CN101109105A - Graphite boat for improving mercury cadmium telluride rheotaxy membrane surface shape - Google Patents
Graphite boat for improving mercury cadmium telluride rheotaxy membrane surface shape Download PDFInfo
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- CN101109105A CN101109105A CNA2007100451519A CN200710045151A CN101109105A CN 101109105 A CN101109105 A CN 101109105A CN A2007100451519 A CNA2007100451519 A CN A2007100451519A CN 200710045151 A CN200710045151 A CN 200710045151A CN 101109105 A CN101109105 A CN 101109105A
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Abstract
The invention discloses a graphite boat for improving the surface shape of the extended liquid-phase film of merury cadmium telluride, which is characterized in that the mercury supply tank formerly placed at front or rear of the mother liquid tank is changed to be placed right above the mother liquid tank, a channel is provided between the two tanks for communicating; the mercury steam generated by the mercury supply tank supplements mercury into the mother liquid from the top of the mother liquid tank, so that the supplementing of the mercury steam generated by the mercury supply tank becomes more even, hence the pressure above the mother liquid is more even; in addition, as the front and the rear strcuture of the mother liquid tank are similar, the temperature field surrounding the mother liquid tank becomes more even. The advantages with the invention is that the uneveness of pressure and temperature field can be removed to the max. extent, convection of mother liquid is slowed, hence the corrugation on the surface of the extended material is reduced.
Description
Technical field
The present invention relates to the Liquid of thin-film material, be meant a kind of graphite boat that is used for the growth of mercury cadmium telluride rheotaxial material especially, can suppress the defective of material surface ripple with this graphite boat growth mercury cadmium telluride rheotaxial material.
Background technology
The tellurium cadmium mercury epitaxial thin-film material is a preferred material of making various wave band infrared eyes.At military affairs, national defence and space field important application background is arranged.S-generation infrared eye---the mercury-cadmium-tellurium focal plane device of development in recent years is a kind of two-dimensional array of a plurality of probe units, prepares this device and needs big area, the uniform epitaxial thin film material of chemical composition.Rheotaxy is the most sophisticated at present a kind of mercury cadmium telluride thin film growing technology.Rheotaxy has three kinds of growth techniques usually, impregnated rheotaxy, the boat formula of inclining rheotaxy, horizontal push boat type rheotaxy.Wherein, horizontal push boat type liquid phase epitaxial method has advantages such as the growth mother liquid consumption is few, the easy control of component, thereby is widely used.But the tellurium cadmium mercury epitaxial film of water horizontal sliding boat liquid phase epitaxial method growth on the surface of thin-film material, macroscopical texture of rule usually can occur, is referred to as external waviness, sees Fig. 4 a.The breadth wise dimension of external waviness is the millimeter magnitude, vertically height relief surpasses 10 microns usually, and the mean thickness of rheotaxy film is generally 10～20 microns, therefore, the fluctuating yardstick of external waviness is approaching or surpass epitaxy layer thickness, has had a strong impact on the thickness evenness of epitaxial material.See document: B.PELLICIARI, Journal of Crystal Growth 86 (1988) pp146-160 and J CBrice, Semicond.Sci.Technol.2 (1987) pp710-715.In the article of B.PELLICIARI, be referred to as " long-range disturbance ", in the research paper of J C Brice, also observed, and the cause of this defective is summed up as the convection current of the melt of growing owing to the caused material component ununiformity of this defective.
