JP2017514446A - Device for holding, positioning and / or moving objects - Google Patents

Abstract

The present invention comprises a foundation (30) and a support (50) movable relative to the foundation (30), and comprises at least three magnetic bearing devices (10, 100). The device supports the support (50) on the foundation (30) in a non-contact manner, and at least two of the magnetic bearing devices (10, 100) are formed as actively controllable magnetic bearing devices (10, 100), And an electrically controllable electromagnetic actuator (12), each of which interacts magnetically with the counterpart member (18), the electromagnetic actuator having a set spacing between the foundation (30) and the support (50). Can be actively controlled by the electronic unit (15) to maintain, and at least two electromagnetic actuators (12) of the magnetic bearing device (10, 100) and the electronic unit (15) Bearing member (50) is disposed on, holding the object (52), it relates to an apparatus for positioning and / or movement.

Description

  The present invention relates to an apparatus for holding, positioning and / or moving an object, in particular a substrate.

  For example, in order to process a substrate for manufacturing a semiconductor device for display applications, a relatively large area substrate is subjected to various surface treatment processes. For example, the surface of such a substrate is treated mechanically or chemically to form a coating or surface structure on the substrate. In this case, some surface treatment processes are performed under clean room conditions or in vacuum, especially when surface treatment steps such as sputtering, physical vapor deposition, chemical vapor deposition, etc. are optionally performed with plasma assistance.

  Since structures in the micrometer or nanometer range are formed around the substrate, very precise positioning of the substrate is required in the substrate plane and in a direction perpendicular to the substrate plane.

  The requirement for the release of particulates in the substrate environment requires the mounting of a non-contact bearing part of the substrate and a corresponding holding, moving or traveling drive. Air bearing devices are only suitable conditionally for a clean production environment. This is because an unintended air flow can occur near the substrate. Depending on the circumstances, this air flow is contrary to maintaining the required accuracy during substrate processing.

  Furthermore, there is a magnetic holding device or positioning device provided with a so-called magnetic wafer stage or a support for supporting a foundation and an object. In order to non-contact support of the support on the foundation, a number of magnetic bearing devices, each with a distance sensor and a control circuit, are generally provided. This magnetic bearing device holds the support in a floating state at a set interval with respect to the foundation.

  Such a wafer stage is known, for example, from US Pat. No. 7,868,488 B2.

  In particular, it was found to be extremely troublesome to mount a magnetic bearing device that can be actively controlled and electrically driven in a vacuum environment.

  For applications in vacuum technology, materials well suited for vacuum, in particular metals, should be used as parts and for casing elements. This, however, adversely affects the magnetic action of the individual magnetic bearing devices. Electrical control of the electromagnetic actuator will create eddy currents in the metal element. This eddy current can adversely affect the operation of one or more magnetic bearing devices. Furthermore, it was found that electrical signal generation and signal processing is difficult from a process technical point of view in a vacuum environment. In general, synthetic resins or injection-molded resins that function as electrical insulating materials tend to generate gas in a vacuum environment. This is an obstacle to maintaining the required vacuum level and clean room conditions.

  It is therefore an object of the present invention to provide an apparatus for holding, positioning and / or moving an object, in particular a substrate, which has a structure as compact as possible and can be used especially for applications in the vacuum field. is there.

  This problem is solved by the device according to claim 1. Each advantageous embodiment is the subject of the dependent claims.

  In the present invention, an apparatus is provided for holding, positioning and / or moving an object, generally one or more substrates. The device comprises a foundation and a support that is movable relative to the foundation. The foundation is generally stationary and the support is non-contactingly supported on the foundation by at least three magnetic bearing devices. The support can be held in a contactless manner in a floating state on the foundation by at least three magnetic bearing devices. In doing so, the magnetic bearing devices are spatially separated from one another in order to hold the support in a position-stable manner on the foundation.

  In this case, at least two of the three magnetic bearing devices are formed as actively controllable magnetic bearing devices. Each of the magnetic bearing devices includes an electrically controllable electromagnetic actuator that interacts magnetically with a magnetic counterpart member. This actuator can be actively controlled by the electronic unit to maintain a set distance between the foundation and the support. Any disturbance to the balance of the bearing device can always be offset by the active control of at least two positive magnetic bearing devices. If two aggressive magnetic bearing devices are installed, the third magnetic bearing device can be formed as a passive magnetic bearing device. This magnetic bearing device comprises, for example, one or more permanent magnets, and this magnet can generate a constant supporting force between the foundation and the support body in the range of the bearing device concerned. However, all magnetic bearing devices can also be formed as positive magnetic bearing devices, i.e. electrically controllable magnetic bearing devices.

