CN106461120B - Locking device for vacuum chamber - Google Patents
Locking device for vacuum chamber Download PDFInfo
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- CN106461120B CN106461120B CN201580030603.9A CN201580030603A CN106461120B CN 106461120 B CN106461120 B CN 106461120B CN 201580030603 A CN201580030603 A CN 201580030603A CN 106461120 B CN106461120 B CN 106461120B
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- backplate
- closing cap
- spacing
- closing
- magnet apparatus
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
- F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/30—Details
- F16K3/314—Forms or constructions of slides; Attachment of the slide to the spindle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K37/00—Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
- F16K37/0025—Electrical or magnetic means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
- F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Pressure Vessels And Lids Thereof (AREA)
- Sliding Valves (AREA)
- Indication Of The Valve Opening Or Closing Status (AREA)
- Magnetically Actuated Valves (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Abstract
The present invention relates to a kind of locking devices or valve system for being used for vacuum chamber (12), comprising:-one may be arranged on vacuum chamber (12) and surround the backplate (16) of the vacuum chamber (12) one openings (14)；-- a closing cap (18) being movably arranged relative to the backplate (16), the closing cap close the opening (14) in closed position (28) on the backplate (16)；-- magnet apparatus (30) that at least one cooperates with the backplate (16) and the closing cap (18), adjustable is used to generate the closing force (S) to work between backplate (16) and closing cap (18)；And -- at least one gap measuring device (40), it is used to measure the spacing (41) between closing cap (18) and backplate (16), -- wherein the magnet apparatus (30) can make adjustments according to the spacing (41) between measured by the gap measuring device (40), backplate (16) and closing cap (18).
Description
Technical field
The present invention relates to a kind of locking devices or valve system for vacuum chamber, comprising: one may be arranged at vacuum chamber
Go up and surround the vacuum chamber one opening backplate (Gegenplatte) and one relative to the backplate movably
The closing cap of setting, the closing cap are closed on the backplate described true in closed position (Verschlussstellung)
The opening of cavity.In addition, the present invention relates to one kind for carrying out closed vacuum cavity by means of a this kind of closing or valve system and opening
The method of mouth.
Background technique
Gate and locking device for vacuum chamber is sufficiently known in the prior art.For example, WO 2005/
121621 A1 describe a kind of such valve system, the wall portion being arranged between the first and second recipients for one
Gate opening, and be attached to a blocking mechanism (Absperrorgan) for being arranged in the first recipient inner cavity and one
The backplate of the blocking mechanism.Here, flange form design and surround the opening backplate be equipped with an annular sealing element, close
Latch mechanism is hermetically compressed relative to the sealing element.
In order to maintain required leakproofness, especially for the high vacuum condition for maintaining vacuum chamber, worth pursuit
: blocking mechanism is pressed to the sealing element peripherally direction region arranged apart around the opening as homogeneously as possible
On.The size of blocking mechanism or closing cap at several decimeters or meter within the scope of and seal diameter be several millimeters in the case where,
It is especially difficult in terms of structure and manufacturing technology that uniform extruding force on entire sealing element is applied on the sealing element.
It has proven convenient that such as 0.5 to 5m2Or it is realized on the closing cap area of more high scope and the pact compressed is made to sealing ring
The stroke (Hubs) of 0.5mm to 2mm is extremely expensive in structure and manufacturing technology.In addition, in the environment of vacuum chamber, by
In needing clean steric requirements, and no graininess is needed therewith, therefore, often by the straight of the backplate of metal production and closing cap
Contact is touched and will be avoided anyway.
When being closed to locking device or valve system, sealing element with stick on metal parts on the sealing element it
Between, usually between sealing element and closing cap, in fact it could happen that shearing motion, equally, for clean space required for maintaining
Condition and the reason of without graininess, such shearing motion will avoid or reduce minimum anyway.
In addition, usually by elastomer material, such as ageing process, and it may occur for the sealing element as made by rubber
Elastic characteristic with incessantly using closing or valve system may change.It is still further contemplated that with difference
Vacuum or stress level run the vacuum chamber.If closing or valve system make the inside of vacuum chamber relative to atmosphere
Enclose or other environmental pressure, for example relative to adjacent vacuum chamber different pressures seal, then be expressed on sealing element squeeze
Pressure can change according to the pressure being respectively acting in vacuum chamber, and be likely to occur sealing element and closing or valve system
Relative motion between metal part.
In this regard, the task of the present invention is the closing for vacuum chamber for providing a kind of improvement or valve systems and one
Kind relevant method for closed vacuum cavity, by means of its can by clear stipulaties and especially uniform extruding force be applied to it is close
On sealing, and preset spacing or required can be accurately adjusted out between the backplate and closing cap of shell side by means of it
Gap degree.In addition, extra high no particle degree in vacuum cavity region should can be obtained using the device.In addition, envelope
Close or valve system should each single component by comparing small weight and by it simple and good handlability,
Production and operation aspect are had outstanding performance.
Summary of the invention and preferred embodiment
The task utilizes closing or the valve system and according to claim 12 true for closing of independent claims 1
The method of cavities open solves.Here, advantageous design scheme is the theme of dependent claims respectively.
In this regard, the closing for vacuum chamber or valve system are provided.The closing or valve system can cloth with one
Set backplate on vacuum chamber or being disposed thereon, being optionally integrated into vacuum chamber or connect with a cavity wall, the backplate
One opening of wrapped vacuum chamber.Backplate is normally constructed to flange form.The backplate can be outwardly protruded from the wall portion of vacuum chamber, and
It constitutes or with one substantially along the contact surface for extending through vacuum chamber opening perpendicular to Way in (Einf ü hrrichtung)
In addition, closing or valve system also have the closing cap being movably arranged relative to backplate.The closing cap
The opening of the vacuum chamber is closed on backplate in a closed position.Closing cap especially can be quiet from one be spaced apart with backplate
Only or initial position is transferred to the contact position of one with backplate, and is eventually transferred into a closed position, in the closed position,
Closing cap hermetically sticks on backplate, and in this regard airtightly encloses the opening of vacuum chamber.
In addition, that closing or valve system are connect at least one with backplate and closing cap, adjustable and/or controllable
Magnet apparatus.The magnet apparatus is configured to generate the closing force (S) to work between backplate and closing cap.By
In adjustable magnet apparatus, numerical value and the direction of the closing force to work between backplate and closing cap can be changed.According to
The difference of the specific design scheme of magnet apparatus can not only apply attraction on closing cap, but also can apply repulsion
Power, to close or beat in selection way by means of closing cap according to the stress level acted in vacuum chamber and vacuum chamber environment
Open the opening of vacuum chamber.
In addition, there is at least one spacing for measuring the spacing between closing cap and backplate to survey for closing or valve system
Measure device.By means of gap measuring device, can at least point by point (Punktuell) along the closing force issued from magnet apparatus
Direction measures the spacing between closing cap and backplate.Spacing between closing cap and backplate is to setting in backplate and closing cap
Between the current actual compression or flexible deformation of sealing element a kind of measurement, on condition that closing cap sticks on shield by sealing element
On plate.Therefore, the degree of sealing element flexible deformation can be measured by means of gap measuring device.
