CN106449611B - 半导体装置 - Google Patents

半导体装置 Download PDF

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Publication number
CN106449611B
CN106449611B CN201610648773.XA CN201610648773A CN106449611B CN 106449611 B CN106449611 B CN 106449611B CN 201610648773 A CN201610648773 A CN 201610648773A CN 106449611 B CN106449611 B CN 106449611B
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Prior art keywords
dielectric layer
block
conductive
redistribution structure
dielectric material
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CN201610648773.XA
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Chinese (zh)
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CN106449611A (zh
Inventor
麦可·凯利
大卫·海纳
罗纳·休莫勒
罗杰·圣艾曼德
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Amkor Technology Inc
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Amkor Technology Inc
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Priority claimed from US14/823,689 external-priority patent/US9543242B1/en
Application filed by Amkor Technology Inc filed Critical Amkor Technology Inc
Priority to CN202211201187.2A priority Critical patent/CN115632042A/zh
Publication of CN106449611A publication Critical patent/CN106449611A/zh
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