CN106526770A - Lossless ultra-vacuum fiber leading-in device and method - Google Patents
Lossless ultra-vacuum fiber leading-in device and method Download PDFInfo
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- CN106526770A CN106526770A CN201611149984.5A CN201611149984A CN106526770A CN 106526770 A CN106526770 A CN 106526770A CN 201611149984 A CN201611149984 A CN 201611149984A CN 106526770 A CN106526770 A CN 106526770A
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- vacuum
- fastening nut
- optical fiber
- lossless
- tubular configured
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/44—Mechanical structures for providing tensile strength and external protection for fibres, e.g. optical transmission cables
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- Optics & Photonics (AREA)
- Light Guides In General And Applications Therefor (AREA)
- Optical Couplings Of Light Guides (AREA)
Abstract
The invention relates to a lossless ultra-vacuum fiber leading-in device and method. The fiber leading-in device comprises is formed by combining a sealing member made of an elastic material and including a through hole in the center with a tubular pipe joint. According to the device, a bare fiber penetrates the small hole in the center of the sealing member of the elastic material, and the fiber and the sealing member of the elastic material are extruded mechanically simultaneously to realize vacuum sealing. The vacuum obtaining operation process of the leading-in device is used to lead the fiber into or out of the ultra-vacuum condition without loss. The requirements of leading laser in or out of the ultra-vacuum for experiments and industrial production can be met, the requirement of laser losslessness in the leading-in and leading-out process can be met, and using requirements for different laser wavelengths and different types of fibers can be met.
Description
Technical field
The invention belongs to optical fiber gatherer technical field, and in particular to a kind of lossless ultrahigh vacuum optical fiber gatherer
And method.
Background technology
Especially ultrahigh vacuum is not only the numerous of the basic subjects such as high energy particle, nuclear physics research and Surface Science to vacuum
The experimental situation of indispensability is provided in terms of research, and concerns the key areas of national economy in semi-conductor industry, space flight, national defence etc.
Suffer from wide application.
It is frequently necessary to physical quantitys such as light, electricity, object movements in the application process of vacuum system by importing or lead outside vacuum
Go out in vacuum.Wherein the lead-in and lead-out method of light mainly has two ways.A kind of conventional method is that vacuum window, i.e. light are direct
The purpose of vacuum is imported and exported so as to reach light through light transmission medium.In general application, the main purpose of vacuum window is to see
Examine the ruuning situation of evacuated interior device.In ultra-high vacuum system application, people are usually used the material conduct such as glass, quartz
Light imports and exports medium.But common vacuum window is swashed to different wave length in laser physics experiment and commercial production is related to
Light transmission has differences, and the Laser Transmission of different wave length has certain frequency through the transmitance of the quartzy vacuum window of high-quality
Bandwidth, and highest transmitance is 98% or so, still has part light to be depleted.And people are in window table in actual mechanical process
Face is plated with medium antireflective film to improve the transmitance of laser to reduce the loss of light, but window plated film not only increase equipment into
This, and laser transmitance when different angles pass through window there is also larger difference.The method that another vacuum light is imported
It is that optical fiber is imported.Optical fiber spatially can fetter laser beam, therefore the light during light imports and exports vacuum well
Fine guided laser is not only lost low but also easily controls.But it is using optical fiber coupling that existing Commercial fibers import and export device
Splice grafting head with reference to glass, ceramics or plastic or other material conducting laser and play vacuum-packed effect, technique is not only complicated,
And high cost, it is required to connect using fibre-optical splice additionally, due to such laser gatherer is outer in vacuo, laser is by true
After empty outside (inside) optical fiber output, coupling is input into internal (outside) optical fiber again, inherently introduces certain laser coupled loss,
Generally in 1dB or so.And such laser gatherer once complete optical fiber joint categories i.e. with determine, so such
Device can only support that single optical fiber or Partial Species optical fiber are used, universal difference.
In the research such as part semiconductor Laser Processing and micro-nano material spectral characteristic, laser needs to be imported and exported by optical fiber
Vacuum, and need to reduce as far as possible light importing and exporting the loss of process, while various fiber types can also be supported, because
This needs a kind of lossless universal vacuum laser gatherer badly.
The content of the invention
Present invention aim to address there is the technology of the big and universal difference of loss in existing vacuum optical fibers gatherer
Problem, there is provided a kind of lossless ultrahigh vacuum optical fiber gatherer and method.
