DE102015016081A1 - Lock or lock device for a vacuum chamber - Google Patents

Abstract

The present invention relates to a closure or Schleußenvorrichtung for a vacuum chamber (12) with - a on a vacuum chamber (12) can be arranged and an opening (14) of the vacuum chamber (12) enclosing counter-plate (16), - a movable relative to the counter-plate (16 ) mounted frame (15) on which a closure cover (18) is movably arranged, wherein the closure lid (18) in a closed position (28) on the counter-plate (16) sealingly closes the opening (14), - at least one with the counter-plate (16) and with the closure cover (18) engaging magnetic means (30) for generating a counter-plate (16) and closure cover (18) acting closing force (C).

Description

Technical area

The present invention relates to a closure or lock device for a vacuum chamber with a can be arranged on a vacuum chamber and an opening of the vacuum chamber surrounding the counter plate and a movable relative to the counter plate mounted closure lid which closes the opening of the vacuum chamber in a closed position on the counter-plate. In addition, the invention relates to a method for closing an opening of a vacuum chamber by means of such a closure or lock device.

background

Locking and closing devices for vacuum chambers are well known in the art. For example, describes the WO 2005/121621 A1 a generic lock device for a arranged in a wall between a first and a second recipient lock opening and with a arranged in the interior of the first recipient obturator and the obturator associated counter plate. The flange-like configured and the opening enclosing the counter plate is provided with a peripheral seal, against which the obturator is pressed sealingly.

To maintain a required tightness, in particular to maintain high vacuum conditions within the vacuum chamber, it is desirable that the obturator as evenly as possible in the circumferential direction around the opening distributed areas of the seal presses. The application of a uniform and homogeneous contact pressure on the seal over the entire seal is particularly difficult in the case of seals with a seal diameter of a few millimeters for a dimension of a shut-off device or a closure cover in the range of a few decimeters or meters in terms of design and production engineering.

The realization of a sealing ring compressed stroke of about 0.5 mm to 2 mm over an area of the sealing cover in the range of for example 0.5 to 5 m ^2, or moreover, proves to constructive and manufacturing technology to be extremely costly. In addition, a direct contact of counter-plate and cap, which are typically made of metal for reasons of required clean room conditions and for reasons associated with this required particle freedom in the environment of the vacuum chamber necessarily to avoid.

Also, any possible shearing movements between the seal and a metal component coming to rest thereon during closing of the closure or lock device, also typically between the seal and the closure cover, are also to be avoided or kept to a minimum, for reasons of compliance with the required clean room conditions and freedom from particles to reduce.

In addition, the gasket typically made of an elastomeric material, such as rubber, may undergo an aging process and may change its elastic properties with continued use of the closure or lock device. Furthermore, it is conceivable that the vacuum chamber is operated with different vacuum or pressure levels. If the closure or lock device seals the interior of the vacuum chamber against the atmosphere or another ambient pressure, for example. Against a different pressure of an adjacent vacuum chamber, the contact pressure on the seal depending on the pressure prevailing in the vacuum chamber in each case vary and it can relative movements come between the seal and metal parts of the lock or lock device.

In that regard, the present invention has the object to provide an improved closure or lock device for a vacuum chamber, by means of which a particularly uniform and preferably only perpendicular to the seal acting pressing force when closing the vacuum chamber is exercisable. It is in particular objective to avoid any shearing movements or friction on the typically rubber-elastic seal between counter-plate and closure cover or to reduce to an absolutely necessary minimum. With the device, a particularly high degree of particle freedom and purity in the region of the vacuum chamber should be achievable. The closure or lock device should also be characterized by a comparatively low weight and easy and good handling of their individual components in terms of manufacturing, assembly and long-term operation.

Invention and advantageous embodiments

This object is achieved with a closure or lock device according to independent claim 1. Advantageous embodiments are each the subject of dependent claims.

In that regard, a closure or lock device is provided for a vacuum chamber. The closure or lock device has a can be arranged on a vacuum chamber or arranged thereon, possibly integrated in the vacuum chamber or connected to a chamber wall counter plate which encloses an opening of the vacuum chamber. The counter-plate is typically formed flange. It can protrude outwardly from the wall of the vacuum chamber and form or have a contact surface extending approximately perpendicular to the direction of insertion through the opening of the vacuum chamber.

The closure or lock device further has a relative to the counter plate movably mounted frame. At this a closure lid is in turn arranged to be movable. The closure lid can be brought into a closed position on the counterplate, in which the closure lid seals the opening of the counterplate. In this case, it is in particular the frame which is movably mounted on the counterplate between an open position and a contact position. In the open position, the frame and the counter-plate arranged thereon release the opening of the vacuum chamber, so that substrates to be treated in the vacuum chamber can be introduced into the vacuum chamber and removed therefrom.

In a contact position, the frame is in mechanical contact with the backing plate. The closure lid, which is movably mounted on the frame, can lie comparatively loosely against the counterplate in that contact position, typically against a seal enclosing the opening of the counterplate, but without exerting appreciable forces on the seal. It is also conceivable that in the contact position of the frame on the counter plate of the closure lid with respect to the counter plate or with respect to the counterplate typically arranged on the seal is non-contact.

A sealing the opening and thus the vacuum chamber sealing is carried out by the contact position of the frame out by a movement of the closure lid relative to the frame, which is already in contact position with the counter-plate.