Push away in the boat liquid phase epitaxial method in rich tellurium level, growth mother liquid is proportionally synthetic in advance good Te-Cd-Hg polycrystal, because under growth temperature, the vapour pressure of mercury is higher than the vapour pressure of tellurium, cadmium in the mother liquor, mercury element reduces relatively in the mother liquor thereby cause, and is referred to as the loss of mother liquor mercury.For growth mother liquid being carried out replenishing of mercury loss, need an additional groove at the front side or the rear side of the mother liquor tank of graphite boat, be referred to as mercury source groove.Mercury source groove is used to place tellurium mercury, has passage to communicate between mercury source groove and the mother liquor tank, is used for growth mother liquid is replenished mercury, sees Fig. 1.In the article of B.PELLICIARI, also adopt this graphite boat structure.The temperature of mercury cadmium telluride rheotaxial is generally 450～500 degrees centigrade, and the mercury dividing potential drop in the groove of mercury source will be higher than the mercury dividing potential drop of mother liquor tank, and partial pressure difference causes the gaseous mercury atom to move to mother liquor tank on the one hand.But another disadvantageous aspect is: the convection intensity of molten state mother liquor is relevant with the pressure of liquid level top, if mercury source groove is placed on the back of mother liquor tank, then near epitaxial film near mercury source groove, because mercury dividing potential drop height, convection current is strong, and serious external waviness can appear in the epitaxial film surface of growth.Equally, if mercury source groove is placed on the place ahead of mother liquor tank, then near the position of mercury source groove external waviness can appear in epitaxial film the place ahead.The rheotaxy film of Fig. 4 a, in a side of film, external waviness is very serious, and its reason is exactly that the groove side that is positioned at mother liquor tank in mercury source causes.
Summary of the invention
Based on the problem that exists on the above-mentioned existing graphite boat structure, the objective of the invention is to propose a kind of new graphite boat that level pushes away boat rheotaxy that is used for.This graphite boat can slow down the mercury dividing potential drop convection intensity in the mother liquor, reduces and reduce the ripple on epitaxial material surface.
Graphite boat of the present invention comprises: base plate, slide block, cover plate and base, base plate are fixed on the base, and slide block is put on base plate, but the relative base plate move left and right of slide block.Have on the base plate and epitaxial substrate substrate of a size duct, the substrate duct constitutes substrate groove with base as backing, and substrate groove is built-in with the quartzy pad of regulating substrate and notch height, places substrate on the quartzy pad.Have the mother liquor duct of placing mother liquor on the slide block, the mother liquor duct constitutes mother liquor tank with base plate as backing, and the size of mother liquor tank is slightly less than substrate, is advisable with the peripheral 1mm that leaves substrate.Cover plate covers on slide block, on the cover board face has one to be used to place the mercury source groove of tellurium mercury with the cover plate all-in-one-piece, mercury source groove upper cap has mercury source groove cover plate, each uniformly is embedded with two passages in relative two cell walls of mercury source groove, one end of passage communicates with groove top, mercury source, and the other end connects cover plate, when cover plate covers on slide block, the perforate of passage lower end is just in time dropped in the mother liquor tank, mother liquor tank is communicated with mercury source groove by passage.
Improvements of the present invention mainly are: with the mercury source groove at former the place ahead that places mother liquor tank or rear change into place mother liquor tank directly over, there is passage to communicate between two grooves, the mercury vapour that mercury source groove produces replenishes mercury from the end face of mother liquor tank to mother liquor by passage, the mercury vapour that makes mercury source groove produce is more even to replenishing of mother liquor, thereby the pressure of mother liquor top is more even; Mother liquor tank forward-and-rearward structural similitude impels mother liquor tank temperature field on every side more even simultaneously.
Because the convection current of mother liquor mainly is because the heterogeneity of temperature field and liquid level top the inhomogeneous of pressure cause, advantage of the present invention is: can eliminate the inhomogeneous of pressure and temperature field to the full extent, slow down the mother liquor convection current, thereby reduce the ripple on epitaxial material surface.
Description of drawings
Fig. 1 is without improved graphite boat cross-sectional view.
Fig. 2 is a graphite boat cross-sectional view of the present invention.
Fig. 3 is the cross-sectional view when adopting graphite boat epitaxy of the present invention.
Fig. 4 is the surface topography map of the epitaxial material of growing with two kinds of different graphite boats.Fig. 4 a is a surface topography map of using the epitaxial material of growing without improved graphite boat; Fig. 4 b is the surface topography map of the epitaxial material of growing with graphite boat of the present invention.
