CN106378876A - Diamond wire slicing cooling liquid integrated treatment method for sapphire and silicon wafers - Google Patents
Diamond wire slicing cooling liquid integrated treatment method for sapphire and silicon wafers Download PDFInfo
- Publication number
- CN106378876A CN106378876A CN201610845719.4A CN201610845719A CN106378876A CN 106378876 A CN106378876 A CN 106378876A CN 201610845719 A CN201610845719 A CN 201610845719A CN 106378876 A CN106378876 A CN 106378876A
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- Prior art keywords
- coolant
- pipeline
- tank
- treatment method
- sapphire
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- 238000000034 method Methods 0.000 title claims abstract description 30
- 229910003460 diamond Inorganic materials 0.000 title claims abstract description 26
- 239000010432 diamond Substances 0.000 title claims abstract description 26
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 25
- 229910052594 sapphire Inorganic materials 0.000 title claims abstract description 25
- 239000010980 sapphire Substances 0.000 title claims abstract description 25
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 25
- 239000010703 silicon Substances 0.000 title claims abstract description 25
- 239000000110 cooling liquid Substances 0.000 title abstract description 12
- 235000012431 wafers Nutrition 0.000 title abstract 2
- 238000001914 filtration Methods 0.000 claims abstract description 26
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 26
- 239000010419 fine particle Substances 0.000 claims abstract description 6
- 229910021645 metal ion Inorganic materials 0.000 claims abstract description 6
- 239000013589 supplement Substances 0.000 claims abstract description 6
- 239000002910 solid waste Substances 0.000 claims abstract description 3
- 239000002826 coolant Substances 0.000 claims description 76
- 239000010865 sewage Substances 0.000 claims description 21
- 239000007788 liquid Substances 0.000 claims description 19
- 239000000203 mixture Substances 0.000 claims description 19
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 10
- 241000078511 Microtome Species 0.000 claims description 8
- 238000001802 infusion Methods 0.000 claims description 8
- 239000012530 fluid Substances 0.000 claims description 7
- 239000003463 adsorbent Substances 0.000 claims description 5
- 239000011347 resin Substances 0.000 claims description 5
- 229920005989 resin Polymers 0.000 claims description 5
- 238000001179 sorption measurement Methods 0.000 claims description 5
- 238000001816 cooling Methods 0.000 claims description 3
- 238000002156 mixing Methods 0.000 claims description 3
- 238000003825 pressing Methods 0.000 claims description 3
- 238000003672 processing method Methods 0.000 claims description 3
- 238000009826 distribution Methods 0.000 claims description 2
- 230000005611 electricity Effects 0.000 claims description 2
- 238000003756 stirring Methods 0.000 claims description 2
- 239000000047 product Substances 0.000 abstract description 6
- 238000003860 storage Methods 0.000 abstract description 5
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 238000003754 machining Methods 0.000 abstract description 2
- 238000002360 preparation method Methods 0.000 abstract 2
- 230000001502 supplementing effect Effects 0.000 abstract 1
- 239000002699 waste material Substances 0.000 abstract 1
- 238000005520 cutting process Methods 0.000 description 10
- 238000003912 environmental pollution Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 239000000498 cooling water Substances 0.000 description 2
- 238000007711 solidification Methods 0.000 description 2
- 230000008023 solidification Effects 0.000 description 2
- 239000013590 bulk material Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000008187 granular material Substances 0.000 description 1
- 239000010813 municipal solid waste Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 239000013049 sediment Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0076—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for removing dust, e.g. by spraying liquids; for lubricating, cooling or cleaning tool or work
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F9/00—Multistage treatment of water, waste water or sewage
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/001—Processes for the treatment of water whereby the filtration technique is of importance
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/28—Treatment of water, waste water, or sewage by sorption
- C02F1/283—Treatment of water, waste water, or sewage by sorption using coal, charred products, or inorganic mixtures containing them
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/28—Treatment of water, waste water, or sewage by sorption
- C02F1/285—Treatment of water, waste water, or sewage by sorption using synthetic organic sorbents
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2209/00—Controlling or monitoring parameters in water treatment
- C02F2209/005—Processes using a programmable logic controller [PLC]
Landscapes
- Engineering & Computer Science (AREA)
- Life Sciences & Earth Sciences (AREA)
- Hydrology & Water Resources (AREA)
- Environmental & Geological Engineering (AREA)
- Water Supply & Treatment (AREA)
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Mechanical Engineering (AREA)