Furthermore, the closure or lock device has at least one controllable and / or controllable magnetic device which is operatively connected to the counterplate and the closure lid. This is designed to produce a closing force (C) acting between the counterplate and the closure lid. By means of the controllable magnetic device, the amount and the direction of the closing force acting between the counter-plate and the closure lid can be varied. Depending on the specific configuration of the magnetic device, both an attractive and repulsive force can be exerted on the closure lid in order to optionally close or open the opening of the vacuum chamber by means of the closure lid, depending on the pressure level prevailing in the vacuum chamber and the vacuum chamber environment.

The closure lid may in this case be subject to a comparatively small stroke or a comparatively short or small movement relative to the frame. Such small or short movements are separate and thus particularly well controlled and controlled by the magnetic device. In particular, this allows a defined and as even as possible deformation of an elastic seal between the closure cap and counter-plate can be achieved.

In a development, the closure lid has a flat lid surface. The closure lid is further displaceable in a direction parallel to a surface normal (N) of the lid surface on the frame. Typically, the closure lid is slidably mounted between a rest position (U) and the closed position (S) on the frame. It is typically arranged in a translational or linearly movable manner on the frame. The fact that the closure lid is mounted substantially perpendicular to the lid surface or perpendicular to a plane of the frame movable on the frame, the closure lid under the action of the magnetic device over the circumference of the seal homogeneous contact force and thus exert a homogeneous compression on the seal.

It is provided in particular that the closure lid is moved in a position in contact position frame and starting from a rest position on the frame by the magnetic device exclusively in the direction of the surface normal to the frame. Any shear forces or relative to the seal rubbing relative movements between the closure cap and the seal can be widely avoided in this way. When closing the lock or lock device, d. H. when transferring the closure cover from a rest position on the frame into the closed position compressing the seal, the seal experiences exclusively or predominantly only a compression directed perpendicular to the plane of the closure lid or perpendicular to the plane of the seal. A friction or crushing of the seal in the transverse direction can be largely avoided by the said leadership of the closure lid on the frame.

In a further embodiment, the closure lid is connected to the frame via at least one restoring element. The restoring element is for exerting a restoring force on the Closure lid formed, which is directed against the closing force generated by the magnetic device. During the sealing closing of the closure or lock device, the magnetic device acting between the counter plate and the closure cover counteracts the restoring force of the at least one restoring element. This has the advantage that the magnetic device only has to generate a force acting in a single direction, namely in the closing direction.

The magnetic device is in this case designed to generate a closing force that is greater than the restoring force acting on the closure lid. In particular, the closing force which can be exerted by the magnetic device on the closure lid is greater than the sum of the restoring forces of all the restoring elements by means of which the closure lid is mounted on the frame. To close the opening, the magnetic device acts as it were against the restoring force of all restoring elements. Since the closing force is greater than the sum of all restoring forces, this leads to a movement of the closure lid in the closed position upon activation of the magnetic device.

For opening the vacuum chamber, on the other hand, it is provided to reduce the closing force emanating from the magnetic device at least to a predetermined extent, so that the actual closing force is less than the sum of all the restoring forces of all restoring elements. As a result, the closure lid is displaced over the at least one, typically over a plurality of return elements in the rest position on the frame at a correspondingly low or completely missing closing force of the magnetic device. In this, the closure lid is either in a loose contact position for sealing the counter plate or at least there is a gap between the closure lid and provided on the counter plate seal, so that the closure lid in the rest position in a contact position frame without contact to the counter plate or to the provided on the back plate seal.

In a further development, it is further provided that the at least one restoring element is an elastic return element. The restoring element is so far elastically deformable and provides the required restoring force due to its elasticity. An elastic return element can in particular be formed in one piece in the form of a single component which, apart from its elastic deformation, is not subject to any relative movement between the frame or closure lid. The one-piece design of a restoring element, thus its elastic deformability proves to be advantageous for maintaining the required particle freedom. In particular, by the elastic deformability of the at least one restoring element, friction of the restoring element with other components of the closure or lock device can be prevented.

According to a development, the at least one restoring element has at least one return spring. The return spring may be formed, for example in the form of a leaf spring. The return spring may for example extend between opposite legs of the frame. The return spring may be connected approximately centrally between the frame legs with the closure lid. As a result, a centric or surface-centered mounting of the closure lid on the frame can be achieved, which can advantageously affect the linear displaceability of the frame.

According to a further embodiment, the closure lid is arranged on the frame via a plurality of spaced-apart restoring elements. It proves to be advantageous if over the surface of the frame, that is distributed over the surface of the closure lid several equally effective return element or more return springs. In this way, the most homogeneous and defined restoring force can be provided over the surface of the frame or over the surface of the closure lid.

According to a development thereof, the sum of the restoring forces acting on the closure cap by all restoring elements is greater than the weight force of the closure cap. Such a design of the return elements allows, for example, a horizontal, thus a horizontal orientation of the counter-plate and a loading of the vacuum chamber from above. If the sum of all the restoring forces which can be exerted on the closure lid is greater than the weight of the closure lid, the closure lid can also be pulled upwards by the restoring elements against its own weight force into the rest position on the carrier. Such an interpretation of the restoring forces proves to be advantageous for a flexible use of the closure or lock device and in particular for the most varied geometric orientations of the closure or lock device.

According to a further embodiment, the frame between a previously mentioned open position and an already mentioned contact position is arranged pivotably or displaceably on the counter plate or on the vacuum chamber. In the open position, the frame and the closure lid arranged thereon release the opening of the vacuum chamber.

A sliding guide is particularly suitable for a space-saving design and arrangement of the closure or lock device in the region of a substrate-processing process station. Unlike swivel-mounted closure lids, the region which lies outside the opening of the vacuum chamber and, so to speak, in the extension of that opening can be used to arrange further components of a process station and does not have to remain free, as is customary with a pivotable mounting of the closure lid.

