WO2017097672A1

WO2017097672A1 - Closure device or lock device for a vacuum chamber

Info

Publication number: WO2017097672A1
Application number: PCT/EP2016/079555
Authority: WO
Inventors: Ulrich Oldendorf; Christof Klesen
Original assignee: Applied Materials, Inc.
Priority date: 2015-12-10
Filing date: 2016-12-02
Publication date: 2017-06-15
Also published as: JP2019502064A; CN108700222A; CN108700222B; KR20180082587A; DE102015016081A1; KR102089267B1; US20180339816A1

Abstract

The invention relates to a closure device or lock device for a vacuum chamber (12), comprising: a counter plate (16), which can be arranged on a vacuum chamber (12) and which surrounds an opening (14) of the vacuum chamber (12); a frame (15), which is supported in such a way that the frame can be moved in relation to the counter plate (16) and on which a closure cover (18) is movably arranged, wherein the closure cover (18) closes the opening (14) in sealing manner in a closed position (28) against the counter plate (16); at least one magnet device (30) for producing a closing force (C) acting between the counter plate (16) and the closure cover (18), which magnet device is in engagement with the counter plate (16) and with the closure cover (18).

Description

Internal character: MECA.215.02 WHERE

Mecatronix AG

X-ray street 43

64291 Darmstadt

Lock or lock device for a vacuum chamber

Description

Technical area

The present invention relates to a closure or lock device for a vacuum chamber with a can be arranged on a vacuum chamber and an opening of the vacuum chamber surrounding the counter plate and a movable relative to the counter plate mounted closure lid which closes the opening of the vacuum chamber in a closed position on the counter-plate. In addition, the invention relates to a method for closing an opening of a vacuum chamber by means of such a closure or lock device. background

Locking and closing devices for vacuum chambers are well known in the art. For example, WO 2005/121 621 A1 describes a generic lock device for a lock opening arranged in a wall between a first and a second recipient and with a shut-off element arranged in the interior of the first recipient and a counter-plate associated with the shut-off element. te. The flange-like configured and the opening enclosing the counter plate is provided with a peripheral seal, against which the obturator is pressed sealingly. To maintain a required tightness, in particular to maintain high vacuum conditions within the vacuum chamber, it is desirable that the obturator as evenly as possible in the circumferential direction around the opening distributed areas of the seal presses. The application of a uniform and homogeneous contact pressure on the seal over the entire seal is particularly difficult in the case of seals with a seal diameter of a few millimeters for a dimension of a shut-off device or a closure cover in the range of a few decimeters or meters in terms of design and production engineering. The realization of the sealing ring compressing stroke of about 0.5 mm to 2 mm over an area of the closure lid in the range of, for example, 0.5 to 5 m ² or more, proves constructive and manufacturing technically extremely complicated. In addition, a direct contact between the counterplate and the closure cap, which are typically made of metal, must be absolutely avoided for reasons of required clean-room conditions and for reasons of a required particle freedom associated with this in the environment of the vacuum chamber.

Any possible shearing movements between the seal and a metal component coming to rest thereon when closing the closure or lock device, also typically between the seal and the closure lid, must also be avoided or avoided for reasons of compliance with the required clean room condition and freedom from particles Minimum to reduce.

In addition, the gasket typically made of an elastomeric material, such as rubber, may undergo an aging process, and its elastic properties continue to be used the lock or lock device can change. Furthermore, it is conceivable that the vacuum chamber is operated with different vacuum or pressure levels. If the closure or lock device seals the interior of the vacuum chamber against the atmosphere or some other ambient pressure, for example against a deviating pressure of an adjacent vacuum chamber, the contact pressure on the seal can vary depending on the prevailing pressure in the vacuum chamber and it can come to relative movements between the seal and metal parts of the closure or lock device.

In that regard, the present invention has the object to provide an improved closure or lock device for a vacuum chamber, by means of which a particularly uniform and preferably only perpendicular to the seal acting pressing force when closing the vacuum chamber is exercisable. It is in particular objective to avoid any shearing movements or friction on the typically rubber-elastic seal between counter-plate and closure cover or to reduce to an absolutely necessary minimum. With the device, a particularly high degree of particle freedom and purity in the region of the vacuum chamber should be achievable. The closure or lock device should also be characterized by a comparatively low weight and easy and good handling of their individual components in terms of manufacturing, assembly and long-term operation. Invention and advantageous embodiments

This object is achieved with a closure or lock device according to independent claim 1. Advantageous embodiments are each the subject of dependent claims.

In that regard, a closure or lock device is provided for a vacuum chamber. The closure or lock device has a vacuum chamber that can be arranged on or arranged thereon, possibly in the vacuum. umkammer integrated or connected to a chamber wall backplate, which encloses an opening of the vacuum chamber. The counter-plate is typically formed flange. It can protrude outwardly from the wall of the vacuum chamber and form or have an abutment surface extending approximately perpendicular to the insertion direction through the opening of the vacuum chamber.

The closure or lock device further has a relative to the counter plate movably mounted frame. At this Encrypted ⁾ lid is in turn arranged to be movable. The closure lid can be brought into a closed position on the counterplate, in which the closure lid seals the opening of the counterplate. In this case, it is in particular the frame which is movably mounted on the counterplate between an open position and a contact position. In the open position, the frame and the counter-plate arranged thereon release the opening of the vacuum chamber so that substrates to be treated in the vacuum chamber can be introduced into the vacuum chamber and removed therefrom.

In a contact position, the frame is in mechanical contact with the counter plate 0. The closure lid, which is movably mounted on the frame, can lie comparatively loosely against the counterplate in that contact position, typically against a seal enclosing the opening of the counterplate, but without exerting appreciable forces on the seal. It is also conceivable that in the contact position of the frame on the counter-5 plate of the closure lid with respect to the counter-plate or with respect to the typically arranged on the counter-plate seal is non-contact.