  For example, when the distance between the electromagnetic actuator and the counterpart member changes, it is possible to supply the electromagnetic actuator with a control current that has changed in large or small amounts accordingly. Thereby, in order to maintain the required spacing between the support and the foundation, the actuator applies at least temporarily a greater or lesser force, and thus a changed force, on the counterpart member. In this case, furthermore, at least two electromagnetic actuators and an electronic unit of the magnetic bearing device are arranged on the support. This creates a relatively short signal path, thus increasing the vacuum compatibility of the support compared to other embodiments having well-distributed electronic components placed on the support and the foundation. it can.

  Furthermore, if the electronic unit and the electromagnetic actuator electrically connected thereto are arranged on the support body, the wiring cost is reduced. Therefore, the number of cable connection portions and the total length of cable connection portions that are always provided can be reduced to the minimum.

  The electromagnetic actuator of at least two controllable magnetic bearing devices is arranged on the support, whereas a counterpart member that can be electromagnetically connected to this electromagnetic actuator is provided on the foundation. The counterpart member is generally formed of a permanent magnet or ferromagnetic. The number of magnetic bearing devices provided is not limited to three. The number of magnetic bearing devices can in particular vary depending on the number of degrees of freedom to be realized. By means of at least three magnetic bearings which are spatially separated from one another, the support can be held in position stably on the foundation against its gravity. The floating and non-contact bearings of the support on the foundation can be provided especially for transport, for example for linear movement of the support relative to the foundation. In this case, at least one other magnetic bearing device, preferably a plurality of other magnetic bearing devices, can be provided for lateral stabilization of the support on the foundation. Other magnetic bearing devices can provide non-contact magnetic bearings, for example, in a plane perpendicular to gravity and in a plane perpendicular to the transport direction.

  For such lateral or lateral stabilization of the support on the foundation, it is also possible to provide one or more magnetic bearing devices that can be actively controlled. The electromagnetic actuator of this magnetic bearing device is likewise arranged on the support.

  An apparatus for holding, positioning and / or moving an object in particular comprises a substrate holder arranged on a support. By moving the support relative to the base, the substrate disposed on the support side is brought into a working range or process range of a processing apparatus, generally a surface processing apparatus, in a predetermined manner. In this case, the positioning accuracy of the support relative to the foundation is in the range of a few micrometers or less than a micrometer, ie in the nanometer range. Furthermore, instead of or in addition to the substrate holder, a process station, for example an evaporation device or similar surface processing device, can be arranged on the support.

  In a development, each positively controllable magnetic bearing device on the support is provided with a distance sensor for measuring the distance between the foundation and the support. Thereby, at least one distance sensor is attached to each magnetic bearing device, and the distance between the magnetic bearing device and the base section directly facing it can be detected by this distance sensor. In this case, it is advantageous if the distance sensor is arranged on the support in the immediate vicinity of the electromagnetic actuator of the respective magnetic bearing device. The accompanying minimization of the distance between the distance sensor and the electromagnetic actuator is particularly advantageous for reducing the degree of collocation. However, it is also possible to place the distance sensor on the support away from the electromagnetic actuator and thus outside the magnetic bearing device.

  The distance sensor measures the distance at the location of the support with the electromagnetic actuator as much as possible. Thereby, the change in the control current of the electromagnetic actuator and the accompanying change in the force or action of the actuator directly affect the distance between the actuator and the counterpart member arranged on the base side. Such spacing changes can be measured directly by placing the distance sensor directly adjacent to the electromagnetic actuator.

  Each positively controllable magnetic bearing device is equipped with a unique distance sensor to accurately detect local spacing changes between the foundation and the support within the respective magnetic bearing device, It can be used selectively for the control of the magnetic bearing device.

  In another embodiment, each positively controllable magnetic bearing device on the support comprises an electronic unit. This electronic unit serves to control the electromagnetic actuator of the magnetic bearing device depending on the distance detectable by the distance sensor each time. Since each magnetic bearing device includes a unique electronic unit and a unique distance sensor, the interval signal measured by the distance sensor can be locally processed by the electronic unit in each magnetic bearing device. The control current or control signal for the electromagnetic actuator of each magnetic bearing device can be generated locally within the magnetic bearing device or by an electronic unit attached to the magnetic bearing device. Thereby, the wiring cost between the distance sensor and the electronic unit and between the electronic unit and the electromagnetic actuator can be further reduced. This further improves and improves the vacuum compatibility of the entire device, particularly its support.

  In another embodiment, the electronic unit is connected to at least two magnetic bearing devices. Alternatively or additionally, the electronic unit can be formed as a central controller. When formed in the form of a central controller, the electronic unit is electrically connected to all active magnetic bearings of the support. Such an implementation requires that each magnetic bearing device be electrically connected to an electronic unit disposed on the support that is located outside the magnetic bearing device. In this structural form, central signal processing can be performed. In this case, the signals of several or all distance sensors of the individual magnetic bearing devices can be evaluated simultaneously by the central electronic unit or the control device.

