KR102089267B1 - Closed or locked device for vacuum chamber - Google Patents

Abstract

The present invention relates to a closing device or a locking device for a vacuum chamber 12, the closing device or locking device can be arranged on the vacuum chamber 12, opening the opening 14 of the vacuum chamber 12 A surrounding counter plate 16; Frame 15-The frame 15 is supported in such a way that the frame can be moved relative to the counter plate 16, the closing cover 18 is movably arranged on the frame 15, and the closing cover 18 ) Closes the opening 14 in a sealed manner in the closed position 28 with respect to the counter plate 16; It includes at least one magnetic device (30) for generating a closing force (C) acting between the counter plate (16) and the closing cover (18), the magnetic device comprising a counter plate (16) and a closing cover (18) ).

Description

Closed or locked device for vacuum chamber

The present invention relates to a closing or locking device for a vacuum chamber, the closing or locking device comprising: a counter plate, which can be arranged on a vacuum chamber and surrounds an opening of the vacuum chamber, and a closing for the counter plate It has a closed cover that closes the opening in a sealed manner in position. In addition, the present invention relates to a method for sealing the opening of a vacuum chamber by means of such a closing or locking device.

Closing and locking devices for vacuum chambers are fully known from the most recent background. In this regard, for example, WO 2005/121621 A1 discloses a locking device according to that kind for a locking opening arranged in a wall between the first and second receiving portions, as well as a blocking arranged in the inner space of the first receiving portion ( A shut-off device and a counter plate assigned to the shut-off device will be described. A flange-shaped counter plate surrounding the opening is provided with a peripheral seal, against which the blocking device is pressed in a sealed manner.

In order to comply with the required tightness, in particular to comply with the high-vacuum conditions inside the vacuum chamber, it is recommended that the blocking device press in the circumferential direction as evenly as possible in the areas lying around the opening in a distributed manner desirable. Applying an even and homogeneous pressing force over the entire seal, from the perspective of structural and manufacturing techniques, when the dimensions of the blocking element or closure cover are within the range of several decimeters or meters, the seals are several millimeters. It is especially difficult if you have a sealing diameter.

For example, the implementation of a lift of approximately 0.5 mm to 2 mm over the surface of the closed cover compressing the sealing ring in the range of 0.5 to 5 m ² or more has been found to be extremely expensive on structural and technical manufacturing levels. . In addition, direct contact of the counter plate, typically made of metal, with the counter plate, is the reason for the required clean-room conditions, and the required particle-free environment of the vacuum chamber associated with the clean-room. Due to them, it must be absolutely prevented.

In addition, any possible shear movements between the seal and the metal component finally seated on the seal are also for reasons to comply with the required clean-room conditions and to prevent particle contamination. Therefore, typically when sealing a closing or locking device between a seal and a closing cover, it must be absolutely prevented or kept to a minimum.

In addition, the elastic properties of the seal change as the seal, typically made of elastomeric material, eg made of rubber, may undergo an aging process, and the closure or locking device is used continuously. There is a fact that can be. Moreover, it is conceivable that the vacuum chamber is operated with different vacuum or pressure levels. If the closing or locking device seals the interior space of the vacuum chamber against atmospheric or other ambient pressure, such as the deviating pressure of an adjacent vacuum chamber, the contact pressure on the seal depends on the respective prevailing pressure in the vacuum chamber. It can be varied and can result in relative movements between the metal parts of the closing or locking device and the seal.

In this regard, it is an object of the present invention to provide an improved closing or locking device for a vacuum chamber, by means of the improved closing or locking device, particularly in the case of closing a vacuum chamber, an even and possibly entirely vertical pressing force is provided. It can be applied on the seal. In particular, it aims to prevent any shear movements or friction on the rubber-elastic seal, typically between the counter plate and the closing cover, or to reduce the shear movements or friction to an absolutely required minimum. With this device, particularly low levels of particle contamination and high levels of purity can be achieved in the region of the vacuum chamber. In addition, the closing or locking device should be characterized by relatively low weight and should be characterized by the easy and good manageability of the individual components of the closing or locking device for manufacturing, assembly, and long-term operation.

This object is solved by a closing or locking device according to the independent patent claim 1. Each of the preferred embodiments is the object of the dependent patent claims.

In this regard, a closing or locking device for a vacuum chamber is provided. The closing or locking device has a counter plate, which surrounds the opening of the vacuum chamber, and can be arranged on the vacuum chamber, or is already arranged on the vacuum chamber, or if applicable, integrated into the vacuum chamber Or connected to the chamber wall. Typically, the counter plate is flange-shaped. The counter plate can project outward from the wall of the vacuum chamber, and has or forms a contact surface that extends approximately perpendicular to the insertion direction across the opening of the vacuum chamber.

In addition, the closing or locking device has a frame mounted in a movable manner relative to the counter plate. In turn, the closing covers are arranged in a movable manner. The closed cover can be moved to the counter plate to reach the closed position, in which closed cover closes the opening of the counter plate in a sealed manner. In particular, the frame is mounted on the counter plate to be movable between the open position and the contact position. In the open position, the frame and the counter plate arranged on the frame release the opening of the vacuum chamber, so that substrates to be processed in the vacuum chamber can be introduced into the vacuum chamber and removed from the vacuum chamber. You can.

In the contact position, the frame is in mechanical contact with the counter plate. In its contact position, the closing cover movably mounted on the frame abuts the counter plate in a relatively loose manner, typically in contact with the seal surrounding the opening of the counter plate but does not exert a significant force on the seal. It is also conceivable that the closed cover in the contact position of the frame on the counter plate is in a non-contact state with respect to the counter plate or to a seal typically arranged on the counter plate.

Sealing the opening and thus sealing the vacuum chamber is achieved by moving the closing cover relative to the frame from the contact position of the frame already in contact position with the counter plate.

