CN101760781A - Multifunctional crystal growth system of modular design - Google Patents
Multifunctional crystal growth system of modular design Download PDFInfo
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- CN101760781A CN101760781A CN200910196351A CN200910196351A CN101760781A CN 101760781 A CN101760781 A CN 101760781A CN 200910196351 A CN200910196351 A CN 200910196351A CN 200910196351 A CN200910196351 A CN 200910196351A CN 101760781 A CN101760781 A CN 101760781A
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Abstract
The invention discloses a multifunctional crystal growth system of modular design, relates to crystal growth and is characterized in that the system comprises a lifting and pulling mechanism, a growth mechanism, a pulling-down mechanism and a vacuum device. The lifting and pulling mechanism is arranged at the upper end of the growth mechanism, one side of the growth mechanism is communicated with the vacuum device, the bottom end of the growth mechanism is connected with the pulling-down mechanism by a lower water-cooling rod, and in the growth mechanism, crystals are produced in a lifting and pulling method, in a temperature gradient technique (TGT), in a heat exchanging method (HEM), in a molten-salt growth method, in a Kyropoulos method and in a Bridgman method by connecting with the lifting and pulling mechanism and the pulling-down mechanism, and crystals can be produced in a top-seeded temperature gradient technique (TSTGT). The multifunctional crystal growth system of modular design has the beneficial effects of regulating a temperature field by regulating the gradient and obtaining high temperature and temperature distribution required by growth of different crystals conveniently, thus increasing the research, development and production efficiency, improving the crystal sizes and quality and increasing the use ratio of devices.
Description
Technical field
The present invention relates to relate to crystal growth, particularly a kind of brand-new modularized multipurpose crystal growth system.
Background technology
Along with the quality and the size of the development of optical communication, laser industry and LED industry, the various smooth functional crystal materials that need are increasing.The light functional crystal of growth of large size high quality especially high-temp oxide crystal exists technical barrier, technology and different equipment that the different crystal material require is different, how wherein relatively outstanding controls the special problems of thermograde and processing unit well if being.
Summary of the invention
Technical problem solved by the invention is to provide a kind of research and development and growth difficult problem that solves the large size high-temp oxide crystal, regulate the temperature field by powerful design-adjustable, obtain different crystal grow needed high temperature and temperature distribution easily, thereby the efficient that has improved research and development and produced, crystalline size and quality are improved, improve the modularized multipurpose crystal growth system of usage ratio of equipment.
Technical problem solved by the invention realizes by the following technical solutions:
A kind of modularized multipurpose crystal growth system, it is characterized in that: comprise shift mechanism, growth mechanism, pull down mechanism and vacuum unit, shift mechanism is installed in the upper end of growth mechanism, a side and vacuum unit in growth mechanism are connected, the bottom is passed through down, and the water-cooled bar links to each other with pull down mechanism, in growth mechanism, pass through and shift mechanism, the connection of pull down mechanism realizes crystal pulling method, temperature gradient method (TGT), heat-exchanging method (HEM), molten-salt growth method, kyropoulos (Kyropoulos) and falling crucible method are produced crystal, and can realize top seed temperature gradient method (TSTGT) production crystal.
The described mechanism of growing is made of upper hanging type stay-warm case, crucible, crucible tray, flange seat and outside burner hearth and bell, flange seat is arranged on the both sides of upper hanging type stay-warm case, metallic heating body is installed on flange seat, the ring-type thermal insulation layer is installed in the bottom, also is coated with ceramics insulator outside the upper hanging type stay-warm case.
The bottom of described crucible tray is provided with the crucible pressure pin and is used for support crucible, the crucible pressure pin stretches in following thermal insulation layer, links to each other with pull down mechanism, places crucible cover at the upper end open place of described crucible, the internal surface of described crucible cover is shaped on different step surfaces, has adjustable gradient.
Upper end at described bell also is provided with little bell, and inside is provided with mechanical lifting mechanism, is used for adjustable gradient.
Shift mechanism is used for crystalline and lifts, rotates, weighs and the seed crystal position adjustments in the present invention; Burner hearth and bell are used to realize burner hearth cooling and regulating gradient; Pull down mechanism is used to regulate bushing position and heat exchange; Flange seat and metallic heating body are used for heating and regulating gradient; Ring-type thermal insulation layer and stay-warm case are multilayer chip or tubbiness lagging material with holes, realization be the insulation and regulating gradient; Crucible and crucible cover are used for raw material and place and regulating gradient; What crucible tray and crucible pressure pin were used to realize is support crucible and heat exchange.
