CN202678298U - Vertical type quartz cage boat - Google Patents
Vertical type quartz cage boat Download PDFInfo
- Publication number
- CN202678298U CN202678298U CN 201220302921 CN201220302921U CN202678298U CN 202678298 U CN202678298 U CN 202678298U CN 201220302921 CN201220302921 CN 201220302921 CN 201220302921 U CN201220302921 U CN 201220302921U CN 202678298 U CN202678298 U CN 202678298U
- Authority
- CN
- China
- Prior art keywords
- quartz
- quartzy
- cage boat
- fluting
- vertical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Abstract
The utility model relates to the field of quartz products, particularly to a vertical type quartz cage boat. The cage boat comprises slotted quartz rods and an upper base plate and a lower base plate which is parallel with each other and fixed on two ends of the slotted quartz rods, the slotted quartz rods and the upper and lower base plates are vertically fixed, and the cage boat is characterized in that a plurality of ring pieces are welded between the slotted quartz rods, and three quartz support frames are welded on an upper surface of each ring piece. According to the vertical type quartz cage boat, the structure is optimized in the ring pieces and the quartz support frames, the stability of the vertical type quartz cage boat is improved, thus the operational stability of a mechanical arm is improved, and the production efficiency is improved.
Description
Technical field
The utility model relates to the quartz ware field, particularly relates to a kind of vertical quartzy cage boat.
Background technology
Quartz glass product is widely used in microelectronic industry integrated circuit (IC) chip manufacturing industry with its good physicochemical characteristics.Vertical quartzy cage boat is the chip carrier that the IC Chip Production line adopts, the general important procedures such as Implantation, low pressure chemical vapor deposition, polycrystalline silicon growth that are used for, required precision is very high, every wafer all must have accurately location in boat, realize Robot actions fully, so the stability requirement of vertical quartzy cage boat is very high.Four flutings of the general employing of existing vertical quartz boat agent structure quartz pushrods, block carrier by four grooves on four quartz pushrods, constantly produce friction in the process between carrier and draw-in groove repeatedly taking, putting, make it the wearing and tearing of draw-in groove endosexine, and the gap between carrier is increasing, therefore cause the carrier position that slightly has on the vibration vertical quartz boat that variation has just occured, even landing, the while also can affect the reliability of Robot actions.
Summary of the invention
For the deficiency in the above-mentioned field, the utility model provides a kind of vertical quartzy cage boat, and it is little to the friction of supporter when inserting silicon chip, makes supporter not easy to wear, and stability is very good, is specially adapted to the structure of large-scale vertical quartzy cage boat.
Vertical quartzy cage boat, comprise fluting quartz pushrod and the upper and lower chassis that is parallel to each other of being fixed in fluting quartz pushrod two ends, described fluting quartz pushrod is vertical with upper and lower chassis fixing, it is characterized in that, be welded with the some ring plates that are parallel to upper and lower chassis between the described fluting quartz pushrod, the upper surface of every ring plate is welded with three quartzy bracing frames.
Described three quartzy bracing frames are evenly distributed on the same circumference.
Described fluting quartz pushrod is four, is trapezoidal profile, and is positioned on the same circumference.
The lower surface of described low bottom-disc is provided with the boss with production line phase buckle.
Be fixed with in the horizontal direction some pitmans between described four fluting quartz pushrods.
Described pitman is arc, is fixed on the fluting quartz pushrod that is positioned at the trapezoidal hypotenuse two ends, and the center of its arc is concentric with trapezoidal center.
Described upper and lower chassis is annulus.
For better guaranteeing the stability of vertical quartzy cage boat, reduce mutually wearing and tearing, can be welded with one group of ring plate at the fluting quartz pushrod, need three quartzy bracing frames of welding every layer of ring plate, can hold the contact area that carrier has reduced again carrier and ring plate.On the even circumference of preferred three bracing frames, increased the stability of carrier.
