CN106637390A - Graphite boat for epitaxial growth of horizontal liquid phase of mercury cadmium telluride thin film - Google Patents
Graphite boat for epitaxial growth of horizontal liquid phase of mercury cadmium telluride thin film Download PDFInfo
- Publication number
- CN106637390A CN106637390A CN201611197699.0A CN201611197699A CN106637390A CN 106637390 A CN106637390 A CN 106637390A CN 201611197699 A CN201611197699 A CN 201611197699A CN 106637390 A CN106637390 A CN 106637390A
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- CN
- China
- Prior art keywords
- mother liquor
- liquor tank
- cadmium telluride
- thin film
- graphite boat
- Prior art date
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B19/00—Liquid-phase epitaxial-layer growth
- C30B19/06—Reaction chambers; Boats for supporting the melt; Substrate holders
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/46—Sulfur-, selenium- or tellurium-containing compounds
- C30B29/48—AIIBVI compounds wherein A is Zn, Cd or Hg, and B is S, Se or Te
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention discloses a graphite boat for epitaxial growth of a horizontal liquid phase of a mercury cadmium telluride thin film. The graphite boat comprises an upper cover, a bottom support, a sliding strip and a mother solution tank, wherein the bottom support comprises a groove with one bottom edge and two side edges; the sliding strip and the mother solution tank are arranged in the groove; the mother solution tank is fixed at the upper end of the groove; the upper surface of the mother solution tank is leveled with the upper surfaces of the two side edges; the sliding strip is located between the mother solution tank and the bottom edge of the bottom support, and can do movement relative to the mother solution tank along the bottom edge; the upper cover is of a solid structure and covers the side edges of the bottom support and the mother solution tank; a drainage channel is arranged in the upper cover; a starting point and a finishing point of the drainage channel are located on a contact surface of the upper cover and the mother solution tank. According to the graphite boat disclosed by the embodiment of the invention, a drainage groove is formed in the upper cover, and a temperature field, gas flow, gas-phase distribution and mercury pressure in an epitaxial growth process of the horizontal liquid phase can be improved to a certain extent, so that the problems about surface appearance and thickness uniformity of the mercury cadmium telluride thin film are solved.
Description
Technical field
The present invention relates to infrared acquisition field, more particularly to a kind of stone for the horizontal rheotaxial growth of mercury cadmium telluride thin film
Mo Zhou.
Background technology
Because mercury cadmium telluride is a kind of direct band-gap semicondictor material and with adjustable energy gap, can cover whole
Individual infrared band, therefore mercury cadmium telluride begins to be widely used in preparing different types of Infrared Detectors from the seventies,
Currently have become the most widely used material for detector in infrared acquisition field.Through the continuous development of nearly 30 years, at present
Jing can prepare many high-quality Hg using various methods such as LPE, MOVPE and MBE1-xCdxTe epitaxial films and high property
The infrared detector of energy.Quasi-equilibrium state growth is the advantage of liquid phase epitaxy, and the structural intergrity for growing crystal is very good, removes
Outside the extension of substrate defects, mercury cadmium telluride rheotaxial itself can accomplish hardly to introduce any new defect.In addition, liquid phase
The equipment cost and operating cost of extension is far below molecular beam epitaxy and metal organic vapor, and its yield rate and product
These technologies can be all no less than.Therefore, liquid phase epitaxy is still one of mainstream technology for preparing tellurium cadmium mercury epitaxial material.
The technology grown up around mercury cadmium telluride rheotaxial has a lot, rich tellurium push boat type mercury cadmium telluride rheotaxial
Great advantage is that the repeatability of technique is very good, and each technique is all using strict quantitative composition identical mother liquor as source material
Material, the process technology of graphite boat and the temperature control technique in modern times be enough to ensure that in each technical process in mother liquor atom by gap to
The amount very little of external leakage and repeatable, as long as second advantage is the composition for changing mother liquor, you can realize the tellurium cadmium of different component
Mercury Material growth.But, in addition to the characters and appearances that growth mechanism is determined, liquid phase epitaxy surface occurs what the thickness discrepancy in elevation caused
Macroscopical ripple, and this phenomenon compares in boat technique is pushed away as the level in mercury source needed for mother liquor balanced growth using HgTe powder
It is more apparent.
The content of the invention
In order to improve the surface topography and thickness evenness of the mercury cadmium telluride thin film of horizontal rheotaxial growth, the present invention is provided
A kind of graphite boat for the horizontal rheotaxial growth of mercury cadmium telluride thin film.