Further scheme of the present invention is by regulating gradient and removes pull down mechanism, can simulate TSTGT, top seed crystal molten-salt growth method and kyropoulos.
By regulating gradient, can simulate CZ method, TSTGT, top seed crystal molten-salt growth method and kyropoulos.
By regulating gradient and remove shift mechanism, can simulate crucible decline, TGT and HEM.
The invention has the beneficial effects as follows by regulating gradient and regulate the temperature field, can obtain different crystal grow needed high temperature and temperature distribution easily, thereby the efficient that has improved research and development and produced is improved crystalline size and quality, improves usage ratio of equipment.
Description of drawings
Fig. 1 is the structural representation of modularized multipurpose crystal growth system of the present invention.
Fig. 2 is TSTGT, top seed crystal molten-salt growth method and kyropoulos growth structure synoptic diagram.
Fig. 3 is CZ method, TSTGT, top seed crystal molten-salt growth method and kyropoulos growth structure synoptic diagram.
Fig. 4 is crucible decline, TGT and HEM growth structure synoptic diagram.
Embodiment
For technique means, creation characteristic that the present invention is realized, reach purpose and effect is easy to understand, below in conjunction with concrete diagram, further set forth the present invention.
As shown in Figure 1, a kind of modularized multipurpose crystal growth system, comprise shift mechanism 1, growth mechanism 2, pull down mechanism 3 and vacuum unit 4, shift mechanism 1 is installed in the upper end of growth mechanism 2, a side and vacuum unit 4 in growth mechanism 2 are connected, the bottom is passed through down, and water-cooled bar 31 links to each other with pull down mechanism 3, the growth mechanism 2 in and shift mechanism 1, the connection of pull down mechanism 3 realizes crystal pulling method, temperature gradient method (TGT), heat-exchanging method (HEM), molten-salt growth method, kyropoulos (Kyropoulos) and falling crucible method are produced crystal, and can realize top seed temperature gradient method (TSTGT) production crystal.The mechanism 2 of wherein growing is made of upper hanging type stay-warm case 21, crucible 22, crucible tray 23, flange seat 24 and outside burner hearth 25 and bell 26, flange seat 24 is installed in the both sides of upper hanging type stay-warm case 21, metallic heating body 27 is installed on flange seat 24, ring-type thermal insulation layer 28 is installed in the bottom, also is coated with ceramics insulator outside upper hanging type stay-warm case 21.Wherein the bottom of crucible tray 23 connects crucible pressure pin 29 and is used for support crucible 22, crucible pressure pin 29 stretches in following thermal insulation layer 28 ', links to each other with pull down mechanism 3, places crucible cover 22 ' at the upper end open place of crucible 22, the internal surface of crucible cover 22 ' is shaped on different step surfaces, has adjustable gradient.Port lid 26 ' also is installed in the upper end of bell 26, and inside is provided with mechanical lifting mechanism, is used for adjustable gradient.
As shown in Figure 2, remove pull down mechanism 3,, can simulate TSTGT, top seed crystal molten-salt growth method and kyropoulos by regulating gradient.A kind of modularized multipurpose crystal growth system, comprise shift mechanism 1, growth mechanism 2, vacuum unit 4, shift mechanism 1 is installed in the upper end of growth mechanism 2, a side and vacuum unit 4 in growth mechanism 2 are connected, in growth mechanism 2, be connected with shift mechanism 1, wherein grow mechanism 2 by upper hanging type stay-warm case 21, crucible 22, crucible tray 23, flange seat 24 and outside burner hearth 25 and bell 26 constitute, flange seat 24 is installed in the both sides of upper hanging type stay-warm case 21, metallic heating body 27 is installed on flange seat 24, ring-type thermal insulation layer 28 is installed in the bottom, also is coated with ceramics insulator outside upper hanging type stay-warm case 21.Wherein the bottom of crucible tray 23 connects crucible pressure pin 29 and is used for support crucible 22, crucible pressure pin 29 stretches in following thermal insulation layer 28 ', crucible cover 22 ' is placed at upper end open place at crucible 22, and the internal surface of crucible cover 22 ' is shaped on different step surfaces, has adjustable gradient.Port lid 26 ' also is installed in the upper end of bell 26, and inside is provided with mechanical lifting mechanism, is used for adjustable gradient.