In addition, the closing or locking device has at least one adjustable and / or controllable magnetic device, or a controllable magnetic device operatively connected to the counter plate and the closing cover. The magnetic device is configured to create a closing force (C) acting between the counter plate and the closing cover. By means of the adjustable magnetic device, the direction and level of the closing force acting between the counter plate and the closing cover can be changed. According to a specific embodiment of the magnetic device, both the attraction force as well as the repulsive force are placed on the closed cover to selectively open or close the opening of the vacuum chamber by the closed cover, depending on the vacuum chamber environment and the prevailing pressure level in the vacuum chamber. Can be applied.

Thereby, the closed cover may experience a relatively short or small movement relative to the frame, or a relatively low level of lift. Such small or short movements can be made individually and, accordingly, can be controlled or managed particularly well by means of a magnetic device. In particular, by this, a defined and particularly even deformation of the elastic seal between the closing cover and the counter plate can be achieved.

In a further embodiment, the closing cover has a flat top surface. In addition, the closing cover can be slid in a direction parallel to the surface normal N of the top surface on the frame. Typically, the closed cover is mounted to the frame movably between the seated position U and the closed position S. Typically, the closed cover is arranged translatally or linearly on the frame in a movable manner. Because the closing cover is mounted movably perpendicular to the top surface and also perpendicular to the level of the frame, the closing cover can exert a uniform pressing force over the range of the seal, and accordingly also of the magnet device Under the influence, uniform compression can be applied on the seal.

In particular, when the frame is in the contact position and starts from the seating position on the frame, the closing cover is provided to be moved by the magnet device only in the direction of the surface perpendicular to the frame. Any shear forces or relative movements rubbing along the seal between the seal and the closure cover can be significantly prevented in this way. When closing the closing or locking device, i.e., when transferring the closing cover from the seating position on the frame to the closed position compressing the sealing, the sealing is only or mainly, perpendicular to the level of the closing cover or at the level of the sealing. It only undergoes vertically oriented compression. Friction or crushing of the seal in the transverse direction can be significantly prevented by the mentioned guide of the closing cover on the frame.

In a further embodiment, the closing cover is connected to the frame through at least one restoring element. The restoring element is configured to exert a restoring force on the closing cover, the restoring force being directed against the closing force that can be generated by the magnetic device.

During the sealing closure of the closing or locking device, the magnetic device acting between the counter plate and the closing cover counters the restoring force of the at least one restoring element. This has the advantage that the magnetic device only needs to generate a force acting in a single direction, ie a closed direction.

Thereby, the magnetic device is designed to generate a closing force greater than the restoring force acting on the closing cover. In particular, the closing force that can be exerted on the closing cover by the magnetic device is greater than the sum of the restoring forces of all the restoring elements, through which all the restoring elements are mounted on the frame. In other words, the magnet device acts against the restoring force of all restoring elements to seal the opening. Since the closing force is greater than the sum of all restoring forces, when the magnetic device is activated, the closing force causes the movement of the closing cover to the closed position.

In contrast, in order to open the vacuum chamber, it is provided to reduce the closing force generated by the magnet device to at least a predetermined degree, so that the effective closing force is lower than the sum of all the restoring forces of all the restoring elements. As a result, when the closing force of the magnet device is correspondingly lowered or completely eliminated, the closing cover is set to a seating position on the frame through at least one, typically a plurality of restoring elements. At this time, the closed cover is in a loose contact position with respect to the seal of the counter plate, or at least one gap between the closed cover and the seal is available on the counter plate, so that the frame is in the contact position. If present, the closed cover in the seating position does not contact the counter plate, or the seal provided on the counter plate.

In a further embodiment, it is also provided that at least one restoring element is an elastic restoring element. In contrast, the restoring element is elastically deformable and provides the required restoring force due to the elasticity of the restoring element. In particular, the elastic restoring element can be designed as a single body in the form of a single component, and the elastic restoring element does not undergo any relative movement between the frame or the closing cover other than the elastic deformation of the elastic restoring element. In addition to the elastic deformability of the restoring element, the monolithic design of the restoring element has proved advantageous in meeting the requirements for the absence of particle contamination. In particular, friction of the restoring elements with other components of the closing or locking device is prevented due to the elastic deformability of the at least one restoring element.

According to a further embodiment, the at least one restoring element has at least one restoring spring. For example, the restoration spring may be designed in the form of a leaf spring. For example, the restoration spring can extend between opposing rims of the frame. The restoring spring can be connected to the closing cover at approximately the center between frame rims. Thereby, a central or face-centred mounting of the closing cover onto the frame can be achieved, which can have a desirable effect on the linear slideability of the frame.

According to another embodiment, the closing cover is arranged on the frame through a plurality of restoring elements spaced from each other. It has proven to be advantageous when a plurality of equally acting restoring elements and / or a plurality of restoring springs are arranged in a distributed manner across the surface of the frame, consequently when arranged over the surface of the closing cover. In this way, a defined restorative force that is uniform and furthest possible can be provided over the surface of the frame or over the surface of the closed cover.

According to a further embodiment of this, the sum of all the restoring forces exerted on the closing cover by all the restoring elements is greater than the weighting force of the closing cover. For example, such a layout of restoration elements not only enables horizontal and, consequently, reclining alignment of the counter plate, but also enables loading of the vacuum chamber from above. If the sum of all restoring forces that can be applied on the closing cover is greater than the weighting force of the closing cover, the closing cover also upwards to the seating position on the carrier by the restoring elements against the closing cover's inherent weighting force. Can be pulled. Such a layout of restoring forces has proven beneficial for flexible use of the closing or locking device, especially for a wide variety of different geometrical arrangements of the closing or locking device.

According to another embodiment, the frame is arranged on the counter plate or vacuum chamber, in a swivel or slidable manner, between the already mentioned open position and the already mentioned contact position. In the open position, the frame and the closed cover arranged on the frame release the opening of the vacuum chamber.