For solving above-mentioned technical problem, the technical solution used in the present invention is：
A kind of lossless ultrahigh vacuum optical fiber gatherer, is provided with the elastic packing plug of through hole including fastening nut, centre
And tubular configured joint, the cap of the fastening nut is provided with through hole, and the head plug of elastic packing plug is mounted in the left end of tubular configured joint
Mouthful, fastening nut is threadedly coupled with the left end of tubular configured joint, and the afterbody of elastic packing plug is located in the cap chamber of fastening nut.
It is frustum type that the centre is provided with the head of the elastic packing plug of through hole, to be tightly connected with tubular configured joint.
The tubular configured joint is a cylindrical tube, and cylindrical tube left end inwall is and elastic packing plug frustum type fit heads
Taper surface, is provided with external screw thread in the outer wall of cylindrical tube left end, to be threadedly coupled with fastening nut.
A kind of method for obtaining ultrahigh vacuum using the lossless ultrahigh vacuum optical fiber gatherer, including following step
Suddenly：
(1) it is bare fibre to choose optical fiber；Optical fiber is passed through into elastic sealing element central through hole, by elastic sealing element frustum head
Portion inserts the left end of tubular configured joint, fastening nut center hole is penetrated optical fiber and rotation is fixed on tubular configured joint, bare fibre
Sequentially pass through fastening nut, middle elastic packing plug, tubular configured joint and the vacuum flange for being provided with through hole and enter vacuum room, rotate
Elastic sealing element is compressed on the inside of cap by fastening nut；(2) prepared using mechanical pump and turbomolecular pump at normal temperatures low
Vacuum；(3) after obtaining coarse vacuum, for the first time fastening nut is fastened, promotes coarse vacuum to keep and improve；(4) vacuum system is dried
Roasting to heat up, the baking temperature and firing rate of ionic pump and transition vacuum pipe are slightly larger than vacuum chamber and optical fiber gatherer；(5)
Intensification is fastened to fastening nut after terminating for the second time；(6) high temperature persistently toasts vacuum system；(7) after high-temperature baking terminates, the 3rd
It is secondary that fastening nut is fastened；(8) vacuum system baking cooling, cooling rate is less than temperature-rise period, according to true in temperature-fall period
Empty pressure change fastens fastening nut in good time, obtains ultrahigh vacuum until final；(9) using high purity liquid to optical fiber gatherer
Hunted leak.
Using this lossless ultrahigh vacuum optical fiber gatherer and its using such gatherer vacuum acquisition methods most
4.0 × 10 can be obtained eventually-8The ultra-high vacuum system of Pa, and laser be transferred through in a fiber gatherer into superelevation it is true
It is lossless in empty process.Different types of optical fiber can be supported by changing elastic sealing element center hole diameter.
The present invention adopts above technical scheme, and the elastic packing plug and tubulose for being provided with through hole including fastening nut, centre connects
Head, tubular configured joint are welded on vacuum flange, and with vacuum chamber insertion.Vacuum flange is using suitable for ultrahigh vacuum
Conflat Flang flanges, abbreviation CF flanges.This flange is connected with vacuum system as encapsulant by oxygen-free copper, Ke Yizhi
Hold ultrahigh vacuum.Bare fibre sequentially passes through elastic packing plug, tubular configured joint and the vacuum flange that fastening nut, centre are provided with through hole
Into vacuum room, as the Circularhole diameter on fastening nut cap is less than elastic sealing element tail diameter, so when fastening spiral shell
When cap rotation is fixed on tubular configured joint, elastic sealing element inwardly can be compressed by nut, and fastening nut rotation is fixed on pipe
On straight coupling, elastic sealing element is further inwardly extruded, elastic sealing element frustum inclined-plane is pressed into tubular configured joint bellmouth
Face is simultaneously in close contact with taper hole face, is compressed optical fiber as elasticity its center Circularhole diameter of material reduces while extruding
And be in close contact, so evacuated interior can be isolated with ambient atmosphere；So as to optical fiber is continued to pass through encapsulation by ambient atmosphere
Device and by laser conduction to vacuum chamber.As optical fiber continues to pass through vacuum environment, packaging system and external environment, optical fiber is without in
It is disconnected, thus laser in transmitting procedure without excess loss.Band protective layer optical fiber can choose polytype optical fiber, in elastic sealing element
Heart perforate can select respective diameters according to variety classes different-diameter optical fiber.
Description of the drawings
Fig. 1 is the structural representation of the present invention；
Fig. 2 is the structural representation of fastening nut of the present invention；
Fig. 3 is the structural representation of tubular configured joint of the present invention；
Fig. 4 is the structural representation of elastic packing plug of the present invention；
Fig. 5 is the ultra-high vacuum system schematic diagram for installing lossless ultrahigh vacuum optical fiber gatherer；
Fig. 6 is that the ultrahigh vacuum for installing lossless ultrahigh vacuum optical fiber gatherer obtains operational flowchart.
