CN104197837B - The non-contact optical measuring method and device of a kind of complex surface object volume - Google Patents
The non-contact optical measuring method and device of a kind of complex surface object volume Download PDFInfo
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- CN104197837B CN104197837B CN201410480881.1A CN201410480881A CN104197837B CN 104197837 B CN104197837 B CN 104197837B CN 201410480881 A CN201410480881 A CN 201410480881A CN 104197837 B CN104197837 B CN 104197837B
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Abstract
The present invention relates to a kind of non-contact optical measuring method of complex surface object volume and device, the device includes micro projector projection lens vertically downward, the first bilateral telecentric lens being arranged right below for projecting cyclic structure light of the micro projector, the rotatable stage being arranged right below for placing complex object to be measured of the first bilateral telecentric lens, the side of the rotatable stage is provided with the second bilateral telecentric lens, and the side of the second bilateral telecentric lens is provided with the ccd video camera being located on its focal plane.The step for present invention does three-dimensionalreconstruction before breaking through previous volume measurement, higher precision is reached with this;Diffusing reflection can be not only measured, and can be measured similar to the complex object such as plasticine surface;Measurement for the contactless precision objects volume of acquisition provides a kind of reliable technique device and method.
Description
Technical field
The present invention relates to a kind of non-contact optical measuring method of complex surface object volume and device.
Background technology
Optical three-dimensional measurement technology is to integrate light, mechanical, electrical and computer technology intelligent, visual high-new skill
Art, is mainly used in being scanned object space profile and structure, to obtain the three-D profile of object, obtains object table millet cake
Three dimensional space coordinate.Traditional non-contact optical three-dimensional measurement technology mainly has time-of-flight method, interferometric method and trigonometry three
Kind.
Time-of-flight method is the time-modulation produced based on 3 d shape to structure light beam, typically using laser, by surveying
Measure the flight time of light wave to obtain range information, make the whole object to be measured of light pulse scans can with reference to additional scanning means
To obtain three-dimensional data.Time-of-flight method exchanges range measurement accuracy for the temporal resolution to signal detection, to obtain height
Measurement accuracy, measuring system is usually used in large scale and measures at a distance it is necessary to have high temporal resolution.
Interferometric method is that by beam splitting system beam of coherent light is divided into measurement light and reference light, using measuring light wave and reference
The coherent superposition of light wave determines the phase difference between two-beam, so as to obtain the depth information of body surface.This method is surveyed
Accuracy of measurement is high, but measurement range is limited by optical wavelength, can only be measured the pattern and micro-displacement of microcosmic surface, is unsuitable for
The detection of large scale object.
Optic triangle method is a kind of the more commonly used optical three-dimensional measurement technology, based on traditional triangulation, is led to
Cross the depth information that tested point calculates the point relative to the angle change that optical reference line skew is produced.According to specific lighting system
Difference, optic triangle method can be divided into two major classes:Passive trigonometry and the active trigonometry based on structure light.Binocular vision is allusion quotation
The passive three-dimensional measurement technology of type, its advantage is its strong adaptability, object can be neatly measured under numerous conditions
Steric information, has the disadvantage to need the problems such as substantial amounts of relevant matches computing and calibration of complex Space geometric parameter,
Measurement accuracy is low, and amount of calculation is larger, is unsuitable for delicate metering, is usually used in identification, understanding and position conformal analysis of objective etc.
Occasion, in aviation field using more.
The content of the invention
In order to overcome the deficiencies in the prior art, connect it is an object of the invention to provide a kind of the non-of complex surface object volume
Touch measuring method and device, not only measure reliable, precision height, and measurement object scope is wider.
To achieve these goals, technical scheme one is:A kind of complex surface object volume it is contactless
Optical measuring device, including projection lens micro projector vertically downward, the micro projector be arranged right below for
Project the first bilateral telecentric lens of cyclic structure light, being arranged right below of the first bilateral telecentric lens is treated for placement
The rotatable stage of complex object is surveyed, the side of the rotatable stage is provided with the second bilateral telecentric lens, second bilateral
The side of telecentric lens is provided with the ccd video camera being located on its focal plane.