In addition, for closing or valve system also set up: magnet apparatus can according between backplate and closing cap by spacing
The spacing that measuring device measures makes adjustments.It, can be with by magnet apparatus in this regard set adjusting relevant to spacing
Different closing forces is generated according to spacing, so that the sealing element being for example arranged between backplate and closing cap is compressible to one
The degree of a needs.By means of gap measuring device and in this regard set reversed at least one magnet apparatus
It couples (R ü ckkopplung), may detect the different conditions of closing or valve system.
Such as can be measured by means of gap measuring device, backplate and closing cap whether and it is sealed with which kind of degree
Against each other.If spacing is for example used for the maximum value of enough sealings higher than setting, by means of adjustable magnet apparatus
Closing force for example can be improved for a long time as follows step by step, until being lower than maximum allowable maximum spacing.
In addition, otherwise then it is contemplated that worrying when detecting or measuring the too small spacing between backplate and closing cap
Usually the backplate as made by metal is contacted with the direct of closing cap.This point is especially for required nothing in vacuum chamber environment
How the reason of graininess is regardless of will avoid.In such cases, closing force can be reduced for example according to numerical value step by step, directly
To the spacing more than the minimum allowable between closing cap and backplate.
As a result, by means of magnet apparatus adjusting relevant to spacing and manipulation, can also it is different to vacuum chamber or
Changed stress level is reacted in time.It is different by the pressure between vacuum chamber and environment, or pass through
This side of closing cap is different from pressure over there, itself can apply closing force or opening force on closing cap.By
In with spacing relatively adjustable magnet apparatus, changing pressure change can be compensated in the opposite side of closing cap.
In one embodiment, the magnet apparatus has at least one on one be arranged in closing cap and backplate
A electromagnetic actuators and be arranged in closing cap and backplate another at least one matching piece (Gegenst ü ck), it is described
At least one matching piece magnetically interacts with magnet actuators.Electromagnetic actuators can for example be arranged on backplate or be packed into
Into backplate, and matching piece can be arranged on closing cap.Herein it is also contemplated that matching piece be integrated into it is in closing cap or whole
A closing cap works as matching piece.
It matching piece or closing cap or is designed to ferromagnetism or is designed to permanent magnetism, so as to control corresponding to being loaded with
Magnetic action connection occurs for the electromagnetic actuators of electric current.In closing cap in the closed position on backplate, closing cap is completely and very
The open cross-section of cavity is overlapped, and in the closed position, electromagnetic actuators and the matching piece belonging to it at least regionally reach
To overlapping, so that can produce enough closing forces or opening force.
Generally also, it is contemplated that the electromagnetic actuators of magnet apparatus are arranged on closing cap, and and electromagnetic actuators
The matching piece magnetically to interact is arranged on backplate or is built into thereon.
In addition, be arranged in electromagnetic actuators it is unrelated on closing cap or backplate, can also be disposed on it electromagnetism cause
At least one other permanent magnet is arranged again on that component of dynamic device, which can also further support from Electromagnetically actuated
The power that device issues.Thus the currentless of closing cap for example may be implemented and remain turned-off (Zuhalten), so that actuator
Coil can much lower current strength be loaded.The heat loss of coil and therefore generation are in terms of cooling or thermal expansion
Thus problem can be reduced or even and be removed.
According to an improvement project, it is additionally provided at least one electrical adjustment circuit, the electrical adjustment circuit and spacing are surveyed
It measures device and is coupled at least one described magnet apparatus, and be designed to maintain and/or adjust between backplate and closing cap
Default spacing.Regulating loop usually has a rated value transmitter (Sollwertgeber), is sent by means of the rated value
Device makes to be compared by the distance signal that pitch sensors generate with preset rated value.By the ratio of rated value and actual value
Compared with an adjuster for being additionally connected to rated value transmitter can produce a control signal, for manipulating magnet apparatus, outstanding
It is for manipulating electromagnetic actuators.
Here, can usually pass through amplifier by the control signal that adjuster generates is fed to the Electromagnetically actuated of magnet apparatus
Device.By means of electrical adjustment circuit, it can be achieved that the active of closing force and automatic adjusting.In this way it is possible to dynamically
And relatively flexibly reply operation or environmental condition may suddenly or continuously change with state, therefore for example to vacuum chamber
The different change of pressure between environment is reacted.By means of making gap measuring device and magnet apparatus tune coupled to each other
Circuit is saved, can cause simultaneously controllably to maintain required spacing between backplate and closing cap, and thus closing cap is required
Extruding force, and the sealing element that is arranged between backplate and closing cap therefore generation compression.
According to another design scheme, in closing cap and backplate between face facing with each other in closing cap closed position
Intermediate gaps (Zwischenraum) in, be disposed in closing cap or on backplate one and surround being elastically compressed for opening
Sealing element.The sealing element can be for example arranged on backplate.For this purpose, backplate for example can have a wrapped vacuum chamber opening
Slot, arrange lip ring in this slot.Under unpressed original state, the thickness or diameter of sealing element section, which are greater than, to be connect
The depth of the slot of the sealing element is received, so that a part of sealing element is prominent in face of the face of closing cap from backplate, therefore by
The contact surface that backplate is constituted at least slightly protrudes.By the design scheme, closing cap can hermetically recline with sealing element,
Without touching the metal parts of backplate and closing cap each other.
The face facing with each other of closing cap and backplate is typically at least regionally designed as flat contact surface, the flat contact
Face be substantially perpendicular in closed position by vacuum chamber be open the preset direction (z) of geometry, or perpendicular to along from
The closing direction that the closing force that magnet apparatus issues works extends.
Sealing element is usually made by an elastomer, and there is one to be suitable for the respectively arranged elasticity using purpose
Or compressibility.In addition, the adjusting made by means of the closing force of magnet apparatus according to spacing, it is also contemplated that: also in its bullet
Property characteristic or mechanical property in terms of, respectively for closing or valve system difference using purpose use different sealing elements.It borrows
Help the adjusting made according to spacing, it is respectively arranged close that the closing force can be such that closing or valve system is adaptively adapted to
The different or changing elastic characteristics of sealing.
According to another design scheme, one in the face facing with each other in closing cap closed position of closing cap and backplate
On face, at least one spacing holder being made of plastics is arranged, which prevents backplate and the direct of closing cap from connecing
Touch position.Spacing holder has elasticity more smaller than the sealing element being arranged between closing cap and backplate or compressibility.Between
It can be disposed adjacently or be arranged on closing cap with the sealing element of backplate away from holder.Spacing holder is with regard to backplate and/or envelope
It closes for the face normal of lid contact surface, have than following such highly lower structure height: sealing element is uncompressed initial
It is prominent with the contact surface for belonging to it of the height from closing cap or backplate under state.
Spacing holder is implemented as the form of end stop (Endanschlag), to avoid backplate and closing cap
Direct metal contact.In addition, being connect while should also avoiding spacing holder with closing cap and with backplate in adjusting operation
Touching.But spacing holder is especially also used for the calibration of gap measuring device.It therefore, can be in the first step with such as lower section
Formula manipulates the magnet apparatus, that is, closing cap is without compressively touching the sealing element.Position expression is maximum adjustable or can
The spacing of adjusting.In the second step, magnet apparatus manipulates as follows, that is, spacing holder not only with closing cap, but also
It reclines with backplate.The position corresponds to spacing the smallest, to be adjusted.