Specific embodiment
Specific examples below is for the technical scheme and operating procedure in the present invention with reference to the accompanying drawing in the present invention
Clear, complete description is carried out, but can not specify and limit the scope of the present invention according to this embodiment, this embodiment is this
A part of embodiment of invention, rather than the embodiment of whole.About the technical staff in field, in the spirit without departing from the present invention
With various variant embodiments, therefore the skill of all equivalents on the premise of creative work is not made, can be made in scope
Art scheme falls within the protection category of the present invention, and the scope of patent protection of the present invention should be limited by every claim.
As shown in Figure 1-2, a kind of lossless ultrahigh vacuum optical fiber gatherer in the present embodiment, including fastening nut 1,
Centre is provided with the elastic packing plug 2 and tubular configured joint 3 of through hole, and the cap of the fastening nut 1 is provided with through hole, elastic packing plug
2 head plug is mounted in the left port of tubular configured joint 3, and fastening nut 1 is threadedly coupled with the left end of tubular configured joint 3, and makes elasticity close
The afterbody of blocking 2 is located in the cap chamber of fastening nut 1.
As shown in figure 4, the centre be provided with the elastic packing plug 2 of through hole head be frustum type, so as to tubular configured joint 3
It is tightly connected.
As shown in figure 3, the tubular configured joint 3 is a cylindrical tube, cylindrical tube left end inwall is and 2 frustum type of elastic packing plug
The taper surface of fit heads, is provided with external screw thread in the outer wall of cylindrical tube left end, to be threadedly coupled with fastening nut 1.
The tubular configured joint 3 of the present embodiment adopts stainless steel material, and its right-hand member and CF vacuum flanges are welded, intermediate throughholes and method
Blue vacuum chamber is communicated；Tubular configured joint 3 and fastening nut 1 adopt 1/8 inch model, the taper mask of 3 left end inwall of tubular configured joint
There are 24 degree of taper hole faces；Have frustum type head, head diameter 3.8mm by the elastic sealing element 2 that Teflon material makes, afterbody is
Cylinder, a diameter of 6.1mm, 2 surface smoothness of elastic sealing element are better than 50 microns.2 head plug of Teflon elastic sealing element is filled
Tubular configured joint 3 left port and contact with which with wall taper surface, remainder is located at outside tubular configured joint 3.Teflon elasticity
The a diameter of 0.35mm of 2 central through hole of sealing member.
A kind of method for obtaining ultrahigh vacuum using the lossless ultrahigh vacuum optical fiber gatherer, including following step
Suddenly：
(1) it is Single mode communication optical fiber to choose and import optical fiber 4, and which carries high molecular polymer protective layer, and overall diameter is
0.25mm.Optical fiber is passed through into 2 central through hole of elastic sealing element, 2 frustum head of elastic sealing element is inserted into a left side for tubular configured joint
1 center hole of fastening nut is penetrated optical fiber and rotation is fixed on tubular configured joint 3 by end.Bare fibre sequentially passes through fastening nut
1st, centre is provided with elastic packing plug 2, tubular configured joint 3 and the vacuum flange of through hole and enters vacuum room, rotational fastener nut 1 until
Elastic sealing element 2 is compressed on the inside of cap.1 cap through-hole diameter of fastening nut be less than 6mm, and be less than Teflon elastic packing
The diameter of part 2.The rotation of fastening nut 1 is fixed on tubular configured joint 3,1 inner back side of fastening nut can will be Teflon elasticity close
Sealing 2 is extruded forward, and this causes 2 frustum inclined-plane of Teflon elastic sealing element to be in close contact with 3 inwall tapered slope of tubular configured joint.
