CN106679597B - The support board of coating detection - Google Patents
The support board of coating detection Download PDFInfo
- Publication number
- CN106679597B CN106679597B CN201710002142.5A CN201710002142A CN106679597B CN 106679597 B CN106679597 B CN 106679597B CN 201710002142 A CN201710002142 A CN 201710002142A CN 106679597 B CN106679597 B CN 106679597B
- Authority
- CN
- China
- Prior art keywords
- plate
- substrate
- subelement
- groove
- support block
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 238000001514 detection method Methods 0.000 title claims abstract description 24
- 239000011248 coating agent Substances 0.000 title claims abstract description 19
- 238000000576 coating method Methods 0.000 title claims abstract description 19
- 239000000758 substrate Substances 0.000 claims abstract description 37
- 230000001105 regulatory effect Effects 0.000 claims abstract description 7
- 239000003292 glue Substances 0.000 claims description 9
- 239000007788 liquid Substances 0.000 claims description 6
- 239000011521 glass Substances 0.000 claims description 3
- 238000006073 displacement reaction Methods 0.000 abstract description 2
- 238000000034 method Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- -1 1.1 Substances 0.000 description 1
- 230000004807 localization Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B15/00—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons
- G01B15/02—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons for measuring thickness
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Geophysics And Detection Of Objects (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
The invention discloses a kind of support boards of coating detection, it includes a substrate, the upper surface of substrate is recessed a groove, it is equipped with several spaced horizontal stripes and vertical bar in groove, space in the slot of groove is separated into several subelements by whole horizontal stripes and vertical bar in the horizontal direction, and product is placed in each subelement, it is characterized by: the substrate is equipped with a plate, plate is covered in the top of groove, and plate is equipped with sense channel, and the substrate is equipped with regulating mechanism；It is equipped with an air cavity in the substrate, is respectively equipped with several stomatas on slot bottom position corresponding to each subelement, whole stomatas are connected to air cavity, and the substrate is equipped with the air inlet for supplying air cavity pressure-air.The present invention provides a kind of support board of coating detection, multiple magnetic sheets can disposably be put into detecting instrument, and the relative displacement between adjacent magnetic sheet is small.
Description
Technical field
The present invention relates to the technical field of the auxiliary mould of coating detection device, a kind of specifically load of coating detection
Object plate.
Background technique
It generally requires to carry out coating detection after magnetic sheet plating, more conventional is to carry out coating using X ray detector
The process of Thickness sensitivity, detection is first to open shield, and magnetic sheet is placed on microscope carrier, shield is then shut off and is detected.
It is not difficult to find out that every magnetic sheet is required to opening and closing shield, therefore detection efficiency is low.
Certainly, trial also detects multiple magnetic sheets while being put into instrument in the prior art, but part instrument
Microscope carrier sight it is poor, multiple magnetic sheets can not be accurately ranked up by operator, thus result in detection program can not
Accurately switch between adjacent magnetic sheet.Further, operator expects whole magnetic sheet sequences on support plate, then will
Support plate is disposably placed on the microscope carrier of detecting instrument, but surface layer is smooth after being electroplated due to magnetic sheet, as personnel carry
The movement of microscope carrier will lead to magnetic sheet and slide relative to support plate in process or instrument operational process, this has also resulted in detection journey
Sequence can not correctly navigate to the area to be tested of magnetic sheet.
There is not also effective auxiliary mould for multiple sheet magnetic sheets in coating detecting instrument in the prior art as a result,
Efficient detection.
Summary of the invention
The technical problems to be solved by the present invention are: a kind of support board of coating detection is provided, it can be by multiple magnetic
Piece is disposably put into detecting instrument, and the relative displacement between adjacent magnetic sheet is small.
