CN106663654B - Hybrid-alignment device - Google Patents
Hybrid-alignment device Download PDFInfo
- Publication number
- CN106663654B CN106663654B CN201580026288.2A CN201580026288A CN106663654B CN 106663654 B CN106663654 B CN 106663654B CN 201580026288 A CN201580026288 A CN 201580026288A CN 106663654 B CN106663654 B CN 106663654B
- Authority
- CN
- China
- Prior art keywords
- mentioned
- guide rail
- plate
- driving unit
- ontology
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Transmission Devices (AREA)
- Details Of Measuring And Other Instruments (AREA)
- Machine Tool Units (AREA)
Abstract
The positioning device of this record includes: bottom plate；First movement plate can be configured in a manner of mobile to first axle in above-mentioned bottom plate；Second movable plate is configured in a manner of orthogonal with above-mentioned first axle and can move to the second axis direction in above-mentioned first movement plate, and above-mentioned second axis direction is parallel with above-mentioned first movement plate；Swivel plate can rotatably be configured centered on the rotary shaft orthogonal simultaneously with first axle and above-mentioned second axis in above-mentioned second movable plate；First driving unit, including be fixed on above-mentioned bottom plate the first driving unit ontology and being capable of mobile and above-mentioned first movement plate is connected to above-mentioned first axle first movement bracket for above-mentioned first driving unit ontology；Second driving unit, including be fixed on above-mentioned first movement plate the second driving unit ontology and can be to the second mobile bracket that above-mentioned second axis direction is mobile and is connected with above-mentioned second movable plate for above-mentioned second driving unit ontology；And third driving unit, including being fixed on the third driving unit ontology of above-mentioned second movable plate, can move that bracket be connected and the other side is fixed on the pivot support frame of above-mentioned swivel plate with above-mentioned third in a manner of it can rotate to the mobile bracket of the mobile third of above-mentioned first axle or above-mentioned second axis direction and side.
Description
Technical field
The present invention relates to positioning devices, in more detail, are related to being used in display pannel engineer equipment or semiconducter engineering
The positioning device of equipment etc..
Background technique
In general, the positioning device used in display pannel engineer equipment, semiconducter engineering equipment etc., for semiconductor
Manufacture or inspection of element etc. etc. are used short distance to move along a straight line more in order to accurately determine the position of semiconductor element etc.
Structure.
In particular, the miniaturization and precise treatment equipped etc. according to nearest display pannel engineer equipment, semiconducter engineering are inclined
To having the positioning device of direct relation with object under production department to this, same in narrow space to be easy driving can accurately real
It now positions, the lasting trend in small-sized and rich type.
But in order to which accurate position, due to positioning device linear movement when, cannot have shaking and impact, because
This, it is high in the entirety for reducing positioning device according to small-sized and rich type due to problem under structure placement property and mechanical epistasis
The thickness of degree and each structural element of size, positioning device has technical limitation.
Related look-ahead technique has the (denomination of invention: precision actuation platform, public affairs of Korean Patent Publication No. 10-2010-0012940
It opens day: on 2 9th, 2010).
Summary of the invention
Technical problem
What the present invention proposed based on such as above-mentioned technical background, the positioning device of lightweight and filming is provided.
The means solved the problems, such as
The positioning device of side includes: bottom plate according to the present invention；First movement plate, can be in a manner of mobile to first axle
Configuration is in above-mentioned bottom plate；Second movable plate is configured in a manner of orthogonal with above-mentioned first axle and can move to the second axis direction
In above-mentioned first movement plate, above-mentioned second axis direction is parallel with above-mentioned first movement plate；Swivel plate, can with first axle and on
It states the second axis while rotatably configuring centered on orthogonal rotary shaft in above-mentioned second movable plate；First driving unit, including it is solid
It is scheduled on the first driving unit ontology of above-mentioned bottom plate and above-mentioned first driving unit ontology can be moved to above-mentioned first axle
The first movement bracket that dynamic and above-mentioned first movement plate is connected；Second driving unit, including it is fixed on above-mentioned first movement plate
The second driving unit ontology and for above-mentioned second driving unit ontology can it is mobile to above-mentioned second axis direction and with it is upper
State the second movable plate is connected second mobile bracket；And third driving unit, including being fixed on above-mentioned second movable plate
Third driving unit ontology, can to the mobile bracket of the mobile third of above-mentioned first axle or above-mentioned second axis direction and side with
The mobile bracket of the mode that can be rotated and above-mentioned third is connected and the other side is fixed on the pivot support frame of above-mentioned swivel plate.
Also, above-mentioned bottom plate can include: bottom plate ontology, it is plate-like；And a pair of first guide rail, it configures in above-mentioned bottom plate sheet
The upper side of body, Xiang Shangshu first axle extend and separate between each other, above-mentioned first movement plate can include: first movement plate sheet
Body, it is plate-like；And a pair of second guide rail, the bottom surfaces in above-mentioned first movement plate ontology are configured, Xiang Shangshu first axle extends,
Configuration is meshed between above-mentioned a pair of first guide rail with above-mentioned first guide rail.
Also, above-mentioned first movement plate may also include a pair of of third guide rail, and above-mentioned a pair of third guide rail configuration is above-mentioned the
The upper side of one movable plate ontology, the second axis direction of Xiang Shangshu extend and separate between each other, above-mentioned second movable plate can include:
Second movable plate ontology, it is plate-like；And a pair of 4th guide rail, configure the bottom surfaces in above-mentioned second movable plate, Xiang Shangshu the
Two axis directions extend, separated in a manner of being provided with above-mentioned third guide rail between a pair of 4th guide rail come respectively with above-mentioned third
Guide rail is meshed.
