CN106596069B - A kind of test method of quantum efficiency - Google Patents
A kind of test method of quantum efficiency Download PDFInfo
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- CN106596069B CN106596069B CN201611220983.5A CN201611220983A CN106596069B CN 106596069 B CN106596069 B CN 106596069B CN 201611220983 A CN201611220983 A CN 201611220983A CN 106596069 B CN106596069 B CN 106596069B
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- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
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Abstract
The present invention provides a kind of test method of quantum efficiency, the test method includes: the light inlet setting light source in monochromator；Light power meter is set in the light-emitting window of the monochromator, and the light power meter receives the emergent light of the monochromator completely；Sensor devices to be measured are arranged on gearshift；Wherein, the light power meter obtains the optical power of the setting position in setting position, and is imaged by the emergent light that at the uniform velocity driving institute's displacement apparatus makes the sensor devices to be measured all receive the monochromator within the set time；Gray value of image after obtaining the sensor devices imaging to be measured obtains the quantum efficiency of the sensor devices to be measured according to described image gray value and the optical power.The test method is high to the test result accuracy of the quantum efficiency of sensor devices to be measured.
Description
Technical field
The present invention relates to electronics measurement method and technology fields, more specifically to a kind of test side of quantum efficiency
Method.
Background technique
With the continuous development of science and technology, in Image Acquisition, Hyper spectral Imaging, Particle Image Velocity, fast move mesh
High-resolution, highly sensitive sensor devices, such as ccd sensor, CMOS sensing are required in the application such as target tracking and positioning
Device.In order to meet work requirement, there is very high requirement to quantum efficiency this feature of sensor devices, and to sensor devices
The retest precision of quantum efficiency need to be less than 3%.
The test method of prior art quantum efficiency be integrating sphere measurement method, the integrating sphere measurement method by monochromator from
Light source punishes light and obtains the monochromatic light with certain half-peak breadth, and is incident to integrating sphere, is homogenized and handles by integrating sphere
The optical power apart from a certain position of integrating sphere is obtained to uniform area source, then by light power meter test, by photoreceptor to be measured
Part is placed to the position and is exposed imaging, and the gray value under corresponding light intensity is obtained, by the optical power of the position and the gray value
It brings algorithmic formula into, and then obtains the quantum efficiency of sensor devices to be measured at different wavelengths.
But since the shooting angle of integrating sphere emergent light is very big, and light intensity can successively decrease with the growth of distance, in order to
The light energy for improving integrating sphere emergent light, needs to make the half-peak breadth of monochromator emergent light to increase, and then lead to measuring resolution very
Low, test error is big.Also, the test position of the test position of light power meter and sensor devices to be measured during the test, by
In by manually put can there is a certain error, make it is big to sensor devices reperformance test resultant error to be measured, and due to depositing
Also test result error can be made big in the influence of human factor.
Summary of the invention
To solve the above problems, the test method can solve the present invention provides a kind of test method of quantum efficiency
The test result accuracy of problems of the prior art, sensor devices quantum efficiency is high.
To achieve the above object, the invention provides the following technical scheme:
A kind of test method of quantum efficiency, for testing the quantum efficiency of sensor devices, the test method includes:
In the light inlet of monochromator, light source is set；
Light power meter is set in the light-emitting window of the monochromator, and the light power meter receives going out for the monochromator completely
Penetrate light；
Sensor devices to be measured are arranged on gearshift；
Wherein, the light power meter obtains the optical power of the setting position in setting position, and drives the displacement dress
The emergent light that set makes the sensor devices to be measured all receive the monochromator within the set time is imaged；
Gray value of image after obtaining the sensor devices imaging to be measured, according to described image gray value and the smooth function
Rate obtains the quantum efficiency of the sensor devices to be measured.
Preferably, in above-mentioned test method, the light source, the monochromator, the light power meter and displacement dress
It installs on air vibration-isolating platform device.
Preferably, in above-mentioned test method, driving institute displacement apparatus makes the sense to be measured within the set time
The emergent light that optical device all receives the monochromator carries out imaging
Within the set time, by the uniform velocity driving institute's displacement apparatus that the sensor devices to be measured is made all to receive the list
The emergent light of color instrument, is imaged.
