CN106461120A - Closure or airlock device for a vacuum chamber - Google Patents
Closure or airlock device for a vacuum chamber Download PDFInfo
- Publication number
- CN106461120A CN106461120A CN201580030603.9A CN201580030603A CN106461120A CN 106461120 A CN106461120 A CN 106461120A CN 201580030603 A CN201580030603 A CN 201580030603A CN 106461120 A CN106461120 A CN 106461120A
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- China
- Prior art keywords
- backplate
- closing cap
- closing
- spacing
- magnet apparatus
- Prior art date
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
- F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
- F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/30—Details
- F16K3/314—Forms or constructions of slides; Attachment of the slide to the spindle
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K37/00—Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
- F16K37/0025—Electrical or magnetic means
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Pressure Vessels And Lids Thereof (AREA)
- Sliding Valves (AREA)
- Magnetically Actuated Valves (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
- Indication Of The Valve Opening Or Closing Status (AREA)
Abstract
The present invention relates to a closure or airlock device for a vacuum chamber (12) having: a counterplate (16) which can be arranged on a vacuum chamber (12) and encloses an opening (14) of the vacuum chamber (12), a closure cover (18) which is mounted so as to be able to move relative to the counterplate (16) and which, in a closed position (28) on the counterplate (16), closes the opening (14), at least one controllable magnet device (30), in engagement with the counterplate (16) and the closure cover (18), for generating a closure force (S) acting between the counterplate (16) and the closure cover (18), and at least one separation measuring device (40) for measuring a separation (41) between the closure cover (18) and the counterplate (16), wherein the magnet device (30) can be controlled in dependence on the separation (41), measured by the separation measuring device (40), between the counterplate (16) and the closure cover (18).
Description
Technical field
The present invention relates to a kind of locking device for vacuum chamber or valve system, have：One may be arranged at vacuum chamber
Go up and surround the backplate (Gegenplatte) of described one opening of vacuum chamber, and one with respect to described backplate movingly
The closing cap of setting, described closing cap is closed described true in closing position (Verschlussstellung) on described backplate
The opening of cavity.Additionally, the present invention relates to a kind of be used for carrying out closed vacuum cavity and opening by means of a this kind of closing or valve system
The method of mouth.
Background technology
Gate and locking device for vacuum chamber are fully known in the prior art.For example, WO 2005/
121621 A1 describe a kind of such valve system, for a wall portion being arranged between the first and second recipients
Gate opening, and there is a blocking mechanism (Absperrorgan) being arranged in the first recipient inner chamber and one be attached to
The backplate of this blocking mechanism.Here, the backplate that flange form designed and surrounded described opening is provided with an annular seal, close
Latch mechanism hermetically compresses with respect to this seal.
For the sealing required for maintaining, especially for the high vacuum condition maintaining vacuum chamber, it is worth pursuing
Be：Blocking mechanism be pressed to as homogeneously as possible described seal peripherally direction around described opening region arranged apart
On.Blocking mechanism or closing cap size several decimeters or meter in the range of, and seal diameter be several millimeters in the case of,
The extruding force being applied to uniformity on whole seal on described seal is especially difficult in terms of structure and manufacturing technology.
It has proven convenient that in such as 0.5 to 5m2Or pact sealing ring being made compress is realized on the closing cap area of more high scope
The stroke (Hubs) of 0.5mm to 2mm is extremely expensive in structure and manufacturing technology.Additionally, in the environment of vacuum chamber, by
In the steric requirements needing cleaning, and need no graininess therewith, therefore, the backplate that often made by metal and closing cap straight
Contact is touched and will be avoided anyway.
When closing to locking device or valve system, seal and the metal parts abutting on this seal it
Between, in fact it could happen that shearing motion typically between seal and closing cap, equally, for the clean space required for maintaining
The reason condition and no graininess, such shearing motion will avoid anyway or be reduced to minimum degree.
Additionally, generally by elastomer material, such as the seal made by rubber it may happen that ageing process, and it
Elastic characteristic with incessantly using closing or valve system it may happen that change.It is still further contemplated that with difference
Vacuum or stress level running described vacuum chamber.If closing or valve system make the inside of vacuum chamber with respect to atmosphere
Enclose or other environmental pressure, for example with respect to adjacent vacuum chamber different pressures seal, then be expressed on seal squeeze
Pressure can change according to the pressure being respectively acting in vacuum chamber, and is likely to occur seal and closing or valve system
Relative motion between metal part.
Thus, the task of the present invention is to provide the closing for vacuum chamber or valve system and one of a kind of improvement
Kind of the related method for closed vacuum cavity, by means of its can by clear stipulaties and especially uniform extruding force be applied to close
On sealing, and can accurately adjust out default spacing or required between the backplate of housing side and closing cap by means of it
Gap degree.Additionally, extra high no particle degree in vacuum cavity region should be obtained in that using this device.Additionally, envelope
Close or valve system should by smaller weight and by the simple and good handlability of its each single part,
Make and operation aspect is had outstanding performance.
Content of the invention and preferred embodiment
This task utilizes the closing of independent claims 1 or valve system and according to claim 12 true for closing
The method of cavities open is solving.Here, favourable design is the theme of dependent claims respectively.
Thus, closing or the valve system for vacuum chamber is provided.This closing or valve system have one can cloth
Put in backplate on vacuum chamber or being disposed thereon, being optionally integrated in vacuum chamber or be connected with a cavity wall, this backplate
One opening in wrapped vacuum chamber.Backplate is normally constructed to flange form.This backplate can be outwardly from the wall portion of vacuum chamber, and
Constitute or there is one approximately along the contact surface extending through vacuum chamber opening perpendicular to Way in (Einf ü hrrichtung)
Additionally, closing or valve system also have a closing cap movingly arranging with respect to backplate.This closing cap
The opening of described vacuum chamber is closed in a closing position on backplate.Closing cap especially can be quiet from being spaced apart with backplate
Stop or initial position transfers to a contact position with backplate, and be eventually transferred into a closing position, in this closing position,
Closing cap hermetically abuts on backplate, and thus airtightly encloses the opening of vacuum chamber.
Additionally, closing or valve system have that at least one is connected with backplate and closing cap, can adjust and/or controllable
Magnet apparatus.This magnet apparatus is configured to produce the closing force (S) working between backplate and closing cap.By
In adjustable magnet apparatus, the numerical value of closing force working between backplate and closing cap and direction can be changed.According to
The difference of the specific design scheme of magnet apparatus, not only can apply attraction on closing cap, but also can apply to repel
Power, to close in selection way by means of closing cap or beat according to the stress level acting in vacuum chamber and vacuum chamber environment
Open the opening of vacuum chamber.
Additionally, closing or valve system have surveying at least one spacing measuring the spacing between closing cap and backplate
Amount device.By means of gap measuring device, can at least point by point (Punktuell) along the closing force sending from magnet apparatus
Direction is measuring the spacing between closing cap and backplate.Spacing between closing cap and backplate is to being arranged on backplate and closing cap
Between the current actual compression of seal or one kind of elastic deformation measure, premise is that closing cap abuts in shield by seal
On plate.Therefore, the degree of seal elastic deformation can be measured by means of gap measuring device.
