CN106680910B - A kind of graphene surface De-dispersion Airy light-beam generator of array grating excitation - Google Patents

A kind of graphene surface De-dispersion Airy light-beam generator of array grating excitation Download PDF

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CN106680910B
CN106680910B CN201611181359.9A CN201611181359A CN106680910B CN 106680910 B CN106680910 B CN 106680910B CN 201611181359 A CN201611181359 A CN 201611181359A CN 106680910 B CN106680910 B CN 106680910B
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grating
graphene
array
airy
dispersion
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CN106680910A (en
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关春颖
王猛
黄鹏
陆永娇
朱正
史金辉
苑立波
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Harbin Engineering University
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/008Surface plasmon devices
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/18Diffraction gratings
    • G02B5/1814Diffraction gratings structurally combined with one or more further optical elements, e.g. lenses, mirrors, prisms or other diffraction gratings
    • G02B5/1819Plural gratings positioned on the same surface, e.g. array of gratings
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/18Diffraction gratings
    • G02B5/1847Manufacturing methods
    • G02B5/1857Manufacturing methods using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams

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  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Optical Integrated Circuits (AREA)

Abstract

The invention belongs to optical technical field, in particular to a kind of graphene surface De-dispersion Airy light-beam generator for the array grating excitation in extraordinary optical beam generating device and optical acquisition field.The present invention, as substrate, inscribes nanometer array of diffraction gratings structure in substrate surface by silica or semiconductor material, then constitutes in grating surface paving single-layer graphene.Airy light-beam generator mode constraint ability is strong, and beam propagation is of great significance in the manipulation of micro-optics particle and optical shaping apart from overlength;Due to the convenient tunability of graphene itself and material flexibility, which can provide dynamic regulation performance, is easy to practical operation;The generator can work in middle infrared band and terahertz wave band, and the SPP wave of terahertz wave band therefore has a wide range of applications potentiality in bio-sensing field just at the sensitive band of biology.

