CN106707561A - Graphene intermediate infrared tunable waveguide grating - Google Patents
Graphene intermediate infrared tunable waveguide grating Download PDFInfo
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- CN106707561A CN106707561A CN201611258501.5A CN201611258501A CN106707561A CN 106707561 A CN106707561 A CN 106707561A CN 201611258501 A CN201611258501 A CN 201611258501A CN 106707561 A CN106707561 A CN 106707561A
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/011—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour in optical waveguides, not otherwise provided for in this subclass
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/0009—Materials therefor
- G02F1/0018—Electro-optical materials
Abstract
The invention discloses a graphene intermediate infrared tunable waveguide grating, and belongs to the technical field of photo-electronic devices. The graphene intermediate infrared tunable waveguide grating comprises a substrate, a chalcogenide glass ridge waveguide is arranged on the substrate and comprises a ridge area lower half waveguide and a rectangular ridge area upper half waveguide, the ridge area lower half waveguide is covered with a clad layer, a first isolation medium layer, a first graphene layer, a third isolation medium layer, a second graphene layer and a fifth isolation medium layer are sequentially arranged on the ridge area lower half waveguide from bottom to top, the rectangular ridge area upper half waveguide is arranged on the fifth isolation medium layer, both the first graphene layer and the second graphene layer are of fork electrode structures and led out by electrodes, and forks of the fork electrode structures are periodically arranged at equal intervals. The graphene intermediate infrared tunable waveguide grating aims to solve the problems of narrow tunable wavelength range, slow response and the like of a current intermediate infrared grating, the waveguide grating with the same structure has different selectivity for light waves under different electric field conditions, and the reflection wavelength of the grating is changed.
Description
Technical field
The invention belongs to tunable IR Waveguide in optoelectronic device technology field, more particularly to a kind of Graphene
Grid.
Background technology
Grating refers to that space structure or optical parameter (such as refractive index) distribution have periodically variable diffraction system, can be with
Light reflected, is reflected, being interfered and diffraction, being played an important role in the regulation and control to optical signal, in fiber optic communication, grating is existed
Semiconductor laser, waveguide input/output coupler, beam splitter, polarization separator, wave filter, light top and bottom path wave filter and sensing
Etc. aspect have important application.
Traditional grating is that, by being lithographically formed cutting, its structure and cycle keep after preparing grating success in grating surface
It is constant, because the resonance wavelength of grating is only related to the cycle of grating and effective refractive index, so traditional permanent grating is only
Light in the resonance wavelength of a certain fixation nearby very low range can be acted on, can only in the systems such as optic communication wavelength-division multiplex
Using a small amount of channel, the transmittability of communication data is reduced.In order to meet the growth requirement of high speed wide-band communication, resonance wave
The research of adjustable grating long turns into inexorable trend.
At present, most of tunable wave length gratings are all the thermo-optic effect and carrier dispersion effect for utilizing silicon, but silicon
Thermo-optic effect cause that the response speed of optical signal is slow, carrier dispersion effect is weaker cause grating resonance wavelength change compared with
It is small, and the variations in refractive index of silicon can produce the deficiencies such as larger loss to light so that the direct thermo-optic effect and load of utilization silicon
The adjustable grating device performance for flowing sub- effect of dispersion and being made is not good.Due to Graphene refractive index can by extra electric field come
Regulation and control, and the response speed of Graphene is sufficiently fast, therefore it is tunable to make Rapid wavelength using this characteristic of Graphene
Grating, by the effective refractive index for changing the refractive index of Graphene to change grating, so that the resonance wavelength of grating occurs
Change, increase the tunable wavelength bandwidth of grating.
Middle-infrared band (2-20mm) is that an important wave band in light is penetrated in sunshine linchpin, and it has in each sciemtifec and technical sphere
Highly important application, including sensing, environmental monitoring, biomedical applications, thermal imaging, Military Application etc..Although in it is infrared
Light has huge application potential in every field, but integrated photonics are in progress but slowly, for many years in middle-infrared band
To be faced with huge difficulty and challenge always, much not as good as the research and development of near infrared communication wave band.