Then, the pitch sensors of the gap measuring device can be calibrated from minimum and maximum spacing.From the two
Opposite adjusting or moving range can be derived away from.It is possible thereby to compensate or eliminate pitch sensors for example on backplate
Possible loading tolerance.This kind of calibration is sensed particularly with the multiple spacing being arranged at least one of closing cap and backplate
Device is advantageous.
In general, spacing holder is arranged on backplate together with sealing element.But it is also contemplated that spacing holder and close
Sealing is arranged in closing cap on the face of backplate.It is also contemplated that sealing element and spacing holder are on backplate and closing cap
Different arrangements.Such as sealing element can be arranged on backplate, and spacing holder is arranged on closing cap.It can equally examine
Consider opposite scheme: the sealing element of closing cap side and the spacing holder of backplate side.
With the geometry of sealing element and compared with receiving the geometry of slot of sealing element, spacing holder is with such as lower section
Formula is measured size, that is, when sealing element almost maximally by compression or flexible deformation when, such as be arranged on backplate or closing cap
Spacing holder just and two components, i.e. backplate and closing cap reach the position that reclines.It is protected by means of at least one described spacing
Gripping member, preferably by means of circumferentially around multiple spacing holders for dividually arranging of opening, can be to avoid backplate and closing cap
Direct metal contact.
According to another design scheme, on the periphery of opening, or the periphery of the backplate in the design of such as flange form, dividually cloth
Set it is multiple be respectively equipped with one oneself gap measuring device magnet apparatus.It is multiple arranged apart in open circumferential by providing
Magnet apparatus, it is adjustable go out especially uniform extruding force and closing force between backplate and closing cap.It thus can also be real
It is existing, the possible deformation or production inaccuracy of backplate and/or closing cap are compensated by regulation technology.
Each of the gap measuring device coupled respectively with a magnet apparatus, can be self-supporting to a certain extent
Self-sustaining ground only adjusts and maintains default between backplate and closing cap in the position of corresponding gap measuring device or magnet apparatus
Spacing.Closing cap is relevant to pressure as a result, and inevitable the smallest deformation, will lead to originally non-uniform extruding force or
Closing force now can be compensated valuably, and can resist between closing cap and backplate, open circumferential variation spacing it is each
From uneven gap degree.
Deformation caused by possible relevant to load or production or component tolerance can be compensated on regulation technology.
By means of be respectively equipped with one oneself gap measuring device multiple magnet apparatus, can be in open circumferential or on backplate periphery
Different closing force and squeeze pressure are locally generated, so that result obtains and controllably can adjust to the greatest extent may be used for sealing element
It can uniformly compress, which finally results in the required leakproofness of closing or valve system.In practical applications, the design
Scheme is particularly advantageous, i.e., especially when at least one of closing cap and backplate are not constructed by absolute rigidity and/or with it is negative
When load is relatively subjected to local deformation.
By means of being respectively equipped with multiple magnet apparatus an of gap measuring device, it can eliminate and be mended on regulation technology
Repay this kind of effect.For the planform of closing cap and/or backplate, it might even be possible to receive bigger component tolerance or mechanical change
Shape, so that it is fine that comparison can be set for closing cap and the design scheme of the comparison large area of backplate
(filigrane) and then light-weight planform.
According to closing or another design scheme of valve system, following setting is done: in vacuum chamber open circumferential or in backplate
Periphery or on closing cap periphery, magnet apparatus arranged apart are respectively coupled with oneself a regulating loop.By in opening week
Side or backplate outer edge peripherally at least some of direction magnet apparatus arranged apart, be preferably each respectively provided with one
The regulating loop of oneself, each of magnet apparatus can adjust and adjust independently of each other point between closing cap and backplate
The spacing or gap degree not being present on its position.
Therefore, can locally carry out in the region of magnet apparatus and regulating loop can be by corresponding gap measuring device
The processing of the distance signal of acquisition.It is thereby possible to data and signal line can be reduced to minimum, this is for Vacuum Field
In application can turn out to be it is particularly advantageous.
According to another design scheme, magnet apparatus arranged apart and/or the magnetic is attached on the periphery of the opening
The gap measuring device of body device is coupled with a central controller.The setting of central controller can substitute local modulation and return
Road, or the regulating loop for being associated with corresponding magnet apparatus and affiliated pitch sensors can also be supplemented.By means of an example
The central controller such as coupled on data technique with whole regulating loops of whole magnet apparatus, can be with particularly simple side
The synchronous manipulation in circuit is adjusted in formula.
For example, central controller can be coupled with the rated value transmitter of single regulating loop respectively, to make
Obtaining can be by the spacing simultaneous transmission to be maintained between backplate and closing cap to whole regulating loops by means of central controller
On.By means of central controller, the user of closing or valve system obtains operating element particularly simply to be operated, and utilizes
The operating element can synchronize for whole regulating loops and magnet apparatus and temporally adjust out closing cap and backplate together in other words
Between spacing to be maintained or corresponding gap degree.
For each of closing or valve system different designs scheme scheme, several different spacing can be set
Measuring device.Gap measuring device for example can have one or more pitch sensors, the pitch sensors be based on optics,
Magnetic or capacitor measuring principle.Especially using based on measurement of inductance principle or eddy currentBiography
Sensor.Pitch sensors are especially arranged to close to magnet apparatus, especially close to the matching piece of electromagnetic actuators or magnet apparatus, because
Configuration as high as possible (Kolokation) degree may be implemented in this.The direct neighbor of gap measuring device and magnet apparatus or even
The arrangement of overlapping helps to improve measurement and adjusts accuracy.Pitch sensors may be particularly provided on backplate, and by
Spacing, especially gap degree between this measurement backplate and closing cap.The pitch sensors on backplate are arranged in especially by structure
Make for for accurately, usually to measure lower than the accuracy in millimeter or micron range to one specified reference of closing cap
The spacing of face or reference point.
Closing cap periphery is set or is also caused in open circumferential and backplate periphery multiple magnet apparatus arranged apart superfluous
Remaining.If for some purposes, each magnet apparatus still always by regulation can not work or fail, then it is left behind
Magnet apparatus can take over their task, be enable to avoid the uncontrolled open or close movement of closing cap.
According to another design scheme, closing cap is movably arranged at the guiding piece (F for being parallel to plane of the opening extension
ührung).The contact surface that closing cap is especially parallel to backplate is movably arranged.The guiding piece is in the case as shifting
Dynamic guiding piece works, and can be fixedly disposed with place, for example, be arranged in vacuum chamber bottom bracket (Grundger ü st) or
On pedestal (Basis).Furthermore it is contemplated that guiding piece is otherwise connect or is arranged on the vacuum chamber with vacuum chamber.
Closing cap usually extends in a plane perpendicular to the Way in orientation of opening.Backplate is logical with its contact surface
It is often parallel to the guiding piece for closing cap and is parallel to the orientation extension of closing cap.Especially it is arranged for mobile guiding piece:
Closing cap is in resting position (Ruhestellung), that is to say, that with preset spacing, Way in and shield about opening
Plate is spaced apart.Closing cap may be implemented in this way to move along the collisionless of guiding piece.
Guiding piece for example can have a guide rail, and the guide rail is on or below the opening of vacuum chamber, optionally
Extend in the open side of vacuum chamber.By means of mobile guiding piece, closing cap can basically with vacuum chamber superposition of end gap,
But resting position spaced apart is transferred to releasing position, in the releasing position, closing cap relative to vacuum chamber opening not
It overlappingly arranges and thus, it is possible to the close openings for being fed or for taking out the substrate for example to handle in the vacuum chamber.
