CN109323760A - Ultraviolet radiation comprehensive test device - Google Patents

Ultraviolet radiation comprehensive test device Download PDF

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Publication number
CN109323760A
CN109323760A CN201710675148.9A CN201710675148A CN109323760A CN 109323760 A CN109323760 A CN 109323760A CN 201710675148 A CN201710675148 A CN 201710675148A CN 109323760 A CN109323760 A CN 109323760A
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ultraviolet
lamp
standard
tested
detector
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吴辉
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Individual
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00Photometry, e.g. photographic exposure meter
    • G01J1/02Details
    • G01J1/04Optical or mechanical part supplementary adjustable parts
    • G01J1/0407Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings
    • G01J1/0437Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings using masks, aperture plates, spatial light modulators, spatial filters, e.g. reflective filters
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00Photometry, e.g. photographic exposure meter
    • G01J1/02Details
    • G01J1/04Optical or mechanical part supplementary adjustable parts
    • G01J1/0407Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings
    • G01J1/044Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings using shutters
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00Photometry, e.g. photographic exposure meter
    • G01J1/02Details
    • G01J1/08Arrangements of light sources specially adapted for photometry standard sources, also using luminescent or radioactive material
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00Photometry, e.g. photographic exposure meter
    • G01J1/10Photometry, e.g. photographic exposure meter by comparison with reference light or electric value provisionally void
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00Photometry, e.g. photographic exposure meter
    • G01J1/42Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G01J1/429Photometry, e.g. photographic exposure meter using electric radiation detectors applied to measurement of ultraviolet light
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/0205Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0229Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using masks, aperture plates, spatial light modulators or spatial filters, e.g. reflective filters
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/0205Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0232Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using shutters
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/10Arrangements of light sources specially adapted for spectrometry or colorimetry
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J2003/283Investigating the spectrum computer-interfaced

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)

Abstract

The invention discloses a kind of ultraviolet radiation comprehensive test devices, belong to optic test and metering field.The device is on the basis of existing spectral responsivity test device, simplify fore optics system, the uv radiation intensity standard lamp for increasing integrating sphere and being mounted on the second mobile platform, and integrating sphere and electronic shutter correspondence are integrated on first movement platform and filtering assembly equipped with ultraviolet spoke luminance standard lamp;First movement platform is consistent with equipped with the third mobile platform direction of ultraviolet standard detector, and vertical with the second mobile platform;Under the control of data processing system, each standard lamp or standard detector and tested lamp or tested detector are cut in optical path respectively, to realize the measurement and calibration of ultraviolet spectra radiance, spectral irradiance and spectral responsivity.The present invention solves the problems, such as resource-sharing in ultraviolet radioactive measurement, save the cost, and has the characteristics that easy to operate, measurement accuracy is high.

Description

Ultraviolet radiation comprehensive test device
The invention belongs to optical testing art, relates generally to a kind of ultraviolet radioactive test device more particularly to one kind can Measure the comprehensive survey of ultraviolet radioactive of three ultraviolet spectra radiance, ultraviolet spectra radiant illumination and ultraviolet spectra responsiveness parameters Trial assembly is set.
Ultraviolet spectra radiance, ultraviolet spectra radiant illumination and ultraviolet spectra responsiveness are ultraviolet radioactive testing fields Three basic parameters generally use following method and test respectively above-mentioned parameter.
(1) ultraviolet spectra radiance test device
The test of ultraviolet spectra radiance is completed generally in such a way that standard lamp is compared to each other with tested lamp.It is surveyed Test system is as shown in Figure 1, being mainly tested lamp 3 by ultraviolet spoke luminance standard lamp 2, ultraviolet spoke brightness, one-dimensional movement platform 1, containing The fore optics system of two pieces of plane mirrors 5 and the first spherical mirror 6, electronic shutter 7, filtering assembly 8, chopper 9, purple Outer monochromator 10, the optic system for outputting containing two pieces of plane mirrors 11 and the second spherical mirror 6 ', ultraviolet detector 12 And the composition such as data processing system, ultraviolet spoke luminance standard lamp 2 and ultraviolet spoke brightness are tested the optical signal that lamp 3 issues and pass through input After optical system, ultraviolet monochromatic instrument 10, survey is provided after being handled respectively by ultraviolet detector acquisition signal via data processing system Measure result.
