CN106405450A - End-coupling nanometer optical waveguide dual-optical-path chip-level magnetometer - Google Patents
End-coupling nanometer optical waveguide dual-optical-path chip-level magnetometer Download PDFInfo
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- CN106405450A CN106405450A CN201611099395.0A CN201611099395A CN106405450A CN 106405450 A CN106405450 A CN 106405450A CN 201611099395 A CN201611099395 A CN 201611099395A CN 106405450 A CN106405450 A CN 106405450A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/032—Measuring direction or magnitude of magnetic fields or magnetic flux using magneto-optic devices, e.g. Faraday or Cotton-Mouton effect
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
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- General Physics & Mathematics (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
Abstract
The invention discloses an end-coupling nanometer optical waveguide dual-optical-path chip-level magnetometer. The magnetometer comprises a laser. Light beams emitted by the laser are coupled into a Y waveguide splitter through an end coupling input terminal I, wherein one light beam is output after passing through a phase modulation unit, and the other light beam is output after adjustment and compensation. The two light beams are then output through a vertical coupling grating II and a vertical coupling grating III respectively, pass through a polarizer, an attenuation plate and a wave plate in sequence, are collimated and focused, and then go into an air chamber. After emergence, the two light beams are converted into electrical signals through a detection unit and then input to an integrated circuit chip through a subtracter. The integrated circuit chip controls the laser and the phase modulation unit. Compared with a single-optical-path chip-level magnetometer, through dual-optical-path common-mode rejection, the influence of optical power fluctuation and frequency fluctuation noise can be reduced greatly, the signal-to-noise ratio of the CPT magnetometer can be improved effectively, and thus, the sensitivity of the chip-level magnetometer is improved greatly.
Description
Technical field
The present invention relates to optical field and micro-nano system regions, specially the end coupling nanometer optical wave based on CPT effect
Lead double light path chip-scale gaussmeter.
Background technology
The progress of MEMS technology, has driven the development of micro manufacturing industry, and the chip gaussmeter based on CPT effect is due to being not required to
Want the local oscillator of Gigahertz magnitude, compared to conventional atom gaussmeter, several orders of magnitude, power consumption are reduced on volume
And performance is also improved to a great extent, and extend its range of application.Such as, air reconnaissance, space application, just
Suitable magnetometer array can be used for down-hole exploration, remote sensing and biomagnetic application.Can be seen that mesh from external achievement in research
The development performance parameter of front chip gaussmeter substantially meets certain applications demand, has been developed that commercial chip gaussmeter product, and
Achieve greater advance, but the design concept based on new departure, it is expected to so that its precision improves further.
In the experimental provision of chip gaussmeter, because various effect of noise, lead to signal amplitude very little, be extremely difficult to
The photon Johnson noise limit.The principal element wherein limiting sensitivity is amplitude noise and the frequency noise of VCSEL laser instrument.Swash
Light frequency noise is converted to amplitude noise by atomic resonance signal.Although by the jump that VCSEL laser instrument is locked onto atom
Move on line, the impact of light frequency noise bounce can be greatly reduced, but light frequency fluctuation noise is still very big.Secondly some
In VCSEL, mode competition noise between different polarization pattern, larger amplitude noise can be caused on the detector.All this
A little noises all reduce the sensitivity of chip-scale gaussmeter.
Frequency drift and the linear asymmetric decline also resulting in sensitivity of CPT, cause the factor of frequency displacement to have：Magnetic field,
The drift of buffer gas, temperature, optical frequency shift, acceleration or radio-frequency power.It is thus desirable to strictly controlling these parameters, or look for
To reduce the frequency sensitivity to these parameters for the chip gaussmeter to a kind of detection mechanism.
Content of the invention
Chip-scale gaussmeter is based on CPT（Coherent Population Trapping imprisons effect）Effect work, by measuring work atom base
The hyperfine splitting of the sensitive Zeeman sublevel of the magnetic between state F=1 and F=2, then deducts nominally hyperfine energy level and obtains Larmor
Frequency, and finally give magnetic field intensity.Monochromatic light road CPT gaussmeter operationally, due to the presence of common-mode noise, largely
Limit the raising of frequency stability.
In order to improve chip-scale gaussmeter magnetic field sensitivity further, effective control light is in space propagation, the object of the invention
It is to propose end coupling nano optical wave guide double light path chip-scale gaussmeter scheme.
The present invention adopts the following technical scheme that realization：
A kind of end coupling nano optical wave guide double light path chip-scale gaussmeter, including laser instrument, the light beam of described laser emitting
By end coupling inputIt is coupled into Y waveguide beam splitter, wherein light beam exports, in addition after phase modulation unit
Export after the adjusted compensation of light beam, two-way light beam is again respectively through vertical coupled grating With vertical coupled grating Defeated
Go out, sequentially pass through polaroid, attenuator, wave plate, collimation respectively, enter air inlet chamber after focusing, after outgoing, two-beam is through detecting
Unit is adjusted to laser instrument and phase place through subtractor input ic chip, described IC chip after being converted into the signal of telecommunication
Unit processed is regulated and controled.
