CN107203053A - A kind of adjustable light wave-filter based on graphene silicon waveguide - Google Patents
A kind of adjustable light wave-filter based on graphene silicon waveguide Download PDFInfo
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- CN107203053A CN107203053A CN201710436426.5A CN201710436426A CN107203053A CN 107203053 A CN107203053 A CN 107203053A CN 201710436426 A CN201710436426 A CN 201710436426A CN 107203053 A CN107203053 A CN 107203053A
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/0009—Materials therefor
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/011—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour in optical waveguides, not otherwise provided for in this subclass
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/011—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour in optical waveguides, not otherwise provided for in this subclass
- G02F1/0113—Glass-based, e.g. silica-based, optical waveguides
Abstract
The invention discloses a kind of adjustable light wave-filter based on graphene silicon waveguide, the adjustable light wave-filter includes substrate, strip optical waveguide, the first covering, the second covering are provided with the basalis, strip optical waveguide includes the first strip optical waveguide and the second strip optical waveguide.The first spacer medium layer, the first graphene layer, the second spacer medium layer, the second graphene layer, the 3rd spacer medium layer are sequentially provided between first strip optical waveguide and the second strip optical waveguide.Electrode is equipped with first graphene layer and the second graphene layer.First graphene layer and the second graphene layer are interdigital structure, and the interdigital equidistant cycle of interdigital structure is set.This programme can improve the adjustable harmonic wave narrow range of current optical filter, and tuning speed is slow, and physical dimension is larger the problems such as be not easy to integrated, and the electric tunable characteristic based on graphene realizes the flexible control of waveguide transmission using applied voltage.
Description
Technical field
The invention belongs to optoelectronic device technology field, and in particular to a kind of tunable optical filter based on graphene silicon waveguide
Ripple device.
Background technology
Tunable optical optical filter is a kind of wavelength selector, and required wavelength can be selected from numerous wavelength,
Simultaneously controllable adjustable wave filter external condition come change wave filter output wavelength.Wavelength can be used in fiber optic communication
In terms of selection, the noise filtering of image intensifer, gain balance, light multiplexing and demultiplexing, since wavelength-division multiplex (WDM) technology exists
Application in fiber optic communication, drastically increases the transmission rate and capacity of fiber optic communication, particularly in light multiplexing and demultiplexing
Part, adjustable light wave-filter is indispensable Primary Component, for selecting specific optical wavelength signal.
With the fast development of wdm system, the tunable range of adjustable light wave-filter is greater than 100 nanometers, tune
Humorous rate requirement is nanosecond.Current scientists have pointed out the scheme of many adjustable light wave-filters, such as tunable waveguide battle array
Arrange (AWG) wave filter, fiber grating (FBG) wave filter, acousto-optic tunable filter (AOTF), Fabry-Perot (FP) filtering
Device, but most of AWG wave filters are that, as fixed component, the tunable range of FBG wave filters is small, the size of AOTF wave filters
Greatly, price is high and to Polarization-Sensitive, and the adjustable light wave-filter of present commercialization is based on FP wave filters, although with tuning model
The advantages of wide, insertion loss is low, price is relatively low is enclosed, but uses the relatively slow (millisecond of modulation rate of the FP wave filters of machinery modulation
Level), device size is larger, more sensitive to temperature and vibration, and device stability is poor.
Graphene is that it zero by a kind of tightly packed carbonaceous new material into bi-dimensional cellular shape lattice structure of single layer of carbon atom
Band gap band structure, makes it have the optic response spectrum of ultra wide band, its high carrier mobility so that graphene device has
Have the high speed of response, in addition, graphene also have good pliability and stability, with silicon-based semiconductor process compatible and
The adjustable characteristic of electricity, the electric tunable characteristic of graphene is widely used in Novel Optoelectronic Device, tuned using applied voltage
The refractive index of graphene, so as to change the performance of device.
Silicon is as a kind of novel semiconductor material, and the advantages of its material is abundant, compatible with CMOS technology, stability is high makes
It turns into most basic and most important material in integrated circuit industry, and major part semiconductor devices and integrated circuit are all at present
It is made of the silicon polished and epitaxial wafer of high-purity high-quality, with the continuous improvement of integrated circuit integrated level, it is desirable to obtain chi
Very little smaller, price is relatively low, quick response silicon substrate new device.
The content of the invention
The present invention is narrow in order to solve optical filter tunable range present in prior art, and tuning speed is slow, and size is big
The problems such as being not easy to integrated, and a kind of adjustable light wave-filter based on graphene silicon waveguide proposed.