The advantages of device is that test is simple, easy to operate, it is only necessary to replace ultraviolet spoke luminance standard lamp 2 and ultraviolet spoke is bright Tested lamp 3 is spent, however, increasing the decaying of ultraviolet signal due to having used two pieces of reflecting mirrors 5 in its fore optics system Greatly, signal-to-noise ratio is caused to reduce;In addition, installing electronic shutter 7 and filtering assembly 8 due to needing enough spaces, it is necessary to lengthen The focal length of fore optics system reduces measurement accuracy to further increase the decaying of ultraviolet optics system.Currently, purple The uncertainty of measurement of external spectrum radiance test device is 15%.
(2) ultraviolet spectra radiant illumination test device
The test of ultraviolet spectra radiant illumination is generally also completed in such a way that standard lamp is compared to each other with tested lamp.Its Test macro is as shown in Fig. 2, be mainly tested lamp 15, integrating sphere 16, one-dimensional shifting by uv radiation intensity standard lamp 14, uv radiation intensity It is moving platform 13, ultraviolet monochromatic instrument, the optic system for outputting containing two pieces of plane mirrors 11 and the second spherical mirror 6 ', ultraviolet The composition such as composition datas processing system such as detector 12 and data processing system, uv radiation intensity standard lamp and uv radiation intensity quilt The optical signal of lamp sending is surveyed after integrating sphere 16, ultraviolet monochromatic instrument 10, signal is acquired again by counting by ultraviolet detector 12 respectively Measurement result is provided after handling according to processing system.
The advantages of device is no optical imaging system, and test is simple, and signal-to-noise ratio is high, the disadvantage is that since integrating sphere 16 is straight It connects to ultraviolet monochromatic instrument 10, there is no stray light shielding harness, thus stray light enters measuring system, interference measurement results, makes to survey Accuracy of measurement reduces.Currently, the uncertainty of measurement of ultraviolet spectra radiant illumination test device is 18%.
(3) ultraviolet spectra responsiveness test device
The test of ultraviolet spectra responsiveness is generally in such a way that standard detector is compared to each other with tested detector come complete At.Its test macro as shown in figure 3, mainly by ultraviolet spoke luminance standard lamp 2, contain two pieces of plane mirrors 5 and spherical surface optically focused The fore optics system of mirror 6, filtering assembly 8, chopper 9, ultraviolet monochromatic instrument 10, contains two pieces of plane mirrors at electronic shutter 7 11 and second optic system for outputting of spherical mirror 6 ', ultraviolet standard detector 12, ultraviolet tested detector 17, one-dimensional movement The composition such as platform 18 and data processing system.When the optical signal that ultraviolet spoke luminance standard lamp issues passes through fore optics system, purple After outer monochromator 10 and optic system for outputting, data are carried out by ultraviolet standard detector 12 and ultraviolet tested detector 17 respectively and are adopted Collection, provides measurement result after handling via data processing system.
The advantages of this method and disadvantage are similar with ultraviolet spectra radiance, and test is simple, easy to operate, it is only necessary to replace Ultraviolet standard detector and ultraviolet tested detector, the disadvantage is that due to output and input optical system used two pieces it is anti- Mirror is penetrated, the decaying of ultraviolet signal is increased, signal-to-noise ratio is reduced;Electronic shutter is installed additionally, due to enough spaces are needed 7 and filtering assembly 8, it is necessary to lengthen the focal length of fore optics system, to increase the decaying of ultraviolet optics system, make measurement essence Degree reduces, and the uncertainty of measurement of ultraviolet spectra responsiveness test device is 15% at present.
The test that can be seen that three parameters from above three test device has the part of general character: i.e. ultraviolet standard light Source, ultraviolet monochromatic instrument, optic system for outputting, ultraviolet standard detector and data processing system etc., if being to complete using unit Above three parameter measurement and establish three corresponding independent test devices simultaneously, need costly man power and material.
Summary of the invention
The technical problem to be solved by the present invention is to, in order to realize resource-sharing and the high-precision ultraviolet radioactive parameter amount of splashing, Organic integration is carried out to three test macros in prior art, is surveyed to provide one kind and can complete three kinds of parameters of ultraviolet radioactive The ultraviolet radiation comprehensive test device of examination.