Mobile guiding piece is particularly suitable for closing or valve system in the region substrate processing station (Prozessstation)
Saving position design scheme and arrangement.The case where from the closing cap of swingable setting, is different, is open in vacuum chamber
Except and the region that is in the extension of the opening to a certain extent, can be used for arranging the other component for the treatment of stations,
And not necessarily like typically kept in the case where swingably supporting the closing cap freely.
According to another design scheme about this, closing cap is supported on touchlessly by means of one or more magnetic bearing parts
On guiding piece.By means of especially can be designed as actively adjusting magnetic bearing part but also can be designed as passive magnetic bearing part
One or more magnetic bearing parts, can also realize closing cap face toward and it is touchless relative to backplate, be thus lost less and dimension
Protect few movement.The case where guiding from the roller bearing (rollen-gelagerten) of closing cap is different, and closing cap is based on magnetic branch
Bearing member does not generate abrasion in the case where being supported.Closing or the required clean space condition in valve system region and required
Thus that wants can easily realize without graininess.
The set magnetic bearing part for guiding piece can be similar to set for closing or the magnetic of valve system
Body device is the same, be respectively provided with an electromagnetic actuators and one and the electromagnetic actuators magnetic interaction matching piece and
One gap measuring device and a regulating loop, so that closing cap is almost free by means of one or more magnetic bearing parts
Floating ground is arranged and can be moved along guiding piece with one to guiding piece preset interval.
Thus, it may be considered that a variety of design schemes of matching piece and magnetic actuator and be mutually arranged scheme.It can be set:
Permanent magnetism or ferromagnetic matching piece are fixedly placed on guiding piece 62, and electromagnetic actuators are arranged on closing cap 18.
It is also possible that actuator can be also fixedly placed on guiding piece 62, and matching piece is arranged in movable closing
On lid 18.
According to another design scheme of guiding piece, closing cap is by means of at least one holder (Halterung) at one
It is moveably supported on guiding piece between the resting position being spaced apart with backplate and the closed position of a sealing opening.
Holder can especially realize closing cap perpendicular to the movement by the preset moving direction of guiding piece.By means of holder, can make
Closing cap is from backplate resting position spaced apart is faced along Way in (z) or along closing direction namely along towards the direction of backplate
Movement, in order to which the backplate hermetically reaches closed position.
Movement of the closing cap between resting position spaced apart and the closed position sealed on backplate, can pass through envelope
It closes or at least one magnet apparatus of valve system, is preferably carried out by multiple magnet apparatus.In this regard, exist for closing cap
Movement between resting position and closed position does not need individual driver.Especially be arranged in the case: holder causes
Closing cap moved in parallel along the face normal direction of the closing cap in the resting position and to the corresponding support of offers.
In order to avoid the possible shearing motion between closing cap and sealing element, especially it is proved to be advantageously, sealing
Close the periphery of lid and the outer edge in backplate, generate it is as uniform as possible, work perpendicular to the contact surface of closing cap and backplate
Closing force.
According to another independent aspects, finally, providing one kind by means of closing described above or valve system to close
The method of vacuum chamber opening.Here, this method measured including the use of at least one gap measuring device closing cap and backplate it
Between spacing or gap degree the step of.Then, according to the spacing measured, at least one adjustable magnet apparatus is manipulated,
To generate the closing force to work between backplate and closing cap.It is arranged in the case: between measurement closing cap and backplate
At least one spacing, and at least one adjustable magnet apparatus is manipulated according to the spacing measured, to maintain backplate and closing
Default spacing or gap degree between lid.
Similarly, multiple spacing between closing cap and backplate, especially closing cap and shield are set for the method
While on the different sections of plate or measurement that the time is staggered.Multiple distance measurements are preferably by the distance measurement of respective number
Device carries out, these gap measuring devices are arranged apart usually on the periphery of closing cap or on the periphery of backplate.These
Each of gap measuring device all usually attaches oneself a magnet apparatus, these magnet apparatus can by means respectively of from
Oneself regulating loop manipulation set thus, the regulating loop couple gap measuring device with corresponding magnet apparatus.
In this way it is possible to locally generated on the different sections of closing cap and position cause closing cap and backplate it
Between respectively required for spacing retentivity, and it is dynamically adapted for as required to maintain required spacing.
In general it is noted that method described herein is especially using closing described above or gate
Device executes.In this regard, the whole feature and advantage being previously mentioned for closing or valve system are suitable in the same manner
The method, and vice versa.
It according to another design scheme of method, is set as follows: in order to calibrate adjustable magnet apparatus and/or affiliated
Gap measuring device takes and is arranged in first closing cap to sealing on backplate by means of the first manipulation of magnet apparatus first
The contact position (Kontaktstellung) of part, and in a subsequent step, then by closing cap by means of magnet apparatus
Second manipulation, taken in the case where sealing element is by compression and deformation in the contact position of spacing holder, the spacing protect
Gripping member is usually placed on backplate.
In other words, by means of the first manipulation, that is, the first of signal is controlled by means of related electromagnetic actuators
Load, especially to control electric current, or the magnet apparatus by means of being arranged separately at periphery multiple electromagnetic actuators synchronization
Load, takes closing cap to contact position with backplate, in this position, closing cap almost without squeeze pressure sticks on backplate
On, or stick on the sealing element being arranged between backplate and closing cap.
Gap measuring device manipulates caused distance signal for calibrating pitch sensors with first.The distance signal
Almost it is equal with the nought state of sealing element or uncompressed state.It indicates maximum spacing for regulating loop.
By means of the second manipulation, in contrast, the maximum allowable control signal for magnet apparatus has been known, wherein close
Sealing is maximally compressed and correspondingly the closing cap and spacing holder reach and recline or contact position.
The offer of control signal can be led to the position that reclines, and represent maximum value, can be by the maximum value to magnet apparatus
Load, maximally to compress the sealing element.Reclining on spacing holder or backstop and reach the contact position, all may be used
It is read from the characteristic curve between the manipulation of the spacing and magnet apparatus that measure.With contact position is reached, can measure
To maximum spacing, and with the position that reclines reached on spacing holder, minimum spacing can be measured.By means of minimum and most
Big spacing, pitch sensors involved in adjustable.
Using the first manipulation, maximum first spacing for spacing adjusting can measure between closing cap and backplate.Benefit
With the second manipulation, in contrast, the smallest second spacing can measure.Based on the minimum and maximum spacing in this regard known,
Gap measuring device can be calibrated for the regulation and control of magnet apparatus.Pitch sensors itself are relative to backplate and closing
In lid in this regard the understanding of one position is not required.
According to required leakproofness, and, adjustable out phase different according to the pressure between chamber inner space and chamber environment
Any median between minimum and maximum control signal answered.
Detailed description of the invention
Other objects of the present invention, feature and advantageous design scheme come in the subsequent description of embodiment with reference to attached drawing
It illustrates.Wherein:
Fig. 1 is shown in initial position or resting position, and closing or valve system with closing cap simplify signal
Figure；
Fig. 2 shows according to Fig. 1 with closing cap closing or valve system, closing cap be in the contact position with backplate
In setting.
