CN101916957A - Acousto-optic modulation-based 2mu m polarized orthogonal laser emitting system applied to laser heterodyne interferometer - Google Patents
Acousto-optic modulation-based 2mu m polarized orthogonal laser emitting system applied to laser heterodyne interferometer Download PDFInfo
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Abstract
The invention discloses an acousto-optic modulation-based 2mu m polarized orthogonal laser emitting system applied to a laser heterodyne interferometer, which relates to a polarized orthogonal laser source emitting system. The system solves the problem of low measurement precision of the laser heterodyne interferometer due to polarized mixing error of the conventional orthogonal polarized light source emitting system. The system comprises a 2mu m laser device, a plurality of fiber collimators, a polarization sheet, a fiber beam splitter, two acousto-optic frequency shifters, a polarization controller, a polarized beam splitter prism and a plurality of fibers, wherein the laser of the 2mu m laser device passes through the fiber collimators and the polarization sheet and then enters the fiber beam splitter, the input laser is split into two beams of P laser by the fiber beam splitter, one beam of P laser enters one acousto-optic frequency shifter through the fibers to perform frequency shift and then enters the polarized beam splitter prism, the other beam of P laser is subjected to frequency shift and then enters the polarization controller, the polarization controller converts the P laser into S laser and outputs the S laser to the polarized beam splitter prism, and the P laser and the S laser form an orthogonal polarized beam for emission at an emission port of the polarized beam splitter prism. The system is suitable for a light source system of the laser heterodyne interferometer.
Description
Technical field
The present invention relates to a kind of LASER Light Source emission system of polarized orthogonal, be specifically related to a kind of 2 mu m polarized orthogonal laser transmitting systems that are applied to laser heterodyne interferometer based on acoustooptic modulation.
Background technology
All be to adopt the free space light channel structure in traditional laser heterodyne interferometer system, this system configuration is huge, owing to adopted a large amount of optical elements, its cost height is regulated difficulty, and needs calibration adjustments repeatedly.Secondly, though traditional laser interferometer light source also can produce the laser beam of polarized orthogonal, but the wavelength of these light beams is in visible light wave range, is unsafe for human eye, and its application can not satisfy the measurement requirement for the ultra-smooth optical element surface.
Along with the development of laser technology and optical communication technology, particularly fast development of optical fiber, brought opportunity for the optimization of laser heterodyne interferometer system.Therefore, a lot of researchers are both at home and abroad all transferred to sight the laser aspect of optical fiber technology and its all band gradually, hope is by reducing cost, utilize the optical fibre device of high beam transmission quality and the laser of function admirable to solve the problem that traditional heterodyne ineterferometer system configuration exists, remedy and enrich the deficiency of traditional heterodyne ineterferometer.
Up to now, both at home and abroad, also rest on the stage of adopting visible light wave range about the research of the polarized orthogonal light-source system of laser heterodyne interferometer.More commonly based on the He-Ne laser of Zeemen effect, the difference on the frequency of its crossed polarized light is 100KHz, this cross-polarization light emission system based on Zeemen effect, though can reach the purpose of emission crossed polarized light, but because the undesirable effect of externally-applied magnetic field, the orthogonal optical that is produced not is complete desirable quadrature, has so just introduced the mixed error of polarization, and this error can produce the influence of can not ignore to measurement result in the heterodyne interferometer measuration system.Difference interference is to produce a frequency difference by two beam interferometer light waves, making original is that the tested information transfer of carrier wave is to being the vision signal of carrier wave with this frequency difference with the optical frequency, thereby make the preamplifier behind the photodetector replace original direct current amplifier with AC amplifier, dc shift and most of random signal of signal are effectively suppressed, improved accuracy of detection and repeatability.Therefore we wish that the frequency difference of crossed polarized light of laser heterodyne interferometer is low as much as possible.