The closure lid can be mounted without contact on the guide by means of one or more magnetic bearings. As a result, a non-contact, thus a wear and low maintenance sliding of the closure lid and relative to the counter plate is possible. Unlike a roller bearing guide the cap results in a magnetic bearing-based storage of the cap no abrasion. Required clean room conditions and a required particle freedom in the area of the lock or lock device can hereby be easily met.

The magnetic bearing provided for the guide can, similar to those provided for the closure or lock device magnetic device each having an electromagnetic actuator and a magnetically interacting counterpart and a distance measuring device and a control circuit, so that the closure lid by means of one or more magnetic bearings quasi free suspended in a predetermined distance from the guide and is movable along the guide.

According to a development of the closure lid is in the position in contact position frame by means of the magnetic device relative to the frame of a rest position in the sealing closed position transferred. In the contact position of the frame is applied to the back plate or to the vacuum chamber. The closure lid covers the opening substantially completely. He closes the opening but not yet gas-tight. In that regard, there may be an air gap between the closure cap and the gasket, which is typically arranged on the opposite side of the plate.

Only with activation of the magnetic device and controlled by the magnetic device or controlled displacement movement of the closure cover perpendicular to the plane of the closure lid, or perpendicular to the plane of the carrier and thus typically also perpendicular to the opening plane lying between counter-plate and closure lid seal in the required manner and be compressed as evenly as possible.

In a further embodiment, at least one spacer is arranged between the frame and the counterplate. In the contact position of the frame on the counter-plate is the at least one spacer between the facing sides of the frame and counter-plate. Typically, a plurality of spacers are provided over the circumference of the opening of the counterplate. About the spacer or the frame is based on the on reaching the contact position on the counter plate. The geometric configuration and the arrangement of the at least one, preferably a plurality of spacers defines the contact position of the frame on the counter-plate.

The extent of the at least one or more spacers perpendicular to the plane of the frame or perpendicular to the plane of the counter-plate is at least as large as the sum of a displacement of the closure cover between the rest position and the closed position on the frame plus the thickness of the closure lid. By such spacers dimensioned ensures that the, for example, on the side facing the counter-plate frame lid is out of contact with the counter plate or the seal provided thereon, when the frame with it in the rest position closure lid from the open position to the contact position is transferred.

Premature contacting or sliding along of the closure cap at a portion of the seal due to pivotal or translational movement of the frame can be prevented in this manner.

According to one embodiment, the magnetic device has at least one electromagnetic actuator arranged on one of the closure lid and counterplate and at least one counterpart arranged on the other of the closure lid and the counterplate, which magnetically interacts with the electromagnetic actuator. The electromagnetic actuator can be arranged, for example, on the counter-plate or let into the counter-plate, while the counterpart can be arranged on the closure lid. It is also conceivable that the counterpart is integrated in the cap, or that the entire cap acts as a counterpart.

The counterpart or the closure cap is designed either ferromagnetically or permanently magnetically in order to be in magnetic operative connection with the acted upon by a corresponding control current electromagnetic actuator to step. In the closed position of the closure lid on the counter plate, in which the closure cover completely covers the opening cross section of the vacuum chamber, the electromagnetic actuator and its associated counterpart reach at least partially overlapping, so that a sufficient closing force or opening force can be generated.

It is generally conceivable for the electromagnetic actuator of the magnet device to be arranged on the closure lid, while the counterpart interacting magnetically with the electromagnetic actuator is arranged on the counterplate or formed thereon.

Regardless of whether the electromagnetic actuator is arranged on the closure lid or on the counterplate, at least one further permanent magnet, which can further support the force emanating from the electromagnetic actuator, can also be arranged on that component on which the electromagnetic actuator is arranged. Hereby, for example, an electroless locking of the closure lid can be achieved, so that the coil of the actuator can be acted upon with a much lower current intensity. Heat losses of the coil and associated problems with cooling or thermal expansion can thereby be reduced or even eliminated.

According to a further embodiment, an elastically compressible seal surrounding the opening is arranged in an intermediate space between the sides of the closure lid and the counterplate facing each other in a closed position of the closure lid on the closure lid or on the counterplate. The seal can be arranged for example on the counter-plate. For this purpose, the counterplate may, for example, have a groove enclosing the opening of the vacuum chamber, in which the peripheral seal is arranged. In the uncompressed initial state, the thickness or the diameter of a sealing portion is greater than the depth of the groove receiving the seal, so that a part of the seal at least slightly protrudes from the closure lid facing side of the counter-plate, thus with the contact surface formed by the counter-plate. By that configuration, the closure lid with the seal sealingly come to rest, without the metal components of counter-plate and closure cover touching each other.

The mutually facing sides of the closure lid and the counterplate are typically designed at least in regions as planar contact surfaces, which are in the closed position substantially perpendicular to the predetermined by the geometry of the opening of the vacuum chamber direction (z), or perpendicular to a closing direction in which the the magnetic device outgoing closing force acts, extend.

The seal is typically made of an elastomer and has a suitable for the intended use elasticity or compressibility. By means of the distance-dependent regulation of the closing force of the magnetic device is also conceivable, also with regard to their elastic or mechanical properties different seals, each to be used for different purposes of the closure or lock device. By means of the distance-dependent regulation of the closing force, the closure or lock device can be adapted adaptively to different or varying elastic properties of a respective intended seal. The seal may be formed as an O-ring-like seal, thus as a circumferential and circumferentially closed sealing ring.

Although the seal is preferably arranged in a groove of the counter-plate and the interlockable closure lid is formed sealless and reverse embodiments are conceivable in which the seal is arranged on an inner side of the Verschussdeckels, in particular in a groove of the closure cover and wherein the counter-plate sealless formed is.