Embodiment
Below in conjunction with accompanying drawing the specific embodiment of the present invention is described in further detail:
Graphite boat of the present invention comprises: base plate 6, slide block 5, cover plate 4 and base 10, base plate 6 are fixed on the base 10, and slide block 5 is put on base plate, but the relative base plate move left and right of slide block.Have on the base plate and epitaxial substrate substrate of a size duct, the substrate duct constitutes substrate groove 7 with base as backing, and substrate groove is built-in with the quartzy pad 12 of regulating substrate and notch height, places substrate 13 on the quartzy pad.Have the mother liquor duct of placing mother liquor 8 on the slide block 5, the mother liquor duct will be positioned at the centre of slide block, and purpose is to make mother liquor 8 thermally equivalents.The mother liquor duct constitutes mother liquor tank 1 with base plate as backing, the size of mother liquor tank is slightly less than substrate, be advisable with the peripheral 1mm that leaves substrate, this improvement can prevent better that the mother liquor seepage from entering the slit between substrate and the substrate groove, reaches the purpose of the residual mother liquor of more effective removing.Cover plate 4 covers on slide block 5, and can relative fixed.On the cover board face has one to place the mercury source groove 3 of tellurium mercury 9 with the cover plate all-in-one-piece, mercury source groove upper cap has mercury source groove cover plate 11, each uniformly is embedded with two passages 2 in relative two cell walls of mercury source groove, one end of passage communicates with groove 3 tops, mercury source, the other end connects cover plate, when cover plate covers on slide block, the perforate below the passage is just in time dropped in the mother liquor tank, by passage mother liquor tank is communicated with mercury source groove.Graphite boat of the present invention is all processed by high purity graphite.
In the rheotaxial growth process, synthetic in advance good Te-Cd-Hg saturated solution is that growth mother liquid 8 is put in the mother liquor tank 1, and tellurium zinc cadmium substrate is placed in the substrate groove 7 of graphite base plate 6, and an amount of tellurium mercury powder 9 is placed in the mercury source groove 3.Graphite boat pushes in the growing system, when growing system is heated to growth temperature back balance for some time, slowly cooling then, in temperature-fall period, growth mother liquid 8 crystallization on tellurium zinc cadmium substrate forms mercury cadmium telluride thin film, after film thickness reaches design requirements, graphite slider 5 moves to left with respect to graphite base plate 6, and growth mother liquid 8 is pushed away substrate, finishes process of growth.Prepositioned tellurium mercury powder 9 in the mercury source groove 3, its effect are the mercury losses that dynamically replenishes growth mother liquid 8 in process of growth by passage 2.
Fig. 4 be the epitaxial material of growing with two kinds of different graphite boats surface topography relatively.Use the thin-film material of growing without improved graphite boat shown in Fig. 4 a, can see very serious growth ripple on the surface of film, and the growth ripple is main near a side, Here it is, and the right side of mother liquor tank causes because the mercury source groove among Fig. 1 is positioned at.Fig. 4 b is the photo of the tellurium cadmium mercury epitaxial film of growing with follow-on graphite boat among Fig. 2, though still can see slight external waviness in the drawings, but comparing with Fig. 4 a has had very big improvement, its reason be exactly because the mercury source groove 3 among Fig. 3 be positioned at mother liquor tank 1 directly over, replenish thereby can carry out uniform mercury growth mother liquid.
Adopt the modified version graphite boat of this invention, the contriver has grown the mercury cadmium telluride rheotaxial material that response wave length is 5 microns and 10 microns on area is respectively 20 * 30 and 30 * 40 square millimeters tellurium zinc cadmium substrate, the thickness of material is 10～15 microns, material surface brighting, the surface has only slight ripple, the remained on surface mother liquor is few, and residual mother liquor is positioned at the edge of epitaxial film, and the characteristic dimension of residual mother liquor is less than 3 millimeters.Adopt the thin-film material that is grown, successfully developed 256 * 1 infrared focal plane detector.
