CN106768263B - MEMS vector hydrophone with double-cylinder sensitization structure - Google Patents
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H3/00—Measuring characteristics of vibrations by using a detector in a fluid
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
- G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
- G01H11/08—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means using piezoelectric devices
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
- Y02A90/00—Technologies having an indirect contribution to adaptation to climate change
- Y02A90/30—Assessment of water resources
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- General Physics & Mathematics (AREA)
- Transducers For Ultrasonic Waves (AREA)
- Measurement Of Velocity Or Position Using Acoustic Or Ultrasonic Waves (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
Abstract
The invention discloses an MEMS vector hydrophone with a double-cylinder sensitization structure. According to the invention, a sealing ring is clamped between a metal shielding shell and a polyurethane jacket, a preamplifier is placed in the metal shielding shell, a sensitive unit is arranged in the polyurethane jacket, the vector direction position of the sensitive unit is placed according to a set angle and marked outside, the sensitive unit is attached to the inner wall of a double-cylinder sensitization structure and is electrically connected with the preamplifier through a shielding wire, the shielding wire penetrates through a wire connecting hole, an oil outlet is arranged beside the wire connecting hole, the double-cylinder sensitization structure is arranged on a base of the polyurethane jacket, and deaerated castor oil is filled between the polyurethane jacket and the double-cylinder sensitization structure. The invention uses a double-cylinder structure to improve the sensitivity of the vector hydrophone, provides a structure and a process for integrally packaging a sensitive unit and a pre-amplifying circuit aiming at an underwater application environment, designs a serial mirror bridge pre-amplifying circuit structure and improves the signal to noise ratio.
Description
Technical Field
The invention mainly relates to a novel hot wire type MEMS vector hydrophone, in particular to an MEMS vector hydrophone with a double-cylinder sensitization structure.
Background
Acoustic waves are the only known wave motion that can propagate far in water, and therefore the basis for reliance on in the field of marine surveying is the variety of acoustic sensors underwater, i.e. hydrophones. In sea warfare, sonar is the five sense organs of sea fighter individuals (various warships and boats), and all underwater battlefield reconnaissance needs sonar as a medium. The underwater acoustic transducer is one of important components of a sonar system, is an important research direction of underwater acoustics, and the research of the novel underwater acoustic transducer is a key content of the development of navy sonar technology, and has important strategic significance in research work.
To describe a complete sound field, not only scalar sound pressure but also vector particle velocity are required, and scalar information and vector information, namely sound pressure and particle velocity, are measured to obtain complete sound field information. The current vector hydrophone is generally manufactured by adopting piezoelectric ceramics, and the particle vibration velocity is indirectly obtained by calculating the sound pressure gradient by utilizing two sound pressure hydrophones. Because the underwater measurement frequency is low, the volume of a common vector hydrophone is large, an array is inconvenient to form, and the phase consistency of the two hydrophones is not easy to control, so that the application of the two hydrophones is limited.
In the field of underwater sound detection, low-frequency detection and high signal-to-noise ratio detection are always one development trend of sonar systems for far-field target detection and stealth submarine detection, and high-performance and miniaturization are always targets pursued by engineering application for array-based detection. MEMS technology is a multidisciplinary crossover leading-edge research field developed on the basis of microelectronics technology, and has become one of the important technological fields of worldwide attention. The vector hydrophone based on MEMS technology has very small volume, is easy to miniaturize and is convenient to form an array.
At present, the application is wider that the co-vibrating spherical vector hydrophone is required to float on the water surface when being made into a vector array for application due to the larger body size, the control is difficult, and when the spherical array element is installed, a plurality of brackets are required to be used for fixing, so that the process is more complex; the MEMS piezoresistive vector hydrophone based on bionics in North and China university is a principle of imitating the principle of sensing water movement by lateral line mechanical sensing cells (sound hair cells) of fishes, and the structural design of the artificial hair cell vector hydrophone is provided. The principle of the hot wire MEMS vector hydrophone is different from that of the bionic MEMS piezoresistive vector hydrophone, and the bionic cilia are difficult to manufacture.