Provided by the present invention for the graphite boat of the horizontal rheotaxial growth of mercury cadmium telluride thin film, including：Upper lid, collet, cunning
Bar and mother liquor tank；The collet is the groove for including a base and two sides, and the draw runner and the mother liquor tank are placed on
In the groove, the mother liquor tank is fixed on the upper end of the groove, and the upper surface of the mother liquor tank and two sides
Upper surface it is concordant, the draw runner is located between the mother liquor tank and the base of the collet, and can be with the mother liquor tank along institute
Stating base carries out relative movement, and the upper lid is solid construction, is covered on the side of the collet and the mother liquor tank, in institute
State and be provided with inside lid drainage channel, and the beginning and end of the drainage channel is respectively positioned on the upper lid and the mother liquor tank
On contact surface.
The present invention has the beneficial effect that：
The embodiment of the present invention arranges drainage trough inside upper lid, grows when can to a certain extent improve horizontal liquid phase epitaxy
During thermal field, air-flow, Gas distribution and mercury pressure, and then improve the surface topography of mercury cadmium telluride thin film and asking for thickness evenness
Topic, it is good using the mercury cadmium telluride thin film thickness evenness obtained by graphite boat extension, tellurium cadmium is measured using Fourier infrared spectrograph
The thickness evenness of mercury film, compared to ordinary graphite boat, the thickness standard deviation of the mercury cadmium telluride thin film of similar thickness obtains bright
It is aobvious to improve.
Description of the drawings
Fig. 1 is the assembling schematic diagram of the graphite boat that the embodiment of the present invention is used for the horizontal rheotaxial growth of mercury cadmium telluride thin film；
Fig. 2 is that the embodiment of the present invention will cover a kind of structural representation of the drainage channel obtained after vertical throwing on graphite boat；
Fig. 3 is the front view of the upper lid with mother liquor tank contact surface of embodiment of the present invention graphite boat；
Wherein, 1, upper lid；2nd, collet；3rd, draw runner；4th, mother liquor tank；11st, drainage channel；12nd, drainage trough；13rd, vertical channel；
14th, the starting point of drainage channel；15th, the terminal of drainage channel.
Specific embodiment
The exemplary embodiment of the disclosure is more fully described below with reference to accompanying drawings.Although showing the disclosure in accompanying drawing
Exemplary embodiment, it being understood, however, that may be realized in various forms the disclosure and should not be by embodiments set forth here
Limited.On the contrary, there is provided these embodiments are able to be best understood from the disclosure, and can be by the scope of the present disclosure
Complete conveys to those skilled in the art.
The application has found that liquid phase epitaxy surface is by graphite cavity due to macroscopical ripple that the thickness discrepancy in elevation causes by studying
Leakage and thermal field distribution it is uneven and cause.The leakage of mercury and tellurium steam in graphite cavity will cause the gas above mother liquor
Mutually occur uneven, it will cause uneven evaporation and convection effect together with temperature unevenness in gas phase and mother liquor, enter
And it is uneven to cause mother liquor temperature and composition to occur, there is difference in surface each point extension speed.
In order to improve the surface topography and thickness evenness of the mercury cadmium telluride thin film of horizontal rheotaxial growth, the present invention is provided
A kind of graphite boat for the horizontal rheotaxial growth of mercury cadmium telluride thin film, below in conjunction with accompanying drawing and embodiment, to the present invention
It is further elaborated.It should be appreciated that specific embodiment described herein is not limited only to explain the present invention
The present invention.
A kind of embodiments in accordance with the present invention, there is provided graphite boat for the horizontal rheotaxial growth of mercury cadmium telluride thin film,
Fig. 1 is the assembling schematic diagram of the graphite boat that the embodiment of the present invention is used for the horizontal rheotaxial growth of mercury cadmium telluride thin film；Such as Fig. 1 institutes
Show, the graphite boat for the horizontal rheotaxial growth of mercury cadmium telluride thin film according to embodiments of the present invention, including：Upper lid 1, collet 2,
Draw runner 3 and mother liquor tank 4；The collet 2 is the groove for including a base and two sides, the draw runner 3 and the mother liquor tank 4
Be placed in the groove, the mother liquor tank 4 is fixed on the upper end of the groove, and the upper surface of the mother liquor tank 3 with it is described
The upper surface of two sides is concordant, and the draw runner 3 is located between the mother liquor tank 4 and the base of the collet 2, and can with it is described
Mother liquor tank 4 carries out relative movement along the base, and the upper lid 1 is solid construction, is covered in the side of the collet 2 and described
On mother liquor tank 4, drainage channel 11, and the starting point 14 and the drainage channel of the drainage channel are provided with inside lid 1 on described
Terminal 15 be respectively positioned on the upper lid 1 and the contact surface of the mother liquor tank 4.