In order to solve the above technical problems, the technical solution adopted in the present invention is：
It is provided with a kind of adjustable light wave-filter based on graphene silicon waveguide, including U-shaped substrate, the U-lag of U-shaped substrate
Be embedded with the middle of strip optical waveguide 2, strip optical waveguide 2 graphene layer at least one layer of graphene layer, strip optical waveguide for etc.
The interdigital structure that pitch period is set；
Graphene layer extends to U-shaped substrate two ends upper surface, between graphene layer and graphene layer, graphene layer and U-shaped
Spacer medium layer is equipped between substrate, between graphene layer and strip optical waveguide 2, electrode is equipped with layer per layer graphene,
Institute's making alive is respectively formed voltage circuit on each electrode.
On a kind of described adjustable light wave-filter based on graphene silicon waveguide, the adjacent spacer medium layer of graphene layer
Electrode is set.
Is sequentially provided with the middle of a kind of described adjustable light wave-filter based on graphene silicon waveguide, strip optical waveguide 2
The 51, first graphene layer 41 of one spacer medium layer, the 52, second graphene layer 42 of the second spacer medium layer, the 3rd spacer medium layer
53；
First graphene layer 41 and the second graphene layer 42 are the interdigital structure equidistantly periodically set, the first graphene
Electrode is equipped with the graphene layer 42 of layer 41 and second, the first graphene layer 41 extends to U-shaped substrate one end upper surface, the second stone
Black alkene layer 42 extends to U-shaped substrate other end upper surface.
A kind of described adjustable light wave-filter based on graphene silicon waveguide, strip optical waveguide 2 includes the first strip light
The strip optical waveguide 22 of waveguide 21 and second, the 51, first graphene layer 41 of the first spacer medium layer, the second spacer medium layer 52, the
Two graphene layers 42, the 3rd spacer medium layer 53 are located between the first strip optical waveguide 21 and the second strip optical waveguide 22；
Electrode includes being provided with first electrode 61, second on first electrode 61 and second electrode 62, the first graphene layer 41
Second electrode 62 is provided with graphene layer 42.
A kind of described adjustable light wave-filter based on graphene silicon waveguide, U-shaped substrate includes basalis 1 and set
The first covering 31, the second covering 32 on the base layer, the first graphene layer 41 are extended on the first covering 31, the second graphene
Layer 42 is extended on the second covering 32.
A kind of described adjustable light wave-filter based on graphene silicon waveguide, the substrate is silica.
The described adjustable light wave-filter based on graphene silicon waveguide, the material of strip optical waveguide 2 is silicon materials.
A kind of described adjustable light wave-filter based on graphene silicon waveguide, the stone of the first graphene layer 41 and second
Black alkene layer 42 is single-layer graphene, and the first graphene layer 41 and the structure of the second graphene layer 42 are interdigital structure, interdigital knot
The interdigital equidistant periodicity of structure is set, and interdigitated portions are just covered in strip optical waveguide.
Described a kind of adjustable light wave-filter based on graphene silicon waveguide, during spacer medium layer is insulating materials
Si oxide, silicon nitrogen oxides, one of boron nitride.
A kind of described adjustable light wave-filter based on graphene silicon waveguide, the first electrode 61 and second electrode 62
For one of gold, silver, copper or alloy platinum material.
Compared with prior art, the invention has the advantages that：
1. because the material of silicon enriches, can effectively reduce the cost of device, the refractive index of silicon is larger, processing technology is ripe,
The device of Nano grade can be made, the size of device can be greatly reduced, therefore the wave filter made using silicon is had that cost is low, device
Size is small, be easy to the advantage such as integrated.
2. utilize the electric tunable characteristic, the response spectrum scope of ultra-wide, high current-carrying of New Two Dimensional material graphene
The characteristic such as transport factor and high stability, the novel graphite alkene optical filter being made, relative to traditional optical filter, with tune
Humorous scope is wide, and tuning speed is fast (nanosecond), the advantage such as stability height (to temperature-insensitive).
Brief description of the drawings
Fig. 1 is the schematic cross-section of the present invention；
Fig. 2 is the top view of the first graphene layer of the present invention；
Fig. 3 is the structure chart of the first graphene layer of the present invention；
Fig. 4 be the present invention based on the second graphene layer structure chart.