In order to solve the above technical problems, ultraviolet radiation comprehensive test device provided by the invention includes light source assembly, input Optical system, multi-functional filtering assembly, chopper, ultraviolet monochromatic instrument, optic system for outputting, ultraviolet detection device assembly, at data Reason system, fore optics system, multi-functional filtering assembly, chopper, ultraviolet monochromatic instrument and optic system for outputting are arranged successively structure At optical path;The light source assembly contains ultraviolet spoke luminance standard lamp, He-Ne laser, uv radiation intensity standard lamp, first The mutual integrating sphere in 90 ° of mobile platform, the second mobile platform, input and output port, ultraviolet spoke luminance standard lamp and integrating sphere It is mounted on first movement platform by the first optical bracket, it is also tested there are ultraviolet spoke brightness is installed on the first optical bracket The hole location of lamp, He-Ne laser;Uv radiation intensity standard lamp is mounted on the second mobile platform by the second optical bracket, the Also there are the hole locations that installation uv radiation intensity is tested lamp and He-Ne laser on two optical brackets;First movement platform and second The direction of motion of mobile platform is vertical;First movement platform moves under the control of the data processing system, and described in drive The output port of He-Ne laser or ultraviolet spoke luminance standard lamp or the tested lamp of ultraviolet spoke brightness or integrating sphere sequentially enters described The input terminal of optical path, the second mobile platform move under the control of the data processing system, and drive the ultraviolet spoke Lighting standard lamp or uv radiation intensity are tested lamp or He-Ne laser is successively directed at the input port of integrating sphere;The input light System is the imaging system being made of spherical reflector and plane mirror, and incident beam is successively through spherical reflector and plane It is emitted after the reflection of reflecting mirror;It is different that the multi-functional filtering assembly contains runner, support frame, electronic shutter, multiple wave bands Optical filter and stepper motor, electronic shutter and multiple optical filters are arranged on a circumference of runner disk and the center of the circumference The axis hole being connected with stepping motor rotating shaft is set, and runner is installed on the support frame and driving each filter under the driving of stepper motor Mating plate or electronic shutter are cut into respectively in the optical path;The ultraviolet detection device assembly include ultraviolet standard detector, Ultraviolet tested detector and third mobile platform, ultraviolet standard detector and ultraviolet tested detector are pacified by third optical bracket On third mobile platform, wherein also there are the hole location of installation He-Ne laser on third optical bracket, third is mobile flat The direction of motion of platform is parallel with the direction of motion of first movement platform, control of the third mobile platform in the data processing system Lower movement, and ultraviolet standard detector or ultraviolet tested detector or He-Ne laser is driven to enter the output end of optical path; Positioned at optical path input terminal and as the ultraviolet spoke luminance standard lamp or He-Ne laser of standard sources or as tested The ultraviolet spoke brightness of light source is tested lamp or uv radiation intensity is tested after light beam that lamp is launched is direct or integrated ball integral successively The entrance slit of the ultraviolet monochromatic instrument is imaged on after the fore optics system, multi-functional filtering assembly and chopper, it is purple The light beam of outer monochromator outgoing is imaged on ultraviolet standard detector and ultraviolet tested detector wherein through the optic system for outputting On one photosurface, and the detector converts optical signals into after electric signal and is sent into the data processing system;The number It include the lock-in amplifier being used cooperatively with the chopper, the meter equipped with data collecting card and Survey Software packet according to processing system Calculation machine, Survey Software packet are divided into parameter setting module, control module, ultraviolet radioactive brightness measurement module, ultraviolet spectra radiation photograph Spend measurement module and ultraviolet spectra responsiveness measurement module;The function of parameter setting module is to select to survey by computer screen Amount type and the measurement of correlation parameter that the ultraviolet monochromatic instrument, multi-functional filtering assembly are set according to selected measurement type, The function of control module is the wavelength control according to the measurement of correlation parameter being arranged in parameter setting module, to the ultraviolet monochromatic instrument Device processed sends control instruction, makes ultraviolet monochromatic instrument according to the parameter setting work parameter of selection;Meanwhile to the filtering assembly Stepper motor issues driving instruction, enters the optical filter of corresponding wave band in optical path;In addition, after being connected to measuring command, Call a kind of corresponding amount of splashing module according to the measurement type being arranged in parameter setting module complete measurement in data acquisition, Processing and calculating task, and provide measurement result.
Technical effect of the invention is embodied in the following aspects:
1) present invention collection three kinds of ultraviolet spectra radiance, ultraviolet spectra radiant illumination and ultraviolet spectra responsiveness measurement function It can be integrated, meanwhile, function, which is measured, for three kinds is equipped with the three kinds of standard utensils for belonging to regular inspection and calibrating, i.e. spectrum Radiance standard lamp, ultraviolet spectra radiant illuminance standard lamp and ultraviolet standard detector, therefore, the present invention and prior art phase Than having the characteristics of resource-sharing, save the cost;And measurement result can be mutually authenticated in three kinds of standard utensils, make the present invention With high measurement accuracy.