In particular, the sliding guide is suitable for arrangement and space-saving embodiments of the closing or locking device in the area of the substrate-processing process station. Unlike pivotally mounted closed covers, an area outside the opening of the vacuum chamber, that is, within the extension of the opening, can be used to arrange other components of the process station, and in the case of pivotal mounting of the closed cover There is no need to leave it free, as in Esau.

The closing cover can be mounted to the guide in a non-contact manner by means of one or more magnetic bearings. Thereby, non-contacting of the closed cover to and against the counter plate, and thus low-wear and low-maintenance sliding is possible. Unlike the roller-bearing guide of the closed cover, no wear occurs in the case of the self-bearing-based mounting of the closed cover. Thus, the required particle freedom in the area of the closing or locking device and the required clean-room conditions can be easily maintained.

Similar to the magnetic device provided for the closing or locking device, the magnetic bearings intended for the guide can each have an electromagnetic actuator, and thereby a magnetic interaction counterpart, as well as a distance measuring device and control circuit, Thus, the closing cover is mounted at a predefined distance from the guide in a manner that floats almost freely, and can be moved along the guide by one or more magnetic bearings.

According to a further embodiment, when the frame is in the contact position, the closing cover can be transferred by means of a magnetic device from the seating position relative to the frame to the sealing closed position. In the contact position, the frame abuts the counter plate or vacuum chamber. Thereby, the closing cover substantially covers the entire opening. Although the closed cover seals the opening, it is still not airtight. In this regard, there may also be an air gap between the sealing cover and the seal typically arranged on the counter plate.

Of the closed cover, controlled and managed by the magnetic device, only when the magnetic device is activated and perpendicular to the level of the closure cover or perpendicular to the level of the carrier, and thus, also typically perpendicular to the opening level. Only by sliding movement, the seal located between the counter plate and the closing cover can be compressed as evenly as possible, in a desired manner.

In another embodiment, at least one spacer is arranged between the frame and the counter plate. In the contact position of the frame on the counter plate, there is at least one spacer between the faces of the frame and the counter plate, facing each other. Typically, multiple spacers are provided over the range of the counter plate. Through the spacer or spacers, the frame itself is supported on the counter plate when the contact position is reached. The geometric design and arrangement of at least one, preferably a plurality of spacers, defines the contact position of the frame on the counter plate.

The extension of the at least one or more spacers perpendicular to the level of the frame or perpendicular to the level of the counter plate is at least as large as the sum of the thickness of the closing cover and the adjustment range of the closing cover between the seating position and the closing position on the frame. Due to the spacers measured in such a way, the closed cover arranged on the side of the frame, for example towards the counter plate, when the frame with the closed cover in the seating position is transferred from the open position to the contact position, It is guaranteed not to contact the counter plate, or the seal provided on the counter plate.

In this way, premature contact or sliding of the closing cover in the area of the seal due to pivoting or sliding movement of the frame can be prevented.

According to an embodiment, the magnetic device has at least one electromagnetic actuator arranged on one of the closed cover and the counter plate, and at least one counterpart arranged on the other of the closed cover and the counter plate, the at least one The counterpart magnetically interacts with the electromagnetic actuator. For example, the electromagnetic actuator can be arranged on the counter plate or embedded in the counter plate, while the counterpart can be arranged on the closed cover. Thereby, it is also conceivable that the counterpart is integrated into the closed cover or that the entire closed cover acts as a counterpart.

The counterpart or closed cover is designed to be ferromagnetic or permanently magnetic, and magnetically interacts with an electromagnetic actuator supplied with a corresponding control current. In the closed position of the closed cover on the counter plate, where the closed cover completely covers the opening cross-section of the vacuum chamber, the electromagnetic actuator, and the counterpart assigned to the electromagnetic actuator, can, for example, generate sufficient closing force or opening force, At least, it can be covered with sections.

In general, it is conceivable that the electromagnetic actuator of the magnetic device is arranged on the closed cover, while the counterpart magnetically interacting with the electromagnetic actuator is arranged on the counter plate or formed on the counter plate.

Regardless of whether the electromagnetic actuator is arranged on the closed cover or on the counter plate, in addition, at least one other permanent magnet can still be arranged on each component where the electromagnetic actuator is arranged, which is It can provide additional support for the forces generated by the. Thereby, for example, the closed cover can be kept closed in the absence of power, so that a significantly lower level of current strength can be supplied to the coil of the actuator. Thereby, problems associated with heat loss of the coil and heat loss of the coil for cooling or thermal expansion can be reduced or even eliminated.

According to another embodiment, the elastically compressible seals surrounding the opening are arranged on the closed cover or counter plate, in an intermediate space between the faces of the closed cover and counter plate, facing each other in the closed position of the closed cover. You can. For example, the seal can be arranged on the counter plate. For this purpose, the counter plate can have a groove surrounding the opening of the vacuum chamber, in which a peripheral seal is arranged. In the original, uncompressed state, the thickness or diameter of the seal section is greater than the depth of the groove that receives the seal, and thus faces the counter plate, facing the closure cover, resulting in contact surfaces formed by the counter plate From which at least a part of the seal protrudes. By this embodiment, the closed cover can finally be seated on the seal in a sealed manner without the metal components of the counter plate and the closed cover contacting each other.

The faces of the closing cover and counter plate, facing each other, are typically designed as at least the level of the contact surfaces in the sections, the contact surfaces, in the closed position, the direction specified by the geometry of the opening of the vacuum chamber (z ) Extends substantially perpendicular to, or perpendicular to the closing direction in which the closing force produced by the magnetic device acts.

Typically, the seal is made of elastomer and has elasticity and / or compressibility suitable for each intended purpose. By distance-dependent adjustment of the closing force of the magnetic device, it is also conceivable to use different seals for the elastic or mechanical properties of the seals, each of which is adapted to different applications of the closing or locking device. Used for By distance-dependent adjustment of the closing force, the closing or locking device can be adapted to different or various elastic properties of the seal provided. The seal can be designed as an O-ring-type seal, and consequently as a peripheral seal ring, the peripheral seal ring being closed in the circumferential direction.

Although the seal is preferably arranged in the groove of the counter plate and the closing cover that interacts with the counter plate is designed to have no seal, the opposite embodiments are also conceivable, and in the opposite embodiments, the seal is closed It is arranged on the inside of the cover, especially in the groove of the closed cover, where the counter plate is designed without a seal.

According to another embodiment, the closing or locking device has at least one distance measuring device for measuring the distance between the closing cover and the counter plate. With the distance measuring device, the distance at least points between the closing cover and the counter plate can be measured in the direction of the closing force produced by the magnetic device. If the closed cover is seated over the seal on the counter plate, the distance between the closed cover and the counter plate is a measure of the current prevailing compression or elastic deformation of the seal provided between the counter plate and the closed cover. As a result, the degree of elastic deformation of the seal can be measured by a distance measuring device.

In addition, for the closing or locking device, a magnetic device is provided so that it can be adjusted by the distance measuring device according to the measured distance between the counter plate and the closing cover. By means of the distance-dependent adjustment of the provided magnetic device, different closing forces can be created depending on the distance at hand, so that, for example, the seal provided between the counter plate and the closing cover can be compressed to the required degree. By means of a back-coupling and distance measuring device for at least one magnetic device provided for this, various different states of the closing or locking device can be detected.

For example, by means of a distance measuring device, it can be measured whether the counter plate and the closed cover contact each other in a sealed manner and to what extent the counter plate and the closed cover contact each other in a sealed manner. If the distance approximately exceeds the maximum value provided for proper sealing, the closing force can be gradually increased by an adjustable magnetic device, for example, until the distance falls below the maximum allowable maximum distance.

In the opposite case, it is also conceivable that if the distance between the counter plate and the closing cover is detected or measured to be too small, direct contact of the closing cover with the counter plate, typically made of metal, should be concerned. In particular, for reasons of the required absence of particle contamination in the surrounding environment of the vacuum chamber, this must be absolutely avoided. In such a case, the closing force level can be gradually reduced until the minimum allowable distance between the closing cover and the counter plate is exceeded.

Thereby, by the distance-dependent adjustment and control of the magnetic device, different or time varying pressure levels in the vacuum chamber can also be coped. The closing force or the opening force itself may already be present on the closing cover, either by the pressure difference between the inner space of the vacuum chamber and the surrounding environment, or by the pressure difference on the side of the closing cover or on the side other than the closing cover. By means of a distance-dependent adjustable magnet device, varying pressure differences on opposite sides of the closing cover can be compensated.

Moreover, according to a further embodiment, at least one electronic control circuit is provided, the at least one electronic control circuit being coupled with a distance measuring device and at least one magnetic device, and predetermined between the counter plate and the closing cover. It is configured to maintain and / or set the distance. Typically, the control circuit has a setpoint device, whereby the distance signals that can be generated by the distance sensor are compared to a predetermined target value. By comparing the current value with the target value, a controller downstream from the setpoint device can generate a control signal to control the magnetic device, particularly to control the electromagnetic actuator.

Each control signal that can be generated by the controller can be supplied to an electromagnetic actuator, typically via an amplifier. By means of the electronic control circuit, active and automatic regulation of the closing force can be implemented. In this way, a dynamic and situation-related response to any sudden or continuous changes in operating or ambient conditions, such as a change in pressure difference between the interior space of the vacuum chamber and the surrounding environment, can be performed. By the control circuit coupling the distance measuring device and the magnetic device to each other, the required distance between the counter plate and the closing cover, and thereby also the required pressing force of the closing cover, as well as the closing associated with the counter plate and its counter plate The compression of the seal provided between the covers can occur in a controlled manner and can be maintained.

According to another embodiment, the plurality of magnet devices, each provided with a unique distance measuring device, are arranged in a distributed manner, for example, over a range of flange-type counter plates and over a range of openings. By providing a plurality of magnet devices arranged in a manner distributed over the range of the opening, in particular, even the pressing force and closing force can be set between the counter plate and the closing cover. In addition, this makes it possible, in a system-controlled manner, to compensate for any variations or manufacturing inaccuracies of the counter plate and / or the closing cover.

Each of the distance measuring devices respectively coupled with the magnetic device is capable of sufficiently maintaining and setting itself a predetermined distance between the counter plate and the closing cover, that is, at the position of the corresponding distance measuring device or the magnetic device. Thereby, the pressure-dependent and inevitable very small deformations of the closing cover can be compensated in an effective way (these deformations, if not compensated, will result in an uneven pressing force or closing force of the seal), and the closing cover and counter Uneven gap sizes for varying distances over the range of openings between the plates can be countered.

Any load-dependent or manufacturing-related variations or component tolerances can be compensated in a system-controlled manner. Different closing forces and contact pressures can be generated on a local level over a range of openings or over a range of counter plates by a plurality of magnetic devices each provided with its own distance measuring device, respectively, As a result, uniform compression of the seal is achieved to the maximum extent possible and can be set in a controlled manner, which creates the required tightness of the closing or locking device. Within the scope of practical application, the embodiment is particularly advantageous, ie, particularly if at least one of the closed cover and the counter plate is not designed to be absolutely rigid, and / or suffers from local load-dependent deformations.

By means of a plurality of magnet devices each provided with a distance measuring device, such effects can be compensated for and eliminated in a system-controlled manner. For the construction of the closed cover and / or counter plate, even relatively large component tolerances or mechanical deformations can be tolerated, and thus, even lower, even for relatively large-scale embodiments of the closed cover and counter plate. By weight, a relatively delicate configuration can be provided.

According to another embodiment of the closing or locking device, the magnetic devices arranged in a distributed manner, respectively, over the range of the opening of the vacuum chamber, or over the range of the counter plate, or over the range of the closing cover, each of these unique It is provided for coupling with the control circuit. Thereby, each of the magnetic devices can, independently of each other, set and adjust the current distance or gap size between the closed cover and the counter plate, at their respective positions.

As a result, the processing of the distance signals obtainable from the respective distance measuring devices can occur at a local level within the area of the control circuits and magnet devices. Thereby, any data and signal lines can be reduced to a minimum, which can prove to be particularly beneficial for applications in the vacuum sector.

According to another embodiment, the magnetic devices arranged in a distributed manner over the range of the opening, and / or the distance measuring devices assigned to the magnetic devices are coupled with a central control system. However, a central control system may be provided in place of the local control circuit, or may be provided in addition to each magnetic device and associated control circuit assigned to the distance sensor. For example, by a central control system coupled with all control circuits of all the magnet devices using data connections, synchronous control of the control circuits can be generated in a particularly simple manner.

For example, the central control system can be respectively coupled with a setpoint device of individual control circuits, so that, by the central control system, the distance that should be maintained between the counter plate and the closing cover is simultaneously transmitted to all control circuits You can. By means of a central control system, the user of the closing or locking device obtains an operating element that is particularly easy to operate, and using that operating element, the distance to be maintained between the closing cover and the counter plate or the corresponding gap size It can be set synchronously or simultaneously for all control circuits and magnet devices.

For each of the various embodiments of the closing or locking device, various distance measuring devices can be provided. For example, a distance measuring device can have one or more distance sensors based on the principle of optical, magnetic, or capacitive measurement. In particular, sensors based on the principle of inductive measurement or based on eddy currents are used. In particular, the distance sensor is arranged very close to the magnetic device, in particular close to the counterpart or electromagnetic actuator of the magnetic device, so that a higher degree of co-deposition can be achieved to the maximum extent possible. The immediately adjacent or even covering arrangement of the magnetic device and the distance measuring device contributes to improving measurement and control accuracy. In particular, a distance sensor can be arranged on the counter plate, and accordingly, the distance between the counter plate and the closed cover, in particular the gap size, can be measured. In particular, the distance sensor arranged on the counter plate is configured to measure the distance from the defined reference surface or reference point of the closed cover, in a precise manner, typically with an accuracy within the sub-millimeter or micrometer range.

Other objects, features, and preferred embodiments of the invention are described in the following description of exemplary embodiments in view of the drawings.
1 is a simplified schematic diagram of a closing or locking device in which the frame supporting the closing cover is in the contact position and the closing cover is in the seating position on the frame.
2 is a perspective view of a closing or locking device with an open closing cover.
3 is the closing or locking device according to FIG. 2 in the closed position.
4 is another embodiment of a closing or locking device in which an slidable frame in an open position is mounted on a counter plate or vacuum chamber.
5 is a closing or locking device according to FIG. 4 with a frame and a closing cover, in a closed position.
6 is a cross-sectional view of the closing or locking device according to FIG. 2 in the open position.
FIG. 7 is a representation according to FIG. 6, but with the frame in the contact position and the closing cover in the seating position on the frame.
8 is a representation according to FIG. 7, but with the closed cover in the closed position relative to the frame.

The closing and locking device 10 shown in cross section in FIG. 1 is provided for arrangement in the opening 14 of the vacuum chamber 12. The closing or locking device 10 has a counter plate 16 that is typically connected to the wall 11 of the vacuum chamber 12 schematically shown in FIG. 1. The counter plate 16 can be arranged on the same plane as the opening 14 of the vacuum chamber 12 on the wall 11, or it can be arranged as an integral component of the vacuum chamber 12. In this regard, the counter plate 16 can also have an opening 14 that can typically match the opening of the vacuum chamber 12.

As apparent from the overview in FIGS. 2, 3, and also FIGS. 6-8, a fairly flat closed cover 18 in this embodiment is framed by a plurality of restoring elements 82 in a slidable manner. (15). Thereby, the deflection and slidability of the restoring elements 82 results from the comparison of FIGS. 7 and 8. For example, the frame 15 itself is pivotably mounted on the counter plate 16. 2 and 3, the corresponding pivot or hinge axis 80 is shown. 4 and 5, the frame 15 is mounted linearly on the counter plate 16 in a sliding manner.

The face 19 facing the counter plate 16 of the closed cover, and consequently the inner top surface 81, is substantially flat. In the case of the frame 15 in the seating position U of the closing cover 18 with respect to the frame 15, shown as an example in FIG. 7, and in the contact position K located on the counter plate 16 In, the top surface 81 is aligned substantially parallel to the level of the seal 22, the seal 22 being grooved on the face 17 of the counter plate 16, facing the closing cover 18 It is located at 20.

In the closed position S shown in Fig. 8, the closing cover 18 seals the opening 14 in an airtight and vacuum-tight manner. In addition, the counter plate 16 and the closing cover 18 are provided with at least one magnetic device 30, by means of which at least one magnetic device 30 the closing force C being on the closing cover 18. Can be applied to

The counter plate 16 can have a flange-like geometry and, in particular, can have a seal 22 on the face 17 facing the closing cover 18 and acting as a contact surface, the seal 22 extends around the opening 14, typically in the area of the opening boundary of the counter plate 16. In the present disclosure, a seal 22 made of an elastic and deformable material is arranged in the peripheral groove 20 of the counter plate 16. However, the seal 22 can also be arranged in the corresponding groove of the closing cover 18 or in the intermediate space 25 between the counter plate 16 and the closing cover 18.

Upon reaching the closed position S shown in Fig. 8, the seal 22 is deformed between the counter plate 16 and the closed cover 18, and allows the opening 14 to be sealed in an airtight manner. Is distorted in a manner.

By means of the magnet device 30, the closing force C on the closing cover 18 can be applied in the insertion direction or the closing direction z. The closing force C is typically aligned perpendicular to the level (x, y), or perpendicular to the contact surface or face 17 of the counter plate 16. The closing cover 18 also has a face 19 facing the counter plate 16, which face 19 also acts as a contact surface. The faces 17 and 19 facing each other in the closed position S of the closed cover 18 and the counter plate 16 are aligned parallel to each other at least in sections.

The respective contact surfaces of the faces 17 and 19 corresponding to each other extend in the x-y plane.

In the present disclosure, the magnetic device 30 is, at least, on the closed cover 18, magnetically interacting with the electromagnetic actuator 32, as well as with the electromagnetic actuator 32 arranged on the counter plate 16. It has a counterpart 34 arranged in. The counterpart 34 is designed as a permanent magnetic or ferromagnetic component arranged on the closed cover 18 or embedded in the closed cover 18. It is also conceivable that the closure cover 18 itself comprises a permanent magnetic or ferromagnetic material at least in sections or at least in regions, or is made entirely of such material.

By applying or supplying power to the coil 33 of the electromagnetic actuator 32, an attractive force or repulsive force can be applied on the closed cover 18. By adjusting the current intensities or changing the control signal, the closing force C generated by the magnet device 30 can be varied according to the requirements at hand.

In addition, the closing or locking device 10 optionally has a distance measuring device 40, by means of which the distance measuring device 40, the distance 41 between the closing cover 18 and the counter plate 16, In particular, the distance between the faces 19 and 17 of the closing plate 18 and the counter plate 16, facing each other, can be measured in a deterministic and quantitative manner. In the present disclosure, the distance measuring device 40 has a distance sensor 42 arranged on the counter plate 16, which distance sensor 42 is closed between the counter plate 16 and the closing cover 18. The distance 41 in the direction z is measured. Thereby, by the distance measuring device 40, the closing force C generated by the magnet device 30, especially the magnet device 30, can be adjusted according to the distance. In particular, by the distance-dependent adjustment of the magnet device 30, it is provided that the distance 41 between the closing cover 18 and the counter plate 16 can be set to a predetermined degree in a precise manner.

For distance-dependent adjustment, in particular, a control circuit 45 is provided for coupling the distance measuring device 40 and the magnet device 30. The control circuit 45 has a setpoint device 44 connected to the distance sensor 42 on a data / technical level. Setpoint device 44 receives the distance signals provided by distance sensor 42 and compares the distance signals to a predefined or variably specifyable target value from a central control system. In the setpoint device 44, the actual and target values are compared to each other.

Then, a comparison signal resulting from the comparison is supplied to the controller 46, and the controller 46 generates a control signal provided to control the electromagnetic actuator 32. The control signal, which can be generated by the controller 46, can be supplied to the electromagnetic actuator 32 through the amplifier 48.

The amplified control signal, which can be supplied to the coil 33 of the electromagnetic actuator 32, is required in such a way that a predetermined distance 41 is maintained between the counter plate 16 and the closing cover 18, and is required. In the case of variations in distance, the force generated by the magnet device 30 is calculated and determined in a manner that allows it to be dynamically adapted to maintain the distance 41.

All electronic components of the control circuit, namely amplifier 48, controller 46, setpoint device 44, and, where applicable, distance sensor 42 are also on a single PCB, for example in the form of an integrated control circuit. With, it can be accommodated together. In this regard, the space required for the corresponding electronic unit and the wiring operation associated with the corresponding electronic unit can be minimized.

In addition to the coil 30 to which electrical signals can be applied, the electromagnetic actuator 32 typically has a ferromagnetic core, such as an iron core. The electromagnetic actuator 32 can be designed as an electromagnet, but in a variety of different ways, for example also as a Lorentz or voice-coil actuator. In contrast to the electromagnet, the latter can generate repulsion as well as attraction between the electromagnetic actuator and the counterpart.

The electromagnetic actuator 32 or the groove 31 intended to hold the coil 33 of the electromagnetic actuator 32 must be covered and / or sealed on the counterpart 34 side for reasons related to vacuum compatibility. Should be. The cover 21 provided for this purpose is typically made of a magnetically permeable material, or of a non-magnetic or only weak magnetic material. The cover 21 can almost act as a closure for the groove 31 and can be designed accordingly. By means of individual seals not explicitly shown in the present disclosure, the cover 21 is arranged on or in the groove 31 in a sealed manner. In particular, the cover 21 can be integrated in a coplanar manner in the face 17 facing the counterpart 34 and, consequently, in the contact surface of the counter plate 16 or the closed cover 18. Can be. For the sake of clarity, the cover 21 in FIG. 1 is only shown on the right side of the counter plate 16. Each of the magnetic devices 30 arranged in a manner distributed over the range of the opening 14 can be adjusted according to the prevailing distance 41 within their range between the counter plate 16 and the closing cover 18. And, accordingly, the distance 41 that is in the same state or maintained within some tolerances can be set over the entire outer range of the opening 14.

As further shown in FIG. 1, there is at least one spacer 24 between the counter plate 16 and the faces 17, 19 of the closing cover 18, facing each other, the spacer 24 Acts as an end-stop for the frame 15.

7, in the uncompressed state of the seal 22, the seal 22 protrudes at least slightly from the face 17 of the counter plate 16.

In the contact position K of the frame 15 relative to the counter plate 16 and the seating position U of the closing cover 18 relative to the frame 15, shown in FIG. 7, the closing cover 18 and the counter There is an air gap between the plates 16 or between the closed cover 18 and the seal 22. Further, in its seating position U, a closing cover 18 is provided to abut against the seal 22 in an uncompressed and thus relatively loose manner.

Upon activating the magnet device 30 (the components of the magnet device 30 are only schematically shown in FIGS. 6 to 8 compared to the example according to FIG. 1), the closing cover 18 has a seal 22 ) Undergoes a shifting movement compressing the seal 22 according to the closing force C acting on it. 8 shows the compressed seal 22 '. In this embodiment, the closing force C interacts with the weighting force G of the closing cover 18. The closing force C acts against the restoring force R of the individual restoring elements 82. As is evident in FIG. 3, in the present disclosure, restoration elements 82 are designed as leaf springs 83.

The frame 15 is designed as a circumferential closed frame. The frame 15 has two longitudinally extending rims 85, 86, the rims 85, 86 running substantially parallel and the head sections 87, 88 on the end sides. Through, they are connected to each other at their longitudinal ends. A connecting bridge 89 is provided approximately centrally between the head sections 87, 88, which connects both the rims 85, 86 on a structural level, in which a frame ( 15) to increase the stability and rigidity. The leaf springs 83 are arranged in pairs. The opposite ends of the leaf springs 82 are arranged on the opposite rims 85, 86. The leaf springs 83 are connected to the closing cover 18 at approximately the center between the rims 85,86. Thus, the deflection of the closing cover 18, perpendicular to the level of the frame 15 by the magnetic device 30, and consequently parallel to the surface normal N of the closing cover 18, is restored springs 83 ) Against the restoring force (R) produced by.

6 and 7, the plurality of spacers 24 are distributed in a manner distributed over the range of the opening 14 on the face 17 of the counter plate 16, towards the closing cover 18. Are arranged. Typically, the spacers 24 are made of plastic, especially high temperature resistant plastics, such as polyether ether ketone (PEEK), which has only a slight or slight outgassing tendency even under vacuum conditions.

In the contact position K of the frame 15 on the counter plate 16, the frame 15 rests on the spacers 24 with the lower surface of the frame 15 facing the opening 14. Thereby, the spacers 24 form a certain type of end-stop for the pivotal movement of the frame 15. Corresponding to the arrangement of the spacers 24 on the counter plate 16, on the outer edge of the closing cover 18, corresponding recesses 23 are provided, and in the case of taking the contact position K, Spacers 24 are interspersed in the recesses 23. The recesses 23 are caused by the closed cover 18 without interfering with the frame support being arranged as close as possible on the opening 14 or the frame 15 being seated on the counter plate 16. This allows a wide range of covering of the opening 14.

As is evident from FIG. 7, in the seating position U of the closing cover 18 shown in FIG. 7 and the contact position of the frame 15, the defined gap between the seal 22 and the closing cover 18 is exist. By activating the magnet device 30, the closing cover 18 is pulled towards the counter plate 16 according to the closing force C. As a result, the restoring elements 82 are biased towards the counter plate 16. The restoration elements 82 provide a restoration force R permanently acting on the closing cover 18. In the case of reducing the closing force or deactivating the magnet device 30, the restoring elements 82 and the restoring springs 83 are closed closed positions (as shown in Fig. 8). It escapes from S) and thereby escapes from compressing the seal 22 and returns to the seating position U again.

The movable mounting of the closing cover 18 on the frame 15 is advantageous in this respect, whereby it is possible to apply relatively high closing forces on the closing cover 18. Due to the movable mounting of the closing cover 18 relative to the frame 15, these forces are never transmitted to the frame 15 nonetheless. As a result, the hinge 90 formed by the swivel access 80 need not absorb any of the closing forces created by the magnet device 30. The mechanical stress on the frame 15 is essentially only due to the restoring force R transmitted from the biased restoring elements 82 between the closing cover 18 and the frame 15 in the closed position S. When the closing cover 18 is in the closed position S shown in Fig. 8, the increase in the closing force C has only slight mechanical effects on the frame 15 or no mechanical effects at all.

4 and 5, an alternative embodiment of the present invention is shown. In contrast to the embodiments according to FIGS. 2, 3 and 6, the frame 15 in FIGS. 4 and 5 is mounted in a slideable manner with respect to the counter plate 16 and with respect to the vacuum chamber 12. . FIG. 4 shows the frame 15 with the closed cover 18 arranged on the frame 15 in the open position, while FIG. 5 shows the frame 15 and the closed cover 18 in the contact position K Or in the closed position (S). The frame 15 is mounted in a slidable manner along the extended guides 62, 64 above and below, or on the opposing head sections 87, 88.

The guides 62, 64 designed as linear sliding guides extend parallel to the level of the counter plate 16, frame 15, and / or closing cover 18. Due to the closing movement of the closing cover 18, the guides 62, 64 are arranged spaced a sufficient distance from the counter plate 16, so that the counter plate 16, in particular also of the counter plate 16, It enables non-contact sliding of the closing cover 18 to the seal 22 provided on the counter plate 16 which protrudes at least slightly from the level.

Linear guides 62 and 64 can be designed as non-contact guides. A plurality of magnetic bearings 60 can be arranged in the area of the guides 62, 64.

Similar to the magnetic devices 30, the individual magnetic bearings 60 may each have a distance sensor (not shown separately in this disclosure), a control circuit, as well as an electromagnetic actuator 61, the electromagnetic actuator The 61 can be controlled through a distance sensor and a control circuit, and magnetically interacts with the counterpart 63. In this way, the desired floating state of the closing cover 18 on the guides 62, 64 can be achieved. The non-contact mounting of the closing cover 18 on the guides 62, 64 has the particular advantage of avoiding contamination and wear in the area of the vacuum chamber 12.

In this case, a plurality of electromagnetic actuators 61 are provided along the guide 62, and the plurality of electromagnetic actuators 61 are arranged on the frame 15 when sliding the frame 15 The combined counterparts 63 are continuously combined.

Thereby, the inversion arrangements are both made equal within the scope of the present invention. For example, one or a plurality of actuators 61 can be arranged on the frame 15 or on the closing cover 18 while magnetically interacting with the one or a plurality of actuators 61 The counterparts 63 are arranged in a fixed manner on linear guides 62, 64 designed as guide rails.

In Fig. 4, the frame 15 and the closing cover 18 are shown in the open position O, and in the opening position O, the closing cover 18 opens the opening 14 of the counter plate 16 Is outside the realm of.

Thereby, the mounting of the closing cover 18 to the frame 15 has the effect of providing support for a certain type of parallel displacement of the closing cover 18 from the seating position U to the closed position S. And thus, relative movements of the closure cover 18 and the seal 22 do not occur in the planes X, Y of the closure cover as far as possible. Otherwise, such shear movements can lead to wear of the seal 22 and at least minor contamination of the surrounding environment of the vacuum chambers 12.

