CN106676627A - Shaft furnace used for cast polycrystalline silicon - Google Patents
Shaft furnace used for cast polycrystalline silicon Download PDFInfo
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- CN106676627A CN106676627A CN201611131905.8A CN201611131905A CN106676627A CN 106676627 A CN106676627 A CN 106676627A CN 201611131905 A CN201611131905 A CN 201611131905A CN 106676627 A CN106676627 A CN 106676627A
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- light source
- shaft furnace
- heat
- car
- polysilicon
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B28/00—Production of homogeneous polycrystalline material with defined structure
- C30B28/04—Production of homogeneous polycrystalline material with defined structure from liquids
- C30B28/06—Production of homogeneous polycrystalline material with defined structure from liquids by normal freezing or freezing under temperature gradient
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
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- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Arrangement Of Elements, Cooling, Sealing, Or The Like Of Lighting Devices (AREA)
- Resistance Heating (AREA)
Abstract
The invention relates to the technical field of silicon production. A shaft furnace used for cast polycrystalline silicon comprises a furnace body, wherein a heating mechanism is arranged at the top and on the side wall of the furnace body respectively, a crucible is arranged inside the furnace body, and the furnace body is sequentially provided with a heating zone, a gradient zone and a cooling zone. The shaft furnace is characterized by also comprising a crucible lifting mechanism used for driving the crucible to rise and fall, a black silicon nitride powder layer and a polycrystalline silicon layer laid on the black silicon nitride powder layer are arranged on the inner surface of the bottom wall of the crucible, the polycrystalline silicon layer is 3-5mm thick, and the heating zone, the gradient zone and the cooling zone are sequentially distributed from top to bottom. The shaft furnace used for the cast polycrystalline silicon can be used for improving efficiency of the whole silicon slice.
Description
Technical field
The present invention relates to silicon production technical field, more particularly to a kind of casting polysilicon shaft furnace.
Background technology
Energy problem is one of hot issue maximum in the world today.Using in a large number for traditional energy, causes world's energy
Source amount of storage drastically declines, and makes problem of environmental pollution be on the rise, and the development to human society constitutes serious harm, newly
Emerging non-polluting energy sources are just into the inexorable trend of energy technology development.Solar energy is one of green energy resource of permanence, in the sun
In utilizing, photovoltaic cell is a kind of current topmost product, and silicon crystal is the basic material of photovoltaic cell production.Silicon crystal
Including monocrystal, polycrystal, monocrystal is that their atomic structural arrangement is different from multicrystal difference, the atom of monocrystal
Structural arrangement is that nucleus grows up to high preferred orientation identical ordered arrangement, and multicrystal atomic structural arrangement is nucleus grows up to crystalline substance
Different disorderly arranged of planar orientation, what both were mainly determined by their processing technique.Existing production of polysilicon stove includes
Body of heater, the top of body of heater and side wall are designed with heating arrangements, and crucible is provided with body of heater, and body of heater is sequentially provided with the thermal treatment zone, gradient zones
And cooling zone.Between 16.8%-17%, China Patent No. such as is have devised for this is the whole ingot silicon chip efficiency that initial production goes out
Control disclosed in 2013205686973 patent document is improved, and whole ingot silicon chip efficiency has been brought up to into 17.6%.
The content of the invention
The invention provides a kind of casting polysilicon shaft furnace, to improve the efficiency of whole ingot silicon chip.
Above technical problem is solved by following technical proposal：One kind casting polysilicon shaft furnace, including body of heater, institute
The top and side wall for stating body of heater is designed with heating arrangements, and crucible is provided with the body of heater, and the body of heater is sequentially provided with the thermal treatment zone, ladder
Degree area and cooling zone, it is characterised in that also including the crucible lift mechanism for driving crucible lifting, the diapire inner surface of the crucible
Black silicon nitride bisque and the polysilicon layer being laid on black silicon nitride bisque are provided with, the thickness of the polysilicon layer is 3-5
Millimeter, the thermal treatment zone, gradient zones and cooling zone are sequentially distributed from the top down.Crucible arranges black silicon nitride bisque and 3-5 millis
The polysilicon layer of rice so that can grow the uniform polycrystalline little crystal grain nucleus of crystal when initial long brilliant, it is brilliant to later stage length to rise
Initial guide effect.When further using, crucible is made with 180 millimeters of speed hourly, from heater cooling zone is shifted to,
Crucible bottom is set quickly to form uniform little crystal grain nucleus.
