CN106660188A - End-face machining device for plate-like object - Google Patents
End-face machining device for plate-like object Download PDFInfo
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- CN106660188A CN106660188A CN201580041709.9A CN201580041709A CN106660188A CN 106660188 A CN106660188 A CN 106660188A CN 201580041709 A CN201580041709 A CN 201580041709A CN 106660188 A CN106660188 A CN 106660188A
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- China
- Prior art keywords
- revolving wheel
- face
- machining apparatus
- end surface
- groove portion
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
- B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
- B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
- B24B9/08—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass
- B24B9/10—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass of plate glass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
- B24D18/009—Tools not otherwise provided for
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D5/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting only by their periphery; Bushings or mountings therefor
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The invention discloses an end-face machining device for a plate-like object. Provided is an end-face machining device for polishing the end surface of a plate-like object such as plate glass by using the outer-circumferential surface of an attachable/detachable rotary grindstone, the end-face machining device being one requiring no time for a rotary grindstone exchange operation, and exhibiting no decline in production efficiency. An end-face machining device (1) for machining the end surface of plate glass W by using the outer-circumferential surface of a rotary grindstone (20) capable of being attached to a rotating means (21) and detached therefrom, wherein an annular groove (20c) is formed in the circumferential direction in the outer-circumferential surface of the rotary grindstone (20) after attaching the rotary grindstone (20) while the groove (20c) is not yet formed to the rotating means (21).
Description
Technical field
The present invention relates to pass through the tabular that the outer peripheral face of revolving wheel is processed to the end face of plate object that can be loaded and unloaded
The technology of the end surface machining apparatus of thing.
Background technology
In recent years, the utilization field expanding day of the plate object such as glass, ceramics, for example, in flat-panel monitor, smart mobile phone
Increase rapidly etc. the needs of field, the glass sheet of thin-walled are utilized.
This glass sheet is for example configured to strip, banding by overflow downdraw.Now, in the width of the glass sheet for shaping
The both sides edge in degree direction, is formed with the big raised line of the central portion of wall ratio width (bead).
Also, the glass sheet of strip, banding after (cutting off) is cut off in the width direction, by by including the raised line
Both sides edge cuts off and removes, so as to be cut to the rectangular plate-like of given size.
So, at cut-off each end after the glass sheet of the rectangular plate-like for being formed as the glass substrate with uniform thickness
Face, for example, by being pre-formed with the revolving wheel of the groove portion of ring-type in outer peripheral face and be carried out and slightly grind shown in patent document 1
The end face processing such as mill processing, smooth grinding processing, so as to be formed as final products.
Here, being illustrated to conventional end surface machining apparatus 101 using Fig. 7.
(a) of Fig. 7 is the integrally-built top view of the end surface machining apparatus 101 for illustrating conventional, and (b) of Fig. 7 is from Fig. 7
(a) in arrow Y the enlarged front view observed of direction.
It should be noted that in the following description for convenience, the direction of the arrow A in (a) of Fig. 7 is defined as into end
The front of face processing unit (plant) 101 and described.In addition, in (b) of Fig. 7, above-below direction is defined as into end surface machining apparatus
101 above-below direction and described.
As shown in (a) of Fig. 7, end surface machining apparatus 101 mainly include:With flatly and along the longitudinal direction (with arrow A's
Parallel direction) absorption platform 110 of the rectangular shape of vertical view that arranges of the mode that extends and the right and left in absorption platform 110
Both sides to (direction orthogonal with the bearing of trend of absorption platform 110 when overlooking) are arranged to along the longitudinal direction the multiple of a row
Revolving wheel 120,120...... etc..
Countless little suction holes (not shown) are equipped with the upper surface of absorption platform 110.
Also, the glass sheet W of rectangular plate-like is adsorbed in absorption platform 110 so as to firm by above-mentioned multiple suction holes
Ground keeps.
Now, glass sheet W with extend flatly and along the longitudinal direction and the left and right sides side edge part to absorption platform 110
The attitude stretched out of outside be held in the upper surface of absorption platform 110.
On the other hand, multiple revolving wheels 120,120...... the past of each side of the left and right sides of absorption platform 110
Square side rise successively including multiple rough lappings revolving wheel 120 (below, being suitably denoted as " rough lapping revolving wheel 120X "),
120...... with the revolving wheel 120 (below, being suitably denoted as " smooth grinding revolving wheel 120Y ") of smooth grinding.
In addition, above-mentioned revolving wheel 120,120...... is respectively configured as that axis direction can be set to the thickness of glass sheet W
Degree direction is above-below direction (direction orthogonal with the bearing of trend of absorption platform 110 during side-looking) and is loaded and unloaded, and is set to
Can be using axle center rotation driving as center.
Also, the above-mentioned multiple revolving wheels 120,120...... positioned at the left and right sides of absorption platform 110 are configured to,
Can relatively move towards rear (direction of the arrow B of (a) of Fig. 7) from front integratedly and relative to absorption platform 110
It is dynamic.
The feelings of the end face processing of glass sheet W are carried out in the conventional end surface machining apparatus 101 by being made up of this structure
Under condition, make multiple revolving wheels 120,120...... of axle center rotation driving as center while the left and right with glass sheet W
The end face of both sides is abutted, while relative to absorption platform 110 (more specifically glass sheet W) from front towards rear one
Ground is mobile.
Now, as shown in (b) of Fig. 7, the side edge part of the left and right sides of glass sheet W is intercalated in each revolving wheel 120
In groove portion 120a of the ring-type that outer peripheral face is formed, and the end face of the side edge part is abutted with the bottom surface of groove portion 120a.
So, in the end face plus man-hour for carrying out glass sheet W, in the past, generally while making rough lapping revolving wheel 120X Jing
Abutted while carrying out rough lapping, revolving wheel 120X is in outer peripheral face for the rough lapping with the end face of glass sheet W by groove portion 120a
Groove portion 120a of the ring-type being made up of the width dimensions of degree roughly the same with the thickness of glass sheet W is formed with, next,
Smooth grinding revolving wheel 120Y is set to abut with the end face of glass sheet W via groove portion 120a while carrying out smooth grinding, should
Smooth grinding revolving wheel 120Y is formed with groove portion 120a of the ring-type being made up of same shape in outer peripheral face.