End coupling nano optical wave guide double light path chip-scale gaussmeter scheme proposed by the present invention, principle is as shown in figure 1, receive
Rice fiber waveguide double light path chip-scale gaussmeter is by VCSEL light source, the vertical coupled grating of nanometer, Y type nano optical wave guide, modulation, inclined
Shake control, MEMS air chamber, photodetection, multifunctional integrated circuit chip composition.
Using nano Y-shaped fiber waveguide, obtain the identical two-beam of performance, can be effectively improved by suppression common mode noise
Gaussmeter sensitivity is that its core is located, and adopts micro fabrication to nano optical wave guide functional unit, to ensure two-way light
Maximum identical.Opticator innovatively employs double light path scheme, and beam of laser is used for the CPT signal of Measurement atom, and in addition one
Shu Zuowei reference light, detectable signal subtracts each other the transition signal obtaining atom.Compared to the chip-scale gaussmeter scheme on monochromatic light road, should
Scheme can greatly reduce luminous power by double light path common mode inhibition and rise and fall and frequency fluctuation effect of noise, effectively improve CPT
The signal to noise ratio of gaussmeter, such that it is able to greatly improve the sensitivity of chip-scale gaussmeter；For by magnetic field, buffer gas, temperature,
The frequency displacement that optical frequency shift etc. causes, also has certain inhibitory action, thus improving the medium-term and long-term degree of stability of chip-scale gaussmeter.Fig. 1
In illustrate circuit part, subtractor will eliminate the clock signal input IC chip of common-mode noise, ic core
Piece completes laser instrument and phase modulation unit are regulated and controled.
Double light path chip-scale gaussmeter common mode noise rejection mechanism and double light path are as follows to equivalent magnetic field intensity Influencing Mechanism：
For research contents with the key issue that solves, in theory, with the three-lever system of atom as model it is considered to atomic system
Actual optical length, using rotating-wave approximation, apply Liouville-Bloch equation, draw the density that descriptive system develops
Matrix division.Numerical solution more clearly can reflect physics law, and is conducive to practical problem is made a concrete analysis of, therefore right
Said process carries out numerical computations.Scrutiny double light path and the interaction of rubidium atom, make a concrete analysis of two-way laser each simultaneously
The impact to output signal for the parameter, and then the quantitative relation obtaining each parameter of laser and CPT Signal-to-Noise, to double light path chip
The common mode noise rejection characteristic of level gaussmeter carries out theoretical validation, for guiding experiment.
As shown in Fig. 2 the light beam coupling of laser emitting enters Y waveguide beam splitter, wherein one tunnel is through phase-modulation list
Unit produces the coherent light of constant phase difference, and in addition a branch of regulation via Ohmic electrode compensates, two-way consistent with modulation light path with this
Light beam is then passed through vertical coupled grating output, through polaroid, attenuator, wave plate, enters rubidium after collimation and focusing
Atomic air chamber, the light beam through ovennodulation can produce CPT effect with atomic interaction, and non-modulated light then carries background noise
Signal, two-beam is converted into after the signal of telecommunication through probe unit and can eliminate background noise through subtractor, reaches raising frequency
The purpose of degree of stability.
According to the physical mechanism of CPT gaussmeter, as shown in figure 3, chip-scale gaussmeter physical piece mainly includes VCSEL swashing
Light device, nanometer Y waveguide beam splitter, optical glass combination, the micro- air chamber of MEMS, probe unit, RF coil.Couple output from Y waveguide
Light beam, enter air chamber in a subtle way by after polaroid, attenuator and λ/4 wave plate.Two-beam through air chamber reach simultaneously two as
Position detection chip, signal subtraction as eliminates common mode noise signal.
Brief description
Fig. 1 represents nano optical wave guide double light path chip-scale gaussmeter solution principle figure.
The integrated schematic diagram of Fig. 2 double light path nano optical wave guide functional unit.
Fig. 3 represents physical piece decomposing schematic representation in gaussmeter.
In figure：1- laser instrument, 2-Y waveguide beam splitter, 31- polaroid, 32- attenuator, 33- λ/4 wave plate, 4-ITO heats
Piece, 5-RF coil, the micro- air chamber of 6-MEMS, 7- probe unit, 8- modulator electrode, 9- Ohmic electrode, 10- end coupling input,
The vertical coupled grating of 11- nanometer , the vertical coupled grating of 12- nanometer .
Specific embodiment
Below the specific embodiment of the present invention is described in detail.
