CN106467980B - A kind of assembly auxiliary device of the rectilinear hvpe reactor room of large size - Google Patents
A kind of assembly auxiliary device of the rectilinear hvpe reactor room of large size Download PDFInfo
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- CN106467980B CN106467980B CN201510519116.0A CN201510519116A CN106467980B CN 106467980 B CN106467980 B CN 106467980B CN 201510519116 A CN201510519116 A CN 201510519116A CN 106467980 B CN106467980 B CN 106467980B
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Abstract
A kind of assembly auxiliary device of the rectilinear hvpe reactor room of large size of the present invention is adjusted bearing plate and is formed by top flange, lifting load-bearing pillar, precision.The lifting load-bearing pillar has the limit moving structure that up and down range is adjusted at its both ends, large-scale rectilinear hvpe reactor room is adjusted after overall assembling, load-bearing ratio of the weight on bearing tube and outer tube；The precision adjusts bearing plate, can carry and the concentricity of accurate regulating member, levelness.Assembly auxiliary device provided by the invention, the assembly of large-scale rectilinear hvpe reactor room, it is divided into after the big region A, B two independently assembles, overall package is carried out again, it is inconvenient to assemble caused by efficiently solve due to reaction chamber excessive height, assembly precision, assembly efficiency are significantly improved, and avoids the influence of precision or even stabilization of equipment performance caused by extra dismounting of maintenance when dismounting to upper body.
Description
Technical field
The present invention relates to a kind of assembly auxiliary devices of semiconductor material growth apparatus, more particularly, to a kind of large size
The assembly auxiliary device of rectilinear hvpe reactor room.
Background technique
With the breakthrough of technical research, GaN answering in the various fields such as LED, power device, solar energy, integrated circuit
With rapid development, and hydride gas-phase epitaxy (HVPE) technology is then that can prepare having for GaN substrate quickly, in high quality at this stage
Efficacious prescriptions method controls the stable structure of hvpe reactor room and improves the precision of assembly, speed, can further promote GaN substrate system
Standby technology stability and efficiency.
Hvpe reactor room is generally divided into rectilinear and horizontal two major classes, and rectilinear hvpe reactor room is usually that multilayer is built
Folded structure is developed to 7,11 or even 21 from monolithic, 3, whole height with the continuous expansion of reaction chamber vol
Increase therewith, number of components is increase accordingly, and modular construction is increasingly complex, causes the difficulty of the control and assembly to assembly precision
It greatly promotes.
The core component of rectilinear hvpe reactor room is located at the top of its overall assembling, has positioning accuracy request high, leads to
It is often not easy to consume, be not required to the characteristic of dismounting, and the positioning accuracy request of its underpart component takes second place, and is easily lost, need to often dismount；
It when replacing easy wearing components every time, but needs to carry out multiplicating dismounting to the non-wearing components of upper part, not only increase excessive
Dismounting workload, it is also difficult to control the assembly precision or even stabilization of equipment performance of hvpe reactor room.
Again and hvpe reactor room build-up member is mostly quartz material, and rapid wear is frangible, and repeated disassembled and assembled necessarily accelerates its loss, shadow
Ring the service life of component.
Summary of the invention
In view of the above-mentioned problems, the present invention provides a kind of rectilinear hvpe reactor room assembly auxiliary device of large size, it is by pushing up
Flange, lifting load-bearing pillar, precision adjust bearing plate composition.The rectilinear hvpe reactor room of large size, cross-sectional area are not less than
The area for the circle that diameter is 200 millimeters, its own is highly not less than 1 meter, and installation site is highly not less than 1 meter from the ground, and
The weight of its overall assembling reaches 50kg or more.
