CN106595897B - Tunnel-effect ultra-sensitivity Electromagnetic Control constant temperature system - Google Patents
Tunnel-effect ultra-sensitivity Electromagnetic Control constant temperature system Download PDFInfo
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- CN106595897B CN106595897B CN201611001198.0A CN201611001198A CN106595897B CN 106595897 B CN106595897 B CN 106595897B CN 201611001198 A CN201611001198 A CN 201611001198A CN 106595897 B CN106595897 B CN 106595897B
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- slide bar
- tunnel
- electromagnet
- temperature
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
- G01K7/36—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using magnetic elements, e.g. magnets, coils
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Devices That Are Associated With Refrigeration Equipment (AREA)
Abstract
The present invention relates to a kind of tunnel-effect ultra-sensitivity Electromagnetic Control constant temperature systems, mainly by tunnel electrode(1), amplifier(2), core switch(3), electromagnet(4), spring(5), fixed point(6), right slide bar(7), heat slideway(8), heating combined equipment(9), thermal resistance(10), regulate and control power supply(11), freeze resistance(12), regulating switch(13), refrigerating plant(14), convertible frequency air-conditioner(15), left slide bar(16), freeze slideway(17), fixed iron block(18), magnetic core power supply(19)Composition.The variation of temperature can cause tunnel electrode(1)It expands with heat and contract with cold, to change tunnel electrode(1)The two poles of the earth spacing between plates, so that being changed by the size of current between this two-plate.This variation can drive electromagnet(4)Left and right horizontal is mobile to auto-control heating combined equipment(9)And refrigerating plant(14)Working condition with the variation of compensation temperature.
Description
Technical field
The present invention relates to ultra-sensitivity thermostatic control system more particularly to a kind of tunnel-effect ultra-sensitivity Electromagnetic Control are permanent
Warm system can be used for compensating the slight change of temperature in Ultra-precision Turning, and compensation precision is high.
Background technique
Ultraprecision Machining directly affects the development of a national sophisticated technology and national defense industry.In ultraprecise plus
In work, Thermal Error accounts for the 40%-70% of total mismachining tolerance, drastically influences the quality and performance of product.Currently, Ultra-precision Turning is all
It is that setting carries out in air-conditioned room.However, the temperature control precision of even convertible frequency air-conditioner is not also high, about at 1 °C or so.Room temperature
Under normal pressure, the ordinary carbon steel temperature of 1m long rises 1 °C, will extend about 10 μm.Therefore, a kind of supersensitive constant temperature control is designed
System processed is very necessary.
Summary of the invention
The object of the present invention is to provide a kind of ultra-sensitivity thermostatic control system, control process may include heating and drop
Temperature, can the slight change of temperature in control system of sensitive automatical ground.Tunnel-effect ultra-sensitivity Electromagnetic Control constant temperature of the present invention system
The principle of system is to utilize tunnel electrode(1)Expand with heat and contract with cold characteristic realize to temperature sensitive control.Tunnel electrode(1)The two poles of the earth
This mutually opposite two sides of plate, surface atom arrangement is uniform sequential, and can be conductive, and resistance coefficient is small;Its surface is all passed through
The relevant technologies processing of Ultra-precision Turning keeps its flat and smooth, arranges mixed and disorderly atom individually, it is also necessary to aobvious using scanning-tunnelling
Micro mirror is adjusted or migrates to it.In core switch(3)In the state of closure, since the variation of temperature causes tunnel electrode
(1)Two-plate expands with heat and contract with cold, to change tunnel electrode(1)Spacing between two-plate, while to flow through tunnel electrode(1)Two
Apparent variation occurs for the size of electric current between pole plate.This curent change is amplified device(2)Amplification, to control electromagnet(4)
Left and right horizontal is mobile.Electromagnet(4)On left slide bar is installed(16)With right slide bar(7).Work as electromagnet(4)To the left from equilbrium position
When mobile, left slide bar(16)With refrigeration resistance(12)It connects, right slide bar(7)With refrigeration slideway(17)It connects, to regulate and control power supply
(11), closure regulating switch(13), refrigerating plant(14), refrigeration resistance(12), left slide bar(16), right slide bar(7)And refrigeration
Slideway(17)Constitute a closed circuit, refrigerating plant(14)It blows out cold air and realizes and cool down to whole system;Work as electromagnet(4)From
When equilbrium position moves right, left slide bar(16)With thermal resistance(10)It connects, right slide bar(7)With heating slideway(8)It connects, from
And regulate and control power supply(11), closure regulating switch(13), heating combined equipment(9), thermal resistance(10), left slide bar(16), right slide bar
(7)With heating slideway(8)Constitute a closed circuit, heating combined equipment(9)Hot gas is blown out to realize to whole system heating.The present invention
When tunnel-effect ultra-sensitivity Electromagnetic Control constant temperature system works, tunnel electrode(1)Spacing between two-plate is 0 to 10-9Meter Zhi
Between change.Fixed iron block(18)It is fixed on electromagnet(4)Side, and spring(5)It is fixed a little(6)It is fixed on electromagnet
(4)The other side.When tunnel-effect ultra-sensitivity Electromagnetic Control constant temperature system is in temperature constant state, fixed iron block(18)And electricity
Magnet(4)Between gravitation and spring(5)Elastic force mutually balance, electromagnet(4)It remains static.