Subcylindrical graphite boat can be divided into shell and internal two parts, and shell mechanism is divided into lid 1 and collet 2 two
Part, centre is closed with screw, to ensure the sealing of graphite boat；Inside is divided into 3 two parts of mother liquor tank 4 and draw runner.
Specifically, the vertical section of the drainage channel 11 is semicircle, and Fig. 2 is that the embodiment of the present invention will cover vertical on graphite boat
A kind of structural representation of the drainage channel obtained after throwing.
Specifically, direction of the drainage channel 11 on described in lid 1 along draw runner movement extends, and constitutes drainage lumens
Body, the drainage cavity forms two drainage troughs 12 on described on contact surface of the lid 1 with the mother liquor tank 4, Fig. 3 is the present invention
The upper lid of embodiment graphite boat and the front view of mother liquor tank contact surface, can see in figure 3 the contact with mother liquor tank in upper lid
There are two parallel drainage troughs 12 in face.
As shown in Figures 2 and 3, the drainage cavity also include by the drainage channel 11 apart from the upper lid 1 with it is described
Vertical channel 13 of the peak of the contact surface of mother liquor tank 4 to the upper lid 1 and the contact surface of the mother liquor tank 3.In figure 3,
The quantity of the vertical channel 13 is 3.
Specifically, as shown in Figures 2 and 3, the cross section of the upper lid 1 is semicircle.It is different from conventional graphite boat knot
Structure, the embodiment of the present invention is improved original square structure, finally gives subcylindrical graphite boat.
Specifically, the draw runner 3 is provided with the groove for placing mercury cadmium telluride substrate；It is respectively equipped with the mother liquor tank 4
For placing the groove of telluride mercury material and mercury cadmium telluride mother liquor.
Specifically, it is additionally provided with fluid slot on the mother liquor tank 4, fluid slot 12 upper is covered in the position of the fluid slot with described
Position it is corresponding.
More specifically, the fluid slot on the mother liquor tank with it is described placement telluride mercury material and placement mercury cadmium telluride mother liquor it is recessed
Groove is communicated.
The embodiment of the present invention adopts the graphite boat of nearly cylindrical outer shape, and the design with the lid inner draft groove that closes can be with one
Air-flow, Gas distribution and mercury pressure when determining to improve in degree horizontal liquid phase epitaxy, can be effectively improved the surface shape of mercury cadmium telluride thin film
Looks and thickness evenness, so as to reduce the difficulty of subsequent device technique, improve device performance, solve because thickness evenness is made
Into reduction process, interconnection failure, shading a series of problems, such as, the raising to device performance has larger contribution.
For the graphite boat of the horizontal rheotaxial growth of mercury cadmium telluride thin film of more detailed explanation embodiment, with reference to Fig. 1
The using method of the graphite boat of the horizontal rheotaxial growth of mercury cadmium telluride thin film of the present invention is given, following steps are specifically included：
1st, surface clean is carried out to cadmium-zinc-teiluride substrate using acetone and absolute ethyl alcohol, then using 0.5% bromo- methyl alcohol corrosion
Corrosion substrate about 30s；
2nd, draw runner is positioned on collet, mixes up the position of draw runner, be put in the 1# substrate locations of draw runner rotten through cleaning
The cadmium-zinc-teiluride substrate that erosion is processed；
3rd, mother liquor tank is positioned over into draw runner top, compensates mercuryvapour in mother liquor tank 1# positions are put into for growth course and wave
The telluride mercury material sent out；
4th, mercury cadmium telluride mother liquor is put in mother liquor tank 2# positions, for the mercury cadmium telluride thin film of extension different-waveband, is then placed
Suction piece；
5th, the upper cover screw designed through special airslide and collet are fixed；
6th, graphite boat is put in horizontal liquid phase epitaxy stove by the growth procedure extension mercury cadmium telluride thin film for setting, reaches life
During long temperature, the draw runner in graphite boat makes cadmium-zinc-teiluride substrate enter into the mercury cadmium telluride after fusing with the relative movement of mother liquor tank
Mother liquor lower section starts epitaxial growth mercury cadmium telluride thin film, and rate of temperature fall is maintained at 0.1 DEG C/min during growth, after growth certain thickness,
Moved by draw runner, separate substrate and remaining mother liquor；
7th, after growth terminates, fast cooling to room temperature, growth terminates to take out graphite boat.