The vertical quartzy cage boat of the utility model, adopt four fluting quartz pushrods, because the inner wafer that will place the employing of IC Chip Production line, four fluting quartz pushrods must be on same circumference, for guaranteeing the stability of carrier, four fluting quartz pushrods are trapezoidal profile, and then carrier can be sidelong from one of trapezoidal long limit into or be taken out.
For solving the stability problem of vertical quartzy cage boat position, the utility model is designed to boss structure with production line phase buckle with vertical quartzy cage boat lower surface.On the horizontal plane of production line corresponding groove can be set, boss is stuck in the groove, the loading of vertical quartzy cage boat will be quite steady.
For better guaranteeing the stability of vertical quartzy cage boat, very high such as quartzy cage boat height, and the carrier of placing is a lot, can be fixedly connected with rod to increase stability between the fluting quartz pushrod.Preferably pitman is placed trapezoidal hypotenuse side.
Annular can be arranged in the chassis, makes carrier be in upper and lower penetrating state in vertical quartzy cage boat.
The utility model is optimized structure from aspects such as loading ring plate, quartzy bracing frames, has improved the stability of vertical quartzy cage boat, thereby has improved the operational stability of manipulator, has improved production efficiency.
Description of drawings
Fig. 1 the utility model front view,
A-A is to cutaway view among Fig. 2 Fig. 1, and each label lists as follows among the figure:
1-fluting quartz pushrod, 2-top bottom-disc, 3-low bottom-disc, 4-ring plate, 5-quartzy bracing frame, 6-boss, 7-pitman.
Embodiment
As shown in Figure 1, 2, the vertical quartzy cage boat of the utility model, comprise fluting quartz pushrod 1, with the top bottom-disc that is parallel to each other 2 and the low bottom-disc 3 that are fixed in fluting quartz pushrod 1 two ends, be welded with some ring plates 4 between the fluting quartz pushrod 1, at three quartzy bracing frames 5 of every ring plate 4 welding, three quartzy bracing frames are evenly distributed on the same circumference of ring plate upper surface, thereby can the positioning supports carrier, reduced simultaneously the wearing and tearing of 4 pairs of carriers of ring plate, guaranteed again the stability of loading.
The utility model adopts four fluting quartz pushrods 1, is trapezoidal profile, and is positioned on the same circumference, guarantees the stability of loading, and carrier can be sidelong from one of trapezoidal long limit into or take out.
The lower surface of low bottom-disc 3 is provided with the boss 6 with production line phase buckle, can with the groove phase buckle of relative set on the horizontal plane of production line, it will be quite steady making the loading of vertical quartzy cage boat.
Very high such as vertical quartzy cage boat height, and the carrier of placing is a lot, can be fixedly connected with rod 7 to increase stability between fluting quartz pushrod 1.Preferably pitman 7 is placed trapezoidal hypotenuse side, pitman 7 is designed to arc, is fixed on the fluting quartz pushrod 1 that is positioned at the trapezoidal hypotenuse two ends, and the center of its arc is concentric with trapezoidal center, improves the stability of whole vertical quartzy cage boat.
Described upper and lower chassis 2,3 can be annulus, makes carrier be in upper and lower penetrating state in vertical quartzy cage boat.
The utility model is optimized structure from aspects such as loading ring plate 4, quartzy bracing frames 5, has improved the stability of vertical quartzy cage boat, thereby has improved the operational stability of manipulator, has improved production efficiency.
Claims (7)
1. vertical quartzy cage boat, comprise fluting quartz pushrod and the upper and lower chassis that is parallel to each other of being fixed in fluting quartz pushrod two ends, described fluting quartz pushrod is vertical with upper and lower chassis fixing, it is characterized in that, be welded with the some ring plates that are parallel to upper and lower chassis between the described fluting quartz pushrod, the upper surface of every ring plate is welded with three quartzy bracing frames.
2. vertical quartzy cage boat according to claim 1, it is characterized in that: described three quartzy bracing frames are evenly distributed on the same circumference.