Preferably, the shaft furnace is additionally provided with elevator, the elevator be additionally provided be distributed from the top down for observing
The observation port of furnace interior, in the elevator lifting type elevator is provided with.When using, by socket elevator it is observed that hole
Furnace interior is observed.
Preferably, the elevator includes car and is vertically arranged the friction lever of state；The car is connected with friction plate and rubs
The outer telephone-moving structure of pad, friction plate links together with car is scalable, the outer telephone-moving structure of friction plate be used to driving friction plate to stretch out with
Abut with the friction lever and produce brake drag effect together；The bottom of the car is provided with cushion pad；The man space
Surface be provided with flexible layer, the flexible layer is linked together by bradyseism spring with the car.Lose when finding that car is produced
When control declines, the outer telephone-moving structure of friction plate drives and move and abut with friction lever and produce together frictional vibration effect outside friction plate, with
Decrease speed is reduced, so that impact when landing is reduced.Cushion pad can reduce impact when landing.Flexible layer energy is set
The infringement produced to people when people strikes enough is reduced, the setting of bradyseism spring can enter one reduces injury.Production can be improved
Safety.
Preferably, the friction lever has two and is distributed in the both sides of the car, the friction plate has two panels, described
Friction plate is provided with the slide bar being located in the car, and the outer telephone-moving structure of the friction plate includes drive rod, brake spring, is set in
Link on drive rod, the latch being located in link and latch is driven to deviate from the out of stock mechanism of link, the drive rod includes
It is hinged and interconnection two pieces points of bars together, described two points of bars cut with scissors correspondingly with the slide bar of described two friction plates
Be connected together, one end of the brake spring links together with the car, the other end links together with the link and
In energy storage state.When finding that car produces decline out of control, out of stock mechanism makes latch deviate from from link, so as to lose to stopping
The fixation of car spring, the elastic force of brake spring drives drive rod to produce the effect of stretching, and drives outside slide bar when drive rod is stretched
Move and realize together brake so as to drive friction plate to abut with friction lever away from car.
Preferably, the out of stock mechanism include being arranged on permanent magnet on latch, the electric magnet that repels the permanent magnet,
Velocity sensor and magnet control unit, the magnet control unit is due to detecting the decline of car when velocity sensor
Speed makes electric magnet obtain electric and produce magnetic force when being more than setting value.Facilitate implementation Automated condtrol.
As it is another preferably, the out of stock mechanism includes what the same described latch for stretching into the man space linked together
Push rod.Operation can be also carried out during without electricity.
Preferably, the drive rod is provided with the flatulence bar for driving described two points of bars to carry out bending, the cushion pad is
Air cushion, the flatulence bar is connected with the cushion pad.When car lands and extrudes cushion pad, the air flue in cushion pad flows to gas
Expander roll, flatulence bar stretches and drive rod jack-up is produced into bending, and the structure of bending is friction plate with the frictional force between friction lever
Decline and even disappear so that car can upspring, so as to reduce the injury to people.
Preferably, the lower surface of the cushion pad is provided with to prevent puncturing layer.Cushion pad is punctured and loses when preventing from landing
Effective cushioning effect.