Additionally, also setting up for closing or valve system：Magnet apparatus can according between backplate and closing cap by spacing
The spacing that measurement apparatus measure makes adjustments.By the thus set regulation related to spacing of magnet apparatus, permissible
Produce different closing forces according to spacing, so that the seal being for example arranged between backplate and closing cap is compressible to one
The degree of individual needs.By means of gap measuring device and thus set reverse with least one magnet apparatus described
Coupling (R ü ckkopplung), may detect the different conditions of closing or valve system.
For example can be measured by means of gap measuring device, whether backplate and closing cap are and sealed with which kind of degree
Against each other.If spacing is higher than for example the maximum being provided for sealing enough, then by means of adjustable magnet apparatus
For example step by step following can improve closing force for a long time, until less than maximum allowable maximum spacing.
Otherwise additionally, then it is contemplated that when detecting or measure the too little spacing between backplate and closing cap, worrying
Backplate generally made by metal and the directly contact of closing cap.This point is especially for required nothing in vacuum chamber environment
How the reason graininess is regardless of whether will avoid.In such cases, closing force can for example reduce according to numerical value step by step, directly
To the minimum spacing allowing exceeding between closing cap and backplate.
Thus, by means of the related regulation of magnet apparatus and spacing and manipulation it is also possible to different to vacuum chamber or
The stress level changing in time is reacted.Different by the pressure between vacuum chamber and environment, or pass through
This side of closing cap is different from pressure over there, and itself just can apply closing force or tensile force on closing cap.By
In with spacing relatively adjustable magnet apparatus, changing pressure change can be compensated in the opposite side of closing cap.
In one embodiment, described magnet apparatus have at least being arranged on one of closing cap and backplate
Individual electromagnetic actuators and be arranged in closing cap and backplate another at least one counterpart (Gegens t ü ck), institute
State at least one counterpart magnetically to interact with magnet actuators.Electromagnetic actuators for example can be arranged on backplate or fill
Enter in backplate, and counterpart can be arranged on closing cap.Here it is also contemplated that counterpart is integrated in closing cap, or
Whole closing cap works as counterpart.
Or counterpart or closing cap are designed to ferromagnetism, or being designed to permanent magnetism, so as to be loaded with corresponding control
The electromagnetic actuators of electric current occur magnetic action to connect.In closing cap in the closing position on backplate, closing cap is completely and true
The open cross-section of cavity is overlapping, and in this closing position, electromagnetic actuators and the counterpart belonging to it at least regionally reach
To overlap, so that enough closing forces or tensile force can be produced.
In general manner also, it is contemplated that the electromagnetic actuators of magnet apparatus are arranged on closing cap, and and electromagnetic actuators
The counterpart magnetically interacting is arranged on backplate or is built into thereon.
Additionally, with electromagnetic actuators be arranged in unrelated on closing cap or backplate, can also be disposed with thereon electromagnetism cause
At least one other permanent magnet is arranged on that part of dynamic device, this permanent magnet can also be supported from Electromagnetically actuated further again
The power that device sends.Thus for example can realize the currentless of closing cap and remain turned-off (Zuhalten), so that actuator
Coil can much lower current strength be loaded.The heat loss of coil and therefore generation cooling or thermal expansion in terms of
Problem can thus be reduced or even and be removed.
According to an improvement project, it is additionally provided with least one electrical adjustment loop, this electrical adjustment loop is surveyed with spacing
Measure device and couple with least one magnet apparatus described, and be designed to maintain and/or adjust between backplate and closing cap
Preset pitch.Regulating loop generally has a rated value transmitter (Sollwertgeber), is sent by means of this rated value
Device makes the distance signal that can be produced by pitch sensors and default rated value be compared.Ratio by rated value and actual value
Relatively, add and be connected to an adjuster of rated value transmitter and can produce a control signal, for manipulating magnet apparatus, outstanding
It is for manipulating electromagnetic actuators.
Here, the control signal that can be produced by adjuster is generally fed to the Electromagnetically actuated of magnet apparatus by amplifier
Device.By means of electrical adjustment loop, the active and automatic of achievable closing force is adjusted.In this way it is possible to dynamically
And relatively flexibly reply runs or environmental condition may change suddenly or continuously with state, therefore for example to vacuum chamber
The different change of pressure between environment is reacted.By means of making gap measuring device and magnet apparatus tune coupled to each other
Section loop, can cause and controllably maintain required spacing between backplate and closing cap, and required for this closing cap
Extruding force, and the compression being arranged on the therefore generation of the seal between backplate and closing cap.
According to another design, between closing cap and the face facing with each other in closing cap closing position of backplate
Intermediate gaps (Zwischenraum) in, in closing cap or being elastically compressed of an encirclement opening is disposed with backplate
Seal.Described seal can for example be arranged on backplate.For this reason, backplate for example can have a wrapped vacuum chamber opening
Groove, in the cell arrange lip ring.Under unpressed original state, the thickness of seal section or with diameter greater than connecing
Receive the depth of the groove of described seal so that a part for seal from backplate in the face of closing cap face project, therefore by
The contact surface that backplate is constituted at least slightly projects.By this design, closing cap hermetically can be reclined with seal,
Metal parts without making backplate and closing cap is touched each other.
The face facing with each other of closing cap and backplate is typically at least regionally designed as flat contact surface, this flat contact
Face is substantially perpendicular to by the default direction (z) of vacuum chamber opening geometry in closing position, or perpendicular to along from
The closing direction that the closing force that magnet apparatus send works extends.
Seal generally to be made by an elastomer, and has the elasticity being applied to the application target being respectively provided with
Or compressibility.Additionally, by means of magnet apparatus closing force according to spacing the regulation made it is also contemplated that：Also in its bullet
Property characteristic or mechanical property aspect, be respectively directed to close or valve system different application targets using different seals.Borrow
Help the regulation made according to spacing, described closing force can make closing or valve system is adaptively adapted to be respectively provided with close
The different or changing elastic characteristics of sealing.
According to another design, one in the face facing with each other in closing cap closing position of closing cap and backplate
On face, arrange at least one spacing keeper being made of plastics, this spacing keeper prevention backplate is directly connect with closing cap
Tactile position.Spacing keeper has the elasticity less than the seal being arranged between closing cap and backplate or compressibility.Between
Can be disposed adjacent to the seal of backplate away from keeper or be arranged on closing cap.Spacing keeper is with regard to backplate and/or envelope
For closing the face normal of lid contact surface, there is the structure height lower than such height as follows：Seal is uncompressed initial
Projected from its contact surface that belongs to of closing cap or backplate with described height under state.
Spacing keeper is implemented as the form of end stop (Endanschlag), to avoid backplate and closing cap
Direct metal contact.Additionally, in adjusting and running, also should avoid spacing keeper and closing cap and connect while with backplate
Touch.But, spacing keeper is especially also used for the calibration of gap measuring device.Therefore, it can in the first step with such as lower section
Formula manipulates described magnet apparatus, i.e. closing cap no compressively touches described seal.Maximum adjustable of this positional representation or can
The spacing adjusting.In the second step, magnet apparatus manipulate as follows, i.e. spacing keeper not only with closing cap, and
Recline with backplate.This position corresponds to minimum, spacing to be adjusted.
Then, the pitch sensors of described gap measuring device can be calibrated from minimum and maximum spacing.Between this two
Away from can derive relative regulation or moving range.Thus can compensate or eliminate pitch sensors for example on backplate
Possible loading tolerance.This kind of calibration is particularly with the multiple spacing sensings being arranged at least one of closing cap and backplate
Device is favourable.