In recent ten years, 2 μ m lasers have obtained develop rapidly.Its main feature is: system need not refrigeration, pump energy coupling efficiency height, and stability is strong, good beam quality, the life-span is long, compact conformation.These characteristics have played certain positive role for remedying conventional interference.But the development of present 2 μ m optical fibre devices is relatively backward, does not catch up with the paces of 2 μ m laser technique development.Therefore, the near-infrared interferometer of report still is that 1550nm is main with the wavelength at present.For wavelength is the laser heterodyne interferometer of 1550nm, though be in optical communication wave band commonly used, the Laser Devices of this technology are not overripened, and efficient is low.Make the near-infrared heterodyne ineterferometer that is in this wave band fail to be widely used.
In a word, the light emitted system of existing laser heterodyne interferometer mainly contains the problem of following several respects: one, and operation wavelength concentrates within the visible light wave range, and this has limited the application of interferometer; Two, the difference on the frequency of existing cross-polarization light source emission system is low inadequately, extracts for high-precision phase signal and has brought certain error; Three, the power splitting ratio of polarized orthogonal light beam is nonadjustable.For above three point problem, seen on the market heterodyne ineterferometer all can not solve and overcome simultaneously at present.
Summary of the invention
In order to solve existing cross-polarization light source emission system, the invention provides a kind of 2 mu m polarized orthogonal laser transmitting systems that are applied to laser heterodyne interferometer based on acoustooptic modulation because of the polarization mixing error causes the low problem of laser heterodyne interferometer certainty of measurement.
A kind of 2 mu m polarized orthogonal laser transmitting systems that are applied to laser heterodyne interferometer of the present invention based on acoustooptic modulation, described emission system comprises 2 μ m lasers, first optical fiber collimator, second optical fiber collimator, polarizer, fiber optic splitter, first acousto-optic frequency shifters, rising tone optical frequency shifter, Polarization Controller, polarization beam splitter prism, first optical fiber, second optical fiber and the 3rd optical fiber
Described 2 μ m laser output wavelengths are the signal receiving end of laser to the first optical fiber collimator of 2 μ m, described first optical fiber collimator is exported the signal receiving end of the collimation laser of 2 μ m to polarizer, the signal receiving end of described polarizer output P light to the second optical fiber collimator, described second optical fiber collimator output collimation P light is to the signal receiving end of fiber optic splitter, described fiber optic splitter is divided into two bundles with described collimation P light according to splitting ratio x:y, wherein
A branch of collimation P light inputs to the signal receiving end of first acousto-optic frequency shifters by first optical fiber, export the signal receiving end of the 3rd optical fiber behind the described collimation P light shift frequency uMHZ that described first acousto-optic frequency shifters will receive to, described the 3rd optical fiber output is described by first signal receiving end of the collimation P light of shift frequency uMHZ to polarization beam splitter prism, described polarization beam splitter prism is with the described exit ports that is exported to described polarization beam splitter prism by the collimation P transmittance of shift frequency uMHZ
Another bundle collimation P light inputs to the signal receiving terminal of rising tone optical frequency shifter by second optical fiber; Export the signal receiving terminal of Polarization Controller behind the described collimation P light shift frequency vMHZ that described rising tone optical frequency shifter will receive to; The described direction of vibration half-twist by the collimation P light of shift frequency vMHZ that described Polarization Controller will receive is transformed to the secondary signal receiving terminal that collimation S light exports the polarization beam splitter prism to; Described polarization beam splitter prism is with the described exit ports that is exported to described polarization beam splitter prism by the reflection of the collimation S light of shift frequency vMHZ
Described P light and S light exit ports form direction of vibration mutually vertical and difference on the frequency be
The orthogonal polarized light beam emission of MHZ, and 0.05＜
＜0.2.