- Sampling And Sample Adjustment (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
Abstract
The invention relates to a diamond wire slicing cooling liquid integrated treatment method for sapphire and silicon wafers. The treatment method comprises following steps that firstly, a first pipeline conveys waste cooling liquid drained by slicing machines to a storage tank; secondly, a plate frame pressure filter carries out pressure filtering to remove solid wastes in the cooling liquid; thirdly, a precise filter tank is used for carrying out precise filtering to remove fine particles and metal ions in the cooling liquid; fourthly, a fourth pipeline conveys the cooling liquid treated by the precise filter tank to a preparation tank, a PLC is controlled to enable a cooling liquid supplementing system to supplement cooling liquid to the preparation tank, and a finished product tank conveys the cooling liquid to a plurality of slicing machines through a fifth pipeline. The cooling liquid can be circularly used, the machining quality is improved, the equipment failure and switching time can be shortened, the product manufacturing cost is reduced, and the water treatment environment pollution is reduced.
Description
Technical field
A kind of coolant integrated sewage treatment method the present invention relates to sapphire and silicon chip diamond wire are cut into slices, belongs to photovoltaic material
Material production technical field.
Background technology
The processing mode of traditional sapphire slices and the section of diamond wire silicon chip is as follows：
1st, the agitator of equipment self-carrying mixing, cooling water and the coolant of demand circulation is squeezed in cutting every time.Cut through
Using interior circulation pattern it is desirable to the concentration of micropowder meets section demand in journey, after one or many cutting, carry out changing and give up
Abandon；
2nd, due to the impact of micropowder, in cutting process, in the bearing clearance in micropowder part meeting access arrangement, form solidification heavy
Form sediment, impact bearing running, cutting every time finishes and certain time need to be spent to be rinsed, and equipment needs to carry out every certain cutter time
Thoroughly great purge；
3rd, the impact of micropowder can pollute the surface of processed finished products, and coolant, in the environment of processing high temperature, forms oxidation with micropowder
Reaction, is attached to product surface, need to design long pre-flush time, chemical cleaning products surface time in next link.
Due to sapphire slices and the section of diamond wire silicon chip, belong to diamond wire section field, cutting process needs to cool down
Water and coolant, during the sheet product being become by bulk material in cutting process,<50% material can become micropowder shape or granule
Enter in cooling water, pollute cutting environment, cutting precipitation solidification, cause equipment fault, lead to cutting yield low, pollute simultaneously
Water afterwards needs to be discharged, and enters sewage disposal, brings environmental protection pressure.
Content of the invention
The purpose of the present invention is the defect for prior art, provides a kind of sapphire and the section cooling of silicon chip diamond wire
Liquid integrated sewage treatment method, improves processing quality quality, reduces equipment fault and switching time, reduces cost of goods manufactured, subtract
The environmental pollution of few water process.
The present invention is achieved by the following technical solutions：
A kind of sapphire and silicon chip diamond wire section coolant integrated sewage treatment method, its processing method is as follows：
（1）Some microtomes are connected with holding vessel by the first pipeline, discarded cooling microtome discharged by the first pipeline
Liquid is delivered to holding vessel；
（2）Holding vessel is connected with filter press with muddy water bypass line by the second pipeline, by the second pipeline by holding vessel
Interior coolant is delivered in filter press, carry out filter pressing remove coolant in solid waste, when in pressure-filtering process not
When clear water occurs, coolant is conveyed into holding vessel from muddy water bypass line；
（3）Filter press is connected with precise filtering tank by the 3rd pipeline, by the 3rd pipeline will be through filter press at
Coolant after reason is delivered to precise filtering tank, carries out secondary filter and removes fine particle and metal ion in coolant；
（4）Precise filtering tank is connected with finished fluid management system by the 4th pipeline, described finished fluid management system includes adjusting
Distribution tank, finished pot and PLC, described blend tank is connected with blend tank and PLC respectively, described blend tank and PLC
It is provided with coolant replenishment system, some microtomes that described finished pot passes through in the 5th pipeline step (1) are connected between controller,
The coolant processing through precise filtering tank is delivered to by blend tank by the 4th pipeline, control PLC controller makes coolant supplement system
System supplements coolant to blend tank, subsequently coolant is delivered in some microtomes by the 5th pipeline by finished pot.
