CN104570406B - THz wave modulator approach, device and device based on artificial surface plasma - Google Patents
THz wave modulator approach, device and device based on artificial surface plasma Download PDFInfo
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- CN104570406B CN104570406B CN201510062156.7A CN201510062156A CN104570406B CN 104570406 B CN104570406 B CN 104570406B CN 201510062156 A CN201510062156 A CN 201510062156A CN 104570406 B CN104570406 B CN 104570406B
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2203/00—Function characteristic
- G02F2203/13—Function characteristic involving THZ radiation
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- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
Abstract
The invention discloses a kind of THz wave modulator approach based on artificial surface plasma, belong to electromagnetic wave modulation technical field.The present invention is to build two one-dimensional metal gratings in metal surface as two transmission channels of artificial surface plasma wave, the Equivalent Surface plasma frequency of one one-dimensional metal grating is more than the peak frequency of the THz wave to be modulated, and the Equivalent Surface plasma frequency of another one-dimensional metal grating is less than the minimum frequency of the THz wave to be modulated；The THz wave is respectively at turn-on and turn-off state in two transmission channels, and the switch modulation to THz wave is realized by the switching of the two transmission channels.The invention also discloses a kind of terahertz wave modulator part and modulating device based on artificial surface plasma.The present invention can realize that THz wave is modulated at a normal temperature, and modulation device tuning bandwidth, hardware material selection range is wide, and modulated process is simple to operate, flexibly and with the advantage of sub-wavelength constraint.
Description
Technical field
The present invention relates to a kind of electromagnetic wave modulation technology, more particularly to a kind of Terahertz based on artificial surface plasma
Ripple modulator approach.
Background technology
Terahertz (THz) ripple typically refers to frequency in 0.1~10THz (1THz=1012Hz electromagnetic wave), its wavelength between
Between microwave and near-infrared, belong to Far infrared electric magnetic radiation category.In astronomical remote sensing, biomedicine, public safety, industrial non-destructive
Detection etc., THz wave technology is all with a wide range of applications.In the communications field, if being used as broadband using terahertz signal
Information carrier is more more than the channel ratio microwave that can be carried.And other electromagnetic wave bands already are allocated to broadcast, mobile communication etc.
Business, and terahertz wave band is not yet allocated and used.If can be used to communicate, will there are good economic benefit and wide market
Space.However, due to the effective THz wave generation of long-term lacking, modulation, detection method, people are answered the frequency range electromagnetic wave
With very limited.At present there are many weak points in existing switch or modulator, such as：R.Kersting et al. is designed too
Hertz modulator need extremely low temperature could operate [R.Kersting, G.Strasser and K.Unterrainer,
“Terahertz phase modulator”Electron.Lett.36,1156–1158(2000)]；T.Kleine-Ostmann
Although et al. design Terahertz modulator can work at normal temperatures, row amplitude very little can only be entered to terahertz signal
Modulate [T.Kleine-Ostmann, P.Dawson, K.Pierz, G.Hein, and M.Koch, " Room-temperature
operation of an electrically driven terahertz modulator”Appl.Phys.Lett.84,
3555–3557(2004)]；The Terahertz modulators modulate amplitude of J.Saxler et al. designs can reach 50%, but modulate frequency
Rate is not fast enough, and the manufacturing process of the modulator it is also complex [H.T.Chen, W.J.Padilla, J.M.O.Zide,
A.C.Gossard,A.J.Taylor and R.D.Averitt,“Active terahertz metamaterial
devices”Nature 444,597–600(2006)]。
In addition, based on the optical correlation theory of traditional sucrose and device due to limited by optical diffraction limit be difficult
The transmission and modulation of optical signal are realized on nanoscale, can not also meet the development side of optics miniaturization and Highgrade integration
To therefore, the new theory and new device of searching breakthrough diffraction limit simultaneously realize that the modulation of optical signal turns on sub-wavelength dimensions
The focus studied at present and the direction explored.Plasma structure and device just have in wide spectral range, by electromagnetic energy
The characteristic localized in sub-wavelength spatial yardstick.Recently, Tao Yang seminar by THz wave by being converted into Terahertz surface
Plasma wave, switch modulation is carried out on the semiconductor.When the frequency of electromagnetic wave is less than semiconductor plasma frequency, surface
Plasma wave energy is transmitted on the semiconductor；When the frequency of electromagnetic wave is more than semiconductor plasma frequency, surface plasma
Bulk wave can not transmit on the semiconductor.This method controls the free carrier concentration of semiconductor using temperature, so as to change half
The plasma density of conductor.THz wave is coupled as when temp control switch is open-minded, then Terahertz surface plasma wave
It is transmitted, so as to realize to the sub-wavelength constraint of THz wave and switch modulation simultaneously.