Also, above-mentioned a pair of first guide rail may include the first guide rail body respectively, and above-mentioned first guide rail body is to above-mentioned
One axis extends and is formed with the first groove along the length direction of above-mentioned first guide rail, and above-mentioned a pair of second guide rail respectively includes the
Two guide rail bodies, above-mentioned second guide rail body extend to above-mentioned first axle and are formed with along the length direction of above-mentioned second guide rail
The second opposite groove with the first groove, above-mentioned a pair of third guide rail respectively include third guide rail body, above-mentioned third guide rail sheet
Body extends to above-mentioned second axis direction and is formed with third groove along the length direction of above-mentioned third guide rail, and the above-mentioned a pair of 4th
Guide rail respectively includes the 4th guide rail body, and above-mentioned 4th guide rail body extends to above-mentioned second axis and along above-mentioned 4th guide rail
Length direction is formed with fourth groove opposite with third groove, and above-mentioned positioning device may also include that circular first roller portion
Part configures the first groove of Xiang Shangshu and above-mentioned second groove between above-mentioned first guide rail body and above-mentioned second guide rail body
Insertion；And circular second roller part, it configures between above-mentioned third guide rail body and above-mentioned 4th guide rail body, upwards
State third groove and the insertion of above-mentioned 4th groove.
Also, above-mentioned bottom plate may also include a pair of first braced frame, and above-mentioned a pair of first braced frame is in above-mentioned bottom plate
The upper side of ontology is prominent upwards to be formed, to be provided with above-mentioned a pair of first guide rail between above-mentioned a pair of first braced frame
Mode separate between each other, support above-mentioned a pair of first guide rail, above-mentioned first movement plate further include: the second braced frame, from
The lower part of above-mentioned first movement plate ontology is prominent downwards to be formed, and is configured between above-mentioned a pair of second guide rail, is supported above-mentioned
Second guide rail；And third braced frame, it is formed, is configured upper from the upper side of above-mentioned first movement plate ontology is prominent upwards
It states between a pair of of third guide rail, supports above-mentioned third guide rail, above-mentioned second movable plate may also include the 4th braced frame, and above-mentioned
Four braced frames are formed by bending downwards from the edge of above-mentioned second movable plate ontology, support above-mentioned 4th guide rail.
Also, above-mentioned first movement plate can include: extension, extension, above-mentioned extension is from above-mentioned first movement plate sheet
The lateral above-mentioned first axle of the one of body extends, and above-mentioned extension is placed and be fixed on at least part of above-mentioned second driving unit ontology
Portion.
Also, above-mentioned bottom plate may also include the side for being formed in above-mentioned bottom plate ontology and the other side and be formed with multiple perforations
A pair of of bottom plate fixed part in hole.
Also, it is respectively formed in above-mentioned bottom plate, above-mentioned first movement plate, above-mentioned second movable plate and above-mentioned swivel plate
Circular first order hole, second order hole, third aligned apertures and the 4th aligned apertures, above-mentioned rotary shaft can pass through above-mentioned first row
Arrange hole, second order hole, third aligned apertures and the 4th aligned apertures.
Also, above-mentioned first order hole and above-mentioned second order hole can be formed with first size, above-mentioned third aligned apertures
And above-mentioned 4th aligned apertures can be formed with the second size, above-mentioned first size can be greater than the second size.
Also, above-mentioned first movement plate or above-mentioned second movable plate are moved respectively for above-mentioned bottom plate or above-mentioned first movement plate
In dynamic process, above-mentioned first movement plate and above-mentioned second movable plate can not be interfered with above-mentioned rotary shaft.
Also, above-mentioned second driving unit and above-mentioned third driving unit in a manner of across above-mentioned swivel plate mutually side by side
Configuration, above-mentioned first driving unit are configurable on the side of above-mentioned second driving unit and above-mentioned third driving unit.
Invention effect
According to embodiment present invention as described above, it is possible to provide the positioning device of lightweight and filming, having can be
The advantages of above-mentioned positioning device is arranged in the intractable position of setting condition.
Also, since the driving unit of plate is not overlapped between each other, the shape or size of drive motor are unrestricted,
And it is formed with through hole and Optical devices can be utilized simultaneously.
Detailed description of the invention
Fig. 1 is the perspective view for showing the positioning device of the embodiment of the present invention.
Fig. 2 is the top view for showing the positioning device of Fig. 1.
Fig. 3 is the exploded perspective view of the positioning device of Fig. 1.
Fig. 4 is the figure of the exploded perspective view of Fig. 3 from the direction IV.
Fig. 5 is the figure of the exploded perspective view of Fig. 4 from the direction V.
Fig. 6 is the third driving unit for the positioning device for showing Fig. 1 and the exploded perspective view for rotating the structure pulled.
Fig. 7 is the third driving unit for the positioning device for showing Fig. 6 and the figure for rotating the operating pulled.
Fig. 8 is the first guide rail of the positioning device for showing Fig. 1 and portion's view of the second guide rail.
Specific embodiment
Hereinafter, the embodiment of the present invention is described in detail referring to attached drawing, to belong to technical field of the invention
Those of ordinary skill can be easy to carry out implementation.
