CN106595897A - Tunneling effect super-sensitivity electromagnetic control constant-temperature system - Google Patents

Tunneling effect super-sensitivity electromagnetic control constant-temperature system Download PDF

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Publication number
CN106595897A
CN106595897A CN201611001198.0A CN201611001198A CN106595897A CN 106595897 A CN106595897 A CN 106595897A CN 201611001198 A CN201611001198 A CN 201611001198A CN 106595897 A CN106595897 A CN 106595897A
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China
Prior art keywords
slide bar
temperature
tunnel
electric magnet
slideway
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CN201611001198.0A
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CN106595897B (en
Inventor
邹华兵
丁跃浇
蔡安辉
张晓红
李徽
李锶
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Hunan Institute of Science and Technology
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Hunan Institute of Science and Technology
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01KMEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/36Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using magnetic elements, e.g. magnets, coils

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Devices That Are Associated With Refrigeration Equipment (AREA)

Abstract

The invention relates to a tunneling effect super-sensitivity electromagnetic control constant-temperature system mainly composed of a tunnel electrode (1), an amplifier (2), a magnetic core switch (3), an electromagnet (4), a spring (5), a fixed point (6), a right slide bar (7), a heating slideway (8), a heating device (9), a heating resistor (10), a control power supply (11), a cooling resistor (12), a control switch (13), a cooling device (14), a variable-frequency air conditioner (15), a left slide bar (16), a cooling slideway (17), a fixed iron block (18) and a magnetic core power supply (19). A change in temperature causes the thermal expansion and contraction of the tunnel electrode (1) so as to change the distance between the two electrode plates of the tunnel electrode (1) so that the magnitude of the current flowing between the two electrode plates changes. The change can cause the electromagnet (4) to move horizontally left and right to automatically adjust the operating conditions of the heating device (9) and the cooling unit (14) to compensate for the temperature change.