Claims (3)
1. a graphite boat that is used to improve the mercury cadmium telluride rheotaxial film surface appearance comprises: base plate (6), slide block (5), cover plate (4) and base (10); Base plate (6) is fixed on the base (10), and slide block (5) is put on base plate (6), but the relative base plate move left and right of slide block; Have on the base plate and epitaxial substrate substrate of a size duct, the substrate duct constitutes substrate groove (7) with base as backing, and substrate groove is built-in with the quartzy pad (12) of regulating substrate and notch height, places substrate (13) on the quartzy pad; Have the mother liquor duct of placing mother liquor (8) on the slide block, the mother liquor duct constitutes mother liquor tank (1) with base plate as backing, and cover plate (4) covers on slide block (5), it is characterized in that:
On the cover board face has one to be used to place the mercury source groove (3) of tellurium mercury (9) with the cover plate all-in-one-piece, mercury source groove upper cap has mercury source groove cover plate (11), each uniform two passage (2) that are embedded with in relative two cell walls of mercury source groove, one end of passage communicates with groove top, mercury source, the other end connects cover plate, when cover plate covers on slide block, the perforate below the passage is just in time dropped in the mother liquor tank, by passage mother liquor tank is communicated with mercury source groove.
2. according to a kind of graphite boat that is used to improve the mercury cadmium telluride rheotaxial film surface appearance of claim 1, it is characterized in that: the size of said mother liquor tank (1) is slightly less than substrate, is advisable with the peripheral 1mm that leaves substrate (13).
3. according to a kind of graphite boat that is used to improve the mercury cadmium telluride rheotaxial film surface appearance of claim 1, it is characterized in that: said mother liquor duct will be positioned at the centre of slide block (5).
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| Application Number | Priority Date | Filing Date | Title |
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| CNB2007100451519A CN100497754C (en) | 2007-08-22 | 2007-08-22 | Graphite boat for improving mercury cadmium telluride rheotaxy membrane surface shape |
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| CNB2007100451519A CN100497754C (en) | 2007-08-22 | 2007-08-22 | Graphite boat for improving mercury cadmium telluride rheotaxy membrane surface shape |
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Cited By (9)
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| CN102181922A (en) * | 2011-03-16 | 2011-09-14 | 中国科学院上海技术物理研究所 | Quartz container used for isothermal crystal vapor phase epitaxy process |
| CN102508079A (en) * | 2011-11-10 | 2012-06-20 | 中国科学院上海技术物理研究所 | Hall sample preparation method removing tellurium-cadmium-mercury interface layer |
| CN102995115A (en) * | 2012-12-27 | 2013-03-27 | 中国电子科技集团公司第十一研究所 | Graphite boat for liquid phase epitaxy growth and liquid phase epitaxy growth method |
| CN105586641A (en) * | 2016-01-12 | 2016-05-18 | 山东大学 | Growing method of methylamine halogenated plumbate compound single-crystal micron chip and growing device |
| CN106637390A (en) * | 2016-12-22 | 2017-05-10 | 中国电子科技集团公司第十研究所 | Graphite boat for epitaxial growth of horizontal liquid phase of mercury cadmium telluride thin film |
| CN107779948A (en) * | 2017-11-30 | 2018-03-09 | 中国电子科技集团公司第四十八研究所 | A kind of graphite boat for horizontal rheotaxial growth |
| CN112064119A (en) * | 2020-09-15 | 2020-12-11 | 北京智创芯源科技有限公司 | Graphite boat and growth system for tellurium-cadmium-mercury thin film material |