Citation
Patent document
Patent document 1:Japanese Unexamined Patent Publication 2008-93744 publications
As described above, in conventional end surface machining apparatus, via the ring for being previously formed in outer peripheral face of revolving wheel
The groove portion of shape, clamping the end face of plate object simultaneously carries out end face processing, therefore carry out revolving wheel replacement operation (it is more specific and
Speech, the revolving wheel for being up to service life is replaced by the operation of untapped new revolving wheel) when, needs are carried out for making
The adjustment operation of the position consistency of the position of the groove portion of ring-type and the end face of glass sheet.
Therefore, the replacement operation of revolving wheel spends the time, and so as to generation time loss, becoming causes the drop of production efficiency
Low key factor.
The content of the invention
Invent problem to be solved
The present invention be in view of the problem points of present situation illustrated above and complete, its problem is to provide following plate object
End surface machining apparatus, the end surface machining apparatus are by the outer peripheral face of revolving wheel that can load and unload to plate objects such as glass sheets
End face is ground, and the replacement operation of revolving wheel will not spend the time, be not result in the reduction of production efficiency.
For solving the scheme of problem
Problem to be solved by this invention is as described above, next, the scheme to being used to solve the problem is illustrated.
That is, the end surface machining apparatus of plate object of the invention pass through can be relative to the revolving wheel of rotating mechanism handling
Outer peripheral face is processed to the end face of plate object, it is characterised in that in the revolving wheel of the state by groove portion is formed without
After being installed on the rotating mechanism, in the outer peripheral face of the revolving wheel groove portion of ring-type circumferentially is formed.
According to the end surface machining apparatus of the plate object of this present invention, without the need for entering to be about to revolving wheel rotating mechanism is installed on
Adjustment operation afterwards, therefore the replacement operation of revolving wheel will not spend the time, also be not result in the reduction of production efficiency.
In addition, the end surface machining apparatus of the plate object of the present invention are characterised by, the end surface machining apparatus possess flute profile
Into mechanism, the groove formation mechanism forms the groove portion of ring-type circumferentially, the groove in the outer peripheral face of the revolving wheel
Formation mechanism forms described in the outer peripheral face of the revolving wheel in position corresponding with the end face of the plate object
Groove portion.
According to the end surface machining apparatus of the plate object of this present invention, not to being just installed on the revolving wheel after rotating mechanism
Special adjustment operation is carried out, groove formation mechanism can be passed through and formed ring-type in the appropriate position of the outer peripheral face of the revolving wheel
Groove portion.
In addition, the end surface machining apparatus of the plate object of the present invention are characterised by, the end surface machining apparatus are alternately implemented
Manufacturing procedure and preparatory process, the manufacturing procedure performs the end face of the plate object carried out by the revolving wheel
Processing, the preparatory process carries out the preparation of the end face processing of the follow-up plate object, in the enforcement of the preparatory process,
The action that the groove portion is formed to the outer peripheral face of the revolving wheel is performed from the groove formation mechanism.
So, the end surface machining apparatus of plate object of the invention, while implementing the end face for carrying out follow-up plate object
The preparatory process of preparation of processing (grinding) (for example, will just implement the revolving wheel after manufacturing procedure and be moved again to grinding
Reset operating of starting position etc.), while the outer peripheral face in revolving wheel forms the groove portion of new ring-type, therefore need not set in addition
The new step for forming the groove portion is put, so as to be not result in the reduction of the production efficiency brought because of the loss of time.
In addition, the end surface machining apparatus of the plate object of the present invention are characterised by, the groove formation mechanism has:Blade,
It forms the ring-type in the outer peripheral face of the revolving wheel in position corresponding with the end face of the plate object
Groove portion;And switching mechanism, the blade can be switched to the blade to support with the outer peripheral face of the revolving wheel by it
The separation point position that the abutted position and the blade for connecing leaves from the outer peripheral face of the revolving wheel.
So, the present invention plate object end surface machining apparatus in, the position of blade pre-adjusted be positioned at plate
The corresponding position of end face of shape thing, thus the groove portion of the ring-type for just having been formed by groove formation mechanism all the time with the end face pair of plate object
Put, so as to the position of the groove portion need not be readjusted.
On the other hand, the feature of the end surface machining apparatus of plate object of the invention can also be, by the tabular
The end face of thing is processed, so as to form the groove portion.
So, in the end surface machining apparatus of the plate object of the present invention, can be existed by the plate object as machined object
The outer peripheral face of revolving wheel forms the groove portion of ring-type, in this case, be able to easily form with more appropriate shape with
And the groove portion of the ring-type of allocation position.
In addition, the feature of the end surface machining apparatus of the plate object of the present invention can also be, by the plate object
The region in addition to both ends of the end face is processed, so as to form the groove portion.
In this case, can not only be readily formed with more appropriate shape in the outer peripheral face of revolving wheel and
The groove portion of the ring-type of allocation position, additionally it is possible to prevent the vibration near the end face of plate object, it can be ensured that the plate object after processing
Quality.
In addition, the end surface machining apparatus of the plate object of the present invention are characterised by, the revolving wheel is configured to edge
The movement of axis of rotation direction.
By with this structure, the end surface machining apparatus of plate object of the invention, not being replaced revolving wheel
Itself so large-scale replacement operation, only moves the path increment of regulation along axis of rotation direction by making the revolving wheel,
The state of the groove portion of the ring-type that can be readily formed new can just be become.
Invention effect
The end surface machining apparatus of plate object of the invention, the replacement operation of revolving wheel will not spend the time, also not
The reduction of production efficiency can be caused.
Description of the drawings
Fig. 1 is in the end surface machining apparatus involved by an embodiment of the invention, to illustrate revolving wheel and groove
The integrally-built top view in formation mechanism portion.
Fig. 2 is to illustrate that revolving wheel and groove form the integrally-built figure of mechanism part, and is the X-direction from Fig. 1
To regarding the enlarged front view observed.
Fig. 3 is over time and illustrates that revolving wheel and groove form the schematic top view of the moving direction of mechanism part.
Fig. 4 is over time and illustrating carries out the end face processing of glass sheet by the end surface machining apparatus of present embodiment
When the step of flow chart.
Fig. 5 is the movement that revolving wheel is illustrated in the end surface machining apparatus involved by another embodiment of the present invention
The figure of scope, is (a) schematic top view that illustrates the state that the end face to glass sheet is integrally processed, (b) is to illustrate from remote
The schematic top view of the state of processing is proceeded by from the position of the end face of glass sheet.
Fig. 6 be illustrate the present invention end surface machining apparatus figure, and be illustrate revolving wheel just with the end face of glass sheet
Adjacent corner contact after state summary stereogram.