A kind of 2 mu m polarized orthogonal laser transmitting systems based on acoustooptic modulation that are applied to laser heterodyne interferometer of the present invention also provide another structure: described emission system comprises 2 μ m lasers, first optical fiber collimator, second optical fiber collimator, the 5th optical fiber collimator, six fibers collimater, polarizer, second polarizer, fiber optic splitter, first acousto-optic frequency shifters, rising tone optical frequency shifter, polarization beam splitter prism, first optical fiber, second optical fiber and the 3rd optical fiber
Described 2 μ m laser output wavelengths are the signal receiving end of the laser of 2 μ m to fiber optic splitter, and described fiber optic splitter is divided into two bundles with described laser according to splitting ratio x:y, wherein,
Beam of laser inputs to the signal receiving end of first acousto-optic frequency shifters by first optical fiber, export the signal receiving end of first optical fiber collimator behind the described laser shift frequency uMHZ that described first acousto-optic frequency shifters will receive to, export the signal receiving end of polarizer after the laser alignment of described first optical fiber collimator with shift frequency uMHZ to, described polarizer is transformed to the signal receiving end that the polarization direction linearly polarized light identical with the optical axis direction of polarization beam splitter prism exports second optical fiber collimator to the collimation laser of shift frequency uMHZ, described second optical fiber collimator output is described by the signal receiving end of line of collimation polarised light to the three optical fiber of shift frequency uMHZ, described the 3rd optical fiber output is described by first signal receiving end of the line of collimation polarised light of shift frequency uMHZ to polarization beam splitter prism, described polarization beam splitter prism exports described P transmittance by the line of collimation polarised light of shift frequency uMHZ to the exit ports of described polarization beam splitter prism
Another Shu Jiguang inputs to the signal receiving end of rising tone optical frequency shifter by second optical fiber, export the signal receiving end of the 5th optical fiber collimator behind the described laser shift frequency vMHZ that described rising tone optical frequency shifter will receive to, export the signal receiving end of second polarizer after the laser alignment of described the 5th optical fiber collimator with shift frequency vMHZ to, described second polarizer is transformed to the signal receiving end that the polarization direction linearly polarized light vertical with the optical axis direction of described polarization beam splitter prism exports the six fibers collimater to the collimation laser of shift frequency vMHZ, described six fibers collimater output is described by the secondary signal receiving terminal of the line of collimation polarised light of shift frequency vMHZ to polarization beam splitter prism, described polarization beam splitter prism is with the described exit ports that is exported to described polarization beam splitter prism by the reflection of the S light of the line of collimation polarised light of shift frequency vMHZ
Described P light and S light exit ports form direction of vibration mutually vertical and difference on the frequency be
The orthogonal polarized light beam emission of MHZ, and 0.05＜
＜0.2.
Beneficial effect of the present invention is: the polarized orthogonal laser transmitting system that the invention provides a kind of near infrared band (2 μ m), this polarized orthogonal emission system has adopted the two independent light path to produce 2 μ m laser beams of cross-polarization, avoid the existing polarization mixing error problem of existing cross-polarization light source emission system (the he-Ne laser is realized polarized orthogonal light emitted system by Zeemen effect), can improve the certainty of measurement of laser heterodyne interferometer; The splitting ratio of fiber optic splitter can be adjusted as required among the present invention, and then can obtain the polarized orthogonal light beam of needed any power ratio; The present invention introduces a plurality of optical fiber collimators, has improved the propagation efficiency of light beam to greatest extent, has avoided unnecessary beam energy loss.
Description of drawings
Fig. 1 is the structural representation based on 2 mu m polarized orthogonal laser transmitting systems of acoustooptic modulation that a kind of described in the specific embodiment of the present invention one is applied to laser heterodyne interferometer, Fig. 2 is the structural representation based on 2 mu m polarized orthogonal laser transmitting systems of acoustooptic modulation that a kind of described in the specific embodiment of the present invention two is applied to laser heterodyne interferometer, and Fig. 3 is the structural representation of existing optical fiber collimator; Fig. 4 is the structural representation of existing fiber optic splitter, and Fig. 5 is the schematic diagram of existing Polarization Controller; Fig. 6 is the structural representation of existing polarization beam splitter prism.