A sealing the opening and thus the vacuum chamber sealing takes place through from the contact position of the frame out by a movement 30 of the closure cover relative to the frame, which is already in abutment position with the counter plate. Furthermore, the closure or lock device has at least one controllable and / or controllable magnetic device which is operatively connected to the counterplate and the closure lid. This is designed to produce a closing force (C) acting between the counterplate and the closure lid. By means of the controllable magnetic device, the amount and the direction of the closing force acting between the counter-plate and the closure lid can be varied. Depending on the specific design of the magnetic device, both an attractive and repulsive force can be exerted on the closure lid in order to optionally close or open the opening of the vacuum chamber by means of the closure lid, depending on the pressure level prevailing in the vacuum chamber and the vacuum chamber environment.

The closure lid may in this case be subject to a comparatively small stroke or a comparatively short or small movement relative to the frame. Such small or short movements are separate and thus particularly well controlled and controlled by the magnetic device. In particular, this allows a defined and as even as possible deformation of an elastic seal between the closure cap and counter-plate can be achieved.

In a development, the closure lid has a flat lid surface. The closure lid is further displaceable in a direction parallel to a surface normal (N) of the lid surface on the frame. Typically, the closure lid is slidably mounted between a rest position (U) and the closed position (S) on the frame. It is typically arranged in a translational or linearly movable manner on the frame. Due to the fact that the closure lid is mounted movably on the frame largely perpendicularly to the lid surface or also perpendicular to a plane of the frame, the closure lid can, under the action of the magnet device, produce a homogeneous contact force over the circumference of the seal and thus also a homogeneous compression on the seal exercise. It is provided in particular that the closure lid is moved in a position in contact position frame and starting from a rest position on the frame by the magnetic device exclusively in the direction of the surface normal to the frame. Any shear forces or relative to the seal rubbing relative movements between the closure cap and the seal can be widely avoided in this way. When closing the lock or lock device, ie when transferring the closure cover from a rest position on the frame in the seal compressing closed position, Diehtung undergoes exclusively or predominantly only one perpendicular to the plane of the closure lid or perpendicular to the plane of the seal directed compression. A friction or crushing of the seal in the transverse direction can be largely avoided by the said leadership of the closure lid on the frame.

In a further embodiment, the closure lid is connected to the frame via at least one restoring element. The restoring element is designed to exert a restoring force on the closure lid, which is directed counter to the closing force that can be generated by the magnetic device. During the sealing closing of the closure or lock device, the magnetic device acting between the counter plate and the closure cover counteracts the restoring force of the at least one restoring element. This has the advantage that the magnetic device only has to generate a force acting in a single direction, namely in the closing direction.

The magnetic device is in this case designed to generate a closing force that is greater than the restoring force acting on the closure lid. In particular, the closing force which can be exerted by the magnet device on the closure lid is greater than the sum of the restoring forces of all return actuators, via which the closure lid is mounted on the frame. To close the opening, the magnetic device acts as it were against the restoring force of all restoring elements. Since the closing force is greater than the sum of all return forces this leads to a movement of the closure lid in the closed position upon activation of the magnetic device.

For opening the vacuum chamber, on the other hand, it is provided to reduce the closing force emanating from the magnetic device to at least a predefined amount, so that the current closing force is less than the sum of all restoring forces of all restoring elements. As a result, the closure lid is displaced over the at least one, typically over a plurality of return elements in the rest position on the frame with a correspondingly low or completely missing closing force of the magnetic device. In this, the closure cap is either in a loose contact position for sealing the counter plate or at least there is a gap between the closure cap and provided on the counter plate seal, so that the closure lid in the rest position in a contact position befindlicher frame without contact to the counter-plate or to the provided on the counter-plate seal.

In a further development, it is further provided that the at least one restoring element is an elastic return element. The restoring element is so far elastically deformable and provides the required restoring force due to its elasticity. An elastic return element can in particular be formed in one piece in the form of a single component which, apart from its elastic deformation, is not subject to any relative movement between the frame or closure lid. The one-piece design of a restoring element, and therefore its elastic deformability, proves to be advantageous for maintaining the required particle freedom. In particular, by the elastic deformability of the at least one restoring element, friction of the restoring element with other components of the closure or lock device can be prevented.

According to a development, the at least one restoring element has at least one return spring. The return spring may be formed, for example in the form of a leaf spring. The return spring may be, for example, between see opposite legs of the frame. The return spring may be connected approximately centrally between the frame legs with the closure lid. As a result, a centric or surface-centered mounting of the closure lid on the frame can be achieved, which can advantageously affect the linear displaceability of the frame.

According to a further embodiment, the closure lid is arranged on the frame via a plurality of spaced-apart restoring elements. It proves to be advantageous if over the surface of the frame, that is distributed over the surface of the closure lid several equally effective return element or more return springs. In this way, the most homogeneous and defined restoring force can be provided over the surface of the frame or over the surface of the closure lid.

According to a development thereof, the sum of the restoring forces acting on the closure cap by all restoring elements is greater than the weight force of the closure cap. Such a design of the return elements allows, for example, a horizontal, thus a horizontal orientation of the counter-plate and a loading of the vacuum chamber from above. If the sum of all the restoring forces which can be exerted on the closure lid is greater than the weight of the closure lid, the closure lid can also be pulled upwards by the restoring elements against its own weight force into the rest position on the carrier. Such an interpretation of the restoring forces proves to be advantageous for a flexible use of the closure or lock device and in particular for the most varied geometric orientations of the closure or lock device.

According to a further embodiment, the frame is arranged pivotably or displaceably on an opposing plate or on the vacuum chamber between an already mentioned opening position and an already mentioned contact position. In the open position, the frame and the closure lid arranged thereon release the opening of the vacuum chamber. A sliding guide is particularly suitable for a space-saving design and arrangement of the closure or lock device in the region of a substrate-processing process station. Unlike swivel-mounted closure lids, the region which lies outside the opening of the vacuum chamber and, as it were, in the extension of that opening can be used to arrange further components of a process station and does not have to remain free, as is customary with a pivotable mounting of the closure lid.

The closure lid can be mounted without contact on the guide by means of one or more magnetic bearings. As a result, a non-contact, thus a wear and low maintenance sliding of the closure lid and relative to the counter plate is possible. Unlike a roller-guided guidance of the closure lid, no abrasion occurs in the case of a magnetic bearing-based mounting of the closure lid. Required clean room conditions and a required particle freedom in the area of the lock or lock device can hereby be easily met. The magnetic bearing provided for the guide can, similar to those provided for the closure or lock device magnetic device each having an electromagnetic actuator and a magnetically interacting counterpart and a distance measuring device and a control circuit, so that the closure lid by means of one or more magnetic bearings quasi free suspended in a predetermined distance from the guide and is movable along the guide.

According to a development of the closure lid is in the position in contact position frame by means of the magnetic device relative to the frame of a rest position in the sealing closed position transferred. In the contact position of the frame is applied to the back plate or to the vacuum chamber. The closure lid covers the opening substantially completely. He closes the opening but not yet gas-tight. in this respect It is also possible for an air gap to be located between the closure cap and the seal, which is typically arranged on the opposite side of the plate.

Only with activation of the magnetic device and by the controlled by the magnetic device or controlled displacement movement of the closure cover perpendicular to the plane of the closure lid, or perpendicular to the plane of the carrier and thus typically also perpendicular to the opening plane lying between counter-plate and cap seal in the required manner be compressed as evenly as possible.

In a further embodiment, at least one spacer is arranged between the frame and the counterplate. In the contact position of the frame on the counter-plate is the at least one spacer between the facing sides of the frame and counter-plate. Typically, a plurality of spacers are provided over the circumference of the opening of the counterplate. About the spacer or the frame is based on the on reaching the contact position on the counter plate. The geometric configuration and the arrangement of the at least one, preferably a plurality of spacers defines the contact position of the frame on the counter-plate.

The extent of the at least one or more spacers perpendicular to the plane of the frame or perpendicular to the plane of the counter-plate is at least as large as the sum of a displacement of the closure lid between the rest position and the closed position on the frame plus the thickness of the closure lid. By spacers dimensioned in this way it is ensured that the closure lid arranged, for example, on the side of the frame facing the counter-plate is out of contact with the counter-plate or the seal provided thereon, when the frame with the closure lid resting thereon from the opening position in FIG the contact position is transferred. Premature contacting or sliding along of the closure cap at a portion of the seal due to pivotal or translational movement of the frame can be prevented in this manner. According to one embodiment, the magnetic device has at least one electromagnetic actuator arranged on one of the closure lid and counterplate and at least one counterpart arranged on the other of the closure lid and the counterplate, which magnetically interacts with the electromagnetic actuator. The electromagnetic actuator can be arranged, for example, on the counter-plate or let into the counter-plate, while the counterpart can be arranged on the closure lid. It is also conceivable that the counterpart is integrated in the cap, or that the entire cap acts as a counterpart. The counterpart or the closure cap is designed either ferromagnetically or permanently magnetically, in order to come into magnetic operative connection with the acted upon by a corresponding control current electromagnetic actuator. In the closed position of the closure lid on the counterplate, in which the closure lid completely covers the opening cross section of the vacuum chamber, the electromagnetic actuator and its associated counterpart at least partially overlap, so that a sufficient closing force or opening force can be generated.

It is generally conceivable for the electromagnetic actuator of the magnetic device to be arranged on the closure lid, while the counterpart interacting magnetically with the electromagnetic actuator is arranged on the counter-plate or formed thereon.

Regardless of whether the electromagnetic actuator is arranged on the closure lid or on the counterplate, at least one further permanent magnet, which can further support the force emanating from the electromagnetic actuator, can also be arranged on that component on which the electromagnetic actuator is arranged. Hereby, for example, se an electroless locking of the closure cap can be achieved, so that the coil of the actuator can be acted upon by a much lower current. Heat losses of the coil and associated problems with cooling or thermal expansion can thereby be reduced or even eliminated.

According to a further embodiment, an elastically compressible seal surrounding the opening is arranged in an intermediate space between the sides of the closure lid and the counterplate facing each other in a closed position of the closure lid on the closure lid or on the counterplate. The seal can be arranged for example on the counter-plate. For this purpose, the counterplate may, for example, have a groove enclosing the opening of the vacuum chamber, in which the peripheral seal is arranged. In the uncompressed initial state, the thickness or the diameter of a sealing portion is greater than the depth of the groove receiving the seal, so that a part of the seal at least slightly protrudes from the closure lid facing side of the counter-plate, thus with the contact surface formed by the counter-plate. By that configuration, the closure lid with the seal sealingly come to rest, without the metal components of counter-plate and closure cover touching each other.

The mutually facing sides of the closure lid and the counterplate are typically designed at least in regions as planar contact surfaces, which are in the closed position substantially perpendicular to the predetermined by the geometry of the opening of the vacuum chamber direction (z), or perpendicular to a closing direction in which the the magnetic device outgoing closing force acts, extend. The seal is typically made of an elastomer and has a suitable for the intended use elasticity or compressibility. By means of the distance-dependent regulation of the closing force of the magnetic device is also conceivable, also in terms of their elastic o- the mechanical properties of different seals, each for different purposes of the lock or lock device to use. By means of the distance-dependent regulation of the closing force, the closure or lock device can adaptively be adapted to different or varying elastic properties of a respective provided seal. The seal may be formed as an O-ring-like seal, thus as a circumferential and circumferentially closed sealing ring. Although the seal is preferably arranged in a groove of the counterplate and the closure lid interacting therewith is sealless, reverse embodiments are also conceivable in which the seal is arranged on an inner side of the closure lid, in particular in a groove of the closure lid and wherein the counterplate is sealed. is formed without care.

According to a further embodiment, the closure or lock device has at least one distance measuring device for measuring a distance between the closure cover and the counterplate. By means of the distance measuring device, a distance between closure cap and counterplate in the direction of the closing force emanating from the magnet device can be measured at least at certain points. The distance between the closure cap and the counterplate is a measure of the currently prevailing compression or elastic deformation of a seal provided between the counterplate and the closure cap, provided that the closure cap rests against the counterplate via the seal. Consequently, the degree of elastic deformation of the seal can be measured by means of the distance measuring device.

It is further provided for the closure or lock device that the magnetic device can be regulated as a function of the distance between the counterplate and the closure cover measured by the distance measuring device. As a result of the distance-dependent regulation of the magnetic device provided so far, different closing forces can be generated depending on the distance be so that, for example, provided between counter-plate and cap seal is compressible to a required level. By means of the distance measuring device and the extent provided for feedback to the at least one magnetic device, a wide variety of states of the closure or lock device can be detected.

For example, it can be measured by means of the distance measuring device whether and to what extent the counterplate and sealing cover abut one another in a sealing manner. If the distance is approximately above a maximum value intended for a sufficient seal, the closing force can, for example, be gradually increased by means of the controllable magnetic device until the maximum permissible maximum distance is undershot.

In the opposite case, it is also conceivable that upon detection or measurement of too small a distance between the counterplate and the closure lid, a direct contact of the counterplate and the closure lid, which is typically made of metal, is to be feared. This is to be avoided in particular for reasons of a required particle freedom in the environment of the vacuum chamber necessarily. In such a case, the closing force, for example, gradually reduced in amount until a minimum allowable distance between the closure cap and counter-plate is exceeded.

By means of the distance-dependent control and activation of the magnetic device, it is therefore also possible to respond to different or time-varying pressure levels within the vacuum chamber. By a pressure difference between the interior of the vacuum chamber and the environment or by a pressure difference on both sides of the cover, a closing force or opening force can already abut the closure cap per se. By means of the distance-dependent controllable magnetic device can be compensated for varying pressure differences on the opposite sides of the closure cap. According to a further development, at least one electronic control circuit is also provided, which is coupled to the distance measuring device and to the at least one magnetic device and designed to maintain and / or set a predetermined distance between the counterplate and the closure cover. The control loop typically has a reference value transmitter, by means of which the distance signals which can be generated by the distance sensor are compared with a predetermined desired value. From the comparison of set value and actual value, a controller connected downstream of the nominal value generator can be used to generate a control signal for actuating the magnetic device, in particular for activating the electromagnetic actuator.

The control signal which can be generated by the controller is typically supplied via an amplifier to the electromagnetic actuator of the magnetic device. By means of the electronic control circuit, an active and automatic regulation of the closing force can be realized. Any sudden or continuous changes in the operating or ambient conditions, such as a change in the pressure difference between the interior of the vacuum chamber and the environment can be reacted flexibly in this way, dynamically and depending on the situation. By means of the distance measuring device and the magnetic device coupled together control loop, a required distance between counter-plate and cap and thus a required contact pressure of the cap and a concomitant compression of provided between counter-plate and cap seal can be brought about and controlled adhered.

According to a further embodiment, a plurality of magnetic devices each provided with its own distance measuring device are arranged distributed over the circumference of the opening or over the circumference of the counter plate designed, for example, in the manner of a flange. By providing a plurality of magnet devices distributed over the opening circumference, a particularly uniform contact pressure and closing force can be set between the counterplate and the closure lid. It is thereby further possible, any Deformations or manufacturing inaccuracies of counter-plate and / or cap to compensate control technology.

Each of the distance measuring devices coupled with one magnet device can, as it were, autonomously set and maintain a predetermined distance between the counterplate and the closure lid just at the location of the corresponding distance measuring device or magnet device. Pressure-dependent and inevitably minimal deformations of the closure cap, which would otherwise lead to an uneven pressing or closing force of the seal, can thus be effectively compensated for and an uneven gap dimension or a varying over the opening circumference distance between the closure cap and counter-plate can be counteracted.

Any load-dependent or manufacturing-related deformations or component tolerances can be compensated by control technology. By means of a plurality of, each provided with its own distance measuring device magnetic devices locally different closing forces and contact pressures can be generated over the circumference of the opening or over the circumference of the counter plate so that the result is a homogeneous compression of the seal targeted and controlled adjustable, which ultimately to a required tightness of the closure or lock device leads. In practical application, that configuration is of particular advantage, namely in particular if at least one of the closure lid and the counterplate are not absolutely rigid and / or subject to local deformations depending on the load.

By means of a plurality of magnetic devices each provided with a distance measuring device, such effects can be eliminated and compensated for by regulation. It is even possible to accept comparatively large component tolerances or mechanical deformations for the design of the closure lid and / or the counterplate, so that a comparatively large component design of the closure lid and the counterplate is possible even for comparatively large-scale embodiments. wise filigree design with a relatively lower weight can provide.

According to a further embodiment of the closure or lock device is provided that the distributed over the circumference of the opening of the vacuum chamber or over the circumference of the counter-plate or over the circumference of the closure lid arranged magnetic devices are each coupled with its own control loop. As a result, each of the magnet devices independently of one another can adjust and regulate the distance prevailing at their respective position or a gap dimension between the closure cover and the counterplate.

As a result, processing of the distance signals available from the respective distance measuring devices can be carried out locally in the area of the magnetic devices and control circuits. Any data and signal lines can thereby be reduced to a minimum, which may prove to be particularly advantageous for applications in the vacuum sector.

According to a further embodiment, the magnetic devices distributed over the circumference of the opening and / or the distance measuring devices associated with the magnetic devices are coupled to a central controller. The central control can be provided instead of a local control loop or in addition to the control circuit associated with the respective magnetic device and the associated distance sensor. By means of a central control, which is for example coupled with all control circuits of all magnetic devices in terms of data technology, a synchronous control of the control circuits can take place in a particularly simple manner.

For example, the central control can each be coupled to the setpoint generator of the individual control loops, so that by means of the central control a distance to be maintained between the counterplate and the closure lid can be simultaneously transferred to all control loops. By means of the central control, the user of the closure or lock device receives a particularly easy-to-use control element, with which for all control circuits and magnetic devices a distance to be respected or a corresponding gap between the closure cap and the counter plate is synchronously or simultaneously adjustable.

For each of the different configurations of the closure or lock devices, various distance measuring devices can be provided. The distance measuring device may for example have one or more distance sensors, which are based on an optical, magnetic or capacitive measuring principle. In particular, sensors are used which are based on an inductive measuring principle or on the basis of eddy currents. The distance sensor is arranged in particular in the immediate vicinity of the magnetic device, in particular in the immediate vicinity of the electromagnetic actuator or to the counterpart of the magnetic device, so that the highest possible degree of coking can be achieved. The immediately adjacent or even overlapping arrangement of distance measuring device and magnetic device contributes to the improvement of the measurement and control accuracy. In particular, the distance sensor can be arranged on the counterplate and thus measure a distance, in particular a gap dimension, between the counterplate and the closure cover. A distance sensor arranged on the counterplate is designed in particular to measure the distance to a defined reference surface or a reference point of the closure lid precisely, typically with an accuracy in the submillimeter or in the micrometer range.

Brief description of the figures

Other objects, features and advantageous embodiments of the invention will be explained in the following description of embodiments with reference to the drawings. Hereby show:

1 is a simplified schematic representation of the lock or lock device with the closure lid carrying frame men in contact position and a resting at the frame closure lid,

2 is a perspective view of the closure or Schleusenvor- direction with open closure cap,

3 the closure or lock device according to FIG. 2 in the closed position, FIG.

4 shows a further embodiment of the closure or Schleusenvorrich- device with a displaceably mounted on the counter plate or on the vacuum chamber frame in the open position,

5 shows the closure or lock device according to FIG. 4 with the frame and with the closure lid in the closed position, FIG.

6 shows a cross section through the closure or lock device according to FIG. 2 in the open position, FIG.

7 shows a representation according to FIG. 6, but with the frame in contact position and the closure lid in the rest position on the frame and

Fig. 8 is a view according to FIG. 7, but with the closure lid in the closed position relative to the frame. Detailed description

The closure or Schleußenvorrichtung shown in cross-section in Fig. 1

10 is provided for placement on an opening 14 of a vacuum chamber 12. The closure or lock device 10 has a counter plate 1 6, which typically with the schematically indicated in Fig. 1 wall

1 1 of the vacuum chamber 12 is connected. The counter plate 1 6 can be arranged in alignment with the opening 14 of the vacuum chamber 12 on the wall 1 1 or formed as an integral part of the vacuum chamber 12. in this respect can also the counter plate 1 6 have an opening 14 which can typically coincide with the opening of the vacuum chamber 12.

As can be seen from the synopsis of FIGS. 2, 3 and 6 to 8, in this embodiment the sealing cover 18 which has a wide configuration and is designed to be displaceable on a frame 15 by means of a plurality of return elements 82. The displaceability and the deflection of the return elements 82 result from a comparison of FIGS. 7 and 8. The frame 15 itself is, for example, pivotally mounted on the counter plate 1 6. In Figs. 2 and 3, a corresponding pivot or hinge axis 80 is shown. In the embodiment of Figures 4 and 5, the frame 15 is mounted linearly displaceable on the counter-plate 1 6.

The counter-plate 16 facing side 19 of the closure lid, thus the inner lid surface 81 is substantially planar. In the rest position U of the closure lid 18, for example, shown in FIG. 7, relative to the frame 15 and the frame 15 located in the contact position K on the counterplate 16, the lid surface 81 is aligned substantially parallel to a plane of the seal 22, which is in the groove 20 on the closure cover 18 facing side 17 of the counter plate 1 6 is located.

In a closed position 28 shown in FIG. 8, the closure lid 18 seals the opening 14 in a gas-tight or vacuum-tight manner. Counter plate 1 6 and closure cap 18 are further provided with at least one magnetic device 30, by means of which a closing force (C) on the closure cap 18 is exercisable.

The counterplate 16 can have a flange-like geometry and, in particular, have a seal 22 on a side 17 which acts on the closure cover 18 and acts as a contact surface, which extends around the opening 14, typically in the region of an opening boundary of the counterplate 16. In the present case, the seal 22 made of an elastic and deformable material is arranged in a peripheral groove 20 of the counterplate 16. But it can also be placed in a corresponding groove of the closure cover 18 or in a gap 25 between the closure cap 18 and counter plate 1 6 may be arranged.

Upon reaching a closed position S shown in FIG. 8, the seal 22 between closure cap 18 and counter plate 1 6 is deformed or squeezed such that the opening 14 is closed gas-tight.

By means of the magnet device 30, a closing force (C) directed in the insertion or closing direction (z) can be exerted on the closure cap 18. Each closing force (C) is typically oriented perpendicular to the plane (x, y) or perpendicular to the contact surface or to the side 17 of the counterplate 16. The closure lid 18 also has a side 19 which faces the counterplate 16 and also acts as a contact surface. The in closed position 28 facing each other sides 17, 19 of counter-plate 18 and cover 19 are at least partially aligned parallel to each other.

The respective contact surfaces of the mutually corresponding sides 17, 19 extend in an xy plane. In the present case, the magnetic device 30 has at least one electromagnetic actuator 32 arranged on the counterplate 16, as well as a counterpart 34 magnetically interacting with it and arranged on the closure cover 18. The counterpart 34 is designed as a permanent magnetic or ferromagnetic component, which is either arranged on the closure lid 18 or embedded in the closure cap 18. It is also conceivable that the closure lid 18 itself at least in sections, a permanent magnetic or ferromagnetic material comprises or at least partially or completely formed from such. By energizing or by applying a coil 33 of the electromagnetic actuator 32 with electric current, an attractive or repulsive force can be exerted on the closure cap 18. By regulation of Amperage or by varying the control signal, the outgoing from the magnetic device 30 closing force (C) can be varied as needed.

The closure or lock device 10 further optionally has a stand-off measuring device 40, by means of which a distance 41 between the closure cover 18 and the counter plate 1 6, in particular a distance between the facing sides 19, 17 of closure cover 18 and counter plate 16 determinable and is quantitatively measurable. The distance measuring device

In the present case, 40 has a distance sensor 42 which is arranged on the counterplate 16 and measures a distance 41 in the closing direction (z) between the counterplate 16 and the closure cap 18. By means of the distance measuring device 40, the magnetic device 30, in particular the closing force (C) emanating from it, can thus be controlled as a function of the distance. It is provided in particular that by means of a distance-dependent control of the magnetic device 30, the distance 41 between the closure cap 18 and counter plate 1 6 is precisely adjustable to a predetermined level.

For the distance-dependent control in particular a control circuit 45 is provided, which couples the magnetic device 30 with the distance measuring device 40. The control circuit 45 has a setpoint generator 44, which is connected to the distance sensor 42 for data purposes. The setpoint generator 44 receives the distance signals provided by the distance sensor 42 and compares them with a preset or variably predefinable by a central control setpoint. Setpoint and actual values are compared with each other in setpoint generator 44.

A comparison signal resulting therefrom is then supplied to a controller 46, which generates therefrom a control signal provided for driving the electromagnetic actuator 32. The control signal which can be generated by the controller 46 is supplied to the electromagnetic actuator 32 via an amplifier 48. That the coil 33 of the electromagnetic actuator 32 supplied controllable control signal is calculated and determined such that a predetermined distance

41 between the counter plate 1 6 and cap 18 is observed, and in the case of deviations from a required distance, the force emanating from the magnetic device 30 for maintaining the distance 41 is dynamically adaptable. All electronic components of the control loop, that is, the amplifier 48, the controller 46, the setpoint generator 44 and possibly also the distance sensor 42 may be housed on a common board, for example in the form of an integrated circuit. The space required for a corresponding electronic unit and a cabling effort associated therewith can be minimized in this respect.

The electromagnetic actuator 32 typically has a ferromagnetic core, for example an iron core, in addition to the coil 30 that can be acted upon by electrical signals. However, the electromagnetic actuator 32 can be designed as an electromagnet in a wide variety of other ways, for example as a Lorenzoder immersion coil actuator. The latter, in contrast to an electromagnet, can generate not only attractive but also repulsive forces between the electromagnetic actuator and the counterpart. The intended for receiving the electromagnetic actuator 32, and its coil 33 groove 31 is facing the counterpart 34 facing reasons of vacuum suitability and / or seal. A cover 21 provided for this purpose is typically made of a magnetically permeable material or of a non-magnetic or only weakly magnetic material. The cover 21 can act as a kind of closure for the groove 31 and be designed as such. By means of separate, not explicitly shown seals, the cover 21 can be arranged in a sealing manner above or in the groove 31. The cover 21 can in particular be flush-mounted in the counterpart 34 facing side 17, thus in the contact surface of counter-plate 1 6 or cover 18 may be integrated. For reasons of clarity, the cover 21 is shown in Fig. 1 only on the right side of the counter plate 1 6. Each of the magnet devices 30 distributed over the circumference of the opening 14 can be controlled in accordance with the distance 41 between the counterplate 16 and the closure cover 18 in its area such that a constant or within the smallest tolerances occurs over the entire outer circumference of the opening 14 remaining distance 41 is adjustable.

As further shown in Fig. 1, located between the mutually facing sides 17, 19 of the counter plate 1 6 and closure cover 18 at least one spacer 24, which acts as an end stop for the frame 15. In the uncompressed state of the seal 22, as shown in Fig. 7, the seal 22 protrudes at least slightly from the side 17 of the counter plate 1 6.

In the rest position U of the closure lid 18 relative to the frame 15 and the contact position K of the frame 15 relative to the counterplate 16 shown in FIG. 7, there is an air gap between the closure lid 18 and the counterplate 16 or between the closure lid 18 and the seal 22. It can also be provided that the closure cap 18 in each rest position U bears compression-free and thus comparatively loosely against the seal 22.