The technical solution that the present invention takes: setting lifting load-bearing pillar and precision adjust bearing plate below the flange of top, by pushing up
Flange, lifting load-bearing pillar and precision adjust bearing plate and constitute frame structure, become an independent assembly aids.Root
According to the core of large-scale rectilinear hvpe reactor room and the characteristic of easily loss part, it is classified as the big region A, B two, wherein
A-quadrant is the top of large-scale rectilinear hvpe reactor room, is located above, wherein comprising being usually not easy to consume, be not required to the core of dismounting
Center portion part, and B area is the lower part of large-scale rectilinear hvpe reactor room, below a-quadrant, wherein comprising usually easily consuming,
The accessory of maintenance need to be dismounted.Here it should be pointed out that, the frame structure of assembly aids of the present invention, inside it space, it can
To accommodate and fix the top-i.e. a-quadrant of large-scale rectilinear hvpe reactor room, and large-scale rectilinear hvpe reactor can be born
The top-i.e. of the room total weight of a-quadrant.In assembly, it is classified as seperated assembly, two stages of overall assembling.In fission
The big region A, B two of large-scale rectilinear hvpe reactor room is carried out independent assembly by assembling stage respectively, that is, by its a-quadrant, dress
It fits in servicing unit of the present invention frame and fixes, and by its B area, it is assemblied on the flange of bottom and also fixes；In overall dress
With the stage, by the big region A, B two of the respective rectilinear hvpe reactor room of large size independently assembled, combination installation is formed totally,
That is, bearing tube and outer tube are first installed on the bottom flange for assembled B area, then by auxiliary device frame together with wherein
The a-quadrant assembled is integrally sling and is moved on the bearing tube on the flange of bottom and outer tube, and the group in the big region A, B two is carried out
Installation is closed, utilizes the adjustable carrier characteristic of servicing unit of the present invention at that time, the load-bearing ratio of bearing tube and outer tube is carried out
It adjusts, is finally completed the overall assembling of large-scale rectilinear hvpe reactor room.
The lifting load-bearing pillar, quantity are no less than 3；Its shape can be cylinder, square column or other polygon columns；
Its size and supporting power then can be according to the top-i.e. a-quadrants of the rectilinear hvpe reactor room of large size to be assembled in the frame
Total height and total weight designed；The limit shifting that its fluctuation range is adjusted is provided at lifting load-bearing pillar both ends
Dynamic structure can also be with by adjusting the limit moving structure, can limiting lifting load-bearing pillar and pushing up the relative position between flange
Limit lifting load-bearing pillar and its across precision adjust relative position bearing plate, so that it is anti-to adjust large-scale rectilinear HVPE
Answer room after overall assembling, load-bearing ratio of the weight on bearing tube and outer tube.It particularly points out, in above-mentioned adjustment process
In, the limit moving structures on all lifting load-bearing pillars must keep adjusting it is consistent, with guarantee entirely to hang assembling process it is steady, can
It leans on.
The precision adjusts bearing plate, is hollow plate；The shape and size at its inside and outside edge, can be according in the frame
Top-i.e. the shape of a-quadrant and size of the rectilinear hvpe reactor room of large size to be assembled are designed in frame, but must guarantee should
Maximum outside diameter on plate must not exceed housing bore limited range；Adjusting on bearing plate in precision has fixed lifting load-bearing
The through-hole of column, the lifting load-bearing pillar can pass through through-hole and adjust bearing plate formation with precision and be bonded；Its quantity, shape
Shape and size can be designed according to quantity, shape and the size of matching lifting load-bearing pillar；Bearing plate is adjusted in precision
On be carved with clear location information and (e.g., engrave markings and its calibration information, load bearing component can refer to this information when assembling
Adjusting position is simultaneously reinforced, or setting card slot and its calibration information, and load bearing component can be embedded in card slot and be reinforced when assembling, but simultaneously
It is not limited to described two modes), to adjust the precision of assembly；The plate can be required according to practical set, can only provide precision
Regulatory function or weight-bearing function can also be provided simultaneously with two kinds of functions, but the plate for providing weight-bearing function then requires centainly just
Property.
Auxiliary device of the present invention, operating ambient temperature reach 1300K or more, and in view of hvpe reactor room
The firm degree of cleanliness and frame, selected materials, it is necessary to be resistant to 1300K or more high temperature and it is not volatile and have it is certain just
Property, material can be but not limited to the tungsten of high-purity, molybdenum.