  Alternatively or in addition, each magnetic bearing device can be provided with a unique local electronic unit located in the immediate vicinity of the electromagnetic actuator, and the support supplements the local electronic unit. Other central controllers can be provided, which are connected to transmit signals to, for example, all electronic units or to at least some electronic units installed locally in the magnetic bearing device.

  For example, centrally evaluating the signals of several distance sensors simultaneously is advantageous for the accurate detection of the movement state of the support on or along the foundation. In this way, in particular, it is possible to counteract the resonance phenomenon or vibration phenomenon.

  The electronic unit arranged on or in the magnetic bearing device can in particular be formed as a control circuit or can form a control circuit together with an electromagnetic actuator of the magnetic bearing device. The control circuit comprises at least the above distance sensor for qualitatively and quantitatively detecting the distance between the support and the foundation. The signal of the distance sensor can be supplied to the set value transmitter. The setpoint transmitter can compare the measured actual value with a pre-set setpoint. From the comparison between the actual value and the set value, the controller connected to the set value transmitter can generate a control signal. This control signal can be supplied to the electromagnetic actuator via an amplifier.

  In this case, the controller is designed to generate the following control signals. That is, it is designed to generate a control signal such that the interval detectable by the distance sensor is within the set interval interval or below the set maximum interval and above the required minimum interval. . The electromagnetic actuator can be formed, for example, in the form of an electromagnet that interacts with the counterpart member so as to always attract it. However, the electromagnetic actuator may be formed in the form of a Lorentz actuator or a movable coil actuator that can be formed so as to generate an attractive force and a repulsive force against the counterpart member.

  In another embodiment, at least one guide rail extending along the transport direction with at least one counter member is arranged on the foundation, the counter member being magnetically interrelated with the electromagnetic actuator of the support. Works. The mating member can comprise, for example, a ferromagnetic or permanent magnet rail. The rail is arranged on or embedded in a guide rail extending in the longitudinal direction of the foundation. Furthermore, the basic guide rail itself can be made of or made of a ferromagnetic or permanent magnet material. The guide rail may have a shaped cross section, which cross section may correspond to or interact with the corresponding profile shape of the support. For example, when the support is suspended and supported by the foundation, the support is supported and held on the foundation by the profile sections of the foundation and the support that engage with each other. Thereby, it is possible to prevent the support from falling when the electromagnetic actuator is switched off or stopped.

  It is advantageous if the foundation comprises two guide rails extending parallel to each other. Each guide rail is provided with a counterpart member that interacts magnetically with the electromagnetic actuator of the support. Thereby, a support body is supported in several places on a foundation. In particular, a plurality of electromagnetic actuators and a plurality of magnetic bearing devices that are spaced apart from each other in the longitudinal direction of the guide rail are disposed on the support.

  In this case, the magnetic bearing device has a direction of action opposite to that of gravity, and is configured to perform lateral and lateral stabilization. The individual magnetic bearing devices can be arranged with the electromagnetic actuator above or below the basic guide rail. Some magnetic bearing devices can offset the gravity of the support, for example. The other magnetic bearing device can be arranged on the support at the side of at least one guide rail. Such a magnetic bearing device makes it possible in particular to stabilize the support laterally and laterally in the direction perpendicular to the longitudinal direction of the guide rail, ie in the direction perpendicular to the conveying direction.

  In another embodiment, the device for holding, positioning and / or moving further comprises a drive for moving the support relative to the foundation along at least one transport direction. The drive device includes a permanent magnet structure disposed on a foundation and a coil structure disposed on a support and interacting with the permanent magnet structure. The drive device can then be formed as a linear drive device which generally extends parallel to at least one guide rail of the foundation.

  Again, all components of the drive device that are electrically actuated or supplied with electrical signals are arranged on the support. Therefore, the wiring cost is reduced also in this case. This further improves the vacuum compatibility or vacuum compatibility.

  In another embodiment, a three-dimensional encoding part extending along at least one transport direction is arranged on the foundation. This encoding part can be read by a position sensor arranged on the support. In this case, the position sensor is integrated in the driving device or is separated from the driving device and arranged on the support. The three-dimensional encoding unit is optical or magnetic. Accordingly, the associated position sensor is formed as an optical sensor or a magnetic sensor.

  An independent position measurement for the support on the foundation is provided by a three-dimensional encoding part extending in the transport direction and a position sensor on the support. A position sensor for reading a three-dimensional encoding unit is connected to an electronic unit, in particular a central control unit. Therefore, the support or its central control device can automatically measure the position of the support in the transport direction along the foundation.