The present invention can be implemented in a variety of forms, be not limited to embodiment described herein.In order to definitely
Ground illustrates the present invention, and the part unrelated with explanation is omitted in the accompanying drawings, throughout the specification for same or similar
Structural element imparts identical appended drawing reference.Also, for the convenience of explanation, in the accompanying drawings shown in each structure size and
Thickness is indicated with arbitrary dimension and thickness, therefore the present invention is not limited to size shown in the drawings and thickness.
According to the present invention "~on " it is the up or down meaned positioned at object Part, being not meant to must be with gravity
It is located at top on the basis of direction.Also, throughout the specification, when some some structural element of part " comprising ", as long as without spy
Not opposite record, other structures element except being just not meant to, but mean to may also include other structures element.
Also, the positioning device illustrated in the present invention, which may imply that, to carry out the mixing that position is moved along multiple axis
Alignment device.
Hereinafter, being described in detail referring to positioning device of the attached drawing to the embodiment of the present invention.
Fig. 1 is the perspective view for showing the positioning device of the embodiment of the present invention, and Fig. 2 is the vertical view for showing the positioning device of Fig. 1
Figure.
Referring to FIG. 1 and FIG. 2, according to a part of structure of the positioning device of the present embodiment 1 along with first axle D1 and second
The second axis D1 orthogonal axis D2 dimension linear is mobile, and other parts can be along the rotation orthogonal simultaneously with first axle D1 and the second axis D2
Shaft R rotation can carry out the target object for being placed on the station or positioning device 1 that combine with positioning device 1 accurate
Adjustment, such as the precision of the operating position of semiconductor wafer etc. can be adjusted.
Positioning device 1 includes bottom plate 100, first movement plate 200, the second movable plate 300, the driving list of swivel plate 400, first
First 500, second driving unit 600, third driving unit 700.
Presetting position can be placed or be fixed on to bottom plate 100, it is possible to provide to the basis of the position setting of positioning device 1.
First movement plate 200 can be configured in a manner of mobile to first axle D1 in above-mentioned bottom plate 100, the second movable plate
300 can be configured in a manner of mobile to the second direction axis D2 in above-mentioned first movement plate 200, the above-mentioned direction second axis D2 with it is upper
It is parallel to state first movement plate 200.
Swivel plate 400 is configured in the way of capable of being rotated centered on rotary shaft R in the second movable plate 300.
First driving unit 500 is fixed on bottom plate 100, can be to the first mobile driving unit 500 of the direction first axle D1
Part-structure is connected with first movement plate 200.Therefore, the first driving unit 500 enables first movement plate 200 bottom of relative to
Plate 100 is mobile to the direction first axle D1.
Second driving unit 600 is fixed on first movement plate 200, can be to the second driving unit of the second direction axis D2 movement
600 part-structure is connected with the second movable plate 300.Therefore, the second driving unit 600 enables 300 phase of the second movable plate
It is mobile to the second direction axis D2 for first movement plate 200.
Equally, third driving unit 700 is fixed on the second movable plate 300, the part that can be moved centered on rotary shaft R
Structure is connected with swivel plate 400.Therefore, third driving unit 700 enables swivel plate 400 to carry out centered on rotary shaft R
Rotation relative to the second movable plate 300.
Hereinafter, bottom plate 100, first movement plate 200, the second movable plate 300, the driving list of swivel plate 400, first is described in detail
The specific structure of first 500, second driving unit 600, third driving unit 700.
Fig. 3 is the exploded perspective view of the positioning device of Fig. 1, and Fig. 4 is the figure of the exploded perspective view of Fig. 3 from the direction IV,
Fig. 5 is the figure of the exploded perspective view of Fig. 4 from the direction V.
Referring to Fig. 3, bottom plate 100 includes bottom plate ontology 101, the first guide rail 104, the first braced frame 103, bottom plate fixed part
105。
Bottom plate ontology 101 is plate-like, is formed with circular first order hole 102 in the center of bottom plate ontology 101.In bottom plate
Ontology 101 is fixed with the first driving unit 500.
First guide rail 104 configures the upper side in bottom plate ontology 101, and extends to the direction first axle D1.And first leads
Rail 104 is configured in a manner of separating between each other.
First braced frame 103 protrudes upwards from the upper side of bottom plate ontology 101, by 104 centre of the first guide rail
It separates between each other.And the first braced frame 103 is in contact with the rear of the first guide rail 104, from posterior support first
Guide rail 104.
Bottom plate fixed part 105 is formed in the one side edge and another side edge of bottom plate ontology 101, and is formed with multiple perforations
Hole.In the present embodiment, bottom plate fixed part 105 configures in a manner of the first braced frame 103 can be arranged between in bottom plate sheet
101 side of body and the other side.
Bottom plate fixed part 105 can be fixed on work fixed station by the secure component (not shown) for penetrating through above-mentioned through hole
(not shown) provides the fixation position of positioning device 1.
First movement plate 200 includes first movement plate ontology 201, the second guide rail 204, third guide rail 205, the second support frame
Frame 203, third braced frame 206, extension 207.
First movement plate ontology 201 is plate-like, and the center of first movement plate ontology 201 is formed with and bottom plate ontology 101
First order hole 102 arranges circular second order hole 208 together.At this point, according to the first row of the positioning device 1 of the present embodiment
The size for arranging hole 102 and second order hole 208 can be identical.
Second guide rail 204 configure first movement plate ontology 201 bottom surfaces and to first axle D1 extend.Second guide rail
204 configurations are meshed with the first guide rail 104, between the first guide rail 104 may be guided relative to along the first axle side D1 respectively
Movement to the first movement plate 200 of the bottom plate 100 of formation.