Marked in figure：1- basalises, 2- strip optical waveguides, the strip optical waveguides of 21- first, the strip optical waveguides of 22- second,
The coverings of 31- first, the coverings of 32- second, the graphene layers of 41- first, the graphene layers of 42- second, the spacer mediums of 51- first layer, 52-
Second spacer medium layer, the spacer mediums of 53- the 3rd layer, 61- first electrodes, 62- second electrodes.
Embodiment
With reference to embodiment, the invention will be further described, and described embodiment is only a part of the invention
Embodiment, is not whole embodiments.Based on the embodiment in the present invention, one of ordinary skill in the art is not making
Other embodiments used obtained under the premise of creative work, belong to protection scope of the present invention.
With reference to accompanying drawing 1, Fig. 2, Fig. 3 and Fig. 4, the adjustable light wave-filter of the invention based on graphene silicon waveguide, including
Strip optical waveguide 2, the first covering 31, the second covering 32, basalis 1, the first covering are provided with basalis 1, the basalis
31 and second covering 32 constitute U-shaped substrate, the first graphene layer 41 and the second graphene layer are provided with the middle of strip optical waveguide 2
42, the first graphene layer 41 extends to the upper surface of the first covering 31, and the second graphene layer 42 extends to the upper surface of the second covering 32,
The graphene layer 41 of strip optical waveguide 2 and first and the second graphene layer 42, the first graphene layer 41 and the second graphene layer 42,
Spacer medium is respectively arranged between first graphene layer 41 and the first covering 31, the second graphene layer 42 and the second covering 32
It is provided with layer, the first graphene layer 41 on first electrode 61, the second graphene layer 42 and is provided with second electrode 62.Herein, every
From electrode can also be set on dielectric layer, the electrode formation voltage circuit with adding on each layer graphene is allowed to.
2 points of the strip optical waveguide is the first strip optical waveguide 21 and be arranged on the upside of the first strip optical waveguide 21 second
Isolate Jie with the first graphene layer 41 on strip optical waveguide 22, first strip optical waveguide 21, the first covering 31
Matter layer is the first spacer medium layer 51, on second covering 32, the first graphene layer 41 with the second graphene layer 42
Spacer medium layer for the second spacer medium layer 52, isolating between second graphene layer 42 and the second strip optical waveguide 22
Dielectric layer is the 3rd spacer medium layer 53.
The material of the basalis 1, the first covering 31 and the second covering 32 is silica.
The material of strip optical waveguide 2 is silicon materials.
The graphene layer 42 of first graphene layer 41 and second is single-layer graphene, and structure is interdigital structure, interdigital knot
The interdigital equidistant periodicity of structure is set.First graphene layer 41 and the second graphene layer 42 are located at the fork in strip optical waveguide 2
Refer to structure to overlap in vertical direction.
The spacer medium layer is the insulating materials such as Si oxide, silicon nitrogen oxides, boron nitride or other insulation materials
One of material.
The first electrode 61, second electrode 62 are gold, silver, copper or platinum, or other can be used as one of material of electrode.
The operation principle of the adjustable light wave-filter based on graphene silicon waveguide of the present invention：Bar in optical filter structure
Shape fiber waveguide uses silicon materials, using the features such as its material is abundant, refractive index is larger, processing technology is ripe, can effectively reduce device
Cost and the size of reduction device that part makes；Typical zero band gap properties of graphene, impart graphene extremely wide response light
Spectral limit, and the optical response of graphene can be regulated and controled by applying bias voltage.By the He of the first graphene layer 41
Second graphene layer is placed on the centre of strip optical waveguide 2, and the first graphene layer 41 and the structure of the second graphene layer 42 are using fork
Finger structure, the interdigital spaced set of interdigital structure, such as accompanying drawing 3, shown in 4, interdigitated portions are just covered in strip optical waveguide 2
On, the side of the first graphene layer 41 is extended on the first covering 31, connects first electrode 61, the side of the second graphene layer 42
Extend on the second covering 32, connect second electrode 62, by first electrode 61 and second electrode applying bias voltage change
Become the fermi level of graphene, change the refractive index of the first graphene layer 41 and the second graphene layer 42 with this, so as to change
The effective refractive index of strip optical waveguide 2.The interdigitated portions of first graphene layer 41 and the interdigital structure of the second graphene layer 42 are along ripple
The direction of leaded light transmission, is periodically distributed in strip optical waveguide 2, is pitched by the first graphene layer 41 and the second graphene layer 42
Refer to the part of strip optical waveguide 2 of covering, and not by the first graphene layer 41 and the strip light of the interdigital covering of the second graphene layer 42
The effective refractive index of the part of waveguide 2 is different, therefore, in the transmission direction of strip optical waveguide 2, effective folding of strip optical waveguide 2
Rate is penetrated into periodic distribution, now the strip optical waveguide 2 has filter action, reflection filter can be carried out to the light of fixed wave length.
The refractive index of the first graphene layer 41 and the second graphene layer 42 can be regulated and controled by applied voltage simultaneously, so as to regulate and control by first
The effective refractive index of the part of strip optical waveguide 2 of the interdigital covering of 41 and second graphene layer of graphene layer 42, and not by the first stone
The effective refractive index of the part of strip optical waveguide 2 of black alkene layer 41 and the interdigital covering of the second graphene layer 42 remains constant, because
This is along in the transmission direction of strip optical waveguide 2, the effective refractive index periodic distribution of strip optical waveguide 2, and effective refractive index can be with
The change of applying bias voltage and change, a range of optical wavelength is filtered so as to tune the strip optical waveguide 2
Ripple, forms fiber waveguide adjustable light wave-filter.
Embodiment one
With reference to accompanying drawing 1, basalis 1, the first covering of adjustable light wave-filter of the present embodiment based on graphene silicon waveguide
31st, the material of the second covering 32 is silica；The width and height of the strip optical waveguide 2 set on basalis 1 are respectively 0.6
μm and 0.4 μm, using silicon materials, strip optical waveguide is divided into the first strip optical waveguide 21 and is arranged in the first strip optical waveguide 21
The second strip optical waveguide 22, with isolating under the first graphene layer 41 on the first strip optical waveguide 21, the first covering 31
Dielectric layer is the first spacer medium layer 51, on second covering 32, the first graphene layer 41 with the second graphene layer 42 it
Under spacer medium layer be the second spacer medium layer 52, between the bar shaped light waveguide-layer 22 of the second graphene layer 42 and second
Spacer medium layer is the 3rd spacer medium layer 53, and the thickness of spacer medium layer is 10nm, using boron nitride (hBN) material, the
It is provided with one graphene layer 41 on first electrode 61, the second graphene layer 42 and is provided with second electrode 62, using golden (Au)
Material makes.
Embodiment two
It is provided with a kind of adjustable light wave-filter based on graphene silicon waveguide, including U-shaped substrate, the U-type groove of U-shaped substrate
The graphene layer being embedded with the middle of strip optical waveguide 2, strip optical waveguide 2 in layer graphene layer, strip optical waveguide is equidistant
The interdigital structure periodically set；
Graphene layer extends to U-shaped substrate two ends upper surface, between graphene layer and graphene layer, graphene layer and U-shaped
Spacer medium layer is equipped between substrate, between graphene layer and strip optical waveguide 2, graphene layer is provided with electrode.In U-shaped base
One electrode is set on the graphene layer on the surface of bottom one end, another is set on the adjacent spacer medium layer of graphene layer
Electrode, two polarities of electrode herein are opposite.
Graphene layer is the equidistant interdigital structure periodically set.
A kind of described adjustable light wave-filter based on graphene silicon waveguide, strip optical waveguide 2 includes the first strip light
The strip optical waveguide 22 of waveguide 21 and second, the 51, first graphene layer 41 of the first spacer medium layer, the second spacer medium layer 52, the
Two graphene layers 42, the 3rd spacer medium layer 53 are sequentially arranged between the first strip optical waveguide 21 and the second strip optical waveguide 22；
A kind of described adjustable light wave-filter based on graphene silicon waveguide, U-shaped substrate includes basalis 1 and set
The first covering 31, the second covering 32 on the base layer, graphene layer are extended on the first covering 31, and graphene layer extends to
On two coverings 32.
A kind of described adjustable light wave-filter based on graphene silicon waveguide, the substrate is silica.
The described adjustable light wave-filter based on graphene silicon waveguide, the material of strip optical waveguide 2 is silicon materials.
A kind of described adjustable light wave-filter based on graphene silicon waveguide, the stone of the first graphene layer 41 and second
Black alkene layer 42 is single-layer graphene, and the first graphene layer 41 and the structure of the second graphene layer 42 are interdigital structure, interdigital knot
The interdigital equidistant periodicity of structure is set, and interdigitated portions are just covered in strip optical waveguide.
Described a kind of adjustable light wave-filter based on graphene silicon waveguide, during spacer medium layer is insulating materials
Si oxide, silicon nitrogen oxides, one of boron nitride.
A kind of described adjustable light wave-filter based on graphene silicon waveguide, the first electrode 61 and second electrode 62
For one of gold, silver, copper or alloy platinum material.Adjustable light wave-filter based on graphene silicon waveguide is special using graphene electric tunable
The features such as property, wide response spectrum scope, high carrier mobility and good stability so that the tuning range of graphene optical filter
Wider, tuned speed is very fast, and the stability of device is high (insensitive to temperature, vibration etc.), and the present invention utilizes the high-quality of silicon materials
Characteristic, effectively reduces the cost of manufacture of optical filter, reduces the size of device, and with being easy to integrated advantage.
Claims (10)
1. a kind of adjustable light wave-filter based on graphene silicon waveguide, it is characterised in that including U-shaped substrate, the U of U-shaped substrate
It is provided with the middle of strip optical waveguide (2), strip optical waveguide (2) and is embedded with least one layer of graphene layer, strip optical waveguide in shape groove
Graphene layer for equidistantly periodically set interdigital structure；
Graphene layer extends to U-shaped substrate two ends upper surface, between graphene layer and graphene layer, graphene layer and U-shaped substrate
Between, spacer medium layer is equipped between graphene layer and strip optical waveguide (2)；Electrode is equipped with layer per layer graphene, often
Institute's making alive is respectively formed voltage circuit on individual electrode.
2. a kind of adjustable light wave-filter based on graphene silicon waveguide according to claim 1, it is characterised in that graphite
Electrode is set on the adjacent spacer medium layer of alkene layer.
3. a kind of adjustable light wave-filter based on graphene silicon waveguide according to claim 1, it is characterised in that bar shaped
Be sequentially provided with the middle of fiber waveguide (2) the first spacer medium layer (51), the first graphene layer (41), the second spacer medium layer (52),
Second graphene layer (42), the 3rd spacer medium layer (53)；
First graphene layer (41) and the second graphene layer (42) are the interdigital structure equidistantly periodically set, the first graphene
Electrode is equipped with layer (41) and the second graphene layer (42), the first graphene layer (41) extends to U-shaped substrate one end upper surface,
Second graphene layer (42) extends to U-shaped substrate other end upper surface.
4. a kind of adjustable light wave-filter based on graphene silicon waveguide according to claim 3, it is characterised in that bar shaped
Fiber waveguide (2) includes the first strip optical waveguide (21) and the second strip optical waveguide (22), the first spacer medium layer (51), the first stone
Black alkene layer (41), the second spacer medium layer (52), the second graphene layer (42), the 3rd spacer medium layer (53) are located at the first bar shaped
Between fiber waveguide (21) and the second strip optical waveguide (22)；
Electrode includes being provided with first electrode (61) on first electrode (61) and second electrode (62), the first graphene layer (41),
Second electrode (62) is provided with second graphene layer (42).
5. a kind of adjustable light wave-filter based on graphene silicon waveguide according to claim 3, it is characterised in that U-shaped
Substrate includes the first covering (31), the second covering (32), the first graphene layer of basalis (1) and setting on the base layer
(41) extend on the first covering (31), the second graphene layer (42) is extended on the second covering (32).
6. according to a kind of any described adjustable light wave-filters based on graphene silicon waveguide of claim 1-5, its feature exists
In the substrate is silica.
7. the adjustable light wave-filter based on graphene silicon waveguide according to claim 1-5, it is characterised in that the bar
Shape fiber waveguide (2) material is silicon materials.
8. a kind of adjustable light wave-filter based on graphene silicon waveguide according to claim 3, it is characterised in that described
First graphene layer (41) is single-layer graphene, the first graphene layer (41) and the second graphene with the second graphene layer (42)
Layer (42) structure is interdigital structure, and the interdigital equidistant periodicity of interdigital structure is set, and interdigitated portions are just covered in bar
In shape fiber waveguide.
9. a kind of adjustable light wave-filter based on graphene silicon waveguide according to claim 1, it is characterised in that described
Spacer medium layer is one of Si oxide in insulating materials, silicon nitrogen oxides, boron nitride.
10. a kind of adjustable light wave-filter based on graphene silicon waveguide according to claim 1, it is characterised in that institute
It is one of gold, silver, copper or alloy platinum material to state first electrode (61) and second electrode (62).
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| CN108388034A (en) * | 2018-03-27 | 2018-08-10 | 电子科技大学 | A kind of graphene Mach-Zehnder intensity modulator and its linearization technique |
| CN109188825A (en) * | 2018-10-09 | 2019-01-11 | 宁波大学 | Optics half adder based on graphene surface plasmon |
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