  In another embodiment, at least one of the magnetic bearing devices comprises a permanent magnet unit and an electrically controllable electromagnetic actuator that interacts with the permanent magnet unit. A supporting force S acting on the support can be generated by the permanent magnet unit. This supporting force is against the gravity G of the support, and its value may be larger than the gravity of the support. The permanent magnet unit causes the support to be pushed away from the foundation against the force of gravity. Therefore, the permanent magnet unit over cancels the gravity of the support. That is, the value of the support force applied by the permanent magnet unit is larger than the gravity of the support.

  By providing an electrically controllable electromagnetic actuator that interacts with a permanent magnet unit or foundation, the excess gravity cancellation can be subtracted to zero.

  Therefore, in a developed form, the permanent magnet unit of at least one magnetic bearing device is formed to generate a support force acting on the support, which support force is greater than the gravity of the support, and the electromagnetic actuator has a support force. It is formed so as to generate an adjusting force that counteracts the above.

  The electromagnetic actuator reacts against the permanent magnet unit, and the support body is floated and contactlessly placed on the foundation in a stable position.

  Instead, the permanent magnet and the electromagnetic actuator can cooperate to share and apply a holding force or a supporting force that counteracts the gravity of the support. By providing at least one or more permanent magnets, it is possible to reduce the force for supporting the support on the foundation, which should be provided to the electromagnetic actuator of the active magnetic bearing device.

  Basically, the permanent magnet unit can cancel out only a part of the gravity of the support, and the electromagnetic actuator can cooperate with the permanent magnet unit. By combining the permanent magnet unit that counteracts gravity with at least one electromagnetic actuator, an active magnetic bearing device is formed, and the actuator only needs to apply an adjusting force to the counterpart member on the base side. Advantageously, the value is smaller than the bearing force applied by the permanent magnet unit.

  The maximum force applied by the electromagnetic actuator can be reduced by one or a plurality of permanent magnet units provided in the plurality of magnetic bearing devices. Therefore, the size and weight of the electromagnetic actuator can be further reduced. This makes the structure of the support more compact and further reduces the weight. Such minimization further reduces the requirement for cooling of the electromagnetic actuator.

  The permanent magnet can also generate a support force greater than the gravity of the support, which repels or attracts the support. In this case, the floating arrangement of the support above the foundation can be realized. The electromagnet functioning as an electromagnetic actuator is exclusively arranged on the support. The electromagnet generates a downward adjusting force that always attracts the foundation. By this adjusting force, the support is held on the foundation in a stable position. Such an embodiment simplifies the mutual arrangement of the electromagnetic actuator and the counterpart member that are operatively connected to each other on the support and the foundation.

  In another embodiment, at least one motion sensor connected to the electronic unit is arranged on the support. The motion sensor can detect a variety of motion states, such as vibration or resonance phenomena of the support, and other mechanical disturbances acting on the device. This motion state can further be used to control at least one or more magnetic bearing devices.

  At least one motion sensor is typically located in the immediate vicinity of the electromagnetic actuator. The motion sensor can in particular be formed independently and separately from the already provided distance sensor. The motion sensor can be formed as an acceleration sensor and / or a speed sensor. By evaluating the signal of the motion sensor, it is possible to appropriately react to the vibration phenomenon or the resonance phenomenon. As a result, positioning accuracy and movement accuracy, and stability and buffering of the magnetic bearing are improved.

  In other embodiments, all the components of the active magnetic bearing and / or drive for the support that are electrically controllable, electrically process or generate signals electrically Is arranged on the support itself. Thus, the foundation can be formed without any electrically controllable components.

  This allows very low cost fabrication and installation of the foundation. Thereby, the foundation can be formed with a relatively low cost, with a large volume and thus with, for example, a relatively long guide rail. Since all electrical components of the device for holding, positioning and / or moving the object are arranged on the support, it is assumed that the standard is uniform, but one support is formed identically Can be used with different bases made. Therefore, the procurement cost and maintenance cost of the apparatus according to the present invention are reduced, which is advantageous. The formation of the base electronic free is also relatively rugged, requiring no maintenance or less maintenance.

  In another embodiment, the support is connected to a repositionable energy supply device. The support in particular has a central energy supply device, so that all the electrical energy required for the operation of the device can be supplied to the support via one interface. This proved advantageous from a structural point of view. The repositionable energy supply device is particularly suitable for moving together with the support. However, it is not necessary to mechanically connect this energy supply device to the support.