Second braced frame 203 is formed from the lower part of first movement plate ontology 201 is prominent downwards, and configuration is a pair of the
Between two guide rails 204.Second braced frame 203 is in contact with the rear of the second guide rail 204, from the second guide rail of posterior support
204。
Third guide rail 205 configures the upper side in first movement plate ontology 201, the direction orthogonal with the second guide rail 204
Extend to the second direction axis D2.
Third braced frame 206 is formed from the upper side of first movement plate ontology 201 is prominent upwards, and configuration is a pair of the
Between three guide rails 205.Third braced frame 206 is in contact with the rear of third guide rail 205, from posterior support third guide rail
205。
Extension 207 extends from a side of first movement plate ontology 201 to the direction first axle D1, is fixed with the second driving list
Member 600.
Second movable plate 300 includes the second movable plate ontology 301, the 4th guide rail 303, the 4th braced frame 302, rotating part
Part 304.
Second movable plate ontology 301 is plate-like, and the central portion side of the second movable plate ontology 301 is configured with rotary part 304,
During above-mentioned rotary part 304 can be with the rotary shaft R that the vertical direction of the plane formed with the second movable plate ontology 301 is formed
Heart rotation.
Rotary part 304 is connected in a manner of it can rotate with the second movable plate ontology 301, in rotary part 304
Center is formed with third aligned apertures 305 and rounded, is formed with multiple first combined holes 306 in the upper side of rotary part 304.
Third aligned apertures 305 can arrange together with first order hole 102 and second order hole 208, and have less than first
The diameter in aligned apertures 102 and second order hole 208.
4th guide rail 303 configure the second movable plate ontology 301 bottom surfaces and to the second direction axis D2 extend.4th leads
Rail 303 is spaced from each other in the mode that centre is provided with third guide rail 205, is meshed respectively with third guide rail 205, is carried out bootable phase
Second movable plate 300 of the first movement plate 200 that is formed along the second direction axis D2 is moved.
4th braced frame 302 is formed by bending downwards from the side of the second movable plate ontology 301 and another side edge, from
The 4th guide rail 303 of posterior support.
Swivel plate 400 can be rotated centered on rotary shaft R to be connected with the second movable plate 300, including rounded rotation
Rotating plate ontology 401.
Hole is inserted into the bracket that one place of the edge of swivel plate ontology 401 forms oriented 401 central concave of swivel plate ontology
405, the upper side in swivel plate ontology 401, which is formed with, in the upper side of swivel plate ontology 401 is connected with bracket insertion hole 405
Bracket fixation hole 406.
It is formed with and first order hole 102, second order hole 208 and third aligned apertures in the center of swivel plate ontology 401
305 circular 4th aligned apertures 402 arranged together, the 4th aligned apertures 402 can have identical with third aligned apertures 305 straight
Diameter.
The second combined hole 403 arranged together with the first combined hole 306 is formed with around the 4th aligned apertures 402.It borrows
Help while penetrating through the secure component of the first combined hole 306 and the second combined hole 403 that arrange together between each other, swivel plate 400
It is connected centered on rotary shaft R with the second movable plate 300.
According to the first order hole 102 of the positioning device 1 of the present embodiment, second order hole 208, third aligned apertures 305 and
4th aligned apertures 402 are arranged between each other, first order hole 102, second order hole 208, third aligned apertures 305 and the 4th
In the state of aligned apertures 402, rotary shaft R can penetrate through first order hole 102, second order hole 208, third aligned apertures 305 simultaneously
And the 4th aligned apertures 402.
Also, first movement plate 200 or the second movable plate 300 are respectively relative to bottom plate 100 or first movement plate 200 is mobile
During, the movement of first movement plate 200 or the second movable plate 300 is subtleer, therefore first movement plate 200 and the second movement
Plate 300 is not interfered with rotary shaft R.
That is, can also maintain first order hole 102, second row even if first movement plate 200 and the second movable plate 300 are mobile
Arrange the breakthrough status in hole 208, third aligned apertures 305 and the 4th aligned apertures 402, it is therefore desirable in the case where, it can be by Optical devices
Be arranged in bottom plate 100 lower part come using.
On the one hand, the first driving unit 500 includes: the first driving unit ontology 510, is fixed on bottom plate 100；First moves
Dynamic bracket 520, can it is mobile to the direction first axle D1 relative to the first driving unit ontology 510 and with 200 phase of first movement plate
Connection；First drive motor 530, provides the driving force for making first movement bracket 520；First drive shaft 550 is driven from first
Dynamic motor 530 receives rotary force, is provided in a manner of it can move to the direction first axle D1 in the outer peripheral surface of the first drive shaft 550
First movement bracket 520.
That is, making and first movement plate 200 in the state that the first drive shaft 500 is fixed on bottom plate 100 by external signal
The first movement bracket 520 being connected is mobile to the direction first axle D1, as an example, can control the first movement to X-direction
The movement of plate 200, the second movable plate 300 and swivel plate 400.
At this point, the outer peripheral surface in the first drive shaft 550 can be formed with screw thread (not shown).Also, in first movement bracket
520 side is fixed in the state of first movement plate 200, on the other side of first movement bracket 520 and the first drive shaft 550
It states screw thread to be meshed, by the rotary force of the first drive motor 530, first movement bracket 520 can be to first movement plate 200 and
One direction axis D1 is mobile.