Preferably, the roof of the man space is provided with motor, the rotating shaft of the motor is vertically extending, described
The rotating shaft of motor is provided with the light source for irradiating diagonally downward, and the light source is laser diode.When elevator produces whereabouts out of control,
Light source carries out luminous and electric motor starting, and Motor drive light source rotates by axle of the rotating shaft of motor, so as to produce in man space
The light radiation of rotation, allow occupant know abnormal generation, so as to and alarm.Then it is not easy if non-laser irradiation
Rotary irradiation is produced, occupant does not allow to be also easy to produce vigilance
The present invention, also including radiator and heating arrangement, the light source is green laser diode, and the heating arrangement includes leading
Hot substrate and the Chip-R being arranged on heat-conducting substrate, the radiator is communicated with light source mounting hole together and heating
Structure installing hole, the heat-conducting substrate is arranged in the heating arrangement installing hole, and the heat-conducting substrate is integrally formed with wearing
Heat conducting sleeve in the light source mounting hole, the light source is connected in the heat conducting sleeve, when temperature is more than 25 DEG C, described is led
Hot jacket is abutted together with the light source mounting hole, and the linear expansion coefficient of the radiator is linear swollen less than the heat conducting sleeve
Swollen coefficient.The requirement of green laser diode pair ambient temperature is especially high, its luminance-reduction when ambient temperature is less than 25 DEG C, high
Brightness when 30 DEG C is equally reduced, therefore green laser diode should consider that heating is considered again in radiating when using, such as
Fruit does not design heating arrangement on product and laser diode heating cannot be worked, at present to the heating side of laser diode
Formula has two kinds, and a kind of is that winding heating tape and then the mode being installed to light source on radiator are heated on light source, should be added
Hot mode can cause light source heat radiation bad when needing and being radiated, so being seriously unsuitable for the heating of laser diode；It is another
It is that a power resistor is placed in the spreader surface of laser diode to heat radiator to plant, then by radiating
Device transfers heat to light source, due to spreader surface its heat transfer that radiates to laser tube, starting in low temperature environment when
It is long（Will light source be heated to more than the 25 DEG C durations for carrying out normal luminous）More than 30 minutes, namely the efficiency of heating surface are wanted at least
It is low.Original power resistor is substituted for Chip-R and is attached on heat-conducting plate by the technical program, allows the heat of resistance to send to and lead
Hot plate, that is, heat-conducting plate act as the radiator of resistance, heat-conducting plate links together with light source heat conductivity, so that producing
Heat can quickly pass to light source, be heated to by -25 DEG C than laser diode temperature with the existing second way normal
25 DEG C of durations of light emitting machine only have 5 ~ 10 minutes（Existing is also to go up for 30 minutes）.Simultaneously when not heating, the presence pair of heat-conducting plate
The impact of the radiating effect of light source is little.Need to heat light source when temperature is less than 25 DEG C, now the light under shrinkage effect
Source installing hole is further lost in and plays and carry with gap cooperation, the heat that can be effectively prevented light source is formed between heat conducting sleeve
The effect of the high efficiency of heating surface.When temperature rises, in flatulence of heat type effect small light source installing hole with formation tight fit and energy between heat conducting sleeve
Enough carry out good heat conduction so that radiating effect again can be high.Light source is between radiator when can either be automatically obtained heating
Heat-conducting effect is improved when declining, radiating.
Preferably, one end of one end of the heat conducting sleeve and radiator is all sealed against on sealing plate, the heat conduction
The other end of set and the other end of radiator are sealed connected together by annular reservoir, the heat conducting sleeve, sealing plate, radiating
Form annular seal space between device and annular reservoir, the annular seal space is with the connection of annular reservoir and in gravity or annular reservoir
The intracapsular insulation liquid of the lower annular liquid storage of elastic shrinkage effect can flow sealing intracavity.Due to shrinkage effect when less than 25 DEG C
The heat-conducting effect for producing gap and reducing between heat conducting sleeve and radiator between heat conducting sleeve and light source mounting hole can be caused and played
The effect of heats is improved, now insulation liquid is filled in the gap to play and further improve insulation effect and cause plus thermal effect
Fruit is more preferably.When temperature needs radiating higher than 25 DEG C or 30 DEG C, support between heat conducting sleeve and light source mounting hole under flatulence of heat type effect
Tightly together, during pushing against the adiabatic liquid between heat conducting sleeve and light source mounting hole is squeezed out and annular reservoir is stored in
It is interior.Heats during heating can further be improved.