The technical solution used in the present invention is: providing a kind of support board of coating detection, it includes a substrate, substrate
Upper surface be recessed a groove, several spaced horizontal stripes and vertical bar are equipped in groove, whole horizontal stripes and vertical bar will
Space is separated into several subelements in the horizontal direction in the slot of groove, and product is placed in each subelement, it is characterised in that: the base
Plate is equipped with a plate, and plate is covered in the top of groove, and the plate is located at the area to be tested of product in each subelement
Sense channel is respectively equipped on corresponding position, the substrate is equipped with the lower end surface for adjusting plate to horizontality
Regulating mechanism；
It is equipped with an air cavity positioned at the lower section of groove in the substrate, is respectively equipped on slot bottom position corresponding to each subelement
Several stomatas, whole stomatas are connected to air cavity, and the substrate is equipped with the air inlet for supplying air cavity pressure-air, air cavity
Interior pressure-air passes through the high pressure draught that stomatal limiting value flows upward along the vertical direction, for pushing the product in each subelement
It is bonded with the lower end surface of plate, and the area to be detected when the upper surface of product is bonded with the lower end surface of plate on product upper surface
Domain is corresponding with the sense channel of plate.
The regulating mechanism includes an adjusting bolt and resilient support block, and the resilient support block is set to the lower end of plate
Between face and the upper surface of substrate, circumferentially arranged with multiple mounting bases on the side wall of the substrate, mounting base is equipped with threaded hole,
Plate is equipped with through-hole corresponding with threaded hole, and the lower end for adjusting bolt is threadedly engaged through through-hole and with threaded hole,
The upper end for adjusting bolt is equipped with a nut, nut and adjusting bolt thread cooperation, and the upper surface of the lower end surface of nut and plate
It leans.
The resilient support block is one to be spun on liquid glue on substrate, and when adjusting bolt, to drive plate to be adjusted to flat
Solidify liquid glue when the lower end surface of plate is in a horizontal state and forms a resilient support block.
The resilient support block is made of uv-curable glue, and the plate is transparent glass.
The resilient support block forms a continuous ring structure along the circumferentially extending of groove, on the side wall of each subelement
It is respectively equipped with several gas vents.
The resilient support block be it is multiple, multiple resilient support blocks are provided at circumferentially spaced along groove, two neighboring bullet
Exhaust passage is formed between property supporting block, for being expelled to outside subelement for the air in subelement.
After using the above structure, the support board of coating detection of the invention has the advantage that compared with prior art
Firstly, magnetic sheet is fixed on substrate, therefore will not slide with the movement of substrate and relative to substrate, carried out convenient for detecting instrument
Detection and localization, secondly, the depth of parallelism of magnetic sheet upper surface is good, therefore detection accuracy is high.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of substrate portion of the invention.
Fig. 2 is the structural schematic diagram of the support board of coating detection of the invention.
Fig. 3 is the partial enlargement diagram in region " A " in Fig. 2.
Wherein, 1, substrate, 1.1, air inlet, 2, horizontal stripe, 3, vertical bar, 4, subelement, 5, product, 6, plate, 7, detection it is logical
Road, 8, air cavity, 9, stomata, 10, adjusting bolt, 11, resilient support block, 12, mounting base, 13, nut, 14, gas vent.
Specific embodiment
Present invention will be further explained below with reference to the attached drawings and specific embodiments.
The present invention provides a kind of support board of coating detection, it includes a substrate 1, and the upper surface of substrate 1 is recessed
One groove, groove is interior to be equipped with several spaced horizontal stripes 2 and vertical bar 3, and whole horizontal stripes 2 and vertical bar 3 will be empty in the slot of groove
Between be separated into several subelements 4 in the horizontal direction, product 5 is placed in each subelement 4, it is characterised in that: the substrate 1 is equipped with
One plate 6, plate 6 are covered in the top of groove, and the plate 6 be located at product 5 in each subelement 4 area to be tested institute it is right
Sense channel 7 is respectively equipped on the position answered, the substrate 1 is equipped with the lower end surface for adjusting plate 6 to horizontality
Regulating mechanism；
It is equipped with an air cavity 8 positioned at the lower section of groove in the substrate 1, is distinguished on slot bottom position corresponding to each subelement 4
Equipped with several stomatas 9, whole stomatas 9 are connected to air cavity 8, the substrate 1 be equipped with for supply 8 pressure-air of air cavity into
Port 1.1, the pressure-air in air cavity 8 forms the high pressure draught flowed upward along the vertical direction through air passing hole 9, each for pushing
Product 5 in subelement 4 is bonded with the lower end surface of plate 6, and is produced when the upper surface of product 5 is bonded with the lower end surface of plate 6
Area to be tested on 5 upper surface of product is corresponding with the sense channel 7 of plate 6.
The regulating mechanism includes an adjusting bolt 10 and resilient support block 11, and the resilient support block 11 is set to plate
Between 6 lower end surface and the upper surface of substrate 1, circumferentially arranged with multiple mounting bases 12, mounting base 12 on the side wall of the substrate 1
Be equipped with threaded hole, plate 6 be equipped with through-hole corresponding with threaded hole, it is described adjust bolt 10 lower end through through-hole and with
Threaded hole is threadedly engaged, and the upper end for adjusting bolt 10 is equipped with a nut 13, and nut 13 is threadedly engaged with bolt 10 is adjusted, and nut
13 lower end surface and the upper surface of plate 6 lean.
The resilient support block 11 is the liquid glue being spun on substrate 1, drives plate 6 to adjust when adjusting bolt 10
Solidification liquid glue forms a resilient support block 11 when section is in a horizontal state to the lower end surface of plate 6.
The resilient support block 11 is made of uv-curable glue, and the plate 6 is transparent glass.
The resilient support block 11 forms a continuous ring structure, the side of each subelement 4 along the circumferentially extending of groove
Several gas vents 14 are respectively equipped on wall.
The resilient support block 11 be multiple, multiple being provided at circumferentially spaced along groove of resilient support block 11, adjacent two
Exhaust passage is formed between a resilient support block 11, for being expelled to outside subelement 4 for the air in subelement 4.
Preferred embodiments of the present invention are described above, but are not to be construed as limiting the scope of the invention.This hair
Bright to be not only limited to above embodiments, specific structure is allowed to vary, all institutes in the protection scope of demand for independence of the present invention
The various change of work is within the scope of the invention.
Claims (5)
1. a kind of support board of coating detection, it includes a substrate (1), and the upper surface of substrate (1) is recessed a groove, recessed
Several spaced horizontal stripes (2) and vertical bar (3), whole horizontal stripe (2) and vertical bar (3) are equipped in slot by space in the slot of groove
It is separated into the horizontal direction several subelements (4), product (5) is placed in each subelement (4), it is characterised in that: the substrate (1)
It is equipped with a plate (6), plate (6) is covered in the top of groove, and the plate (6) is located at each subelement (4) interior product (5)
Area to be tested corresponding to be respectively equipped with sense channel (7) on position, the substrate (1) is equipped with for adjusting plate
(6) lower end surface to horizontality regulating mechanism；
An air cavity (8) are equipped with positioned at the lower section of groove in the substrate (1), are divided on slot bottom position corresponding to each subelement (4)
Not She You several stomatas (9), whole stomatas (9) are connected to air cavity (8), and the substrate (1) is equipped with for supplying air cavity (8)
The air inlet (1.1) of pressure-air, pressure-air in air cavity (8) is formed through air passing hole (9) to be flowed upward along the vertical direction
High pressure draught for pushing the product (5) in each subelement (4) to be bonded with the lower end surface of plate (6), and works as the upper of product (5)
The sense channel (7) of area to be tested and plate (6) when end face is bonded with the lower end surface of plate (6) on product (5) upper surface
It is corresponding；
The regulating mechanism includes adjusting bolt (10) and resilient support block (11), and the resilient support block (11) is set to flat
Between the lower end surface of plate (6) and the upper surface of substrate (1), circumferentially arranged with multiple mounting bases on the side wall of the substrate (1)
(12), mounting base (12) is equipped with threaded hole, and plate (6) is equipped with through-hole corresponding with threaded hole, the adjusting bolt
(10) lower end is threadedly engaged through through-hole and with threaded hole, and the upper end for adjusting bolt (10) is equipped with a nut (13), nut
(13) it is threadedly engaged with adjusting bolt (10), and the lower end surface of nut (13) and the upper surface of plate (6) lean.
2. the support board of coating detection according to claim 1, it is characterised in that: the resilient support block (11) is
One is spun on the liquid glue on substrate (1), is in when adjusting the lower end surface that bolt (10) drive plate (6) to be adjusted to plate (6)
Solidify liquid glue when horizontality and forms a resilient support block (11).
3. the support board of coating detection according to claim 2, it is characterised in that: the resilient support block (11) is
Uv-curable glue is made, and the plate (6) is transparent glass.