After hand Screw fastening nut 1, optical fiber 4 still can with it is pulled slightly outwardly go out.Reuse spanner and fastening nut 1 rotated into 3/4 circle,
Teflon elastic sealing element 2 is pressed further by, now optical fiber 4 cannot be by outside pull-out, and this proves the reduced ferrum of optical fiber 4
Fluorine 2 central through hole of dragon elastic sealing element extruding and close contact, so that reach the effect of sealing.This is to lead with lossless optical fiber
Enter the first step that the ultrahigh vacuum of device is obtained；
(2) coarse vacuum is prepared at normal temperatures using mechanical pump and turbomolecular pump.Installation is lossless ultrahigh vacuum light
After fine gatherer, connect each vacuum component according to Fig. 5 schematic diagrams, vacuum system is by mechanical pump 6, turbomolecular pump 5 and ion
The combination of pump 9 completes vacuum drawn.Lossless ultrahigh vacuum optical fiber gatherer 7 is welded on the flange of vacuum chamber 8.It is first turned on
Mechanical pump 6 and vacuum valve 10 carry out black vacuum preparation, and after half an hour, vacuum pressure reaches 3.0 × 10-2Pa.Later on turbine
Molecular pump 5, vacuum pressure are reduced to 3.4 × 10 rapidly-3Pa, reaches 2.2 × 10 through 6 hours vacuum pressures-5Pa.Open from
Sub- pump after 9,42 hours vacuum pressure reach 1.1 × 10-6Pa.So far coarse vacuum preparation is completed, Fig. 6 is seen；
(3) after obtaining coarse vacuum, for the first time fastening nut is fastened, rotary nut 1/2 is enclosed, promotes coarse vacuum to keep and change
It is kind；
(4) vacuum system baking heats up, and the baking temperature and firing rate of ionic pump 9 and transition vacuum pipe is slightly larger than true
Empty room and optical fiber gatherer.Heat up in 13 hours and complete；9 temperature of final ionic pump toasts 130 degrees Celsius, vacuum transition pipeline
110 degrees Celsius of baking temperature, the vacuum bakeout temperature with optical fiber gatherer 7 are 80 degrees Celsius；
(5) heat up and for the second time fastening nut 1 is fastened after terminating, rotation 1/6 is enclosed；
(6) high temperature persistently toasts vacuum system, and baking continues 36 hours；
(7) after high-temperature baking terminates, for the third time fastening nut 1 is fastened, rotation 1/8 is enclosed；
(8) vacuum system baking cooling, cooling rate is less than temperature-rise period, 14 hours when cooling is shared, in temperature-fall period
Middle to change fastening nut 1 twice according to vacuum pressure, rotation about 1/10 every time is enclosed.Mechanical pump 6 is closed after closing vacuum valve 10
With turbomolecular pump 5.Ionic pump 9 works independently, until final pressure reaches 4.0 × 10-8Pa, realizes ultrahigh vacuum；
(9) optical fiber gatherer is hunted leak using high purity liquid.
Above-described embodiment is only used for being further explained in detail the explanation present invention, rather than the patent model to rights protection of the present invention
Enclose, it is non-that the equivalent structure and operating process completed by all apparatus and method using this patent protection includes carrying out the present invention
The change of creative and unsubstantiality, belongs to protection scope of the present invention.
Claims (4)
1. a kind of lossless ultrahigh vacuum optical fiber gatherer, it is characterised in that：Through hole is provided with including fastening nut (1), centre
Elastic packing plug (2) and tubular configured joint (3), the cap of fastening nut (1) is provided with through hole, elastic packing plug (2)
Head plug is mounted in the left port of tubular configured joint (3), and fastening nut (1) is threadedly coupled with the left end of tubular configured joint (3), and makes elasticity
The afterbody of sealing-plug (2) is located in the cap chamber of fastening nut (1).
2. a kind of lossless ultrahigh vacuum optical fiber gatherer according to claim 1, it is characterised in that：The centre sets
The head for having the elastic packing plug (2) of through hole is frustum type, to be tightly connected with tubular configured joint (3).
3. a kind of lossless ultrahigh vacuum optical fiber gatherer according to claim 2, it is characterised in that：The tubulose connects
Head (3) is a cylindrical tube, and cylindrical tube left end inwall is the taper surface with elastic packing plug (2) frustum type fit heads, is being justified
The outer wall of column jecket left end is provided with external screw thread, to be threadedly coupled with fastening nut (1).
4. described in a kind of any one of employing claim 1-3, lossless ultrahigh vacuum optical fiber gatherer obtains the side of ultrahigh vacuum
Method, it is characterised in that：Comprise the following steps：
(1) bare fibre is sequentially passed through fastening nut, middle elastic packing plug, tubular configured joint and the vacuum flange for being provided with through hole to enter
Enter vacuum room, elastic sealing element is compressed on the inside of cap by rotational fastener nut；
(2) coarse vacuum is prepared at normal temperatures using mechanical pump and turbomolecular pump；
(3) after obtaining coarse vacuum, for the first time fastening nut is fastened, promotes coarse vacuum to keep and improve；
(4) vacuum system baking heats up, and the baking temperature and firing rate of ionic pump and transition vacuum pipe are slightly larger than vacuum chamber
With optical fiber gatherer；
(5) heat up and for the second time fastening nut is fastened after terminating；
(6) high temperature persistently toasts vacuum system；
(7), after high-temperature baking terminates, for the third time fastening nut is fastened；
(8) vacuum system baking cooling, cooling rate are less than temperature-rise period, in good time according to vacuum pressure change in temperature-fall period
Fastening fastening nut, obtains ultrahigh vacuum until final；
(9) optical fiber gatherer is hunted leak using high purity liquid.