However, the above method needs larger range of temperature to realize the relative change of semiconductor plasma frequency,
Because range of temperature is limited, the amplitude of variation of semiconductor plasma frequency is also limited, so surface plasma wave
Modulation band is limited in scope, and in addition, the semiconductor that this method uses needs to meet that plasma frequency is in terahertz under normal temperature
Hereby wave band, and meet that the semiconductor of this condition only has a small number of semiconductors such as indium antimonide, influence the commonly used of the technology.
The content of the invention
The technical problems to be solved by the invention are to overcome prior art insufficient, there is provided one kind based on artificial surface etc. from
THz wave modulator approach, device and the device of daughter, Terahertz wave modulation, and modulation device can be realized at a normal temperature
Tune that bandwidth, hardware material selection range are wide, modulated process is simple to operate, flexibly and with the advantage of sub-wavelength constraint.
It is of the invention specifically to solve above-mentioned technical problem using following technical scheme：
THz wave modulator approach based on artificial surface plasma, comprises the following steps：
Two step 1, construction Equivalent Surface plasma frequencys are in the one-dimensional metal grating of terahertz wave band, wherein one
The Equivalent Surface plasma frequency of individual one-dimensional metal grating is more than the peak frequency of the THz wave to be modulated, and another one
The Equivalent Surface plasma frequency for tieing up metal grating is less than the minimum frequency of the THz wave to be modulated；In two Vygens
The isolation part that artificial surface plasma wave passes through can be prevented by being set between category grating；
Step 2, an one-dimensional metal grating is arranged above a pair of metal blades being parallel to each other, metal blade wherein
Cutting edge be perpendicularly oriented to the one-dimensional metal grating, the distance between two metal blades are less than the THz wave to be modulated
Propagation distance of the maximum frequency component in the larger one-dimensional metal grating of Equivalent Surface plasma frequency；
The Terahertz to be modulated of cutting edge transmitting of step 3, the therefrom outer lateral metal blade of a metal blade
Ripple, and the THz wave being coupled out is detected on the outside of the cutting edge of another metal blade；
Step 4, the relative position between two one-dimensional metal gratings and metal blade replaced repeatedly, that is, realized
The switch modulation of the THz wave.
Following technical scheme can also be obtained according to identical invention thinking：
Terahertz wave modulator part based on artificial surface plasma, the device include one group of one-dimensional metal grating, respectively
The Equivalent Surface plasma frequency of one-dimensional metal grating is in terahertz wave band and different, adjacent one-dimensional of any two
The isolation part that artificial surface plasma wave can be prevented to pass through is provided between metal grating.
Further, the one-dimensional metal grating be arranged at a metallic cylinder outer surface and with the axle of the metallic cylinder
To parallel.
Preferably, each one-dimensional metal grating is perpendicular to metallic cylinder direction of principal axis and along metallic cylinder axle by one group
The one-dimensional rectangular channel array that the rectangular channel of direction periodic arrangement is formed；The rectangle groove depth of each one-dimensional rectangular channel array is each not
It is identical.
Based on the Terahertz wave modulation apparatus of artificial surface plasma, including as above Terahertz described in any technical scheme
Wave modulator part, and THz wave emission element, THz wave detection part, a pair of metal blades.
Compared with prior art, the invention has the advantages that：
1st, the present invention can work in the environment of normal temperature, it is not necessary to which extremely low temperature, condition of work readily satisfy.
2nd, modulation range of the invention is wide and optional., can be with by changing the periodic structure parameter of one-dimensional metal grating
The value of its Equivalent Surface plasma frequency is manually set, in theory the THz wave of modulated any band limits.