Preferably, in above-mentioned test method, the light source is shore pine deuterium lamp source or all halogen tungsten lamp sources of match.
Preferably, in above-mentioned test method, the monochromator is Newport CornerstoneTM260 monochromator.
Preferably, in above-mentioned test method, the light power meter is Newport 1936-R light power meter.
Preferably, in above-mentioned test method, institute's displacement apparatus is Newport UTS100CC gearshift.
As can be seen from the above description, a kind of test method of quantum efficiency provided by the invention, the test method include:
In the light inlet of monochromator, light source is set；Light power meter is set in the light-emitting window of the monochromator, and the light power meter is complete
Receive the emergent light of the monochromator；Sensor devices to be measured are arranged on gearshift；Wherein, the light power meter is in setting position
The optical power for obtaining the setting position is set, and the sense to be measured is made by the uniform velocity driving institute's displacement apparatus within the set time
The emergent light that optical device all receives the monochromator is imaged；Image grayscale after obtaining the sensor devices imaging to be measured
Value obtains the quantum efficiency of the sensor devices to be measured according to described image gray value and the optical power.
Compare the prior art, and in a kind of test method of quantum efficiency provided by the invention, light power meter can be complete
The full emergent light for receiving monochromator, and sensor devices to be measured are connect also completely by drive displacement device
Receive the emergent light of monochromator, that is to say, that be to be measured the emergent light of monochromator whole, i.e., to list in the present invention
The gross energy of the emergent light of color instrument whole is measured.The test method is very low to the light energy requirement of monochromator emergent light,
The emergent light that stronger energy is obtained without the half-peak breadth by increasing monochromator emergent light, then can obtain the list of half-peak breadth very little
Coloured light, and then measuring resolution is improved, keep test result more accurate.Also, in entire test process, the survey of light power meter
Examination position and the position of sensor devices to be measured there is no and influence each other, and then improve to sensor devices reperformance test to be measured
As a result, test result accuracy is high.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this
The embodiment of invention for those of ordinary skill in the art without creative efforts, can also basis
The attached drawing of offer obtains other attached drawings.
Fig. 1 is a kind of schematic illustration of the test method of quantum efficiency provided in an embodiment of the present invention.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
According to background technique it is found that being in the prior art integrating sphere measurement to the test method of sensor devices quantum efficiency
Method, and the integrating sphere measurement method is since the shooting angle of integrating sphere emergent light is very big, and light intensity can be passed with the growth of distance
Subtract, in order to improve the light energy of integrating sphere emergent light, need to make the half-peak breadth of monochromator emergent light to increase, and then leads to test point
Resolution is very low, and test error is big.Also, the test position of the test position of light power meter and sensor devices to be measured during the test
Set, due to by manually put can there is a certain error, make it is big to sensor devices reperformance test resultant error to be measured, and by
In there are the influences of human factor also test result error can be made big.
In order to solve the problems in the existing technology, the embodiment of the invention provides a kind of test sides of quantum efficiency
Method, the test method include:
In the light inlet of monochromator, light source is set；
Light power meter is set in the light-emitting window of the monochromator, and the light power meter receives going out for the monochromator completely
Penetrate light；
Sensor devices to be measured are arranged on gearshift；
Wherein, the light power meter obtains the optical power of the setting position in setting position, and drives the displacement dress
The emergent light that set makes the sensor devices to be measured all receive the monochromator within the set time is imaged；
Gray value of image after obtaining the sensor devices imaging to be measured, according to described image gray value and the smooth function
Rate obtains the quantum efficiency of the sensor devices to be measured.
As can be seen from the above description, in a kind of test method of quantum efficiency provided by the invention, light power meter can be with
The emergent light of monochromator is received completely, and makes sensor devices to be measured also complete within the set time by drive displacement device
Pair the emergent light of monochromator is received, that is to say, that in the present invention, measured the emergent light of monochromator whole, i.e.,
The gross energy of the emergent light of monochromator whole is measured.The test method requires very the light energy of monochromator emergent light
It is low, the emergent light of stronger energy is obtained without the half-peak breadth by increasing monochromator emergent light, then can obtain half-peak breadth very little
Monochromatic light, and then improve measuring resolution, keep test result more accurate.Also, in entire test process, light power meter
Test position and the positions of sensor devices to be measured there is no and influence each other, and then improve to sensor devices repeatability to be measured
Test result, test result accuracy are high.