Further, it is fixed with and is controlled for the accurate rotation for controlling its anglec of rotation below the rotatable stage
Plate, the peripheral part of the rotation control panel is evenly distributed with multiple light holes, and the side of the rotation control panel is additionally provided with transmission
Formula optocoupler sensor, the transmitting terminal and receiving terminal of the transmission-type optocoupler sensor be symmetrically positioned in the upper and lower of rotation control panel with
Face a light hole.
Further, the rotation control panel is square, and light hole is offered respectively in the middle of its four edge parts.
Further, the rotation control panel is fixed on support frame to support rotatable stage.
Further, the micro projector is fixed on support.
To achieve these goals, technical scheme two is:A kind of complex surface object volume it is contactless
Measuring method, using non-contact optical measurement apparatus as described above, rotation loading is positioned over by complex object to be measured
On platform, and carry out according to the following steps:
(1)There is equidistant black and white cyclic structure light using micro projector projection, after the first bilateral telecentric lens
Exiting parallel is on complex object to be measured, and the cyclic structure light of outgoing produces table due to the irregular modulation on complex object surface
Face texture;
(2)Using ccd video camera, the texture image produced by the second bilateral telecentric lens to complex object surface is carried out
Intake;
(3)The picture of intake is analyzed and processed, the volume algorithm routine write using computer calculates complex object
Partial volume;
(4)Rotatable stage is rotated, 360/n degree is turned over every time;
(5)Repeat n-1 step(2)、(3)、(4)Measurement, until rotatable stage just rotates a circle;
(6)Resulting n partial volumes are post-processed, complex object volume is tried to achieve.
Further, in step(3)In, by the picture absorbed is the half of complex object sectional area, therefore to it
Binaryzation is carried out with obtaining a part of volume using volume integral algorithm after rim detection.
Further, in step(4)In, essence is carried out to the anglec of rotation of rotatable stage using transmission-type optocoupler sensor
Really control.
Further, the rotation control that a peripheral part is evenly distributed with n light hole is fixed below rotatable stage
Plate, is symmetrical arranged the transmitting terminal and receiving terminal of transmission-type optocoupler sensor to face a thang-kng in the upper and lower of rotation control panel
Hole, just can the accurate angle for controlling to turn over every time when light hole has optical signal output.
Further, in step(6)In, described post processing is after summing divided by n/2.
Compared with prior art, the present invention has advantages below:The device has the structure that certain volume is measured before breaking through
Feature, innovatively proposes and projects black and white equidistant projection loop configuration light by bilateral telecentric lens, the depth of parallelism is high, image
Acutance is high, projecting apparatus and video camera formation orthogonal light path, coordinates loop configuration light by manually or electrically rotating rotatable stage,
The step for doing three-dimensionalreconstruction before breaking through previous volume measurement, higher precision is reached with this;The device can not only be measured
Diffusing reflection, and can measure similar to the complex object such as plasticine surface;To obtain the survey of contactless precision objects volume
Amount provides a kind of reliable technique device and method.
The present invention will be further described in detail with reference to the accompanying drawings and detailed description.
Brief description of the drawings
Fig. 1 is the structural representation of the embodiment of the present invention.
Fig. 2 is the sectional view of cyclic structure light.
Fig. 3 is rotation control panel and the cooperation figure of transmission-type optocoupler sensor.
Fig. 4 is the top view of rotation control panel.
In figure:1- micro projectors, 2- the first bilateral telecentric lens, 3- cyclic structure light, 4- complex objects to be measured, 5- rotations
Turn objective table, 6- rotation control panels, 61- light holes, 7- transmission-type optocoupler sensors, 71- transmitting terminals, 72- receiving terminals, 8- supports
Frame, 9- the second bilateral telecentric lens, 10-CCD video cameras.