3rd, hardware material selection range of the invention is wide.By making one-dimensional metal grating in metal surface, by metal
Plasma frequency is reduced to Terahertz frequency range, material is selected so as to solving semiconductor plasma frequency in background technology
Limitation, therefore can arbitrarily select hardware material of the metal good conductor as modulation device of the present invention.
4th, the present invention can realize the sub-wavelength constraint to THz wave.
Brief description of the drawings
Fig. 1 is the principle schematic diagram of a preferred embodiment of Terahertz wave modulation apparatus of the present invention, label in figure
Implication is as follows：
1st, 2 be two adjacent transmission channels, and 3 be incident THz wave, and 41,42 be two parallel metal blades, and 5 are
Artificial surface plasma wave.
Fig. 2 is the structural representation of the one-dimensional rectangular channel array in metal surface, and wherein a and d are the width of Periodic Rectangular groove respectively
Degree and lattice coefficient, R is the radius of metallic cylinder, and r is vertical range of the rectangle trench bottom to metallic cylinder axle.
Fig. 3 is the dispersion relation figure of metallic cylinder surface artificial surface plasma wave.
Embodiment
Technical scheme is described in detail below in conjunction with the accompanying drawings：
The thinking of the present invention is to utilize Equivalent Surface plasma frequency in metal surface in artificial surface plasma wave theory
Rate only realizes the switch modulation of THz wave with surface texture geometric parameter about this characteristic.
Surface plasma excimer (Surface Plasmon Polarition, abbreviation SPPs) is in metal and medium circle
The mixed activation state of a kind of electronics and photon on face, it can be propagated as ripple.Constraints of the SPPs to electromagnetic field can dash forward
Broken diffraction limit, realize that sub-wavelength constrains, so as to reach the purpose of design sub-wavelength magnitude photonic functions element.However, metal
Plasma frequency typically in ultraviolet band, very big in the dielectric coefficient absolute value of terahertz wave band, skin depth is relative
The very little for wavelength, metal are approximated as perfact conductor.Although now metal surface can propagate SPPs in principle, it
Field constrained in medium it is very poor.2004, professor Pendry of Imperial College of Britain propose one it is brand-new artificial
The concept of surface plasma, i.e. Spoof Spps.By digging period profile of the size in sub-wavelength scope in metal surface
It the method for hole, can significantly strengthen the osmosis of electromagnetic wave, realize the sub-wavelength constraint of electromagnetic field.Importantly,
Now the Equivalent Surface plasma frequency of structural facer is only relevant with the geometric parameter of surface texture.2005, Hibbins
Et al. microwave Duan Shangyong experiment confirm artificial surface plasma phenomenon.Since then, artificial surface plasma wave causes
The great interest of researcher.The geometric parameter can handle that this artificial surface plasma wave passes through control surface periodic structure
SPPs premium properties is applied to optional frequency scope.
Specifically, the present invention has the one-dimensional of different equivalent surface plasma body frequency to build at two of metal surface
Two transmission channels of the metal grating as artificial surface plasma wave, the Equivalent Surface plasma of an one-dimensional metal grating
Body frequency is more than the peak frequency of the THz wave to be modulated, the Equivalent Surface plasma frequency of another one-dimensional metal grating
Rate is less than the minimum frequency of the THz wave to be modulated；So, the THz wave can be in Equivalent Surface plasma frequency
Artificial surface plasma wave is inspired in larger one-dimensional metal grating, and can not be excited in another one-dimensional metal grating
Go out artificial surface plasma wave, turn-on and turn-off state is respectively in two transmission channels equivalent to THz wave, lead to
Cross the switching i.e. achievable switch modulation to THz wave of the two transmission channels.
Technical scheme is further described with preferred embodiment below.
Terahertz wave modulation apparatus in the present embodiment is as shown in figure 1, including terahertz wave modulator part and be arranged in parallel
Two blades 41,42 above terahertz wave modulator part.Terahertz wave modulator part in the present embodiment is a round metal
Cylinder, more than two transmission channels are provided with the outer surface of metallic cylinder, it is recessed by axially between these transmission channels
Groove separates, to ensure that the artificial surface plasma wave 5 in a transmission channel will not travel to along metallic cylinder outer surface
In adjacent transmission channel.Each transmission channel is one-dimensional metal grating of the structure in the metallic cylinder outer surface.