Fig. 7 is the figure of the end surface machining apparatus for illustrating conventional, (a) is to illustrate integrally-built top view, (b) is from Fig. 7
(a) arrow Y the enlarged front view observed of direction.
Fig. 8 is over time and illustrating carries out the end face plus the step in man-hour of glass sheet by conventional end surface machining apparatus
Rapid flow chart.
Fig. 9 is the amplification main view that the relation between revolving wheel and glass sheet is illustrated in conventional end surface machining apparatus
Figure.
Specific embodiment
Hereinafter, embodiments of the present invention are illustrated.
[end surface machining apparatus 1]
First, the structure of the end surface machining apparatus 1 using Fig. 1 and Fig. 2 to the present invention is embodied is illustrated.
It should be noted that in the following description for convenience, the above-below direction of Fig. 2 is defined as into end surface machining apparatus
1 above-below direction and described.
In addition, in FIG, the direction of arrow A is defined as into the front of end surface machining apparatus 1 and is described.
As shown in figure 1, the end surface machining apparatus 1 of present embodiment are for by can be relative to rotating mechanism described later
The outer peripheral face of the revolving wheel 20 of 21 (with reference to Fig. 2) handling implements the processing such as grinding to the end face of the glass sheet W as plate object
Device.
End surface machining apparatus 1 mainly include that absorption platform 10, revolving wheel 20 and groove form mechanism part 30 etc..
Here, in end surface machining apparatus 1, in each side of the left and right sides of absorption platform 10, setting respectively as described above
It is equipped with multiple revolving wheels 20,20...... of rough lapping use and smooth grinding and is disposed in above-mentioned revolving wheel respectively
20th, multiple grooves of the vicinity of 20...... form mechanism part 30,30.......Also, above-mentioned multiple revolving wheels 20,
20...... it is made up of mutually the same structure, in addition similarly, above-mentioned multiple grooves form mechanism part 30,30...... also by that
This identical structure is constituted.
Therefore, in the following description, it is mainly focused in the side of absorption platform 10 (for example, in the present embodiment
For right side) arrange a pair of revolving wheels 20 and groove formed mechanism part 30 and described, omit with regard to other multiple rotations
Turn emery wheel 20,20...... and groove forms the narration of mechanism part 30,30.......
It should be noted that groove formed mechanism part 30 also can with multiple revolving wheels 20,20...... in one
The corresponding mode of revolving wheel 20,20...... is divided to arrange.For example, it is also possible to by the rough lapping revolving wheel shown in Fig. 7
120X is set to conventional revolving wheel 120, smooth grinding revolving wheel 120Y is set to into the revolving wheel 20 of the present invention and is arranged
Groove forms mechanism part 30.
Absorption platform 10 is used to the glass sheet W of rectangular plate-like is firmly held for horizontality.
Absorption platform 10 is formed as overlooking rectangular shape, and thereon surface is equipped with countless suction holes (not shown).
Also, in the upper surface of the absorption platform 10 being made up of this structure, glass sheet W is with flatly and along the longitudinal direction
Extend and the side edge part of the left and right sides is loaded respectively to the attitude that the outside of absorption platform 10 is stretched out, by countless suctions
Draw hole and be adsorbed so as to be firmly held.
Next, illustrating to revolving wheel 20.
Revolving wheel 20 is used for the end face to glass sheet W and implements the processing of the end faces such as chamfer machining, attrition process.
Revolving wheel 20 includes the base part 20a of the disc-shape for forming matrix, combines the periphery for being fixed on base part 20a
The abrasive grain layer 20b in face etc..
Also, in untapped revolving wheel 20, groove portion 20c of ring-type is not yet formed in outer peripheral face, as described later,
In the end face plus man-hour that carry out glass sheet W, the groove that mechanism part 30 forms ring-type in the outer peripheral face of revolving wheel 20 is formed by groove
Portion 20c.
Base part 20a is for example, by by materials such as aluminium, steel, superhard alloy, molybdenum, molybdenum alloy, cermet, titanium or ceramics
Quality structure into the component of disc-shape formed.
It should be noted that as the material of steel, such as carbon tool steel, alloy tool steel or high speed can be used
Steel etc..
On the other hand, abrasive grain layer 20b is fixed in the outer peripheral face of base part 20a via adhesive linkage (not shown) etc..
In addition, abrasive grain layer 20b is fired by the mixture to being made up of bond material and multiple abrasive particles and is made.
Here, as bond material, it is possible to use resinoid bond with thermosetting resin as main component etc., in addition,
As abrasive particle, it is possible to use diamond particles, aluminium oxide particles, carborundum particle, cubic boron nitride particle, metal oxide
Particle, metal carbides particle or metal nitride particle etc..
In addition, for above-mentioned bond material and the ratio of abrasive particle, bond material is 30~97 volumes %, abrasive particle is 3~70
The ratio of volume % is appropriate.
Also, abrasive grain layer 20b is in the way of a part for abrasive particle is exposed from the outer surface of abrasive grain layer 20b along base part
The outer peripheral face of 20a makes circlewise.
It should be noted that the particle diameter of abrasive particle according to its amount of grinding, the calling hierarchy of final surface roughness and select i.e.
Can, for example it is, appropriate preferably in the range of #600~1000 to determine in #100~3000.
As shown in Fig. 2 the revolving wheel 20 for so being formed is upper and lower using axis direction as the thickness direction of glass sheet W
To, and the rotating mechanism 21 for example based on drive motor etc. is detachably fixedly installed on, by the rotating mechanism 21
The rotation driving centered on axle center.
The revolving wheel 20,20...... that such structure is constituted by more than is matched somebody with somebody relative to an end surface machining apparatus 1
Multiple (therefore only describing one for enlarged front view in fig. 2) are had, on the both sides edge of the left and right directions of absorption platform 10
Fore-and-aft direction and be arranged to a row.
Also, the above-mentioned multiple revolving wheels 20,20...... positioned at the left and right sides of absorption platform 10 are configured to, can
Integratedly and relative to absorption platform 10 relatively move along the longitudinal direction.
In addition, the revolving wheel 20,20...... for being configured to a row in each side of the left and right sides of absorption platform 10 is constituted
For can relative to absorption platform 10 close to or away from direction (being in the present embodiment left and right directions) on move.
Next, form mechanism part 30 to groove illustrating.
It is the corresponding with the end face of glass sheet W of the outer peripheral face for revolving wheel 20 after mounting that groove forms mechanism part 30
Position formed ring-type circumferentially groove portion 20c groove formation mechanism, each revolving wheel 20 is disposed in respectively.