Generally, spacing keeper is arranged on backplate together with seal.But it is also contemplated that, spacing keeper and close
Sealing is arranged in closing cap on the face of backplate.It is also contemplated that seal and spacing keeper are on backplate and closing cap
Different arrangements.Seal for example can be arranged on backplate, and spacing keeper is arranged on closing cap.Equally can examine
Consider contrary scheme：The spacing keeper of the seal of closing cap side and backplate side.
With the geometry of seal and with receive seal groove geometry compared with, spacing keeper is with such as lower section
Formula is tested to be sized, i.e. when seal is almost maximally by compression or elastic deformation, for example, be arranged on backplate or closing cap
Spacing keeper ability and two parts, that is, backplate and closing cap reach the position that reclines.Protected by means of at least one spacing described
Gripping member, preferably by means of the multiple spacing keepers circumferentially dividually arranged around opening, backplate and closing cap can be avoided
Direct metal contacts.
According to another design, in the periphery of opening, or the periphery of the backplate in the design of such as flange form, dividually cloth
Put multiple magnet apparatus being respectively equipped with a gap measuring device of oneself.Multiple arranged apart in open circumferential by providing
Magnet apparatus, especially uniform extruding force and the closing force between backplate and closing cap can be adjusted out.Thus can also be real
Existing, compensate the possible deformation of backplate and/or closing cap by regulation technology or make inaccuracy.
Each of gap measuring device coupling with magnet apparatus respectively, can be self-supporting to a certain extent
Self-sustaining ground is only default between the position adjustment of corresponding gap measuring device or magnet apparatus and maintenance backplate and closing cap
Spacing.Thus, closing cap and pressure correlation and inevitably minimum deformation, originally can lead to uneven extruding force or
Closing force, now can valuably be compensated, and can resist between closing cap and backplate, each in the spacing of open circumferential change
From uneven gap degree.
The possible deformation caused by or making related to load or component tolerance can be compensated on regulation technology.
By means of the multiple magnet apparatus being respectively equipped with a gap measuring device of oneself, can be in open circumferential or in backplate periphery
Partly produce different closing forces and squeeze pressure, so that result obtains and controllably can adjust out to the greatest extent may be used of seal
Can uniformly compress, this compression finally results in closing or the required sealing of valve system.In actual applications, this design
Scheme is particularly advantageous, that is, especially when at least one of closing cap and backplate not by absolute rigidity construct and/or with negative
When load relatively stands local deformation.
By means of the multiple magnet apparatus being respectively equipped with a gap measuring device, can eliminate and mend on regulation technology
Repay this kind of effect.Planform for closing cap and/or backplate is it might even be possible to accept to become than larger component tolerance or machinery
Shape, even if so that for closing cap and backplate the large-area design of comparison can also arrange finer
And then lightweight planform (filigrane).
According to another design of closing or valve system, do following setting：In vacuum chamber open circumferential or in backplate
Periphery or in closing cap periphery, magnet apparatus arranged apart are respectively coupled with a regulating loop of oneself.By in opening week
Side or backplate outward flange peripherally at least some of direction magnet apparatus arranged apart, preferably each is all respectively provided with one
The regulating loop of oneself, each in magnet apparatus can adjust independently of each other and adjust dividing between closing cap and backplate
It is not present in the spacing on its position or gap degree.
Therefore, it can partly to carry out in the region of magnet apparatus and regulating loop can be by corresponding gap measuring device
The process of the distance signal obtaining.It is thereby possible to data and signal line can be reduced to minimum, this is for Vacuum Field
In application can turn out to be particularly advantageous.
According to another design, in the periphery of described opening magnet apparatus arranged apart and/or be attached to described magnetic
The gap measuring device of body device is coupled with a central controller.The setting of central controller, can substitute local modulation and return
Road, or the regulating loop being associated with corresponding magnet apparatus and affiliated pitch sensors can also be supplemented.By means of an example
As the central controller coupling on data technique with whole regulating loops of whole magnet apparatus, can be with particularly simple side
Formula is adjusted the synchronous manipulation in loop.
For example, it is possible to central controller is coupled with the rated value transmitter of single regulating loop respectively, so that
Obtain and the spacing to be maintained between backplate and closing cap can be delivered simultaneously to whole regulating loops by means of central controller
On.By means of central controller, the user of closing or valve system obtains operating element particularly simply to be operated, utilizes
This operating element, synchronously same in other words can temporally adjust out closing cap and backplate for whole regulating loops and magnet apparatus
Between spacing to be maintained or corresponding gap degree.
For each of closing or valve system different designs scheme scheme, some different spacing can be set
Measurement apparatus.Gap measuring device for example can have one or more pitch sensors, described pitch sensors be based on optics,
Magnetic or the measuring principle of electric capacity.Especially using based on measurement of inductance principle or vortex flowBiography
Sensor.Pitch sensors are especially arranged to next-door neighbour's magnet apparatus, are especially close to the counterpart of electromagnetic actuators or magnet apparatus, because
This can realize configuration (Kolokation) degree as high as possible.The direct neighbor of gap measuring device and magnet apparatus or even
Overlapping arrangement, contributes to improving measurement and adjusts accuracy.Pitch sensors may be particularly provided on backplate, and by
Spacing between this measurement backplate and closing cap, especially gap degree.It is arranged in pitch sensors on backplate especially by structure
Make be for accurately, generally to measure less than the accuracy in millimeter or micrometer range to one reference specified of closing cap
Face or the spacing of reference point.
It is arranged on closing cap periphery or also result in open circumferential and backplate periphery multiple magnet apparatus arranged apart superfluous
Remaining.If for some purposes, each magnet apparatus still always can not be worked or lost efficacy by regulation, then it is left behind
Magnet apparatus can take over their task, be enable to avoid uncontrolled the opening or closing motion of closing cap.
According to another design, closing cap is movably arranged at a guiding piece (F extending parallel to plane of the opening
ührung).The closing cap especially contact surface parallel to backplate is movably arranged.This guiding piece is in the case as shifting
Dynamic guiding piece works it is possible to place is fixedly disposed, be for example arranged in vacuum chamber bottom bracket (Grundger ü st) or
On pedestal (Basis).In addition it is contemplated that guiding piece is otherwise connected with vacuum chamber or is arranged on this vacuum chamber.
Closing cap generally extends in the plane of a Way in orientation perpendicular to opening.Backplate is led to its contact surface
Often parallel to the guiding piece for closing cap and the orientation stretching parallel to closing cap.Especially arrange for mobile guiding piece：
Closing cap is in resting position (Ruhestellung) that is to say, that with default spacing, the Way in regard to opening and shield
Plate is spaced apart.The collisionless that closing cap can be realized by this way along guiding piece moves.
Guiding piece for example can have a guide rail, this guide rail on or below the opening of vacuum chamber, optionally
Extend in the open side of vacuum chamber.By means of mobile guiding piece, closing cap can basically with vacuum chamber superposition of end gap,
But be spaced apart resting position transfer to off-position, in this off-position, closing cap with respect to vacuum chamber opening not
Overlappingly arrange and thus, it is possible to close to the opening for feed or for taking out the substrate for example treating to process in the vacuum chamber.