3. vertical quartzy cage boat according to claim 1, it is characterized in that: described fluting quartz pushrod is four, is trapezoidal profile, and is positioned on the same circumference.
4. vertical quartzy cage boat according to claim 3 is characterized in that: be fixed with in the horizontal direction pitman between described four fluting quartz pushrods.
5. vertical quartzy cage boat according to claim 4, it is characterized in that: described pitman is arc, is fixed on the fluting quartz pushrod that is positioned at the trapezoidal hypotenuse two ends, the center of its arc is concentric with trapezoidal center.
6. arbitrary described vertical quartzy cage boat according to claim 1-5, it is characterized in that: described upper and lower chassis is annulus.
7. vertical quartzy cage boat according to claim 1, it is characterized in that: the lower surface of described low bottom-disc is provided with the boss with production line phase buckle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220302921 CN202678298U (en) | 2012-06-25 | 2012-06-25 | Vertical type quartz cage boat |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220302921 CN202678298U (en) | 2012-06-25 | 2012-06-25 | Vertical type quartz cage boat |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202678298U true CN202678298U (en) | 2013-01-16 |
Family
ID=47499182
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220302921 Expired - Lifetime CN202678298U (en) | 2012-06-25 | 2012-06-25 | Vertical type quartz cage boat |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202678298U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103474382A (en) * | 2013-09-06 | 2013-12-25 | 济南科盛电子有限公司 | Quartz bearing boat |
-
2012
- 2012-06-25 CN CN 201220302921 patent/CN202678298U/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103474382A (en) * | 2013-09-06 | 2013-12-25 | 济南科盛电子有限公司 | Quartz bearing boat |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN201556614U (en) | Vertical quartz boat | |
| KR101920261B1 (en) | Carrier for a substrate and method for carrying a substrate | |
| US10319614B2 (en) | Wafer leveling device | |
| KR20080062820A (en) | Glass surport pin, and carrier surface plate | |
| CN104008986A (en) | Wafer expander with high expansion uniformity | |
| CN202678298U (en) | Vertical type quartz cage boat | |
| CN207781561U (en) | A kind of cassette structure and diffusion furnace | |
| CN209766388U (en) | Mechanical arm for efficient wafer transmission | |
| CN204080026U (en) | A kind of heat treatment tooling for small dimension module | |
| CN110610886A (en) | Quartz boat structure | |
| CN105586578A (en) | Slide disc transferring device for chemical vapor deposition equipment | |
| CN108087490A (en) | A kind of expansion type precision instrument carrying machinery | |
| JP2008112902A (en) | Supporting method and supporting structure of substrate | |
| CN102142387B (en) | Vertical crystal boat for semiconductor equipment for heat treatment | |
| KR101281403B1 (en) | Epitaxial reactor and lift pin for the same | |
| KR101189779B1 (en) | Substrate holding apparatus | |
| CN212874439U (en) | Wafer high temperature treatment is with bearing device | |
| CN220543875U (en) | Adsorption and hollow integrated slide table device for silicon carbide wafer | |
| CN214672564U (en) | Supporting structure of wafer loading and unloading position | |
| CN216311735U (en) | Novel wafer carrier | |
| CN218657647U (en) | Slide glass base dismouting device | |
| CN211334183U (en) | Transfer mechanism of contact lens mold | |
| CN207380222U (en) | A kind of light bulb quality inspection device | |
| CN106737295A (en) | Pin type part production fixture | |
| CN103928369B (en) | Inp wafer annealing box |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address |
Address after: No.6, Fuxing 3rd Street, development zone, Fuxian Town, Tongzhou District, Beijing Patentee after: BEIJING KAI DE QUARTZ Corp. Address before: 101109 No.6, Fuxing 3rd Street, Industrial Development Zone, Fuxian Town, Tongzhou District, Beijing Patentee before: BEIJING KAIDE QUARTZ Co.,Ltd. |
|
| CP03 | Change of name, title or address | ||
| CX01 | Expiry of patent term |
Granted publication date: 20130116 |
|
| CX01 | Expiry of patent term |