Second driving unit 600 includes: the second driving unit ontology 610, places and is fixed on prolonging for first movement plate 200
Extending portion 207；Second mobile bracket 620, can be mobile to the second direction axis D2 relative to the second driving unit ontology 610, and with
Second movable plate 300 is connected；Second drive motor 630, for providing the driving force for keeping the second mobile bracket 620 mobile；The
Two drive shafts 650 receive rotary force from the second drive motor 630, in outer peripheral surface can move along the second direction axis D2
Mode is formed with screw thread in outer peripheral surface configured with the second mobile bracket 620.
Second driving unit 600 is fixed in the state of first movement plate 200, is made and the second movable plate by external signal
300 the second mobile brackets 620 being connected are to the movement of the second direction axis D2, as an example, only for controlling to Y direction
It is variant in the structure of the movement of second movable plate 300 and swivel plate 400, the structure of other structures and the first driving unit 500
It is identical, therefore omit the detailed description to this.
Hereinafter, the structure of third driving unit 700 is described in detail.
Fig. 6 is the third driving unit for the positioning device for showing Fig. 1 and the exploded perspective view for rotating the structure pulled, and Fig. 7 is
The figure for the operating that the third driving unit and rotation for showing the positioning device of Fig. 6 are pulled.
Referring to Fig. 6 and Fig. 7, third driving unit 700 include third driving unit ontology 710, the mobile bracket 720 of third,
Third drive motor 730, pivot support frame 740, third drive shaft 750, bracket fixture portions part 760, third elastomeric element 770.
Third driving unit ontology 710 includes the frame section 711 fixed with 300 phase of the second movable plate, covers frame section 711
And the cover 712 of inner space is formed between frame section 711.Frame section 711 is fixed on two the 4th of the second movable plate 300
One the 4th braced frame 302 in braced frame 302.
Third drive motor 730 provides rotary force, and the side of third driving unit ontology 710 is arranged in.
Third drive shaft 750 extends to the second direction axis D2, receives rotary force from third drive motor 730.Third driving
The mode that axis 750 can rotate frame section 711 connects, and is formed with screw thread in the outer peripheral surface of third drive shaft 750.
The mobile bracket 720 of third is penetrated through in side to be meshed in the state of third drive shaft 750 with above-mentioned screw thread, can
It is mobile to the second direction axis D2 by the rotation of third drive shaft 750.
The mobile bracket 720 of third can be in hexahedron, be formed with the first fastener hole in the upper side of the mobile bracket 720 of third
721。
Bracket fixture portions part 760 includes: head 761, rounded；Neck portion 762, the prominent bottom surfaces for being formed in head 761
And has and be less than 761 diameter of head；First fastener hole 763 is formed through the upper side in head 761 and moves bracket with third
720 the first fastener hole 721 arranges together.
Bracket fixture portions part 760 penetrates through the first fastener hole 763 and is fixed on the first fastener hole 721, as an example, can borrow
The secure component such as screw is helped to be fixed on the mobile bracket 720 of third.
As an example, pivot support frame 740 can be plate-like.
It is formed in the side of pivot support frame 740 with curvature corresponding with 762 periphery of neck portion of bracket fixture portions part 760
The rounded portions 742 of formation.
The rounded portions 742 of pivot support frame 740 are to the neck portion for the bracket fixture portions part 760 for being fixed on the mobile bracket 720 of third
762 insertions enable pivot support frame 740 to rotate relative to the mobile bracket 720 of third.
The bracket insertion hole 405 of another lateral swivel plate 400 of pivot support frame 740 is inserted into, the other side of pivot support frame 740
It is formed with the fixation hole 741 arranged together with the bracket fixation hole 406 of swivel plate 400.Pivot support frame 740 can be by perforation bracket
The secure component of fixation hole 406 and fixation hole 742 is fixed on swivel plate 400.
That is, the side of pivot support frame 740 is connected in a manner of it can rotate with the mobile bracket 720 of third, pivot support frame
740 other side is fixed on swivel plate 400.
The bracket fixture portions for surrounding third drive shaft 750 are provided between the mobile bracket 720 of third and frame section 711
Part 760 can provide recuperability to the mobile bracket 720 of third.
Hereinafter, making the mistake for rotating swivel plate 400 according to the third driving unit 700 of another positioning device 1 of the present embodiment
Journey is described in detail.
As shown in Figure 8 can, by pivot support frame 740 to the linear travel paths of the mobile bracket 720 of third, that is, to the second axis
D2 vertical state is set to base position.
Like this, if driving third drive motor 730 under the state of base position, the rotation displacement of swivel plate 400 can
It is adjusted.
That is, if by the rotary force of third drive motor 730 with the identical direction of third drive shaft 750 or opposite side
To rotation, then the mobile bracket 720 of third for being connected to third drive shaft 750 is moved along the second axis D2.
If the mobile bracket 720 of third moves linearly along the second axis D2, rotatably mobile with third with side
The pivot support frame 740 that bracket 720 is connected is pushed to the linear movement direction of the mobile bracket 720 of third.Pivot support frame as a result,
740 can be rotated centered on rotary shaft R together with swivel plate 400.
At this point, the linear movement direction of the mobile bracket 720 of third can be with the tangential direction phase of the circumference centered on rotary shaft R
Together.
On the other hand, in said reference position, the Mobility Center P1 of the mobile bracket 720 of third and pivot support frame 740
Mobility Center P2 can be consistent.