  In another embodiment, the energy supply device can be formed as a drag cable, a flexible helical cable of variable length. The energy supply device can further be formed as an inductive energy supply. The specific installation of the energy supply device can be changed according to the use and purpose of use of the device. For applications in vacuum environments, cable connections are advantageous. The drag cable has one end connected to the support and the other end connected to the foundation. However, the drag cable does not mechanically connect the base and the support mechanically based on its mobility and its flexible formation of multiple parts. Thus, the support is still supported non-contacting on the foundation.

  In other embodiments, the energy supply device may further and additionally comprise a data transmission device and / or a cooling medium supply. Drag cables or flexible helical cables of variable length or corresponding cable strands not only function for energy supply, but also between the support and the foundation or between the support and other control devices or Data transmission between signal processing devices can also be performed.

  By the energy supply device further providing a cooling medium supply, eg supply and / or discharge for the cooling medium circuit, the support is cooled simultaneously or passively by the connection of the energy supply device and the support. The Cooling or providing a cooling circuit is particularly important for applications in a vacuum environment. This is because the waste heat generated from the electromagnetic actuator or other electronic components can be discharged very well by the cooling circuit.

  In other embodiments, the support is sufficiently vacuum sealed. In particular, the support comprises a fully closed casing. In this case, only the energy supply device, the data transmission device, and / or the cooling medium supply unit pass through at least one or more conductor guides or conductor penetrations formed in a vacuum-sealed manner from the outside in the casing of the support body. Can be laid.

  The casing of the support can in particular be formed as a metal casing. The casing can also be made as a monolith casing. This can for example be cut from an aluminum block. Within the range of the electromagnetic actuator, in particular within the operating range of the electromagnetic actuator, the casing of the support body is provided with other metal material toward at least one base-side counterpart member. This material has a lower electrical conductivity than aluminum. For example, the support casing is hermetically provided with a special steel or similar metallic material within the working range of the electromagnetic actuator.

  The sensors, in particular the distance sensor of each magnetic bearing device, and the optional motion sensor can be arranged in the support casing. It is advantageous if the support casing is sufficiently permeable for the action of the sensor, in particular within the range of the distance sensor provided for the magnetic bearing device. The distance sensor and the at least one position sensor for detecting the three-dimensional encoding unit can be formed as a magnetic sensor or an inductive sensor, for example.

  In the following description, other objects, features and advantageous embodiments of the invention will be described with reference to the drawings.

1 is a schematic perspective view showing an apparatus for holding, positioning and / or moving an object. FIG. It is the schematic of the magnetic bearing apparatus provided with the control circuit which has an electronic unit. It is a schematic cross-sectional view of an apparatus having a total of four magnetic bearing devices arranged in a plane perpendicular to the transport direction. 3 shows an alternative embodiment of FIG. 3 of a device with a permanent magnet device. It is another schematic diagram which shows the other of a support body.

  FIG. 1 is a perspective view of an apparatus for holding, positioning and / or moving an object 1. The device 1 generally comprises a foundation 30 arranged in a stationary manner. On this foundation, two guide rails 32, 34 are arranged parallel to each other. The guide rail defines a transport direction 2 for the device 1. On the guide rails 32 and 34, the support body 50 is supported in a non-contact manner by a plurality of magnetic bearing devices 10 that can be positively controlled. FIG. 2 shows the basic structure of such a magnetic bearing device 10.

  The magnetic bearing device 10 includes a control circuit 11. This control circuit connects the distance sensor 20, the set value transmitter 25, the controller 22, the amplifier 24, and the electromagnetic actuator 12 to each other. The electromagnetic actuator 12 formed in the shape of an electromagnet includes a coil 16 capable of supplying an electronic signal and a ferrite core or iron core 14. The electromagnetic actuator 12 can be formed as a Lorentz actuator or a moving coil type actuator acting in both directions instead of an electromagnet. The control signal that can be generated by the controller 22 is amplified by the amplifier 24 and supplied to the coil 16 to generate a force acting on the counterpart member 18. The counterpart member 18 is arranged along or on the guide rails 32, 34 on the foundation 30. The counterpart member 18 is a ferromagnetic or permanent magnet. The mating member generally extends parallel to the guide rails 32, 34 on the foundation 30.

  In general, the distance sensor 20 disposed in the immediate vicinity of the electromagnetic actuator 12 continuously measures the distance 26 from the counterpart member 18 or the support 50. The interval 26 measured by the distance sensor 20 is supplied to the set value transmitter 25 in the form of an interval signal. This set value transmitter is connected to, for example, the central controller 29 shown in FIG. This central control unit sets a set value of the distance 26 to be maintained between the foundation 30 and the support 50, for example. The set value and the actual position are compared with each other in the installation transmitter 25 and a corresponding comparison signal is supplied to the controller 22. The controller generates a control signal for controlling the electromagnetic actuator 12 from the comparison signal and supplies it to the amplifier 24.