2) in the present invention, the imaging that fore optics system selects a spherical reflector and a plane mirror to constitute System reduces a plane mirror, declines to reduce optical imaging system to UV signal compared with prior art Subtract, improves the signal-to-noise ratio in measurement.
3) compared with prior art, electronic shutter is integrated on filtering assembly by the present invention, has not only saved installation space, And the length of optical path is shortened, to reduce decaying of the atmosphere to UV signal, the signal-to-noise ratio improved in measurement is made that Contribution.
4) it by analysis and calculates, the spectral radiance measurement in ultraviolet radiation comprehensive test device of the present invention is uncertain Degree reaches 7%, and ultraviolet spectra irradiance measurement uncertainty reaches 7%, and ultraviolet spectra responsiveness uncertainty of measurement reaches 6%, the measurement accuracy of the three analytical measurement devices of the measurement accuracy that three measurement functions are realized than in the prior art improves 1.2 times or more.
Detailed description of the invention
Fig. 1 is existing ultraviolet spectra radiance test device composition schematic diagram.
Fig. 2 is existing ultraviolet spectra radiant illumination test device composition schematic diagram.
Fig. 3 is existing ultraviolet spectra responsiveness test device composition schematic diagram.
Fig. 4 is ultraviolet radiation comprehensive test device composition schematic diagram of the present invention.
Fig. 5 is multi-functional filtering assembly composition schematic diagram shown in Fig. 4.
Fig. 6 is the work flow diagram of data processing system shown in Fig. 4.
Specific embodiment
With reference to the accompanying drawing and preferred embodiment the present invention is described in further detail.
According to Fig.4, ultraviolet radiation comprehensive test device preferred embodiment of the present invention includes light source assembly, input optics System, multi-functional filtering assembly 8, chopper 9, ultraviolet monochromatic instrument, optic system for outputting, ultraviolet detection device assembly, data processing System can complete the multi-parameters test of ultraviolet spectra radiance, ultraviolet spectra radiant illumination and ultraviolet spectra responsiveness.
Chopper 9, ultraviolet monochromatic instrument and optic system for outputting are the prior art.Ultraviolet monochromatic instrument 10 contains wavelength control Device, ultraviolet monochromatic instrument 10 is in the optical path between multi-functional filtering assembly 6 and optic system for outputting.Chopper 9 contains modulation Disk and motor, the blade of chopper wheel are inserted in the optical path between fore optics system and multi-functional filtering assembly 8 and drive in electric shock Dynamic lower rotation, effect are to be modulated to optical signal, and the locking phase that the optical signal of modulation is sent into data processing system is put Big device.Optic system for outputting is made of two pieces of plane mirrors 11 and the second spherical mirror 6 '.
Light source assembly contains ultraviolet spoke luminance standard lamp 2, He-Ne laser 4, uv radiation intensity standard lamp 14, first and moves Moving platform 1, the second mobile platform 13, integrating sphere 16.Ultraviolet spoke luminance standard lamp 2 selects the 30W xenon of U.S. CrownTech company Lamp, uv radiation intensity standard lamp 14 select the 150W deuterium lamp of U.S. CrownTech company, and the first, second mobile platform 1,13 is For motion in one dimension platform in the prior art.Integrating sphere 16 is General integral ball.He-Ne laser 4 is for carrying out testing preceding tune The optical path of whole standard sources and measured light.Ultraviolet spoke luminance standard lamp 2 and integrating sphere 16 are mounted on by the first optical bracket On first movement platform 1, also there are the hole locations for installing the tested lamp 3 of ultraviolet spoke brightness, He-Ne laser 4 on the first optical bracket; Uv radiation intensity standard lamp 14 is mounted on the second mobile platform 13 by the second optical bracket, on the second optical bracket also there are The hole location that uv radiation intensity is tested lamp 15 and He-Ne laser 4 is installed;Ultraviolet spoke luminance standard lamp 2, ultraviolet spoke brightness are tested lamp 3, after uv radiation intensity standard lamp 14, uv radiation intensity lamp 15 and He-Ne laser 4 are installed in place, optical axis is respectively positioned on same In horizontal plane.The direction of motion of first movement platform 1 and the second mobile platform 13 is vertical, one-dimensional with first movement platform 1 Movement, the He-Ne laser 4 being mounted on the first optical bracket, ultraviolet spoke luminance standard lamp 2, ultraviolet spoke brightness are tested 3 and of lamp The output port of integrating sphere 16 is successively directed at fore optics system;With the motion in one dimension of the second mobile platform 13, it is mounted on Uv radiation intensity standard lamp 14, uv radiation intensity on two optical brackets are tested lamp 15 and He-Ne laser 4 successively to quasi-integral The input port of ball 16.
