CN106646048B - 一种微电极阵列的制备方法 - Google Patents
一种微电极阵列的制备方法 Download PDFInfo
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- CN106646048B CN106646048B CN201611206553.8A CN201611206553A CN106646048B CN 106646048 B CN106646048 B CN 106646048B CN 201611206553 A CN201611206553 A CN 201611206553A CN 106646048 B CN106646048 B CN 106646048B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/003—Environmental or reliability tests
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
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CN201611206553.8A CN106646048B (zh) | 2016-12-23 | 2016-12-23 | 一种微电极阵列的制备方法 |
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CN106646048A CN106646048A (zh) | 2017-05-10 |
CN106646048B true CN106646048B (zh) | 2019-11-12 |
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Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
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CN108175937B (zh) * | 2017-12-26 | 2021-12-28 | 深圳先进技术研究院 | 一种连接探针、其制备方法及在微电极阵列连接中的用途 |
CN108414592A (zh) * | 2018-02-05 | 2018-08-17 | 北京科技大学 | 一种聚合物刷微电极阵列的制备方法 |
CN108751117A (zh) * | 2018-05-28 | 2018-11-06 | 深圳市中科先见医疗科技有限公司 | 微电极阵列及其制备方法 |
CN108969889A (zh) * | 2018-07-31 | 2018-12-11 | 中国科学院深圳先进技术研究院 | 一种柔性等离子体贴 |
CN110174453B (zh) * | 2019-05-08 | 2021-08-03 | 中国科学院微电子研究所 | 一种微电极结构及其制作方法及包括该器件的电子设备 |
CN110314279A (zh) * | 2019-07-09 | 2019-10-11 | 深圳先进技术研究院 | 一种微电极及其制备方法和神经假体 |
US11970391B2 (en) | 2019-12-13 | 2024-04-30 | Shenzhen Institutes Of Advanced Technology | Flexible electrode and preparation method thereof |
CN111017870B (zh) * | 2019-12-13 | 2023-08-08 | 深圳市中科先见医疗科技有限公司 | 一种柔性电极及其制备方法 |
CN116942155A (zh) * | 2023-09-21 | 2023-10-27 | 之江实验室 | 柔性植入式光电器件及其制备方法、控制方法 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
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CN100563748C (zh) * | 2007-05-18 | 2009-12-02 | 中国科学院上海微系统与信息技术研究所 | 一种高密度植入式平面阵列微电极及制作方法 |
CN101240435B (zh) * | 2008-03-06 | 2011-02-09 | 复旦大学 | 电镀自焊接三维微电极阵列方法 |
CN101380257B (zh) * | 2008-10-09 | 2010-07-28 | 上海交通大学 | 柔性视网膜凸点微电极芯片及其制作方法 |
CN103153392B (zh) * | 2010-08-25 | 2016-03-09 | 神经毫微股份公司 | 抗位移微电极、微电极束、和微电极阵列 |
CN102593133B (zh) * | 2012-03-29 | 2014-09-24 | 江苏物联网研究发展中心 | 一种用于红外焦平面阵列器件的微结构及其制造方法 |
CN103456847B (zh) * | 2012-06-01 | 2017-12-26 | 晶元光电股份有限公司 | 光电元件及其制造方法 |
EP2863990B1 (en) * | 2012-06-21 | 2017-08-09 | Neuronano AB | Medical microelectrode |
CN104760922B (zh) * | 2014-01-03 | 2016-08-24 | 中国科学院电子学研究所 | 一种超微平面电极阵列传感器及其制备方法 |
CN106054519B (zh) * | 2016-07-07 | 2020-08-25 | 深圳先进技术研究院 | 一种利用光刻胶制备三维微电极阵列的方法 |
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