CN106647172B - Bearing device and gluing equipment - Google Patents
Bearing device and gluing equipment Download PDFInfo
- Publication number
- CN106647172B CN106647172B CN201710003213.3A CN201710003213A CN106647172B CN 106647172 B CN106647172 B CN 106647172B CN 201710003213 A CN201710003213 A CN 201710003213A CN 106647172 B CN106647172 B CN 106647172B
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- substrate
- channel
- balls
- gas
- bearing
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
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- General Physics & Mathematics (AREA)
- Bearings For Parts Moving Linearly (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Abstract
The invention provides a bearing device, which comprises a bearing table for bearing a substrate, wherein a plurality of gas channels penetrating through the bearing table are arranged in the bearing table; at least a part of the gas channels are internally provided with balls, the bearing device also comprises a driving mechanism which is used for driving the balls to move towards the substrate on the bearing table so as to support the substrate, and the balls can roll along the surface of the substrate. Correspondingly, the invention further provides gluing equipment. The bearing device of the invention is more convenient for aligning the substrate.
Description
Technical Field
The invention relates to the field of manufacturing of display devices, in particular to a bearing device and gluing equipment.
Background
In the manufacturing process of the array substrate, a photoresist needs to be coated to perform a photolithography patterning process. Fig. 1 is a schematic view of a conventional carrier device, and a plurality of through holes 11 are formed in a carrier table 10. When the substrate 20 is misaligned before the photoresist is coatedWhen moving, the blowing device blows nitrogen (N) into the through hole2) The substrate is slightly blown off the stage and then aligned by the aligning members 30. When coating the photoresist, a vacuum apparatus is connected to the through hole 11 to absorb the substrate 20 on the stage 10. When counterpointing, there is certain friction in base plate 20 and plummer 10 surface, can lead to the surface of plummer 10 to produce the mirrorization after using for a long time, and this kind of mirrorization can make and has great adhesive force between base plate 20 and the plummer 10 surface, leads to base plate 20 to be difficult to by the air current jack-up in the passageway, also is difficult to promote by counterpoint piece 30 to cause counterpoint failure rate increase, need artifical field processing, and there is the risk of rupture of disc.
Disclosure of Invention
The invention aims to at least solve one of the technical problems in the prior art, and provides a bearing device and gluing equipment so as to improve the alignment success rate.
In order to solve one of the above technical problems, the present invention provides a carrier apparatus, including a carrier stage for carrying a substrate, wherein a plurality of gas channels penetrating through the carrier stage are disposed in the carrier stage; at least a part of the gas channel is internally provided with a ball, the bearing device also comprises a driving mechanism which is used for driving the ball to move towards the top of the gas channel so as to support the substrate on the bearing table, and the ball supporting the substrate can rotate at will at the top of the gas channel.
Preferably, the driving mechanism comprises a lifting rod, the ball bearing is rotatably arranged at the top of the lifting rod, and the lifting rod is used for controlling the lifting of the ball bearing in the gas channel.
Preferably, the driving mechanism comprises a blowing structure, the blowing structure comprises an air hole communicated with the air channel, and the blowing structure is used for blowing air to the air channel through the air hole so as to jack up the ball through air flow.
Preferably, the gas channel comprises a first channel part and a second channel part which are coaxially arranged, the bottom end of the first channel part is connected with the top end of the second channel part, the ball is positioned in the first channel part, and the diameter of the top end of the second channel part is smaller than that of the ball.
Preferably, a tip diameter of the first passage portion is smaller than a diameter of the ball, and a part of the ball is able to be exposed from a tip opening of the first passage portion.
Preferably, the inner diameter of the first channel part gradually increases from the top end of the first channel part to a predetermined position, the inner diameter of the predetermined position is larger than the diameter of the ball, and the predetermined position is located between the top end of the first channel part and the bottom end of the first channel part;
the surface of the bearing table is also provided with grooves, and the grooves are used for communicating the first channel parts of every two adjacent gas channels.