A kind of end coupling nano optical wave guide double light path chip-scale gaussmeter, as shown in Figure 1,3, including VCSEL laser instrument
1, the light beam of described VCSEL laser instrument 1 outgoing passes through its end coupling input10 are coupled into Y waveguide beam splitter 2, nanometer
Vertical coupled grating 1 realizes VCSEL laser instrument is collimated with the coupling input of isolation laser light source（Coupling efficiency is better than 80%）, lead to
Overcoupling technique of alignment and nano Y-shaped waveguide carry out Dock With Precision Position；Wherein light beam exports after phase modulation unit, in addition
Light beam adjusted compensate after export, for example 3.4GHz modulation can be carried out by modulator electrode 8 to a road guided wave light beam thus
Produce the sideband that difference on the frequency is 6.8GHz, another road guided wave light beam is finely adjusted by Ohmic electrode 9 and compensates and modulation light path
Consistent sex differernce；Two-way light beam is again respectively through vertical coupled grating 11 and vertical coupled grating 12 outputs, point
Do not sequentially pass through polaroid 31, attenuator 32, λ/4 wave plate 33, enter air inlet chamber by after collimation, focusing, described air chamber is rubidium
Atomic air chamber（The micro- air chamber of MEMS）, described rubidium atomic air chamber be respectively arranged with RF coil 5 and ITO heating plate 4 up and down.Light beam goes out
After penetrating, two-beam is after probe unit 7 is converted into the signal of telecommunication through subtractor input ic chip, described integrated circuit
Chip regulates and controls to laser instrument and phase modulation unit.
Wherein, as shown in Fig. 2 vertical coupled grating With vertical coupled grating It is gradual change grating, gradual change grating
The light carrying sideband modulated signal through modulator electrode 8 is passed through the vertical coupled grating of nanometer 11 are input to the micro- gas of MEMS
Room, the light after Ohmic electrode 9 compensates is passed through the vertical coupled grating of nanometer by gradual change grating 12 are input to the micro- gas of MEMS
Room, two-beam reaches two as position detection chip through air chamber simultaneously, and signal subtraction as eliminates common mode noise signal.
When being embodied as, using MEMS technology realize waveguide, lenticule, micro- air chamber integrated.Will using extraordinary vacuum glue
Above-mentioned all parts become one.Compared with traditional monochromatic light road chip-scale gaussmeter, nano optical wave guide double light path chip magnetic
Strong meter employs nanometer Y waveguide in physical system part and has carried out light splitting to the light of laser emitting, and physical piece is being encapsulated
During need closely to be connected it with each light path part, reach reduction volume, the purpose of power consumption.
It should be noted last that, above example only in order to technical scheme to be described and unrestricted, although ginseng
It has been described in detail according to the embodiment of the present invention, it will be understood by those within the art that, to technical scheme
Modify or equivalent, without departure from the spirit and scope of technical scheme, it all should cover claim
In protection domain.
Claims (4)
1. a kind of end coupling nano optical wave guide double light path chip-scale gaussmeter, including laser instrument it is characterised in that：Described laser
The light beam of device outgoing passes through end coupling input It is coupled into Y waveguide beam splitter, wherein light beam is through phase modulation unit
After export, in addition light beam adjusted compensate after export, two-way light beam is again respectively through vertical coupled grating With vertical coupled
Grating Output, sequentially passes through polaroid, attenuator, wave plate, collimation respectively, enters air inlet chamber after focusing, after outgoing, two bundles
Light is converted into through subtractor input ic chip after the signal of telecommunication through probe unit, and described IC chip is to laser
Device and phase modulation unit are regulated and controled.
2. end coupling nano optical wave guide double light path chip-scale gaussmeter according to claim 1 it is characterised in that：Described
Air chamber be rubidium atomic air chamber, described rubidium atomic air chamber be respectively arranged with RF coil and ITO heating plate up and down.
3. end coupling nano optical wave guide double light path chip-scale atomic clock according to claim 1 it is characterised in that：Described
In Y waveguide beam splitter, wherein export after the coherent light of light beam modulated electrode generation constant phase difference, in addition light beam is by Europe
Nurse electrode regulating compensate with this with modulate light path consistent after export.
4. end coupling nano optical wave guide double light path chip-scale atomic clock according to claim 1 it is characterised in that：Described
Vertical coupled grating With vertical coupled grating It is gradual change grating.
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| CN108563030A (en) * | 2018-01-31 | 2018-09-21 | 中国地质大学（武汉） | A kind of polarization beam apparatus |
| CN109324299A (en) * | 2017-07-31 | 2019-02-12 | 德州仪器公司 | Zeeman splitting vector magnetometer device and method |
| US11555961B1 (en) | 2021-07-15 | 2023-01-17 | Meta Platforms Technologies LLC | Display device with waveguide-based talbot illuminator |
| CN115792750A (en) * | 2023-02-09 | 2023-03-14 | 中北大学 | Magnetic sensing device based on-chip integrated resonant cavity and measuring method |
| CN116027233A (en) * | 2022-11-23 | 2023-04-28 | 北京自动化控制设备研究所 | Optical integration method of chip magnetometer and chip magnetometer |
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| CN109324299A (en) * | 2017-07-31 | 2019-02-12 | 德州仪器公司 | Zeeman splitting vector magnetometer device and method |
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| US11555961B1 (en) | 2021-07-15 | 2023-01-17 | Meta Platforms Technologies LLC | Display device with waveguide-based talbot illuminator |
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| CN116027233A (en) * | 2022-11-23 | 2023-04-28 | 北京自动化控制设备研究所 | Optical integration method of chip magnetometer and chip magnetometer |
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Application publication date: 20170215 |