Fore optics system includes spherical reflector 6 and plane mirror 5.Positioned at the standard sources of optical path starting point Or the light beam successively reflection through spherical reflector 6 and plane mirror 5 of the light beam launched of measured light or integrating sphere output It is imaged on the entrance slit of beam splitting system 10 afterwards.
According to Fig.5, multi-functional filtering assembly 8 contains runner, support frame, stepper motor, electronic shutter 7 and one group of filter Mating plate.In the preferred embodiment, altogether there are three optical filter, optical filtering wave band is respectively 180~300nm, 300~500nm, 500~900nm.Roller centre with axis hole and with uniformly installed on axis hole concentric circles electronics determine door 7 and three filter Mating plate.Trunnion axis is had on support frame, the trunnion axis on the axis hole and support frame of runner is connected by bearing.Runner is in stepping electricity Under the driving of machine each optical filter or electronic shutter 7 can be cut into optical path respectively, when one of optical filter enters In optical path, can the imaging beam to imaging optical system carry out the optical filtering of corresponding wave band and filter corresponding multistage spectrum Line, when electronic shutter 7 enters in optical path, the closing function deduction for passing through electronic shutter 7 measures background.
Ultraviolet detection device assembly includes ultraviolet standard detector 12, ultraviolet tested detector 17 and third mobile platform 18, What ultraviolet standard detector was selected is the UV-100 silicon photoelectric diode of CrownTech company of the U.S..Ultraviolet standard detector 12 It is mounted on third mobile platform 18 with ultraviolet tested detector 17 by third optical bracket, wherein on third optical bracket Also there are the hole locations of installation He-Ne laser 4.Ultraviolet standard detector 12, ultraviolet tested detector 17 and He-Ne laser 4 After being installed in place, each optical axis is respectively positioned in same level.The direction of motion of third mobile platform 18 and first movement platform 1 The direction of motion is parallel, and with the motion in one dimension of third mobile platform 18, the ultraviolet standard being mounted on third optical bracket is detected Device 12, ultraviolet tested detector 17 or He-Ne laser can respectively enter the output end of optical path, i.e., the light of each detector Quick face is located in the image planes of optic system for outputting.
Data processing system mainly includes lock-in amplifier, the computer equipped with data collecting card and Survey Software packet.Lock Phase amplifier is used for and chopper 9 is used cooperatively, to improve the signal-to-noise ratio in measurement.Survey Software packet is divided into parameter setting mould Block, control module, ultraviolet radioactive brightness measurement module, ultraviolet spectra irradiance measurement module and the measurement of ultraviolet spectra responsiveness Module, main work flow is referring to Fig. 6.
The function of parameter setting module is to select measurement type by computer screen and according to selected measurement type The measurement of correlation parameter of ultraviolet monochromatic instrument, multi-functional filtering assembly 8 is set, and measurement of correlation parameter includes the wave of ultraviolet monochromatic instrument 10 Long range, wavelength interval and sampling number, the optical filter of the corresponding wave band of multi-functional filtering assembly 8.Wave-length coverage is to pass through selection Any integer in two pull-down choice boxs of initial wavelength and cutoff wavelength limits.Due to light source, initial wavelength one As be set as 180nm or more, cutoff wavelength is generally set to 450nm or less.One is keyed in Option Box as needed in wavelength interval Integer.
The function of control module is according to the measurement of correlation parameter being arranged in parameter setting module, to ultraviolet monochromatic instrument 10 Wavelength control unit sends control instruction, makes it according to the parameter setting work parameter selected in parameter setting module;Simultaneously to more The stepper motor of function filtering assembly 8 issues driving instruction, enters the optical filter of corresponding wave band in optical path;In addition, working as After being connected to measuring command, corresponding measurement module is called according to the measurement type being arranged in parameter setting module.Ultraviolet radioactive is bright Measurement module, ultraviolet spectra irradiance measurement module and ultraviolet spectra responsiveness measurement module are spent for executing three ginsengs respectively Several measurements.The structure and function of three modules is almost the same, except that three measurement modules are in calculated result parameter What correspondence was called in is the radiance of standard lamp and the spectral responsivity data of radiant illumination and standard detector.Three measurements Module by command function, mobile platform control, acquisition calculate, as the result is shown, storage output five units constitute.Command function Unit includes " starting to test ", " stopping test ", " exiting " and " printing " button.The function of mobile platform control unit is root It is mobile in place according to the corresponding first movement platform of timing control or the second mobile platform or third mobile platform, make standard lamp 2 or 14, lamp 3 or 15, integrating sphere 16, detector 12 or 17 are tested and enters the corresponding position in optical path.