A kind of above-mentioned sapphire and silicon chip diamond wire section coolant integrated sewage treatment method, wherein, described sheet frame pressure
The air inlet air pressure of filter>12kg, reversely charging air pressure force value 4 ~ 6kg.
A kind of above-mentioned sapphire and silicon chip diamond wire section coolant integrated sewage treatment method, wherein, described precision mistake
It is provided with secondary filter cylinder in filter tank, in described secondary filter cylinder, is provided with the filter bag of aperture 200um, once filtered removal cold
But the fine particle in liquid, is provided with adsorbent resin layer and activated carbon adsorption layer in described precise filtering tank, carry out secondary filter and go
Except the metal ion in coolant.
A kind of above-mentioned sapphire and silicon chip diamond wire section coolant integrated sewage treatment method, wherein, described precision mistake
Be provided with alkalinity acidity tester, conductivity measuring instrument, cod detector in filter tank, described alkalinity acidity tester, conductivity measuring instrument,
Cod detector is all electrically connected with PLC.
A kind of above-mentioned sapphire and silicon chip diamond wire section coolant integrated sewage treatment method, wherein, described holding vessel
Be equipped with agitating device in blend tank, to coolant stirring and evenly mixing.
A kind of above-mentioned sapphire and silicon chip diamond wire section coolant integrated sewage treatment method, wherein, described holding vessel,
Precise filtering tank, blend tank and finished pot are provided with LOAD CELLS and liquid level display, and described LOAD CELLS and liquid level show
Show that device is all electrically connected with PLC.
A kind of above-mentioned sapphire and silicon chip diamond wire section coolant integrated sewage treatment method, wherein, described first pipe
It is equipped with electromagnetic valve and water pump on road, the second pipeline, muddy water bypass line, the 3rd pipeline, the 4th pipeline and the 5th pipeline, described
Electromagnetic valve and water pump are all electrically connected with PLC.
A kind of above-mentioned sapphire and silicon chip diamond wire section coolant integrated sewage treatment method, wherein, described coolant
Replenishment system includes coolant holding vessel, infusion pump and telltale, and described infusion pump is electrically connected with PLC, described warns
Device is connected with liquid level sensor, and described liquid level sensor is arranged in coolant holding vessel.
Beneficial effects of the present invention are：
The coolant integrated form control method that the present invention provides, can be applicable in sapphire and the diamond wire slicing processes of silicon chip,
And according to microtome production capacity matching unit quantity and storage weight, the dust that section machining process is produced is integrated with coolant
Formula control and remove, do not pollute integral cutting environment, make cooling liquid energy formed recycle, reduces cost, during with PLC control
Device processed controls operation, improves automatization and treatment effeciency, makes the coolant quality of every microtome be in same level, raising is cut
Tablet stability, thus improving processing quality quality, reducing equipment fault and switching time, reduce cost of goods manufactured, reduces water
The environmental pollution processing.
Brief description
Fig. 1 is schematic flow sheet of the present invention.
(in figure, microtome 1, the first pipeline 2, holding vessel 3, the second pipeline 4, muddy water bypass line 5, filter press 6,
3rd pipeline 7, the 4th pipeline 8, precise filtering tank 9, secondary filter cylinder 10, adsorbent resin layer 11, activated carbon adsorption layer 12, filters
Bag 13, finished fluid management system 14, blend tank 15, finished pot 16, PLC 17, coolant replenishment system 18, the 5th pipeline
19, coolant holding vessel 20, infusion pump 21, agitating device 22, electromagnetic valve 23, water pump 24).