Because the Equivalent Surface plasma frequency of metal surface is relevant with the geometric parameter of one-dimensional metal grating, therefore setting can be passed through
The geometric parameter of one-dimensional metal grating causes different transmission channels to have different Equivalent Surface plasma frequencys.
As shown in figure 1,1,2 be two adjacent transmission channels, wherein, the Equivalent Surface plasma frequency of transmission channel 1
Rate is more than the peak frequency of modulated THz wave, and the Equivalent Surface plasma frequency of transmission channel 2 is less than what is modulated
The minimum frequency of THz wave.Launch the THz wave, in transmission channel 1, incident terahertz to the cutting edge of the first blade 41
Hereby ripple 3 couples at the cutting edge of the first blade 41 produces artificial surface plasma wave 5 and is propagated along the surface of transmission channel 1,
The cutting edge of second blade 42, artificial surface plasma wave 5 will be coupled as THz wave, can be detected by THz wave detection part
Go out；Incident THz wave 3, which can not then couple, in transmission channel 2 produces artificial surface plasma wave 5.Made by rotor
Obtain THz wave 3 to be incident on respectively in transmission channel 1 and transmission channel 2, the conducting and resistance of terahertz signal can be realized respectively
It is disconnected, it is achieved thereby that controlling the switch of the THz wave.Multiple there is different equivalent because metallic cylinder outer surface is present
The transmission channel of surface plasma body frequency, and the adjacent transmission channel of each two can realize opening for frequency range THz wave
Close modulation (modulating frequency is between the Equivalent Surface plasma frequency of two adjacent transmission channels), therefore the modulation device
The modulation multiplex of the THz wave to multiple separate frequency bands can be realized, and integrated level is higher, is more convenient for operating.
It is of course also possible to similar there is different equivalent surface plasma frequency planar metal plate surface construction is a series of
The one-dimensional metal grating being parallel to each other of rate, the relative position between two adjacent one-dimensional metal gratings and metal blade is carried out
Replace repeatedly, equally can be achieved a frequency range THz wave switch modulation (modulating frequency between two adjacent transmission channels etc.
Between effect surface plasma body frequency), and then realize the Terahertz to multiple separate frequency bands using different adjacent transmission channels
Wave modulation is multiplexed.
It is better understood by for the ease of the public, the principle of the present invention is described in detail below：
Surface plasma is the fluctuation of free charge density in the metal as caused by extraneous electromagnetic field excitation, is produced on surface
Raw collective's concussion, the electromagnetic mode of initiation.It is in the dispersion equation for the surface plasma wave that metal and dielectric interface are propagated：
K in above-mentioned formulasppIt is the propagation constant along the surface plasma wave in metal surface direction.C is in vacuum
The light velocity, ω are the angular frequencies of electromagnetic wave, εmAnd εdIt is the relative dielectric constant of metal and medium respectively, and their symbols are on the contrary, only
Have and work as εm+εd<0, εm<-εdWhen, dispersion equation has a solution, can just have surface plasma excimer on the interface of medium and metal.
According to metal Drude models, ignore electron collision, then the relative dielectric constant of metal：
Wherein, ωpFor the plasma frequency of metal.We define surface plasma frequencies omegaspFor：When metal and electricity
The relative dielectric constant of medium each other opposite number when frequency, then by ε (ω)=- εdIt can obtain
Analyzed with reference to more than, only when the frequencies omega of incident light wave is less than metallic surface plasma frequency ωsp, i.e. ω
<ωspWhen, εm<-εd, surface plasma-wave can just be present.
In order to be realized by changing the relative size of metallic surface plasma frequency and incident THz wave frequency
To the switch modulation of Terahertz plasma wave, it must just make metallic surface plasma frequency close to Terahertz frequency range, so
And plasma frequency is the intrinsic attribute of metal or conductor, in general the plasma frequency of metal is in ultraviolet or visible ray
Frequency range.