Hot wire MEMS vector sensors have been used in air and the technology of sensing element fabrication has been described in the published patent. However, under the same sound pressure, the particle vibration velocity caused in water is far smaller than that in air, the sensitivity is far smaller than that of an acoustic sensor in air under the same structural parameters, the density of water is far greater than that of air, and therefore more particles in unit volume spread heat, so that in underwater application, how the sensitivity changes in the underwater environment relative to that in air is required to be studied, and how to improve the sensitivity and the signal-to-noise ratio of the sensor becomes a key of design.
Disclosure of Invention
The invention aims to provide a MEMS vector hydrophone with a double-cylinder sensitization structure, which solves the problems in the background.
In order to achieve the above purpose, the present invention provides the following technical solutions:
the invention comprises a polyurethane jacket and a metal shielding shell, wherein a sealing ring is clamped between the metal shielding shell and the polyurethane jacket, a preamplifier is arranged in the metal shielding shell, a sensitive unit is arranged in the polyurethane jacket, the vector direction position of the sensitive unit is arranged according to a set angle and marked outside, the sensitive unit is attached to the inner wall of a double-cylinder sensitization structure, the sensitive unit is electrically connected with the preamplifier through a shielding wire, the shielding wire penetrates through a wire connecting hole, an oil outlet is arranged beside the wire connecting hole, the double-cylinder sensitization structure is arranged on a base of the polyurethane jacket, and deaerated castor oil is filled between the polyurethane jacket and the double-cylinder sensitization structure.
Furthermore, the sensitive unit adopts two parallel platinum wires, the temperature difference of the two platinum wires is used for measuring the vibration speed, and the two platinum wires are etched through an MEMS processing technology.
Furthermore, the preamplifier is designed according to the characteristics of the mirror current source circuit, so that the two platinum wires are loaded with the same current, and meanwhile, the resistance difference of the two platinum wires is detected.
Compared with the background technology, the invention has the following beneficial effects:
the invention uses a double-cylinder structure to improve the sensitivity of the vector hydrophone, provides a structure and a process for integrally packaging a sensitive unit and a pre-amplifying circuit aiming at an underwater application environment, designs a serial mirror bridge pre-amplifying circuit structure and improves the signal to noise ratio.
Drawings
FIG. 1 is a schematic view of the X-axis direction of the present invention:
FIG. 2 is a schematic view of the Y-axis direction of the present invention;
FIG. 3 is a graph of results of a Fluent software preliminary simulation;
FIG. 4 is a block diagram of a pre-amplifier circuit;
FIG. 5 is a standing wave field comparison test chart;
FIG. 6 is a directivity diagram at a frequency of 100 HZ;
FIG. 7 is a directivity diagram at a frequency of 200 HZ;
FIG. 8 is a directivity diagram at a frequency of 1000 HZ;
fig. 9 is a sensitivity test chart.
In the figure: 1. the device comprises a preamplifier, 2, a sealing ring, 3, a double-cylinder sensitization structure, 4, a base, 5, a polyurethane jacket, 6, a metal shielding shell, 7, an oil outlet, 8, a wire connecting hole, 9, a platinum wire sensing element, 10 and deaerated castor oil.
Detailed Description
The invention is further described below with reference to the accompanying drawings.
The invention measures vibration speed through temperature difference of two hot wires. And designing a pre-amplifying circuit, and detecting the resistance difference of the two hot wires while loading the same current to the two hot wires according to the characteristics of the mirror current source circuit. In order to improve the sensitivity of the vector hydrophone and the accuracy of the measurement result, a double-cylinder sensitization structure is proposed to improve the sensitivity of the vector hydrophone. Finally, the sensitive unit and the pre-amplifying circuit are integrally packaged, polyurethane material with the acoustic impedance coefficient close to that of seawater is used as a packaging shell of the sensing unit, castor oil with the best acoustic impedance parameter and thermal diffusion coefficient of the seawater is used as a potting oil product, and degassing treatment is carried out.