According to a further embodiment, the closure or lock device has at least one distance measuring device for measuring a distance between the closure cover and the counterplate. By means of the distance measuring device, a distance between closure cap and counterplate in the direction of the closing force emanating from the magnet device can be measured at least at certain points. The distance between the closure cap and the counterplate is a measure of the currently prevailing compression or elastic deformation of a seal provided between the counterplate and the closure cap, provided that the closure cap bears against the counterplate via the gasket. Consequently, the degree of elastic deformation of the seal can be measured by means of the distance measuring device.

It is further provided for the closure or lock device that the magnetic device can be regulated as a function of the distance between the counterplate and the closure cover measured by the distance measuring device. By the extent provided for distance-dependent control of the magnetic device, different closing forces can be generated depending on the distance, so that for example between the counter plate and Cover provided seal is compressible to a required level. By means of the distance measuring device and the extent provided for feedback to the at least one magnetic device, a wide variety of states of the closure or lock device can be detected.

For example, it can be measured by means of the distance measuring device whether and to what extent the counterplate and sealing cover abut one another in a sealing manner. If the distance is approximately above a maximum value intended for a sufficient seal, the closing force can, for example, be gradually increased by means of the controllable magnetic device until the maximum permissible maximum distance is undershot.

In the opposite case, it is also conceivable that upon detection or measurement of too small a distance between the counterplate and the closure lid, a direct contact of the counterplate and the closure lid, which is typically made of metal, is to be feared. This is to be avoided in particular for reasons of a required particle freedom in the environment of the vacuum chamber necessarily. In such a case, the closing force, for example, gradually reduced in amount until a minimum allowable distance between the closure cap and counter-plate is exceeded.

By means of the distance-dependent control and control of the magnetic device can thus be reacted to different or time-varying pressure levels within the vacuum chamber. By a pressure difference between the interior of the vacuum chamber and the environment or by a pressure difference on both sides of the cover, a closing force or opening force can already abut the closure cap per se. By means of the distance-dependent controllable magnetic device can be compensated for varying pressure differences on the opposite sides of the closure cap.

According to a further development, at least one electronic control circuit is also provided, which is coupled to the distance measuring device and to the at least one magnetic device and designed to maintain and / or set a predetermined distance between the counterplate and the closure cover. The control loop typically has a reference value transmitter, by means of which the distance signals which can be generated by the distance sensor are compared with a predetermined desired value. From the comparison of setpoint and actual value, a controller connected downstream of the setpoint generator can be used to generate a control signal for actuating the magnetic device, in particular for controlling the electromagnetic actuator.

The control signal which can be generated by the controller is typically supplied via an amplifier to the electromagnetic actuator of the magnetic device. By means of the electronic control circuit an active and automatic regulation of the closing force can be realized. Any sudden or continuous changes in the operating or ambient conditions, such as a change in the pressure difference between the interior of the vacuum chamber and the environment can be reacted flexibly in this way, dynamically and depending on the situation. By means of the distance measuring device and the magnetic device coupled together control loop, a required distance between counter-plate and cap and thus a required contact pressure of the cap and a concomitant compression of provided between the backing plate and cap seal can be brought about and controlled adhered.

According to a further embodiment, a plurality of magnetic devices each provided with its own distance measuring device are arranged distributed over the circumference of the opening or over the circumference of the counter plate designed, for example, in the manner of a flange. By providing a plurality of magnet devices distributed over the opening circumference, a particularly uniform contact pressure and closing force can be set between the counterplate and the closure lid. It is thereby further possible to compensate for any deformations or manufacturing inaccuracies of counter-plate and / or cover lid control technology.

Each of the distance measuring device coupled with one magnet device can, as it were, autonomously set and maintain a predetermined distance between the counterplate and the closure lid at the location of the corresponding distance measuring device or magnet device. Pressure-dependent and inevitably minimal deformations of the closure lid, which would otherwise lead to an uneven pressing or closing force of the seal, can thus be effectively compensated and an uneven gap dimension or a varying over the opening circumference distance between the closure lid and counter-plate can be counteracted.

Any load-dependent or manufacturing-related deformations or component tolerances can be compensated by control technology. By means of several, each provided with its own distance measuring device magnetic devices can over the circumference of the opening or locally different closing forces and contact pressures are generated over the circumference of the counter plate, so that in the result a homogeneous compression of the seal targeted and controlled is adjustable, which ultimately leads to a required tightness of the closure or lock device. In practical application, that configuration is of particular advantage, namely in particular if at least one of the closure lid and the counterplate are not absolutely rigid and / or subject to local deformations depending on the load.

By means of a plurality of magnetic devices each provided with a distance measuring device, such effects can be eliminated and compensated for by regulation. It is even possible to tolerate comparatively large component tolerances or mechanical deformations for the design of closure lid and / or counterplate, so that a comparatively filigree design with a comparatively low weight can be provided even for comparatively large-surface configurations of closure lid and counterplate.

According to a further embodiment of the closure or lock device is provided that the distributed over the circumference of the opening of the vacuum chamber or over the circumference of the counter-plate or over the circumference of the closure lid arranged magnetic devices are each coupled with its own control loop. As a result, each of the magnet devices independently of one another can adjust and regulate the distance prevailing at their respective position or a gap dimension between the closure cover and the counterplate.

As a result, processing of the distance signals available from the respective distance measuring devices can be performed locally in the area of the magnetic devices and control circuits. Any data and signal lines can thereby be reduced to a minimum, which may prove to be particularly advantageous for applications in the vacuum sector.