Preferably, the heat-conducting substrate is away between the hole wall of the side with the heating arrangement installing hole of the light source
Disconnect.Heat during heating can major part flow at light source place, play a part of improve heats, and to radiating when
Hinder few.
Preferably, the Chip-R is arranged on side of the heat-conducting substrate away from the light source.Can both protect
The heat transfer of card Chip-R is not interfered between heat-conducting plate and light source to the presence that heat-conducting plate enables to Chip-R again
Heat transfer effect.
Preferably, the surface of the radiator is provided with radiating fin, the heating arrangement mounting hole site is pacified in the light source
Dress hole is near the side of the radiating fin.If light source mounting hole is located between heating arrangement installing hole and radiating fin, heat
When heat be easily lost in by radiating fin.The setting of upper radiating fin of carrying out radiating improves radiating effect.
Preferably, the radiating fin at least two panels, the free end of all of radiating fin is positioned at the same face of cylinder
On.Good heat dissipation effect.
Preferably, the radiator is provided with the radiator installing hole extended along light source mounting hole depth direction, it is described to dissipate
The hole wall of hot device installing hole is provided with notch.When the present invention is installed, can either be passed through after radiator installing hole with installation by bolt
The part of the present invention（Hereinafter referred to as support member）It is fixed together and is attached, it is also possible to by the connecting pin in support member
It is plugged in radiator installing hole and is fixed by the effect that steps up of the elastic deformation of radiator installing hole.Convenience during installation
Property is good.
Preferably, the light source mounting hole is light source mounting hole with the A/F of heating arrangement installing hole connected component
Girth a quarter below.Enable to caused by the setting of heating arrangement radiating effect decline it is little and meanwhile heating arrangement again
Can rapidly be heated.
Present invention tool has the advantage that：The defect of polysilicon that enables to produce is few, dislocation is few, improves whole ingot silicon chip
Efficiency is to 18.7-18.8%.
Description of the drawings
Fig. 1 is the schematic diagram of the embodiment of the present invention one.
Fig. 2 is the partial schematic diagram of the embodiment of the present invention two.
Fig. 3 is the schematic diagram of the elevator in inventive embodiments three.
Schematic diagram when Fig. 4 is carried out for light source plus radiated.
Fig. 5 is the partial schematic diagram of example IV.
In figure：Car 1, man space 11, safety member installing space 12, flexible layer 13, bradyseism spring 14, flatulence bar 15,
Cushion pad 16, anti-puncture the outer telephone-moving structure 3, drive rod 31 of layer 17, friction lever 2, friction plate, point bar 311, brake spring 32, link
33rd, latch 34, out of stock mechanism 35, permanent magnet 351, electric magnet 352, velocity sensor 353, magnet control unit 354, push rod
355th, spacer pin 36, hangoff receptacle 37, friction plate 4, slide bar 41, cleaning brush 42, approaching face 43, body of heater 5, upper heating arrangements 51, on
Temperature sensor 52, side heating arrangements 53, lower temperature sensor 54, crucible lift mechanism 6, cage 61, lifting motor 62, crucible
7th, black silicon nitride bisque 71, polysilicon layer 72, radiator 91, light source mounting hole 911, heating arrangement installing hole 912, radiating fin
913rd, the free end 9131 of radiating fin, radiator installing hole 914, notch 9141, light source 92, diode power source introduce foot 921, add
It is heat structure 93, heat-conducting substrate 931, Chip-R 932, adiabatic glue 933, heat conducting sleeve 934, sealing plate 94, annular reservoir 95, close
Seal A/F W of the chamber 96, light source mounting hole with heating arrangement installing hole connected component.
Specific embodiment
Below in conjunction with the accompanying drawings the present invention is further illustrated with embodiment.