If rotating swivel plate 400 from said reference position with presetting angle, relative to the mobile bracket 720 of third
Mobility Center P1, the Mobility Center P2 of pivot support frame 740 is mobile to the center of swivel plate 400.
The mobile bracket 720 of third can be relatively moved to the end of the rounded portions 742 of pivot support frame 740 opened, therefore i.e.
Make the linear movement road of the Mobility Center P2 of the rounded portions 742 of pivot support frame 740 and the Mobility Center P1 of the mobile bracket 720 of third
Diameter is different, and pivot support frame 740 and the mobile bracket 720 of third also mutually do not interfere movement routine, can successfully be rotated respectively
And linear movement.
Therefore, the rotation displacement that successfully accurate can control swivel plate 400.
At this point, the rotation displacement adjusting range of swivel plate 400 is adjusted not instead of using 360 degree of gamuts as object with precision
For the purpose of whole, it illustratively can be ± 10 degree, therefore, even if swivel plate 400 is rotated from said reference position, third is moved
Dynamic bracket 720 will not be completely disengaged from the rounded portions 742 of pivot support frame 740, and part of it can overlap the circle of pivot support frame 740
Shape portion 742.
On the other hand, according to the second driving unit 600 and third driving unit 700 of the positioning device of the present embodiment 1 it
Between be arranged swivel plate 400 and mutually fitly configured to the second direction axis D2, the second driving unit 600 to the second axis D2 configuration exists
The side of first driving unit 500 and third driving unit 700.
That is, the first driving unit 500, the second driving unit 600 and third driving unit 700 can be with first order holes
102, it is not interfered between each other centered on second order hole 208, third aligned apertures 305 and the 4th aligned apertures 402.Therefore,
It can be unrelated with the shape or size of drive motor of 500 second driving unit 600 of the first driving unit and third driving unit 700
Ground is arranged in positioning device 1.
But this is illustrative configuration, the first driving unit 500 and third driving unit 700 of positioning device 1 it
Between be arranged swivel plate 400 and separate mutually fitly to be configured to the direction first axle D1, the first driving unit 500 can be to first axle
D1 is configured in the side of the second driving unit 600 and third driving unit 700.Under such circumstances, third driving unit 700
The mobile bracket 720 of third can be mobile to first axle D1.
It may also include configuration rotor block between the guide rails according to the positioning device 1 of the present embodiment.
Hereinafter, the structure of above-mentioned rollers component is described in detail.
Fig. 8 is the first guide rail of the positioning device for showing Fig. 1 and portion's view of the second guide rail.
Referring to Fig. 8, the first guide rail 104 of bottom plate 100 includes the first guide rail body 111 extended to first axle D1, the
One guide rail body 111 is formed with the first groove 112 along the length direction of the first guide rail body 111.
Second guide rail 204 of first movement plate 200 includes the second guide rail body 211 extended to first axle D1, second
Guide rail body 211 is formed with the second groove 212 along the length direction of the second guide rail body 211.
First groove 112 and the second groove 212 are configured in opposite mode in the first guide rail 104 and the second guide rail 204,
The rotor block of the first groove 112 and the second groove 212 is provided with while penetrated through between first groove 112 and the second groove 212
800。
As an example, rotor block 800 can be ball bearing (Ballbearing), can smoothly realize to bottom plate
100 movement to first movement plate 200.
On the other hand, the 4th guide rail 303 of the third guide rail 205 of first movement plate 200 and the second movable plate 300 is also distinguished
It is formed with groove opposite between each other, and is provided with the rotor block for being inserted in above-mentioned groove, so as to smoothly realize
Movement to the second movable plate 300 of first movement plate 200.
According to the embodiment proposed, it is possible to provide the positioning device of lightweight and filming, it can be in setting item to have
The advantages of above-mentioned positioning device is arranged in the intractable position of part.
Also, since the driving unit of plate is not overlapped between each other, the shape or size of drive motor are unrestricted,
And it is formed with through hole and Optical devices can be utilized simultaneously.
It this concludes the description of the preferred embodiment of the present invention, but the present invention is not limited thereto, inventing claimed range
In the range of specification and attached drawing, numerous variations implementation can be carried out, certainly, this is also to belong to the scope of the present invention.
The specific embodiment of invention can be implemented together according to the above description.
Industrial availability
The present invention relates to positioning devices, are applicable to various industrial equipments, have in industry with Reusability
Utilizability.
