TW200509504A - In-vacuum drive device, and substrate transporting equipment using the same - Google Patents

In-vacuum drive device, and substrate transporting equipment using the same

Info

Publication number
TW200509504A
TW200509504A TW093105948A TW93105948A TW200509504A TW 200509504 A TW200509504 A TW 200509504A TW 093105948 A TW093105948 A TW 093105948A TW 93105948 A TW93105948 A TW 93105948A TW 200509504 A TW200509504 A TW 200509504A
Authority
TW
Taiwan
Prior art keywords
movable component
vacuum
phase difference
encoder
possesses
Prior art date
Application number
TW093105948A
Other languages
Chinese (zh)
Inventor
Ryuichiro Tominaga
Takao Fujii
Original Assignee
Yaskawa Denki Seisakusho Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yaskawa Denki Seisakusho Kk filed Critical Yaskawa Denki Seisakusho Kk
Publication of TW200509504A publication Critical patent/TW200509504A/en

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K2201/00—Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
    • H02K2201/18—Machines moving with multiple degrees of freedom

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • Linear Motors (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Control Of Linear Motors (AREA)
  • Control Of Vehicles With Linear Motors And Vehicles That Are Magnetically Levitated (AREA)
  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)

Abstract

This invention relates to an in-vacuum drive device. Its feature is that it comprises a first movable component, a second movable component, a drive portion, an encoder, a phase difference-detecting means (magnetic sensor), and a control means. The first movable component 8 provides on the atmosphere side opposed to a vacuum-chamber wall 5, it possesses a magnetic field movably provided through a sliding portion. The second movable component 11 on the vacuum side opposes to the vacuum-chamber wall 5, it possesses a magnetic field movably through a sliding portion. The drive portion fixed on the atmosphere side of the vacuum chamber wall 5, it possesses a stator with an armature 3 opposed to the first movable element 8 with a magnetic gap. The encoder on the first movable component 8 comprises a sensor head 12, and a linear scale 13. The sensor head detects the position of the first movable component 8 in the movement direction with respect to the vacuum chamber. The phase difference-detecting means (magnetic sensor 4) on the first movable component 8, it detects a phase displacement between the first movable component 8 and the second movable component 11. When the power supply of armature 3 turning-on, a position command signal is in accordance with a position command of the first movable component 8 that detected by the encoder. The control mean corrects a position command signal to reduce the phase difference detected by the phase difference-detecting means.
TW093105948A 2003-03-07 2004-03-05 In-vacuum drive device, and substrate transporting equipment using the same TW200509504A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003062446A JP4363064B2 (en) 2003-03-07 2003-03-07 In-vacuum drive device and substrate transfer device using the same

Publications (1)

Publication Number Publication Date
TW200509504A true TW200509504A (en) 2005-03-01

Family

ID=32959008

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093105948A TW200509504A (en) 2003-03-07 2004-03-05 In-vacuum drive device, and substrate transporting equipment using the same

Country Status (3)

Country Link
JP (1) JP4363064B2 (en)
TW (1) TW200509504A (en)
WO (1) WO2004079884A1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109699190A (en) * 2017-08-24 2019-04-30 应用材料公司 The non-contactly device and method of transmitting device in vacuum flush system
CN112758696A (en) * 2021-01-19 2021-05-07 埃特曼(深圳)半导体技术有限公司 Vacuum sample driving device

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7959395B2 (en) 2002-07-22 2011-06-14 Brooks Automation, Inc. Substrate processing apparatus
US7988398B2 (en) * 2002-07-22 2011-08-02 Brooks Automation, Inc. Linear substrate transport apparatus
JP4581757B2 (en) * 2005-03-11 2010-11-17 日本精工株式会社 Motor system
JP2007060748A (en) * 2005-08-22 2007-03-08 Sumitomo Electric Ind Ltd Superconducting multishaft motor and vehicle equipped therewith
GB2437568B (en) * 2006-04-24 2009-02-11 Univ Sheffield Electrical machines
JP4660434B2 (en) * 2006-07-21 2011-03-30 株式会社安川電機 Conveying mechanism and processing apparatus having the same
JP2010040945A (en) * 2008-08-07 2010-02-18 Sinfonia Technology Co Ltd Vacuum processing device
JP2010040946A (en) * 2008-08-07 2010-02-18 Sinfonia Technology Co Ltd Vacuum treatment device
US8602706B2 (en) 2009-08-17 2013-12-10 Brooks Automation, Inc. Substrate processing apparatus
DE102010031245B4 (en) * 2010-07-12 2013-04-11 Von Ardenne Anlagentechnik Gmbh Substrate treatment plant
JP5689047B2 (en) 2011-10-12 2015-03-25 東京エレクトロン株式会社 Substrate transfer device for substrate processing system
JP5956324B2 (en) * 2012-12-13 2016-07-27 東京エレクトロン株式会社 Transport base and transport system
US11417493B2 (en) * 2020-12-18 2022-08-16 Fei Company Counter pole with permanent magnets

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2572276Y2 (en) * 1991-02-26 1998-05-20 住友特殊金属株式会社 Magnetic precision moving device
JPH0664748A (en) * 1992-08-13 1994-03-08 Ebara Corp Magnetic levitation vacuum conveyer
JPH06100164A (en) * 1992-08-27 1994-04-12 Hitachi Ltd Magnetically coupled carrying device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109699190A (en) * 2017-08-24 2019-04-30 应用材料公司 The non-contactly device and method of transmitting device in vacuum flush system
CN109699190B (en) * 2017-08-24 2023-04-28 应用材料公司 Non-contact conveying device and method in vacuum processing system
CN112758696A (en) * 2021-01-19 2021-05-07 埃特曼(深圳)半导体技术有限公司 Vacuum sample driving device

Also Published As

Publication number Publication date
WO2004079884A1 (en) 2004-09-16
JP4363064B2 (en) 2009-11-11
JP2004274889A (en) 2004-09-30

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