Description

Tunnel-effect ultra-sensitivity Electromagnetic Control constant temperature system
Technical field
The present invention relates to ultra-sensitivity thermostatic control system, more particularly to a kind of tunnel-effect ultra-sensitivity Electromagnetic Control perseverance Warm system, can be used to compensate the slight change of temperature in Ultra-precision Turning, and compensation precision is high.
Background technology
Ultraprecision Machining directly affects the sophisticated technology of a country and the development of national defense industry.In ultraprecise plus In work, Thermal Error accounts for the 40%-70% of total mismachining tolerance, drastically influence the quality and performance of product.At present, Ultra-precision Turning is all It is provided in being carried out in air-conditioned room.However, even the temperature control precision of convertible frequency air-conditioner is not also high, about at 1 °C or so.Room temperature Under normal pressure, the common straightcarbon steel temperature of 1m length rises 1 °C, by about 10 μm of elongation.Therefore, a kind of supersensitive constant temperature control is designed System processed is very necessary.
The content of the invention
It is an object of the invention to provide a kind of ultra-sensitivity thermostatic control system, its control process may include to rise gentle drop Temperature, the slight change of temperature in energy sensitive automatical ground control system.Tunnel-effect ultra-sensitivity Electromagnetic Control constant temperature system of the present invention The principle of system is to utilize tunnel electrode(1)Expand with heat and contract with cold characteristic realize to temperature sensitive control.Tunnel electrode(1)The two poles of the earth Plate mutually against this two sides, the arrangement of its surface atom is uniform sequential, and can be conductive, and resistance coefficient is little;Its surface is all passed through The correlation technique of Ultra-precision Turning is processed and makes its flat smooth, and mixed and disorderly atom is arranged individually, in addition it is also necessary to aobvious using scanning-tunnelling Micro mirror is adjusted to it or migrates.In core switch(3)In the state of closure, because the change of temperature causes tunnel electrode (1)Two-plate expands with heat and contract with cold, so as to change tunnel electrode(1)Spacing between two-plate, while so that flowing through tunnel electrode(1)Two Between pole plate there is significantly change in the size of electric current.This curent change is exaggerated device(2)Amplify, so as to control electric magnet(4) Left and right horizontal is moved.Electric magnet(4)On left slide bar is installed(16)With right slide bar(7).Work as electric magnet(4)From equilbrium position to the left When mobile, left slide bar(16)With refrigeration resistance(12)Connect, right slide bar(7)With refrigeration slideway(17)Connect, so as to regulate and control power supply (11), closure regulating switch(13), refrigerating plant(14), refrigeration resistance(12), left slide bar(16), right slide bar(7)And refrigeration Slideway(17)Constitute a closed circuit, refrigerating plant(14)Blowout cold air is realized lowering the temperature whole system;Work as electric magnet(4)From When equilbrium position moves right, left slide bar(16)With thermal resistance(10)Connect, right slide bar(7)With heat slideway(8)Connect, from And regulate and control power supply(11), closure regulating switch(13), heating combined equipment(9), thermal resistance(10), left slide bar(16), right slide bar (7)With heat slideway(8)Constitute a closed circuit, heating combined equipment(9)Blowout steam is realized heating up whole system.The present invention When tunnel-effect ultra-sensitivity Electromagnetic Control constant temperature system works, tunnel electrode(1)Spacing between two-plate is 0 to 10-9Meter Zhi Between change.Fixed iron block(18)It is fixed on electric magnet(4)Side, and spring(5)By fixing point(6)It is fixed on electric magnet (4)Opposite side.When tunnel-effect ultra-sensitivity Electromagnetic Control constant temperature system is in temperature constant state, fixed iron block(18)And electricity Magnet(4)Between gravitation and spring(5)Elastic force mutually balance, electric magnet(4)Remain static.
Description of the drawings
Fig. 1 be tunnel-effect ultra-sensitivity Electromagnetic Control constant temperature system of the present invention be in temperature constant state when structural representation Figure, while as first embodiment.
Fig. 2 is structural representation when tunnel-effect ultra-sensitivity Electromagnetic Control constant temperature system of the present invention freezes.
Fig. 3 is structural representation when tunnel-effect ultra-sensitivity Electromagnetic Control constant temperature system of the present invention is heated.
Fig. 4 is tunnel electrode in tunnel-effect ultra-sensitivity Electromagnetic Control constant temperature system of the present invention(1)In two-plate one Block pole plate is changed to scan the structural representation of probe, while as second embodiment.
Specific embodiment
Tunnel-effect ultra-sensitivity Electromagnetic Control constant temperature system of the present invention, mainly by tunnel electrode(1), amplifier(2), magnetic Core is switched(3), electric magnet(4), spring(5), fixing point(6), right slide bar(7), heat slideway(8), heating combined equipment(9), heat Resistance(10), regulate and control power supply(11), freeze resistance(12), regulating switch(13), refrigerating plant(14), convertible frequency air-conditioner(15), it is left Slide bar(16), freeze slideway(17), fixed iron block(18), magnetic core power supply(19)Composition.Before the present invention, core switch is disconnected (3)And regulating switch(13), and will be by tunnel electrode(1), amplifier(2), core switch(3), electric magnet(4), spring(5), Fixing point(6), fixed iron block(18), magnetic core power supply(19)The magnetic core system of composition is placed in the device of a vibrationproof.Use When of the invention, first by convertible frequency air-conditioner(15)It is set in a conventional temperature, and waits after temperature is basicly stable in system, connects magnetic core Switch(3), electric magnet(4)It is moved to the left under magneticaction;Treat electric magnet(4)Position it is stable after, i.e., temperature is steady in system After fixed, refrigeration resistance is adjusted(12)And thermal resistance(10)Position so that left slide bar(16)In refrigeration resistance(12)With heat Resistance(10)Middle position;Adjust refrigeration slideway(17)With heat slideway(8)Position so that right slide bar(7)In refrigeration Slideway(17)With heat slideway(8)Middle position, as shown in Figure 1.Connect regulating switch(13), when system temperature is raised When, tunnel electrode(1)Two-plate expanded by heating, its spacing becomes near, becomes big by electric current therebetween so that electric magnet(4)Magnetic Power becomes strong, so as to fixed iron block(18)One side shifting, as shown in Figure 2;When system temperature is reduced, tunnel electrode(1)The two poles of the earth Plate shrinkage, its spacing becomes remote, is diminished by electric current therebetween so that electric magnet(4)Magnetic force die down, so as to fixing point(6) One side shifting, as shown in Figure 3.When the temperature in tunnel-effect ultra-sensitivity Electromagnetic Control constant temperature system is higher than the conventional temperature of setting Spend more, left slide bar(16)The displacement being moved to the left is bigger, seals in refrigerating plant(14)The refrigeration resistance of closed circuit(12) Effective resistance it is less so that the power of refrigeration is bigger;When the temperature in this system less than setting conventional temperature it is more, Left slide bar(16)The displacement for moving right is bigger, seals in heating combined equipment(9)The thermal resistance of closed circuit(10)Effective electricity Resistance is less so that the power for heating is bigger;If there is the alternate of raising and lowering, electric magnet in temperature in this system (4)Will left and right concussion, so that the change of temperature in compensation system is until its is constant.