Embodiment
As shown in Figure 1 and 2, a kind of non-contact optical measurement apparatus of complex surface object volume, including projection lens hang down
Straight downward micro projector 1, the micro projector 1 is arranged right below for project cyclic structure light 3 first pair
Side telecentric lens 2, the rotation loading being arranged right below for placing complex object 4 to be measured of the first bilateral telecentric lens 2
Platform 5, the side of the rotatable stage 5 is provided with the second bilateral telecentric lens 9, and the side of the second bilateral telecentric lens 9 is set
There is the ccd video camera 10 on its focal plane.
In the present embodiment, the rotation for accurate its anglec of rotation of control is fixed with below the rotatable stage 5
Control panel 6, the peripheral part of the rotation control panel 6 is evenly distributed with multiple light holes 61;As shown in figure 3, the rotation control
The side of plate 6 is additionally provided with transmission-type optocoupler sensor 7, the transmitting terminal 71 of the transmission-type optocoupler sensor 7(That is Laser emission
Device)With receiving terminal 72(That is laser pickoff)The upper and lower of rotation control panel 6 is symmetrically positioned in face a light hole 61.
In the present embodiment, as shown in Fig. 3 ~ 4, the rotation control panel 6 is square, in the middle of its four edge parts respectively
Light hole 61 is offered, that is, rotates the edge part of control panel 6 and is uniformly distributed 4 light holes 61, but be not limited thereto.It is described miniature
Projecting apparatus 1 is fixed on support, and the rotation control panel 6 is fixed on to support rotatable stage 5 on support frame 8, passes through rotation
Support frame 8 is rotatable rotatable stage 5.
As shown in Fig. 1 ~ 4, a kind of non-contact optical measuring method of complex surface object volume, using as described above
Non-contact optical measurement apparatus, complex object 4 to be measured is positioned on rotatable stage 5, and is carried out according to the following steps:
(1)There is equidistant black and white cyclic structure light 3 using the projection of micro projector 1, through the first bilateral telecentric lens 2
Exiting parallel is on complex object 4 to be measured afterwards, and the cyclic structure light 3 of outgoing is produced due to the irregular modulation on complex object surface
Raw surface texture;
(2)Using ccd video camera 10, the texture image produced by the second bilateral telecentric lens 9 to complex object surface
Absorbed;
(3)The picture of intake is analyzed and processed, the volume algorithm routine write using computer calculates complex object
Partial volume;
(4)Rotatable stage 5 is rotated, 360/n degree is turned over every time;
(5)Repeat n-1 step(2)、(3)、(4)Measurement, until rotatable stage 5 just rotates a circle;
(6)Resulting n partial volumes are post-processed, complex object volume is tried to achieve.
In step(3)In, by the picture absorbed is the half of complex object sectional area, therefore binaryzation is carried out to it
With obtaining a part of volume using existing volume integral algorithm after rim detection.
In step(4)In, the anglec of rotation of rotatable stage 5 is accurately controlled using transmission-type optocoupler sensor 7
System, be specifically:The rotation control panel 6 that a peripheral part is evenly distributed with n light hole 61 is fixed below rotatable stage 5,
It is symmetrical arranged the transmitting terminal 71 and receiving terminal 72 of transmission-type optocoupler sensor 7 to face one in the upper and lower of rotation control panel 6
Light hole 61, just can the accurate angle for controlling to turn over every time when light hole 61 has optical signal output.
In step(6)In, described post processing is after summing divided by n/2.
In the present embodiment, in step(4)In turn over 90 degree every time, in step(5)In repeat three steps(2)、
(3)、(4)Measurement, in step(6)In four resulting partial volumes are post-processed, that is, sum after divided by two.Certainly, n
Value be not limited thereto, 3,5 ~ 8 grade integers can also be taken.