Detailed description of the invention
Fig. 1 is structural representation when tunnel-effect ultra-sensitivity Electromagnetic Control constant temperature system of the present invention is in temperature constant state
Figure, while as first embodiment.
Structural schematic diagram when Fig. 2 is tunnel-effect ultra-sensitivity Electromagnetic Control constant temperature system of the present invention refrigeration.
Structural schematic diagram when Fig. 3 is tunnel-effect ultra-sensitivity Electromagnetic Control constant temperature system of the present invention heating.
Fig. 4 is tunnel electrode in tunnel-effect ultra-sensitivity Electromagnetic Control constant temperature system of the present invention(1)One in two-plate
Block pole plate is changed to the structural schematic diagram of scanning probe, while as second embodiment.
Specific embodiment
Tunnel-effect ultra-sensitivity Electromagnetic Control constant temperature system of the present invention, mainly by tunnel electrode(1), amplifier(2), magnetic
Core switch(3), electromagnet(4), spring(5), fixed point(6), right slide bar(7), heat slideway(8), heating combined equipment(9), heating
Resistance(10), regulate and control power supply(11), freeze resistance(12), regulating switch(13), refrigerating plant(14), convertible frequency air-conditioner(15), left
Slide bar(16), freeze slideway(17), fixed iron block(18), magnetic core power supply(19)Composition.Before the present invention, core switch is disconnected
(3)And regulating switch(13), and will be by tunnel electrode(1), amplifier(2), core switch(3), electromagnet(4), spring(5),
Fixed point(6), fixed iron block(18), magnetic core power supply(19)The magnetic core system of composition is placed in the device of a vibrationproof.It uses
When of the invention, first by convertible frequency air-conditioner(15)It is set in a normal temperature, and is waited after temperature is basicly stable in systems, magnetic core is connected
Switch(3), electromagnet(4)It is moved to the left under magneticaction;To electromagnet(4)Position stablize after, i.e., temperature is steady in system
After fixed, refrigeration resistance is adjusted(12)And thermal resistance(10)Position so that left slide bar(16)In refrigeration resistance(12)And heating
Resistance(10)Middle position;Adjust refrigeration slideway(17)With heating slideway(8)Position so that right slide bar(7)Freezing
Slideway(17)With heating slideway(8)Middle position, as shown in Figure 1.Connect regulating switch(13), when system temperature increases
When, tunnel electrode(1)Two-plate expanded by heating, its spacing become close, are become larger by electric current therebetween, so that electromagnet(4)Magnetic
Power becomes strong, thus to fixed iron block(18)Side is mobile, as shown in Figure 2;When system temperature reduces, tunnel electrode(1)The two poles of the earth
Plate shrinkage, its spacing become remote, are become smaller by electric current therebetween, so that electromagnet(4)Magnetic force die down, thus to fixed point(6)
Side is mobile, as shown in Figure 3.When the temperature in tunnel-effect ultra-sensitivity Electromagnetic Control constant temperature system is higher than the common temperature of setting
Spend more, left slide bar(16)The displacement being moved to the left is bigger, seals in refrigerating plant(14)The refrigeration resistance of closed circuit(12)
Effective resistance with regard to smaller so that refrigeration power it is bigger;When the temperature in this system lower than setting normal temperature it is more,
Left slide bar(16)The displacement to move right is bigger, seals in heating combined equipment(9)The thermal resistance of closed circuit(10)Effective electricity
Resistance is just smaller, so that the power of heating is bigger;If there is the alternating variation of raising and lowering, electromagnet in temperature in this system
(4)Concussion will be controlled, so as to temperature in compensation system variation until its is constant.