Chalcogenide glass refers to S, based on Se, Te and to introduce the glass that a certain amount of other metalloid elements are formed, it
With it is excellent it is saturating in infrared and splendid athermal performance (see document Li L, Zou Y, Musgraves J D, et
al.Chalcogenide glass planar photonics:from mid-IR sensing to 3-D flexible
substrate integration[J].Proceedings of SPIE-The International Society for
Optical Engineering,2013,8600(4):86000K-86000K-6).Traditional integrated optical material, it is infrared in
Field using when be restricted, and chalcogenide glass can overcome the limitation of this respect.Chalcogenide glass has more long saturating infrared section
Only wavelength, can cover 3 atmospheric windows.Additionally, chalcogenide glass is used as amorphous material, it is not necessary to strict Lattice Matching,
Can be integrated with any backing material.This is that it has very wide range of application in integrated optics field.
The content of the invention
The present invention is narrow in order to solve grating tunable wave-length coverage present in prior art, the problems such as response speed is slow,
And propose one kind be based on chalcogenide glass fiber waveguide-Graphene it is tunable in infrared waveguide optical grating, make the waveguide of same structure
Grating has different selectivity to light wave under different current field conditions, changes the reflection wavelength of grating.
In order to solve the above technical problems, the technical solution adopted in the present invention is：
Tunable waveguide optical grating of the one kind based on chalcogenide glass fiber waveguide-Graphene, including substrate, set on the substrate
Chalcogenide glass ridge optical waveguide is equipped with, chalcogenide glass ridge optical waveguide includes the latter half waveguide of ridge area and ridge area top half square
Shape waveguide, ridge area the latter half waveguide is coated with covering, be disposed with from bottom to up in the latter half waveguide of ridge area first every
From dielectric layer, the first graphene layer, the 3rd spacer medium layer, the second graphene layer, the 5th spacer medium layer, ridge area top half
Rectangular waveguide is arranged on the 5th spacer medium layer；First graphene layer and the second graphene layer are interdigitated electrode structure, and
Drawn by electrode, the interdigital equidistant cycle of interdigitated electrode structure is set.
In above-mentioned technical proposal, first graphene layer and the second graphene layer are single-layer graphene.
In above-mentioned technical proposal, interdigitated electrode structure is provided with interdigital, interdigital along waveguide optical transmission direction period profile.
In above-mentioned technical proposal, chalcogenide glass ridge optical waveguide by deoxygenation outside group vi element as anion other
The compound glass of metal and nonmetalloid is made.
In above-mentioned technical proposal, chalcogenide glass ridge optical waveguide is by As2Se3、As2S3Or Ge23Sb7S70It is made.
In above-mentioned technical proposal,The first spacer medium layer, the 3rd spacer medium layer, the 5th spacer medium layer are absolutely Edge layer.
In above-mentioned technical proposal, the insulating barrier is Si oxide, silicon nitrogen oxides or boron nitride.
In above-mentioned technical proposal, the material of the electrode is gold, silver, platinum or copper.
In above-mentioned technical proposal, the second spacer medium is additionally provided between the first spacer medium layer and the 3rd spacer medium layer
Layer, the second spacer medium layer is arranged side by side in same layer with the first graphene layer.
In above-mentioned technical proposal, the 4th spacer medium is additionally provided between the 3rd spacer medium layer and the 5th spacer medium layer
Layer, the 4th spacer medium layer is arranged side by side in same layer with the second graphene layer.
Compared with prior art, the invention has the advantages that：
1st, Graphene use so that the present invention have tunable wavelength wide ranges, to optical signal fast response time, sulphur system
Glass material use so that the present invention be easy to reduce mid-infrared light loss, with reference to said structure set so that this hair
It is bright it is tunable in infrared waveguide optical grating will with advantages such as tunable wavelength wide ranges, fast response times, relative to it is traditional forever
Long property grating, with grating resonance wavelength it is tunable the characteristics of.
2nd, reconciled because the refractive index of Graphene is automatically controlled fast response time the features such as, relative to directly utilizing thermo-optic effect
The waveguide optical grating of making, with fast response time, the advantage of tunable wavelength wide ranges.