Fig. 3 shows closing according to fig. 2 or the schematic diagram of valve system, but closing cap and is arranged in closing cap and shield
Space maintaining member contact between plate；And
Fig. 4 shows the closing according to Fig. 1 to 3 or the view of valve system, and closing cap is in the close position, in medium
Closing force (S)；
Fig. 5 shows the top view of closing or valve system, and the closing or valve system have for receiving sealing element
Circumferential groove in backplate side；
Fig. 6 shows the viewgraph of cross-section of the line A-A along Fig. 5；
Fig. 7 shows another design scheme of closing or valve system, but it has in the open circumferential of vacuum chamber
Multiple slots arranged apart are arranged these slots and are respectively used to reception and the electromagnetic actuators for being respectively arranged magnet apparatus；
Fig. 8 shows the cross section of the B-B along Fig. 7；
Fig. 9 shows a design scheme of closing or valve system, with it is multiple annular and around opening edge four
All multiple slots or electromagnetic actuators arranged apart；
Figure 10 shows the cross section C-C of Fig. 9；
Figure 11 shows being movably arranged along linear guide apparatus and closing cap in releasing position show
It is intended to；
Figure 12 shows the view according to Figure 11, but its have on the backplate of closing or valve system in static or
Closing cap in contact position；
Figure 13 shows the closing according to Figure 12 or the side view of valve system, and closing cap is in resting position；And
Figure 14 shows the view according to Figure 13, and closing cap is in the close position and sealed is supported on backplate；And
Figure 15 shows another design scheme of mobile guiding piece, but it is with another magnet apparatus, another magnet
Device is arranged in the closing cap end opposite with the guiding piece；
Figure 16 shows the flow chart of the method for calibrating closing or valve system.
Specific embodiment
The closing shown on cross section in Fig. 1 or valve system 10 are arranged for being arranged in opening for vacuum chamber 12
On mouth 14.Closing or valve system 10 have a backplate 16, what which usually schematically showed in Fig. 1 with vacuum chamber 12
Wall portion 11 connects.Backplate 16 can be arranged to be aligned or be configured to vacuum chamber 12 with opening 14 of the vacuum chamber 12 in wall portion 11
Integrated building block.In this regard, backplate 16 also can have an opening 14, which usually can be with vacuum chamber 12
Opening be overlapped.
Closing or valve system also have the closing cap 18 being movably arranged relative to backplate 16, which exists
Such as the opening 14 is closed to airtight or vacuum tightness in the closed position 28 shown in figs. 3 and 4.Backplate 16 and closing
Lid 18 is additionally provided at least one magnet apparatus 30, and by means of the magnet apparatus, closing force (S) can be applied on closing cap 18.
Backplate 16 can have flange form geometry, and especially work in face of closing cap 18 and as contact surface
There is sealing element 22, which usually extends in the region on the opening edge edge of backplate 16 around opening 14 on face 17.When
Before, the sealing element 22 as made by elasticity and deformable material is arranged in the circumferential groove 20 of backplate 16.But the sealing element
It can also be arranged in the corresponding slot of closing cap 18, or in the intermediate gaps 25 being arranged between closing cap 18 and backplate 16.?
When reaching closed position 28 shown in Fig. 3 and Fig. 4, sealing element 22 is deformed in other words between closing cap 18 and backplate 16 with such as
Under type is extruded, that is, so that opening 14 is airtightly closed.
By means of magnet apparatus 30, the closing force (S) being orientated along Way in or closing direction (z) can be applied to closing
On lid 18.The closing force (S) is oriented generally perpendicular to plane (x, y), or perpendicular to the contact surface of backplate 16, or perpendicular to
The face 17 of backplate 16.Closing cap 18 also has face 19 in face of backplate 16, equally working as contact surface.Backplate 18 and envelope
The face 17,19 facing with each other in closed position 28 for closing lid 19 is at least oriented parallel to one another to blockiness.
The related contact surface in the face 17,19 to correspond to each other extends along x-y plane herein.
Magnet apparatus 30 currently have at least one electromagnetic actuators 32 for being arranged on backplate 16 and with its magnetic phase
Interaction and the matching piece 34 that is arranged on closing cap 18.Matching piece 34 is designed to permanent magnetism or ferromagnetic component,
It the component or is arranged on closing cap 18 or is embedded into closing cap 18.It is also contemplated that closing cap 18 at least area itself
Section property with a kind of permanent magnetism or ferromagnetic material or at least regionally or be fully made of a this material.
By being powered or loading with coil 33 of the electric current to electromagnetic actuators 32, attraction or repulsive force can be applied to envelope
It closes on lid 18.By adjusting current strength or by changing control signal, can change as needed from the sending of magnet apparatus 30
Closing force (S).
Closing or valve system 10 also have a gap measuring device 40 can be true by means of the gap measuring device
Surely the facing with each other of spacing 41, especially closing cap 18 and the backplate 16 between closing cap 18 and backplate 16 is measured and quantitatively
Face 19,17 between spacing.Gap measuring device 40 currently has the pitch sensors 42 being arranged on backplate 16, the spacing
The spacing 41 along closing direction (z) between sensor measurement backplate 16 and closing cap 18.As a result, by means of gap measuring device
40, the closing force (z) that magnet apparatus 30 can be relatively adjusted according to spacing, is especially issued by magnet apparatus.Especially it is arranged:
By means of the adjusting relevant to spacing of magnet apparatus 30, the spacing 41 between closing cap 18 and backplate 16 can accurately be set
Onto a preset degree.
For the adjusting relevant to spacing, a regulating loop 45 is especially set, which makes magnet apparatus 30
It is coupled with gap measuring device 40.Regulating loop 45 has rated value transmitter 44, and the rated value transmitter is on data technique
It is connect with pitch sensors 42.Rated value transmitter 44 receive the distance signal as provided by pitch sensors 42, and by its with
It is preset or preset rated value can be changed by central controller 50 and be compared.Rated value and actual value are sent out in rated value
It send in device 44 and is compared each other.
Thus the comparison signal synthesized is then delivered to adjuster 46, which, which therefrom generates, is arranged for manipulating
The control signal of electromagnetic actuators 32.The control signal that can be generated by adjuster 46 is fed to electromagnetism by amplifier 48
Actuator 32.It can transport and calculate and determine as follows to the control signal of the coil 33 of electromagnetic actuators 32 being amplified,
That is, maintaining the default spacing 41 between backplate 16 and closing cap 18, and when deviateing required spacing, can make to be filled by magnet
The power for setting 30 sendings is dynamically adapted to, to maintain spacing 41.
Whole electronic components of regulating loop, that is, amplifier 48, adjuster 46, rated value transmitter 44 and optional
Pitch sensors 42 can be placed in a public circuit board, such as form is on the circuit board in integrated circuit circuit.With regard to this
Speech, status requirement and the consuming of resulting cloth cable for corresponding electronic unit can be minimized.
Other than the coil 30 that can be loaded with electric signal, electromagnetic actuators 32 are generally also provided with ferromagnetic core, such as
Iron core.But electromagnetic actuators 32 can be designed as electromagnet, but for example be also designed to long-range navigation in a variety of other modes
Hereby or sunk coil actuator (Tauchspulenaktor).The latter can with electromagnet differently electromagnetic actuators with match
Attraction is not only generated between component, but also generates repulsive force.
