CN106426582A - 一种硅晶棒装夹装置 - Google Patents
一种硅晶棒装夹装置 Download PDFInfo
- Publication number
- CN106426582A CN106426582A CN201611049954.7A CN201611049954A CN106426582A CN 106426582 A CN106426582 A CN 106426582A CN 201611049954 A CN201611049954 A CN 201611049954A CN 106426582 A CN106426582 A CN 106426582A
- Authority
- CN
- China
- Prior art keywords
- clamping
- main shaft
- hole
- bar
- silicon crystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
Description
Claims (10)
Priority Applications (1)
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CN201611049954.7A CN106426582B (zh) | 2016-11-24 | 2016-11-24 | 一种硅晶棒装夹装置 |
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CN201611049954.7A CN106426582B (zh) | 2016-11-24 | 2016-11-24 | 一种硅晶棒装夹装置 |
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Publication Number | Publication Date |
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CN106426582A true CN106426582A (zh) | 2017-02-22 |
CN106426582B CN106426582B (zh) | 2018-05-15 |
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CN201611049954.7A Active CN106426582B (zh) | 2016-11-24 | 2016-11-24 | 一种硅晶棒装夹装置 |
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CN (1) | CN106426582B (zh) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107336372A (zh) * | 2017-09-12 | 2017-11-10 | 陈宇翔 | 一种新型桥梁建筑设备 |
CN109676812A (zh) * | 2018-09-30 | 2019-04-26 | 浙江晶盛机电股份有限公司 | 晶棒单线开方机及其使用方法 |
CN111730771A (zh) * | 2020-06-09 | 2020-10-02 | 安徽利锋机械科技有限公司 | 一种晶圆切割机 |
Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000288925A (ja) * | 1999-04-06 | 2000-10-17 | Okamoto Machine Tool Works Ltd | 研磨装置および基板の研磨方法 |
CN2747233Y (zh) * | 2004-11-10 | 2005-12-21 | 江苏迎阳无纺机械有限公司 | 边角料开松机 |
CN201586898U (zh) * | 2009-12-28 | 2010-09-22 | 北京有色金属研究总院 | 外圆磨床晶体对中心夹具 |
CN102825672A (zh) * | 2012-07-31 | 2012-12-19 | 金慧 | 单晶棒定向夹紧装置 |
CN103359470A (zh) * | 2013-06-15 | 2013-10-23 | 浙江晶盛机电股份有限公司 | 单晶硅切磨一体机的边皮自动传送机构及传送方法 |
CN203512990U (zh) * | 2013-08-05 | 2014-04-02 | 台虹科技(昆山)有限公司 | 一种收边料装置 |
CN104551790A (zh) * | 2013-10-17 | 2015-04-29 | 宝时得机械(张家港)有限公司 | 工件定位装置 |
CN205342330U (zh) * | 2015-12-09 | 2016-06-29 | 广州粤研智能装备有限公司 | 一种用于对筒体进行圆周焊接的自定心夹紧装置 |
CN205497177U (zh) * | 2016-04-06 | 2016-08-24 | 上海日进机床有限公司 | 晶棒加工设备及用于该设备的主轴机构 |
CN205735588U (zh) * | 2016-05-26 | 2016-11-30 | 西安隆基硅材料股份有限公司 | 工件固定机构及具有该工件固定机构的线锯切边装置 |
-
2016
- 2016-11-24 CN CN201611049954.7A patent/CN106426582B/zh active Active
Patent Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000288925A (ja) * | 1999-04-06 | 2000-10-17 | Okamoto Machine Tool Works Ltd | 研磨装置および基板の研磨方法 |
CN2747233Y (zh) * | 2004-11-10 | 2005-12-21 | 江苏迎阳无纺机械有限公司 | 边角料开松机 |
CN201586898U (zh) * | 2009-12-28 | 2010-09-22 | 北京有色金属研究总院 | 外圆磨床晶体对中心夹具 |
CN102825672A (zh) * | 2012-07-31 | 2012-12-19 | 金慧 | 单晶棒定向夹紧装置 |
CN103359470A (zh) * | 2013-06-15 | 2013-10-23 | 浙江晶盛机电股份有限公司 | 单晶硅切磨一体机的边皮自动传送机构及传送方法 |
CN203512990U (zh) * | 2013-08-05 | 2014-04-02 | 台虹科技(昆山)有限公司 | 一种收边料装置 |
CN104551790A (zh) * | 2013-10-17 | 2015-04-29 | 宝时得机械(张家港)有限公司 | 工件定位装置 |
CN205342330U (zh) * | 2015-12-09 | 2016-06-29 | 广州粤研智能装备有限公司 | 一种用于对筒体进行圆周焊接的自定心夹紧装置 |
CN205497177U (zh) * | 2016-04-06 | 2016-08-24 | 上海日进机床有限公司 | 晶棒加工设备及用于该设备的主轴机构 |
CN205735588U (zh) * | 2016-05-26 | 2016-11-30 | 西安隆基硅材料股份有限公司 | 工件固定机构及具有该工件固定机构的线锯切边装置 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107336372A (zh) * | 2017-09-12 | 2017-11-10 | 陈宇翔 | 一种新型桥梁建筑设备 |
CN109676812A (zh) * | 2018-09-30 | 2019-04-26 | 浙江晶盛机电股份有限公司 | 晶棒单线开方机及其使用方法 |
CN111730771A (zh) * | 2020-06-09 | 2020-10-02 | 安徽利锋机械科技有限公司 | 一种晶圆切割机 |
CN111730771B (zh) * | 2020-06-09 | 2021-10-29 | 安徽利锋机械科技有限公司 | 一种晶圆切割机 |
Also Published As
Publication number | Publication date |
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CN106426582B (zh) | 2018-05-15 |
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PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: Silicon crystal bar clamping device Effective date of registration: 20190314 Granted publication date: 20180515 Pledgee: Jinhua Branch of Zhejiang Commercial Bank Co., Ltd. Pledgor: ZHEJIANG YUNFENG NEW MATERIAL TECHNOLOGY CO., LTD. Registration number: 2019330000073 |
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PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20200724 Granted publication date: 20180515 Pledgee: Jinhua Branch of Zhejiang Commercial Bank Co.,Ltd. Pledgor: ZHEJIANG YUNFENG NEW ENERGY TECHNOLOGY Co.,Ltd. Registration number: 2019330000073 |
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Address after: 321000 4th floor, complex building, 1378 Kangji North Street, Jindong District, Jinhua City, Zhejiang Province Patentee after: ZHEJIANG YUNFENG NEW ENERGY TECHNOLOGY Co.,Ltd. Address before: 755 Wanda Plaza, 321015 Zhejiang province Jinhua City Jindong hongjji Street Building 4 room 1015 Patentee before: ZHEJIANG YUNFENG NEW ENERGY TECHNOLOGY Co.,Ltd. |
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