3rd, it is covered inFirst electrode and second electrodeFirst graphene layer and the second graphene layer in sandwich layer ridge ridge area,It is logical Cross the extra electric field on electrode (first electrode and second electrode)So that the refractive index of Graphene becomes with the change of extra electric field
Change, so as in whole waveguide, make the waveguides sections for being periodically coated with Graphene (refer to that Graphene interdigital electrode is projected in waveguide
On part waveguide) effective refractive index also change with the change of electric field, do not have Graphene cover partial waveguide folding
Penetrate rate and keep constant, therefore in the waveguide along the direction of optical transport so that the effective refractive index of waveguide with extra electric field change
It is in cyclically-varying to change, formation waveguide optical grating, and cycle of the resonance wavelength of waveguide optical grating with waveguide optical grating and effectively refraction
Rate is relevant, and not changing wave-guide grating structure and on the premise of the cycle, the resonance wavelength of the waveguide optical grating is with being added to graphite
The change of electric field on alkene and change, so as to form tunable waveguide optical grating.
Brief description of the drawings
Fig. 1 is the structural representation of tunable IR waveguide optical grating in Graphene of the invention；
Fig. 2 is the schematic cross-section of tunable IR waveguide optical grating in Graphene of the invention；
Fig. 3 is graphene layer schematic diagram in tunable IR wave-guide grating structure in Graphene of the invention；
Fig. 4 is the graphene layer schematic top plan view of tunable IR waveguide optical grating in Graphene of the invention.
Marked in figure：1- substrates, the latter half waveguide of 2- ridges area, 3- coverings, the spacer mediums of 5- first layer, the graphite of 6- first
Alkene layer, the spacer mediums of 7- second layer, the spacer mediums of 8- the 3rd layer, the graphene layers of 9- second, the spacer mediums of 10- the 4th layer, 11- the
Five spacer mediums layer, 12- electrodes, 14- ridges area top half rectangular waveguide, 15- is interdigital.
Specific embodiment
With reference to embodiment, the invention will be further described, and described embodiment is only a part of the invention
Embodiment, is not whole embodiments.Based on the embodiment in the present invention, one of ordinary skill in the art is not making
Other embodiments used obtained under the premise of creative work, belong to protection scope of the present invention.
With reference to 1~Fig. 4 of accompanying drawing, tunable IR waveguide optical grating in Graphene of the invention, including substrate 1, the substrate
Upper is chalcogenide glass fiber waveguide, and chalcogenide glass ridge optical waveguide is comprising sandwich layer and is covered in sandwich layer peripheryCovering 3.
The sandwich layer is ridge optical waveguide, and the ridge optical waveguide is divided into ridge area the latter half waveguide 2 and the ridge area first half
Point rectangular waveguide 14, has separation layer and graphene layer between ridge area the latter half waveguide 2 and ridge area top half waveguide 14,
Ridge area the latter half waveguide top is coated with the first spacer medium floor 5, the first graphene layer 6, the 3rd isolation successively from bottom to up
Dielectric layer 8, the second graphene layer 9 and the 5th spacer medium layer 11.Between first spacer medium layer 5 and the 3rd spacer medium layer 8
The second spacer medium layer 7 is additionally provided with, the second spacer medium layer 7 and the first graphene layer 6 are arranged side by side in same layer；3rd isolation
The 4th spacer medium layer 10, the 4th spacer medium layer 10 and the second stone are additionally provided between the spacer medium of dielectric layer 8 and the 5th layer 11
Black alkene layer 9 is arranged side by side in same layer.
First graphene layer and the second graphene layer extend out from both sides and are connected with electrode 12 (including respectively
One electrode and second electrode).
Described optical waveguide core layer is ridge waveguide, and core material is chalcogenide glass material.
The chalcogenide glass material is other metals and nonmetalloid of the group vi element outside deoxygenation as anion
Compound glass, can be As2Se3、As2S3、Ge23Sb7S70Deng material.
The material of first graphene layer and the second graphene layer is single-layer graphene.
The single-layer graphene, along waveguide optical transmission direction period profile in the middle of the ridge area of ridge optical waveguide.
The substrate layer and clad material are the silica of low-refraction.
The first spacer medium layer the 5, second spacer medium layer the 7, the 3rd spacer medium the 8, the 4th spacer medium of layer layer 10
It is insulating materials with the material of the 5th spacer medium layer 11；The insulating materials is the nitridation of Si oxide, silicon nitrogen oxides or boron
Thing.
The material of the first electrode and second electrode is gold, silver, platinum or copper.
Graphene is the two-dimentional new material being made up of carbon atom, is the semiconductor of typical zero band gap, by sp2 hydridization shapes
Into plane six-membered ring structure, pi-electron forms the big π keys of delocalization at grade.It is only that this unique structure has Graphene
One without two property, and used as nano material most thin in the world, Graphene is almost fully transparent, only absorbs 2.3% light,
Thermal conductivity factor reaches 5300w/m.K, higher than diamond and CNT, and electron mobility reaches the 1/300 of the light velocity at room temperature,
Resistivity only has 10-6Ω ㎝, it is lower than copper and silver-colored resistivity, it is the material of resistivity minimum in the world, but there is the power of superelevation
Performance is learned, 1060GPa is reached, the present age most firm material is certified as, meanwhile, an additional electric field on Graphene can be with
Change the real part and imaginary part of its refractive index, therefore Graphene can be applied to chalcogenide glass optical device, be made stable performance, fast
Speed response and the chalcogenide glass optical device acted on broadband light.
Chalcogenide glass is that, with S, Se, one or more elements in Te are glass ingredient and the unit weaker with other electronegativity
Plain (such as As, Sb, Ge and Si etc.) forms the unorganic glass of covalent bond.Chalcogenide glass has transmitted spectrum wider, and it passes through model
Enclose and cover near infrared communication wave band, spectral region wide makes chalcogenide glass fiber waveguide can be applied to optical communication field.
The operation principle of tunable IR waveguide optical grating is in Graphene of the invention：The material of ridge optical waveguide layer is sulphur
It is glass material, has to 1.55~3um band spectrums than relatively low waveguide loss, grapheme material is a kind of absorption of wide spectrum
Material, the characteristic of its optic response can be changed by controlling both end voltage.The process of implementing is to be covered in waveguide core
First graphene layer 6 and the second graphene layer 9 in roof type ridge area, by the extra electric field on electrode 12 so that Graphene
Refractive index changes with the change of extra electric field, so as in whole waveguide, make periodicity be coated with the waveguides sections of Graphene
Effective refractive index also change with the change of electric field, do not have Graphene cover partial waveguide refractive index keep it is constant, because
This is in the waveguide along the direction of optical transport so that the effective refractive index of waveguide is in cyclically-varying with the change of extra electric field,
Waveguide optical grating is formed, and the resonance wavelength of waveguide optical grating is only relevant with the cycle of waveguide optical grating and effective refractive index, is not changing
Wave-guide grating structure and on the premise of the cycle, the resonance wavelength of the waveguide optical grating with being added to the change of electric field on Graphene and
Change, so as to form tunable waveguide optical grating.
With reference to accompanying drawing 1 and accompanying drawing 2, the material of the substrate 1 of the present embodiment chalcogenide glass light waveguide raster is silica,
The ridge sector width that sandwich layer ridge waveguide is set in silicon dioxide substrates is 0.6 μm, a height of 0.25 μm of ridge, in ridge area lower half partial wave
Lead and thick the first spacer medium layers 5 of 5nm are equipped with 2, material is hexagonal boron nitride (hBN), first graphene layer 6 and the
Two graphene layers 9 are single-layer graphene, are laid on respectively on the first spacer medium layer 5 and the 3rd spacer medium layer 8, described the
Two spacer mediums layer, the 3rd spacer medium layer, the 4th spacer medium layer, the 5th spacer medium layer are six sides that thickness is 5nm
Boron nitride (hBN), the graphene layer 9 of first graphene layer 6 and second respectively from both sides extend out connection first electrode and
Second electrode.
Graphene use so that the present invention have tunable wavelength wide ranges, to optical signal fast response time, sulphur system glass
Glass material is used so that the present invention is easy to reduce the loss of mid-infrared light, therefore with Graphene and chalcogenide glass material system
Infrared waveguide optical grating will be excellent with tunable wavelength wide ranges, fast response time etc. during the Graphene chalcogenide glass of work is tunable
Gesture.
Claims (10)
1. tunable IR waveguide optical grating in a kind of Graphene, including substrate (1), it is characterised in that set on the substrate (1)
There is chalcogenide glass ridge optical waveguide, chalcogenide glass ridge optical waveguide is led including ridge area the latter half waveguide (2) and the ridge area first half
Divide rectangular waveguide (14), ridge area the latter half waveguide (2) is coated with covering (3), in ridge area the latter half waveguide (2) from bottom to up
It is disposed with the first spacer medium layer (5), the first graphene layer (6), the 3rd spacer medium layer (8), the second graphene layer
(9), the 5th spacer medium layer (11), ridge area top half rectangular waveguide (14) is arranged on the 5th spacer medium floor (11)；The
One graphene layer (6) is interdigitated electrode structure with the second graphene layer (9), and is drawn by electrode, interdigitated electrode structure
The interdigital equidistant cycle is set.
2. tunable IR waveguide optical grating in a kind of Graphene according to claim 1, it is characterised in that first stone
Black alkene layer (6) and the second graphene layer (9) are single-layer graphene.
3. tunable IR waveguide optical grating in a kind of Graphene according to claim 2, it is characterised in that interdigital electrode knot
Structure is provided with interdigital (15), and interdigital (15) are along waveguide optical transmission direction period profile.
4. tunable IR waveguide optical grating in a kind of Graphene according to claim 1, it is characterised in that sulphur system glass
Glass ridge optical waveguide by deoxygenation outside group vi element as other metals of anion and the compound glass of nonmetalloid
It is made.
5. tunable IR waveguide optical grating in a kind of Graphene according to claim 4, it is characterised in that sulphur system glass
Glass ridge optical waveguide is by As2Se3、As2S3Or Ge23Sb7S70It is made.
6. tunable IR waveguide optical grating in a kind of Graphene according to claim 1, it is characterised in that described first every
Insulating barrier is from dielectric layer (5), the 3rd spacer medium layer (8), five spacer mediums layer (11).
7. tunable IR waveguide optical grating in a kind of Graphene according to claim 6, it is characterised in that the insulating barrier
It is Si oxide, silicon nitrogen oxides or boron nitride.
8. tunable IR waveguide optical grating in a kind of Graphene according to claim 1, it is characterised in that the electrode
(12) material is gold, silver, platinum or copper.
9. tunable IR waveguide optical grating in a kind of Graphene according to any one of claim 1~8, it is characterised in that
The second spacer medium layer (7), the second spacer medium are additionally provided between first spacer medium layer (5) and the 3rd spacer medium layer (8)
Layer (7) is arranged side by side in same layer with the first graphene layer (6).
10. tunable IR waveguide optical grating in a kind of Graphene according to claim 9, it is characterised in that the 3rd isolation
The 4th spacer medium layer (10), the 4th spacer medium layer (10) are additionally provided between dielectric layer (8) and the 5th spacer medium layer (11)
It is arranged side by side in same layer with the second graphene layer (9).
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| CN107203053A (en) * | 2017-06-12 | 2017-09-26 | 电子科技大学 | A kind of adjustable light wave-filter based on graphene silicon waveguide |
| CN107490825A (en) * | 2017-09-13 | 2017-12-19 | 吉林大学 | Half hanging arsenones slab waveguide with superelevation stimulated Brillouin scattering gain and preparation method thereof |
| CN109031520A (en) * | 2018-08-03 | 2018-12-18 | 广州米德红外科技有限公司 | A kind of sulphur system microballoon on piece coupling device of high stability |
| CN111367098A (en) * | 2020-05-27 | 2020-07-03 | 电子科技大学 | Electro-optic phase shifter based on graphene periodic structure |
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Application publication date: 20170524 |