As shown in Figure 3, by regulating gradient, can simulate CZ method, TSTGT, top seed crystal molten-salt growth method and kyropoulos.A kind of modularized multipurpose crystal growth system, comprise shift mechanism 1, growth mechanism 2, pull down mechanism 3 and vacuum unit 4, shift mechanism 1 is installed in the upper end of growth mechanism 2, a side and vacuum unit 4 in growth mechanism 2 are connected, the bottom links to each other with pull down mechanism 3 by following water-cooled bar 31, in the mechanism 2 of growing with being connected of shift mechanism 1, pull down mechanism 3.The mechanism 2 of wherein growing is made of upper hanging type stay-warm case 21, crucible 22, crucible tray 23, flange seat 24 and outside burner hearth 25 and bell 26, flange seat 24 is installed in the both sides of upper hanging type stay-warm case 21, metallic heating body 27 is installed on flange seat 24, ring-type thermal insulation layer 28 is installed in the bottom, also is coated with ceramics insulator outside upper hanging type stay-warm case 21.Wherein the bottom of crucible tray 23 connects crucible pressure pin 29 and is used for support crucible 22, crucible pressure pin 29 stretches in following thermal insulation layer 28 ', links to each other with pull down mechanism 3, places crucible cover 22 ' at the upper end open place of crucible 22, the internal surface of crucible cover 22 ' is shaped on different step surfaces, has adjustable gradient.Port lid 26 ' also is installed in the upper end of bell 26, and inside is provided with mechanical lifting mechanism, is used for adjustable gradient.
As shown in Figure 4, remove shift mechanism 1,, can simulate crucible decline, TGT and HEM by regulating gradient.A kind of modularized multipurpose crystal growth system, comprise growth mechanism 2, pull down mechanism 3 and vacuum unit 4, a side and vacuum unit 4 in growth mechanism 2 are connected, and the bottom links to each other with pull down mechanism 3 by following water-cooled bar 31, in the mechanism 2 of growing with being connected of pull down mechanism 3.The mechanism 2 of wherein growing is made of upper hanging type stay-warm case 21, crucible 22, crucible tray 23, flange seat 24 and outside burner hearth 25 and bell 26, flange seat 24 is installed in the both sides of upper hanging type stay-warm case 21, metallic heating body 27 is installed on flange seat 24, ring-type thermal insulation layer 28 is installed in the bottom, also is coated with ceramics insulator outside upper hanging type stay-warm case 21.Wherein the bottom of crucible tray 23 connects crucible pressure pin 29 and is used for support crucible 22, crucible pressure pin 29 stretches in following thermal insulation layer 28 ', links to each other with pull down mechanism 3, places crucible cover 22 ' at the upper end open place of crucible 22, the internal surface of crucible cover 22 ' is shaped on different step surfaces, has adjustable gradient.Port lid 26 ' also is installed in the upper end of bell 26, and inside is provided with mechanical lifting mechanism, is used for adjustable gradient.
More than show and described ultimate principle of the present invention and principal character and advantage of the present invention.The technician of the industry should understand; the present invention is not restricted to the described embodiments; that describes in the foregoing description and the specification sheets just illustrates principle of the present invention; without departing from the spirit and scope of the present invention; the present invention also has various changes and modifications, and these changes and improvements all fall in the claimed scope of the invention.The claimed scope of the present invention is defined by appending claims and equivalent thereof.
Claims (4)
1. modularized multipurpose crystal growth system, it is characterized in that: comprise shift mechanism, growth mechanism, pull down mechanism and vacuum unit, shift mechanism is installed in the upper end of growth mechanism, a side and vacuum unit in growth mechanism are connected, the bottom is passed through down, and the water-cooled bar links to each other with pull down mechanism, in growth mechanism by and being connected of shift mechanism, pull down mechanism realize that crystal pulling method, temperature gradient method, heat-exchanging method, molten-salt growth method, kyropoulos and falling crucible method produce crystal, and can realize top seed temperature gradient method production crystal.
2. according to the described modularized multipurpose crystal growth system of claim 1, it is characterized in that: the described mechanism of growing is made of upper hanging type stay-warm case, crucible, crucible tray, flange seat and outside burner hearth and bell, flange seat is arranged on the both sides of upper hanging type stay-warm case, metallic heating body is installed on flange seat, the ring-type thermal insulation layer is installed in the bottom, also is coated with ceramics insulator outside the upper hanging type stay-warm case.