| CN113782416A (en) * | 2021-09-13 | 2021-12-10 | 安徽光智科技有限公司 | HgCdTe liquid phase epitaxial growth source substrate, preparation method thereof and HgCdTe liquid phase epitaxial growth method |
| CN114481305A (en) * | 2020-10-26 | 2022-05-13 | 昆明物理研究所 | Horizontal push boat type tellurium-cadmium-mercury liquid phase epitaxy graphite boat capable of automatically taking wafer and method |
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| CN102732952A (en) * | 2012-06-25 | 2012-10-17 | 中国科学院上海技术物理研究所 | Liquid phase epitaxial graphite boat used for growth of ultrathin epitaxial layer |
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| US4470368A (en) * | 1982-03-10 | 1984-09-11 | At&T Bell Laboratories | LPE Apparatus with improved thermal geometry |
| CN2080070U (en) * | 1990-11-05 | 1991-07-03 | 中科院长春物理研究所 | Verticle multi-plate extruding liquid extension graphite boat |
| CN1133761C (en) * | 2001-10-16 | 2004-01-07 | 中国科学院上海技术物理研究所 | Open pipe tellurium cadmium mercury epitaxial material heat treatment method |
| CN1133760C (en) * | 2001-11-07 | 2004-01-07 | 中国科学院上海技术物理研究所 | Graphite boat with mother liquid remover for light-phase epitaxial growth of Te-Cd-Hg film |
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| CN102181922A (en) * | 2011-03-16 | 2011-09-14 | 中国科学院上海技术物理研究所 | Quartz container used for isothermal crystal vapor phase epitaxy process |
| CN102181922B (en) * | 2011-03-16 | 2012-11-14 | 中国科学院上海技术物理研究所 | Quartz container used for isothermal crystal vapor phase epitaxy process |
| CN102508079A (en) * | 2011-11-10 | 2012-06-20 | 中国科学院上海技术物理研究所 | Hall sample preparation method removing tellurium-cadmium-mercury interface layer |
| CN102508079B (en) * | 2011-11-10 | 2014-04-09 | 中国科学院上海技术物理研究所 | Hall sample preparation method removing tellurium-cadmium-mercury interface layer |
| CN102995115A (en) * | 2012-12-27 | 2013-03-27 | 中国电子科技集团公司第十一研究所 | Graphite boat for liquid phase epitaxy growth and liquid phase epitaxy growth method |
| CN102995115B (en) * | 2012-12-27 | 2015-07-29 | 中国电子科技集团公司第十一研究所 | A kind of graphite boat for rheotaxial growth and liquid-phase epitaxial growth process |
| CN105586641A (en) * | 2016-01-12 | 2016-05-18 | 山东大学 | Growing method of methylamine halogenated plumbate compound single-crystal micron chip and growing device |
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| CN106637390A (en) * | 2016-12-22 | 2017-05-10 | 中国电子科技集团公司第十研究所 | Graphite boat for epitaxial growth of horizontal liquid phase of mercury cadmium telluride thin film |
| CN107779948A (en) * | 2017-11-30 | 2018-03-09 | 中国电子科技集团公司第四十八研究所 | A kind of graphite boat for horizontal rheotaxial growth |
| CN112064119A (en) * | 2020-09-15 | 2020-12-11 | 北京智创芯源科技有限公司 | Graphite boat and growth system for tellurium-cadmium-mercury thin film material |
| CN112064119B (en) * | 2020-09-15 | 2021-04-27 | 北京智创芯源科技有限公司 | Graphite boat and growth system for tellurium-cadmium-mercury thin film material |
| CN114481305A (en) * | 2020-10-26 | 2022-05-13 | 昆明物理研究所 | Horizontal push boat type tellurium-cadmium-mercury liquid phase epitaxy graphite boat capable of automatically taking wafer and method |
| CN113782416A (en) * | 2021-09-13 | 2021-12-10 | 安徽光智科技有限公司 | HgCdTe liquid phase epitaxial growth source substrate, preparation method thereof and HgCdTe liquid phase epitaxial growth method |
| CN113782416B (en) * | 2021-09-13 | 2024-03-05 | 安徽光智科技有限公司 | Tellurium-cadmium-mercury liquid phase epitaxial growth source substrate and preparation method thereof, and tellurium-cadmium-mercury liquid phase epitaxial growth method |
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