Claims (8)
1. a kind of positioning device, which is characterized in that
Include:
Bottom plate；
First movement plate can be configured in a manner of mobile to first axle in above-mentioned bottom plate；
Second movable plate is configured in a manner of orthogonal with above-mentioned first axle and can move to the second axis direction and is moved above-mentioned first
Movable plate, above-mentioned second axis direction are parallel with above-mentioned first movement plate；
Swivel plate can be rotatably configured centered on the rotary shaft orthogonal simultaneously with first axle and above-mentioned second axis above-mentioned
Two movable plates；
First driving unit, including being fixed on the first driving unit ontology of above-mentioned bottom plate and for above-mentioned first driving unit
The first movement bracket that ontology can be to above-mentioned first axle movement and above-mentioned first movement plate is connected；
Second driving unit, including being fixed on the second driving unit ontology of above-mentioned first movement plate and being driven for above-mentioned second
Moving cell ontology can be to the second mobile bracket that above-mentioned second axis direction is mobile and is connected with above-mentioned second movable plate；And
Third driving unit, including be fixed on above-mentioned second movable plate third driving unit ontology, can be to above-mentioned first axle
Or the mobile mobile bracket of third and side of above-mentioned second axis direction in a manner of it can rotate with the mobile bracket of above-mentioned third
It is connected and the other side is fixed on the pivot support frame of above-mentioned swivel plate,
Above-mentioned bottom plate includes:
Bottom plate ontology, it is plate-like；And
A pair of first guide rail configures the upper side in above-mentioned bottom plate ontology, and Xiang Shangshu first axle extends and separates between each other,
Above-mentioned first movement plate includes:
First movement plate ontology, it is plate-like；And
A pair of second guide rail configures the bottom surfaces in above-mentioned first movement plate ontology, and Xiang Shangshu first axle extends, and configures above-mentioned
It is meshed between a pair of first guide rail with above-mentioned first guide rail,
Above-mentioned first movement plate further includes a pair of of third guide rail, and above-mentioned a pair of third guide rail configuration is in above-mentioned first movement plate ontology
Upper side, the second axis direction of Xiang Shangshu extend and separate between each other,
Above-mentioned second movable plate includes:
Second movable plate ontology, it is plate-like；And
A pair of 4th guide rail configures the bottom surfaces in above-mentioned second movable plate, and the second axis direction of Xiang Shangshu extends, a pair of the
The mode that above-mentioned third guide rail is provided between four guide rails separates to be meshed respectively with above-mentioned third guide rail,
Above-mentioned bottom plate further includes a pair of first braced frame, upper side of above-mentioned a pair of first braced frame in above-mentioned bottom plate ontology
Prominent upwards to be formed, the center of above-mentioned a pair of first braced frame is arranged above-mentioned a pair of first guide rail and separates between each other,
Above-mentioned a pair of first guide rail is supported,
Above-mentioned first movement plate further include:
Second braced frame is formed from the lower part of above-mentioned first movement plate ontology is prominent downwards, and configuration is above-mentioned a pair of the
Between two guide rails, above-mentioned second guide rail is supported；And
Third braced frame is formed from the upper side of above-mentioned first movement plate ontology is prominent upwards, and configuration is above-mentioned a pair of the
Between three guide rails, above-mentioned third guide rail is supported,
Above-mentioned second movable plate further includes the 4th braced frame, and above-mentioned 4th braced frame is from the side of above-mentioned second movable plate ontology
Edge is formed by bending downwards, supports above-mentioned 4th guide rail.
2. positioning device according to claim 1, which is characterized in that
Above-mentioned a pair of first guide rail respectively includes the first guide rail body, and above-mentioned first guide rail body extends to above-mentioned first axle and edge
The length direction of above-mentioned first guide rail be formed with the first groove,
Above-mentioned a pair of second guide rail respectively includes the second guide rail body, and above-mentioned second guide rail body extends to above-mentioned first axle and edge
The length direction of above-mentioned second guide rail be formed with second groove opposite with the first groove,
Above-mentioned a pair of third guide rail respectively includes third guide rail body, and above-mentioned third guide rail body extends to above-mentioned second axis direction
And it is formed with third groove along the length direction of above-mentioned third guide rail,
Above-mentioned a pair of 4th guide rail respectively includes the 4th guide rail body, and above-mentioned 4th guide rail body extends to above-mentioned second axis and edge
The length direction of above-mentioned 4th guide rail be formed with fourth groove opposite with third groove,
Above-mentioned positioning device further include:
Circular first roller part configures between above-mentioned first guide rail body and above-mentioned second guide rail body, Xiang Shangshu the
One groove and the insertion of above-mentioned second groove；And
Circular second roller part configures between above-mentioned third guide rail body and above-mentioned 4th guide rail body, Xiang Shangshu the
Three grooves and the insertion of above-mentioned 4th groove.
3. positioning device according to claim 1, which is characterized in that above-mentioned first movement plate includes extension, above-mentioned to prolong
Extending portion extends from a lateral above-mentioned first axle of above-mentioned first movement plate ontology, and at least one of above-mentioned second driving unit ontology
Divide and places and be fixed on above-mentioned extension.
4. positioning device according to claim 1, which is characterized in that above-mentioned bottom plate further includes being formed in above-mentioned bottom plate ontology
Side and the other side and a pair of of the bottom plate fixed part for being formed with multiple through holes.
5. positioning device according to claim 1, which is characterized in that
Circular first is respectively formed in above-mentioned bottom plate, above-mentioned first movement plate, above-mentioned second movable plate and above-mentioned swivel plate
Aligned apertures, second order hole, third aligned apertures and the 4th aligned apertures,
Above-mentioned rotary shaft passes through above-mentioned first order hole, second order hole, third aligned apertures and the 4th aligned apertures.
6. positioning device according to claim 5, which is characterized in that above-mentioned first order hole and above-mentioned second order hole with
First size is formed, and above-mentioned third aligned apertures and above-mentioned 4th aligned apertures are formed with the second size, and above-mentioned first size is greater than the
Two sizes.
7. positioning device according to claim 5, which is characterized in that above-mentioned first movement plate or above-mentioned second movable plate point
During mobile for above-mentioned bottom plate or above-mentioned first movement plate, above-mentioned first movement plate and above-mentioned second movable plate not with
Above-mentioned rotary shaft interferes.