Auxiliary device of the present invention, since it is big to be divided into A, B two by the assembling process of large-scale rectilinear hvpe reactor room
Region is independently assembled, then carries out overall package, is not only efficiently solved because reaction chamber height (is highly not less than from the ground
2 meters) it is excessively high and caused by assemble inconvenient, improve assembly efficiency；And in maintenance, by auxiliary frame together with large-scale rectilinear
After the a-quadrant of hvpe reactor room is integrally removed, it need to only dismantle after its B area replaces its internal wearing components and reset the area B, then go
Overall assembling.The extra dismounting of a-quadrant component is also protected to effectively reduce dismounting workload in this way, not only eliminating
It has held the whole independence of its a-quadrant inner core component and has avoided caused by extra dismounting to equipment precision or even stability
Adverse effect；In servicing unit of the present invention, it is equipped with precision adjusting device, to improve the tune of each component concentricity, levelness
Effect is saved, hvpe reactor room overall assembling is made to reach higher precision.
Detailed description of the invention
Fig. 1 is the structural schematic diagram that auxiliary device is assembled in large-scale rectilinear hvpe reactor room；
Fig. 2 is the structural schematic diagram of large-scale rectilinear hvpe reactor room overall assembling；
Attached drawing mark illustrates 1: top flange 2: lifting load-bearing pillar 3: precision adjusts bearing plate 4: bearing tube 5: bottom flange
6: outer tube.
Specific embodiment
It is illustrated to make the objectives, technical solutions, and advantages of the present invention clearer, it is further to the present invention in conjunction with attached drawing
It is described in detail:
Fig. 1 is the structural schematic diagram that auxiliary device is assembled in large-scale rectilinear hvpe reactor room, and Fig. 2 is large-scale rectilinear HVPE
The structural schematic diagram of reaction chamber overall assembling.Auxiliary device is assembled in the rectilinear hvpe reactor room of large size of the present invention, mainly
It is adjusted bearing plate 3 by top flange 1, lifting load-bearing pillar 2, precision and is formed frame structure；And its main load-supporting part be bearing tube 4,
Bottom flange 5, outer tube 6.
Embodiment one
In the present embodiment, as shown in Figure 1, the lifting load-bearing pillar 2, has 6, be all made of cylindrical structure；The essence
Degree adjusts bearing plate 3, has 3, is circular ring structure, and 6 installations are arranged between the inside and outside edge of plate with fixed circle
Hole can accordingly penetrate 6 lifting load-bearing pillars 2, formed be bonded therewith, and the mode being fixedly connected uses nut check shape
Formula.
To guarantee that frame is resistant to the high-temperature work environment of 1300K, and it is not volatile and there is certain rigidity, lift load-bearing
Column 2, precision adjust bearing plate 3, and material is all made of high-purity molybdenum material, and pushes up flange 1, and local environment temperature is relatively
It is low, 316L stainless steel can be used.
Auxiliary device specifically assembles as follows: adjusting bearing plate 3 with the precision of bottom as benchmark plate, penetrates toward the plate through hole
6 lifting load-bearing pillars 2, then the limit moving structure by adjusting connecting pin limit the precision tune of lifting load-bearing pillar 2 and its bottom end
Save the relative position of bearing plate 3.Then, according to matching requirements, the precision tune on middle layer and upper layer is successively inserted in during equipped
Bearing plate 3 is saved, realizes component load-bearing and the effect that precision is adjusted.After the assembly for completing the component in auxiliary device, lifting top
Flange 1 is attached with lifting load-bearing pillar 2, adjusts the limit moving structure of the connecting pin at this time, limits lifting load-bearing pillar 2 and top
The relative position of flange 1.