Mobile guiding piece is particularly suited for closing or valve system in substrate processing station (Prozessstation) region
The saving design of position and arrangement.Different from the situation of the closing cap of swingable setting, it is in vacuum chamber opening
Outside and be in region in the extension of described opening to a certain extent, can be used for arranging the miscellaneous part for the treatment of stations,
And not necessarily like typically keeping freely in the case of swingably supporting described closing cap.
According to regard to this another design, closing cap by means of one or more magnetic bearing parts touchless be bearing in
On guiding piece.Passive magnetic bearing part can also be designed to by means of especially can be designed as actively adjusting magnetic bearing part
One or more magnetic bearing parts, also can achieve closing cap face toward and touchless with respect to backplate, be thus lost less and dimension
Protect few movement.Different from the situation that the roller bearing (rollen-gelagerten) of closing cap guides, closing cap is propped up based on magnetic
Bearing member does not produce abrasion in the case of being supported by.Required clean space condition and required in closing or valve system region
The no graininess wanted can thus be easily achieved.
The set magnetic bearing part for guiding piece, can be similar to the set magnetic for closing or valve system
Body device is the same, be respectively provided with electromagnetic actuators and a counterpart with this electromagnetic actuators magnetic interaction and
One gap measuring device and a regulating loop, so that closing cap is by means of one or more magnetic bearing parts almost freely
Floating ground is arranged with the predetermined interval of to guiding piece and can move along guiding piece.
For this reason, multiple designs of counterpart and magnetic actuator can be considered and are mutually arranged scheme.Can arrange：
Permanent magnetism or ferromagnetic counterpart are fixedly placed on guiding piece 62, and electromagnetic actuators are arranged on closing cap 18.
It is also possible that actuator also can be fixedly placed on guiding piece 62, and counterpart is arranged in movable closing
On lid 18.
According to another design of guiding piece, closing cap is by means of at least one keeper (Halterung) at one
It is moveably supported on guiding piece between the closing position of the resting position being spaced apart with backplate and a described opening of sealing.
Keeper especially can achieve closing cap perpendicular to the motion by the default moving direction of guiding piece.By means of keeper, can make
Closing cap from face backplate be spaced apart resting position along Way in (z) or along closing direction namely along towards backplate direction
Motion, hermetically reaches closing position in order to this backplate.
Closing cap in spaced apart resting position and in backplate on sealing closing position between motion, can by envelope
Close or valve system at least one magnet apparatus, preferably carried out by multiple magnet apparatus.Thus, exist for closing cap
Motion between resting position and closing position does not need single driver.Especially arrange in the case：Keeper causes
Closing cap move in parallel along the face normal direction of closing cap being in resting position and to the corresponding support of offers.
In order to avoid the possible shearing motion between closing cap and seal, especially it is proved to be advantageously, in envelope
Close periphery the outward flange in backplate of lid, generation is as uniform as possible, the contact surface perpendicular to closing cap and backplate works
Closing force.
According to another independent aspects, finally, one kind is provided to be closed by means of closing described above or valve system
The method of vacuum chamber opening.Here, the method include measuring using at least one gap measuring device closing cap and backplate it
Between spacing or gap degree step.Then, according to the spacing measuring, manipulate at least one adjustable magnet apparatus,
To produce the closing force working between backplate and closing cap.Arrange in the case：Between measurement closing cap and backplate
At least one spacing, and manipulate at least one adjustable magnet apparatus, to maintain backplate and closing according to the spacing measuring
Preset pitch between lid or gap degree.
Similarly, multiple spacing, especially closing cap and the shield between closing cap and backplate is set for methods described
While on the different sections of plate or the measurement staggered of time.Multiple distance measurements are preferably by the distance measurement of respective number
Carrying out, these gap measuring devices are generally arranged apart on the periphery of closing cap or on the periphery of backplate for device.These
Each of gap measuring device is all generally attached troops to a unit the magnet apparatus of oneself, these magnet apparatus can by means respectively of from
Oneself manipulates for this set regulating loop, and described regulating loop makes gap measuring device couple with corresponding magnet apparatus.
In this way it is possible to partly produce on the different sections of closing cap and position cause closing cap and backplate it
Between respectively required for spacing confining force, and the spacing required for it being dynamically adapted for as required maintain.
In general it is noted that method described here especially can be utilized closing described above or gate
Device is executing.Thus, the whole feature and advantage being previously mentioned for closing or valve system are applied in the same manner
Methods described, and vice versa.
According to another design of method, it is set as follows：In order to calibrate adjustable magnet apparatus and/or affiliated
Closing cap is manipulated by means of the first of magnet apparatus and takes to first and be arranged in the sealing on backplate by gap measuring device first
The contact position (Kontaktstellung) of part, and in a subsequent step, then by closing cap by means of magnet apparatus
Second manipulation, seal compressed and take in the case of deform with the contact position of spacing keeper in, this spacing guarantor
Gripping member is usually placed on backplate.
In other words, by means of the first manipulation, that is, by means of involved electromagnetic actuators with the first of control signal
Load, especially with control electric current, or the synchronization of the multiple electromagnetic actuators by means of the magnet apparatus being arranged separately at periphery
Load, closing cap is taken to the contact position with backplate, in this position, closing cap abuts in backplate almost without squeeze pressure
On, or abut on the seal being arranged between backplate and closing cap.
The distance signal causing that manipulates with first of gap measuring device is used for calibrated distance sensor.Described distance signal
Almost it is equal to the nought state of seal or uncompressed state.It represents maximum spacing for regulating loop.
By means of the second manipulation, in contrast, know the maximum allowable control signal for magnet apparatus, wherein, close
Sealing is maximally compressed and correspondingly described closing cap and spacing keeper reach and recline or contact position.
The offer of control signal reclines position described in being led to, represents maximum, can be by this maximum to magnet apparatus
Load, maximally to compress described seal.Reclining on spacing keeper or backstop and reach described contact position, all may be used
Read from the characteristic curve between the spacing measuring and the manipulation of magnet apparatus.With reaching contact position, can measure
To maximum spacing, and with the position that reclines reaching on spacing keeper, minimum spacing can be measured.By means of minimum with
Big spacing, the pitch sensors involved by adjustable.
Using the first manipulation, maximum for spacing regulation the first spacing between closing cap and backplate can be measured.Profit
With the second manipulation, the second spacing of minimum in contrast, can be measured.Based on the minimum and maximum spacing thus known,
The regulation of magnet apparatus can be directed to and control carrys out calibrated distance measurement apparatus.Pitch sensors itself are with respect to backplate and closing
In lid, the understanding of the position of is thus not required.
According to required sealing and different according to the pressure between chamber inner space and cavity ring border, phase can be adjusted out
Any median between the minimum and maximum control signal answered.
Brief description
Other objects of the present invention, feature and favourable design refer to the attached drawing in the subsequent description of embodiment is come
Explaination.Wherein：
Fig. 1 shows in initial position or resting position, and the simplification of the closing or valve system with closing cap is illustrated
Figure；
Fig. 2 shows closing or the valve system with closing cap according to Fig. 1, and closing cap is in the contact position with backplate
In putting.