As shown in figure 1, groove formation mechanism part 30 has (along the direction of the plate face of glass sheet W, such as existing in the horizontal direction
In present embodiment be fore-and-aft direction) on extend cursor 31, in the central portion of the bearing of trend of cursor 31, via bearing
Component 33 and insertion is provided with the rotary shaft 32 that axis direction is set to above-below direction.
In addition, the one end (for example being in the present embodiment, leading section) of the bearing of trend in cursor 31, can fill
It is fixedly installed the blade 34 being for example made up of superhard material with unloading.
Also, rotated centered on rotary shaft 32 by cursor 31, so as to blade 34 is relative to revolving wheel 20
Outer peripheral face close to or away from.
Here, the other end (for example being in the present embodiment, rearward end) of the bearing of trend in cursor 31, is arranged
There is the force application mechanism 35 being for example made up of extension spring etc., cursor 31 is in blade 34 all the time by the force application mechanism 35
To the state of the direction force of the outer peripheral face of close revolving wheel 20.
In addition, the actuator 36 being for example made up of cylinder etc. is provided with the vicinity of force application mechanism 35, by the actuator
36 expansion link 36a presses the other end of cursor 31, so as to cursor 31 is to making blade 34 away from the outer of revolving wheel 20
The direction of side face rotates.
Mechanism part 30 is formed by the groove being made up of this structure, can by the horizontal direction position of blade 34 switch to
Abutted position and the separation point position of the outer peripheral face away from revolving wheel 20 that the outer peripheral face of revolving wheel 20 is abutted.
In other words, constituted by cursor 31, rotary shaft 32, bearing components 33, force application mechanism 35 and actuator 36
Blade 34 can be switched to the switching mechanism of abutted position and separation point position.
In addition, being formed in mechanism part 30 in groove, rotate cursor 31 by the active force of force application mechanism 35, by making
Blade 34 is abutted with the outer peripheral face of the revolving wheel 20 in rotation driving state, and the groove portion of ring-type can be formed in the outer peripheral face
20c。
Additionally, groove forms mechanism part 30 to be configured to integratedly be moved with revolving wheel 20.
It should be noted that as shown in Fig. 2 in the present embodiment, pre-adjusting the upper-lower position and load for blade 34
The upper-lower position for being placed in the end face of the glass sheet W of absorption platform 10 is consistent, therefore forms groove portion 20c that mechanism part 30 is formed by groove
Upper-lower position it is consistent all the time with the upper-lower position of the end face of glass sheet W.
In other words, groove forms mechanism part 30 and is configured to, by blade 34 in position corresponding with the end face of glass sheet W (example
Such as, be in the present embodiment consistent in the vertical direction position and the position opposed with the end face of glass sheet) rotation sand
The outer peripheral face of wheel 20 forms groove portion 20b of ring-type.
Thus, in the end surface machining apparatus 1 of present embodiment, for example, when the replacement operation of revolving wheel 20 is carried out,
The adjustment operation for making the upper-lower position of revolving wheel 20 consistent with the upper-lower position of glass sheet W need not be carried out.
As previously discussed, it is configured in the end surface machining apparatus 1 of present embodiment, groove portion 20c will be formed without
Revolving wheel 20 under state is installed on after rotating mechanism 21, mechanism part 30 is formed by groove, in the outer peripheral face of revolving wheel 20
Form groove portion 20c of ring-type circumferentially.
Thus, without the need for carry out as described above revolving wheel 20 is installed on the adjustment operation after rotating mechanism 21, because
The replacement operation of this revolving wheel 20 will not spend the time, also be not result in the reduction of production efficiency.
[end-face processing method]
Next, being added to the end face that glass sheet W is carried out by the end surface machining apparatus 1 of present embodiment using Fig. 2 to Fig. 4
The end-face processing method in man-hour is illustrated.
It should be noted that in the following description for convenience, the direction of the arrow A in Fig. 3 is defined as into end face and is added
Frock is put 1 front and is described.
First, as shown in figure 3, in the end surface machining apparatus 1 of operating automatically are stopped, to revolving wheel 20 rotation drive is carried out
Dynamic rotating mechanism 21 (with reference to Fig. 2) and groove forms mechanism part 30 and is in original state.
Specifically, in an initial condition, rotating mechanism 21 and groove form the reference position that mechanism part 30 is located at regulation
Sp1 (for example, in figure 3, relative to absorption platform 10 rearward and right positions away from).
In this case, rotating mechanism 21 stops, groove formed mechanism part 30 in actuator 36 expansion link 36a elongation and
Blade 34 is located at the state of separation point position.In addition, revolving wheel 20 is not yet installed on rotating mechanism 21.
In the end surface machining apparatus 1 being made up of this state, as shown in figure 4, by the mounting by glass sheet W to specify
Attitude is placed in the upper surface of absorption platform 10, is then adjusted, to cause the grooves to the upper bottom of the blade 34 of mechanism part 30
Put (step S101) consistent with the upper-lower position of glass sheet W.
At the end of the adjustment of blade 34, untapped revolving wheel 20 is installed on into (the step of rotating mechanism 21
S102)。
Then, at the end of the installation of revolving wheel 20, the automatic operating (step S103) of end surface machining apparatus 1 is started.
When end surface machining apparatus 1 start to operate automatically, the first reset operating (step S104) of revolving wheel 20 is performed.
Reset in operating first, make the end face that revolving wheel 20 is moved to glass sheet W process the vicinity of starting position, and
And groove portion 20a of the outer peripheral face formation ring-type in the revolving wheel 20.
In the first reset operating of step S104, first, start rotation driving of the rotating mechanism 21 to revolving wheel 20,
And make blade 34 be moved to abutted position by causing the grooves to the expansion link 36a of the actuator 36 of mechanism part 30 and retreating, make
Blade 34 is abutted (step S105) with the outer peripheral face of revolving wheel 20.
Afterwards, the state for keeping blade 34 to abut with the outer peripheral face of the revolving wheel 20 being driven in rotation, revolving wheel 20
Start mobile (step S106).
As the moving direction of revolving wheel 20, revolving wheel 20 relative to absorption platform 10 from reference position Sp1 to
Front is relatively moved, in the first stop position Sp2 of the regulation of the vicinity of the end face processing starting position positioned at glass sheet W
(for example, be in figure 3 relative to absorption platform 10 forwards and right positions away from) stop.
When revolving wheel 20 reaches the first stop position Sp2 and then stops, groove forms the actuator 36 of mechanism part 30
Expansion link 36a extends, and blade 34 leaves (step S107) from the outer peripheral face of revolving wheel 20.