Embodiment
Embodiment one: according to Figure of description 1,2,3,4,5 and 6 specify present embodiment, the described a kind of 2 mu m polarized orthogonal laser transmitting systems that are applied to laser heterodyne interferometer of present embodiment based on acoustooptic modulation, described emission system comprises 2 μ m lasers 1, the first optical fiber collimator 2-1, the second optical fiber collimator 2-2, polarizer 3, fiber optic splitter 4, first acousto-optic frequency shifters 5, rising tone optical frequency shifter 6, Polarization Controller 7, polarization beam splitter prism 8, the first optical fiber 9-1, the second optical fiber 9-2 and the 3rd optical fiber 9-3
Described 2 μ m lasers, 1 output wavelength is the signal receiving end of laser to the first optical fiber collimator 2-1 of 2 μ m, the described first optical fiber collimator 2-1 exports the signal receiving end of the collimation laser of 2 μ m to polarizer 3, the signal receiving end of described polarizer 3 output P light to the second optical fiber collimator 2-2, described second optical fiber collimator 2-2 output collimation P light is to the signal receiving end of fiber optic splitter 4, described fiber optic splitter 4 is divided into two bundles with described collimation P light according to splitting ratio x:y, wherein
A branch of collimation P light inputs to the signal receiving terminal of first sound optical frequency shifter 5 by the first optical fiber 9-1; Export the signal receiving terminal of the 3rd optical fiber 9-3 behind the described collimation P light shift frequency uMHZ that described first sound optical frequency shifter 5 will receive to; Described the 3rd optical fiber 9-3 output is described by the first signal receiving terminal 8-1 of the collimation P light of shift frequency uMHZ to polarization beam splitter prism 8; Described polarization beam splitter prism 8 is with the described exit ports 8-3 that is exported to described polarization beam splitter prism 8 by the collimation P light transmission of shift frequency uMHZ
Another bundle collimation P light inputs to the signal receiving terminal of rising tone optical frequency shifter 6 by the second optical fiber 9-2; Export the signal receiving terminal of Polarization Controller 7 behind the described collimation P light shift frequency vMHZ that described rising tone optical frequency shifter 6 will receive to; The described direction of vibration half-twist by the collimation P light of shift frequency vMHZ that described Polarization Controller 7 will receive is transformed to the secondary signal receiving terminal 8-2 that collimation S light exports polarization beam splitter prism 8 to; Described polarization beam splitter prism 8 is with the described exit ports 8-3 that is exported to described polarization beam splitter prism 8 by the reflection of the collimation S light of shift frequency vMHZ
Described P light and S light exit ports 8-3 form direction of vibration mutually vertical and difference on the frequency be
The orthogonal polarized light beam emission of MHZ, and 0.05＜
＜0.2.
Embodiment two: the difference of present embodiment and embodiment one is: the described emission system of present embodiment also comprises the 3rd optical fiber collimator 2-3 and the 4th optical fiber collimator 2-4, the signal receiving end of described the 3rd optical fiber collimator 2-3 is connected with the signal output part of the 3rd optical fiber 9-3, and the signal output part of described the 3rd optical fiber collimator 2-3 is connected with the first signal receiving end 8-1 of polarization beam splitter prism 8; The signal receiving end of described the 4th optical fiber collimator 2-4 is connected with the signal output part of Polarization Controller 7, and the signal output part of described the 4th optical fiber collimator 2-4 is connected with the secondary signal receiving terminal 8-2 of polarization beam splitter prism 8.
Embodiment three: present embodiment and embodiment one or twos' difference is: the splitting ratio x:y=50:50 of the described fiber optic splitter 4 of present embodiment
Embodiment four: present embodiment and embodiment one, two or threes' difference is: present embodiment is described
=0.1.
Embodiment five: present embodiment and embodiment one, two, three or fours' difference is: present embodiment is described
,
In the present embodiment, each optical fiber is single-mode polarization maintaining fiber, and length is half meter, adopts optic fibre transmision light beam, makes light beam not be subject to atmospheric perturbation, and the while is the reduction system structure to a certain extent, makes system configuration compact more.
In the present embodiment, P light is the light of vertical paper, and S light is the light of parallel paper.
In the present embodiment, the emission wavelength of 2 μ m lasers 1 is the laser beam of 2 μ m, the continuous output beam of this laser, output light is the P light of linear polarization, and extinction ratio is 22dB, and output wavelength is 2050.015nm, power output is 1.22W, and the spot diameter of output is 4.56mm.
In the present embodiment, utilizing polarizer 3 can be the P light of even more ideal linear polarization with the optical beam transformation of 2 μ m lasers 1 output.