Preferably, the plummer includes a first body and a plurality of second bodies detachably connected to the first body, the second bodies correspond to the gas passages one by one, a portion of the first passage portion from a top end thereof to the predetermined position penetrates the second bodies, and the remaining portion of the first passage portion and the second passage portion penetrate the first bodies.
Preferably, the air blowing structure comprises an ion blower.
Preferably, each of the gas passages has the ball disposed therein.
Preferably, the carrying device further comprises a position detection device and an alignment assembly, which are arranged on the carrying table, wherein the position detection device is used for detecting the edge position of the substrate; the alignment assembly is used for moving the substrate according to the edge position of the substrate so as to enable the substrate to be located in a preset area.
Correspondingly, the invention further provides gluing equipment which comprises the bearing device.
When the substrate on the bearing table is aligned, the driving mechanism drives the balls to jack the substrate, then the substrate is moved, and the substrate is contacted with the balls in the moving process and is not contacted with the bearing table any more. Therefore, the invention can prevent the surface of the bearing table from being mirrored due to long-time friction, the adhesive force between the substrate and the bearing table is small, and the substrate is easier to jack up; and the rolling friction between the base plate and the balls is small when the base plate moves, so that the base plate can move conveniently, and the alignment success rate is improved. In addition, the driving mechanism can comprise an ion fan, and the ion wind blown out by the ion fan jacks up the balls on one hand and flows into the grooves on the surface of the bearing table on the other hand, so that the static electricity on the surface of the substrate can be neutralized, and the damage of the static electricity to the pattern on the surface of the substrate is reduced.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principles of the invention and not to limit the invention. In the drawings:
FIG. 1 is a schematic diagram illustrating a substrate on a susceptor being aligned in the prior art;
FIG. 2 is a schematic view of a first structure of a carrier device according to the present invention for aligning a substrate;
FIG. 3 is a schematic view of a carrier stage of a second embodiment of the present invention;
FIG. 4 is a schematic view illustrating the supporting device shown in FIG. 3 aligning a substrate;
FIG. 5 is a top view of a carrier table of the carrier of the present invention;
FIG. 6 is a top view of the ball in one of the gas passages at the top of the other passage;
FIG. 7 is a cross-sectional view taken along line AA of FIG. 6;
fig. 8 is a plan view of a carrier device carrying a substrate according to the present invention.
Wherein the reference numerals are:
10. a bearing table; 10a, a first body; 10b, a second body; 11. a through hole; 12. a gas channel; 121. a first channel portion; 122. a second channel portion; 13. a ball bearing; 14. a groove; 141. a first groove portion; 142. a second groove portion; 20. a substrate; 30. a registration member; 40. a lifting rod; 50. a position detection device.
Detailed Description
The following detailed description of embodiments of the invention refers to the accompanying drawings. It should be understood that the detailed description and specific examples, while indicating the present invention, are given by way of illustration and explanation only, not limitation.
As an aspect of the present invention, there is provided a carrier apparatus, as shown in fig. 2, including a susceptor 10 for supporting a substrate 20, wherein a plurality of gas passages 12 are formed through the susceptor 10 in the susceptor 10. The bearing device further comprises a driving mechanism for driving the balls 13 to move towards the top of the gas channel 12 so as to lift the substrate 20 on the bearing table 10 (as shown in fig. 2 and 4), and the balls 13 for lifting the substrate 20 can rotate freely on the top of the gas channel 12. In the present invention, "top" refers to a portion close to the substrate 20, "top" refers to an end close to the substrate 20, and "bottom" refers to an end far from the substrate 20.
In the present invention, when the substrate 20 is aligned, the driving mechanism drives the balls 13 to lift the substrate 20, and then the substrate 20 is moved, and the substrate 20 is in contact with the balls 13 during the movement and is no longer in contact with the susceptor 10, as shown in fig. 2 and 3. Therefore, compared with the prior art, the invention can prevent the surface of the bearing platform 10 from being mirrored due to long-time friction, the adhesive force between the substrate 20 and the bearing platform 10 is small, and the substrate 20 is easier to jack up; in addition, the rolling friction between the substrate 20 and the balls 13 is small when the substrate 20 moves, so that the substrate 20 can move conveniently, and the alignment success rate is improved.