Embodiment one, referring to Fig. 1, one kind casting polysilicon includes body of heater 5 and crucible lift mechanism 6 with shaft furnace.Body of heater 5
Roof is provided with heating arrangements 51 and upper temperature sensor 52.The side wall of body of heater 5 is provided with side heating arrangements 53.The diapire of body of heater 5
It is provided with lower temperature sensor 54.Body of heater 5 is sequentially provided with from the top down the thermal treatment zone, gradient zones and cooling zone, the thermal treatment zone, gradient zones and
The temperature of cooling zone is reduced successively, and how many temperature controls in each area is being prior art.Crucible 7 is additionally provided with body of heater 5.Crucible
7 diapire inner surface is provided with black silicon nitride bisque 71.Polysilicon layer 72 is equipped with black silicon nitride bisque 71.Polysilicon layer
72 thickness is 3-5 millimeters.Crucible lift mechanism 6 includes cage 61 and drives the lifting motor 62 of cage lifting.Crucible 7 is solid
It is scheduled in cage 61.
When using, crucible 7 is made with 180 millimeters of speed hourly from thermal treatment zone Jing gradient zones by crucible lift mechanism 6
Move to cooling zone.The efficiency of the whole ingot silicon chip produced is to 18.7-18.8%.
Embodiment two, be with the difference of embodiment one：
Referring to Fig. 2, shaft furnace 5 is additionally provided with elevator 55.Elevator 55 be provided be distributed from the top down for observing furnace interior
Observation port 56.Lifting type elevator 8 is installed in elevator 55.Lifting type elevator 8 includes car 1, halyard 81 and drives car
The actuating unit of lifting（Do not draw in figure, be existing structure）.
When using, socket lifting type elevator 8 to corresponding observation port 56 is gone to observing inside shaft furnace 5.
Embodiment three, be with the difference of embodiment two：
Referring to Fig. 3, lifting type elevator also includes the friction lever 2 being vertically installed in elevator 55.In car 1 from the top down successively
It is provided with man space 11 and safety member installing space 12.The surface in addition to roof of man space 11 is provided with flexible layer 13.It is flexible
Layer 13 is linked together by bradyseism spring 14 with car 1.The roof of man space 11 is provided with motor 9.The edge of rotating shaft 97 of motor
Above-below direction extends.The rotating shaft 97 of motor is provided with the light source 92 for irradiating diagonally downward.Light source 92 is green laser diode.
The outer telephone-moving structure 3 of friction plate is provided with safety member installing space 12.The left and right sides of car 1（People passes in and out when using
Direction is fore-and-aft direction）It is respectively provided with a friction plate 4.Friction plate 4 is provided with slide bar 41.Slide bar 41 is slidably located in safety member
The wall portion of installing space 12.The upside of friction plate 4 is provided with cleaning brush 42.The lower end of the rubbing surface of friction plate 4 is provided with approaching face 43.
The outer telephone-moving structure 3 of friction plate includes drive rod 31, brake spring 32, link 33, latch 34 and out of stock mechanism 35.Drive rod 31 includes
It is hinged and interconnection two pieces points of bars 311 together.Two are divided to bar 311 to cut with scissors with the slide bar 41 of two friction plates correspondingly
It is connected together.Link 33 is set in the junction of two pieces points of bars 311 and goes out.Spacing limit is carried out to link 33 on two pieces points of bars 311
Position pin 36.Latch 34 is located in link 33.Latch 34 is horizontally extending.Latch 34 is located in suspension horizontally moveablely
On seat 37.When latch 34 is located in link 33, two points of bars 311 link together in inverted " V " font.Friction plate 4 is same
Friction lever 2 disconnects contact.The upper end of brake spring 32 links together with link 33, lower end links together and locate with car 1
In energy storage state.The flatulence bar 15 for being supported on the lower section of link 33 is additionally provided with safety member installing space 12.Out of stock mechanism 35 includes
Permanent magnet 351, the electric magnet 352 for repelling permanent magnet, velocity sensor 353, magnet control unit 354 and push rod 355.Permanent magnetism
Ferrum 351 is arranged on latch 34.Electric magnet 352 is fixed on car 1.Push rod 355 stretches into man space 11 and connects with latch
Together.