Claims (2)
1. a kind of tunnel-effect ultra-sensitivity Electromagnetic Control constant temperature system, it is characterized in that:Mainly by tunnel electrode (1), amplifier
(2), core switch (3), electromagnet (4), spring (5), fixed point (6), right slide bar (7) heat slideway (8), heating combined equipment
(9), thermal resistance (10) regulate and control power supply (11), freeze resistance (12), regulating switch (13), refrigerating plant (14), convertible frequency air-conditioner
(15), left slide bar (16) is freezed slideway (17), fixed iron block (18), and magnetic core power supply (19) composition utilizes tunnel electrode (1)
Characteristic expand with heat and contract with cold to realize and control temperature sensitive automatical;This mutually opposite two sides of tunnel electrode (1) two-plate, table
Face atomic arrangement is uniform sequential, and can be conductive, and resistance coefficient is small, and when work, the spacing on this two sides is 0 to 10-9Become between rice
Change;In the state that core switch (3) are closed, since the variation of temperature causes tunnel electrode (1) two-plate to expand with heat and contract with cold, thus
Change the spacing between tunnel electrode (1) two-plate, while to become by the size of electric current between tunnel electrode (1) two-plate
Change;Fixed iron block (18) are fixed on the side of electromagnet (4), and spring (5) is fixed point (6) and is fixed on electromagnet (4)
The other side;When system is in temperature constant state, the elastic force phase of gravitation and spring (5) between fixed iron block (18) and electromagnet (4)
Mutually balance, electromagnet (4) remain static;Left slide bar (16) and right slide bar (7) are installed on electromagnet (4);Work as the present invention
When temperature in tunnel-effect ultra-sensitivity Electromagnetic Control constant temperature system increases, tunnel electrode (1) two-plate expanded by heating, therebetween
It is close away from becoming, become larger by electric current therebetween, so that the magnetic force of electromagnet (4) becomes larger, thus mobile to fixed iron block (18) side;
When the temperature in system reduces, tunnel electrode (1) two-plate shrinkage, its spacing becomes remote, is become smaller by electric current therebetween, so that
The magnetic force of electromagnet (4) becomes smaller, thus mobile to fixed point (6) side;When electromagnet (4) is moved to the left from equilbrium position,
Left slide bar (16) and refrigeration resistance (12) are connected, and right slide bar (7) and refrigeration slideway (17) are connected, to regulate and control power supply (11), close
Regulating switch (13), refrigerating plant (14), refrigeration resistance (12), left slide bar (16), right slide bar (7) and refrigeration slideway (17) of conjunction
A closed circuit is constituted, refrigerating plant (14), which blows out cold air and realizes, cools down to whole system;When electromagnet (4) is from equilbrium position
When moving right, left slide bar (16) and thermal resistance (10) are connected, and right slide bar (7) and heating slideway (8) are connected, to regulate and control electricity
Source (11), the regulating switch (13) of closure, heating combined equipment (9), thermal resistance (10), left slide bar (16), right slide bar (7) and heating
Slideway (8) constitutes a closed circuit, and heating combined equipment (9) blows out hot gas and realizes to whole system heating;Tunnel-effect hypersensitive
The normal temperature that the temperature spent in Electromagnetic Control constant temperature system is higher than convertible frequency air-conditioner (15) setting is more, and left slide bar (16) is to moving to left
Dynamic displacement is bigger, seals in the effective resistance of the refrigeration resistance (12) of refrigerating plant (14) closed circuit with regard to smaller, so that system
Cold power is bigger;Temperature in tunnel-effect ultra-sensitivity Electromagnetic Control constant temperature system is lower than convertible frequency air-conditioner (15) setting
Normal temperature is more, and the displacement that left slide bar (16) moves right is bigger, seals in the thermal resistance of heating combined equipment (9) closed circuit
(10) effective resistance is with regard to smaller, so that the power of heating is bigger.
2. tunnel-effect ultra-sensitivity Electromagnetic Control constant temperature system according to claim 1, it is characterized in that:It is straight with working end
Diameter is very small, and the scanning probe for being so small to have only an atom size replaces one piece of pole plate in tunnel electrode (1) two-plate to examine
The variation of temperature in examining system.
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CN106595897B true CN106595897B (en) | 2018-11-16 |
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US5796120A (en) * | 1995-12-28 | 1998-08-18 | Georgia Tech Research Corporation | Tunnel thin film electroluminescent device |
CN1189921A (en) * | 1996-03-26 | 1998-08-05 | 三星电子株式会社 | Tunnelling device and method of producing a tunnelling device |
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CN101216539A (en) * | 2007-01-03 | 2008-07-09 | 通用电气公司 | Method and system for calibrating a micro-electromechanical system (MEMS) based sensor |
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