Description

A kind of graphene surface De-dispersion Airy light-beam generator of array grating excitation
Technical field
It is the invention belongs to optical technical field, in particular to a kind of for extraordinary optical beam generating device and optical acquisition field In array grating excitation graphene surface De-dispersion Airy light-beam generator.
Background technique
Based on to light wave amplitude and phase-modulation beam shaping and manipulation technology be the hot spot studied at present, it is provided The light beam of many uniqueness field distribution all plays in fields such as the micro- capture of optical micromanipulation and optics, microoptic and optic communications Important role.Most of beam shaping technologies rely on linear optics device, therefore can only be in single wavelength or the ginseng of fixation Several lower work, can not be adjusted from outside.Graphene, a kind of material being made of single layer of carbon atom is at tunable optical device The popular selection of part, especially in infrared and terahertz wave band.Machinery, electronics and the optical property of graphene can passing through Doping and external voltage are learned to be adjusted.Wider phase-modulation range is most important to beam shaping technology.However, medium The too thin interaction for making light and graphene of single-layer graphene on layer is too weak, the device of transmissive mode of operation only by adusting The fermi level and width of graphene ribbon are difficult to realize the phase-modulation within the scope of 2 π.Therefore the extraordinary light beam hair based on graphene The report of raw device is few.
Salt free ligands Airy light beam is had received widespread attention due to it with transverse acceleration and self-recovery ability.This light beam Very long distance can be transmitted with salt free ligands, it can be by carrying out long range guidance to object using scattering force.Surface phasmon (Surface Plasmon Polaritons, SPPs) is one kind caused by the free electron interaction of light and metal surface Surface electromagnetic wave mode is tightly limited in metal surface and is propagated along the surface of metallic film.Graphene is infrared Very strong metallic character is shown with terahertz wave band, therefore graphene surface phasmon should can also have nanoscale intense beam Tie up characteristic and relatively low transmission loss.The present invention will provide a kind of graphene surface De-dispersion Airy light of array grating excitation Beam generator, SPPs are excited by diffraction grating, by relative position between grating and grating duty ratio respectively to SPPs Phase and amplitude be modulated.The fermi level of graphene is adjusted by chemical doping or external voltage control, so that it may To obtain the De-dispersion Airy light beam that different frequency has same acceleration track.The graphene surface colour killing of array grating excitation It dissipates Airy light-beam generator and provides multiple choices for the generation of Airy light beam.
Summary of the invention
The purpose of the present invention is to provide a kind of graphene surface De-dispersion Airy light-beam generators of array grating excitation.
The object of the present invention is achieved like this:
The present invention, as substrate, inscribes nanometer array of diffraction gratings knot in substrate surface by silica or semiconductor material Then structure is constituted in grating surface paving single-layer graphene.
The nanometer array of diffraction gratings structure screen periods having the same, duty ratio and grating in the direction of the x axis It highly, is change of gradient in the width of y-axis direction grating array.
The quantity of grating array is equal to the wave packet number of Airy beam, in addition to first grating array, remaining light along the y-axis direction The width of grid is equal to the distance between corresponding two adjacent zeros of Airy function.
Adjacent gratings array has the offset of half of surface phasmon wavelength in x-axis direction, provides alternate π phase and changes Become.
Airy light beam is transmitted in graphene and Air Interface, is also transmitted in graphene and substrate interface, i.e., by dioxy Air groove is inscribed in SiClx and forms grating array, and graphene directly overlays silicon dioxide liner bottom surface.
Screen periods need to meet phase-matching condition, and wherein m is optical grating diffraction series, and θ is incidence angle, for vertically entering Penetrate condition θ=0, m=1.
The beneficial effects of the present invention are:
1, Airy light-beam generator mode constraint ability is strong, beam propagation apart from overlength, in the manipulation of micro-optics particle and It is of great significance in optical shaping;
2, due to the convenient tunability of graphene itself and material flexibility, which can provide dynamic regulation performance, It is easy to practical operation;
3, the generator can work in middle infrared band and terahertz wave band, and the SPP wave of terahertz wave band just at The sensitive band of biology, therefore potentiality are had a wide range of applications in bio-sensing field.
Detailed description of the invention
Fig. 1 is the three-dimensional structure diagram of graphene surface Airy light-beam generator, and 1 is silica or semiconductor material lining Bottom, 2 be graphene film, and 3 be grating array;
Fig. 2 is the sectional view of graphene surface Airy light-beam generator in the x-direction;
Fig. 3 (a) is transmission coefficient (T), reflection coefficient (R) and absorption coefficient (A) under different screen periods;Fig. 3 (b) is In single raster unit field distribution (| Ex|2);
Fig. 4 is the geometry distribution schematic diagram of grating in surface A iry light beam and incident Gauss light amplitude curve and the face x-y.w Indicate that the width of grating array ridge, Λ indicate the period of grating array in the x direction, 0.5 λsppIt indicates between adjacent array grating There is the dislocation of half of phasmon wave wavelength;
Fig. 5 is graphene surface Airy light-beam generator simulated effect figure;
Fig. 6 be propagation distance (since least significant end grating) be 1.3 μm when y-axis direction ideal beam and simulation light beam vibration Width curve graph;
Fig. 7 is the trajectory diagram of the main wave packet of surface A iry light beam;
Fig. 8 is the relational graph between De-dispersion Airy phasmon wave incident light frequency and fermi level, and mark point is corresponding Two reference values, triangulation point:, 30THz, dot:, 34.88THz;
Fig. 9 is graphene surface distribution map of the electric field under the conditions of 0.48eV and 30THz;
Figure 10 is the complementary structure of Fig. 1 graphene surface Airy light-beam generator, and 1 is silica or semiconductor material Substrate, 2 be graphene film, and 3 be dielectric surface air groove;
Figure 11 is the sectional view of graphene surface Airy light-beam generator complementary structure in the x-direction;
Figure 12 is graphene surface Airy light-beam generator complementary structure graphene surface distribution map of the electric field, incident light frequency For 34.88THz, graphene fermi level 0.65eV.
Specific embodiment
The present invention is described further with reference to the accompanying drawing:
The device, as substrate, is inscribed using optics micro-processing technology in substrate surface by silica or semiconductor material Then nanometer array of diffraction gratings structure is constituted in grating surface paving single-layer graphene.Its working principle is that being imitated based on optical diffraction It answers, using the surface phasmon wave of nanometer grating array excitation along the x-axis direction, is produced using y direction gradient width grating array Raw Airy envelope and corresponding phase.Fermi level is adjusted by chemical doping or external voltage, so that different incident lights It can produce the Airy light beam of acceleration trajectory having the same, therefore the generator has the ability of De-dispersion.The generator can Work is in middle infrared band and terahertz wave band.