And a proper pre-amplifying circuit form is selected and designed, so that the temperature difference information of the hot wire is converted into signals, and the self-noise of the circuit is controlled, and the requirement of high signal-to-noise ratio is met.
The vector direction positions of the sensitive units are arranged according to the agreed angle and marked on the shell, the sensitive units are stuck on the inner wall of the double-cylinder sensitization structure through glue and are electrically connected with the preamplifier through the shielding wires, and the preamplifier is arranged in the shielding shell on the upper part, so that the interference of external radiation noise is reduced.
As shown in fig. 1 and 2: the invention comprises a polyurethane jacket 5, a metal shielding shell 6 is connected on the polyurethane jacket, a sealing ring 2 is clamped between the metal shielding shell and the polyurethane jacket, a preamplifier 1 is placed in the metal shielding shell, a platinum wire sensing element 9 is placed in a vector direction position according to a preset angle and marked on the shell, a sensing unit is attached to the inner wall of a double-cylinder sensitization structure 3 and is electrically connected with the preamplifier through a shielding wire, the shielding wire penetrates through a wire connecting hole 8, an oil outlet 7 is arranged beside the wire connecting hole, the oil outlet is used for guaranteeing bubble elimination when a hydrophone is mounted in castor oil, the double-cylinder sensitization structure is connected with a base 4 on the polyurethane jacket, and the deaerated castor oil 10 is filled between the polyurethane jacket and the double-cylinder sensitization structure.
When measured, after the sound wave penetrates through the polyurethane packaging shell and the degassed castor oil, the sound wave acts on the double-cylinder sensitization structure and the sensitization element, and the double-cylinder sensitization structure can increase the flow rate of the sound wave penetrating through the middle of the double cylinders. The platinum wires are heated to a certain temperature, at the moment, the spatial temperature field distribution of the two platinum wires is in a steady state, particle vibration is caused when sound waves act, the temperature of a first hot wire close to a sound source is reduced, a part of heat is obtained by a medium through heat transfer, and the temperature of a second hot wire is reduced, but the temperature reduction is less than that of the first hot wire. The temperature change on the hot wires enables the impedance of the hot wires to change, and particle vibration velocity information can be obtained through the impedance difference value of the two hot wires. The sensitivity of the vector hydrophone is increased due to the increased acoustic wave velocity through the sensor.
The following are specific embodiments of the present invention:
1) Structural design and manufacture of vector hydrophone
Step 1) design and research scheme for key parameters of sensitive unit
The particle vibration velocity caused in water is about 1/3000 of that in air under the same sound pressure, the sensitivity is much smaller than that of an acoustic sensor in air under the same structural parameters, but the density of water is much larger than that of air, so that more particles in unit volume spread heat, and the sensitivity and the signal-to-noise ratio of the sensor need to be improved when the sensor is applied underwater.
The MEMS vector hydrophone with double cylinder sensitization structure has measurement principle similar to anemometer and thermal flowmeter, and the sensing part consists of two parallel platinum wires etched via MEMS process and with two ends fixed onto silicon chip electrode.
In order to improve the sensitivity, a sensitive unit sensitization structure with a double-cylinder structure is designed, and the basic principle is that the particle vibration speed near the sensitive unit is increased in the incidence direction of sound waves, and the result of preliminary simulation by using Fluent software is shown in fig. 3, when the ratio R/d=3 of the cylinder radius to the space between cylinders, better sensitivity gain can be obtained, and approximately 3 times (10 dB) gain can be obtained.
Step 2) design research scheme of pre-amplifying circuit.
After the design of the sensitive unit is completed, a special pre-amplifying circuit is needed to convert the particle vibration velocity information into an electric signal, and the purposes are as follows: firstly, heat the heater to certain temperature, secondly, change the temperature difference of heater into voltage signal, consequently need select the suitable pre-amplifier circuit form of design, satisfy the temperature difference information conversion signal with the heater on the one hand, on the other hand control circuit's self-noise, satisfy the requirement of high signal to noise ratio. The measurement of the resistance difference can be realized by using a wheatstone bridge and an external subtracting circuit, but due to the precision problem of the resistance on a bridge arm, the straightness of the current flowing through two hot wires is difficult to ensure, and further, a direct current offset error is introduced, and in addition, the additional subtracting circuit also easily introduces noise.
According to the characteristics of the mirror current source circuit, the pre-amplifying circuit is designed, so that the same current is loaded to the two hot wires, and meanwhile, the resistance difference of the two hot wires is detected. The specific implementation principle is shown in fig. 4, R1 and R2 in the bridge are two hot wires of the sensor, and R3 and R4 are the functions of controlling current. The mirror current bridge is realized based on the principle of a Widlar current mirror, and the measurement of the resistance difference value change is realized through the power supply of a single power supply. The bridge is implemented with two PNP transistors, two collector resistors. Because the bridge is used for realizing signal conversion and simultaneously heating the hot wire, the hot wire is heated by current, and the current cannot be excessively large, so that the two resistors connected in series with the emitter play a role in current limiting. Assuming that r=r1=r2, Δr1= - Δr2 in a static state, the current at both ends of the bridge is I, and the bridge outputs an ac voltage signal as follows:
and 3) a structure and a process research scheme of the integrated package of the sensitive unit and the pre-amplification circuit.
When the integrated encapsulation technology of the sensitive unit and the conversion circuit is carried out, the requirements of sealing, pressure resistance, acoustic impedance matching, technology realization, impact resistance and the like are considered, firstly, a polyurethane material with the acoustic impedance coefficient close to that of seawater is selected as an encapsulation shell of the sensitive unit, castor oil with the best acoustic impedance parameter and thermal diffusion coefficient of seawater is selected as an encapsulation oil product in the shell, and degassing treatment is needed. The vector direction positions of the sensitive units are arranged according to a stipulated angle and marked on the shell, the sensitive units are attached to the inner wall of the double-cylinder sensitization structure and are electrically connected with the pre-amplifier through the shielding lead, the pre-amplifier is arranged in the shielding shell on the upper part, the interference of external radiation noise is reduced, and the voltage signals after circuit conversion are connected with the outside through the three-core shielding cable to complete the functions of power supply and signal transmission.
2) Vector hydrophone performance evaluation
And 1) testing directivity.
And carrying out directivity test of the vector hydrophone according to the national vector hydrophone calibration standard. The test is carried out at 715 national defense first-level metering stations according to a standing wave field comparison method, the test frequency range is 20 Hz-2 kHz as shown in figure 5, directivity diagrams with frequencies of 100HZ, 200HZ and 1000HZ are given below, and the directivity is 8 as shown in figures 6, 7 and 8, and the directivity is good.
Step 2) sensitivity test.
And according to the national vector hydrophone calibration standard, performing sensitivity test of the vector hydrophone. The test is carried out at 715 national defense first-level metering stations according to a standing wave field comparison method, as shown in fig. 5, the test frequency range is 20 Hz-2 kHz, as shown in fig. 9, the sensitivity curve is basically stable, the bandwidth is large, and the sensitivity is good.
Claims (2)
1. The MEMS vector hydrophone with the double-cylinder sensitization structure comprises a polyurethane outer sleeve and a metal shielding shell, wherein a sealing ring is clamped between the metal shielding shell and the polyurethane outer sleeve, a preamplifier is placed in the metal shielding shell, a sensing unit is arranged in the polyurethane outer sleeve, the vector direction position of the sensing unit is placed according to a set angle and marked outside, the sensing unit is attached to the inner wall of the double-cylinder sensitization structure and is electrically connected with the preamplifier through a shielding wire, the shielding wire penetrates through a wire connecting hole, an oil outlet is arranged beside the wire connecting hole, the double-cylinder sensitization structure is arranged on a base of the polyurethane outer sleeve, and deaerated castor oil is filled between the polyurethane outer sleeve and the double-cylinder sensitization structure;
the sensing unit adopts two parallel platinum wires, the temperature difference of the two platinum wires is used for measuring the vibration speed, and the two platinum wires are etched through an MEMS processing technology;
the double-cylinder sensitization structure is a structure capable of increasing the flow velocity of sound waves transmitted through the middle of the double cylinders and increasing the vibration velocity of particles near a sensitization unit in the incident direction of the sound waves.
2. The MEMS vector hydrophone of claim 1, wherein: the preamplifier is designed according to the characteristics of the mirror current source circuit, so that the same current is loaded to two platinum wires, and meanwhile, the resistance difference of the two platinum wires is detected.
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| CN107631791B (en) * | 2017-08-07 | 2019-09-10 | 国家电网公司 | A kind of sensor monitoring oil-immersed transformer noise |
| CN107687890A (en) * | 2017-10-20 | 2018-02-13 | 中国计量大学 | Vector microphone with horn structure |
| CN108088547A (en) * | 2017-12-20 | 2018-05-29 | 青岛理工大学 | A kind of weak target passive detection method based on small-bore two-dimensional vector hydrophone battle array |
| CN108195459A (en) * | 2017-12-20 | 2018-06-22 | 青岛理工大学 | A kind of passive target space spectrum detection method of small-bore pressure hydrophone battle array |
| CN114689166B (en) * | 2022-03-23 | 2023-04-14 | 西安交通大学 | Piezoresistive ion polymer hydrophone structure |
| CN117412218B (en) * | 2023-12-14 | 2024-05-07 | 青岛国数信息科技有限公司 | Hydrophone and manufacturing process |
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| CN102506990A (en) * | 2011-11-09 | 2012-06-20 | 中北大学 | Columnar bionic vector hydrophone with two-dimensional resonance |
| CN106289507A (en) * | 2016-08-31 | 2017-01-04 | 哈尔滨工程大学 | Low noise vector hydrophone |
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| FR1457413A (en) * | 1965-07-23 | 1966-01-24 | Trans Sonics | Fluid sensitive thermoelectric system |
| US3991624A (en) * | 1974-06-06 | 1976-11-16 | Leslie Llewellyn Rhys Davies | Wind velocity servo system |
| US4024761A (en) * | 1976-06-11 | 1977-05-24 | Kyma Corporation | Directional hot film anemometer transducer |
| US4206638A (en) * | 1978-12-06 | 1980-06-10 | Djorup Robert Sonny | Directional heat loss anemometer transducer |
| CN100443866C (en) * | 2005-09-05 | 2008-12-17 | 中国电子科技集团公司第四十九研究所 | Multi-piece integration type three-dimensional vector hydrophone apparatus |
| CN102944297B (en) * | 2012-10-23 | 2016-03-23 | 中北大学 | Based on the broadband vector hydrophone of fiberglass entrant sound cap encapsulation |
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| CN204575189U (en) * | 2015-04-21 | 2015-08-19 | 中国计量学院 | A kind of underwater sound focused transducer sound power measurement device |
| CN105300505A (en) * | 2015-10-14 | 2016-02-03 | 中国船舶重工集团公司第七一五研究所 | Wide-band high-sensitivity planar optical fiber vector hydrophone |
| CN206725084U (en) * | 2017-03-31 | 2017-12-08 | 中国计量大学 | A kind of MEMS vector hydrophone with bicylindrical sensitization structure |
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|---|---|---|---|---|
| CN102506990A (en) * | 2011-11-09 | 2012-06-20 | 中北大学 | Columnar bionic vector hydrophone with two-dimensional resonance |
| CN106289507A (en) * | 2016-08-31 | 2017-01-04 | 哈尔滨工程大学 | Low noise vector hydrophone |
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