In sum, according to the novel graphite boat structure design of the present invention in mercury cadmium telluride thin film rheotaxial growth process
In, vapour pressure and air-flow can be effectively improved, realize that mercury cadmium telluride thin film is more nearly the growth of poised state in growth course
Mode, test result indicate that mercury cadmium telluride thin film after growth has good improvement in terms of consistency of thickness, has saved life
For a long time, production efficiency is effectively increased, while also effectively reducing the technology difficulty of subsequent device technique.
Embodiments of the invention are the foregoing is only, the present invention is not limited to, for those skilled in the art
For member, the present invention can have various modifications and variations.All any modifications within the spirit and principles in the present invention, made,
Equivalent, improvement etc., should be included within scope of the presently claimed invention.
Claims (7)
1. a kind of graphite boat for the horizontal rheotaxial growth of mercury cadmium telluride thin film, including upper lid, collet, draw runner and mother liquor tank；
The collet is the groove for including a base and two sides, and the draw runner and the mother liquor tank are placed in the groove,
The mother liquor tank is fixed on the upper end of the groove, and the upper surface of the mother liquor tank is put down with the upper surface of two sides
Together, the draw runner is located between the mother liquor tank and the base of the collet, and can be carried out along the base with the mother liquor tank
Relative movement, the upper lid is solid construction, is covered on the side of the collet and the mother liquor tank, it is characterised in that：
Lid is internal on described is provided with drainage channel, and the beginning and end of the drainage channel be respectively positioned on the upper lid with it is described
On the contact surface of mother liquor tank.
2. the graphite boat of the horizontal rheotaxial growth of mercury cadmium telluride thin film is used for as claimed in claim 1, it is characterised in that described
The cross section of drainage channel is semicircle.
3. the graphite boat of the horizontal rheotaxial growth of mercury cadmium telluride thin film is used for as claimed in claim 2, it is characterised in that described
Direction of the drainage channel on described in lid along draw runner movement extends, and constitutes drainage cavity, and the drainage cavity is described
Two drainage troughs are formed on upper lid and the contact surface of the mother liquor tank.
4. the graphite boat of the horizontal rheotaxial growth of mercury cadmium telluride thin film is used for as claimed in claim 3, it is characterised in that described
Drainage cavity is also included by the drainage channel apart from the upper lid with the peak of the contact surface of the mother liquor tank on described
Cover the vertical channel with the contact surface of the mother liquor tank.
5. the graphite boat of the horizontal rheotaxial growth of mercury cadmium telluride thin film is used for as claimed in claim 1, it is characterised in that described
The cross section of upper lid is semicircle.
6. the graphite boat of the horizontal rheotaxial growth of mercury cadmium telluride thin film is used for as claimed in claim 1, it is characterised in that described
Draw runner is provided with the groove for placing mercury cadmium telluride substrate；It is respectively provided with the mother liquor tank and places the recessed of telluride mercury material
The groove of groove and placement mercury cadmium telluride mother liquor.
7. the graphite boat of the horizontal rheotaxial growth of mercury cadmium telluride thin film is used for as claimed in claim 1, it is characterised in that described
Fluid slot, the fluid slot on the mother liquor tank and the groove for placing telluride mercury material and placement tellurium cadmium are additionally provided with mother liquor tank