According to a further embodiment, the magnetic devices distributed over the circumference of the opening and / or the distance measuring devices associated with the magnetic devices are coupled to a central controller. The central control can be provided instead of a local control loop or in addition to the control circuit associated with the respective magnetic device and the associated distance sensor. By means of a central control, which is for example coupled with all control circuits of all magnetic devices in terms of data technology, a synchronous control of the control circuits can take place in a particularly simple manner.

For example, the central control can each be coupled to the setpoint generator of the individual control loops, so that by means of the central control a distance to be maintained between the counterplate and the closure lid can be simultaneously transferred to all control loops. By means of the central control, the user of the closure or lock device receives a control element which is particularly easy to operate, with which a distance or a corresponding gap dimension between closure cover and counter plate can be set synchronously or at the same time for all control circuits and magnetic devices.

For each of the different configurations of the closure or lock devices, various distance measuring devices can be provided. The distance measuring device may for example have one or more distance sensors, which are based on an optical, magnetic or capacitive measuring principle. In particular, sensors are used which are based on an inductive measuring principle or on the basis of eddy currents. The distance sensor is arranged in particular in the immediate vicinity of the magnetic device, in particular in the immediate vicinity of the electromagnetic actuator or to the counterpart of the magnetic device, so that the highest possible degree of coking can be achieved. The immediately adjacent or even overlapping arrangement of distance measuring device and magnetic device contributes to the improvement of the measurement and control accuracy. In particular, the distance sensor can be arranged on the counterplate and thus measure a distance, in particular a gap dimension, between the counterplate and the closure cover. A distance sensor arranged on the counterplate is designed in particular to measure the distance to a defined reference surface or a reference point of the closure lid precisely, typically with an accuracy in the submillimeter or in the micrometer range.

Brief description of the figures

Other objects, features and advantageous embodiments of the invention will be explained in the following description of embodiments with reference to the drawings. Hereby show:

1 a simplified schematic representation of the closure or lock device with the closure lid supporting the frame in the contact position and located at rest on the frame cap,

2 a perspective view of the closure or lock device with the cover open,

3 the closure or lock device according to 2 in closed position,

4 a further embodiment of the closure or lock device with a displaceably mounted on the counter plate or on the vacuum chamber frame in the open position,

5 the closure or lock device according to 4 with the frame and with the closure lid in the closed position,

6 a cross section through the closure or lock device according to 2 in open position,

7 a representation according to 6 , but with the frame in contact position and the closure lid at rest on the frame and

8th a representation according to 7 , but with the closure lid in the closed position relative to the frame.

Detailed description

In the 1 cross-sectional closure or Schleußenvorrichtung 10 is for placement at an opening 14 a vacuum chamber 12 intended. The lock or lock device 10 has a counter plate 16 on, typically with the in 1 schematically indicated wall 11 the vacuum chamber 12 connected is. The counter plate 16 can be aligned with the opening 14 the vacuum chamber 12 on the wall 11 arranged or as an integral part of the vacuum chamber 12 be educated. In that regard, also the counter plate 16 an opening 14 typically having the opening of the vacuum chamber 12 can coincide.

As from the synopsis of 2 . 3 such as 6 to 8th shows, in this embodiment, the far reaching newly designed cap 18 on a frame 15 by means of several return elements 82 slidably mounted. The displaceability and the deflection of the return elements 82 result from a comparison of 7 and 8th , The frame 15 itself, for example, is pivotable on the counter plate 16 stored. In the 2 and 3 is a corresponding pivot or hinge axis 80 shown. In the embodiment of 4 and 5 is the frame 15 linearly displaceable on the counter plate 16 stored.

The counter-plate 16 facing side 19 the closure lid, thus the inner lid surface 81 is essentially just trained. In the example in 7 shown rest position U of the closure lid 18 relative to the frame 15 and in which in contact position K on the counter plate 16 located frame 15 is the lid area 81 essentially parallel to a plane of the seal 22 aligned, which is in the groove 20 at the closure lid 18 facing side 17 the counter plate 16 located.

In an in 8th shown closed position 28 closes the cap 18 the opening 14 gas-tight or vacuum-tight. counterplate 16 and cap 18 are further provided with at least one magnetic device 30 provided by means of which a closing force (C) on the closure lid 18 exercisable.

The counter plate 16 may have a flange-like geometry and in particular on a closure lid 18 facing and acting as a contact surface side 17 a seal 22 have, which are around the opening 14 typically in the region of an aperture boundary of the counterplate 16 extends. In the present case, the seal is made of an elastic and deformable material 22 in a circumferential groove 20 the counter plate 16 arranged. But it can also be in a corresponding groove of the cap 18 or in a gap 25 between cap 18 and counter plate 16 be arranged.

Upon reaching an in 8th shown closed position S is the seal 22 between cap 18 and counter plate 16 deformed or pinched so that the opening 14 is sealed gas-tight.

By means of the magnetic device 30 is a closing force (C) directed in the insertion or closing direction (z) on the closure cap 18 exercisable. The closing force (C) is typically perpendicular to the plane (x, y) or perpendicular to the contact surface or to the side 17 the counter plate 16 aligned. Also the closure lid 18 has one of the counter plate 16 facing, also acting as a contact surface side 19 on. The in closed position 28 facing each other 17 . 19 from counter plate 18 and cap 19 are at least partially aligned parallel to each other.

The relevant contact surfaces of the mutually corresponding sides 17 . 19 extend in an xy plane.