The function of acquisition computation subunit is to acquire corresponding measurement data according to timing control capture card, i.e., set (or the ultraviolet spectra irradiation of ultraviolet spectra spoke luminance standard lamp 2 under each wavelength is recorded with set wavelength interval in wave-length coverage Spend standard lamp 14 or standard detector 12) and ultraviolet spectra spoke brightness be tested lamp 14 (or the tested lamp 15 of ultraviolet spectra spoke brightness or Tested detector 17) corresponding measurement voltage value, and corresponding measurement parameter can be calculated separately according to following three formula:
(1) in formula, Lλ is tested lampTo be tested spectral radiance value of the lamp under wavelength X;Sλ is tested lampAfter entering optical path for tested lamp The voltage value that detector exports under wavelength X;Sλ is tested lampIt is detected under wavelength X after entering optical path for spectral radiance standard lamp The voltage value of device output;Lλ standard lampFor spectral radiance value of the spectral radiance standard lamp under wavelength X, which is known Value, has been stored in computer in advance.
(2) in formula, Eλ is tested lampTo be tested spectral irradiance value of the lamp under wavelength X;Sλ is tested lampAfter entering optical path for tested lamp The voltage value that detector exports under wavelength X;Sλ standard lampIt is detected under wavelength X after entering optical path for spectral radiant illuminance standard lamp The voltage value of device output;Eλ standard lampThe spectral irradiance value for being spectral radiant illuminance standard lamp under wavelength X, which is known Value, has been stored in computer in advance.
(3) in formula, Rλ is tested detectorIt is the spectral response angle value that detector is tested under wavelength X;Sλ is tested detectorFor under wavelength X The voltage value of tested detector output;Sλ standard detectorFor the voltage value that standard detector exports under wavelength X;Rλ standard detectorIt is in wave The spectral response angle value of standard detector under long λ, the value are given value, have been stored in computer in advance.
Unit is divided into curve display area and data display field as the result is shown.Curve display area shows the two of measurement result Dimension curve, i.e., the spectral radiance or spectral irradiance of tested lamp are with the change curve of wavelength or the spectrum of tested detector Responsiveness with wavelength change curve.Data display field shows measurement data, i.e., tested lamp and wavelength pair with excel form The spectral radiance value or spectral irradiance value answered or tested detector spectral response angle value corresponding with wavelength.Storage Output unit saves calculated result with excel form, then can be achieved to experiment curv and measurement according to print button order The printing of data.
The course of work of the invention is: when carrying out ultraviolet spectra radiance measurement, into computer software interface, clicking Ultraviolet spectra spoke luminance test module, computer automatically move first movement platform 1, enter ultraviolet spoke luminance standard lamp 2 and survey The starting point of optical path is measured, the mobile third mobile platform 18 of computer moves into ultraviolet standard detector 12 in optical path;It is ultraviolet The light beam that spoke luminance standard lamp 2 issues passes through fore optics system, the optical filter of corresponding wave band, chopper 9, ultraviolet monochromatic in succession After instrument 10, on the photosurface that reaches ultraviolet standard detector 12, the ultraviolet standard of Survey Software packet automatic collection in computer is visited Survey the voltage value S that device 12 exportsλ standard lamp;Later, computer automatically moves first movement platform 1, and ultraviolet spoke brightness is made to be tested lamp 3 Into after the starting fore optics system of optical path, the optical filter of corresponding wave band, chopper 9, ultraviolet monochromatic instrument 10, reach purple On the photosurface of outer standard detector 12, the electricity of the ultraviolet output of standard detector 12 of Survey Software packet automatic collection in computer Pressure value Sλ is tested lamp;Survey Software packet in computer calculates automatically and provides measurement result Lλ is tested lamp