8. positioning device according to claim 1, which is characterized in that
Above-mentioned second driving unit and above-mentioned third driving unit are mutually arranged side-by-side in a manner of across above-mentioned swivel plate,
Above-mentioned first driving unit configuration is in the side of above-mentioned second driving unit and above-mentioned third driving unit.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020150107841A KR101608625B1 (en) | 2015-07-30 | 2015-07-30 | Positioning apparatus |
| KR10-2015-0107841 | 2015-07-30 | ||
| PCT/KR2015/009813 WO2017018592A1 (en) | 2015-07-30 | 2015-09-18 | Hybrid alignment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106663654A CN106663654A (en) | 2017-05-10 |
| CN106663654B true CN106663654B (en) | 2019-07-30 |
Family
ID=55800722
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201580026288.2A Active CN106663654B (en) | 2015-07-30 | 2015-09-18 | Hybrid-alignment device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP6401299B2 (en) |
| KR (1) | KR101608625B1 (en) |
| CN (1) | CN106663654B (en) |
| WO (1) | WO2017018592A1 (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112512744A (en) * | 2018-06-12 | 2021-03-16 | 考文垂联合股份有限公司 | Method and apparatus for performing multiple manufacturing operations on an object |
| CN108746784A (en) * | 2018-06-28 | 2018-11-06 | 宁德思客琦智能装备有限公司 | A kind of lithium battery electric core pole facing cut turning equipment |
| KR102259802B1 (en) * | 2019-07-04 | 2021-06-02 | 퀸시스(주) | Rotational stage |
| JP7266875B2 (en) * | 2019-09-27 | 2023-05-01 | 株式会社ナガセインテグレックス | Machine Tools |
| KR102447890B1 (en) * | 2020-09-04 | 2022-09-27 | 삼승테크(주) | Apparatus for Precision Controlling Rotating Angle of Test Stage |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2527745Y2 (en) * | 1990-08-23 | 1997-03-05 | 日本精工株式会社 | Linear motion rolling guide bearing |
| CN1485694A (en) * | 2003-08-29 | 2004-03-31 | 清华大学 | Step-by-step projection photo-etching machine double set shifting exposure ultra-sophisticated positioning silicon chip bench system |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1094927A (en) * | 1996-07-29 | 1998-04-14 | Matsushita Electric Ind Co Ltd | Machine tool |
| JP4814438B2 (en) * | 2001-05-02 | 2011-11-16 | 日本トムソン株式会社 | Stage device with built-in linear motor |
| JP4560235B2 (en) * | 2001-05-16 | 2010-10-13 | 日本トムソン株式会社 | Angle adjustment table device |
| WO2009028329A1 (en) * | 2007-08-27 | 2009-03-05 | Konica Minolta Opto, Inc. | Multiaxis working machine |
| JP5955964B2 (en) * | 2011-09-12 | 2016-07-20 | マッパー・リソグラフィー・アイピー・ビー．ブイ． | Guidance for target processing tools |
| KR101493331B1 (en) * | 2014-10-13 | 2015-02-13 | 주식회사 재원 | Angle positioning device |
-
2015
- 2015-07-30 KR KR1020150107841A patent/KR101608625B1/en active IP Right Grant
- 2015-09-18 WO PCT/KR2015/009813 patent/WO2017018592A1/en active Application Filing
- 2015-09-18 CN CN201580026288.2A patent/CN106663654B/en active Active
- 2015-09-18 JP JP2016566925A patent/JP6401299B2/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2527745Y2 (en) * | 1990-08-23 | 1997-03-05 | 日本精工株式会社 | Linear motion rolling guide bearing |
| CN1485694A (en) * | 2003-08-29 | 2004-03-31 | 清华大学 | Step-by-step projection photo-etching machine double set shifting exposure ultra-sophisticated positioning silicon chip bench system |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2017018592A1 (en) | 2017-02-02 |
| KR101608625B1 (en) | 2016-04-11 |
| JP2017536687A (en) | 2017-12-07 |
| JP6401299B2 (en) | 2018-10-10 |
| CN106663654A (en) | 2017-05-10 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN106663654B (en) | Hybrid-alignment device | |
| JP6734666B2 (en) | Spin processing device | |
| US20150040711A1 (en) | Parallel micro-robot with 5-degrees-of-freedom | |
| WO2007055339A1 (en) | Three-dimensional positioning table | |
| JPWO2006059457A1 (en) | Alignment device | |
| US9624704B1 (en) | Pivot pin device | |
| US11822361B2 (en) | Operating device | |
| EP3199328A1 (en) | Three-dimensional printer with platform lifting mechanism | |
| CN104071573A (en) | Substrate transfer device | |
| JP2016124348A (en) | Omni wheel | |
| TW201525342A (en) | Steering connecting structure | |
| US10203603B2 (en) | Substrate supporting structure and exposure machine | |
| TWI704972B (en) | Positioning device | |
| CN106170839B (en) | Explosion-proof staggered form switch | |
| JP6143693B2 (en) | Support device | |
| JP6435698B2 (en) | Scribing equipment | |
| JP5843458B2 (en) | Sliding table | |
| KR20210076731A (en) | Apparatus for Adjusting Directional Angle of Multiple Speakers And Vehicle Audio Using The Same | |
| JP5876967B2 (en) | Component mounting equipment | |
| JP2006237485A (en) | Alignment device | |
| JPH04159040A (en) | Positioning mechanism for table | |
| US11839809B2 (en) | Operating device | |
| JP2021116167A (en) | Planar carrier | |
| KR102415588B1 (en) | Apparatus for align the plate and system for leveling the plate including the same | |
| JP2017113852A (en) | Inclination adjustment jig |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |