, and metal shielding the inside is placed and set in preamplifier, polyurethane overcoat quick
Sense unit, sensing unit direction vector position is put and is marked in outside according to the angle of setting, and sensing unit is attached to double
On the inwall of cylinder sensitization structure, it is electrically connected with preamplifier by shielded conductor, shielded conductor connects through wire
Hole is connect, wire connection hole side is oil outlet, and bicylindrical sensitization structure is arranged on the base of polyurethane overcoat, polyurethane overcoat
With bicylindrical sensitization structure centre full of degassing castor oil.
2. MEMS vector hydrophone according to claim 1, it is characterised in that：Described sensing unit is parallel using two
The platinum filament of setting, the temperature difference on two platinum filaments is used for the measurement of vibration velocity, and two platinum filaments are etched by MEMS processing technologys and completed.
3. MEMS vector hydrophone according to claim 2, it is characterised in that：Described preamplifier is according to mirror image
The characteristics design of current source circuit is formed, and realizes while to two platinum filament loading same currents, detecting that the resistance of two platinum filaments is poor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710205324.2A CN106768263B (en) | 2017-03-31 | 2017-03-31 | MEMS vector hydrophone with double-cylinder sensitization structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710205324.2A CN106768263B (en) | 2017-03-31 | 2017-03-31 | MEMS vector hydrophone with double-cylinder sensitization structure |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106768263A true CN106768263A (en) | 2017-05-31 |
| CN106768263B CN106768263B (en) | 2023-04-28 |
Family
ID=58965577
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710205324.2A Active CN106768263B (en) | 2017-03-31 | 2017-03-31 | MEMS vector hydrophone with double-cylinder sensitization structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106768263B (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107631791A (en) * | 2017-08-07 | 2018-01-26 | 国家电网公司 | A kind of sensor for monitoring oil-filled transformer noise |
| CN107687890A (en) * | 2017-10-20 | 2018-02-13 | 中国计量大学 | Vector microphone with horn structure |
| CN108088547A (en) * | 2017-12-20 | 2018-05-29 | 青岛理工大学 | Passive weak target detection method based on small-aperture two-dimensional vector hydrophone array |
| CN108195459A (en) * | 2017-12-20 | 2018-06-22 | 青岛理工大学 | Passive target space spectrum detection method for small-aperture acoustic pressure hydrophone array |
| CN114689166A (en) * | 2022-03-23 | 2022-07-01 | 西安交通大学 | Piezoresistive ion polymer hydrophone structure |
| CN117412218A (en) * | 2023-12-14 | 2024-01-16 | 青岛国数信息科技有限公司 | Hydrophone and manufacturing process |
Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR1457413A (en) * | 1965-07-23 | 1966-01-24 | Trans Sonics | Fluid sensitive thermoelectric system |
| US3991624A (en) * | 1974-06-06 | 1976-11-16 | Leslie Llewellyn Rhys Davies | Wind velocity servo system |
| DE2711281A1 (en) * | 1976-06-11 | 1977-12-15 | Kyma Corp | DIRECTION SENSITIVE HOT FILM ANEMOMETER CONVERTER |
| US4206638A (en) * | 1978-12-06 | 1980-06-10 | Djorup Robert Sonny | Directional heat loss anemometer transducer |
| CN1737511A (en) * | 2005-09-05 | 2006-02-22 | 中国电子科技集团公司第四十九研究所 | Multi-piece integration type three-dimensional vector hydrophone apparatus |
| CN102506990A (en) * | 2011-11-09 | 2012-06-20 | 中北大学 | Columnar bionic vector hydrophone with two-dimensional resonance |
| CN102944297A (en) * | 2012-10-23 | 2013-02-27 | 中北大学 | Broadband vector hydrophone with glass fiber reinforced plastics acoustic transmission cap package |
| RU2546968C1 (en) * | 2013-12-03 | 2015-04-10 | Федеральное государственное бюджетное учреждение науки Институт проблем морских технологий Дальневосточного отделения Российской академии наук (ИПМТ ДВО РАН) | Combined hydro acoustic receiver |
| CN204575189U (en) * | 2015-04-21 | 2015-08-19 | 中国计量学院 | A kind of underwater sound focused transducer sound power measurement device |
| CN105300505A (en) * | 2015-10-14 | 2016-02-03 | 中国船舶重工集团公司第七一五研究所 | Wide-band high-sensitivity planar optical fiber vector hydrophone |
| CN106289507A (en) * | 2016-08-31 | 2017-01-04 | 哈尔滨工程大学 | Low noise vector hydrophone |
| CN206725084U (en) * | 2017-03-31 | 2017-12-08 | 中国计量大学 | A kind of MEMS vector hydrophone with bicylindrical sensitization structure |
-
2017
- 2017-03-31 CN CN201710205324.2A patent/CN106768263B/en active Active
Patent Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR1457413A (en) * | 1965-07-23 | 1966-01-24 | Trans Sonics | Fluid sensitive thermoelectric system |
| US3991624A (en) * | 1974-06-06 | 1976-11-16 | Leslie Llewellyn Rhys Davies | Wind velocity servo system |
| DE2711281A1 (en) * | 1976-06-11 | 1977-12-15 | Kyma Corp | DIRECTION SENSITIVE HOT FILM ANEMOMETER CONVERTER |
| US4206638A (en) * | 1978-12-06 | 1980-06-10 | Djorup Robert Sonny | Directional heat loss anemometer transducer |
| CN1737511A (en) * | 2005-09-05 | 2006-02-22 | 中国电子科技集团公司第四十九研究所 | Multi-piece integration type three-dimensional vector hydrophone apparatus |