The magnetic device 30 in this case has at least one on the counter plate 16 arranged electromagnetic actuator 32 as well as a magnetically interacting and on the closure lid 18 arranged counterpart 34 on. The counterpart 34 is designed as a permanent magnetic or ferromagnetic component, the either on the cap 18 arranged or in the cap 18 is embedded. It is also conceivable that the closure lid 18 itself at least partially has a permanent magnetic or ferromagnetic material or at least partially or completely formed from such a material.

By energizing or by applying a coil 33 of the electromagnetic actuator 32 Using electric current can create an attractive or repulsive force on the cap 18 be exercised. By regulating the current intensity or by varying the control signal can from the magnetic device 30 outgoing closing force (C) can be varied as needed.

The lock or lock device 10 also optionally has a distance measuring device 40 on, by means of which a distance 41 between the cap 18 and the counter-plate 16 , in particular a distance between the mutually facing sides 19 . 17 from cap 18 and counter plate 16 determinable and measurable quantitatively. The distance measuring device 40 in the present case has one on the counter plate 16 arranged distance sensor 42 on that a distance 41 in the closing direction (z) between counter plate 16 and cap 18 measures. By means of the distance measuring device 40 can thus the magnetic device 30 , In particular, the outgoing from her closing force (C) are regulated as a function of the distance. It is provided in particular that by means of a distance-dependent control of the magnetic device 30 the distance 41 between cap 18 and counter plate 16 is precisely adjustable to a predetermined level.

For the distance-dependent control is in particular a control loop 45 provided, which the magnetic device 30 with the distance measuring device 40 coupled. The control loop 45 has a setpoint generator 44 on which data technology with the distance sensor 42 connected is. The setpoint generator 44 receives the from the distance sensor 42 provided distance signals and compares them with a preset or by a central control variable specifiable setpoint. Setpoint and actual value are in the setpoint generator 44 compared to each other.

A resulting comparison signal is then a controller 46 supplied, the one for controlling the electromagnetic actuator 32 provided control signal generated. That of the regulator 46 Generable control signal is via an amplifier 48 the electromagnetic actuator 32 fed. That the coil 33 of the electromagnetic actuator 32 A feedable amplified control signal is calculated and determined such that a predetermined distance 41 between counter plate 16 and cap 18 is maintained, and that in case of deviations from a required distance that of the magnetic device 30 outgoing force to maintain the distance 41 is dynamically customizable.

All electronic components of the control circuit, that is the amplifier 48 , the regulator 46 , the setpoint generator 44 and possibly also the distance sensor 42 can be housed on a common board, for example in the form of an integrated circuit. The space required for a corresponding electronic unit and a cabling effort associated therewith can be minimized in this respect.

The electromagnetic actuator 32 indicates next to the acted upon by electrical signals coil 30 typically a ferromagnetic core, for example an iron core. The electromagnetic actuator 32 can be designed as a solenoid but in many other ways, for example, as Lorenz or Tauchspulenaktor. The latter, in contrast to an electromagnet, can generate not only attractive but also repulsive forces between the electromagnetic actuator and the counterpart.

The for receiving the electromagnetic actuator 32 , or its coil 33 provided groove 31 is for reasons of vacuum compatibility the counterpart 34 cover and / or seal. A cover provided for this purpose 21 is typically made of a magnetically permeable material or of a non-magnetic or only weakly magnetic material. The cover 21 can be used as a closure for the groove 31 act and be designed as such. By means of separate, present not explicitly shown seals is the cover 21 sealing over or in the groove 31 arranged. The cover 21 In particular, it can be flush with the counterpart 34 facing side 17 , thus in the contact surface of the counter plate 16 or closure lid 18 be integrated. For reasons of clarity, the cover 21 in 1 only on the right side of the counter plate 16 shown.

Each of the over the circumference of the opening 14 distributed arranged magnetic devices 30 can according to the prevailing distance in their area 41 between counter plate 16 and cap 18 be regulated so that over the entire outer circumference of the opening 14 a constant or within the smallest tolerances remaining distance 41 is adjustable.

As further in 1 represented, is located between the mutually facing sides 17 . 19 from counter plate 16 and cap 18 at least one spacer 24 as the end stop for the frame 15 acts. In the uncompressed state of the seal 22 like this in 7 is shown, the seal protrudes 22 at least slightly off the page 17 the counter plate 16 out.

In the in 7 shown rest position U of the closure lid 18 relative to the frame 15 and the contact position K of the frame 15 relative to the counter plate 16 There is an air gap between the cap 18 and the counter-plate 16 or between the closure lid 18 and the seal 22 , It can also be provided that the closure lid 18 in each rest position U without compression and thus comparatively loose on the seal 22 is applied.

With activation of the magnetic device 30 whose components are in the 6 - 8th in comparison to the illustration according to 1 are shown only schematically, learns the cap 18 one the seal 22 compressive sliding movement according to a closing force C acting on it. The compressed seal 22 ' is in 8th indicated. In the present embodiment, the closing force C acts with the weight G of the closure cap 18 together. The closing force C acts on a restoring force R of individual return elements 82 opposite. The reset elements 82 are, like this in 3 will be apparent, in the present case as leaf springs 83 educated.

The frame 15 is designed as a circumferentially closed frame. It has two substantially parallel extending longitudinally extended legs 85 . 86 on, at their longitudinal ends on end-side head sections 87 . 88 connected to each other. Approximately in the middle between the head sections 87 . 88 is a connecting bridge 89 provided, which the two legs 85 . 86 Structurally connects again and so far the stability and rigidity of the frame 15 elevated. The leaf springs 83 are arranged in pairs. Opposite ends of the leaf springs 82 are each on opposite thighs 85 . 86 arranged. The leaf springs 83 are roughly in the middle between the thighs 85 . 86 with the cap 18 connected. A deflection of the closure lid 18 perpendicular to the plane of the frame 15 , thus parallel to the surface normal N of the closure cap 18 by means of the magnetic device 30 thus takes place counter to that of the return springs 83 outgoing restoring force R.