  Finally, the amplified control signal that can be supplied to the coil 16 is electromagnetic so that the set distance 26 between the support 50 and the foundation 30 is maintained and if there is a deviation from the required distance 26. Calculations and determinations are made so that the force output from the actuator 12 is dynamically adapted to maintain the spacing 26.

  The electronic components of the magnetic bearing device 10 are at least logically grouped in the electronic unit 15 in this example. All electronic components such as amplifier 24, controller 22, setpoint transmitter 25, distance sensor 20 can be arranged on a common substrate, for example in the form of a single integrated circuit. Therefore, the necessary space for the electronic unit 15 and the wiring costs associated therewith can be minimized.

  Further, in the embodiment shown in FIG. 2, a motion sensor 28 is provided on the support 50, typically in the immediate vicinity of the electromagnetic actuator 12. The motion sensor 28 can also be integrated into the electronic unit 15 and the control circuit 11. The motion sensor 28 is in particular formed as an acceleration sensor and / or a speed sensor. The acceleration sensor 28 can measure or detect the motion state, particularly the vibration state or resonance state of the support 50.

  The acceleration sensor 28 arranged on the support 50 can further measure an emergency vibration state or resonance state of the foundation 30 and, in particular, a signal detected by the acceleration sensor 28 and a signal detectable by the distance sensor 20. It can be measured by a combination of If the distance sensor 20 detects, for example, the distance between the foundation 30 and the support 50, which changes with time, and the movement sensor 28 detects no movement or negligibly small movement, this means that the foundation 30 If it is excited or not, it shows signs of mechanical disturbances, such as impact. Accordingly, since the combination of the motion sensor 28 and the distance sensor 20 can detect system disturbances and vibrations, the magnetic bearing device 10 can be appropriately controlled to attenuate such disturbances or vibrations. The motion signal that can be generated by the motion sensor 28 can likewise be supplied to the controller 22 of the control circuit 11. This motion signal is useful for buffering or damping the support of the support 50 on the foundation 30. Therefore, the controller 22 can include a vibration attenuation unit 23 that processes the signal of the motion sensor 28 so as to attenuate the vibration.

  As schematically shown in FIG. 1, a plurality of magnetic bearing devices 10 are distributed and arranged above the support 50. Each magnetic bearing device 10 includes a unique control circuit 11 and a unique electronic unit 15 associated therewith. Thereby, each magnetic bearing apparatus 10 maintains the set space | interval 26 between the foundation 30 and the support body 50 substantially independently. The device 1 further comprises a drive device 38. This drive provides at least a non-contact linear movement of the support 50 relative to the foundation 30. The drive device 38 is in particular formed as a linear motor. For example, in the embodiment of FIG. 1, the drive device comprises a drive rail 36 that extends between the side guide rails 32, 34. The drive rail 36 comprises a permanent magnet structure 42 or a ferromagnetic material. The coil structure 40 disposed on the support 50 can interact magnetically with the permanent magnet structure. Here again, all the power supplyable components of the drive device 38 are arranged on the support 50.

  The drive can also be formed in the form of an asynchronous motor or a reluctance drive. Depending on the implementation of the drive device, the drive rail 36 can be made of or comprise a permanent magnet material or a ferromagnetic material. In the case of an asynchronous motor implementation, the drive rail can comprise aluminum or other metal or can be made of such a metal. FIG. 1 further suggests a central energy supply 52 for the support 50. In the illustrated embodiment, the energy supply device 52 is formed as a drag cable. The other end of the drag cable is disposed on the foundation 30, for example. The flexible formed drag cable allows non-contact movement or non-contact sliding of the support 50 along the guide rails 32, 34 of the foundation 30.

  The support 50 can also be provided with a central control device 29 when each magnetic bearing device 10 can be provided with a unique electronic unit 15. This central control device is connected, for example, to all magnetic bearing devices 10, in particular to its electronic unit 15 in data technology.

  In the highly simplified schematic cross-sectional view of the device for holding, positioning and / or moving an object according to FIG. 3, the foundation 30 is located on the upper side. A support 50 is suspended and supported on this foundation. In this case, generally, the foundation 30 and the support body 50 are provided with molding sections formed in correspondence with each other, for example, L-shaped or T-shaped molding sections. Can be supported and supported securely.