Fig. 3 shows the schematic diagram of closing according to Fig. 2 or valve system, but closing cap be arranged in closing cap and shield
Space maintaining member contact between plate；And
Fig. 4 shows the view of closing according to Fig. 1 to 3 or valve system, and closing cap is in the close position, is in medium
Closing force (S)；
Fig. 5 shows that the top view of closing or valve system, this closing or valve system have for receiving seal
Circumferential groove in backplate side；
Fig. 6 shows the viewgraph of cross-section of the line A-A along Fig. 5；
Fig. 7 shows closing or another design of valve system, but it has in the open circumferential of vacuum chamber
Multiple grooves arranged apart, arrange these grooves and are respectively used to receive and for being respectively arranged the electromagnetic actuators of magnet apparatus；
Fig. 8 shows the cross section of the B-B along Fig. 7；
Fig. 9 show closing or valve system a design, its have multiple annular and around opening edge four
All multiple grooves arranged apart or electromagnetic actuators；
Figure 10 shows the cross section C-C of Fig. 9；
Figure 11 shows movably can arranging along linear guide apparatus and is in showing of the closing cap in off-position
It is intended to；
Figure 12 shows the view according to Figure 11, but its have be on the backplate of closing or valve system static or
Closing cap in contact position；
Figure 13 shows the side view of closing according to Figure 12 or valve system, and closing cap is in resting position；And
Figure 14 shows the view according to Figure 13, and closing cap is in the close position and sealed is bearing on backplate；And
Figure 15 shows another design of mobile guiding piece, but it has another magnet apparatus, this another magnet
Device is arranged in the closing cap end opposite with this guiding piece；
The flow chart that Figure 16 shows the method for calibration closing or valve system.
Specific embodiment
In FIG, the closing illustrating on cross section or valve system 10, are arranged for being arranged in opening of vacuum chamber 12
On mouth 14.Closing or valve system 10 have a backplate 16, and this backplate is generally schematically shown in FIG with vacuum chamber 12
Wall portion 11 connects.Backplate 16 can be arranged to the opening 14 in wall portion 11 with vacuum chamber 12 and align or be configured to vacuum chamber 12
Integrated building block.Thus, backplate 16 can also have an opening 14, and this opening generally can be with vacuum chamber 12
Opening overlap.
Closing or valve system also have a closing cap 18 movingly arranging with respect to backplate 16, and this closing cap exists
For example close described opening 14 to airtight or vacuum tightness in the closing position 28 illustrating in figs. 3 and 4.Backplate 16 and closing
Lid 18 is additionally provided with least one magnet apparatus 30, by means of this magnet apparatus, closing force (S) can be applied on closing cap 18.
Backplate 16 can have a flange form geometry, and especially work in the face of closing cap 18 and as contact surface
Seal 22 is had on face 17, this seal, around opening 14, extends generally in the region on the opening edge edge of backplate 16.When
Before, the seal 22 made by elastic and deformable material is arranged in the circumferential groove 20 of backplate 16.But, this seal
Can also be arranged in the corresponding groove of closing cap 18, or be arranged in the intermediate gaps 25 between closing cap 18 and backplate 16.?
When reaching the closing position 28 shown in Fig. 3 and Fig. 4, seal 22 deforms in other words with such as between closing cap 18 and backplate 16
Under type is extruded, i.e. opening 14 is airtightly closed.
By means of magnet apparatus 30, the closing force being orientated along Way in or closing direction (z) (S) can be applied to closing
On lid 18.Described closing force (S) be oriented generally perpendicular to plane (x, y), or the contact surface perpendicular to backplate 16, or perpendicular to
The face 17 of backplate 16.Closing cap 18 also has in the face of backplate 16, the same face 19 worked as contact surface.Backplate 18 and envelope
The face 17,19 facing with each other in closing position 28 closing lid 19 is at least oriented parallel to one another to blockiness.
The involved contact surface here in the face 17,19 corresponding to each other extends along x-y plane.
Magnet apparatus 30 currently have at least one electromagnetic actuators 32 being arranged on backplate 16 and with its magnetic phase
Interaction and be arranged in the counterpart 34 on closing cap 18.Counterpart 34 is designed to permanent magnetism or ferromagnetic part,
Or this part is arranged on closing cap 18, or being embedded in closing cap 18.It is also contemplated that closing cap 18 at least area itself
Section property ground has a kind of permanent magnetism or ferromagnetic material or at least regionally or fully by a this material constitutes.
By being energized to the coil 33 of electromagnetic actuators 32 with electric current or loading, attraction or repulsive force can be applied to envelope
Close on lid 18.By adjusting current strength or by changing control signal, can change on demand and to send from magnet apparatus 30
Closing force (S).
Closing or valve system 10 also have a gap measuring device 40, by means of this gap measuring device, can be true
Surely and quantitatively spacing 41, especially closing cap 18 and the backplate 16 between measurement closing cap 18 and backplate 16 is facing with each other
Face 19,17 between spacing.Gap measuring device 40 currently has the pitch sensors 42 being arranged on backplate 16, this spacing
Sensor measures the spacing 41 along closing direction (z) between backplate 16 and closing cap 18.Thus, by means of gap measuring device
40, can relatively adjust magnet apparatus 30, the closing force (z) especially being sent by magnet apparatus according to spacing.Especially arrange：
By means of magnet apparatus 30 regulation related to spacing, the spacing 41 between closing cap 18 and backplate 16 accurately can be set
To in a default degree.
For this regulation related to spacing, a regulating loop 45 is especially set, this regulating loop makes magnet apparatus 30
Couple with gap measuring device 40.Regulating loop 45 has rated value transmitter 44, and this rated value transmitter is on data technique
It is connected with pitch sensors 42.Rated value transmitter 44 receives the distance signal being provided by pitch sensors 42, and by its with
Set in advance or can be compared by the variable default rated value of central controller 50.Rated value and actual value are sent out in rated value
Send in device 44 and be compared each other.
The comparison signal thus synthesizing is then delivered to adjuster 46, and this adjuster therefrom produces and is provided for manipulating
The control signal of electromagnetic actuators 32.Electromagnetism can be fed to by amplifier 48 by the described control signal that adjuster 46 produces
Actuator 32.The exaggerated control signal that the coil 33 of electromagnetic actuators 32 can be conveyed to calculates as follows and determines,
That is, maintain the preset pitch 41 between backplate 16 and closing cap 18, and when deviateing required spacing, can make to be filled by magnet
30 power sending of putting dynamically are adapted to, to maintain spacing 41.
Whole electronic components of regulating loop, that is, amplifier 48, adjuster 46, rated value transmitter 44 and optional
Pitch sensors 42 can be placed in a public circuit board, such as form is on the circuit board in integrated circuit loop.With regard to this
Speech, the status requirement for corresponding electronic unit and consequent cloth cable expend and can minimize.
In addition to the coil 30 that can be loaded with electric signal, electromagnetic actuators 32 are generally also provided with ferromagnetic core, such as
Iron core.But, electromagnetic actuators 32 can be designed as electromagnet, but by multiple other in the way of be for example also designed to long-range navigation
Hereby or sunk coil actuator (Tauchspulenaktor).The latter can with electromagnet differently electromagnetic actuators with join
Not only produce attraction between component, and produce repulsive force.
It is also contemplated that different designs in the principle of magnet apparatus 30 relatively adjusting according to spacing.In Fig. 5
In the design of the closing shown in 6 or valve system 100, backplate 16 have one unique, surround current rectangle
The groove 31 of opening 14, can arrange the magnetic coil of at least one single-piece in the cell, and this magnetic coil moves towards once along opening
Or many important places surrounds opening 14.Here is especially for redundancy reasons it is contemplated that magnetic coil cloth by multiple this single-pieces
Put in one and identical groove 31, and make these magnetic coils pass through a corresponding regulating loop 45 respectively with one oneself
Or couple with identical gap measuring device 40.Also can achieve the controllability improved by means of multiple coils.