The groove of mercury mother liquor is communicated.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611197699.0A CN106637390A (en) | 2016-12-22 | 2016-12-22 | Graphite boat for epitaxial growth of horizontal liquid phase of mercury cadmium telluride thin film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611197699.0A CN106637390A (en) | 2016-12-22 | 2016-12-22 | Graphite boat for epitaxial growth of horizontal liquid phase of mercury cadmium telluride thin film |
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| Publication Number | Publication Date |
|---|---|
| CN106637390A true CN106637390A (en) | 2017-05-10 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201611197699.0A Pending CN106637390A (en) | 2016-12-22 | 2016-12-22 | Graphite boat for epitaxial growth of horizontal liquid phase of mercury cadmium telluride thin film |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111962146A (en) * | 2020-09-15 | 2020-11-20 | 北京智创芯源科技有限公司 | Horizontal liquid phase epitaxial graphite boat, growth system, epitaxial method and growth method |
| CN112064119A (en) * | 2020-09-15 | 2020-12-11 | 北京智创芯源科技有限公司 | Graphite boat and growth system for tellurium-cadmium-mercury thin film material |
| CN112080796A (en) * | 2020-09-21 | 2020-12-15 | 北京智创芯源科技有限公司 | Horizontal liquid phase epitaxial graphite boat, growth system, epitaxial method and growth method |
| CN112251814A (en) * | 2020-09-02 | 2021-01-22 | 中国电子科技集团公司第十一研究所 | Multi-piece substrate boat loading mold, multi-piece substrate loading device and method |
| CN114481304A (en) * | 2020-10-26 | 2022-05-13 | 昆明物理研究所 | Graphite boat for vertical liquid phase epitaxy tellurium cadmium mercury film for reducing surface defects and application |
| CN114808116A (en) * | 2022-05-20 | 2022-07-29 | 中国电子科技集团公司第十一研究所 | Graphite boat applied to horizontal liquid phase epitaxy technology |
Citations (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4366771A (en) * | 1980-07-18 | 1983-01-04 | Honeywell Inc. | Mercury containment for liquid phase growth of mercury cadmium telluride from tellurium-rich solution |
| US4592304A (en) * | 1985-03-18 | 1986-06-03 | Honeywell Inc. | Apparatus for liquid phase epitaxy of mercury cadmium telluride |
| US4697543A (en) * | 1983-12-13 | 1987-10-06 | Honeywell Inc. | Liquid phase epitaxy slider/stator assembly having non-wetting growth well liners |
| US4706604A (en) * | 1986-06-09 | 1987-11-17 | Honeywell Inc. | Wipe-off apparatus of liquid phase epitaxy of mercury cadmium telluride |
| US4828648A (en) * | 1986-05-29 | 1989-05-09 | Rockwell International Corporation | Liquid phase epitaxy apparatus and method |
| CN1360090A (en) * | 2001-11-07 | 2002-07-24 | 中国科学院上海技术物理研究所 | Graphite boat with mother liquid remover for light-phase epitaxial growth of Te-Cd-Hg film |
| JP2002274993A (en) * | 2001-03-22 | 2002-09-25 | Dowa Mining Co Ltd | Device and process for liquid phase epitaxial growth |
| CN101109105A (en) * | 2007-08-22 | 2008-01-23 | 中国科学院上海技术物理研究所 | Graphite boat for improving mercury cadmium telluride rheotaxy membrane surface shape |
| CN101136340A (en) * | 2007-04-25 | 2008-03-05 | 中国科学院上海技术物理研究所 | Silicon based substrate mercury cadmium telluride rheotaxial growth method and special graphite boat |
| CN201169651Y (en) * | 2008-02-03 | 2008-12-24 | 中国电子科技集团公司第十一研究所 | Mercury cadmium telluride mother liquor synthetic apparatus |
| CN101348941A (en) * | 2008-09-02 | 2009-01-21 | 中国电子科技集团公司第十一研究所 | Substrate material for mercury cadmium telluride material growth by liquid phase epitaxy method and preparation thereof |
| CN101353812A (en) * | 2007-07-25 | 2009-01-28 | 中国科学院上海技术物理研究所 | Tunneling type graphite boat for semi-conducting material liquid phase epitaxial growth |
| CN101586252A (en) * | 2009-03-17 | 2009-11-25 | 中国科学院上海技术物理研究所 | Rheotaxial graphite boat preventing mother solution residual |
| CN102995115A (en) * | 2012-12-27 | 2013-03-27 | 中国电子科技集团公司第十一研究所 | Graphite boat for liquid phase epitaxy growth and liquid phase epitaxy growth method |
| CN103882527A (en) * | 2014-01-17 | 2014-06-25 | 中国科学院上海技术物理研究所 | Growing device for reducing mucus on surface of HgCdTe liquid-phase epitaxial material |
-
2016