It is also contemplated that design scheme different in the principle of the magnet apparatus 30 relatively adjusted according to spacing.In Fig. 5
With 6 shown in closing or valve system 100 design scheme in, backplate 16 have one it is unique, surround current rectangle
The slot 31 of opening 14, can arrange the magnetic coil of at least one single-piece in this slot, and the magnetic coil is primary along opening trend
Or multiple surround opening 14.Herein especially for redundancy reasons it is contemplated that by the magnetic coil cloth of multiple this single-pieces
Set into one and identical slot 31, and make these magnetic coils by a corresponding regulating loop 45 respectively with one oneself
Or it is coupled with identical gap measuring device 40.It can also be achieved improved controllability by means of multiple coils.
In another embodiment of closing or valve system 10 shown in Fig. 1-4,7 and 8, in the periphery cloth of opening 14
It is equipped with multiple magnet apparatus 30.Each of magnet apparatus 30 has at least one electromagnetically actuator 32, this is electromagnetically caused
Dynamic device is arranged in the slot 31 of backplate 16.Here, each of magnet apparatus 30 can be equipped with one oneself distance measurement dress
Set 40 and equipped with oneself a local modulation circuit 45.It can walk in this way in opening upwards, especially along opening edge
Along suiting the requirements and quartile sets groundCarry out other spacing tune between backplate and closing cap
Section, so that possible assembly or the local deformation of component tolerance and closing cap and/or backplate can be balanced.
For receiving the slot 31 of electromagnetically actuator 32 or its coil 33, can for the reason of the vacuum applicability and face
And/or sealing covered to matching piece 34.For this purpose, set covering members (Abdeckung) 21 are usually by a kind of permeability magnetic material
Or it is made by non-magnetic material or the only material of weak magnetic.Covering members 21 can be at some extent as the closure member for being directed to slot 31
It works, and is configured to this closure member.By means of respectively, the current sealing element that is not explicitly shown, can be hermetically in slot
The covering members 21 are arranged on 31 or in slot 31.Covering members 21 especially can with surface in alignment be integrated into face of matching piece 34
In face 17, therefore it is integrated into the contact surface of backplate 16 or closing cap 18.For the sake of clearly showing, only in backplate 16 in Fig. 1
Right side the covering members 21 are shown.
Each of magnet apparatus 30 arranged apart can correspond in their area on the periphery of opening 14
Spacing 41 in domain, between backplate 16 and closing cap 18 is correspondingly conditioned as follows: that is, in the entire outer of opening 14
It can adjust on periphery and spacing 41 remaining unchanged or being retained within minimal tolerance.
In the view of another embodiment of the closing or valve system 200 of Fig. 9 and 10, multiple single magnets are filled
It sets and is encased in backplate 16.Slot 31 for receiving single electromagnetic actuators 32 is set herein with round or annular several
What structure.By means of number shown in Fig. 9 edge opening 14 peripheral direction arrangement magnet apparatus, can carry out closing cap 18 with
High position resolution and corresponding accurate spacing between backplate 16 are adjusted.For the reason of general view is shown, Fig. 5 to Figure 10
In do not express sealing element 22 be shown.
Also like illustrated in Fig. 1, between backplate 16 and the face 17,19 facing with each other of closing cap 18, have at least
One spacing holder 24, the spacing holder work as the end stop for closing cap 18.Such as institute in Fig. 1 and 2
Show, in the uncompressed state of sealing element, sealing element is using the degree bigger than spacing holder 24 from backplate 16 as contact surface
The face 17 worked is prominent.Only when sealing element 22 reaches maximum compression shown in Fig. 3 or deformation, 24 ability of spacing holder and place
Closing cap 18 in closed position 28 reclines.
Spacing holder 24 especially prevents the direct contact of metallicity backplate 16 and metallicity closing cap 18.Spacing is kept
Part 24 is made by plastics, for example by polyether-ether-ketone (PEEK).It is shown in Fig. 2 to 4 from above through closing or gate dress
The cross section set.In Fig. 2, closing cap 18 is in the contact position 27 contacted with lip ring 22 almost without power.Institute
It states in contact position 27, this kind of closing force is applied on closing cap 18, so that closing cap 18 only sticks on sealing element 22,
Without making it obviously deform or compress.
Here, the contact position 27 is corresponding to the first manipulation of at least one magnet apparatus 30.Corresponding control signal
Such as can be stored in central controller 50, or be locally for example stored in the adjuster 46 of corresponding regulating loop 45,
And especially it is stored for the calibration of gap measuring device.For alignment purpose, signal can be controlled as follows, is led to
Magnet apparatus 30 is often loaded with electric current: that is, adjusting out the minimum spacing 41 between closing cap 18 and backplate 16.
When closing cap 18 reaches the contact position with spacing holder 24 as illustrated in figure 3, or when spacing is kept
When part 24 is contacted with closing cap 18 and backplate 16 two, the minimum spacing is just realized.Closing cap 18 is almost moved to stop part
On, or it is brought to the stop dog position with spacing holder 24, also therefore take in the stop dog position of backplate 16.In order to realize maximum
Closed position 28 can control signal with second, namely maximum to load magnet apparatus 30.The maximum controls signal can be by
It is stored in central controller 50, or can also individually and locally be stored in the adjuster 46 of whole regulating loops 45,
And it is equally used for the calibration of gap measuring device.Backplate 16 and envelope can be known for each gap measuring device in this way
Close the adjustable spacing 41 of minimum and maximum between lid 18.
In Figure 16, show in the form of a block diagram again according to fig. 2 to 4 view calibration method.First
In step 300, closing cap 18 is brought to contact position 27 shown in Figure 2.Then it can store in step 302 and be directed to institute
State at least one magnet apparatus or corresponding thus required control signal of the first maximum adjustable berth away from 41.Related control
Signal processed or first or maximum spacing 41, can be particularly simply from the characteristic curve of the spacing 41 measured by loading on magnetic
The control signal of body device is known.
Then, just as illustrated in Fig. 3, in step 304, the of at least one magnet apparatus 30 is realized
Two manipulations.The maximum control signal therefore generated can be equally read from the characteristic curve.The control signal is corresponding to such as
Lower such current strength: from the current strength, the raising of current strength numerical value no longer cause spacing 41 be capable of measuring subtract
It is few.This is for realizing the mark with the stop dog position of spacing holder 24.Closing cap and backplate are then obtained within step 306
Between the second minimum spacing.Based in sealing element 22 not only with closing cap but also minimum that the state measurement that contacts with backplate arrives
With maximum spacing, gap measuring device 40 can be calibrated, and therefore adjustable is filled using its adjustable and controllable magnet
Set 30.
The front view of closing or valve system is shown in figs. 11 and 12.Here, closing cap 18 is movably supported on
On the guiding piece 62 longitudinally extended.The guiding piece 62 for being designed to mobile guiding piece is parallel to by backplate 16 and/or closing cap 18
The plane of the stop surface (x, y) constituted, and the face 17,19 facing with each other for being accordingly parallel to backplate 16 and closing cap 18 is prolonged
It stretches.But just as as being obtained in the side view according to Figure 13, guiding piece 62 for closing direction (z) with backplate 16
It arranges with being spaced slightly apart, can especially to realize that closing cap 18 is mobile relative to the collisionless of backplate 16.