Specific embodiment
Below in conjunction with the accompanying drawings the specific embodiment of the present invention is described further.
A kind of sapphire and silicon chip diamond wire section coolant integrated sewage treatment method, its processing method is as follows：
According to microtome production capacity matching unit quantity and storage weight, some microtomes are passed through the first pipeline and holding vessel phase
Even, holding vessel is connected with filter press with muddy water bypass line by the second pipeline, filter press is passed through the 3rd and manages
Road is connected with precise filtering tank, and precise filtering tank is connected with finished fluid management system by the 4th pipeline, described secondary filter
It is provided with secondary filter cylinder, adsorbent resin layer and activated carbon adsorption layer in tank, in described secondary filter cylinder, be provided with the mistake of aperture 200um
Filter bag, is provided with alkalinity acidity tester, conductivity measuring instrument, cod detector in described precise filtering tank；
Described finished fluid management system includes blend tank, finished pot and PLC, described blend tank respectively with blend tank and
PLC is connected, and is provided with coolant replenishment system between described blend tank and PLC, and described finished pot passes through the 5th
Pipeline is connected with some microtomes；
Described coolant replenishment system includes coolant holding vessel, infusion pump and telltale, described infusion pump and PLC electricity
Connect, described telltale is connected with liquid level sensor, and described liquid level sensor is arranged in coolant holding vessel；
Described holding vessel, precise filtering tank, blend tank and finished pot are provided with LOAD CELLS and liquid level display, described storage
It is equipped with agitating device, described first pipeline, the second pipeline, muddy water bypass line, the 3rd pipeline, the 4th pipe in tank and blend tank
It is equipped with water pump and electromagnetic valve on road and the 5th pipeline, described LOAD CELLS, liquid level display, alkalinity acidity tester, conductance
Rate analyzer, cod detector, electromagnetic valve, water pump are all electrically connected with PLC.
（1）The discarded coolant that microtome is discharged is delivered to by holding vessel by the first pipeline, by agitating device to cooling
Liquid is continuously stirred；
（2）Control electromagnetic valve to open by PLC, the coolant in holding vessel is delivered to by filter press by the second pipeline
In machine, the air inlet air pressure controlling filter press is 15kg, and reversely charging air pressure force value 5kg carries out filter pressing and removes consolidating in coolant
Body garbage, when clear water in pressure-filtering process, coolant is conveyed into holding vessel from muddy water bypass line；
（3）Electromagnetic valve is controlled to open by PLC, the coolant conveying after being processed through filter press by the 3rd pipeline
To precise filtering tank, the fine particle removing in coolant is once filtered by filter bag, by adsorbent resin layer and activated carbon
Adsorption layer carries out the metal ion that secondary filter removes in coolant, and passes through alkalinity acidity tester, conductivity measuring instrument, cod
PH value in detector detection coolant, electrical conductivity and cod value；
（4）Control electromagnetic valve to open by PLC, by the 4th pipeline, the coolant processing through precise filtering tank is delivered to
Blend tank, continuously stirred to coolant by agitating device, the liquid level according to pH value, electrical conductivity, cod value, LOAD CELLS shows
Show device show value, control PLC controller makes coolant holding vessel supplement coolant to blend tank by infusion pump, works as level sensing
When device transmitter liquid level is less than coolant storage tank volume 1/4, telltale is warned, and subsequently will be cooled down by the 5th pipeline by finished pot
Liquid is delivered to step（1）In microtome.
The present invention can form coolant and recycle, during beneficial to improving processing quality quality, reducing equipment fault and switching
Between, reduce cost of goods manufactured, reduce water process environmental pollution.
The above, the only present invention preferably specific embodiment, but protection scope of the present invention is not limited thereto,
Any those familiar with the art the invention discloses technical scope in, the change or replacement that can readily occur in,
All should cover within the scope of the present invention.Therefore, protection scope of the present invention should be with the protection domain of claims
It is defined.