As shown in Fig. 2, after respectively complete independently assembles in the big region A, B two of large-scale rectilinear hvpe reactor room, the bottom of at
The main load-supporting part such as bearing tube 4 and outer tube 6 is installed on flange 5.Again by auxiliary device together with having assembled and fixed wherein
Good a-quadrant component, integrally slings and moves on the load-supporting part, carries out the combination installation in the big region A, B two, is finally completed big
The overall assembling of the rectilinear hvpe reactor room of type.In this example, lifting load-bearing pillar 2 and the connection for pushing up flange 1 pass through limit movement
Structure is adjusted to be fixedly connected and (do not set displaced posi), and the precision for lifting load-bearing pillar 2 and bottom adjusts bearing plate 3
Connection adjusts its minimum limit by limiting moving structure, guarantees in the overall assembling for completing large-scale rectilinear hvpe reactor room
Afterwards, the precision of bottom adjusts bearing plate 3 and does not contact with bearing tube 4, that is, realizes the entirety weight of auxiliary device and its built-in a-quadrant
Amount is all born by outer tube 6 and bottom flange 5.
Embodiment two
In the present embodiment, as shown in Figure 1, the lifting load-bearing pillar 2, has 6, be all made of cylindrical structure；The essence
Degree adjusts bearing plate 3, has 3, is circular ring structure, and 6 installations are arranged between the inside and outside edge of plate with fixed circle
Hole can accordingly penetrate 6 lifting load-bearing pillars 2, formed be bonded therewith, and the mode being fixedly connected uses nut check shape
Formula.
To guarantee that frame is resistant to the high-temperature work environment of 1300K, and it is not volatile and there is certain rigidity, lift load-bearing
Column 2, precision adjust bearing plate 3, and material is all made of high-purity tungsten material, and pushes up flange 1, and local environment temperature is relatively
It is low, 316L stainless steel can be used.
Auxiliary device specifically assembles as follows: adjusting bearing plate 3 with the precision of bottom as benchmark plate, which penetrates 6
Root lifts load-bearing pillar 2, then the limit moving structure by adjusting connecting pin, limits the precision tune of lifting load-bearing pillar 2 and its bottom end
Save the relative position of bearing plate 3.Then, according to matching requirements, the precision tune on middle layer and upper layer is successively inserted in during equipped
Bearing plate 3 is saved, realizes component load-bearing and the effect that precision is adjusted.After the assembly for completing the component in auxiliary device, lifting top
Flange 1 is attached with lifting load-bearing pillar 2, adjusts the limit moving structure of the connecting pin at this time, limits lifting load-bearing pillar 2 and top
The relative position of flange 1.
As shown in Fig. 2, after respectively complete independently assembles in the big region A, B two of large-scale rectilinear hvpe reactor room, the bottom of at
The main load-supporting part such as bearing tube 4 and outer tube 6 is installed on flange 5.Again by auxiliary device frame together with having assembled wherein
A-quadrant component, integrally sling and move on the load-supporting part, complete the combination installation in the big region A, B two, realize large-scale vertical
The overall assembling of formula hvpe reactor room.In this example, lifting load-bearing pillar 2 and the connection for pushing up flange 1 pass through limit moving structure tune
Section is is fixedly connected with and (does not set displaced posi), and the connection for lifting the precision adjusting bearing plate 3 of load-bearing pillar 2 and bottom is logical
It crosses limit moving structure and adjusts its displaced posi, guarantee after the overall assembling for completing large-scale rectilinear hvpe reactor room,
Accurate chimeric, the precision adjusting bearing plate 3 of bottom and lifting load-bearing of the bearing plate 3 with bearing tube 4 are adjusted by the precision of bottom
Relative displacement occurs for column 2, that is, the precision for realizing bottom adjusts the overall weight of build-up member on bearing plate 3 and the plate, transmitting
It is born to bearing tube 4 and bottom flange 5；And in auxiliary device and device build-up member remaining weight, then since top flange 1 being hung
It pretends to use, is transferred to outer tube 6 and bottom flange 5 is born.
Embodiment three
In the present embodiment, when certain component in the B area of large-scale rectilinear hvpe reactor room, loss occurs, needs replacing dimension
When repairing, first the a-quadrant by auxiliary frame together with large-scale rectilinear hvpe reactor room is integrally removed；Later, dismantle outer tube 6 and
Bearing tube 4 can carry out dismounting and change to the wearing detail in B area；After completing replacement, along the reverse of disassembly process, first install
Each component in good B area and fixed with bottom flange 5, and bearing tube 4 and outer tube 6 are installed；Finally, auxiliary device frame is connected
It in a-quadrant component wherein, integrally slings and moves on the load-supporting part, carry out the docking in the big region A, B two, be finally completed
The overall assembling of large-scale rectilinear hvpe reactor room.