3. according to the described modularized multipurpose crystal growth system of claim 1, it is characterized in that: the bottom of described crucible tray is provided with the crucible pressure pin and is used for support crucible, the crucible pressure pin stretches in following thermal insulation layer, link to each other with pull down mechanism, crucible cover is placed at upper end open place at described crucible, the internal surface of described crucible cover is shaped on different step surfaces, has adjustable gradient.
4. according to the described modularized multipurpose crystal growth system of claim 1, it is characterized in that: the upper end of described bell also is provided with little bell, and inside is provided with mechanical lifting mechanism, is used for adjustable gradient.
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101967675A (en) * | 2010-11-01 | 2011-02-09 | 王楚雯 | Device for manufacturing single crystal ingots |
| CN102363843A (en) * | 2011-11-19 | 2012-02-29 | 元亮科技有限公司 | Device and method for purifying mercury |
| CN103374753A (en) * | 2012-04-19 | 2013-10-30 | 吴江亿泰光伏设备有限公司 | Large-size sapphire crystal growing furnace |
| CN103966659A (en) * | 2013-01-25 | 2014-08-06 | 中国科学院上海硅酸盐研究所 | Potassium sodium niobate KNN single crystal preparation method |
| CN104514032A (en) * | 2014-12-18 | 2015-04-15 | 华中科技大学 | Thermal field coordination control Czochralski crystal growth furnace |
| CN105525348A (en) * | 2015-12-25 | 2016-04-27 | 青岛大学 | Flux technology growth apparatus and method of rare earth doped orthophosphate crystals |
| CN106149051A (en) * | 2015-04-03 | 2016-11-23 | 中国科学院上海硅酸盐研究所 | The thermal control Bridgman method single-crystal growing apparatus of fluoride single crystal body and method |
| CN108330533A (en) * | 2018-04-02 | 2018-07-27 | 济南金曼顿自动化技术有限公司 | A kind of modular composite crystal preparation system |
-
2009
- 2009-09-25 CN CN200910196351A patent/CN101760781A/en active Pending
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101967675B (en) * | 2010-11-01 | 2014-05-07 | 王楚雯 | Device for manufacturing single crystal ingots |
| CN101967675A (en) * | 2010-11-01 | 2011-02-09 | 王楚雯 | Device for manufacturing single crystal ingots |
| CN102363843A (en) * | 2011-11-19 | 2012-02-29 | 元亮科技有限公司 | Device and method for purifying mercury |
| CN102363843B (en) * | 2011-11-19 | 2013-08-28 | 元亮科技有限公司 | Device and method for purifying mercury |
| CN103374753A (en) * | 2012-04-19 | 2013-10-30 | 吴江亿泰光伏设备有限公司 | Large-size sapphire crystal growing furnace |
| CN103966659B (en) * | 2013-01-25 | 2016-08-03 | 中国科学院上海硅酸盐研究所 | The preparation method of potassium-sodium niobate KNN monocrystalline |
| CN103966659A (en) * | 2013-01-25 | 2014-08-06 | 中国科学院上海硅酸盐研究所 | Potassium sodium niobate KNN single crystal preparation method |
| CN104514032A (en) * | 2014-12-18 | 2015-04-15 | 华中科技大学 | Thermal field coordination control Czochralski crystal growth furnace |
| CN104514032B (en) * | 2014-12-18 | 2017-03-08 | 华中科技大学 | A kind of thermal field coordinates the method for crystal growth by crystal pulling stove of control |
| CN106149051A (en) * | 2015-04-03 | 2016-11-23 | 中国科学院上海硅酸盐研究所 | The thermal control Bridgman method single-crystal growing apparatus of fluoride single crystal body and method |
| CN105525348A (en) * | 2015-12-25 | 2016-04-27 | 青岛大学 | Flux technology growth apparatus and method of rare earth doped orthophosphate crystals |
| CN105525348B (en) * | 2015-12-25 | 2018-02-27 | 青岛大学 | A kind of the flux growth metrhod grower and method of rear-earth-doped orthophosphates crystal |
| CN108330533A (en) * | 2018-04-02 | 2018-07-27 | 济南金曼顿自动化技术有限公司 | A kind of modular composite crystal preparation system |
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Application publication date: 20100630 |