The driving mechanism may adopt various structures and manners to drive the balls 13 to move towards the substrate 20, and as an embodiment of the present invention, as shown in fig. 2, the driving mechanism includes a lifting rod 40, the balls 20 are rotatably disposed on the top of the lifting rod 40, and the lifting rod 40 is used for controlling the lifting of the balls 13 in the gas channel 12. Specifically, the top of the lifting rod 40 may be provided with a groove in which the ball 13 is disposed to maintain stability; and the tip of the ball 13 is exposed from the groove to be able to contact the substrate 20.
As another embodiment of the present invention, the driving mechanism includes a blowing structure including an air hole communicating with the air passage 12, and the blowing structure is used for blowing air to the air passage to jack up the ball 13 by the air flow. By adjusting the pressure of the air flow blown by the air blowing structure, the balls can be blown by the air flow, so as to lift the substrate 20, as shown in fig. 4.
In the present invention, a ball 13 is provided in each gas passage 12. The gas channel 12 can be used as a blowing channel or an adsorption channel, and a small amount of clearance can be formed between the balls 13 and the inner wall of the gas channel 12, so that the balls 13 can be jacked up by the gas flow and the adsorption on the substrate 20 is not influenced. Of course, the balls 13 may be disposed in a part of the gas passage 12, and the balls 13 may be attached to the inner wall of the gas passage 12, so that the gas blowing structure may be more easily jacked up when blowing the gas flow; the other part of the gas passages 12 is not provided with the balls 13, and the part of the gas passages 12 not provided with the balls 13 can be used as an adsorption passage for adsorbing the substrate 20.
As shown in fig. 3 and 4, the gas passage 12 includes a first passage portion 121 and a second passage portion 122 coaxially disposed, a bottom end of the first passage portion 121 is connected to a top end of the second passage portion 122, the ball 13 is located in the first passage portion 121, and a diameter of the top end of the second passage portion 122 is smaller than a diameter of the ball 13. When the air blowing structure is not blowing air, the ball 13 is supported at the top end position of the second channel part 122 (as shown in fig. 3); when the air blowing structure blows air, the ball 13 only moves in the first channel part 121, and is more favorably jacked up by the air flow.
Further specifically, in order to prevent the balls 13 from coming off the bearing table 10 when the air blowing structure blows air, the tip diameter of the first passage portion 121 is smaller than the diameter of the balls 13, and a part of the balls 13 can be exposed from the tip opening of the first passage portion 121.
As shown in fig. 3 and 4, the inner diameter of the first passage part 121 gradually increases from the top end of the first passage part 121 to a predetermined position, which is larger than the diameter of the balls 13, between the top end of the first passage part 121 and the bottom end of the first passage part 121, for example, at a central position between the top end and the bottom end of the first passage part 121. As shown in fig. 5, the surface of the carrier 10 is further formed with grooves 14, and the grooves 14 are used for communicating the first channel parts 121 of every two adjacent gas channels 12. When the gas blowing structure blows gas into the gas passage 12, the balls 13 are lifted up by the gas flow, and a part of the gas flows into the grooves 14 due to the gap between the balls 13 and the first passage part 121, thereby further reducing the bonding force between the substrate 20 and the susceptor 10 and more easily lifting up the substrate 20. And, when the substrate 20 is adsorbed, the grooves 14 communicate different gas channels 12, so that the substrate 20 is more smoothly attached on the susceptor 10.