When carrying out uv radiation intensity measurement, into computer software interface, ultraviolet spectra irradiation level test module, meter are clicked Calculation machine automatically moves first movement platform 1, and integrating sphere 16 is made to enter optical path, and the mobile third mobile platform 18 of computer makes Ultraviolet standard detector 12 moves into the terminal of optical path;Then, mobile second mobile platform 13, makes uv radiation intensity standard lamp The input terminal of 14 face integrating spheres 16, the light beam that uv radiation intensity standard lamp 14 issues are in succession logical after the integral of integrating sphere 16 Cross the light that fore optics system, the optical filter of corresponding wave band, chopper 9, ultraviolet monochromatic instrument 10 reach ultraviolet standard detector 12 On quick face, the voltage value S of the ultraviolet output of standard detector 12 of Survey Software packet automatic collection in computerλ is tested lamp;Later, it moves Dynamic second mobile platform 13, makes ultraviolet irradiation scale be tested the input terminal of 15 face integrating sphere 16 of lamp, and uv radiation intensity is tested lamp 15 issue light beams by integrating sphere 16 integral after, pass in succession through fore optics system, the optical filter of corresponding wave band, chopper 9, Ultraviolet monochromatic instrument 10 reaches on the photosurface of ultraviolet standard detector 12, the ultraviolet mark of Survey Software packet automatic collection in computer The voltage value S that quasi- detector 12 exportsλ is tested lamp;Survey Software packet in computer calculates automatically and provides measurement result Eλ is tested lamp
When carrying out ultraviolet spectra responsiveness, into computer software interface, ultraviolet spectra responsiveness test module, meter are clicked Calculation machine automatically moves first movement platform 1, enters ultraviolet spoke luminance standard lamp 2 in optical path, and the mobile third of computer is moved Moving platform 18 makes ultraviolet standard detector 12 move into the terminal of optical path;The light beam that ultraviolet spoke luminance standard lamp 2 issues is successive After fore optics system, the optical filter of corresponding wave band, chopper 9, ultraviolet monochromatic instrument 10, ultraviolet standard detector 12 is reached Photosurface on, voltage value S that the ultraviolet standard detector 12 of Survey Software packet automatic collection in computer exportsλ standard lamp;It Afterwards, computer automatically moves third mobile platform 18, and ultraviolet tested detector 17 is made to enter the terminal of optical path, and ultraviolet spoke is bright The light beam that degree standard lamp 2 issues passes through fore optics system, the optical filter of corresponding wave band, chopper 9, ultraviolet monochromatic instrument 10 in succession Afterwards, on the photosurface for reaching ultraviolet tested detector 17, the ultraviolet tested detector of Survey Software packet automatic collection in computer The voltage value S of 17 outputsλ is tested lamp;Survey Software packet in computer calculates automatically and provides measurement result Rλ is tested detector

Claims (3)

1. a kind of ultraviolet radiation comprehensive test device, including light source assembly, fore optics system, chopper [9], multi-functional optical filtering Component [8], ultraviolet monochromatic instrument [10], optic system for outputting, ultraviolet detection device assembly, data processing system, fore optics system, Multi-functional filtering assembly [8], chopper [9], ultraviolet monochromatic instrument and optic system for outputting are arranged successively composition optical path;It is special Sign is: the light source assembly contains ultraviolet spoke luminance standard lamp [2], He-Ne laser [4], uv radiation intensity standard lamp [14], the mutual integrating sphere [16] in 90 ° of first movement platform [1], the second mobile platform [13], input and output port, it is ultraviolet Spoke luminance standard lamp [2] and integrating sphere [16] are mounted on first movement platform [1] by the first optical bracket, the first optical branch Also there are the hole locations for installing ultraviolet spoke brightness tested lamp [3], He-Ne laser [4] on frame;Uv radiation intensity standard lamp [14] is logical It crosses the second optical bracket to be mounted on the second mobile platform [13], also there are installation uv radiation intensity is tested on the second optical bracket The hole location of lamp [15] and He-Ne laser [4];First movement platform [1] is vertical with the direction of motion of the second mobile platform [13]; First movement platform [1] moves under the control of the data processing system, and drives the He-Ne laser [4] or ultraviolet Spoke luminance standard lamp [2] or ultraviolet spoke brightness are tested lamp [3] or the output port of integrating sphere [16] sequentially enters the measurement light The input terminal on road, the second mobile platform [13] moves under the control of the data processing system, and drives the ultraviolet irradiation Degree standard lamp [14] or uv radiation intensity are tested lamp [15] or He-Ne laser [4] is successively directed at the input terminal of integrating sphere [16] Mouthful;The fore optics system is the imaging system being made of spherical reflector [6] and plane mirror [5], incident beam according to It is secondary to be emitted after the reflection of spherical reflector [6] and plane mirror [5];The multi-functional