Claims (8)
1. a kind of sapphire and silicon chip diamond wire section coolant integrated sewage treatment method, it is characterized by, its processing method is such as
Under：
（1）Some microtomes are connected with holding vessel by the first pipeline, discarded cooling microtome discharged by the first pipeline
Liquid is delivered to holding vessel；
（2）Holding vessel is connected with filter press with muddy water bypass line by the second pipeline, by the second pipeline by holding vessel
Interior coolant is delivered in filter press, carry out filter pressing remove coolant in solid waste, when in pressure-filtering process not
When clear water occurs, coolant is conveyed into holding vessel from muddy water bypass line；
（3）Filter press is connected with precise filtering tank by the 3rd pipeline, by the 3rd pipeline will be through filter press at
Coolant after reason is delivered to precise filtering tank, carries out secondary filter and removes fine particle and metal ion in coolant；
（4）Precise filtering tank is connected with finished fluid management system by the 4th pipeline, described finished fluid management system includes adjusting
Distribution tank, finished pot and PLC, described blend tank is connected with blend tank and PLC respectively, described blend tank and PLC
It is provided with coolant replenishment system, some microtomes that described finished pot passes through in the 5th pipeline step (1) are connected between controller,
The coolant processing through precise filtering tank is delivered to by blend tank by the 4th pipeline, control PLC controller makes coolant supplement system
System supplements coolant to blend tank, subsequently coolant is delivered in some microtomes by the 5th pipeline by finished pot.
2. a kind of sapphire and silicon chip diamond wire is cut into slices coolant integrated sewage treatment method as claimed in claim 1, and it is special
Levy as the air inlet air pressure of described filter press>12kg, reversely charging air pressure force value 4 ~ 6kg.
3. a kind of sapphire and silicon chip diamond wire is cut into slices coolant integrated sewage treatment method as claimed in claim 1, and it is special
Levy as being provided with secondary filter cylinder in described precise filtering tank, being provided with the filter bag of aperture 200um in described secondary filter cylinder, enter
Row once filters the fine particle removing in coolant, is provided with adsorbent resin layer and activated carbon adsorption in described precise filtering tank
Layer, carries out secondary filter and removes the metal ion in coolant.
4. a kind of sapphire and silicon chip diamond wire is cut into slices coolant integrated sewage treatment method as claimed in claim 1, and it is special
Levy as being provided with alkalinity acidity tester, conductivity measuring instrument, cod detector, described acid-base value test in described precise filtering tank
Instrument, conductivity measuring instrument, cod detector are all electrically connected with PLC.
5. a kind of sapphire and silicon chip diamond wire is cut into slices coolant integrated sewage treatment method as claimed in claim 1, and it is special
Levy as being equipped with agitating device in described holding vessel and blend tank, to coolant stirring and evenly mixing.
6. a kind of sapphire and silicon chip diamond wire is cut into slices coolant integrated sewage treatment method as claimed in claim 1, and it is special
Levy as described holding vessel, precise filtering tank, blend tank and finished pot are provided with LOAD CELLS and liquid level display, described title
Retransmit sensor and liquid level display is all electrically connected with PLC.
7. a kind of sapphire and silicon chip diamond wire is cut into slices coolant integrated sewage treatment method as claimed in claim 1, and it is special
Levy as being equipped with electricity on described first pipeline, the second pipeline, muddy water bypass line, the 3rd pipeline, the 4th pipeline and the 5th pipeline
Magnet valve and water pump, described electromagnetic valve and water pump are all electrically connected with PLC.