The scientists such as J.B.Pendry have found and proved, if processing some micro-structural (one-dimensional metals in metallic surface
Grating), then this metallic surface can support a kind of surface wave similar to surface plasma excimer, can be used as one kind
Equivalent surface plasma excimer, the surface plasma body frequency of this surface plasma excimer can rely on metal merely
The structural parameters of surface micro-structure carry out manual control, and so we just can closely arrive this equivalent surface plasma body frequency pressure
Terahertz frequency range realizes the switch modulation to THz wave.
By taking the one-dimensional metal grating of one-dimensional rectangular channel array structure as an example, Fig. 2 is the one-dimensional rectangular channel array in metal surface
Structural representation, one-dimensional rectangular channel array by one group perpendicular to metallic cylinder direction of principal axis and along metallic cylinder direction of principal axis periodically arrange
The rectangular channel of row is formed, and the rectangle groove depth of each one-dimensional rectangular channel array is different.Wherein r is rectangle trench bottom to metal
The distance of Cylindorical rod, R are metallic cylinder radius, and a is the width of groove, and d is lattice constant, and h=R-r is rectangle groove depth.Adopt
With circular cylindrical coordinate form, artificial surface plasma wave is propagated along z-axis.
If regarding metal as perfact conductor, in region, II only has the distribution on the scene of rectangular channel internal memory, and it can be expressed as：
Wherein A and B is constant, J0And N0Respectively zeroth order Bessel and Newmann functions, g=ω/c are the light in air
Ripple wave vector.Under this single mode approximation, radial electric field
In region I, electromagnetic field can be expressed as the superposition of each diffraction time, and we are expressed as electric field：
Wherein CnIt is the coefficient of n-th order diffraction time, kn=k+2 π n/d are propagation constant of the n-th order diffracted wave in z directions,For radial propagation constant.K0For the deformation type of zeroth order Neumann functions, there is the characteristic in the decay of ρ directions,
The characteristics of describing surface wave bound state.
Using electromagnetic field parallel component in region I and the continuous boundary condition in region II interfaces, we can obtain along
The dispersion equation for the artificial surface plasma wave that metal is propagated with Air Interface：
Wherein J1And N1Respectively single order Bessel and Newmann functions, K1For the deformation type of single order Neumann functions,It is the overlap integral of n-th order diffraction pattern and basic mode.
Fig. 3 shows the dispersion curve obtained by solving above-mentioned dispersion equation, and this set has one-dimensional rectangular channel array
Metal curved surface on artificial surface plasma wave dispersion curve and metal flat on surface plasma-wave dispersion curve
It is extremely similar, the dispersion curve in low-frequency range levels off to air, when frequency raises, the surface plasma-wave on metal flat
The frequency values of dispersion curve level off to surface plasma body frequency, and the eigenfrequency convergence of artificial Equivalent Surface plasma wave
In progressive frequencies omegas, the surface plasma frequencies omega of this progressive frequency and real metalspIt is equivalent, referred to as Equivalent Surface etc.
Plasma frequency, in our structure, meet condition h=R-r<<R and a<<D, utilize Bessel functions and Newmann functions
Asymptotic expansion, dispersion relation can be simplified shown as：
Equivalent Surface of artificial surface plasma wave etc. can be obtained from this relational expression
Plasma frequency：ωsThe depth of=c pi/2 h, its value and groove is inversely proportional.