filtering assembly [8] contains runner, branch Support, electronic shutter [7], multiple wave bands different optical filter and stepper motor, electronic shutter [7] and multiple optical filters are arranged in The axis hole being connected with stepping motor rotating shaft is arranged on one circumference of the runner disk and center of the circumference, and runner is mounted on support Each optical filter or electronic shutter [7] is being driven on frame and under the driving of stepper motor to be cut into the optical path respectively; The ultraviolet detection device assembly includes ultraviolet standard detector [12], ultraviolet tested detector [17] and third mobile platform [18], ultraviolet standard detector [12] and ultraviolet tested detector [17] are mounted on third mobile platform by third optical bracket [18] on, wherein also there are the hole location of installation He-Ne laser [4], the fortune of third mobile platform [18] on third optical bracket Dynamic direction is parallel with the direction of motion of first movement platform [1], control of the third mobile platform [18] in the data processing system The lower movement of system, and ultraviolet standard detector [12] or ultraviolet tested detector [17] or He-Ne laser is driven to enter measurement light The output end on road;Positioned at optical path input terminal and as the ultraviolet spoke luminance standard lamp [2] of standard sources or He-Ne laser [4] or the ultraviolet spoke brightness as measured light is tested lamp [3] or uv radiation intensity to be tested the light beam that lamp [15] launch straight Connect or integrated ball [16] integral after successively after the fore optics system, multi-functional filtering assembly [8] and chopper [9] at As the ultraviolet monochromatic instrument [10] entrance slit, ultraviolet monochromatic instrument [10] outgoing light beam through the optic system for outputting at As on one of them photosurface of ultraviolet standard detector [12] and ultraviolet tested detector [17], and the detector [12 or 17] data processing system is sent into after converting optical signals into electric signal;The data processing system includes cutting with described The lock-in amplifier that wave device [9] is used cooperatively, the computer equipped with data collecting card and Survey Software packet, Survey Software packet are divided into Parameter setting module, control module, ultraviolet radioactive brightness measurement module, ultraviolet spectra irradiance measurement module and ultraviolet spectra Responsiveness measurement module;The function of parameter setting module is to select measurement type by computer screen and according to selected The measurement of correlation parameter of the ultraviolet monochromatic instrument [10], multi-functional filtering assembly [8], the function of control module is arranged in measurement type It is to send and control to the wavelength control unit of the ultraviolet monochromatic instrument [10] according to the measurement of correlation parameter being arranged in parameter setting module System instruction, makes ultraviolet monochromatic instrument [10] according to the parameter setting work parameter of selection;To the stepper motor of the filtering assembly [8] Driving instruction is issued, enters the optical filter of corresponding wave band in optical path;After being connected to measuring command, according to parameter setting mould The measurement type being arranged in block calls a kind of corresponding measurement module to complete the data sampling and processing in measurement and calculate to appoint Business, and provide measurement result.
2. ultraviolet radiation comprehensive test device according to claim 1, it is characterised in that: the ultraviolet spoke luminance standard lamp [2] 30W xenon lamp is selected, uv radiation intensity standard lamp [14] selects 150W deuterium lamp, and the ultraviolet standard detector selects UV-100 Silicon photoelectric diode.
3. ultraviolet radiation comprehensive test device according to claim 1 or 2, it is characterised in that: the optical filter is three, Its optical filtering wave band is respectively 180~300nm, 300~500nm, 500~900nm.
CN201710675148.9A 2017-07-31 2017-07-31 Ultraviolet radiation comprehensive test device Pending CN109323760A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113296165A (en) * 2021-06-01 2021-08-24 中国电子科技集团公司第四十一研究所 Spaceborne ultraviolet-vacuum ultraviolet band transmission radiation standard and method
CN114184276A (en) * 2021-11-05 2022-03-15 深圳华迈兴微医疗科技有限公司 Multi-channel lighting method and device based on optical fibers

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113296165A (en) * 2021-06-01 2021-08-24 中国电子科技集团公司第四十一研究所 Spaceborne ultraviolet-vacuum ultraviolet band transmission radiation standard and method
CN114184276A (en) * 2021-11-05 2022-03-15 深圳华迈兴微医疗科技有限公司 Multi-channel lighting method and device based on optical fibers

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Application publication date: 20190212