Cushion pad 16 is provided with outside the low side of car 1.Cushion pad 16 is air cushion.Cushion pad 16 is connected with flatulence bar 15.It is slow
Rush pad 16 and be provided with and prevent puncturing layer 17.It is anti-to puncture layer 17 for steel plate.
Friction lever 2 has two.Two friction levers 2 are arranged in elevator and positioned at the left and right sides of car 1.Two frictions
Piece 4 aligns correspondingly with two friction levers 2.In non-brake state when cleaning brush 42 also contact with friction lever 2 so that rise
Friction lever 2 is cleaned during drop affect braking effect to prevent dirty.Cleaning brush 42 is located at the top of friction plate 4 and also can rise
To the effect that gear dust is carried out to friction plate 4.
When the decrease speed that velocity sensor 353 detects car 1 is more than setting value（Can certainly be passed by acceleration
Sensor carries out detection acceleration top more than setting value）When magnet control unit 354 make electric magnet 352 it is electric and produce magnetic
Power.Electric magnet 352 produces repulsive force and latch is deviate from from link to permanent magnet 351.Brake spring 32 drives two points of bars
311 one end for linking together move down and so that drive rod produce stretch action.Drive rod to be produced and drive slide bar when stretching action
It is outer shifting and drive friction plate with friction lever abut produce braking action together.Magnet control unit 354 also plays motor 9
It is luminous with light source 92.Motor drive light source produces rotary motion, so as to rotation light is produced in man space to remind occupant.
Occupant has found that generation can also remove pressure-ram so that latch is deviate to realize that manual drive is braked from link after falling.
Referring to Fig. 4, light source 92 is provided with radiator 91 and heating arrangement 93.
Radiator 91 is communicated with light source mounting hole 911 together and heating arrangement installing hole 912, the and of radiating fin 913
Radiator installing hole 914.Light source mounting hole 911 is circular hole.Heating arrangement installing hole 912 is rectangular opening.The He of light source mounting hole 911
The circle that the insertion of heating arrangement installing hole 912, specially light source mounting hole 911 are located is extend in heating arrangement installing hole 912
Mode namely intersecting mode insertion.Light source mounting hole is light source with the A/F W of heating arrangement installing hole connected component
Below a quarter of the girth of installing hole 911.Heating arrangement installing hole 912 is located at light source mounting hole 911 near radiating fin 913
Side.Radiating fin 913 is located on the surface of radiator 91.Radiating fin 913 has 17.The free end 9131 of all of radiating fin
On the same face of cylinder.The extension side of radiator installing hole 914, light source mounting hole 911 and the three of heating arrangement installing hole 912
To namely depth direction it is identical.The hole wall of radiator installing hole 914 is provided with notch 9141.
Light source 92 is cylinder.Light source 92 is provided with diode power source and introduces foot 921.
Heating arrangement 93 includes heat-conducting substrate 931 and the Chip-R 932 being arranged on heat-conducting substrate.Heat-conducting substrate 931
It is bonded in heating arrangement installing hole 912 by adiabatic glue 933 in the way of horizontal.Heat-conducting substrate 931 away from light source 92 one
Side is separated with the hole wall of heating arrangement installing hole 912.Chip-R 932 is arranged on heat-conducting substrate 931 away from light source 92
On side.Heat-conducting substrate 931 is provided with heat conducting sleeve 934.Heat-conducting substrate 931 and heat conducting sleeve 934 are formed in one.Heat conducting sleeve 934 is worn
It is located in light source mounting hole 911.Light source 92 wears and heat conductivity is connected in heat conducting sleeve 934 and is suspended in light source mounting hole
In 911.More than the linear expansion coefficient of radiator 91, that is, heat conducting sleeve is produced the linear expansion coefficient of heat conducting sleeve 934 when expanding with heat and contract with cold
Raw radial dimension of variable quantity is more than the radial dimension of variable quantity that light source mounting hole is produced.When temperature is more than 25 DEG C, lead
Hot jacket 934 abut with light source mounting hole 911 realize together light source 92 with light source mounting hole 911 indirect abutting together.