In addition, if it is contemplated that to loss caused by actual metal finite conductivity, artificial surface etc. can be obtained
The wave vector of ion bulk wave：
ε in above-mentioned formuladIt is the relative dielectric constant of medium residing for device, g is light wave wave vector in air,It is wave vector in Periodic Rectangular groove, whereinIt is its skin that becomes in a metal
Depth.Due to consideration that the absorption loss of actual metal, artificial surface plasma wave vector here is a plural number, A and B difference
For the phase constant and attenuation constant of the artificial surface plasma wave.When artificial surface plasma wave is on metallic cylinder surface
Upper propagation, when its intensity is reduced to original 1/e, the distance that artificial surface plasma wave is passed through is propagation distance.Propagate
Distance δspRepresent, can be tried to achieve with the attenuation constant B of artificial surface plasma wave：
In order to facilitate public understanding, we by it is simplest only modulate a band frequency THz wave in case of, it is assumed that
We will be modulated to the THz wave of 0.5THz-1THz this frequency range, it would be desirable to according to Equivalent Surface plasma frequency
Rate sets the one-dimensional suitable geometric parameter of groove array in metallic cylinder with one-dimensional groove array depth formula so that modulates Terahertz
Wave frequency rate is between the Equivalent Surface plasma frequency of adjacent transmission channels, if making circular metal cylinder with aluminium, outside cylinder
Transmission channel 1 and transmission channel 2 are set on surface, and it is 50 μm that depth is set wherein in transmission channel 1, and width is 10 μm, lattice
Constant is 50 μm of One Dimension Periodic rectangular channel, and it is 150 μm that depth is set in transmission channel 2, and width is 10 μm, lattice constant 50
μm One Dimension Periodic rectangular channel.According to formula ωs=c pi/2 h, the Equivalent Surface plasma frequency of transmission channel 1 are
1.5THz, the Equivalent Surface plasma frequency of transmission channel 2 is 0.5THz.So in transmission channel 1, incident THz wave
Frequency is less than the Equivalent Surface plasma frequency of transmission channel, and incident THz wave is between the first blade and transmission channel 1
Generation artificial surface plasma wave can be coupled at gap to propagate along transmission channel, and the labor statement for the peak frequency modulated
Surface plasma ripple (1THz) also has certain spread length in transmission channel 1, sets two blade distances to be less than this length
Degree, then be achieved that the conducting to the frequency range THz wave in transmission channel 1.When rotating metallic cylinder make it that THz wave is incident
It is incident because incident THz wave frequency is more than the Equivalent Surface plasma frequency of the transmission channel when on to transmission channel 2
THz wave, which can not couple, produces artificial surface plasma wave, it is achieved thereby that the blocking to the frequency range THz wave.Therefore
In this example, we can be realized by rotating metallic cylinder and the switch of the THz wave of 0.5THz-1THz this frequency range is adjusted
System.
Claims (5)
1. the THz wave modulator approach based on artificial surface plasma, it is characterised in that comprise the following steps：
Two step 1, construction Equivalent Surface plasma frequencys are in the one-dimensional metal grating of terahertz wave band, and one of them one
The Equivalent Surface plasma frequency for tieing up metal grating is more than the peak frequency of the THz wave to be modulated, another Vygen
The Equivalent Surface plasma frequency for belonging to grating is less than the minimum frequency of the THz wave to be modulated；In two one-dimensional metal light
The isolation part that artificial surface plasma wave passes through can be prevented by being set between grid；
Step 2, an one-dimensional metal grating is arranged above a pair of metal blades being parallel to each other, the sword of metal blade wherein
Mouth is perpendicularly oriented to the one-dimensional metal grating, and the distance between two metal blades are less than the maximum of the THz wave to be modulated
Propagation distance of the frequency component in the larger one-dimensional metal grating of Equivalent Surface plasma frequency；
The THz wave to be modulated of cutting edge transmitting of step 3, the therefrom outer lateral metal blade of a metal blade, and
The THz wave being coupled out is detected on the outside of the cutting edge of another metal blade；
Step 4, the relative position between two one-dimensional metal gratings and metal blade replaced repeatedly, that is, realized described
The switch modulation of THz wave.
2. the terahertz wave modulator part based on artificial surface plasma, it is characterised in that the device includes one group of one Vygen
Belong to grating, the Equivalent Surface plasma frequency of each one-dimensional metal grating is in terahertz wave band and different, any two
The isolation part that artificial surface plasma wave can be prevented to pass through is provided between adjacent one-dimensional metal grating.
3. terahertz wave modulator part as claimed in claim 2, it is characterised in that the one-dimensional metal grating is arranged at a metal
The outer surface of cylinder and axially in parallel with the metallic cylinder.
4. terahertz wave modulator part as claimed in claim 3, it is characterised in that each one-dimensional metal grating is by one group
Perpendicular to metallic cylinder direction of principal axis and along the one-dimensional rectangular channel battle array that is formed of rectangular channel of metallic cylinder direction of principal axis periodic arrangement
Row；The rectangle groove depth of each one-dimensional rectangular channel array is different.
5. the Terahertz wave modulation apparatus based on artificial surface plasma, it is characterised in that including such as claim 2~4 times
One terahertz wave modulator part, and THz wave emission element, THz wave detection part, a pair of metal blades.
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