  In the embodiment of FIG. 3, two horizontal magnetic bearing devices 10 arranged transversely or perpendicularly to the conveying direction 2 are provided upwards, ie towards the foundation 30. The electromagnetic actuator 12 of the magnetic bearing device is in particular configured to attract and interact with the foundation, in particular with the counterpart member 18 arranged on the foundation. Both other magnetic bearing devices 10 shown somewhat below in FIG. 3 serve as lateral or side stabilizers 50 on the foundation 30. In this example, a central guide rail 35 is shown. This guide rail is a constituent member of the foundation 30 and, in some cases, is integrated with the foundation 30 or formed integrally with the foundation. By means of the guide rail 35, two magnetic bearing devices 100 arranged on the support 50 opposite to each other can be attracted and interacted with each other. Each magnetic bearing device 100 acting in the horizontal direction (x) is transverse to the direction (x) and thus perpendicular to the transport direction 2 (z) and perpendicular to the vertical direction (y), ie against gravity. The distance 26 set in the vertical direction is maintained.

  FIG. 3 further shows the coil structure 40 of the driving device 38 disposed on the support 50. The coil structure is formed to advance the support 50 along the permanent magnet structure 42 or along the drive rail 36.

  Furthermore, a three-dimensional encoding unit 44 is arranged on the foundation 30 in the transport direction 2. This encoding unit can be read by a position sensor 46 arranged on the support side. In particular, the position sensor 46 can be connected to the central control device 29 schematically shown in FIG. 1 and can generate a position signal corresponding to the position of the support 50. Thereby, the support body 50 can detect the position in the conveyance direction 2 (z) automatically.

  Instead of the two magnetic bearing devices 100 arranged opposite to the guide rail 35 and each generating an attractive force, a magnetic having an electromagnetic actuator acting in both directions, such as a Lorentz actuator or a moving coil actuator, for example. Only one support device may be provided.

  FIG. 4 shows a variant embodiment of the device 1 of FIG. In this case, the foundation 30 is below the support 50. In this case, the magnetic bearing device 10 for at least partially canceling the gravity of the support 50 is formed as a Lorentz actuator for applying a repulsive force acting downward to the foundation 30 or an attractive force against the counterpart member or the foundation 30. It is formed as an electromagnet for generating. In the illustrated embodiment, each magnetic bearing device 10 includes a permanent magnet unit 54. Here, the permanent magnet 56 is provided in the range of each magnetic bearing device 10 on the support side. This permanent magnet, for example, attracts and interacts with the guide rails 32, 34, only part of which is shown in FIG.

  Various implementations of the permanent magnet device 54 are conceivable. As an alternative to the illustration of FIG. 4, the guide rails 32, 34 or their ranges can be formed of permanent magnets or ferromagnetic, and corresponding ferromagnetic or permanent magnet elements 56 are provided on the support 50. Yes. Further, the mounting of the permanent magnet device 54 is not limited to the structure of the support body 50 and the foundation 30 shown in FIG. Similarly, a permanent magnet device can be mounted on a suspension structure as shown in FIG.

  In this case, the guide rails 32, 34 have a T-shaped cross section. The permanent magnet 56 of the magnetic bearing device 10 is disposed between the T-shaped section of the guide rails 32 and 34 and the surface of the base 30 formed in a plate shape. The permanent magnet unit 54 can cancel at least part of the gravity of the support 50. The support force that is output from the permanent magnet unit 54 and acts on the foundation 30 can be made larger than the gravity of the support 50. Thereby, in order to support the support body 50 on the foundation 30 in a stable non-contact state, the electromagnetic actuator 12 of the magnetic support device 10 can generate an adjusting force that reacts with the permanent magnet unit 54.

  3 and 4 further schematically show the energy supply of the support 50 by means of an energy supply device 52, for example formed as a drag cable. In this case, the energy supply device 52 is guided to the inside of the casing 60 of the support body 50 by a conductor penetrating portion 58 adapted to a vacuum. Since the conductor penetrating portion 58 is particularly sufficiently airtight, the hollow chamber inevitably provided inside the support 50 can be formed in a sufficiently vacuum-sealed manner. Thereby, for example, contamination of the vacuum environment due to a substance present in the hollow chamber of the support 50 can be sufficiently closed.

  In another schematic illustration according to FIG. 5, a fully closed casing 60 of the support 50 is shown. The support body 50 cut perpendicularly to the transport direction 2 includes four magnetic bearing devices 10 and 100 in the cut surface. Both magnetic bearing devices 10 shown on the upper side act against gravity. On the other hand, both magnetic bearing devices shown on the lower side are designed for lateral and lateral stabilization, respectively. For example, as suggested in FIG. 1, a plurality of such magnetic bearing device structures can be provided in the conveying direction 2 or in the longitudinal direction of the guide rails 32, 34 of the foundation 30.