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| CN201611149984.5A CN106526770B (en) | 2016-12-14 | 2016-12-14 | A kind of lossless ultrahigh vacuum optical fiber gatherer and method |
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| CN201611149984.5A CN106526770B (en) | 2016-12-14 | 2016-12-14 | A kind of lossless ultrahigh vacuum optical fiber gatherer and method |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108845395A (en) * | 2018-05-25 | 2018-11-20 | 中国科学院合肥物质科学研究院 | Optical fiber crosses vacuum seal structure |
| CN109066229A (en) * | 2018-07-13 | 2018-12-21 | 合肥环城有线电视网络有限公司 | Radio-frequency coaxial connector for cable television system |
| CN110031444A (en) * | 2019-04-22 | 2019-07-19 | 金华职业技术学院 | A kind of method for measuring Raman spectrum under cryogenic conditions |
| CN110119011A (en) * | 2018-02-07 | 2019-08-13 | 深圳市创鑫激光股份有限公司 | Laser lens and the laser export head with the laser lens, laser |
| CN110609066A (en) * | 2018-06-15 | 2019-12-24 | 天津大学 | Temperature-controllable electrolytic cell device simultaneously used for electrochemical experiment and slow strain rate tensile test and use method thereof |
| CN111521269A (en) * | 2020-04-22 | 2020-08-11 | 西北核技术研究院 | Liquid nitrogen refrigeration type infrared focal plane array laser focusing irradiation experimental device and method |
| CN112415690A (en) * | 2020-12-09 | 2021-02-26 | 中国科学院上海微系统与信息技术研究所 | Lossless optical fiber introduction vacuum protection device and vacuum equipment |
| JP2022540381A (en) * | 2019-07-03 | 2022-09-15 | カン、スージャエ | Piping sealing device |
| CN116603163A (en) * | 2022-01-26 | 2023-08-18 | 心擎医疗（苏州）股份有限公司 | Device for assisting heart in the event of failure |
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| CN201017075Y (en) * | 2007-03-23 | 2008-02-06 | 茹志康 | Joint box sealing device rotary compacting sealed ring and automatically enclasping optic cable by cap nut |
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110119011A (en) * | 2018-02-07 | 2019-08-13 | 深圳市创鑫激光股份有限公司 | Laser lens and the laser export head with the laser lens, laser |
| CN108845395A (en) * | 2018-05-25 | 2018-11-20 | 中国科学院合肥物质科学研究院 | Optical fiber crosses vacuum seal structure |
| CN110609066A (en) * | 2018-06-15 | 2019-12-24 | 天津大学 | Temperature-controllable electrolytic cell device simultaneously used for electrochemical experiment and slow strain rate tensile test and use method thereof |
| CN109066229A (en) * | 2018-07-13 | 2018-12-21 | 合肥环城有线电视网络有限公司 | Radio-frequency coaxial connector for cable television system |
| CN110031444A (en) * | 2019-04-22 | 2019-07-19 | 金华职业技术学院 | A kind of method for measuring Raman spectrum under cryogenic conditions |
| CN110031444B (en) * | 2019-04-22 | 2023-08-15 | 金华职业技术学院 | Raman spectrum measuring method under low temperature condition |
| JP2022540381A (en) * | 2019-07-03 | 2022-09-15 | カン、スージャエ | Piping sealing device |
| JP7383309B2 (en) | 2019-07-03 | 2023-11-20 | カン、スージャエ | Piping sealing device |
| CN111521269A (en) * | 2020-04-22 | 2020-08-11 | 西北核技术研究院 | Liquid nitrogen refrigeration type infrared focal plane array laser focusing irradiation experimental device and method |
| CN112415690A (en) * | 2020-12-09 | 2021-02-26 | 中国科学院上海微系统与信息技术研究所 | Lossless optical fiber introduction vacuum protection device and vacuum equipment |
| CN116603163A (en) * | 2022-01-26 | 2023-08-18 | 心擎医疗（苏州）股份有限公司 | Device for assisting heart in the event of failure |
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| CN106526770B (en) | 2019-04-02 |
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