With activation of the magnetic device 30, the components of which are only schematically illustrated in FIGS. 6-8 in comparison to the illustration according to FIG. 1, the closure cover 18 experiences a displacement movement compressing the seal 22 according to a closing force C acting on it Seal 22 'is indicated in Fig. 8. In the present embodiment, the closing force C cooperates with the weight G of the closure cap 18. The closing force C counteracts a restoring force R of individual return elements 82. The restoring elements 82 are, as can be seen in FIG. 3, in the present case designed as leaf springs 83.

The frame 15 is formed as a circumferentially closed frame. It has two substantially parallel elongated legs 85, 86, which are connected at their longitudinal ends on end-side head portions 87, 88 together. In about the middle between the head portions 87, 88, a connecting web 89 is provided, which structurally connects the two legs 85, 86 again structurally and in so far increases the stability and rigidity of the frame 15. The leaf springs 83 are arranged in pairs. Opposite ends of the leaf springs 82 are respectively disposed on opposite legs 85, 86. The leaf springs 83 are connected approximately centrally between the legs 85, 86 with the closure cap 18. A deflection of the closure lid 18 perpendicular to the plane of the frame 15, thus parallel to the surface normal N of the closure cap 18 by means of the magnet device 30 thus takes place against the restoring force R. emanating from the return springs 83.

As best shown in FIGS. 6 and 7, a plurality of spacers 24 arranged distributed over the circumference of the opening 14 are arranged on the side 17 of the counterplate 16 facing the closure lid 18. The spacers 24 are typically made of plastic, in particular a high-temperature-stable plastic, for example made of polyetheretherketone (PEEK), which hardly or only barely tends to outgas under vacuum conditions.

In the contact position K of the frame 15 on the counter-plate 16, the frame 15 comes with its opening 14 facing bottom with the spacers 24 to the plant. Corresponding to the arrangement of the spacers 24 on the counter plate 1 6 corresponding recesses 23 are provided at the outer edge of the closure lid 18, which when taking the contact position K of the spacers 24th to be interspersed. The recesses 23 allow a large-area coverage of the opening 14 through the closure lid 18, without hindering a close to the opening 14 arranged support or contact of the frame 15 on the counter plate 1 6. As can be seen with reference to FIG. 7, there is a defined gap between the closure lid 18 and the seal 22 in the contact position of the frame 15 and the rest position U of the closure lid 18 shown there. By activating the magnet device 30, the closure cap 18 is pulled in accordance with the closing force C towards the counterplate 16. As a result, the return elements 82 are deflected towards the counter plate 1 6 back. They provide a restoring force R, which permanently acts on the closure cap 18. With decreasing closing force or upon deactivation of the magnetic device 30, the restoring elements 82 and the return springs 83 return the closure lid 18 from the sealing position shown in FIG. 8 and compressing the seal 22 back to the rest position U.

The movable mounting of the closure cap 18 on the frame 15 is advantageous in that comparatively large closing forces on the closure cap 18 are exercisable. Due to the movable mounting of the closure cap 18 relative to the frame 15, those forces are not transmitted to the frame 15. Consequently, a hinge 90 formed by the pivot axis 80 need not be able to absorb any closing forces emanating from the magnet device 30. The mechanical load on the frame 15 is essentially given only by the restoring force R, which are transmitted from the deflected return elements 82 between the closure cover 18 located in the closed position S on the frame 15. Once the closure cap 18 is in the closed position S shown in FIG. 8, an increase in the closing force C has no or only slight mechanical effects on the frame 15.

Referring to Figures 4 and 5, an alternative embodiment of the present invention is shown. In contrast to the embodiment according to FIGS. 2, 3 and 6, the frame 15 is displaceably mounted there relative to the counterplate 16 or against the vacuum chamber 12. FIG. 4 shows the frame 15 with the closure lid 18 arranged thereon in an open position, while FIG. 5 shows the frame 15 and the closure lid 18 in the contact position K or in the closed position S. Above and below or to the opposite Head portions 87, 88, the frame 15 along longitudinally extending guides 62, 64 slidably mounted.

The guides 62, 64, which are designed as linear sliding guides, thereby extend parallel to the plane of the counter plate 1 6, the frame 15 and / or the closure cap 18. The guides 62, 64, however, with respect to the closing movement of the closure lid 18 sufficiently spaced from the counter-plate 1 6 arranged to allow a non-contact displacement of the closure cap 18 relative to the counter plate 1 6, in particular also against the provided on the counter plate 1 6 and at least slightly protruding from the plane of the counter plate 1 6 seal 22.

The linear guides 62, 64 may be configured as non-contact guides. In the region of the guides 62, 64 a plurality of magnetic bearings 60 may be arranged.

The individual magnetic bearings 60, similar to the magnetic devices 30, may each have a distance sensor (not separately shown), a control circuit and an electromagnetic actuator 61 which can be controlled via the distance sensor and the control loop and which cooperates magnetically with a counterpart 63. In this way, a required suspended state of the closure cap 18 on the guides 62, 64 can be achieved. Contactless mounting of the closure cap 18 on the guides 62, 64 is particularly advantageous for avoiding contamination and abrasion in the environment of the vacuum chamber 12.

In the present case, a plurality of electromagnetic actuators 61 are provided along the guide 62, which successively engage with the counterparts 63 arranged on the frame 15 during a displacement of the frame 15. Reverse arrangements are equally within the scope of the present invention. For example, one or more actuators 62 may be disposed on the frame 15 or on the closure lid 18 while herewith magnetically interacting counterparts 63 are fixedly arranged on the designed as a guide rail linear guide 62, 64 are arranged.

In FIG. 4, the frame 15 and the closure lid 18 are shown in the open position O, in which the closure lid 18 is located outside the region of the opening 14 of the counterplate 16.

