CN106524951A - Method and apparatus for measuring parallelism of germanium window plate - Google Patents
Method and apparatus for measuring parallelism of germanium window plate Download PDFInfo
- Publication number
- CN106524951A CN106524951A CN201611112729.3A CN201611112729A CN106524951A CN 106524951 A CN106524951 A CN 106524951A CN 201611112729 A CN201611112729 A CN 201611112729A CN 106524951 A CN106524951 A CN 106524951A
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- CN
- China
- Prior art keywords
- germanium window
- laser
- parallelism
- germanium
- window plate
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
- G01B11/27—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention provides a method and apparatus for measuring the parallelism of a germanium window plate. The apparatus comprises a helium-neon laser system, an inclination-adjustable platform and a reference plane for receiving the reflected laser and measurement and analysis software thereof. The method includes the steps of gluing the germanium window plate on a photoresist plate and placing on the platform, and adjusting the platform inclination so that the surface of the photoresist is perpendicular to the laser. The parallelism of the upper and lower surfaces of the germanium window is theta = arctan (A / L) / 2, wherein A is the laser reflection offset reflected by the upper surface of the germanium window plate, and L is the distance between the laser receiving plane and the germanium window plate. Visible laser is used to detect the parallelism of infrared germanium window plate. The apparatus has the advantages of relative simple structure and high measurement precision.
Description
Technical field
The invention belongs to field of optical detection, the method and its device of specifically a kind of measurement germanium window depth of parallelism.
Background technology
Optical cement refers to that without adhesive slightly pressure makes two to clean the consistent optical element surface adsorption of smooth dough-making powder shape
Technical process together, is parallel to each other between two smooth glue surfaces after optical cement；And light offset plate refers to that flatness is higher and is used for optical cement
The datum plate of product.
Germanium window is a parallel plane window element in infra-red thermal imaging system in front of detector；It is played through red
The effect of wave section (8 ~ 14 μm) and sealing Dewar flask, thus it is very high to the depth of parallelism requirement of high accuracy germanium window（θ≤10″）,
But as germanium window cannot pass through visible ray, therefore conventional visible optical interferometry, current high-acruracy survey cannot be adopted to be only capable of
Using new day JJ2 digital 2, " optical dividing head is measured, but the equipment is sufficiently expensive, and the depth of parallelism measured only is germanium
The angle on upper and lower two surface of window, not comprising surface planarity information（Germanium window centre of surface low edge cannot such as be embodied high
Impact situation to the depth of parallelism）, it is the inaccurate depth of parallelism, therefore a kind of relatively simple high-acruracy survey side of structure need to be invented
Method and its device.
The content of the invention
The method that the present invention is provided is, by germanium window optical cement to be measured on light offset plate, then to be positioned on platform, by adjustment
Plateau slope makes optical cement plate surface and laser vertical, and the laser amount of shifting of at this moment germanium window upper surface reflection is A, is received
Between the plane and germanium window of laser distance be L, you can draw upper and lower two surface of germanium window the depth of parallelism be θ=arctan (A/
L)/2；Reflection is received using a helium neon laser system, the platform of an adjustable inclination and one according to the method simultaneously
The datum plane of laser and its measurement analysis software are building measurement apparatus.
Description of the drawings
Combine referring to the drawings example the invention will be further described and be as follows：
Fig. 1 is the schematic diagram of a kind of method and its device of measurement germanium window depth of parallelism.
Specific embodiment
On fused quartz light offset plate by the lower surface optical cement of germanium window to be measured in flatness for 100nm so that germanium window
Lower surface is substantially parallel with optical cement plate surface, makes optical cement plate surface and laser vertical by adjusting plateau slope, i.e., so that connecing
The datum plane for receiving reflection laser is interfered with optical cement plate face, forms interference fringe S1, at this moment receives the benchmark of reflection laser
Plane is also interfered with germanium window upper surface, forms interference fringe S2, is drawn through image comparison analysis S1 and S2 maximum inclined
Shifting amount A, it is L to receive distance between the datum plane and germanium window of reflection laser, according to optical reflection principle, optical cement plate surface
The depth of parallelism with germanium window upper surface is θ=arctan (A/L)/2, as lower surface and the optical cement plate surface of germanium window are put down completely
OK, you can the depth of parallelism for drawing upper and lower two surface of germanium window is θ=arctan (A/L)/2, and the depth of parallelism not only contains germanium window
The angle on upper and lower two surface, further comprises the flatness information on upper and lower two surface of germanium window, be the accurate depth of parallelism.
Received using a helium neon laser system, the platform of an adjustable inclination and one according to the method simultaneously and swashed
Building measurement apparatus, its certainty of measurement is up to 2 for the plane of light and its measurement analysis software ", detect that depth of parallelism requirement is enough
10 " germanium window.