Claims (2)

1. a kind of tunnel-effect ultra-sensitivity Electromagnetic Control constant temperature system, is characterized in that:Mainly by tunnel electrode(1), amplifier (2), core switch(3), electric magnet(4), spring(5), fixing point(6), right slide bar(7), heat slideway(8), heating combined equipment (9), thermal resistance(10), regulate and control power supply(11), freeze resistance(12), regulating switch(13), refrigerating plant(14), convertible frequency air-conditioner (15), left slide bar(16), freeze slideway(17), fixed iron block(18), magnetic core power supply(19)Composition, using tunnel electrode(1)'s Expand with heat and contract with cold characteristic to realize controlling temperature sensitive automatical;Tunnel electrode(1)Two-plate mutually against this two sides, its table Face atomic arrangement is uniform sequential, and can be conductive, and resistance coefficient is little, and during work, the spacing on this two sides is 0 to 10-9The anaplasia of rice Change;In core switch(3)In the state of closure, because the change of temperature causes tunnel electrode(1)Two-plate expands with heat and contract with cold, so as to Change tunnel electrode(1)Spacing between two-plate, while so that passing through tunnel electrode(1)The size of electric current becomes between two-plate Change;Fixed iron block(18)It is fixed on electric magnet(4)Side, and spring(5)By fixing point(6)It is fixed on electric magnet(4)'s Opposite side;When system is in temperature constant state, fixed iron block(18)And electric magnet(4)Between gravitation and spring(5)Elastic force phase Mutually balance, electric magnet(4)Remain static;Electric magnet(4)On left slide bar is installed(16)With right slide bar(7);Work as the present invention When temperature in tunnel-effect ultra-sensitivity Electromagnetic Control constant temperature system is raised, tunnel electrode(1)Two-plate expanded by heating, therebetween It is near away from becoming, become big by electric current therebetween so that electric magnet(4)Magnetic force become big, so as to fixed iron block(18)One side shifting; When the temperature in system is reduced, tunnel electrode(1)Two-plate shrinkage, its spacing becomes remote, is diminished by electric current therebetween so that Electric magnet(4)Magnetic force diminish, so as to fixing point(6)One side shifting;Work as electric magnet(4)When being moved to the left from equilbrium position, Left slide bar(16)With refrigeration resistance(12)Connect, right slide bar(7)With refrigeration slideway(17)Connect, so as to regulate and control power supply(11), close The regulating switch of conjunction(13), refrigerating plant(14), refrigeration resistance(12), left slide bar(16), right slide bar(7)With refrigeration slideway(17) Constitute a closed circuit, refrigerating plant(14)Blowout cold air is realized lowering the temperature whole system;Work as electric magnet(4)From equilbrium position When moving right, left slide bar(16)With thermal resistance(10)Connect, right slide bar(7)With heat slideway(8)Connect, so as to regulate and control electricity Source(11), closure regulating switch(13), heating combined equipment(9), thermal resistance(10), left slide bar(16), right slide bar(7)With heat Slideway(8)Constitute a closed circuit, heating combined equipment(9)Blowout steam is realized heating up whole system;Tunnel-effect hypersensitive Temperature in degree Electromagnetic Control constant temperature system is higher than convertible frequency air-conditioner(15)The conventional temperature of setting is more, left slide bar(16)To moving to left Dynamic displacement is bigger, seals in refrigerating plant(14)The refrigeration resistance of closed circuit(12)Effective resistance it is less so that system Cold power is bigger;Temperature in tunnel-effect ultra-sensitivity Electromagnetic Control constant temperature system is less than convertible frequency air-conditioner(15)Setting Conventional temperature is more, left slide bar(16)The displacement for moving right is bigger, seals in heating combined equipment(9)The thermal resistance of closed circuit (10)Effective resistance it is less so that the power for heating is bigger.
2. tunnel-effect ultra-sensitivity Electromagnetic Control constant temperature system according to claim 1, is characterized in that:It is straight with working end Footpath is very little, and the scanning probe for being so small to have only even one atom size of several atoms replaces tunnel electrode(1)In two-plate One piece of pole plate carrys out the change of temperature in detecting system.
CN201611001198.0A 2016-11-15 2016-11-15 Tunnel-effect ultra-sensitivity Electromagnetic Control constant temperature system Expired - Fee Related CN106595897B (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112032781A (en) * 2020-08-14 2020-12-04 上海纯米电子科技有限公司 Cooking temperature control device and method and cooking appliance