| CN102506990A (en) * | 2011-11-09 | 2012-06-20 | 中北大学 | Columnar bionic vector hydrophone with two-dimensional resonance |
| CN102944297A (en) * | 2012-10-23 | 2013-02-27 | 中北大学 | Broadband vector hydrophone with glass fiber reinforced plastics acoustic transmission cap package |
| RU2546968C1 (en) * | 2013-12-03 | 2015-04-10 | Федеральное государственное бюджетное учреждение науки Институт проблем морских технологий Дальневосточного отделения Российской академии наук (ИПМТ ДВО РАН) | Combined hydro acoustic receiver |
| CN204575189U (en) * | 2015-04-21 | 2015-08-19 | 中国计量学院 | A kind of underwater sound focused transducer sound power measurement device |
| CN105300505A (en) * | 2015-10-14 | 2016-02-03 | 中国船舶重工集团公司第七一五研究所 | Wide-band high-sensitivity planar optical fiber vector hydrophone |
| CN106289507A (en) * | 2016-08-31 | 2017-01-04 | 哈尔滨工程大学 | Low noise vector hydrophone |
| CN206725084U (en) * | 2017-03-31 | 2017-12-08 | 中国计量大学 | A kind of MEMS vector hydrophone with bicylindrical sensitization structure |
Non-Patent Citations (2)
| Title |
|---|
| RYAN JANZEN 等: "Arrays of water jets as user interfaces: detection and estimation of flow by listening to turbulence signatures using hydrophones", 《MM "07: PROCEEDINGS OF THE 15TH ACM INTERNATIONAL CONFERENCE ON MULTIMEDIA》 * |
| 赵龙江 等: "用于空气声测量的质点振速传感器", 《声学学报》 * |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107631791A (en) * | 2017-08-07 | 2018-01-26 | 国家电网公司 | A kind of sensor for monitoring oil-filled transformer noise |
| CN107631791B (en) * | 2017-08-07 | 2019-09-10 | 国家电网公司 | A kind of sensor monitoring oil-immersed transformer noise |
| CN107687890A (en) * | 2017-10-20 | 2018-02-13 | 中国计量大学 | Vector microphone with horn structure |
| CN108088547A (en) * | 2017-12-20 | 2018-05-29 | 青岛理工大学 | Passive weak target detection method based on small-aperture two-dimensional vector hydrophone array |
| CN108195459A (en) * | 2017-12-20 | 2018-06-22 | 青岛理工大学 | Passive target space spectrum detection method for small-aperture acoustic pressure hydrophone array |
| CN114689166A (en) * | 2022-03-23 | 2022-07-01 | 西安交通大学 | Piezoresistive ion polymer hydrophone structure |
| CN114689166B (en) * | 2022-03-23 | 2023-04-14 | 西安交通大学 | Piezoresistive ion polymer hydrophone structure |
| CN117412218A (en) * | 2023-12-14 | 2024-01-16 | 青岛国数信息科技有限公司 | Hydrophone and manufacturing process |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106768263B (en) | 2023-04-28 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN106768263A (en) | MEMS vector hydrophone with bicylindrical sensitization structure | |
| Gabrielson et al. | A simple neutrally buoyant sensor for direct measurement of particle velocity and intensity in water | |
| Zheng et al. | 3D printed graphene piezoresistive microelectromechanical system sensors to explain the ultrasensitive wake tracking of wavy seal whiskers | |
| CN107687890A (en) | Vector microphone with horn structure | |
| US10310121B2 (en) | Seismic sensor devices, systems, and methods including noise filtering | |
| Zhang et al. | Design and fabrication of a multipurpose cilia cluster MEMS vector hydrophone | |
| Zaitsev et al. | Frequency response and self-noise of the MET hydrophone | |
| EP4024015A1 (en) | High-sensitivity magnetoresistive acoustic wave sensor and array device | |
| CN103954346A (en) | Magnetic composite three-dimensional vector hydrophone with target positioning and distinguishing function and target positioning and distinguishing method thereof | |
| CN206725084U (en) | A kind of MEMS vector hydrophone with bicylindrical sensitization structure | |
| CN112327204A (en) | Underwater three-dimensional space passive electric field positioning method based on Gauss-Newton optimization algorithm | |
| Zhang et al. | Modeling and characterization of a micromachined artificial hair cell vector hydrophone | |
| CN108490384A (en) | A kind of small space sound bearing detection device and its method | |
| Den Ouden et al. | The INFRA-EAR: a low-cost mobile multidisciplinary measurement platform for monitoring geophysical parameters | |
| Zhang et al. | Research on the nested package structure of a MEMS vector hydrophone | |
| Yang et al. | Emerging MEMS sensors for ocean physics: Principles, materials, and applications | |
| RU2678503C1 (en) | Molecular electronic hydrophone | |
| CN107677312B (en) | A kind of chip seawater conductivity-temperature-depth system | |
| Liu et al. | In-Situ Observing Ciliary Biomimetic Three-Dimensional Vector Hydrophone | |
| AU2009318026B2 (en) | Free charge carrier diffusion response transducer for sensing gradients | |
| Li et al. | A flow velocity measurement method based on turbulent pressure fluctuation characteristics | |
| CN111397721A (en) | Method and system for absolute calibration of co-vibrating vector hydrophone based on water surface boundary vibration measurement technology | |
| CN109238438B (en) | Flexible film acoustic vector sensor based on nano material | |
| CN208795359U (en) | Two dimension is the same as vibration shape vector hydrophone | |
| CN113960679B (en) | Leakage detection method and device based on hexahedral magnetic detection device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |