CN206725084U - A kind of MEMS vector hydrophone with bicylindrical sensitization structure - Google Patents
A kind of MEMS vector hydrophone with bicylindrical sensitization structure Download PDFInfo
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- CN206725084U CN206725084U CN201720329522.5U CN201720329522U CN206725084U CN 206725084 U CN206725084 U CN 206725084U CN 201720329522 U CN201720329522 U CN 201720329522U CN 206725084 U CN206725084 U CN 206725084U
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- bicylindrical
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- polyurethane
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Abstract
The utility model discloses a kind of MEMS vector hydrophone with bicylindrical sensitization structure.The utility model is sandwiched between sealing ring in metal shielding and polyurethane overcoat, preamplifier is placed inside metal shielding, sensing unit is set in polyurethane overcoat, put according to the angle of setting and be marked in outside in sensing unit direction vector position, sensing unit is attached on the inwall of bicylindrical sensitization structure, it is electrically connected by shielded conductor and preamplifier, shielded conductor passes through wire connection hole, it is oil outlet beside wire connection hole, bicylindrical sensitization structure is arranged on the base of polyurethane overcoat, full of degassing castor oil among polyurethane overcoat and bicylindrical sensitization structure.The utility model improves the sensitivity of vector hydrophone with double-cylinder structure, for submerged applications environment, the structure of sensing unit and pre-amplification circuit integrative packaging is proposed, and designs the mirror image electric bridge pre-amplification circuit of tandem, improves signal to noise ratio.
Description
Technical field
The utility model relates generally to new hot wire type's MEMS vector hydrophone, more particularly to a kind of that there is bicylindrical to increase
The MEMS vector hydrophone of sensing structure.
Background technology
It is well known that sound wave is the known fluctuation that can be uniquely propagated in water medium and long distance, therefore led in Ocean Surveying
Domain-dependent basis is underwater various acoustic sensors, i.e. hydrophone.In sea warfare, sonar is that naval warfare individual is (various
Warship, ship) face, all underwater battlefields scout will using sonar as media, lack can not.Underwater acoustic transducer is as sonar system
One of important component of system, it is an important research direction of marine acoustics, the research of new underwater acoustic transducer is naval's sonar skill
One key content of art development, its research work have its own strategic significance.
A complete sound field is described, not only needs the acoustic pressure of scalar, it is also necessary to the particle vibration velocity of vector, is measured simultaneously
Scalar information and Vector Message are that acoustic pressure and particle velocity could obtain complete sound field information.Vector water used at present is listened
Device is typically made using piezoelectric ceramics, and using two pressure hydrophones, particle is obtained indirectly by calculating acoustic pressure gradient
Vibration velocity, because its principle is the multiple spot acoustic pressure scalar on the small yardstick in direct measurement space, then by the parallel connected in reverse phase of circuit or
Connect to obtain the finite-difference approximation of acoustic pressure gradient, it is not particle plane vibration speed measurement truly.Surveyed due to underwater
Amount frequency is relatively low, and common vector hydrophone volume is larger, is not easy to form array, and because the phase of two hydrophones is consistent
Property is difficult to control, and limits its application.
In Underwater Detection field, for based on far field objects detection and stealthy submarine detection, low frequency detection, high noise
Than the development trend that detection is always sonar system, and for being always engineering based on array detection, high-performance, miniaturization
Using the target of pursuit.MEMS technology is the multi-crossed disciplines research frontier to grow up in microelectric technique basis,
Turn into one of great sciemtifec and technical sphere attracted attention in the world.Vector hydrophone based on MEMS technology, volume is very small, is easy to
Miniaturization, Cheng Zhen are also more convenient.
At present, application is more widely the same ball-type vector hydrophone that shakes, same to shake ball-type vector hydrophone due to build ratio
Larger, making must drift about in the water surface when vector array is applied, it is difficult to control, and when installing ball-type array element, it is necessary to
Multiple supports are fixed, and technics comparing is complicated；Also Northcentral University based on bionic MEMS piezoresistive vector hydrophone,
It is the principle for imitating the side line machinery Sensor cell (sound hair cell) of fish to perceive water sport, proposes a kind of artificial hair cell vector
The structure design of hydrophone, when sound wave acts on central cilium (firm plastic cartridge is made), firm plastics through package casing
Cylinder with its residing for medium particle with shaking, so as to which the acoustical signal experienced is passed into piezoresistance sensitivity unit, producing beam should
Power changes, and the resistance value for being implanted into piezo-resistance thereon just changes, and is examined by plain conductor and corresponding circuit signal
Survey unit, you can to realize that the vector of underwater signal detects.Hot wire type's MEMS vector hydrophone and bionic MEMS pressure drags
Formula vector hydrophone principle is different, and bionical cilium is difficult to make.
Someone is applied in air hot wire type MEMS vector sensors, and has delivered patent and describe sensing element and added
Work technique.But depressed in unison, caused particle vibration velocity is much smaller than in atmosphere, under the identical structural parameters of remolding sensitivity in water
Sonic transducer in air is much smaller, and the density of water is again bigger than air more, therefore has more particle propagations in unit volume
Heat, therefore when applying under water, need to study relative in air in underwater environment, how its sensitivity changes, and how to carry
The sensitivity of high sensor and signal to noise ratio become the key of design.
The content of the invention
The purpose of this utility model is to provide a kind of MEMS vector hydrophone with bicylindrical sensitization structure, to solve
The problem of being proposed in above-mentioned background.
To achieve the above object, the utility model provides following technical scheme：
The utility model includes polyurethane overcoat, metal shielding, is sandwiched between in metal shielding and polyurethane overcoat
Sealing ring, metal shielding the inside place preamplifier, sensing unit, sensing unit direction vector are set in polyurethane overcoat
Position is put according to the angle of setting and is marked in outside, and sensing unit is attached on the inwall of bicylindrical sensitization structure, is led to
Cross shielded conductor to be electrically connected with preamplifier, shielded conductor passes through wire connection hole, is beside wire connection hole
Oilhole, bicylindrical sensitization structure are arranged on the base of polyurethane overcoat, are filled among polyurethane overcoat and bicylindrical sensitization structure
Completely deaerate castor oil.
Furtherly, described sensing unit uses two platinum filaments be arrangeding in parallel, and the temperature difference on two platinum filaments is used for
The measurement of vibration velocity, two platinum filaments are etched by MEMS processing technologys and completed.
Furtherly, described preamplifier is designed according to the characteristic of image current source circuit, is realized to two
While individual platinum filament loading same current, the resistance for detecting two platinum filaments is poor.
Compared with background technology, the utility model has an advantageous effect in that：
The utility model improves the sensitivity of vector hydrophone with double-cylinder structure, and is directed to submerged applications environment,
The structure and technique of sensing unit and pre-amplification circuit integrative packaging are proposed, and before designing the mirror image electric bridge of tandem
Amplification circuit structure is put, improves signal to noise ratio.
Brief description of the drawings
Fig. 1 is X-direction schematic diagram of the present utility model：
Fig. 2 is Y direction schematic diagram of the present utility model；
Fig. 3 is the result figure that Fluent softwares tentatively emulate；
Fig. 4 is pre-amplification circuit structure chart；
Fig. 5 is stationary field comparison method test chart；
Fig. 6 is the directivity pattern under frequency is 100HZ；
Fig. 7 is the directivity pattern under frequency is 200HZ；
Fig. 8 is the directivity pattern under frequency is 1000HZ；
Fig. 9 is sensitivity test figure.
In figure：1st, preamplifier, 2, sealing ring, 3, bicylindrical sensitization structure, 4, base, 5, polyurethane overcoat, 6, gold
Belong to shielding case, 7, oil outlet, 8, wire connection hole, 9, platinum filament sensing element, 10, degassing castor oil.
Embodiment
The utility model is further described below in conjunction with the accompanying drawings.
The utility model is to carry out the measurement of vibration velocity by the temperature difference on two heated filaments.Design pre-amplification circuit,
According to the characteristic of image current source circuit, realize that the resistance for detecting two heated filaments is poor while loading same current to two heated filaments.
In order to improve the accuracy of the sensitivity of vector hydrophone and measurement result, propose to improve vector using bicylindrical sensitization structure
The sensitivity of hydrophone.Sensing unit and pre-amplification circuit integrative packaging are finally carried out, is connect with acoustic impedance coefficient with seawater
Package casing of the near polyurethane material as sensing unit, with the castor best with seawater acoustic impedance parameter and thermal diffusion coefficient
Sesame oil carries out degassing process as embedding oil product.
Selection designs suitable pre-amplification circuit form, on the one hand meets the temperature difference information conversion signal of heated filament,
The self noise of another aspect control circuit, meet the requirement of high s/n ratio.
Sensing unit direction vector position is put according to the angle of agreement and is marked in shell, sensing unit passes through
Sticker is electrically connected on the inwall of bicylindrical sensitization structure by shielded conductor and preamplifier, preamplifier
Place in the shield shell with top, reduce the interference of external radiated noise.
As depicted in figs. 1 and 2：The utility model includes a polyurethane overcoat 5, metal shielding 6 is connected above, in gold
Category shielding case is sandwiched between sealing ring 2 with polyurethane overcoat, and preamplifier 1, the sensitive member of platinum filament are placed inside metal shielding
The direction vector position of part 9 is put according to the angle of agreement and is marked in shell, and sensing unit is attached to bicylindrical sensitization structure 3
Inwall on, be electrically connected by shielded conductor and preamplifier, shielded conductor passes through wire connection hole 8, and wire connects
It is oil outlet 7 to connect beside hole, and oil outlet is to ensure that removal of bubbles when hydrophone installation is carried out in castor oil, double circles
The base 4 put outside the upper polyurethane of post sensitization structure connection, polyurethane overcoat and bicylindrical sensitization structure centre are full of degassing castor
Sesame oil 10.
During measurement, after sound wave passes through polyurethane sealing casing and degassed castor oil, bicylindrical enhanced sensitivity is applied to
In structure and sensing element, bicylindrical, which once increased structure, can increase acoustic wave flow rate among through bicylindrical.Platinum filament is heated to one
Fixed temperature, now the space temperature field distribution where two platinum filaments are in stable state, particle vibration can be caused when sound wave effect,
The temperature on first heated filament close to sound source is reduced, medium is obtained a part of heat by heat transfer, on second heated filament
Temperature can also reduce, but compared to first temperature reduce lack.Temperature change on heated filament causes the impedance of heated filament to occur
Change, particle vibration velocity information can be obtained by the impedance differences of two heated filaments.Because the acoustic wave flow rate for flowing through sensing element increases
Greatly, so the sensitivity of vector hydrophone can be improved.
It is specific embodiment of the utility model below：
1) structure design of vector hydrophone and making
Step 1) sensing unit key parameter design studies scheme
Under same sound pressure, caused particle vibration velocity is about 1/3000 in air in water, and the identical structure of remolding sensitivity is joined
Sonic transducer in several lower air is much smaller, but because the density of water is again bigger than air more, therefore have in unit volume more
Particle propagation heat, therefore under water apply when, it is necessary to improve sensitivity and the signal to noise ratio of sensor.
A kind of MEMS vector hydrophone with bicylindrical sensitization structure, measuring principle are similar to airspeedometer and heat type flow quantity
Meter, transducing part are made up of two parallel platinum wires, and two silk threads are etched by MEMS processing technologys and completed, and two ends are fixed on silicon chip
On electrode.
In order to improve sensitivity, a kind of sensing unit sensitization structure of double-cylinder structure is designed, its general principle is in sound
Ripple incident direction, increase sensing unit nearby Particle Vibration Velocity, the result tentatively emulated with Fluent softwares as shown in figure 3,
As the ratio between spacing R/d=3 between cylindrical radius and cylinder, preferable sensitivity gain can be obtained, can substantially obtain 3 times
The gain of (10dB).
Step 2) Pre-amplifier Circuit Design research approach.
, it is necessary to there is special pre-amplification circuit that particle vibration velocity information is converted into electricity after sensing unit design is completed
Signal, its purpose have at 2 points：First, heated filament is heated to certain temperature, second, the temperature difference of heated filament is converted into voltage signal,
Therefore need to select to design suitable pre-amplification circuit form, on the one hand meet the temperature difference information conversion signal of heated filament,
The self noise of another aspect control circuit, meet the requirement of high s/n ratio.Generally using Wheatstone bridge plus outside subtraction
Circuit can realize the measurement of resistance difference, but due to the precision problem of resistance on bridge arm, it is difficult to ensure that flowing through the electric current on two heated filaments
It is one straightforward, and then introduce DC maladjustment error, extra subtraction circuit is also readily incorporated noise in addition.
The utility model designs pre-amplification circuit, realizes and two heated filaments are added according to the characteristic of image current source circuit
While carrying same current, the resistance for detecting two heated filaments is poor.Principle is implemented as shown in figure 4, R1 and R2 is sensing in electric bridge
Two heated filaments of device, R3 and R4 are the effects of control electric current.Image current electric bridge is realized based on Widlar current mirror principles,
Powered by single supply and realize the measurement changed to resistance difference.Electric bridge passes through two PNP transistors, two collector resistance realities
Existing.Because electric bridge to heated filament, it is necessary to heat while signal conversion is realized, by electric current heating heated filament, electric current is not
Can be excessive, therefore two resistance of emitter stage series connection play a part of current limliting.Assuming that when static, R=R1=R2, Δ R1=- Δs
R2, the both ends electric current of electric bridge is I, and electric bridge output AC voltage signal is：
The structure and technical study scheme of step 3) sensing unit and pre-amplification circuit integrative packaging.
Need to consider when carrying out sensing unit and change-over circuit integrated encapsulation technique sealing, pressure-resistant, acoustic impedance match,
The requirement such as technique, shock resistance is realized, selects acoustic impedance coefficient with the close polyurethane material of seawater as sensing unit first
Package casing, the selection castor oil best with seawater acoustic impedance parameter and thermal diffusion coefficient is as embedding oil in the shell
Product, and need to be de-gassed processing.Sensing unit direction vector position is put according to the angle of agreement and marked in shell
Note, sensing unit is attached on the inwall of bicylindrical sensitization structure, is electrically connected by shielded conductor and preamplifier, preceding
Put amplifier to be positioned in the shield shell on top, reduce the interference of external radiated noise, the voltage letter after circuit conversion
Number by three-core shielding cable with the external world be connected, complete power and signal transfer functions.
2) vector hydrophone performance evaluation
Step 1) directive property is tested.
According to national vector hydrophone calibrating standard, the directive property test of vector hydrophone is carried out.Test is in 715 national defence
One-level measuring station is tested, and is tested according to stationary field comparison method, as shown in figure 5, test frequency scope is 20Hz~2kHz, below
Frequency is provided as the directivity pattern under 100HZ, 200HZ, 1000HZ, is such as schemed, 6, shown in Fig. 7, Fig. 8, directive property is in ' 8 ' words, table
Show that directive property is good.
Step 2) sensitivity test.
According to national vector hydrophone calibrating standard, the sensitivity test of vector hydrophone is carried out.Test is in 715 national defence
One-level measuring station is tested, and is tested according to stationary field comparison method, such as Fig. 5, test frequency scope is 20Hz~2kHz, such as following table：
As shown in figure 9, sensitivity curve is substantially steady, bandwidth is larger, and sensitivity is good.
Claims (2)
1. a kind of MEMS vector hydrophone with bicylindrical sensitization structure, including polyurethane overcoat, metal shielding, in metal
Shielding case is sandwiched between sealing ring with polyurethane overcoat, and preamplifier is placed inside metal shielding, is set in polyurethane overcoat
Sensing unit is put, sensing unit direction vector position is put according to the angle of setting and is marked in outside, sensing unit patch
On the inwall of bicylindrical sensitization structure, it is electrically connected by shielded conductor and preamplifier, shielded conductor is passed through and led
Line connecting hole, wire connection hole side is oil outlet, and bicylindrical sensitization structure is arranged on the base of polyurethane overcoat, polyurethane
Full of degassing castor oil among overcoat and bicylindrical sensitization structure.
2. MEMS vector hydrophone according to claim 1, it is characterised in that：Described sensing unit is parallel using two
The platinum filament of setting, the temperature difference on two platinum filaments are used for the measurement of vibration velocity, and two platinum filaments, which pass through MEMS processing technologys etching, to be completed.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106768263A (en) * | 2017-03-31 | 2017-05-31 | 中国计量大学 | MEMS vector hydrophone with bicylindrical sensitization structure |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106768263A (en) * | 2017-03-31 | 2017-05-31 | 中国计量大学 | MEMS vector hydrophone with bicylindrical sensitization structure |
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| GR01 | Patent grant | ||
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| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20171208 Effective date of abandoning: 20230428 |
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| AV01 | Patent right actively abandoned |
Granted publication date: 20171208 Effective date of abandoning: 20230428 |