The step of carrying out like this in the first reset operating of S104, blade 34 is supported with the outer peripheral face of revolving wheel 20
Connect, thus from reference position Sp1 revolving wheel 20 reach the first stop position Sp2 till during, by blade
34 revolving wheel 20 outer peripheral face formed ring-type groove portion 20c.In the present embodiment, originally form in revolving wheel 20
Groove portion 20c is formed in the upper end of revolving wheel 20.
So, in the first reset operating of step S104, the outer peripheral face for being implemented in revolving wheel 20 forms the groove of ring-type
The groove formation process of portion 20c.
It should be noted that in the present embodiment, after blade 34 is abutted with the outer peripheral face of revolving wheel 20, start
Revolving wheel 20 after revolving wheel 20 reaches the first stop position Sp2 and then stops, making knife from the movement of reference position Sp1
Piece 34 leaves from the outer peripheral face of revolving wheel 20, but it is also possible in the following way, is starting revolving wheel 20 from reference position
After the movement of Sp1, blade 34 is abutted with the outer peripheral face of revolving wheel 20, in revolving wheel 20 the first stop position Sp2 is reached
Before, blade 34 is left from the outer peripheral face of revolving wheel 20.
After forming groove portion 20c on revolving wheel 20, end surface machining apparatus 1 perform grinding operating (step S108).
When grinding operating is started, revolving wheel 20 is together with groove formation mechanism part 30 to the direction of close absorption platform 10
It is mobile, reach the processing starting position Sp3 of regulation (for example, in figure 3, relative to absorption platform 10 forwards and right side is close to
Position) and then stop.
In other words, revolving wheel 20 is moved in advance a side of end face of glass sheet W (i.e., when grinding operating is started
As described later, become the front of the starting position for carrying out the end face of glass sheet W plus man-hour) vicinity (processing starting position
Sp3)。
Afterwards, as shown in figure 3, the one side of revolving wheel 20 carries out rotation driving, while relative to absorption platform 10 from processing
Starting position Sp3 is rearward moved, and reaches the second stop position Sp4 of regulation (for example, in figure 3, relative to absorption platform 10
Rearward and right side close proximity) and then stop.
Till the revolving wheel 20 being driven in rotation is moved to the second stop position Sp4 from processing starting position Sp3
Period, groove portion 20c of revolving wheel 20 throughout each end face (for example, its right end face in Fig. 3) of glass sheet W from front to
The gamut of rear end side and abut with each end face of glass sheet W, so as to implement glass sheet W end face process.
When the end face process finishing of glass sheet W, revolving wheel 20 is from the second stop position Sp4 to away from absorption platform 10
Direction movement, arrive again at reference position Sp1 then stop.
When revolving wheel 20 stops in reference position Sp1, the decision mechanism possessed by end surface machining apparatus 1 is held
Groove portion 20c of the row ring-type consistent with the upper-lower position of glass sheet W (implements the groove of the end face processing of the glass sheet W of last time
Portion 20c) whether reach regulation service life judgement (step S109).
In addition, now, in absorption platform 10, the glass sheet W for implementing end face processing by step S108 is taken out of,
On the other hand, new unprocessed glass sheet W is placed in the upper surface of absorption platform 10 with the mounting attitude for specifying.
Also, when the groove portion 20c not up to service life of regulation is judged as, perform revolving wheel 20 second is answered
Position operating (step S110).
Reset in operating second, the outer peripheral face in revolving wheel 20 does not form groove portion 20a of ring-type, and only makes rotation sand
Wheel 20 is moved to the vicinity that the end face of glass sheet W processes starting position.
In the second reset operating of step S110, in the state of blade 34 leaves from the outer peripheral face of revolving wheel 20,
Revolving wheel 20 is relatively moved forwards relative to absorption platform 10 from reference position Sp1, is stopped in the first stop position Sp2
Only.
It should be noted that resetting in operating second, blade 34 leaves from the outer peripheral face of revolving wheel 20, therefore not right
The outer peripheral face of revolving wheel 20 forms groove portion 20c.
When revolving wheel 20 stops in the first stop position Sp2, grinding operating (step S108) is started again at, rotate sand
Wheel 20 is moved from processing starting position Sp3 to processing starting position Sp3 movements to the second stop position Sp4, is newly loaded
Unprocessed glass sheet W end face processing.
After, the second reset operating (step S110) and grinding operating (step S108) are performed repeatedly, until in step
It is judged as that groove portion 20c reaches the service life of regulation in S109.
On the other hand, when being judged as that groove portion 20c has reached the service life of regulation in step S109, pass through
The decision mechanism, also performs the judgement (step S111) whether revolving wheel 20 itself reaches the service life of regulation.
It should be noted that in step S109, it is also possible to adding according to the glass sheet W for completing regulation set in advance
The processing of work number, and it is judged as that groove portion 20c reaches the service life of regulation.
Also, when being judged as that revolving wheel 20 itself not yet reaches the service life of regulation, revolving wheel 20 performs area
Section replaces (more specifically, can replace and reach groove portion 20c of service life and form the action of new groove portion 20c) (step
S112)。
Specifically, as shown in Fig. 2 revolving wheel 20 together with rotating mechanism 21 along axis of rotation direction (in this reality
Apply in mode is above-below direction) then stop to the path increment of the mobile regulation in direction (being in the present embodiment top) of regulation
Only.
Thus, the end face pair of the part of groove portion 20c for being formed without ring-type of the outer peripheral face of revolving wheel 20 and glass sheet W
Put.
So, the section of revolving wheel 20 replaces with following action:End face from glass sheet W with reach service life
End face and groove portion 20c that be formed without ring-type of the outer peripheral face of revolving wheel 20 of the opposed state of groove portion 20c to glass sheet W
The action of the opposed state switching in part.
Afterwards, as shown in figure 4, the end surface machining apparatus 1 that the section for completing revolving wheel 20 is replaced repeat again first
Reset the later action of operating (step S104), and in the outer peripheral face of revolving wheel 20 new groove portion 20c is formed, and is then carried out plate glass
The end face processing of glass W.
In this case, groove portion 20c for being formed after the section of step S112 is replaced is formed in the groove once formed than on
Portion 20c positions on the lower.
In addition, when being judged as that revolving wheel 20 itself has reached the service life of regulation in step S111, end face
The automatic operating of processing unit (plant) 1 stops (step S113).
Thus, the end face process finishing of the glass sheet W for being carried out by end surface machining apparatus 1.