When using, radiator is fixed on by radiator installing hole 914 for the rotating shaft 97 of motor（Rotating shaft 97 is referring to Fig. 3）
On.
When temperature is higher than 25 DEG C, it is not powered to heating arrangement 93 namely is not powered to Chip-R 932, heat conducting sleeve 934
Radial direction become a large amount of radial directions more than LASER Light Source installing hole 911 and become a large amount of so that heat conducting sleeve 934 is with LASER Light Source installing hole
911 closely abut together and carry out more good heat conduction.It is logical to Chip-R 932 when temperature is less than 25 DEG C
Electricity, the heat transfer that Chip-R 932 is produced passes to light source 92 and realizes that light source 92 is carried out to add to heat-conducting substrate 931, entrance
Heat to temperature is not less than 25 DEG C, and the radial direction of heat conducting sleeve 934 becomes radial direction reduction volume of the reduction volume more than LASER Light Source installing hole 911,
So that heat conducting sleeve 934 produces gap between LASER Light Source installing hole 911, heat conducting sleeve 934 is reduced by heat transfer so as to play
To the effect of radiator 91 so that the heat that the transmission of 934 heat conducting sleeve of heat conducting sleeve 934 comes can substantially more pass to light source
92, so as to play a part of to improve heats.
Example IV, be with the difference of embodiment three：
Referring to Fig. 5, one end of heat conducting sleeve 934 and one end of radiator 91 are all sealed against on sealing plate 94, i.e., heat conducting sleeve and
Radiator can slide relative to sealing plate 94.The other end of heat conducting sleeve 934 and the other end of radiator 91 are by annular storage
Liquid capsule 95 is sealed connected together.Built with insulation liquid, insulation liquid causes annular reservoir 95 to be in annular reservoir 95
Elastic deployed condition.When temperature is less than 25 DEG C, shape between heat conducting sleeve 934, sealing plate 94, radiator 91 and annular reservoir 95
Into annular seal space 96.Annular seal space 96 is connected with annular reservoir 95.
Annular reservoir 95 is set to be located at the top of the annular annular seal space 96 of reservoir 95 when using.Shrinkage when less than 25 DEG C is made
With can cause between heat conducting sleeve and light source mounting hole produce gap and cause annular seal space 96 occurs, now gravity and annular liquid storage
Insulation liquid stream in the lower annular reservoir 95 of elastic shrinkage effect of capsule is played and further reduce heat conducting sleeve in annular seal space 96
934 amounts for passing to radiator 91 so that heats are further lifted.When temperature needs radiating higher than 25 DEG C or 30 DEG C
When, push against between heat conducting sleeve and light source mounting hole together so that annular seal space 96 disappears under flatulence of heat type effect, positioned at annular seal space 96
Interior adiabatic liquid is extruded in winding shape reservoir 95 and stores again.
Claims (10)
1. a kind of casting polysilicon shaft furnace, including body of heater, the top of the body of heater and side wall are designed with heating arrangements, the stove
Crucible is provided with vivo, the body of heater is sequentially provided with the thermal treatment zone, gradient zones and cooling zone, it is characterised in that also including driving crucible
The crucible lift mechanism of lifting, the diapire inner surface of the crucible is provided with black silicon nitride bisque and is laid on black silicon nitride powder
Polysilicon layer on layer, the thickness of the polysilicon layer is 3-5 millimeters, and the thermal treatment zone, gradient zones and cooling zone are from the top down
It is sequentially distributed.
2. it is according to claim 1 to cast polysilicon shaft furnace, it is characterised in that the shaft furnace is additionally provided with elevator, institute
State elevator and be additionally provided with the observation port for observing furnace interior being distributed from the top down, lift is installed in the elevator
Elevator.