Claims (1)
1. it is a kind of measurement the germanium window depth of parallelism method and its device, it is characterised in that:Methods described is by germanium window light to be measured
Glue is on light offset plate, then is positioned on platform, makes optical cement plate surface and laser vertical by adjusting plateau slope, at this moment germanium window
The laser amount of shifting of piece upper surface reflection is A, and it is L to receive distance between the plane and germanium window of laser, you can draw germanium
The depth of parallelism on upper and lower two surface of window is θ=arctan (A/L)/2.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611112729.3A CN106524951A (en) | 2016-12-07 | 2016-12-07 | Method and apparatus for measuring parallelism of germanium window plate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611112729.3A CN106524951A (en) | 2016-12-07 | 2016-12-07 | Method and apparatus for measuring parallelism of germanium window plate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106524951A true CN106524951A (en) | 2017-03-22 |
Family
ID=58341503
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201611112729.3A Pending CN106524951A (en) | 2016-12-07 | 2016-12-07 | Method and apparatus for measuring parallelism of germanium window plate |
Country Status (1)
| Country | Link |
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| CN (1) | CN106524951A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107356548A (en) * | 2017-07-04 | 2017-11-17 | 贵州省分析测试研究院 | For determining the infrared absorption pool device of impurity content in titanium tetrachloride |
| CN110108237A (en) * | 2018-02-01 | 2019-08-09 | 上海信及光子集成技术有限公司 | A kind of optical detection apparatus and detection method of short distance different surfaces parastate |
| WO2020135891A1 (en) * | 2018-12-25 | 2020-07-02 | 茂莱（南京）仪器有限公司 | Laser parallelism detector |
| CN111664814A (en) * | 2020-06-26 | 2020-09-15 | 杨洲 | Method for horizontal optical correction detection of workpiece machining plane |
| CN112304253A (en) * | 2020-09-15 | 2021-02-02 | 电子科技大学 | Non-contact measurement and adjustment method for parallelism and coaxiality of optical mirror |
| CN113814648A (en) * | 2021-08-03 | 2021-12-21 | 东莞市翔通光电技术有限公司 | Flange repairing method and system |
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| US5742383A (en) * | 1996-11-26 | 1998-04-21 | Samsung Electronics Co., Ltd. | Apparatus for measuring degree of inclination of objective lens for optical pickup |
| CN1570555A (en) * | 2003-07-15 | 2005-01-26 | 明基电通股份有限公司 | Micro mirror detecting method and device |
| CN201104223Y (en) * | 2007-09-28 | 2008-08-20 | 孙谦 | Tool laser angle measurer |
| CN102288129A (en) * | 2011-06-22 | 2011-12-21 | 科纳技术(苏州)有限公司 | System for testing surface shape deviation of birefringent crystal optical element |
| CN102927927A (en) * | 2012-11-26 | 2013-02-13 | 昆山北极光电子科技有限公司 | Infinitesimal displacement amplifying method |
| CN103791860A (en) * | 2014-03-07 | 2014-05-14 | 哈尔滨工业大学 | Tiny angle measuring device and method based on vision detecting technology |
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2016
- 2016-12-07 CN CN201611112729.3A patent/CN106524951A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5742383A (en) * | 1996-11-26 | 1998-04-21 | Samsung Electronics Co., Ltd. | Apparatus for measuring degree of inclination of objective lens for optical pickup |
| CN1570555A (en) * | 2003-07-15 | 2005-01-26 | 明基电通股份有限公司 | Micro mirror detecting method and device |
| CN201104223Y (en) * | 2007-09-28 | 2008-08-20 | 孙谦 | Tool laser angle measurer |
| CN102288129A (en) * | 2011-06-22 | 2011-12-21 | 科纳技术(苏州)有限公司 | System for testing surface shape deviation of birefringent crystal optical element |
| CN102927927A (en) * | 2012-11-26 | 2013-02-13 | 昆山北极光电子科技有限公司 | Infinitesimal displacement amplifying method |
| CN103791860A (en) * | 2014-03-07 | 2014-05-14 | 哈尔滨工业大学 | Tiny angle measuring device and method based on vision detecting technology |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107356548A (en) * | 2017-07-04 | 2017-11-17 | 贵州省分析测试研究院 | For determining the infrared absorption pool device of impurity content in titanium tetrachloride |
| CN110108237A (en) * | 2018-02-01 | 2019-08-09 | 上海信及光子集成技术有限公司 | A kind of optical detection apparatus and detection method of short distance different surfaces parastate |
| WO2020135891A1 (en) * | 2018-12-25 | 2020-07-02 | 茂莱（南京）仪器有限公司 | Laser parallelism detector |
| CN111664814A (en) * | 2020-06-26 | 2020-09-15 | 杨洲 | Method for horizontal optical correction detection of workpiece machining plane |
| CN112304253A (en) * | 2020-09-15 | 2021-02-02 | 电子科技大学 | Non-contact measurement and adjustment method for parallelism and coaxiality of optical mirror |
| CN113814648A (en) * | 2021-08-03 | 2021-12-21 | 东莞市翔通光电技术有限公司 | Flange repairing method and system |
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Application publication date: 20170322 |
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