It should be noted that continue through end surface machining apparatus 1 carry out glass sheet W end face process in the case of, according to
It is secondary to perform the later each step of step S102.In other words, it is replaced by non-shape in the revolving wheel 20 for being up to service life
Into having after the new revolving wheel 20 of groove portion 20c, restart the automatic operating of end surface machining apparatus 1.
So, in the end surface machining apparatus 1 of present embodiment, alternately implement to perform the plate glass carried out by revolving wheel 20
The manufacturing procedure (step S108) of the processing (specifically grind) of the end face of glass W and carry out follow-up glass sheet W and (that is, connect
Get off to carry out the glass sheet W of end face processing) end face processing (attrition process) preparation preparatory process (for example, perform first
And the step of the second reset operating S104, S110 etc.), in the enforcement of the preparatory process (for example, in the present embodiment
For execution step S104 when) mechanism part 30 formed from groove perform the action that groove portion 20 is formed to the outer peripheral face of revolving wheel 20.
Thus, according to the end surface machining apparatus 1 of present embodiment, without the need for being provided in addition in the periphery of revolving wheel 20
Face forms the new step of groove portion 20c of ring-type, is not result in the reduction of production efficiency brought because of the loss of time.
In addition, the end surface machining apparatus 1 of present embodiment are a series of in the first reset operating by step S104
Step S105, S106, S107 and on the basis of the outer peripheral face of revolving wheel 20 is pre-formed groove portion 20c of ring-type, enter andante
The end face processing of glass W, therefore, it is possible to realize that the quality of processed glass sheet W is improved.
However, the end face with regard to carrying out glass sheet W by aforesaid conventional end surface machining apparatus 101 (with reference to Fig. 7) adds
The end-face processing method in man-hour, including with the end-face processing method carried out based on the end surface machining apparatus 1 of present embodiment substantially
Identical step, but vary considerably with regard to starting the former each step of operating automatically.
Hereinafter, end face plus the man-hour of glass sheet W are carried out to passing through conventional end surface machining apparatus 101 using Fig. 8 and Fig. 9
End-face processing method illustrate.
It should be noted that in the following description for convenience, the above-below direction of Fig. 9 is defined as into end surface machining apparatus
101 above-below direction and described.
First, as shown in figure 8, outside the device of end surface machining apparatus 101, in advance in the outer peripheral face shape of revolving wheel 120
Into groove portion 120a, 120a...... (step S201) of multiple ring-types.
In addition, on the other hand, glass sheet W is placed in into the upper table of absorption platform (not shown) with the mounting attitude for specifying
Face.
Then, the revolving wheel 120 after groove portion 120a, 120a...... for forming multiple ring-types is installed on into end face processing
The rotating mechanism 121 (step S202) of device 101, adjusts afterwards the upper-lower position of revolving wheel 120 so that with the end of glass sheet W
The upper-lower position of groove portion 120a of the opposed ring-type in face is consistent with the upper-lower position of glass sheet W (step S203).
After the installation of revolving wheel 120 terminates, (the step when the automatic operating of end surface machining apparatus 101 is started
S204), revolving wheel 120 performs the operating (step S205) that resets together with groove formation mechanism part (not shown).
In the operating that resets, revolving wheel 120 is moved from reference position Sp1 to the first stop position Sp2 and then stopped.
Afterwards, grinding operating (step S206) is performed, revolving wheel 120 starts movement from the first stop position Sp2, reaches
Processing starting position Sp3 and then stopping.
When starting position Sp3 stoppings are processed, revolving wheel 120 starts based on the rotation driving of rotating mechanism 121.
Specifically, in the same manner as the S108 of the step of end surface machining apparatus 1 with aforesaid present embodiment, revolving wheel
120 one side carry out rotation driving, while moving from processing starting position Sp3 to the second stop position Sp4 and then stopping.
Thus, one side rotation driving of revolving wheel 120 while via ring-type groove portion 120a throughout glass sheet W each end face
Gamut from front to back and abut and move with each end face of glass sheet W, so as to the end face for implementing glass sheet W adds
Work.
The revolving wheel 120 for reaching the second stop position Sp4 is moved to reference position Sp1 and then stopped again.
When revolving wheel 120 stops again in reference position Sp1, by decision mechanism, perform upper and lower with glass sheet W
Whether groove portion 120a of the ring-type of position consistency reaches the judgement (step S207) of the service life of regulation.
Also, when groove portion 120a for being judged as the ring-type not yet reaches the service life of regulation, revolving wheel 120 is again
The later action of aforementioned step S205 of secondary repetition.
On the other hand, when groove portion 120a for being judged as the ring-type has reached the service life of regulation, by judging
Means, also perform the judgement (step S208) whether revolving wheel 120 itself reaches the service life of regulation.
Also, when being judged as that revolving wheel 120 itself not yet reaches the service life of regulation, revolving wheel 120 is performed
Section replaces (more specifically, can replace and reach groove portion 120a of service life and use the action of new groove portion 120a)
(step S209).
Specifically, as shown in figure 9, revolving wheel 120 vertically rises the row of regulation together with rotating mechanism 121
Journey amount and then stopping.
Thus, in the outer peripheral face of revolving wheel 120, groove portion 120a of untapped ring-type is located at the end face with glass sheet W
The consistent position of upper-lower position.
Then, as shown in figure 8, the revolving wheel 120 for finishing section replacement repeats again after aforementioned step S202
Action.
On the other hand, when being judged as that revolving wheel 120 itself has reached the service life of regulation (that is, it is determined that not
When there is groove portion 120a of untapped ring-type), stop the automatic operating (step S210) of end surface machining apparatus 101.
Thus, the end face process finishing of the glass sheet W for being carried out by end surface machining apparatus 101.
It should be noted that continue through end surface machining apparatus 101 carry out glass sheet W end face process in the case of,
The later each step of execution step S201 successively again.
As described above, in conventional end surface machining apparatus 101, itself regulation has been reached in revolving wheel 120
In the case of service life, when the replacement operation by the aforementioned untapped revolving wheel 120 of step S202 replacement is performed,
Must pass through the upper-lower position that step S203 adjusts revolving wheel 120.
In contrast, in the end surface machining apparatus 1 of present embodiment, as shown in figure 4, in step S101, only to knife
The upper-lower position of piece 34 is once adjusted so that the upper-lower position of blade 34 is consistent with the upper-lower position of glass sheet W, afterwards, i.e.,
Just the replacement operation of multiple rotary emery wheel 20 is carried out, without the upper-lower position for adjusting the revolving wheel 20, so as to produce
The loss of time and cause production efficiency to reduce.