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1189921A (en) * 1996-03-26 1998-08-05 三星电子株式会社 Tunnelling device and method of producing a tunnelling device
US5796120A (en) * 1995-12-28 1998-08-18 Georgia Tech Research Corporation Tunnel thin film electroluminescent device
CN101216539A (en) * 2007-01-03 2008-07-09 通用电气公司 Method and system for calibrating a micro-electromechanical system (MEMS) based sensor
CN101278338A (en) * 2005-09-30 2008-10-01 飞思卡尔半导体公司 Magnetic tunnel junction temperature sensors
CN102564637A (en) * 2010-12-15 2012-07-11 新科实业有限公司 Method for measuring temperature rise caused by bias current/bias voltage in magnetic tunnel junction
EP2887398A1 (en) * 2013-12-18 2015-06-24 Imec A bilayer graphene tunneling field effect transistor
CN105444913A (en) * 2015-11-30 2016-03-30 武汉钢铁(集团)公司 Temperature measurement equipment

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5796120A (en) * 1995-12-28 1998-08-18 Georgia Tech Research Corporation Tunnel thin film electroluminescent device
CN1189921A (en) * 1996-03-26 1998-08-05 三星电子株式会社 Tunnelling device and method of producing a tunnelling device
CN101278338A (en) * 2005-09-30 2008-10-01 飞思卡尔半导体公司 Magnetic tunnel junction temperature sensors
CN101216539A (en) * 2007-01-03 2008-07-09 通用电气公司 Method and system for calibrating a micro-electromechanical system (MEMS) based sensor
CN102564637A (en) * 2010-12-15 2012-07-11 新科实业有限公司 Method for measuring temperature rise caused by bias current/bias voltage in magnetic tunnel junction
EP2887398A1 (en) * 2013-12-18 2015-06-24 Imec A bilayer graphene tunneling field effect transistor
CN105444913A (en) * 2015-11-30 2016-03-30 武汉钢铁(集团)公司 Temperature measurement equipment

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
张宇 等: "串联电极法聚焦电流隧道前探效果的仿真分析", 《物探化探计算技术》 *
王莉 等: "隧道加速度计结构原理及最小电极距离分析", 《中北大学学报》 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112032781A (en) * 2020-08-14 2020-12-04 上海纯米电子科技有限公司 Cooking temperature control device and method and cooking appliance

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