3. it is according to claim 2 to cast polysilicon shaft furnace, it is characterised in that the elevator includes car and is vertically arranged shape
The friction lever of state；The car is connected with friction plate and the outer telephone-moving structure of friction plate, and friction plate links together with car is scalable,
The outer telephone-moving structure of friction plate is used to drive friction plate to stretch out to produce brake drag effect together with friction lever abutting；It is described
The bottom of car is provided with cushion pad；The surface of the man space is provided with flexible layer, and the flexible layer passes through the same institute of bradyseism spring
State car to link together.
4. it is according to claim 3 to cast polysilicon shaft furnace, it is characterised in that the friction lever has two and is distributed in
The both sides of the car, the friction plate has two panels, and the friction plate is provided with the slide bar being located in the car, the friction
The outer telephone-moving structure of piece includes drive rod, brake spring, the link being set on drive rod, the latch being located in link and drives to insert
The out of stock mechanism of pin abjection link, the drive rod includes being hinged and interconnection two pieces points of bars together, described two points
Slide bar of the bar correspondingly with described two friction plates is hinged, and one end of the brake spring connects with the car
Together, the other end links together and in energy storage state with the link.
5. it is according to claim 4 to cast polysilicon shaft furnace, it is characterised in that the out of stock mechanism is slotting including being arranged on
Permanent magnet, the electric magnet of the repulsion permanent magnet, velocity sensor and magnet control unit on pin, the magnet control
Unit produces magnetic force due to making electric magnet obtain electric when the decrease speed that car is detected when velocity sensor is more than setting value.
6. the casting polysilicon shaft furnace according to claim 4 or 5, it is characterised in that the drive rod is provided with driving institute
Stating two points of bars carries out the flatulence bar of bending, and the cushion pad is air cushion, and the flatulence bar is connected with the cushion pad.
7. it is according to claim 6 to cast polysilicon shaft furnace, it is characterised in that the lower surface of the cushion pad is provided with anti-
Puncture layer.
8. the casting polysilicon shaft furnace according to claim 3 or 4 or 5, it is characterised in that the roof of the man space
Motor is provided with, the rotating shaft of the motor is vertically extending, and the rotating shaft of the motor is provided with the light source for irradiating diagonally downward,
The light source is laser diode.
It is 9. according to claim 8 to cast polysilicon shaft furnace, it is characterised in that also including radiator and heating arrangement,
The light source is green laser diode, and the heating arrangement includes heat-conducting substrate and the paster electricity being arranged on heat-conducting substrate
Resistance, the radiator is communicated with light source mounting hole together and heating arrangement installing hole, and the heat-conducting substrate is arranged on institute
State in heating arrangement installing hole, the heat-conducting substrate is described integrally formed with the heat conducting sleeve being located in the light source mounting hole
Light source is connected in the heat conducting sleeve, temperature be more than 25 DEG C when, the heat conducting sleeve with the light source mounting hole abut together,
Linear expansion coefficient of the linear expansion coefficient of the radiator less than the heat conducting sleeve.
10. it is according to claim 9 to cast polysilicon shaft furnace, it is characterised in that one end of the heat conducting sleeve and radiating
One end of device is all sealed against on sealing plate, and the other end of the heat conducting sleeve and the other end of radiator are by annular reservoir
It is sealed connected together, the heat conducting sleeve, sealing plate, forms annular seal space, the annular seal space between radiator and annular reservoir
Connect with annular reservoir and the intracapsular insulation liquid of annular liquid storage can under the elastic shrinkage effect of gravity or annular reservoir
To flow to sealing intracavity.
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| CN201611131905.8A CN106676627B (en) | 2016-12-09 | 2016-12-09 | Shaft furnace for casting polycrystalline silicon |
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| CN201611131905.8A CN106676627B (en) | 2016-12-09 | 2016-12-09 | Shaft furnace for casting polycrystalline silicon |
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| CN106676627B CN106676627B (en) | 2020-11-17 |
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| CN106676627B (en) | 2020-11-17 |
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