The structure of each optical fiber collimator in the present embodiment as shown in Figure 3, described optical fiber collimator is made up of the monomode fiber that has the FC adapter connector and lens, by adjusting spacing between the two, make the outgoing end face of monomode fiber be in the place, focal plane of lens.
Polarizer 3 in the present embodiment has the function that incident light is covered or sees through; can make that vertical or horizontal light is a kind of to be seen through; a kind of covering; described polarizer 3 is the composite materials that formed by polarizing coating, inner protection film, pressure-sensitive adhesive layer and outer diaphragm lamination; by rotatory polarization sheet 3, just can make the light beam that passes through change its polarization state.
Each acousto-optic frequency shifters in the present embodiment is a kind of a kind of acousto-optical device that changes the input signal light frequency, it is to utilize Bragg effect to realize the change of beam frequencies, each used acousto-optic frequency shifters is the product of Brimrose company in the present embodiment, the centre frequency of this product shift frequency is 100MHz, and the shift frequency bandwidth is 10MHz.The acousto-optic frequency shifters device generally has three ports, and an input port, two output ports, output port are respectively the zero order light of not shift frequency and the one-level light of shift frequency.The Bragg angle of this two-beam is 82mrad.Used in the emission system of present embodiment is exactly the output port of 1 grade of light, and this output port has increased 100MHz than the frequency of corresponding input port.
The structural principle of the Polarization Controller 7 in the present embodiment as shown in Figure 5, Polarization Controller 7 generally is made up of two quarter wave plates and one 1/2 wave plate, wherein the retardation of each wave plate is fixed, relative angle is variable, its control principle is: first quarter wave plate 7-1 changes input polarization light arbitrarily into linearly polarized light, 1/2 wave plate 7-2 is accurate to the polarization direction of expecting arbitrarily to obtain this linearly polarized light, and final second quarter wave plate 7-3 is transformed into this polarised light the output polarization attitude that any hope obtains again.
In the present embodiment, the light beam direction of vibration is changed 90 by Polarization Controller 7
0, and then by the 4th optical fiber collimator 2-4, entering into the secondary signal receiving terminal 8-2 of polarization beam splitter prism 8 in the mode of directional light, transmission enters into the inside of polarization beam splitter prism 8; And through the light beam after first acousto-optic frequency shifters 5 directly by behind the 3rd optical fiber 9-3 and the 3rd optical fiber collimator 2-3, enter into the inside of polarization beam splitter prism 8 by the first signal receiving end 8-1.Because light beam is by polarizer 3 time, optical axis direction by rotatory polarization sheet 3, make the optical axis direction of polarizer 3 just overlap with the optical axis direction of polarization beam splitter prism 8, therefore, enter into the direction of vibration of light beam of polarization beam splitter prism 8 and the direction of polarization beam splitter prism 8 by the first signal receiving end 8-1 and overlap, therefore port 8-3 is penetrated in the direct transmission turnover of described light beam.And the direction of vibration of light beam that enters into polarization beam splitter prism 8 by secondary signal receiving terminal 8-2 is vertical with the direction of vibration of polarization beam splitter prism 8, therefore described light beam directly reflexes to exit ports 8-3, and finally just having obtained frequency difference at exit ports 8-3 is the cross-polarization mixed light beam of 100KHZ.