In order to which further the embodiment of the present invention is explained, the embodiment of the present invention is carried out with reference to the accompanying drawing
Detailed description.
With reference to Fig. 1, Fig. 1 is a kind of schematic illustration of the test method of quantum efficiency provided in an embodiment of the present invention.Institute
Stating test method includes:
In the light inlet of monochromator 12, light source 11 is set.
Wherein, the light source 11 is used to provide incident light for the monochromator 12, and be placed on the monochromator 12 enters light
At mouthful, optionally, in embodiments of the present invention, the light source 11 includes but is not limited to shore pine deuterium lamp source, matches all halogen tungsten lamp sources
Deng.
The monochromator 12 is used to carry out light-splitting processing to incident light, obtains the monochromatic light with certain half-peak breadth, at this
In inventive embodiments, the monochromator 12 includes but is not limited to Newport CornerstoneTM260 monochromator.
Further, light power meter 13 is set in the light-emitting window of the monochromator 12, and the light power meter 13 connects completely
Receive the emergent light of the monochromator 12.
That is, the installation site of the light power meter 13 need to meet the light power meter 13 receives the monochrome completely
The emergent light of instrument 12 measures the whole emergent light of the monochromator 12, i.e., to the whole emergent lights of the monochromator 12
Gross energy measures, and in embodiments of the present invention, the light power meter 13 includes but is not limited to Newport 1936-R light
Power meter.
It is very high to the light energy requirement of monochromator emergent light in the prior art, it need to pass through and increase the half of monochromator emergent light
Peak width obtains the emergent light of stronger energy, but the half-peak breadth by increasing monochromator emergent light will lead to measuring resolution drop
It is low, and then test result is inaccurate.And the present invention is equipped with certain requirement to the installation position of the light power meter 13, can make institute
The emergent light that light power meter 13 receives the monochromator 12 completely is stated, the whole emergent lights of the monochromator 12 are measured, into
And it is very low to can be found that test method provided in an embodiment of the present invention requires the light energy of the emergent light of the monochromator 12, then
The monochromatic light that half-peak breadth very little can be obtained by light splitting, improves measuring resolution, keeps test result more accurate.
Further, sensor devices 14 to be measured are arranged on gearshift 15.
Wherein, sensor devices 14 to be measured are arranged on gearshift 15, by driving institute's displacement apparatus 15 that can make
The sensor devices to be measured 14 are displaced, and institute's displacement apparatus 15 uses high-precision gearshift, can increase test knot
The accuracy of fruit, in embodiments of the present invention, optionally, institute's displacement apparatus includes but is not limited to Newport UTS100CC
Gearshift.
After whole devices are all in accordance with requiring to be installed, the light power meter 13 obtains the setting position in setting position
The optical power set, that is to say, that the light power meter 13 measures the optical power of the whole emergent lights of the monochromator 12.And driving institute
The emergent light that displacement apparatus 15 makes the sensor devices to be measured 14 all receive the monochromator 12 within the set time carries out
Imaging, that is to say, that by controlling institute's displacement apparatus 15, at the uniform velocity driving institute's displacement apparatus 15 makes described within the set time
The whole emergent light of the monochromator 12 is imaged in sensor devices 14 to be measured.
Finally, the gray value of image after the sensor devices 14 to be measured are imaged is obtained, according to described image gray value and institute
Optical power is stated, the quantum efficiency of the sensor devices 14 to be measured is obtained.
It should be noted that light source described above, the light power meter, institute's displacement apparatus and monochromator setting exist
On air vibration-isolating platform device, the air vibration-isolating platform device is used to maintain the stabilization of optical path, improves the accurate of test result
Degree, and the light source, the light power meter, institute's displacement apparatus and the monochromator can be controlled by host computer,
Also the accuracy of test result is further improved.