[confirmatory experiment]
Next, for the validity of the groove formation mechanism part 30 in the end surface machining apparatus 1 for judging present embodiment, this
Inventor etc. has carried out confirmatory experiment, and the confirmatory experiment is illustrated using Fig. 1.
First, disk of the outside dimension for 150 [mm] is prepared as the sample of embodiments of the present invention, the present inventor etc.
The revolving wheel 20 of shape, (the groove portion 20c (ginseng of ring-type is formed without by the revolving wheel 20 with unused state in outer peripheral face
According to Fig. 2) state) be installed on end surface machining apparatus 1.
In addition, the present inventor etc. is adjusted so that groove formed mechanism part 30 cursor 31 in, rotary shaft 32 with apply
Separating distance (the size a) of Fig. 1 and the separating distance (chi of Fig. 1 between rotary shaft 32 and blade 34 between force mechanisms 35
It is very little b) to become 30 [mm].
Then, one side rotation driving such as the present inventor revolving wheel 20, while the time for making blade 34 to specify and the rotation
The outer peripheral face for turning emery wheel 20 is abutted.
As all conditions now, the revolution of revolving wheel 20 is set to into 3820 [rpm], by blade 34 to revolving wheel 20
The pressing force of outer peripheral face pressing be set to 3~4 [N], and the abutting time of blade 34 is set to into 3 [s], in revolving wheel 20
Outer peripheral face forms groove portion 20c of ring-type.
Result according to more than, the present inventor etc. confirm the outer peripheral face in revolving wheel 20, have been stably formed groove depth
For groove portion 20c of the ring-type of 0.2~0.3 [mm].
In addition, the present inventor etc. carries out the glass sheet that thickness is 0.3~0.5 [mm] according to using the revolving wheel 20
The result of the end face processing of W, confirming can suppress corner without the need for being finely adjusted after groove portion 20c is formed, and confirming
The generation of neighbouring vibration, and the end face of glass sheet W can be carried out throughout the gamut from front to back of each end face
Processing.
[end surface machining apparatus 201 (another embodiment)]
Next, being illustrated to the structure of the end surface machining apparatus 201 of another embodiment using Fig. 5.
It should be noted that in the following description for convenience, the direction of the arrow A in Fig. 5 is defined as into end face and is added
Frock is put 201 front and is described.
For the end surface machining apparatus 201 of another embodiment, in the rotation sand of the state by groove portion is formed without
Wheel 220 is installed on after rotating mechanism (not shown), and in the outer peripheral face of revolving wheel 220 groove portion of ring-type circumferentially is formed
(not shown), this point is identical with aforesaid end surface machining apparatus 1, on the other hand, exists with the difference of end surface machining apparatus 1
In not possessing the mechanism that groove forms the such groove portion for being used to form the ring-type of mechanism part 30 (with reference to Fig. 1).
That is, in end surface machining apparatus 201, it is processed by the end face to glass sheet W, so as in revolving wheel 220
Outer peripheral face formed ring-type groove portion.
Specifically, in end surface machining apparatus 201, revolving wheel 220 is used for plate with the state for being not yet formed with groove portion
The end face processing of glass W, is ground by the end face to glass sheet W, so as to form ring-type in the outer peripheral face of revolving wheel 220
Groove portion.
Also, when being ground to the end face of glass sheet W with revolving wheel 220, the depth increase of the groove portion of ring-type and
When making the grainding capacity reduction of revolving wheel 220, the groove portion of the ring-type reaches service life, and revolving wheel 220 rises regulation
Path increment.
Thus, revolving wheel 220 outer peripheral face (more specifically the outer peripheral face of revolving wheel 220 with glass sheet W
End face abut position), the state of the groove portion for being formed without ring-type is become again.
Afterwards, it is ground by the end face to glass sheet W, so as to be formed again newly in the outer peripheral face of revolving wheel 220
Ring-type groove portion.
However, as shown in fig. 6, for example carrying out glass sheet W's in the revolving wheel 220 of the groove portion by being formed without ring-type
In the case that end face is processed, after the end face for just starting glass sheet W is processed, the adjacent corner of glass sheet W drives with rotation sometimes
The outer peripheral face of dynamic revolving wheel 220 is contacted and flown by bullet, so as to produce vibration.
As a result, it is difficult to equably be ground to the adjacent corner of glass sheet W, on the other hand, there is also because of plate glass
The corner of glass W and make the possibility of the damaged themselves of revolving wheel 220, there is a possibility that to cause the quality of glass sheet W to reduce.
Thus, in the end surface machining apparatus 201 of present embodiment, such as shown in (b) of Fig. 5, as just completing to rotate sand
The initial first glass sheet W after 220 replacement operation, section are replaced it is taken turns, using the glass sheet W of false (dummy), is being entered
Row the false glass sheet W end face add man-hour, from the corner from the front side of glass sheet W (the direction side of arrow A) rearward from
Open and risen apart from the position of Z, towards rear end face processing is carried out.Thus, the outer peripheral face in revolving wheel 220 forms new ring-type
Groove portion (not shown).It is aforesaid to be preferably 1~100mm, more preferably 30~40mm apart from Z.
Also, as shown in (a) of Fig. 5, the glass sheet W later for second, be controlled to the corner that is not excluded for front side and
End face processing is integrally carried out throughout end face.
So, by the end face to glass sheet W beyond both ends (for example being in the present embodiment, leading section)
Region carries out end face processing, so as to form the groove portion of ring-type in the outer peripheral face of revolving wheel 220, operates according to this control is carried out
End surface machining apparatus 201, can correspondingly realize the reduction of equipment cost with omitting groove and forming mechanism part 30, and for example right
In completing second after the replacement operation of revolving wheel 220, section are replaced it later glass sheet W, can by
The groove portion of the new ring-type for being formed suppresses the adjacent corner of glass sheet W to carry out glass sheet W while producing vibration on revolving wheel 220
End face processing, can realize the glass sheet W after process finishing quality improve.
Additionally, in end surface machining apparatus 1, forming mechanism part 30 beforehand through groove and forming groove portion 20c, therefore, it is possible in suppression
The adjacent corner of making sheet glass W carries out the end face processing of glass sheet W while producing vibration, can realize the plate after process finishing
The quality of glass W is improved.
Industrial applicibility
The end surface machining apparatus of plate object involved in the present invention can be used for the periphery of the revolving wheel by loading and unloading
In the face of the technology that the end face of such as glass sheet of the thin-walled that flat-panel monitor, smart mobile phone etc. are used is ground.