Embodiment six: according to Figure of description 1,2,3,4,5 and 6 specify present embodiment, the described a kind of 2 mu m polarized orthogonal laser transmitting systems that are applied to laser heterodyne interferometer of present embodiment based on acoustooptic modulation, described emission system comprises 2 μ m lasers 1, the first optical fiber collimator 2-1, the second optical fiber collimator 2-2, the 5th optical fiber collimator 2-5, six fibers collimater 2-6, polarizer 3, the second polarizer 3-1, fiber optic splitter 4, first acousto-optic frequency shifters 5, rising tone optical frequency shifter 6, polarization beam splitter prism 8, the first optical fiber 9-1, the second optical fiber 9-2 and the 3rd optical fiber 9-3
Described 2 μ m lasers, 1 output wavelength is the signal receiving end of the laser of 2 μ m to fiber optic splitter 4, and described fiber optic splitter 4 is divided into two bundles with described laser according to splitting ratio x:y, wherein,
Beam of laser inputs to the signal receiving end of first acousto-optic frequency shifters 5 by the first optical fiber 9-1, export the signal receiving end of the first optical fiber collimator 2-1 behind the described laser shift frequency uMHZ that described first acousto-optic frequency shifters 5 will receive to, export the signal receiving end of polarizer 3 after the laser alignment of the described first optical fiber collimator 2-1 with shift frequency uMHZ to, described polarizer 3 is transformed to the signal receiving end that the polarization direction linearly polarized light identical with the optical axis direction of polarization beam splitter prism 8 exports the second optical fiber collimator 2-2 to the collimation laser of shift frequency uMHZ, described second optical fiber collimator 2-2 output is described by the signal receiving end of line of collimation polarised light to the three optical fiber 9-3 of shift frequency uMHZ, described the 3rd optical fiber 9-3 output is described by the first signal receiving end 8-1 of the line of collimation polarised light of shift frequency uMHZ to polarization beam splitter prism 8, described polarization beam splitter prism 8 exports described P transmittance by the line of collimation polarised light of shift frequency uMHZ to the exit ports 8-3 of described polarization beam splitter prism 8
Another Shu Jiguang inputs to the signal receiving end of rising tone optical frequency shifter 6 by the second optical fiber 9-2, export the signal receiving end of the 5th optical fiber collimator 2-5 behind the described laser shift frequency vMHZ that described rising tone optical frequency shifter 6 will receive to, export the signal receiving end of the second polarizer 3-1 after the laser alignment of described the 5th optical fiber collimator 2-5 with shift frequency vMHZ to, the described second polarizer 3-1 is transformed to the signal receiving end that the polarization direction linearly polarized light vertical with the optical axis direction of described polarization beam splitter prism 8 exports six fibers collimater 2-6 to the collimation laser of shift frequency vMHZ, described six fibers collimater 2-6 output is described by the secondary signal receiving terminal 8-2 of the line of collimation polarised light of shift frequency vMHZ to polarization beam splitter prism 8, described polarization beam splitter prism 8 is with the described exit ports 8-3 that is exported to described polarization beam splitter prism 8 by the reflection of the S light of the line of collimation polarised light of shift frequency vMHZ
Described P light and S light exit ports 8-3 form direction of vibration mutually vertical and difference on the frequency be
The orthogonal polarized light beam emission of MHZ, and 0.05＜
＜0.2.
Embodiment seven: the difference of present embodiment and embodiment six is: the described emission system of present embodiment also comprises the 3rd optical fiber collimator 2-3 and the 4th optical fiber collimator 2-4, the signal receiving end of described the 3rd optical fiber collimator 2-3 is connected with the signal output part of the 3rd optical fiber 9-3, and the signal output part of described the 3rd optical fiber collimator 2-3 is connected with the first signal receiving end 8-1 of polarization beam splitter prism 8; The signal receiving end of described the 4th optical fiber collimator 2-4 is connected with the signal output part of six fibers collimater 2-6, and the signal output part of described the 4th optical fiber collimator 2-4 is connected with the secondary signal receiving terminal 8-2 of polarization beam splitter prism 8.
Embodiment eight: present embodiment and embodiment six or sevens' difference is: the splitting ratio x:y=50:50 of the described fiber optic splitter 4 of present embodiment
Embodiment nine: present embodiment and embodiment six, seven or eights' difference is: present embodiment is described
=0.1.