How best of all 6 and 7 are apparent at the the closure lid 18 facing side 17 the counter plate 16 several over the circumference of the opening 14 distributed spacers 24 arranged. The spacers 24 are typically made of plastic, in particular a high-temperature-stable plastic, for example made of polyetheretherketone (PEEK), which hardly or only imperceptibly tends to degas under vacuum conditions.

In the contact position K of the frame 15 on the counter plate 16 the frame arrives 15 with its the opening 14 facing bottom with the spacers 24 to the plant. The spacers 24 in this case form a kind of end stop for the pivoting movement of the frame 15 , Corresponding to the arrangement of the spacers 24 on the counter plate 16 are on the outer edge of the cap 18 corresponding recesses 23 provided, which when taking the contact position K of the spacers 24 to be interspersed. The recesses 23 allow a large-area coverage of the opening 14 through the cap 18 without one as close as possible to the opening 14 arranged support or installation of the frame 15 on the counter plate 16 to hinder.

As based on 7 can be seen, located between the cap 18 and the seal 22 in the contact position of the frame shown there 15 and the rest position U of the closure lid 18 a defined gap. By activating the magnetic device 30 becomes the cap 18 according to the closing force C to the counter plate 16 pulled out. As a result, the return elements 82 to the counter plate 16 deflected out. They provide a restoring force R ready, which permanently on the cap 18 acts. With decreasing closing force or when deactivating the magnetic device 30 lead the return elements 82 or the return springs 83 the closure lid 18 from the in 8th sealing and sealing shown 22 compressed closing position S back into the rest position U is back.

The movable storage of the closure lid 18 at the frame 15 is advantageous to the extent that comparatively large closing forces on the cap 18 exercisable. Due to the movable storage of the cap 18 opposite the frame 15 However, those forces are not on the frame 15 transfer. One from the pivot axis 80 formed hinge 90 Consequently, none of the magnetic device 30 can absorb outgoing closing forces. The mechanical load on the frame 15 is essentially given only by the restoring force R, which of the deflected return elements 82 between the closure lid located in the closed position S. 18 on the frame 15 be transmitted. Is the closure lid 18 once in the in 8th shown closed position S, an increase in the closing force C has no or little mechanical impact on the frame 15 ,

In the 4 and 5 an alternative embodiment of the present invention is shown. In contrast to the embodiment according to the 2 . 3 and 6 there is the frame 15 slidable against the counter plate 16 or with respect to the vacuum chamber 12 stored. 4 shows the frame 15 with the closure lid arranged thereon 18 in an open position while 5 the frame 15 and the cap 18 in the contact position K or in the closed position S shows. Above and below or at the opposite head sections 87 . 88 is the frame 15 along longitudinally extended guides 62 . 64 slidably mounted.

The guides 62 . 64 , which are designed as linear sliding guides, thereby extending parallel to the plane of the counter-plate 16 , the frame 15 and / or the closure lid 18 , The guides 62 . 64 However, with respect to the closing movement of the closure lid 18 sufficiently spaced from the backing plate 16 arranged to non-contact moving the closure lid 18 opposite the counter plate 16 , in particular also opposite to the counter-plate 16 provided and at least slightly off the plane of the counter-plate 16 protruding seal 22 to enable.

The linear guides 62 . 64 can be configured as non-contact guides. In the field of guides 62 . 64 can use multiple magnetic bearings 60 be arranged.

The individual magnetic bearings 60 can be similar to the magnetic devices 30 in each case a distance sensor (not shown separately), a control loop and an electromagnetic actuator which can be controlled via the distance sensor and the control loop 61 having, which with a counterpart 63 interacts magnetically. In this way, a required suspended state of the closure lid 18 at the guides 62 . 64 be achieved. A non-contact storage of the closure lid 18 at the guides 62 . 64 is to prevent contamination and abrasion in the environment of the vacuum chamber 12 of particular advantage.

Present are along the guide 62 several electromagnetic actuators 61 provided one after the other with the frame 15 arranged counterparts 63 when moving the frame 15 engage. Reverse arrangements are equally within the scope of the present invention. For example, one or more actuators 62 at the frame 15 or on the cap 18 be arranged while herewith magnetically interacting counterparts 63 fixed to the designed as a guide rail linear guide 62 . 64 are arranged.

In 4 are the frame 15 and the cap 18 shown in the open position O, in which the closure lid 18 outside the area of the opening 14 the counter plate 16 located.

The storage of the cap 18 at the frame 15 causes or supports a kind of parallel displacement of the closure lid 18 from the rest position U in the closed position S, so as possible no relative movements of the cap 18 and seal 22 occur in the plane of the closure cap (X, Y). Such shearing movements could otherwise lead to abrasion of the seal 22 and at least slight contamination of the environment of the vacuum chambers 12 to lead.

The contactless storage of the closure lid 18 at the lead 62 . 64 via the with the cap 18 connected carriage-like designed frame 15 , One of the components of the magnetic bearing in question 60 ie one of electromagnetic actuator 61 and counterpart 63 is stationary at the guide 62 . 64 arranged while the other component of actuator 61 and counterpart 63 at the frame 15 is arranged. For shifting the closure lid 18 or of the frame 15 along the guides 62 . 64 is for example a linear motor 68 provided, by means of which the closure lid 18 between open position O and the contact position K relative to the counter plate 16 is mobile.