The foregoing is only presently preferred embodiments of the present invention, all equivalent changes done according to scope of the present invention patent with
Modification, should all belong to the covering scope of the present invention.
Claims (6)
1. a kind of non-contact optical measurement apparatus of complex surface object volume, it is characterised in that:It is vertical including projection lens
Downward micro projector, the first bilateral telecentricity being arranged right below for projecting cyclic structure light of the micro projector
Camera lens, the rotatable stage being arranged right below for placing complex object to be measured of the first bilateral telecentric lens, the rotation
The side for turning objective table is provided with the second bilateral telecentric lens, and the first bilateral telecentric lens and the second bilateral telecentric lens are strict
Orthogonal, the side of the second bilateral telecentric lens is provided with the ccd video camera being located on its focal plane;The rotatable stage
The rotation control panel for accurate its anglec of rotation of control is fixed with below, and the peripheral part of the rotation control panel is evenly distributed with
Multiple light holes, the side of the rotation control panel is additionally provided with transmission-type optocoupler sensor, the transmission-type optocoupler sensor
Transmitting terminal and receiving terminal are symmetrically positioned in the upper and lower of rotation control panel to face a light hole;The rotation control panel is in pros
Light hole is offered respectively in the middle of shape, its four edge parts;The rotation control panel is fixed on support frame to support rotation to carry
Thing platform;The micro projector is fixed on support.
2. a kind of non-contact optical measuring method of complex surface object volume, it is characterised in that:Using described in claim 1
Non-contact optical measurement apparatus, complex object to be measured is positioned on rotatable stage, and is carried out according to the following steps:
(1)There is equidistant black and white cyclic structure light using micro projector projection, it is parallel after the first bilateral telecentric lens
Shine on complex object to be measured, the cyclic structure light of outgoing produces surface line due to the irregular modulation on complex object surface
Reason;
(2)Using ccd video camera, the texture image produced by the second bilateral telecentric lens to complex object surface is taken the photograph
Take;
(3)The picture of intake is analyzed and processed, the volume algorithm routine write using computer calculates the portion of complex object
Partial volume;
(4)Rotatable stage is rotated, 360/n degree is turned over every time;
(5)Repeat n-1 step(2)、(3)、(4)Measurement, until rotatable stage just rotates a circle;
(6)Resulting n partial volumes are post-processed, complex object volume is tried to achieve.
3. the non-contact optical measuring method of complex surface object volume according to claim 2, it is characterised in that:
Step(3)In, by the picture absorbed is the half of complex object sectional area, therefore binaryzation and rim detection are carried out to it
Afterwards a part of volume is obtained using volume integral algorithm.
4. the non-contact optical measuring method of complex surface object volume according to claim 2, it is characterised in that:
Step(4)In, the anglec of rotation of rotatable stage is accurately controlled using transmission-type optocoupler sensor.
5. the non-contact optical measuring method of complex surface object volume according to claim 4, it is characterised in that:
The rotation control panel that a peripheral part is evenly distributed with n light hole is fixed below rotatable stage, in the upper of rotation control panel
Lower section is symmetrical arranged the transmitting terminal and receiving terminal of transmission-type optocoupler sensor to face a light hole, when light hole has optical signal
Just can the accurate angle for controlling to turn over every time during output.
6. the non-contact optical measuring method of complex surface object volume according to claim 2, it is characterised in that:
Step(6)In, described post processing is after summing divided by n/2.
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CN105953749B (en) * | 2016-06-21 | 2018-12-18 | 西安交通大学 | A kind of optical 3-dimensional topography measurement method |
US11578967B2 (en) | 2017-06-08 | 2023-02-14 | Onto Innovation Inc. | Wafer inspection system including a laser triangulation sensor |
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CN114295055A (en) * | 2021-12-31 | 2022-04-08 | 东莞市极末科技有限公司 | Device and method for measuring volume of object |
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