Description of reference numerals
20 revolving wheels
20c groove portions
30 grooves form mechanism part (groove formation mechanism)
34 blades
35 force application mechanisms
36 actuators
W glass sheets (plate object)
Claims (7)
1. a kind of end surface machining apparatus of plate object, it passes through can be relative to the outer peripheral face of the revolving wheel of rotating mechanism handling
The end face of plate object is processed, it is characterised in that
After the revolving wheel for being formed without the state of groove portion is installed on into the rotating mechanism,
The groove portion of ring-type circumferentially is formed in the outer peripheral face of the revolving wheel.
2. end surface machining apparatus of plate object according to claim 1, it is characterised in that
The end surface machining apparatus possess groove formation mechanism, and the groove formation mechanism is formed in the outer peripheral face of the revolving wheel
The groove portion of ring-type circumferentially,
The groove formation mechanism the revolving wheel the outer peripheral face, in position corresponding with the end face of the plate object
Put to form the groove portion.
3. end surface machining apparatus of plate object according to claim 2, it is characterised in that
The end surface machining apparatus alternately implement manufacturing procedure and preparatory process, and the manufacturing procedure is performed by the revolving wheel
The processing of the end face of the plate object for carrying out, the preparatory process carries out the end face processing of the follow-up plate object
Prepare,
In the enforcement of the preparatory process, performed from the groove formation mechanism and formed to the outer peripheral face of the revolving wheel
The action of the groove portion.
4. end surface machining apparatus of the plate object according to Claims 2 or 3, it is characterised in that
The groove formation mechanism has:Blade, its revolving wheel the outer peripheral face, with described in the plate object
The corresponding position of end face forms the groove portion of the ring-type;And switching mechanism, the blade can be switched to the blade by it
The outer peripheral face of the abutted position that abuts with the outer peripheral face of the revolving wheel and the blade from the revolving wheel
The separation point position left.
5. end surface machining apparatus of plate object according to claim 1, it is characterised in that
It is processed by the end face to the plate object, so as to form the groove portion.
6. end surface machining apparatus of plate object according to claim 1 or 5, it is characterised in that
It is processed by the region in addition to both ends of the end face to the plate object, so as to form the groove portion.
7. end surface machining apparatus of plate object according to any one of claim 1 to 6, it is characterised in that
The revolving wheel is configured to along axis of rotation direction move.
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JP2014160863A JP6609847B2 (en) | 2014-08-06 | 2014-08-06 | End face processing equipment for plate |
JP2014-160863 | 2014-08-06 | ||
PCT/JP2015/072152 WO2016021620A1 (en) | 2014-08-06 | 2015-08-04 | End-face machining device for plate-like object |
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CN106660188B CN106660188B (en) | 2019-08-23 |
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KR (1) | KR102397586B1 (en) |
CN (1) | CN106660188B (en) |
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JP2007044817A (en) * | 2005-08-10 | 2007-02-22 | Tokyo Seimitsu Co Ltd | Apparatus for chamfering wafer, grinding wheel therefor and truing grinding wheel |
JP2007165712A (en) * | 2005-12-15 | 2007-06-28 | Shin Etsu Handotai Co Ltd | Processing method of chamfered part of semiconductor wafer and correction method of grooved shape of grinder |
JP2009142979A (en) * | 2007-12-14 | 2009-07-02 | Siltron Inc | Truing tool of grinding wheel and its manufacturing method, truing device using the same, method of manufacturing grinding wheel and wafer edge grinding device |
JP2010238302A (en) * | 2009-03-31 | 2010-10-21 | Hoya Corp | Method of producing glass substrate for magnetic disk and electroplated grinding wheel used for the same |
CN101277790B (en) * | 2005-09-29 | 2011-12-21 | Hoya株式会社 | Polishing brush, polishing member, polishing method, polishing device, manufacturing method for glass substrate for magnetic disk |
WO2013065490A1 (en) * | 2011-10-31 | 2013-05-10 | 旭硝子株式会社 | Processing device for board-shaped object and processing method for board-shaped object |
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JP4406752B2 (en) * | 2005-05-27 | 2010-02-03 | 日本電気硝子株式会社 | Glass substrate end face processing apparatus and end face processing method |
JP5305214B2 (en) | 2006-10-06 | 2013-10-02 | 日本電気硝子株式会社 | End face processing method of plate glass |
JP6238117B2 (en) * | 2013-09-19 | 2017-11-29 | 旭硝子株式会社 | Processing method of plate |
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2014
- 2014-08-06 JP JP2014160863A patent/JP6609847B2/en active Active
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2015
- 2015-08-04 KR KR1020177001940A patent/KR102397586B1/en active IP Right Grant
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- 2015-08-04 WO PCT/JP2015/072152 patent/WO2016021620A1/en active Application Filing
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Patent Citations (6)
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JP2007044817A (en) * | 2005-08-10 | 2007-02-22 | Tokyo Seimitsu Co Ltd | Apparatus for chamfering wafer, grinding wheel therefor and truing grinding wheel |
CN101277790B (en) * | 2005-09-29 | 2011-12-21 | Hoya株式会社 | Polishing brush, polishing member, polishing method, polishing device, manufacturing method for glass substrate for magnetic disk |
JP2007165712A (en) * | 2005-12-15 | 2007-06-28 | Shin Etsu Handotai Co Ltd | Processing method of chamfered part of semiconductor wafer and correction method of grooved shape of grinder |
JP2009142979A (en) * | 2007-12-14 | 2009-07-02 | Siltron Inc | Truing tool of grinding wheel and its manufacturing method, truing device using the same, method of manufacturing grinding wheel and wafer edge grinding device |
JP2010238302A (en) * | 2009-03-31 | 2010-10-21 | Hoya Corp | Method of producing glass substrate for magnetic disk and electroplated grinding wheel used for the same |
WO2013065490A1 (en) * | 2011-10-31 | 2013-05-10 | 旭硝子株式会社 | Processing device for board-shaped object and processing method for board-shaped object |
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JP6609847B2 (en) | 2019-11-27 |
WO2016021620A1 (en) | 2016-02-11 |
KR102397586B1 (en) | 2022-05-13 |
JP2016036867A (en) | 2016-03-22 |
TW201628778A (en) | 2016-08-16 |
TWI696520B (en) | 2020-06-21 |
CN106660188B (en) | 2019-08-23 |
KR20170041700A (en) | 2017-04-17 |
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