A kind of graphene surface De-dispersion Airy light-beam generator of array grating excitation, it is direct by single-layer graphene film It is covered on the grating array of silicon dioxide substrates.Single-layer graphene is placed on grating array;Grating duty ratio is to fix It is worth, screen periods having the same in x-axis direction;Grating array height is identical;Grating array in the y-axis direction of different size And increase in gradient.For the phasmon wave for exciting graphene surface, need to overcome graphene phasmon wave and incident light it Between biggish wave vector it is poor.Screen periods need to meet phase-matching condition, and wherein m is optical grating diffraction series, and θ is incidence angle.It is right In vertical incidence condition (θ=0) m=1, screen periods are calculated by formula.The surface phasmon wave of excitation is between graphene It propagates in plane between air along x-axis, is realized in the gradient of y-axis direction width to Airy light beam wave packet by grating It modulates, the grating array quantity on y-axis direction is equal to the wave packet quantity of Airy light beam.Outside wave-packet duration in addition to main wave packet, The width of grating in the y-axis direction is equal to the distance that the two neighboring amplitude of corresponding Airy light beam wave packet is at 0 point.By making x-axis side Upward adjacent gratings have the dislocation of half of surface phasmon wavelength to realize that the phase of adjacent Airy light beam wave parlor π becomes It changes.The fermi level of graphene can be controlled by voltage and chemical doping carries out external modulation.Made by adjusting expense energy level Ef0 2=0.65eV/ (34.88THz)2Value fix, the light activated surface phasmon wave of incidence of different frequency and optimization Screen periods will not change.Therefore, when the light incidence of different frequency, the surface phasmon wave of excitation can form identical The Airy light beam of track, therefore the light-beam generator has the function of De-dispersion.
The present invention may also include: the graphene surface De-dispersion Airy light-beam generator of array grating excitation can be with Work is in visible light and near infrared light wave band.The graphene surface De-dispersion Airy light-beam generator of the array grating excitation, Its Airy light beam generated can be propagated between graphene and air, can also propagate between graphene and substrate.
Embodiment 1:
Graphene surface Airy light-beam generator (Fig. 1-7), 1 in Fig. 1-2 is silica or semiconductor substrate, 2 It is graphene film, 3 be grating array.Silica grating array height h0For 100nm, graphene layer thickness 0.7nm, dioxy SiClx the Gauss light that the permittivity ε of middle infrared band is the direction 3.9, x polarization from graphene vertical incidence to grating region Domain, incident light frequency 34.88THz, graphene fermi level are 0.65eV.When screen periods are gradually increased to 0.35 from 0.25 When transmission coefficient (T), reflection coefficient (R) and absorption coefficient (A) function curve see Fig. 3 (a).When screen periods are about 290nm When graphene phasmon wave absorption maximum coefficient can reach 33%.Under maximum excitation efficiency, single grating in x-z-plane Unit electric field energy distribution (| Ex|2) see Fig. 3 (b), the figure illustrates graphene surfaces amplified with local enhancing etc. from sharp First wave field.Propagation attenuation length of the surface phasmon wave of wave vector along the x-axis direction in the direction z is about 15.5nm.
Obtaining the phasmon wave wavelength generated between graphene Air Interface by formula is 562nm, then adjacent gratings array Between spacing be selected as 280nm.Grating array period 285nm, it is contemplated that the main wave packet of Airy light beam half-breadth be 600nm, titanium dioxide Silicon grating has 6 periods and 10 arrays.Specific structure such as Fig. 4, graphene surface field distribution (| Ex|2) see Fig. 5.It can see Surface phasmon wave is propagated along the direction x and has acceleration in the direction y out.The surface phasmon wave that is excited while having There are curvilinear path and non-diffraction characteristic.Propagation distance (since least significant end grating) be 1.3 μm when y-axis direction ideal beam and The amplitude curve of simulation light beam is shown in Fig. 6, and the half-breadth (FWHM) of main wave packet is 1200nm.The track of the main wave packet of surface A iry light beam is seen Fig. 7, Red diamonds are labeled as finite element (FEM) analogue value, and blue curve is ideal theory calculated value.From above-mentioned calculated result It sees, the structure of design can realize the generation of Airy light beam.
According to formula it is found that if Ef0 2=0.65eV/ (34.88THz)2Value fix, the screen periods of optimization and Being excited phasmon wave will remain unchanged, and the fermi level and incident light frequency for meeting this relationship are as shown in figure 8, silica Dispersion ignore in the wave-length coverage of consideration.Graphene fermi level is adjusted by voltage control and chemical doping, when When the incident light beam strikes of different frequency, it can produce with the identical Airy light beam for accelerating track.In order to verify the characteristic of De-dispersion, It is taken on curve in fig. 8 a bit (0.48eV, 30THz), obtained graphene surface calculates field distribution result such as Fig. 9 institute Show.The distribution of field is almost completely the same with Fig. 5, and it is slightly different to be only excited efficiency.Demonstrate the tool of Airy light-beam generator There is ultra wide band De-dispersion characteristic.
Embodiment 2:
If Figure 10-12 shows, unlike the first embodiment, Figure 10-11 is the complementation of graphene surface Airy light-beam generator Structure, interface of the Airy light beam of generation between graphene and substrate are propagated.At identical incident light frequency 34.88THz, stone The phasmon wave wavelength generated between black alkene medium interface is only 230nm, and the half-breadth of the main wave packet of Airy light beam is 350nm, graphite Alkene surface electric field distribution as shown in the figure 12.Grating array period 275nm, duty ratio 0.3.Main lobe is at 8.5 μm from grating end Place deflects 0.7 μm to the direction y, and at transmission range of 1 μm away from grating end, the half-breadth of main wave packet is 780nm.Similar, it should Structure can also realize De-dispersion characteristic.
The present invention provides a kind of array grating excitation graphene surface De-dispersion Airy light-beam generator, the device by Silica or semiconductor material inscribe diffraction grating surface array in substrate surface using optics micro-processing technology as substrate Then structure is constituted in grating surface paving single-layer graphene.The surface of the devices use grating excitation graphene and medium interface Phasmon wave, by the duty ratio of relative position and grating lattice between grating respectively to the phase of surface phasmon wave It is modulated with amplitude.The fermi level of graphene is adjusted by chemical doping or external voltage control, so that it may obtain Different frequency has the De-dispersion Airy light beam of same acceleration track.Compared with Airy beam generated device general at present, It has better controllability, which has important application in planar photonic is integrated and surface optical operates.