In another embodiment of the closing shown in Fig. 1-4,7 and 8 or valve system 10, in the periphery cloth of opening 14
It is equipped with multiple magnet apparatus 30.Each in magnet apparatus 30 has at least one electromagnetically actuator 32, and this electromagnetically causes
Dynamic device is arranged in the groove 31 of backplate 16.Here, each in magnet apparatus 30 can be provided with a distance measurement dress of oneself
Put 40 and be provided with a local modulation loop 45 of oneself.By this way can opening walk upwards, especially along opening edge
Along ground point position ground of suiting the requirementsThe individual other spacing carrying out between backplate and closing cap is adjusted
Section, so that the local deformation of possible assembling or component tolerance and closing cap and/or backplate can be balanced.
For receiving the groove 31 of electromagnetically actuator 32 or its coil 33, can be for the reason vacuum applicability and face
Covered to counterpart 34 and/or sealing.For this reason, set covering members (Abdeckung) 21 are generally by a kind of permeability magnetic material
Or to be made by the material of non-magnetic material or only weak magnetic.Covering members 21 can be at some extent as the closure member for groove 31
Work, and be configured to this closure member.By means of respectively, the seal that is currently not explicitly shown, can be hermetically in groove
Arrange described covering members 21 on 31 or in groove 31.Covering members 21 especially can be integrated in the face of counterpart 34 with surface in alignment
In face 17, therefore it is integrated in backplate 16 or the contact surface of closing cap 18.For the sake of clearly illustrating, in FIG only in backplate 16
Right side described covering members 21 are shown.
Each of magnet apparatus 30 arranged apart on the periphery of opening 14 can correspond to the area at them
Spacing 41 in domain, between backplate 16 and closing cap 18 is correspondingly conditioned as follows：That is, entirely outer in opening 14
Holding be can adjust out on periphery constant or be retained in the spacing 41 within minimal tolerance.
Fig. 9 and 10 closing or valve system 200 another embodiment view in, by multiple single magnets dresses
Put and be encased in backplate 16.The groove 31 being provided for receiving single electromagnetic actuators 32 has the several of circle or annular here
What structure.By means of number shown in Fig. 9 along the peripheral direction arrangement of opening 14 magnet apparatus, can carry out closing cap 18 with
High position resolution between backplate 16 and corresponding precise distance are adjusted.The reason illustrate for general view, Fig. 5 to Figure 10
In do not express seal 22 be shown.
As shown in Fig. 1, between backplate 16 and the face 17,19 facing with each other of closing cap 18, have at least
One spacing keeper 24, this spacing keeper works as the end stop for closing cap 18.As institute in Fig. 1 and 2
Show, in the uncompressed state of seal, seal using the degree bigger than spacing keeper 24 from backplate 16 as contact surface
The face 17 worked projects.Only when seal 22 reaches the maximum compression shown in Fig. 3 or deformation, spacing keeper 24 ability and place
Closing cap 18 in closing position 28 reclines.
Spacing keeper 24 especially prevents metallicity backplate 16 and the directly contact of metallicity closing cap 18.Spacing keeps
Part 24 is by plastics, for example to be made by polyether-ether-ketone (PEEK).Fig. 2 to 4 shows from above through closing or gate dress
The cross section put.In Fig. 2, closing cap 18 is in almost not to be had in the contact position 27 of forceful contact with lip ring 22.Institute
State in contact position 27, this kind of closing force be applied on closing cap 18 so that closing cap 18 only abuts on seal 22,
And so that it is substantially deformed or compress.
Here, described contact position 27 is corresponding to the first manipulation of at least one magnet apparatus 30.Corresponding control signal
For example can be saved in central controller 50, or partly for example be saved in the adjuster 46 of corresponding regulating loop 45,
And especially it is stored for the calibration of gap measuring device.For alignment purpose, can be as follows with control signal, logical
Often with current load magnet apparatus 30：That is, adjust out the minimum spacing 41 between closing cap 18 and backplate 16.
When closing cap 18 reaches the contact position with spacing keeper 24 as illustrated in figure 3, or when spacing keeps
When part 24 is contacted with closing cap 18 and backplate 16 two, just realize this minimum spacing.Closing cap 18 is almost moved to stop part
On, or it is brought to the stop dog position with spacing keeper 24, also therefore take in the stop dog position of backplate 16.In order to realize maximum
Closing position 28, can be with second, namely maximum control signal to load magnet apparatus 30.This maximum control signal can be by
It is stored in central controller 50, or can also be stored in individually and partly in the adjuster 46 of whole regulating loops 45,
And it is equally used for the calibration of gap measuring device.Backplate 16 and envelope can be known for each gap measuring device by this way
Close the adjustable spacing of minimum and maximum 41 between lid 18.
In figure 16, the method showing the calibration of view according to Fig. 2 to 4 again in the form of a block diagram.First
In step 300, closing cap 18 is brought to the contact position 27 shown in Fig. 2.Then can store and be directed to institute in step 302
State at least one magnet apparatus or corresponding first maximum adjustable interval 41 for this required control signal.Involved control
Signal processed or first or maximum spacing 41, can particularly simply from the characteristic curve of the spacing 41 measuring by loading on magnetic
The control signal of body device is known.
Then, as just as shown in Fig. 3, in step 304 it is achieved that the of at least one magnet apparatus 30 described
Two manipulations.The same maximum control signal that can read therefore generation from described characteristic curve.This control signal corresponds to such as
Under such current strength：From this current strength, the raising of current strength numerical value no longer cause spacing 41 can measure subtract
Few.This is for the mark realized with the stop dog position of spacing keeper 24.Then closing cap and backplate are obtained within step 306
Between the second minimum spacing.The minimum being arrived based on the state measurement not only contacting with closing cap but also with backplate in seal 22
And maximum spacing, can be with calibrated distance measurement apparatus 40, and therefore adjustable utilizes its adjustable and controllable magnet dress
Put 30.
Show the front view of closing or valve system in figs. 11 and 12.Here, closing cap 18 is movably supported on
On the guiding piece 62 of Longitudinal extending.The guiding piece 62 being designed to mobile guiding piece is parallel to by backplate 16 and/or closing cap 18
The plane of the stop surface (x, y) being constituted, and it is accordingly parallel to backplate 16 and the face 17,19 facing with each other of closing cap 18 is prolonged
Stretch.But, just as draw in by the side view according to Figure 13, guiding piece 62 for closing direction (z) with backplate 16
Arrange with being spaced slightly apart, especially to can achieve that closing cap 18 moves with respect to the collisionless of backplate 16.
Just as show in Figure 11, closing cap 18 particularly by least one, generally pass through two or more that
The magnetic bearing part 60 that this is spaced apart is bearing on described guiding piece 62 touchlessly.These single magnetic bearing parts 60 can be similar to
In magnet apparatus 30 be respectively provided with currently not particularly shown pitch sensors, regulating loop and can by pitch sensors and
The electromagnetic actuators 61 that regulating loop is adjusted, this electromagnetic actuators and counterpart 63 magnetically collective effect.By this way may be used
With realize closing cap 18 on guiding piece 62 required by quick condition.Touchless supporting on guiding piece 62 for the closing cap 18
It is particularly conducive to avoid the pollution in vacuum chamber 12 environment and abrasion.