Embodiment ten: present embodiment and embodiment six, seven, eight or nines' difference is: present embodiment is described
,
Claims (10)
1. 2 mu m polarized orthogonal laser transmitting systems that are applied to laser heterodyne interferometer based on acoustooptic modulation, it is characterized in that described emission system comprises 2 μ m lasers (1), first optical fiber collimator (2-1), second optical fiber collimator (2-2), polarizer (3), fiber optic splitter (4), first acousto-optic frequency shifters (5), rising tone optical frequency shifter (6), Polarization Controller (7), polarization beam splitter prism (8), first optical fiber (9-1), second optical fiber (9-2) and the 3rd optical fiber (9-3)
Described
Laser, (1) output wavelength is laser to the first optical fiber collimator of 2 μ m, signal receiving end (2-1), described first optical fiber collimator, (2-1) collimation laser of output 2 μ m is to polarizer, (3) signal receiving end, described polarizer, (3) output P light to the second optical fiber collimator, signal receiving end (2-2), described second optical fiber collimator, (2-2) output collimation P light is to fiber optic splitter, (4) signal receiving end, described fiber optic splitter, (4) described collimation P light is divided into two bundles according to splitting ratio x:y, wherein
A branch of collimation P light is by first optical fiber, (9-1) input to first acousto-optic frequency shifters, (5) signal receiving end, described first acousto-optic frequency shifters, export the 3rd optical fiber to behind the described collimation P light shift frequency uMHZ that (5) will receive, signal receiving end (9-3), described the 3rd optical fiber, (9-3) output described by the collimation P light of shift frequency uMHZ to polarization beam splitter prism, (8) first signal receiving end, (8-1), described polarization beam splitter prism, (8) export described collimation P transmittance to described polarization beam splitter prism by shift frequency uMHZ, (8) exit ports, (8-3)
Another bundle collimation P light inputs to the signal receiving end of rising tone optical frequency shifter (6) by second optical fiber (9-2), export the signal receiving end of Polarization Controller (7) behind the described collimation P light shift frequency vMHZ that described rising tone optical frequency shifter (6) will receive to, the described direction of vibration half-twist by the collimation P light of shift frequency vMHZ that described Polarization Controller (7) will receive is transformed to the secondary signal receiving terminal (8-2) that collimation S light exports polarization beam splitter prism (8) to, described polarization beam splitter prism (8) is with the described exit ports (8-3) that is exported to described polarization beam splitter prism (8) by the reflection of the collimation S light of shift frequency vMHZ
Described P light and S light exit ports (8-3) form direction of vibration mutually vertical and difference on the frequency be
The orthogonal polarized light beam emission of MHZ, and 0.05＜
＜0.2.
2. a kind of 2 mu m polarized orthogonal laser transmitting systems that are applied to laser heterodyne interferometer according to claim 1 based on acoustooptic modulation, it is characterized in that described emission system also comprises the 3rd optical fiber collimator (2-3) and the 4th optical fiber collimator (2-4), the signal receiving end of described the 3rd optical fiber collimator (2-3) is connected with the signal output part of the 3rd optical fiber (9-3), and the signal output part of described the 3rd optical fiber collimator (2-3) is connected with first signal receiving end (8-1) of polarization beam splitter prism (8); The signal receiving end of described the 4th optical fiber collimator (2-4) is connected with the signal output part of Polarization Controller (7), and the signal output part of described the 4th optical fiber collimator (2-4) is connected with the secondary signal receiving terminal (8-2) of polarization beam splitter prism (8).
3. a kind of 2 mu m polarized orthogonal laser transmitting systems based on acoustooptic modulation that are applied to laser heterodyne interferometer according to claim 2 is characterized in that the splitting ratio x:y=50:50 of fiber optic splitter (4).
4. according to claim 1,2 or 3 described a kind of 2 mu m polarized orthogonal laser transmitting systems that are applied to laser heterodyne interferometer, it is characterized in that based on acoustooptic modulation
=0.1.