  In FIG. 5, each magnetic bearing device 10 equipped with the electromagnetic actuator 12 includes a unique electronic unit 15. Each of the electronic units is disposed in the immediate vicinity of the electromagnetic actuator 12 of the magnetic bearing device 10 or 100. Both the coil structure 40 and the position sensor 46 are arranged in a fully closed casing 60 of the support 50. Since all of the electrically controllable elements, signal processing elements or signal generating elements of the device 1 are arranged on the support 50, the wiring costs can be reduced and thus the vacuum compatibility of the device is improved. . This structure further allows the formation of a solid foundation 30 that is not equipped with electronic components and is therefore low cost.

DESCRIPTION OF SYMBOLS 1 Holding | maintenance, positioning and / or conveyance apparatus 2 Conveyance direction 10 Magnetic bearing apparatus 11 Control circuit 12 Electromagnet 14 Iron core 15 Electronic unit 16 Coil 18 Opposite member 20 Distance sensor 22 Controller 23 Vibration attenuation part 24 Amplifier 25 Setting value transmitter 26 Space | interval 28 Motion sensor 29 Central control device 30 Foundation 32 Guide rail 34 Guide rail 35 Guide rail 36 Drive rail 38 Drive device 40 Coil structure 42 Permanent magnet structure 44 Encoding unit 46 Position sensor 50 Support body 52 Energy supply device 54 Permanent magnet device 56 Permanent magnet 58 Conductor penetrating portion 60 Casing 100 Magnetic bearing device

Claims (15)

A foundation (30) and a support (50) movable relative to the foundation (30);
Comprising at least three magnetic bearing devices (10, 100), by which the support (50) is non-contact supported on the foundation (30),
At least two of the magnetic bearing devices (10, 100) are formed as actively controllable magnetic bearing devices (10, 100) and are electrically controlled to interact magnetically with the counterpart member (18), respectively. A possible electromagnetic actuator (12), which can be actively controlled by the electronic unit (15) to maintain a set distance between the base (30) and the support (50). And at least two electromagnetic actuators (12) of the magnetic bearing device (10, 100) and the electronic unit (15) are arranged on the support (50),
A device for holding, positioning and / or moving an object (52).   The actively controllable magnetic bearing device (10, 100) on the support (50) is for measuring the distance (26) between the foundation (30) and the support (50), respectively. 2. The device according to claim 1, comprising a distance sensor (20).   The magnetically controlled device (10, 100), which can be positively controlled on the support (50), respectively, depends on the distance (26) detectable by the distance sensor (20), depending on the electromagnetic actuator (12). 3. The device according to claim 2, comprising an electronic unit (15) configured to control.   The electronic unit (15) is connected to at least two magnetic bearing devices (10, 100) or the electronic unit (15) formed as a central control device (29) is used for all active magnetic bearings. Device according to any one of claims 1 to 3, connected to the device (10, 100).   At least one guide rail (32, 34) with at least one counterpart member (18) extending along the conveying direction (2) is arranged on the foundation (30), the counterpart member being The device according to any one of the preceding claims, wherein the device interacts magnetically with the electromagnetic actuator (12).   The device further comprises a drive device (38) for moving the support (50) relative to the foundation (30) along at least one transport direction (2), the drive device (38). ) Disposed on the foundation (30), and a coil structure (40) disposed on the support (50) and interacting with the permanent magnet structure (42). The device according to claim 1, comprising:   A three-dimensional encoding part (44) extending along at least one transport direction (2) is arranged on the foundation (30), and this encoding part is arranged on the support (50). Device according to any one of the preceding claims, readable by a position sensor (46).   The at least one magnetic bearing device (10) comprises a permanent magnet unit (54) and an electrically controllable electromagnetic actuator (12) interacting with the permanent magnet unit (54). The apparatus as described in any one of -7.   At least one permanent magnet unit of the magnetic bearing device (10) is formed so as to generate a supporting force (S) acting on the support (50), and this supporting force is determined by gravity (G) of the support. The device according to claim 8, wherein the electromagnetic actuator (12) is configured to generate an adjusting force that counteracts the support force (S).   The device according to any one of the preceding claims, wherein at least one motion sensor (28) connected to the electronic unit (15) is arranged on the support (50).   All components (15, 16, 20, 22, 24, 25, 28) that process or generate signals that are electrically controllable of the active magnetic bearing device (10, 100) 11. A device according to any one of the preceding claims, arranged on a support (50).   12. A device according to any one of the preceding claims, wherein the support (50) is connected to a repositionable energy supply device (52).   13. Device according to claim 12, wherein the energy supply device (52) is formed as a drag cable, as a flexible helical cable of variable length or as an inductive energy supply.   14. Apparatus according to claim 12 or 13, wherein the energy supply device (52) comprises a data transmission device and / or a cooling medium supply.   The device according to any one of claims 1 to 14, wherein the support (50) is formed in a vacuum-sealed manner.

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