8. a kind of sapphire and silicon chip diamond wire is cut into slices coolant integrated sewage treatment method as claimed in claim 1, and it is special
Levy as described coolant replenishment system includes coolant holding vessel, infusion pump and telltale, described infusion pump and PLC
Electrical connection, described telltale is connected with liquid level sensor, and described liquid level sensor is arranged in coolant holding vessel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610845719.4A CN106378876B (en) | 2016-09-23 | 2016-09-23 | A kind of sapphire and silicon wafer are sliced coolant liquid integrated sewage treatment method with diamond wire |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610845719.4A CN106378876B (en) | 2016-09-23 | 2016-09-23 | A kind of sapphire and silicon wafer are sliced coolant liquid integrated sewage treatment method with diamond wire |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106378876A true CN106378876A (en) | 2017-02-08 |
| CN106378876B CN106378876B (en) | 2019-02-05 |
Family
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| CN201610845719.4A Active CN106378876B (en) | 2016-09-23 | 2016-09-23 | A kind of sapphire and silicon wafer are sliced coolant liquid integrated sewage treatment method with diamond wire |
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Cited By (10)
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| CN108162215A (en) * | 2017-12-28 | 2018-06-15 | 洛阳阿特斯光伏科技有限公司 | A kind of diamond wire sliced crystal silicon production line and its water system |
| CN108164020A (en) * | 2017-12-28 | 2018-06-15 | 洛阳阿特斯光伏科技有限公司 | A kind of diamond wire sliced crystal silicon production line uses water method and water system |
| CN108162216A (en) * | 2017-12-28 | 2018-06-15 | 洛阳阿特斯光伏科技有限公司 | A kind of diamond wire sliced crystal silicon production line and its water system |
| CN108975533A (en) * | 2018-07-20 | 2018-12-11 | 江苏吉星新材料有限公司 | A kind of Sapphire Substrate intellectualization of factories sewage water treatment method |
| CN108972920A (en) * | 2018-07-20 | 2018-12-11 | 江苏吉星新材料有限公司 | A kind of central liquid supply system and its technique of intelligence sapphire slices system |
| CN109203265A (en) * | 2017-06-29 | 2019-01-15 | 赛锡科技（镇江）有限公司 | Buddha's warrior attendant wire cutting liquid online recycling and supply great circulation system |
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| CN111015988A (en) * | 2019-12-25 | 2020-04-17 | 无锡荣能半导体材料有限公司 | Method for recycling silicon wafer cutting cooling slurry |
| CN111195991A (en) * | 2018-11-16 | 2020-05-26 | 胜高股份有限公司 | Method for manufacturing wafer, method for evaluating quality of reusable slurry for wire saw, and method for evaluating quality of used slurry for wire saw |
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| CN108162215A (en) * | 2017-12-28 | 2018-06-15 | 洛阳阿特斯光伏科技有限公司 | A kind of diamond wire sliced crystal silicon production line and its water system |
| CN108164020A (en) * | 2017-12-28 | 2018-06-15 | 洛阳阿特斯光伏科技有限公司 | A kind of diamond wire sliced crystal silicon production line uses water method and water system |
| CN108162216A (en) * | 2017-12-28 | 2018-06-15 | 洛阳阿特斯光伏科技有限公司 | A kind of diamond wire sliced crystal silicon production line and its water system |
| CN108975533A (en) * | 2018-07-20 | 2018-12-11 | 江苏吉星新材料有限公司 | A kind of Sapphire Substrate intellectualization of factories sewage water treatment method |
| CN108972920A (en) * | 2018-07-20 | 2018-12-11 | 江苏吉星新材料有限公司 | A kind of central liquid supply system and its technique of intelligence sapphire slices system |
| CN108975533B (en) * | 2018-07-20 | 2021-09-03 | 江苏吉星新材料有限公司 | Intelligent sewage treatment method for sapphire substrate factory |
| CN111195991A (en) * | 2018-11-16 | 2020-05-26 | 胜高股份有限公司 | Method for manufacturing wafer, method for evaluating quality of reusable slurry for wire saw, and method for evaluating quality of used slurry for wire saw |
| CN110919545A (en) * | 2019-12-20 | 2020-03-27 | 宁波韵升磁体元件技术有限公司 | Neodymium iron boron product grinds chamfer and concentrates solution feed system |
| CN111015988A (en) * | 2019-12-25 | 2020-04-17 | 无锡荣能半导体材料有限公司 | Method for recycling silicon wafer cutting cooling slurry |
| CN112624404A (en) * | 2020-12-08 | 2021-04-09 | 句容协鑫光伏科技有限公司 | Regeneration and utilization system of buddha's warrior attendant line coolant liquid |
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