FIG. 5 is a top view of the susceptor; FIG. 6 is a top view of the ball in one of the gas passages moving to the top of the gas passage; fig. 7 is a sectional view a-a of fig. 6. In order to more clearly see the state of the ball 13 at the top of the gas channel 12, fig. 7 only shows the first channel part 121, and the second channel part 122 is not shown. As shown in fig. 5 to 7, the groove 14 specifically includes a first groove portion 141 and a second groove portion 142, and the first groove portion 141 is directly communicated with the gas channel 12. During the process of blowing air by the blowing structure to lift the ball 13, a part of the air flows into the first groove portion 141 and the second groove portion 142; when the ball 13 moves to the opening at the top end of the gas channel 12, as shown in fig. 6 and 7, the edge of the first groove portion 141 away from the gas channel does not contact the ball 13, so that a part of the gas flows into the first groove portion 141 and the second groove portion 142 from the gas channel 12. The width of the second groove part 142 may be 1/15-1/10 of the inner diameter of the first channel part 121 at a predetermined position, so that the groove 14 can be filled with gas quickly.
When the top end opening of the first channel part 121 is small, in order to facilitate replacement of the balls 13, it is preferable that the bearing table 10 includes a first body 10a and a plurality of second bodies 10b detachably connected to the first body 10a (for example, the first body 10a and the second body 10b are connected by screws), as shown in fig. 3 and 4, the second bodies 10b are in one-to-one correspondence with the gas channels 12, a portion of the first channel part 121 from the top end thereof to the predetermined position penetrates the second body 10b, and the remaining portion of the first channel part 121 and the second channel part 122 penetrate the first body 10 a.
In order to reduce static electricity generated during the movement of the substrate 20, it is preferable that the air blowing structure includes an ion blower to blow out an ion wind including a large amount of positive and negative charges, so as to neutralize the positive and negative charges on the surface of the substrate 20, reduce static electricity on the substrate 20, and further reduce damage of the static electricity to the pattern on the surface of the substrate 20.
As shown in fig. 8, in order to realize automatic alignment of the substrate 20, the carrier further includes a position detection device 50 and an alignment assembly disposed on the carrier 10, wherein the position detection device 50 is used for detecting the edge position of the substrate 20; the alignment assembly is used for moving the substrate 20 according to the edge position of the substrate 20, so that the substrate 20 is located in a predetermined area. The position detection may include a position sensor corresponding to the position of the substrate 20, and the aligning assembly may include a plurality of aligning members 30 corresponding to the edges of the substrate 20 to push the edges of the substrate 20.
A plurality of mounting holes (not shown) may be further provided in the carrier stage 10, and the carrier device may further include a plurality of support pins passing through the mounting holes. When the glue application is completed, the support pins are raised in the mounting holes to jack up the substrate 10, and then, the robot takes the substrate away.
It can be seen that, when the substrate 20 on the carrier 10 is aligned according to the present invention, the driving mechanism drives the balls 13 to jack up the substrate 20, and then the substrate 20 is moved, and the substrate 20 is in contact with the balls 13 during the movement and is no longer in contact with the carrier 10. Therefore, the invention can prevent the surface of the bearing platform 10 from being mirrored due to long-time friction, the adhesive force between the substrate 20 and the bearing platform 10 is small, and the substrate 20 is easier to jack; in addition, the rolling friction between the substrate 20 and the balls 13 is small when the substrate 20 moves, so that the substrate 20 can move conveniently, and the alignment success rate is improved. In addition, the driving mechanism may include an ion blower, and the ion wind blown by the ion blower lifts the balls on one hand and flows into the grooves 14 on the surface of the susceptor 10 on the other hand, so that the static electricity on the surface of the substrate 20 can be neutralized, and the damage of the static electricity to the surface pattern of the substrate 20 can be reduced.
As another aspect of the present invention, there is provided a gluing device, including the above-mentioned carrying device.
Because the bearing device can facilitate the movement of the substrate and improve the alignment success rate of the substrate, the gluing effect can be improved when the gluing equipment is used for gluing the substrate.
It will be understood that the above embodiments are merely exemplary embodiments taken to illustrate the principles of the present invention, which is not limited thereto. It will be apparent to those skilled in the art that various modifications and improvements can be made without departing from the spirit and substance of the invention, and these modifications and improvements are also considered to be within the scope of the invention.
Claims (8)
1. A bearing device comprises a bearing table for bearing a substrate, wherein a plurality of gas channels penetrating through the bearing table are arranged in the bearing table; the bearing device is characterized in that at least a part of the gas channel is internally provided with balls, the bearing device also comprises a driving mechanism which is used for driving the balls to move towards the top of the gas channel so as to support the substrate on the bearing table, and the balls which support the substrate can rotate at will at the top of the gas channel;
the driving mechanism comprises a blowing structure, the blowing structure comprises air holes communicated with the air channel, the blowing structure is used for blowing air to the air channel through the air holes so as to jack up the balls through air flow, the air channel comprises a first channel part and a second channel part which are coaxially arranged, the bottom end of the first channel part is connected with the top end of the second channel part, the balls are located in the first channel part, and the diameter of the top end of the second channel part is smaller than that of the balls.
2. The load carrying apparatus of claim 1 wherein the first channel portion has a tip diameter that is less than a diameter of the ball, and a portion of the ball is capable of emerging from the tip opening of the first channel portion.
3. The load carrying apparatus according to claim 2, wherein the first channel portion has an inner diameter gradually increasing from a top end of the first channel portion to a predetermined position, the inner diameter at the predetermined position being larger than a diameter of the ball, the predetermined position being located between the top end of the first channel portion and the bottom end of the first channel portion;
the surface of the bearing table is also provided with grooves, and the grooves are used for communicating the first channel parts of every two adjacent gas channels.
4. The carrier device according to claim 3, wherein the carrier stage comprises a first body and a plurality of second bodies detachably connected to the first body, the second bodies correspond to the gas passages one by one, a portion of the first passage portion from a top end thereof to the predetermined position penetrates through the second bodies, and the remaining portion of the first passage portion and the second passage portion penetrate through the first bodies.
5. The carrier in accordance with claim 1 wherein the air-blowing structure comprises an ion blower.
6. The carrier as claimed in any one of claims 1 to 5 wherein the ball is disposed in each gas passage.
7. The carrying device according to any one of claims 1 to 5, further comprising a position detecting device and an alignment assembly disposed on the carrying stage, wherein the position detecting device is used for detecting an edge position of the substrate; the alignment assembly is used for moving the substrate according to the edge position of the substrate so as to enable the substrate to be located in a preset area.
8. A gluing device, characterized in that it comprises a carrying device according to any one of claims 1 to 7.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710003213.3A CN106647172B (en) | 2017-01-03 | 2017-01-03 | Bearing device and gluing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710003213.3A CN106647172B (en) | 2017-01-03 | 2017-01-03 | Bearing device and gluing equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106647172A CN106647172A (en) | 2017-05-10 |
| CN106647172B true CN106647172B (en) | 2020-04-03 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710003213.3A Expired - Fee Related CN106647172B (en) | 2017-01-03 | 2017-01-03 | Bearing device and gluing equipment |
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| Country | Link |
|---|---|
| CN (1) | CN106647172B (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104289371A (en) * | 2014-10-28 | 2015-01-21 | 芜湖东正汽车工业有限公司 | Gluing device |
| CN105013665A (en) * | 2015-08-17 | 2015-11-04 | 潍坊路加精工有限公司 | Gluing device and gluing method thereof |
| CN106154607A (en) * | 2016-08-26 | 2016-11-23 | 京东方科技集团股份有限公司 | A kind of elevating mechanism |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102103034B (en) * | 2009-12-21 | 2012-08-22 | 富士迈半导体精密工业（上海）有限公司 | Optical property measuring system and method |
-
2017
- 2017-01-03 CN CN201710003213.3A patent/CN106647172B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104289371A (en) * | 2014-10-28 | 2015-01-21 | 芜湖东正汽车工业有限公司 | Gluing device |
| CN105013665A (en) * | 2015-08-17 | 2015-11-04 | 潍坊路加精工有限公司 | Gluing device and gluing method thereof |
| CN106154607A (en) * | 2016-08-26 | 2016-11-23 | 京东方科技集团股份有限公司 | A kind of elevating mechanism |
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| Publication number | Publication date |
|---|---|
| CN106647172A (en) | 2017-05-10 |
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Granted publication date: 20200403 Termination date: 20220103 |