- 2016-12-22 CN CN201611197699.0A patent/CN106637390A/en active Pending
Patent Citations (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4366771A (en) * | 1980-07-18 | 1983-01-04 | Honeywell Inc. | Mercury containment for liquid phase growth of mercury cadmium telluride from tellurium-rich solution |
| US4697543A (en) * | 1983-12-13 | 1987-10-06 | Honeywell Inc. | Liquid phase epitaxy slider/stator assembly having non-wetting growth well liners |
| US4592304A (en) * | 1985-03-18 | 1986-06-03 | Honeywell Inc. | Apparatus for liquid phase epitaxy of mercury cadmium telluride |
| US4828648A (en) * | 1986-05-29 | 1989-05-09 | Rockwell International Corporation | Liquid phase epitaxy apparatus and method |
| US4706604A (en) * | 1986-06-09 | 1987-11-17 | Honeywell Inc. | Wipe-off apparatus of liquid phase epitaxy of mercury cadmium telluride |
| JP2002274993A (en) * | 2001-03-22 | 2002-09-25 | Dowa Mining Co Ltd | Device and process for liquid phase epitaxial growth |
| CN1360090A (en) * | 2001-11-07 | 2002-07-24 | 中国科学院上海技术物理研究所 | Graphite boat with mother liquid remover for light-phase epitaxial growth of Te-Cd-Hg film |
| CN101136340A (en) * | 2007-04-25 | 2008-03-05 | 中国科学院上海技术物理研究所 | Silicon based substrate mercury cadmium telluride rheotaxial growth method and special graphite boat |
| CN101353812A (en) * | 2007-07-25 | 2009-01-28 | 中国科学院上海技术物理研究所 | Tunneling type graphite boat for semi-conducting material liquid phase epitaxial growth |
| CN101109105A (en) * | 2007-08-22 | 2008-01-23 | 中国科学院上海技术物理研究所 | Graphite boat for improving mercury cadmium telluride rheotaxy membrane surface shape |
| CN201169651Y (en) * | 2008-02-03 | 2008-12-24 | 中国电子科技集团公司第十一研究所 | Mercury cadmium telluride mother liquor synthetic apparatus |
| CN101348941A (en) * | 2008-09-02 | 2009-01-21 | 中国电子科技集团公司第十一研究所 | Substrate material for mercury cadmium telluride material growth by liquid phase epitaxy method and preparation thereof |
| CN101586252A (en) * | 2009-03-17 | 2009-11-25 | 中国科学院上海技术物理研究所 | Rheotaxial graphite boat preventing mother solution residual |
| CN102995115A (en) * | 2012-12-27 | 2013-03-27 | 中国电子科技集团公司第十一研究所 | Graphite boat for liquid phase epitaxy growth and liquid phase epitaxy growth method |
| CN103882527A (en) * | 2014-01-17 | 2014-06-25 | 中国科学院上海技术物理研究所 | Growing device for reducing mucus on surface of HgCdTe liquid-phase epitaxial material |
Non-Patent Citations (2)
| Title |
|---|
| 吴军等: "液相外延碲镉汞材料组分均匀性改善", 《红外技术》 * |
| 杨建荣等: "碲镉汞富碲垂直液相外延技术", 《红外与毫米波学报》 * |
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| CN112251814A (en) * | 2020-09-02 | 2021-01-22 | 中国电子科技集团公司第十一研究所 | Multi-piece substrate boat loading mold, multi-piece substrate loading device and method |
| CN112251814B (en) * | 2020-09-02 | 2021-12-17 | 中国电子科技集团公司第十一研究所 | Multi-piece substrate boat loading mold, multi-piece substrate loading device and method |
| CN111962146A (en) * | 2020-09-15 | 2020-11-20 | 北京智创芯源科技有限公司 | Horizontal liquid phase epitaxial graphite boat, growth system, epitaxial method and growth method |
| CN112064119A (en) * | 2020-09-15 | 2020-12-11 | 北京智创芯源科技有限公司 | Graphite boat and growth system for tellurium-cadmium-mercury thin film material |
| CN112064119B (en) * | 2020-09-15 | 2021-04-27 | 北京智创芯源科技有限公司 | Graphite boat and growth system for tellurium-cadmium-mercury thin film material |
| CN112080796A (en) * | 2020-09-21 | 2020-12-15 | 北京智创芯源科技有限公司 | Horizontal liquid phase epitaxial graphite boat, growth system, epitaxial method and growth method |
| CN112080796B (en) * | 2020-09-21 | 2021-04-13 | 北京智创芯源科技有限公司 | Horizontal liquid phase epitaxial graphite boat, growth system, epitaxial method and growth method |
| CN114481304A (en) * | 2020-10-26 | 2022-05-13 | 昆明物理研究所 | Graphite boat for vertical liquid phase epitaxy tellurium cadmium mercury film for reducing surface defects and application |
| CN114808116A (en) * | 2022-05-20 | 2022-07-29 | 中国电子科技集团公司第十一研究所 | Graphite boat applied to horizontal liquid phase epitaxy technology |
| CN114808116B (en) * | 2022-05-20 | 2023-08-15 | 中国电子科技集团公司第十一研究所 | Graphite boat applied to horizontal liquid phase epitaxy technology |
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