Currently, guiding piece 62 is provided with multiple electromagnetic actuators 62, these actuator successive ground are in slide block type
Mobile bearing partReach with the counterpart 63 being arranged on slide block type bearing part 66 in the case of 66 movements and join
Close.In the case, contrary arrangement is equally in scope of the invention.For example, one or more actuators 62 are permissible
It is arranged on bearing part 66 or on closing cap 18, and be fixedly arranged with counterpart 63 position of itself or their magnetic interactions
On the Linear guide 62 being designed to guide rail.
Figure 11 illustrates the closing cap 18 in off-position, in this off-position, this closing cap is in backplate 16
Region outside.In fig. 12, closing cap 18 is overlapping with backplate 16, so that opening 14 can be hermetically closed.
Additionally, drawing from the comparison of Figure 13 and 14, closing cap 18 by means of keeper 64 along closing direction (z), also
The plane (x, y) being perpendicular to closing cap 18 may move or is moveably supported on guiding piece 62.By means of along opening 14
Periphery arrangement at least one magnet apparatus 30, can be by 26 turns of contactless resting position shown in Figure 13 for the closing cap 18
Move on in the contact position 27 shown in Figure 14, and continue to transfer in closing position 28.In order that closing cap 18 is in static shape
Between state 26 and contact position 27, namely perpendicular to the plane of closing cap 18 move it is also contemplated that arranging single drive
Dynamic device.
In the case, keeper 64 causes or supports closing cap 18 from spaced apart resting position 26 to contact position
27 and proceed to the form moving in parallel in closing position 28, so that being not closed covering 18 and seal 22 as far as possible
Relative motion occurs in the plane of closing cap (X, Y).Otherwise, this kind of shearing motion may result in the abrasion of seal 22 and leads to
At least small pollution of the environment of vacuum chamber 12.
Obliquely show the stereogram of closing or valve system in fig .15.It is provided with another at the foot of closing cap 18
One guiding piece 70, this another guiding piece equally can be through magnetic body support, just as the guiding piece 62 through magnetic body support can be with oncontacting
Touch as formula design.In the case, the guiding piece 70 of bottom can not only guide closing cap along parallel to closing cap plane
Direction move, currently can also flatly guide.It is quiet from it that the guiding piece of this bottom especially can aid in closing cap 18
Stop bit puts 26 in contact position 27 and moving in parallel of tumbling of the nothing that proceeds in closing position 28.
Guiding piece 70 can also be coupled with a gap measuring device 40 of oneself.But it is also contemplated that, by central authorities
Controller 50 reading and to provide the spacing of whole gap measuring devices 40 arranged apart on opening 14 periphery so that
The inference of the orientation that can draw with regard to closing cap 18 in y-z plane from the comparison of single distance signal.
Touchless supporting on guiding piece 62 for the closing cap 18 is for example held using being connected with closing cap, slide block type design
Holder 66 is carried out.One of the involved part of magnetic bearing part 60 part, namely electromagnetic actuators 61 and counterpart 63
One of, it is fixedly placed on guiding piece 62, and another part in actuator 61 and counterpart 63 is arranged in bearing part
On 66.But it is also contemplated that contrary being mutually arranged and arrangement of electromagnetic actuators and counterpart.In order that closing cap
18 or bearing part 66 mobile and be provided with linear motor 68 along guiding piece 62, closing cap can be made by means of this linear motor
18 move between off-position and resting position 26.
Reference numerals list
10 closings or valve system
11 wall portions
12 vacuum chambers
14 openings
16 backplates
17 faces
18 closing caps
19 faces
20 grooves
21 covering members
22 seals
24 spacing keepers
25 intermediate gaps
26 resting positions
27 contact positions
28 closing positions
30 magnet apparatus
31 grooves
32 electromagnetic actuators
33 coils
34 counterparts
40 gap measuring devices
41 spacing
42 pitch sensors
44 rated value transmitters
45 regulating loops
46 adjusters
48 amplifiers
50 control devices
60 magnetic bearing parts
61 electromagnetic actuators
62 guiding pieces
63 counterparts
64 keepers
66 bearing parts
68 linear motors
70 guiding pieces
100 closings or valve system
200 closings or valve system
Claims (13)
1. it is used for locking device or the valve system of vacuum chamber (12), have：
The backplate (16) of-one opening (14) that may be arranged on vacuum chamber (12) and surround described vacuum chamber (12)；
- one closing cap (18) movingly arranging with respect to described backplate (16), described closing cap is in closing position (28)
In described backplate (16) the described opening of upper closing (14)；
- coordinate with described backplate (16) and described closing cap (18), adjustable at least one magnet apparatus (30), it is used for
Produce the closing force (S) working between backplate (16) and closing cap (18)；And
- at least one gap measuring device (40), it is used for measuring the spacing (41) between closing cap (18) and backplate (16),
- wherein said magnet apparatus (30) can according between backplate (16) and closing cap (18) by described gap measuring device
(40) spacing (41) that measures and be conditioned.
2. locking device according to claim 1 or valve system, wherein said magnet apparatus (30) have and are arranged in envelope
Close at least one electromagnetic actuators (32) on one of lid (18) and backplate (16) and be arranged in closing cap (18) and backplate
(16) at least one counterpart (34) on another in, at least one counterpart described is with magnet actuators (32) magnetically
Interact.
3., according to locking device in any one of the preceding claims wherein or valve system, it also has at least one electronics and adjusts
Section loop (45), at least one electrical adjustment loop described and described gap measuring device (40) and with described magnet apparatus (30)
Coupling, and it is designed to the preset pitch (41) maintaining and/or adjusting between backplate (16) and closing cap (18).
4. according to locking device in any one of the preceding claims wherein or valve system, wherein in closing cap (18) and backplate
(16) in the intermediate gaps (25) between face (17,19) facing with each other in the closing position (28) of described closing cap (18),
In described closing cap (18) or in one sealing surrounding described opening (14), being elastically compressed of the upper arrangement of described backplate (16)
Part (20).
5. according to locking device in any one of the preceding claims wherein or valve system, wherein in closing cap (18) and backplate
(16), on one of face (17,19) facing with each other in the closing position (28) of described closing cap (18) face, arrangement is at least
One spacing keeper (24), at least one spacing keeper described stops the directly contact position of backplate (16) and closing cap (18)
Put.
6. according to locking device in any one of the preceding claims wherein or valve system, wherein in the week of described opening (14)
The multiple magnet apparatus (30) being respectively equipped with a gap measuring device (40) of oneself arranged apart on side.
7. locking device according to claim 6 or valve system, separates cloth wherein on the periphery of described opening (14)
The magnet apparatus (30) put respectively are coupled with a regulating loop (45) of oneself.
8. the locking device according to claim 6 or 7 or valve system, wherein on the periphery of described opening (14) separately
The magnet apparatus (30) arranged and/or the gap measuring device (40) being attached to described magnet apparatus (30) are controlled with central authorities
Device (50) couples.
9., according to locking device in any one of the preceding claims wherein or valve system, wherein said closing cap (18) is removable
It is bearing on the guiding piece (62) that a plane parallel to described opening (14) extends dynamicly.