5. a kind of 2 mu m polarized orthogonal laser transmitting systems based on acoustooptic modulation that are applied to laser heterodyne interferometer according to claim 4 is characterized in that
,
6. 2 mu m polarized orthogonal laser transmitting systems that are applied to laser heterodyne interferometer based on acoustooptic modulation, it is characterized in that described emission system comprises 2 μ m lasers (1), first optical fiber collimator (2-1), second optical fiber collimator (2-2), the 5th optical fiber collimator (2-5), six fibers collimater (2-6), polarizer (3), second polarizer (3-1), fiber optic splitter (4), first acousto-optic frequency shifters (5), rising tone optical frequency shifter (6), polarization beam splitter prism (8), first optical fiber (9-1), second optical fiber (9-2) and the 3rd optical fiber (9-3)
Described 2 μ m laser (1) output wavelengths are the signal receiving end of the laser of 2 μ m to fiber optic splitter (4), and described fiber optic splitter (4) is divided into two bundles with described laser according to splitting ratio x:y, wherein,
Beam of laser inputs to the signal receiving end of first acousto-optic frequency shifters (5) by first optical fiber (9-1), export the signal receiving end of first optical fiber collimator (2-1) behind the described laser shift frequency uMHZ that described first acousto-optic frequency shifters (5) will receive to, export the signal receiving end of polarizer (3) after the laser alignment of described first optical fiber collimator (2-1) with shift frequency uMHZ to, described polarizer (3) is transformed to the signal receiving end that the polarization direction linearly polarized light identical with the optical axis direction of polarization beam splitter prism (8) exports second optical fiber collimator (2-2) to the collimation laser of shift frequency uMHZ, described second optical fiber collimator (2-2) output is described by the signal receiving end of line of collimation polarised light to the three optical fiber (9-3) of shift frequency uMHZ, described the 3rd optical fiber (9-3) output is described by first signal receiving end (8-1) of the line of collimation polarised light of shift frequency uMHZ to polarization beam splitter prism (8), described polarization beam splitter prism (8) exports described P transmittance by the line of collimation polarised light of shift frequency uMHZ to the exit ports (8-3) of described polarization beam splitter prism (8)
Another Shu Jiguang inputs to the signal receiving end of rising tone optical frequency shifter (6) by second optical fiber (9-2), export the signal receiving end of the 5th optical fiber collimator (2-5) behind the described laser shift frequency vMHZ that described rising tone optical frequency shifter (6) will receive to, export the signal receiving end of second polarizer (3-1) after the laser alignment of described the 5th optical fiber collimator (2-5) with shift frequency vMHZ to, described second polarizer (3-1) is transformed to the signal receiving end that the polarization direction linearly polarized light vertical with the optical axis direction of described polarization beam splitter prism (8) exports six fibers collimater (2-6) to the collimation laser of shift frequency vMHZ, described six fibers collimater (2-6) output is described by the secondary signal receiving terminal (8-2) of the line of collimation polarised light of shift frequency vMHZ to polarization beam splitter prism (8), described polarization beam splitter prism (8) is with the described exit ports (8-3) that is exported to described polarization beam splitter prism (8) by the reflection of the S light of the line of collimation polarised light of shift frequency vMHZ
Described P light and S light exit ports (8-3) form direction of vibration mutually vertical and difference on the frequency be
The orthogonal polarized light beam emission of MHZ, and 0.05＜
＜0.2.
7. a kind of 2 mu m polarized orthogonal laser transmitting systems that are applied to laser heterodyne interferometer according to claim 6 based on acoustooptic modulation, it is characterized in that described emission system also comprises the 3rd optical fiber collimator (2-3) and the 4th optical fiber collimator (2-4), the signal receiving end of described the 3rd optical fiber collimator (2-3) is connected with the signal output part of the 3rd optical fiber (9-3), and the signal output part of described the 3rd optical fiber collimator (2-3) is connected with first signal receiving end (8-1) of polarization beam splitter prism (8); The signal receiving end of described the 4th optical fiber collimator (2-4) is connected with the signal output part of six fibers collimater (2-6), and the signal output part of described the 4th optical fiber collimator (2-4) is connected with the secondary signal receiving terminal (8-2) of polarization beam splitter prism (8).
8. a kind of 2 mu m polarized orthogonal laser transmitting systems based on acoustooptic modulation that are applied to laser heterodyne interferometer according to claim 7 is characterized in that the splitting ratio x:y=50:50 of fiber optic splitter (4).
9. according to claim 6,7 or 8 described a kind of 2 mu m polarized orthogonal laser transmitting systems that are applied to laser heterodyne interferometer, it is characterized in that based on acoustooptic modulation
=0.1.
10. a kind of 2 mu m polarized orthogonal laser transmitting systems based on acoustooptic modulation that are applied to laser heterodyne interferometer according to claim 9 is characterized in that
,
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