The storage of the closure lid 18 on the frame 15 causes or supports a kind of parallel displacement of the closure cap 18 from the rest position U to the closed position S, so that as possible no relative movements of the closure cap 18 and seal 22 in the plane of the closure lid (X, Y) occur. Such shearing movements could otherwise result in abrasion of the seal 22 and at least minor contamination of the environment of the vacuum chambers 12.

The contactless mounting of the closure cap 18 on the guide 62, 64 via the associated with the closure lid 18 slide-like designed frame 15. One of the components of the respective magnetic bearing 60, ie one of electromagnetic actuator 61 and counterpart 63 is stationary on the guide 62nd , 64 while the other component of actuator 61 and counterpart 63 on the frame 15 is arranged. For displacing the closure lid 18 or the frame 15 along the guides 62, 64, a linear motor 68 is provided, for example, by means of which the closure lid 18 is movable between the open position O and the contact position K with respect to the counterplate 16.

LIST OF REFERENCE NUMBERS

10 locks or locks

11 wall

12 vacuum chamber

14 opening

15 frames

16 counter plate

17 page

18 cap

19 page

20 groove

21 cover

22 seal

23 recess

24 spacers

25 space

30 magnetic device

31 groove

32 electromagnetic actuator

33 coil

34 counterpart

40 distance measuring device

41 distance

42 distance sensor

44 setpoint generator

45 control loop

46 controllers

48 amplifiers

60 magnetic bearings

61 Actuator

62 leadership

63 counterpart 64 leadership

68 linear motor

80 axis

81 Cover surface 82 Reset element

83 return springs

85 thighs

86 thighs

87 head section 88 head section

89 connecting bridge

90 hinge

Claims

P a n t a n s p r e c h e

Closure or Schleußenvorrichtung for a vacuum chamber (12), with a on a vacuum chamber (12) can be arranged and an opening (14) of the vacuum chamber (12) enclosing counter-plate (1 6), a movable relative to the counter-plate (1 6) mounted frame ( 15), on which a closure cover (18) is movably arranged, wherein the closure lid (18) in a closed position (28) on the counter-plate (16) sealingly closes the opening (14), at least one with the counter-plate (16) and with Magnetic device (30), which engages with the closure lid (18), for producing a closing force (C) acting between counter-plate (16) and closure lid (18).

Closing or locking device according to claim 1, wherein the closure lid (18) has a flat lid surface (81), and wherein the closure lid (18) in a direction parallel to a surface normal (N) of the lid surface (81) on the frame (15) displaceable is.

Closure or locking device according to one of the preceding claims, wherein the closure lid (18) via at least one return element (82) is connected to the frame (15) and wherein the return element for applying a restoring force (R) on the closure lid (18) is formed which is opposite to the closing force (C).

4. Closure or locking device according to one of the preceding claims, wherein the at least one return element (82) has at least one return spring (83).

Closing or locking device according to one of the preceding claims, wherein the closure cover (18) is arranged on the frame via a plurality of spaced-apart restoring elements (82) and wherein a sum of the restoring forces (R.1) acting on the closure cover (18) by all restoring elements (82) ) is greater than the weight (G) of the closure cap (18).

Closure or locking device according to one of the preceding claims, wherein the frame (15) between an open position (O) and a contact position (K) is arranged pivotably or displaceably on the counter-plate (1 6) or on the vacuum chamber (12), wherein the open position (O) of the frame (15) and the closure cover (18) arranged thereon release the opening (14) and wherein in the contact position (K) the frame (15) on the counter plate (1 6) or on the vacuum chamber (12 ) and the closure lid (18) substantially completely covers the opening (14).

Closing or locking device according to claim 6, wherein the closure lid (18) in the contact position (K) located frame (15) by means of the magnetic device (30) relative to the frame (15) from a rest position (U) in the sealing closed position ( S) is convertible.

8. Locking or locking device according to one of the preceding claims, wherein in the contact position (K) of the frame (15) to the one at least one spacer (24) is arranged, the extent of which is perpendicular to the plane of the frame (15) or perpendicular to the plane of the counter-plate (16) of the frame (15) and counter-plate (16). at least as large as the sum of a Ver travel of the closure cover (18) between the rest position (U) and the closed position (S) on the frame (15) plus the thickness of the closure lid (18).

9. Closing or locking device according to one of the preceding claims, wherein the magnet device (30) has at least one electromagnetic actuator (32) arranged on one of the closure cover (18) and counterplate (16) and at least one closure cap (18) on the other. and counter-plate (1 6) arranged counterpart (34) which interacts magnetically with the electromagnetic actuator (32).

10. Closure or locking device according to one of the preceding claims, wherein in an intermediate space (25) in a closed position (28) of the closure cover (18) facing each other sides (17, 19) of the closure cover (18) and counter-plate (1 6th ) on the closure cover (18) or on the counter-plate (1 6) an opening (14) enclosing elastically compressible seal (20) is arranged.

1 1. Closure or locking device according to one of the preceding claims, further comprising: at least one distance measuring device (40) for measuring a distance (41) between the closure cover (18) and counter-plate (1 6), wherein the magnetic device (30) in dependence of the distance measuring device (40) measured distance (41) between counter-plate (1 6) and closure cap (18) is adjustable.

12. closing or locking device according to claim 1 1, further comprising at least one electronic control circuit (45) which with the Abstandmessinnchtung (40) and with the magnetic device (30) coupled and for maintaining and / or setting a predetermined distance (41) between counter-plate (16) and closure cover (18) is configured.

13. Lock or Schleußenvorrichtung according to any one of the preceding claims, wherein over the circumference of the opening (14) a plurality, each with its own distance measuring device (40) provided magnet means (30) are arranged distributed.