4. the support board of coating detection according to claim 1, it is characterised in that: described resilient support block (11) edge
The circumferentially extending of groove forms a continuous ring structure, is respectively equipped with several gas vents (14) on the side wall of each subelement (4).
5. the support board of coating detection according to claim 1, it is characterised in that: the resilient support block (11) is
It is multiple, multiple resilient support block (11) being provided at circumferentially spaced along groove, the row of being formed between two neighboring resilient support block (11)
Gas channel, for being expelled to subelement (4) outside for the air in subelement (4).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710002142.5A CN106679597B (en) | 2017-01-03 | 2017-01-03 | The support board of coating detection |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710002142.5A CN106679597B (en) | 2017-01-03 | 2017-01-03 | The support board of coating detection |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106679597A CN106679597A (en) | 2017-05-17 |
| CN106679597B true CN106679597B (en) | 2019-02-05 |
Family
ID=58848834
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710002142.5A Active CN106679597B (en) | 2017-01-03 | 2017-01-03 | The support board of coating detection |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106679597B (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101178543A (en) * | 2006-11-08 | 2008-05-14 | 大日本网目版制造株式会社 | Absorption workbench and base plate treating apparatus |
| WO2008121561A1 (en) * | 2007-03-20 | 2008-10-09 | Kla-Tencor Corporation | Stabilizing a substrate using a vacuum preload air bearing chuck |
| CN101745903A (en) * | 2008-12-15 | 2010-06-23 | 财团法人石材暨资源产业研究发展中心 | Combined type platform with air flotation and adsorption two-way function |
| CN103217864A (en) * | 2012-01-18 | 2013-07-24 | 昆山允升吉光电科技有限公司 | Exposure method of electroformed mask plate |
| CN205291881U (en) * | 2016-01-11 | 2016-06-08 | 莆田市嘉业光电电子有限公司 | Polylith LCD glass is with version silk screen printing positioning fixture |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9653338B2 (en) * | 2013-12-23 | 2017-05-16 | Kla-Tencor Corporation | System and method for non-contact wafer chucking |
-
2017
- 2017-01-03 CN CN201710002142.5A patent/CN106679597B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101178543A (en) * | 2006-11-08 | 2008-05-14 | 大日本网目版制造株式会社 | Absorption workbench and base plate treating apparatus |
| WO2008121561A1 (en) * | 2007-03-20 | 2008-10-09 | Kla-Tencor Corporation | Stabilizing a substrate using a vacuum preload air bearing chuck |
| CN101745903A (en) * | 2008-12-15 | 2010-06-23 | 财团法人石材暨资源产业研究发展中心 | Combined type platform with air flotation and adsorption two-way function |
| CN103217864A (en) * | 2012-01-18 | 2013-07-24 | 昆山允升吉光电科技有限公司 | Exposure method of electroformed mask plate |
| CN205291881U (en) * | 2016-01-11 | 2016-06-08 | 莆田市嘉业光电电子有限公司 | Polylith LCD glass is with version silk screen printing positioning fixture |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106679597A (en) | 2017-05-17 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20191202 Address after: 314300 No. 39 Donggang Road, Haiyan County Economic Development Zone, Jiaxing, Zhejiang Patentee after: Zhejiang Keteng Fastener Co., Ltd Address before: 315100 Zhejiang city of Ningbo province Yinzhou District Binhai investment center sail Road No. 218 Ningbo Aolai Star Lighting Co. Ltd Patentee before: Wu Gang |
|
| CP01 | Change in the name or title of a patent holder | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 314300 No. 39 Donggang Road, Haiyan County Economic Development Zone, Jiaxing, Zhejiang Patentee after: Keteng environmental protection technology (Jiaxing) Co., Ltd Address before: 314300 No. 39 Donggang Road, Haiyan County Economic Development Zone, Jiaxing, Zhejiang Patentee before: Zhejiang Keteng Fastener Co., Ltd |
|
| PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: Carrier plate for coating detection Effective date of registration: 20211216 Granted publication date: 20190205 Pledgee: Xitangqiao sub branch of Zhejiang Haiyan Rural Commercial Bank Co.,Ltd. Pledgor: Keteng environmental protection technology (Jiaxing) Co.,Ltd. Registration number: Y2021330002564 |