Its internal wearing components is replaced due to during the disassembly of maintenance, replacement, refitting, need to only dismantle its B area
The area B, then row overall assembling are reset afterwards, eliminate the extra dismounting to a-quadrant component, so that dismounting workload is effectively reduced,
It maintains the whole independence of its a-quadrant inner core component and avoids caused by extra dismounting to equipment precision or even stability
Adverse effect.
Claims (7)
1. a kind of assembly auxiliary device of the rectilinear hvpe reactor room of large size, which is characterized in that by top flange (1), lifting load-bearing
Column (2) and precision adjust bearing plate (3) and constitute frame structure；The lifting load-bearing pillar (2) is equipped with adjustable at its both ends
Limit moving structure；The precision adjusts bearing plate (3), is hollow plate；It is adjusted in precision and is equipped with through-hole on bearing plate (3),
The lifting load-bearing pillar (2) can pass through through-hole and be formed therewith and is bonded；The frame structure, space inside it can
To accommodate the top-i.e. a-quadrant of large-scale rectilinear hvpe reactor room, and the upper of large-scale rectilinear hvpe reactor room can be born
Portion-i.e. the total weight of a-quadrant.
2. the assembly auxiliary device of the rectilinear hvpe reactor room of large size according to claim 1, which is characterized in that described to hang
The quantity of dress load-bearing pillar (2) is no less than 3；The shape of lifting load-bearing pillar (2) is cylinder, square column or polygon column；Its
Size and supporting power then can be according to the top-i.e. a-quadrants of the rectilinear hvpe reactor room of large size to be assembled in the frame
Total height and total weight are designed.
3. the assembly auxiliary device of the rectilinear hvpe reactor room of large size according to claim 1, which is characterized in that described to hang
The limit moving structure for filling load-bearing pillar (2) both ends can limit lifting load-bearing pillar and top method by adjusting its fluctuation range
Relative position between orchid, can also limit lifting load-bearing pillar and its across precision adjust bearing plate relative position.
4. the assembly auxiliary device of the rectilinear hvpe reactor room of large size according to claim 1, which is characterized in that in described
Empty precision adjusts bearing plate (3), and the shape and size inside and outside edge can be according to large sizes to be assembled in the frame
Top-i.e. the shape of a-quadrant and size of rectilinear hvpe reactor room are designed.
5. the assembly auxiliary device of the rectilinear hvpe reactor room of large size according to claim 1, which is characterized in that in precision
Adjust quantity, shape and the size of the through-hole of bearing plate (3), can according to the quantity of matching lifting load-bearing pillar, shape and
Size is designed.
6. the assembly auxiliary device of the rectilinear hvpe reactor room of large size according to claim 1, which is characterized in that precision tune
Location information is carved on section bearing plate (3).
7. the assembly auxiliary device of the rectilinear hvpe reactor room of large size according to claim 1, which is characterized in that described auxiliary
Device is helped, material must be resistant to the high-temperature work environment of 1300K or more, and material is tungsten or molybdenum.
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| CN201510519116.0A CN106467980B (en) | 2015-08-21 | 2015-08-21 | A kind of assembly auxiliary device of the rectilinear hvpe reactor room of large size |
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| JP7204883B2 (en) | 2018-07-30 | 2023-01-16 | エルジー エレクトロニクス インコーポレイティド | clothing processing equipment |
| CN108731757A (en) * | 2018-08-08 | 2018-11-02 | 合肥精都机电仪表有限公司 | A kind of scraper type flowmeter being easily installed |
| CN114892265A (en) * | 2022-04-13 | 2022-08-12 | 中国电子科技集团公司第四十八研究所 | Epitaxial growth reaction device |
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