LIST OF REFERENCE NUMBERS

10

Closure or lock device

11

wall

12

vacuum chamber

14

opening

15

frame

16

counterplate

17

page

18

cap

19

page

20

groove

21

cover

22

poetry

23

recess

24

spacer

25

gap

30

magnetic device

31

groove

32

electromagnetic actuator

33

Kitchen sink

34

counterpart

40

Distance measuring device

41

distance

42

distance sensor

44

Setpoint generator

45

loop

46

regulator

48

amplifier

60

magnetic bearings

61

actuator

62

guide

63

counterpart

64

guide

68

linear motor

80

axis

81

cover surface

82

Return element

83

Return springs

85

leg

86

leg

87

header

88

header

89

connecting web

90

hinge

QUOTES INCLUDE IN THE DESCRIPTION

This list of the documents listed by the applicant has been generated automatically and is included solely for the better information of the reader. The list is not part of the German patent or utility model application. The DPMA assumes no liability for any errors or omissions.

Cited patent literature

• WO 2005/121621 A1 [0002]

Claims (13)

Closure device for a vacuum chamber ( 12 ), with - one at a vacuum chamber ( 12 ) and an opening ( 14 ) of the vacuum chamber ( 12 ) enclosing counter-plate ( 16 ), - a movable opposite the counter plate ( 16 ) stored frames ( 15 ), on which a closure lid ( 18 ) is movably arranged, wherein the closure lid ( 18 ) in a closed position ( 28 ) on the counter plate ( 16 ) the opening ( 14 ) sealingly closes, - at least one with the counter-plate ( 16 ) and with the closure lid ( 18 ) engaged magnetic device ( 30 ) for generating an intermediate plate ( 16 ) and cap ( 18 ) acting closing force (C). Closure device according to claim 1, wherein the closure lid ( 18 ) a flat lid surface ( 81 ), and wherein the closure lid ( 18 ) in a direction parallel to a surface normal (N) of the lid surface ( 81 ) on the frame ( 15 ) is displaceable. Closing or locking device according to one of the preceding claims, wherein the closure lid ( 18 ) via at least one return element ( 82 ) with the frame ( 15 ) and wherein the return element for applying a restoring force (R) on the closure lid ( 18 ), which is opposite to the closing force (C). Closing or locking device according to one of the preceding claims, wherein the at least one restoring element ( 82 ) at least one return spring ( 83 ) having. Closing or locking device according to one of the preceding claims, wherein the closure lid ( 18 ) via a plurality of spaced-apart restoring elements ( 82 ) is arranged on the frame and wherein a sum of all of the reset elements ( 82 ) on the closure lid ( 18 ) acting restoring forces (R) is greater than the weight (G) of the closure cap ( 18 ). Closing or locking device according to one of the preceding claims, wherein the frame ( 15 ) between an open position (O) and a contact position (K) pivotable or displaceable on the counter plate ( 16 ) or at the vacuum chamber ( 12 ) is arranged, - wherein in the open position (O) of the frame ( 15 ) and the closure lid ( 18 ) the opening ( 14 ) and - wherein in the contact position (K) the frame ( 15 ) on the counter plate ( 16 ) or at the vacuum chamber ( 12 ) and the closure lid ( 18 ) the opening ( 14 ) is substantially completely covered. Closing or locking device according to claim 6, wherein the closure lid ( 18 ) at the frame in contact position (K) ( 15 ) by means of the magnetic device ( 30 ) relative to the frame ( 15 ) from a rest position (U) in the sealing closed position (S) can be transferred. Closing or locking device according to one of the preceding claims, wherein in contact position (K) of the frame ( 15 ) on the mutually facing sides ( 17 . 19 ) of frames ( 15 ) and counter plate ( 16 ) at least one spacer ( 24 ) whose extension is perpendicular to the plane of the frame ( 15 ) or perpendicular to the plane of the counter-plate ( 16 ) is at least as large as the sum of a displacement of the closure cap ( 18 ) between the rest position (U) and the closed position (S) on the frame ( 15 ) plus the thickness of the closure cap ( 18 ). Closure device according to one of the preceding claims, wherein the magnetic device ( 30 ) at least one, on one of closure lid ( 18 ) and counter plate ( 16 ) arranged electromagnetic actuator ( 32 ) and at least one, on the other of closure cap ( 18 ) and counter plate ( 16 ) arranged counterpart ( 34 ), which with the electromagnetic actuator ( 32 ) interacts magnetically. Closure device according to one of the preceding claims, wherein in a space ( 25 ) between in a closed position ( 28 ) of the closure lid ( 18 ) facing each other ( 17 . 19 ) of closure lid ( 18 ) and counter plate ( 16 ) on the closure lid ( 18 ) or on the counter plate ( 16 ) one the opening ( 14 ) enclosing elastically compressible seal ( 20 ) is arranged. Closure device according to one of the preceding claims, further comprising: - at least one distance measuring device ( 40 ) for measuring a distance ( 41 ) between cap ( 18 ) and counter plate ( 16 ), - wherein the magnetic device ( 30 ) as a function of the distance measuring device ( 40 ) measured distance ( 41 ) between counter plate ( 16 ) and cap ( 18 ) is controllable. Closure device according to claim 11, further comprising at least one electronic control circuit ( 45 ), which with the distance measuring device ( 40 ) and with the magnetic device ( 30 ) and for compliance and / or to Setting a given distance ( 41 ) between counter plate ( 16 ) and cap ( 18 ) is configured. Closing or locking device according to one of the preceding claims, wherein over the circumference of the opening ( 14 ) several, each with its own distance measuring device ( 40 ) magnetic devices ( 30 ) are arranged distributed.

Images