Just as showing in Figure 11, closing cap 18 is particularly by least one, usually by two or more that
This magnetic bearing part 60 spaced apart is supported on touchlessly on the guiding piece 62.These single magnetic bearing parts 60 can be similar
In magnet apparatus 30 be respectively provided with current not particularly shown pitch sensors, regulating loop and can by pitch sensors and
The electromagnetic actuators 61 that regulating loop is adjusted, the electromagnetic actuators and matching piece 63 magnetically collective effect.In this way may be used
To realize required quick condition of the closing cap 18 on guiding piece 62.Touchless bearing of the closing cap 18 on guiding piece 62
It is particularly conducive to avoid the pollution and abrasion in 12 environment of vacuum chamber.
Currently, guiding piece 62 is provided with multiple electromagnetic actuators 62, these actuators are before and after successive in slide block type
Mobile load-bearing partReach in the case where 66 movements with the matching piece 63 being arranged on slide block type load-bearing part 66 and matches
It closes.In the case, opposite arrangement is equally within the scope of the present invention.For example, one or more actuators 62 can be with
It is arranged on load-bearing part 66 or on closing cap 18, and is fixedly arranged with 63 position of matching piece of itself or their magnetic interactions
On the Linear guide 62 for being designed to guide rail.
The closing cap 18 in releasing position is shown in FIG. 11, in the releasing position, which is in backplate 16
Region except.In Figure 12, closing cap 18 is Chong Die with backplate 16, so that opening 14 can be hermetically closed.
In addition, obtained from the comparison of Figure 13 and 14, closing cap 18 by means of holder 64 along closing direction (z), also
The plane (x, y) for being perpendicular to closing cap 18 is moved or is moveably supported on guiding piece 62.By means of along opening 14
Periphery arrangement at least one magnet apparatus 30, can be by 26 turns of the contactless resting position shown in Figure 13 of closing cap 18
It moves on in contact position 27 shown in Figure 14, and continues to be transferred in closed position 28.In order to make closing cap 18 in static shape
It is moved between state 26 and contact position 27, namely perpendicular to the plane of closing cap 18, it is also contemplated that setting is individually driven
Dynamic device.
In the case, holder 64 causes or supports closing cap 18 from resting position 26 spaced apart to contact position
27 and the form moved in parallel in closed position 28 is proceeded to, so that as far as possible without closing cap 18 and sealing element 22
Relative motion appears in the plane of closing cap (X, Y).Otherwise, this kind of shearing motion can lead to the abrasion of sealing element 22 and cause
At least small pollution of the environment of vacuum chamber 12.
The perspective view of closing or valve system is obliquely shown in Figure 15.It is provided at the foot of closing cap 18 another
One guiding piece 70, another guiding piece equally can be through magnetic body supports, just as the guiding piece 62 through magnetic body support can be with oncontacting
It touches as formula design.In the case, the guiding piece 70 of lower part can not only guide closing cap edge to be parallel to closing cap plane
Direction it is mobile, currently can also horizontally guide.The guiding piece of the lower part especially can contribute to closing cap 18 from the quiet of it
Stop bit sets 26 into contact position 27 and proceeds to moving in parallel in closed position 28 without what is tumbled.
Guiding piece 70 can also be coupled with oneself a gap measuring device 40.But it is also contemplated that passing through center
Controller 50 reads and provides in the spacing of whole gap measuring devices 40 arranged apart on 14 peripheries that is open, so that
It can be concluded that the inference of the orientation about closing cap 18 in y-z plane from the comparison of single distance signal.
Touchless bearing of the closing cap 18 on guiding piece 62 is for example held using what connect with closing cap, slide block type designed
Holder 66 carries out.A component, namely electromagnetic actuators 61 and matching piece 63 in the component of related magnetic bearing part 60
In one, be fixedly placed on guiding piece 62, and another component layout in actuator 61 and matching piece 63 is in load-bearing part
On 66.But it is also contemplated that the opposite of electromagnetic actuators and matching piece is mutually arranged and arrangement.In order to make closing cap
18 or load-bearing part 66 moved along guiding piece 62 and be provided with linear motor 68, closing cap can be made by means of the linear motor
18 move between releasing position and resting position 26.
Reference signs list
10 closings or valve system
11 wall portions
12 vacuum chambers
14 openings
16 backplates
17 faces
18 closing caps
19 faces
20 slots
21 covering members
22 sealing elements
24 spacing holders
25 intermediate gaps
26 resting positions
27 contact positions
28 closed positions
30 magnet apparatus
31 slots
32 electromagnetic actuators
33 coils
34 matching pieces
40 gap measuring devices
41 spacing
42 pitch sensors
44 rated value transmitters
45 regulating loops
46 adjusters
48 amplifiers
50 control devices
60 magnetic bearing parts
61 electromagnetic actuators
62 guiding pieces
63 matching pieces
64 holders
66 load-bearing parts
68 linear motors
70 guiding pieces
100 closings or valve system
200 closings or valve system
Claims (15)
1. being used for the locking device of vacuum chamber (12), comprising:
- one may be arranged on vacuum chamber (12) and surrounds the backplate (16) of one of the vacuum chamber (12) opening (14)；
- one closing cap (18) being movably arranged relative to the backplate (16), the closing cap is in closed position (28)
The opening (14) is closed on the backplate (16)；
At least one magnet apparatus (30) cooperate with the backplate (16) and the closing cap (18), adjustable, is used for
Generate the closing force (S) to work between backplate (16) and closing cap (18)；And
At least one gap measuring device (40) is used to measure the spacing (41) between closing cap (18) and backplate (16),
Wherein the magnet apparatus (30) can according between backplate (16) and closing cap (18) by the gap measuring device
(40) spacing (41) that measures and be conditioned.
2. locking device according to claim 1, wherein the magnet apparatus (30) have be arranged in closing cap (18) and
It at least one electromagnetic actuators (32) on one in backplate (16) and is arranged in another in closing cap (18) and backplate (16)
At least one matching piece (34) on one, at least one described matching piece magnetically interact with electromagnetic actuators (32).
3. locking device according to any one of the preceding claims also has at least one electrical adjustment circuit
(45), at least one described electrical adjustment circuit is coupled with the gap measuring device (40) and with the magnet apparatus (30),
And it is designed to maintain and/or adjust the default spacing (41) between backplate (16) and closing cap (18).
4. the locking device according in claim 1, wherein in closing cap (18) and backplate (16) in the closing cap
(18) in the intermediate gaps (25) in closed position (28) between face (17,19) facing with each other, in the closing cap (18)
Or a sealing element (20) surrounding the opening (14), being elastically compressed is arranged on the backplate (16).
5. locking device according to claim 1, wherein in closing cap (18) and backplate (16) in the closing cap (18)
Closed position (28) on a face in face (17,19) facing with each other, arrange at least one spacing holder (24), institute
State the direct contact position that at least one spacing holder prevents backplate (16) and closing cap (18).
6. locking device according to claim 1, wherein arranged apart on the periphery of the opening (14) be respectively equipped with
One oneself gap measuring device (40) multiple magnet apparatus (30).
7. locking device according to claim 6, wherein magnet dress arranged apart on the periphery of the opening (14)
(30) are set respectively to couple with oneself a regulating loop (45).
8. locking device according to claim 6 or 7, wherein magnet arranged apart on the periphery of the opening (14)
Device (30) and/or the gap measuring device (40) and central controller (50) coupling for being attached to the magnet apparatus (30)
It closes.