Claims (3)

1. a kind of graphene surface De-dispersion Airy light-beam generator of array grating excitation, it is characterised in that: by silica Or semiconductor material inscribes nanometer array of diffraction gratings structure in substrate surface, then spreads single layer in grating surface as substrate Graphene is constituted;
The nanometer array of diffraction gratings structure screen periods having the same, duty ratio and grating height in the direction of the x axis, In y-axis direction, the width of grating array is change of gradient;
The quantity of grating array is equal to the wave packet number of Airy beam, in addition to first grating array, remaining grating along the y-axis direction Width is equal to the distance between corresponding two adjacent zeros of Airy function;Screen periods need to meet phase-matching condition, Middle m is optical grating diffraction series, and θ is incidence angle, for vertical incidence condition θ=0, m=1.
2. a kind of graphene surface De-dispersion Airy light-beam generator of array grating excitation according to claim 1, Be characterized in that: adjacent gratings array has the offset of half of surface phasmon wavelength in x-axis direction, provides alternate π phase Change.
3. a kind of graphene surface De-dispersion Airy light-beam generator of array grating excitation according to claim 1, Be characterized in that: Airy light beam is transmitted in graphene and Air Interface, is also transmitted in graphene and substrate interface, i.e., by dioxy Air groove is inscribed in SiClx and forms grating array, and graphene directly overlays silicon dioxide liner bottom surface.
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CN109061909A (en) * 2018-08-03 2018-12-21 中国计量大学 Double grating is tunable, and Terahertz switchs
CN109188579B (en) * 2018-10-23 2020-04-21 江南大学 Method and device for absorbing waves of graphene in visible light wave band
CN109889707B (en) * 2019-02-02 2020-12-18 北京空间机电研究所 Paper sheet imaging system
CN111653635B (en) * 2020-03-02 2023-05-05 江西师范大学 Graphene plasmon multiband absorber and preparation method thereof
CN111338090A (en) * 2020-04-09 2020-06-26 浙江科技学院 Airy beam generator based on all-dielectric super-surface material
CN111610155B (en) * 2020-06-02 2022-04-05 西安交通大学 Terahertz device for capturing and detecting circulating tumor cells
RU2747680C1 (en) * 2020-07-09 2021-05-12 Дмитрий Сергеевич Москалев Augmented and combined reality device
CN115469383A (en) * 2022-09-19 2022-12-13 上海亨临光电科技有限公司 Achromatic terahertz diffractive lens

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