The non-contact mounting of the closing cover 18 to the guides 62 and 64 is made through a frame 15 designed in a slide-like manner and connected to the closing cover 18. One of the components of each magnetic bearing 60, that is, one of the electromagnetic actuator 61 and the counterpart 63 is arranged on the guides 62 and 64 in a fixed manner, while the actuator 61 And the other component of the counterpart 63 are arranged on the frame 15. For example, a linear motor 68 is provided to shift the closing cover 18 and the frame 15 along the guides 62, 64, whereby the closing cover 18 contacts the counter plate 16 It can be moved between the position K and the open position O.

Claims (16)

As a closing device for the vacuum chamber 12,
A counter plate 16, which can be arranged on the vacuum chamber 12 and surrounds the opening 14 of the vacuum chamber 12;
-Frame 15-The frame 15 is supported in such a way that the frame can be moved relative to the counter plate 16, and a closing cover 18 is movably arranged on the frame 15 , The closing cover 18 closes the opening 14 in a sealed manner in the closed position S with respect to the counter plate 16;
-At least one magnetic device (30) for generating a closing force (C) acting between the counter plate (16) and the closing cover (18)
It includes,
The at least one magnetic device 30 engages with the counter plate 16 and the closing cover 18,
At the contact position (K) of the frame (15), at least one spacer (24) is arranged on the faces (17, 19) of the frame (15) and the counter plate (16) facing each other, the The dimension of the at least one spacer 24, perpendicular to the level of the frame 15, is at least of the closing cover 18 between the seating position U and the closing position S on the frame 15. As large as the sum of the adjustment range and the thickness of the closing cover 18,
Closed device for vacuum chamber. According to claim 1,
A plurality of magnet devices 30 are arranged in a distributed manner, and each of the plurality of magnet devices 30, over the range of the opening 14, a distance measuring device 40 unique to each magnet device Is provided,
Closed device for vacuum chamber. The method according to claim 1 or 2,
The closing cover can be mounted to the guide in a non-contact manner by one or a plurality of magnetic bearings,
Closed device for vacuum chamber. delete The method according to claim 1 or 2,
The closing cover 18 has a level top surface 81, and the closing cover 18 slides on the frame 15 in a direction parallel to the surface normal N of the top surface 81. Can be,
Closed device for vacuum chamber. The method according to claim 1 or 2,
The closing cover 18 is connected to the frame 15 via at least one restoring element 82, the restoring element being restoring force directed against the closing force C on the closing cover 18 Configured to apply (R),
Closed device for vacuum chamber. The method of claim 6,
At least one restoring element 82 has at least one restoring spring 83,
Closed device for vacuum chamber. delete The method according to claim 1 or 2,
The closed cover 18 is arranged through a plurality of restoration elements 82 on the frame, the plurality of restoration elements 82 are spaced apart from each other, and acts on the closure cover 18, all restorations The sum of all restoring forces R from the elements 82 is greater than the weight force G of the closing cover 18,
Closed device for vacuum chamber. The method according to claim 1 or 2,
The frame 15 is arranged between the contact position K and the open position O on the counter plate 16 or the vacuum chamber 12 in a swivel or slideable manner,
-In the open position O, the frame 15 and the closing cover 18 arranged on the frame 15 release the opening 14,
-In the contact position, the frame 15 abuts the counter plate 16 or the vacuum chamber 12, and the closed cover 18 covers the entire opening 14,
Closed device for vacuum chamber. The method of claim 10,
When the frame 15 is in the contact position K, the closing cover 18 is sealed closed from the seating position U with respect to the frame 15 by the magnetic device 30. Can be transferred to the position (S),
Closed device for vacuum chamber. The method according to claim 1 or 2,
The magnetic device 30 includes at least one electromagnetic actuator 32 arranged on one of the closing cover 18 and the counter plate 16, and the closing cover 18 and the counter plate 16. Having at least one counterpart 34 arranged on the other, the at least one counterpart 34 magnetically interacting with the electromagnetic actuator 32,
Closed device for vacuum chamber. The method according to claim 1 or 2,
In the closed position 28 of the closed cover 18, in the intermediate space 25 between the faces 17, 19 of the closed cover 18 and the counter plate 16, facing each other, the closed cover (18) or on the counter plate (16), an elastically compressible seal (20) is arranged, the seal (20) surrounding the opening (14),
Closed device for vacuum chamber. The method according to claim 1 or 2,
-Further comprising at least one distance measuring device 40 for measuring the distance 41 between the closed cover 18 and the counter plate 16,
-The magnetic device 30 can be adjusted according to the distance 41 between the counter plate 16 and the closing cover 18, which is measured by the distance measuring device 40,
Closed device for vacuum chamber. The method of claim 14,
It further includes at least one electronic control circuit 45,
The at least one electronic control circuit 45 is coupled with the distance measuring device 40 and the magnetic device 30, and a predetermined distance (between the counter plate 16 and the closing cover 18) 41) configured to do at least one of maintaining and setting,
Closed device for vacuum chamber. As a closing device for the vacuum chamber 12,
A counter plate 16, which can be arranged on the vacuum chamber 12 and surrounds the opening 14 of the vacuum chamber 12;
-Frame 15-The frame 15 is supported in such a way that the frame can be moved relative to the counter plate 16, and a closing cover 18 is movably arranged on the frame 15 , The closing cover 18 closes the opening 14 in a sealed manner in a closed position 28 relative to the counter plate 16;
-At least one magnetic device (30) for generating a closing force (C) acting between the counter plate (16) and the closing cover (18)
It includes,
The at least one magnetic device 30 engages with the counter plate 16 and the closing cover 18,
The closed cover can be mounted to the guide in a non-contact manner through one or more magnetic bearings,
Closed device for vacuum chamber.

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