9. locking device according to claim 1 is parallel to wherein the closing cap (18) is movably supported on one
On the guiding piece (62) that the plane of the opening (14) extends.
10. locking device according to claim 9, wherein the closing cap (18) is by means of one or more magnetic bearing parts
(60) it is supported on touchlessly on the guiding piece (62).
11. the locking device according to any one of preceding claims 9 or 10, wherein the closing cap (18) is by means of extremely
A few holder (64) seals the opening (14) in a resting position being spaced apart with the backplate (26) and one
It is moveably supported between closed position (28) on the guiding piece (62).
12. the locking device according to preceding claims 1 or 2, wherein the locking device is valve system.
13. the method for the opening (14) for closed vacuum cavity (12), the method is by means of any one of preceding claims
The locking device (10；100；200), with following steps:
At least one spacing between closing cap (18) and backplate (16) is measured using at least one gap measuring device (40)
(41)；
At least one adjustable magnet apparatus (30) is relatively manipulated according to the spacing (41) measured, to generate in backplate
(16) closing force (S) to work between closing cap (18).
14. according to the method for claim 13, wherein in order to calibrate adjustable magnet apparatus (30) or affiliated
Gap measuring device (40):
By the closing cap (18) by means of the magnet apparatus (30) first manipulation first band to be arranged in the backplate
(16) in the contact position of the sealing element (22) on, and
Next the closing cap (18) and the backplate (16) are being pressed by means of the second manipulation of the magnet apparatus (30)
Contract in the case where the sealing element (20) band to and in the contact position of spacing holder (24), spacing holder (24) cloth
It sets on a face in the closing cap (18) and the backplate (16) face (17,19) facing with each other.
15. method described in 3 or 14 according to claim 1, wherein the locking device is valve system.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102014008170.2 | 2014-06-10 | ||
| DE102014008170.2A DE102014008170A1 (en) | 2014-06-10 | 2014-06-10 | Lock or lock device for a vacuum chamber |
| PCT/EP2015/062927 WO2015189263A1 (en) | 2014-06-10 | 2015-06-10 | Closure or airlock device for a vacuum chamber |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106461120A CN106461120A (en) | 2017-02-22 |
| CN106461120B true CN106461120B (en) | 2019-05-07 |
Family
ID=53496636
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201580030603.9A Active CN106461120B (en) | 2014-06-10 | 2015-06-10 | Locking device for vacuum chamber |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP6431096B2 (en) |
| KR (1) | KR101908536B1 (en) |
| CN (1) | CN106461120B (en) |
| DE (1) | DE102014008170A1 (en) |
| WO (1) | WO2015189263A1 (en) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DK179123B1 (en) * | 2016-09-16 | 2017-11-13 | Danfoss As | Valve attachment, valve and method for controlling a valve |
| EP3372883B1 (en) | 2017-03-09 | 2019-12-11 | VAT Holding AG | Vacuum valve with optical sensor |
| KR102069665B1 (en) * | 2017-03-17 | 2020-01-23 | 어플라이드 머티어리얼스, 인코포레이티드 | Apparatus for vacuum processing of a substrate, a system for the manufacture of devices with organic materials, and a method for sealing the processing vacuum chamber and the maintenance vacuum chamber to one another |
| CN108966661B (en) * | 2017-03-17 | 2021-01-15 | 应用材料公司 | Apparatus for vacuum processing of substrates, system for manufacturing of devices with organic material, and method for sealing an opening connecting two pressure areas |
| KR102109335B1 (en) * | 2017-06-08 | 2020-05-12 | 어플라이드 머티어리얼스, 인코포레이티드 | Closed device, vacuum system with closed device, and method of operating closed device |
| EP3477173A1 (en) * | 2017-10-30 | 2019-05-01 | VAT Holding AG | Enhanced vacuum process control |
| CN110242758B (en) * | 2018-03-09 | 2021-02-26 | (株）Np控股 | Sealing member replacement type gate valve system, sealing plate, and cartridge for sealing plate |
| DE102019134546A1 (en) | 2019-12-16 | 2021-06-17 | VON ARDENNE Asset GmbH & Co. KG | Method, control device and vacuum arrangement |
| CN111188902B (en) * | 2020-01-15 | 2021-06-29 | 燕山大学 | Non-bolt pre-tightening self-tightening manhole device |
| JP7435096B2 (en) | 2020-03-18 | 2024-02-21 | 株式会社島津製作所 | pressure control valve |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2556225A (en) * | 1946-03-21 | 1951-06-12 | Joseph J Day | Magnetic valve |
| JPS5281620A (en) * | 1975-12-27 | 1977-07-08 | Inoue Japax Res Inc | Preparation of keeping vessels air tightly |
| US4747577A (en) * | 1986-07-23 | 1988-05-31 | The Boc Group, Inc. | Gate valve with magnetic closure for use with vacuum equipment |
| JPH07190228A (en) * | 1993-12-27 | 1995-07-28 | Ulvac Japan Ltd | Unsliding gate valve |
| CN1973157A (en) * | 2004-06-08 | 2007-05-30 | 莱博德光学有限责任公司 | Locking device |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000005060A (en) * | 1998-06-24 | 2000-01-11 | Hisaka Works Ltd | Lid sealing device used for digester or the like and pressure or vacuum container provided with the device |
| US6629682B2 (en) * | 2001-01-11 | 2003-10-07 | Vat Holding Ag | Vacuum valve |
| DE102007034927A1 (en) * | 2007-07-24 | 2009-02-05 | Vat Holding Ag | Method for controlling or regulating a vacuum valve |
| DE202008005238U1 (en) * | 2008-04-16 | 2008-07-31 | Vat Holding Ag | Vacuum valve system with position detection |
-
2014
- 2014-06-10 DE DE102014008170.2A patent/DE102014008170A1/en not_active Withdrawn
-
2015
- 2015-06-10 JP JP2016572449A patent/JP6431096B2/en active Active
- 2015-06-10 KR KR1020167032242A patent/KR101908536B1/en active IP Right Grant
- 2015-06-10 CN CN201580030603.9A patent/CN106461120B/en active Active
- 2015-06-10 WO PCT/EP2015/062927 patent/WO2015189263A1/en active Application Filing
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2556225A (en) * | 1946-03-21 | 1951-06-12 | Joseph J Day | Magnetic valve |
| JPS5281620A (en) * | 1975-12-27 | 1977-07-08 | Inoue Japax Res Inc | Preparation of keeping vessels air tightly |
| US4747577A (en) * | 1986-07-23 | 1988-05-31 | The Boc Group, Inc. | Gate valve with magnetic closure for use with vacuum equipment |
| JPH07190228A (en) * | 1993-12-27 | 1995-07-28 | Ulvac Japan Ltd | Unsliding gate valve |
| CN1973157A (en) * | 2004-06-08 | 2007-05-30 | 莱博德光学有限责任公司 | Locking device |
Also Published As
| Publication number | Publication date |
|---|---|
| DE102014008170A1 (en) | 2015-12-17 |
| JP6431096B2 (en) | 2018-11-28 |
| JP2017523354A (en) | 2017-08-17 |
| KR20170002462A (en) | 2017-01-06 |
| WO2015189263A1 (en) | 2015-12-17 |
| CN106461120A (en) | 2017-02-22 |
| KR101908536B1 (en) | 2018-10-16 |
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