10. locking device according to claim 9 or valve system, wherein said closing cap (18) is by means of one or many
Individual magnetic bearing part (60) is bearing on described guiding piece (62) touchlessly.
11. locking devices according to any one of aforementioned claim 9 or 10 or valve system, wherein said closing cap
(18) by means of at least one keeper (64) in a resting position being spaced apart with described backplate (26) and a sealing institute
It is moveably supported on described guiding piece (62) between the closing position (28) stating opening (14).
The method of 12. openings (14) being used for closed vacuum cavity (12), methods described is by means of any one of aforementioned claim
Described locking device or valve system (10；100；200), it has following steps：
- to measure at least one spacing between closing cap (18) and backplate (16) using at least one gap measuring device (40)
(41)；
- relatively manipulate at least one adjustable magnet apparatus (30) according to the spacing (41) measuring, to produce in backplate
(16) closing force (S) working and closing cap (18) between.
13. methods according to claim 12, wherein in order to calibrate described adjustable magnet apparatus (30) or affiliated
Gap measuring device (40)：
- by described closing cap (18) by means of described magnet apparatus (30) first manipulation carry first to be arranged in described backplate
(16) in the contact position of seal (22) on, and
- next described closing cap (18) and described backplate (16) are manipulated in pressure by means of the second of described magnet apparatus (30)
Contract carry in the case of described seal (20) to the contact position of described spacing keeper (24) in.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102014008170.2 | 2014-06-10 | ||
| DE102014008170.2A DE102014008170A1 (en) | 2014-06-10 | 2014-06-10 | Lock or lock device for a vacuum chamber |
| PCT/EP2015/062927 WO2015189263A1 (en) | 2014-06-10 | 2015-06-10 | Closure or airlock device for a vacuum chamber |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106461120A true CN106461120A (en) | 2017-02-22 |
| CN106461120B CN106461120B (en) | 2019-05-07 |
Family
ID=53496636
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201580030603.9A Active CN106461120B (en) | 2014-06-10 | 2015-06-10 | Locking device for vacuum chamber |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP6431096B2 (en) |
| KR (1) | KR101908536B1 (en) |
| CN (1) | CN106461120B (en) |
| DE (1) | DE102014008170A1 (en) |
| WO (1) | WO2015189263A1 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109072412A (en) * | 2017-03-17 | 2018-12-21 | 应用材料公司 | The equipment of vacuum processing for substrate, the system for manufacturing the device with organic material, the method for sealing against each other processing vacuum chamber and maintenance vacuum chamber |
| CN109392303A (en) * | 2017-06-08 | 2019-02-26 | 应用材料公司 | Closing device, the vacuum system with closing device and the method for operating closing device |
| CN110242758A (en) * | 2018-03-09 | 2019-09-17 | (株）Np控股 | Containment member is more remodeled gate valve system, sealing plate and sealing plate magazine |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DK179123B1 (en) * | 2016-09-16 | 2017-11-13 | Danfoss As | Valve attachment, valve and method for controlling a valve |
| EP3372883B1 (en) | 2017-03-09 | 2019-12-11 | VAT Holding AG | Vacuum valve with optical sensor |
| CN108966661B (en) * | 2017-03-17 | 2021-01-15 | 应用材料公司 | Apparatus for vacuum processing of substrates, system for manufacturing of devices with organic material, and method for sealing an opening connecting two pressure areas |
| EP3477173A1 (en) * | 2017-10-30 | 2019-05-01 | VAT Holding AG | Enhanced vacuum process control |
| DE102019134546A1 (en) | 2019-12-16 | 2021-06-17 | VON ARDENNE Asset GmbH & Co. KG | Method, control device and vacuum arrangement |
| CN111188902B (en) * | 2020-01-15 | 2021-06-29 | 燕山大学 | Non-bolt pre-tightening self-tightening manhole device |
| JP7435096B2 (en) * | 2020-03-18 | 2024-02-21 | 株式会社島津製作所 | pressure control valve |
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|---|---|---|---|---|
| US2556225A (en) * | 1946-03-21 | 1951-06-12 | Joseph J Day | Magnetic valve |
| JPS5281620A (en) * | 1975-12-27 | 1977-07-08 | Inoue Japax Res Inc | Preparation of keeping vessels air tightly |
| US4747577A (en) * | 1986-07-23 | 1988-05-31 | The Boc Group, Inc. | Gate valve with magnetic closure for use with vacuum equipment |
| JPH07190228A (en) * | 1993-12-27 | 1995-07-28 | Ulvac Japan Ltd | Unsliding gate valve |
| CN1973157A (en) * | 2004-06-08 | 2007-05-30 | 莱博德光学有限责任公司 | Locking device |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000005060A (en) * | 1998-06-24 | 2000-01-11 | Hisaka Works Ltd | Lid sealing device used for digester or the like and pressure or vacuum container provided with the device |
| US6629682B2 (en) * | 2001-01-11 | 2003-10-07 | Vat Holding Ag | Vacuum valve |
| DE102007034927A1 (en) * | 2007-07-24 | 2009-02-05 | Vat Holding Ag | Method for controlling or regulating a vacuum valve |
| DE202008005238U1 (en) * | 2008-04-16 | 2008-07-31 | Vat Holding Ag | Vacuum valve system with position detection |
-
2014
- 2014-06-10 DE DE102014008170.2A patent/DE102014008170A1/en not_active Withdrawn
-
2015
- 2015-06-10 JP JP2016572449A patent/JP6431096B2/en active Active
- 2015-06-10 WO PCT/EP2015/062927 patent/WO2015189263A1/en active Application Filing
- 2015-06-10 CN CN201580030603.9A patent/CN106461120B/en active Active
- 2015-06-10 KR KR1020167032242A patent/KR101908536B1/en active IP Right Grant
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109072412A (en) * | 2017-03-17 | 2018-12-21 | 应用材料公司 | The equipment of vacuum processing for substrate, the system for manufacturing the device with organic material, the method for sealing against each other processing vacuum chamber and maintenance vacuum chamber |
| CN109392303A (en) * | 2017-06-08 | 2019-02-26 | 应用材料公司 | Closing device, the vacuum system with closing device and the method for operating closing device |
| TWI687614B (en) * | 2017-06-08 | 2020-03-11 | 美商應用材料股份有限公司 | Closing device, vacuum system with closing device and method of operating a closing device |
| CN109392303B (en) * | 2017-06-08 | 2020-09-15 | 应用材料公司 | Closing device, vacuum system with closing device and method for operating closing device |
| CN110242758A (en) * | 2018-03-09 | 2019-09-17 | (株）Np控股 | Containment member is more remodeled gate valve system, sealing plate and sealing plate magazine |
| CN110242758B (en) * | 2018-03-09 | 2021-02-26 | (株）Np控股 | Sealing member replacement type gate valve system, sealing plate, and cartridge for sealing plate |
Also Published As
| Publication number | Publication date |
|---|---|
| JP6431096B2 (en) | 2018-11-28 |
| JP2017523354A (en) | 2017-08-17 |
| KR20170002462A (en) | 2017-01-06 |
| CN106461120B (en) | 2019-05-07 |
| WO2015189263A1 (en) | 2015-12-17 |
| KR101908536B1 (en) | 2018-10-16 |
| DE102014008170A1 (en) | 2015-12-17 |
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