As can be seen from the above description, the test method of a kind of quantum efficiency provided by the invention, the test method is by making
Light power meter receives the emergent light of monochromator completely, and makes photoreceptor to be measured within the set time by drive displacement device
Part also receives the emergent light of monochromator completely, that is to say, that in the present invention, is surveyed to the emergent light of monochromator whole
Amount, i.e., measure the gross energy of the emergent light of monochromator whole.Light energy of the test method to monochromator emergent light
It is required that it is very low, the emergent light of stronger energy is obtained without the half-peak breadth by increasing monochromator emergent light, then can obtain half-peak
The monochromatic light of wide very little, and then measuring resolution is improved, keep test result more accurate.Also, in entire test process, light
The position of the test position of power meter and sensor devices to be measured, which there is no, to influence each other, and then improves to sensor devices to be measured
Reperformance test is as a result, test result accuracy is high.
The foregoing description of the disclosed embodiments enables those skilled in the art to implement or use the present invention.
Various modifications to these embodiments will be readily apparent to those skilled in the art, as defined herein
General Principle can be realized in other embodiments without departing from the spirit or scope of the present invention.Therefore, of the invention
It is not intended to be limited to the embodiments shown herein, and is to fit to and the principles and novel features disclosed herein phase one
The widest scope of cause.
Claims (7)
1. a kind of test method of quantum efficiency, for testing the quantum efficiency of sensor devices, which is characterized in that the test side
Method includes:
In the light inlet of monochromator, light source is set；
Light power meter is set in the light-emitting window of the monochromator, and the light power meter receives the outgoing of the monochromator completely
Light；
Sensor devices to be measured are arranged on gearshift；
Wherein, the light power meter obtains the optical power of the setting position in setting position, and institute's displacement apparatus is driven to exist
The emergent light for making the sensor devices to be measured all receive the monochromator in setting time is imaged, to the monochromator
The gross energy of whole emergent lights measures；
Gray value of image after obtaining the sensor devices imaging to be measured is obtained according to described image gray value and the optical power
Obtain the quantum efficiency of the sensor devices to be measured.
2. test method according to claim 1, which is characterized in that the light source, the monochromator, the light power meter
And institute's displacement apparatus is arranged on air vibration-isolating platform device.
3. test method according to claim 1, which is characterized in that driving institute displacement apparatus is within the set time
The emergent light for making the sensor devices whole to be measured receive the monochromator carries out imaging and includes:
Within the set time, by the uniform velocity driving institute's displacement apparatus that the sensor devices to be measured is made all to receive the monochromator
Emergent light, be imaged.
4. test method according to claim 1, which is characterized in that the light source is shore pine deuterium lamp source or all tungsten halogen lamps of match
Source.
5. test method according to claim 1, which is characterized in that the monochromator is Newport
CornerstoneTM260 monochromators.
6. test method according to claim 1, which is characterized in that the light power meter is Newport 1936-R light function
Rate meter.
7. test method according to claim 1, which is characterized in that institute's displacement apparatus is Newport UTS100CC
Moving device.
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| CN101398453B (en) * | 2007-09-26 | 2010-12-22 | 中国科学院半导体研究所 | Single light path quantum efficiency test system |
| AU2010249578B2 (en) * | 2009-05-19 | 2014-09-04 | Newport Corporation | Quantum efficiency measurement system and methods of use |
| CN101881807A (en) * | 2010-06-28 | 2010-11-10 | 常州亿晶光电科技有限公司 | Alternating-current measuring device for quantum efficiency of solar cell |
| KR101194349B1 (en) * | 2011-01-12 | 2012-10-25 | 한국과학기술원 | Method for extracting internal quantum efficiency and recombination rates of optical device |
| CN202837489U (en) * | 2012-10-09 | 2013-03-27 | 苏州阿特斯阳光电力科技有限公司 | Back contact solar cell quantum efficiency detecting system |
| CN103257037A (en) * | 2013-06-05 | 2013-08-21 | 上海理工大学 | General test system for broadband silicon substrate detector spectral response |
| CN104142226B (en) * | 2014-08-12 | 2017-02-01 | 中国电子科技集团公司第四十一研究所 | CCD device quantum efficiency measuring device and method |
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